Systems and methods for membrane-assisted thermal jetting of non-solvent-based and non-aqueous-based liquids

Abstract

An actuator device includes an actuator chamber with a heating device and an actuator fluid therein. The actuator device also includes a jetting chamber with a nozzle and containing a fluid. The jetting chamber is positioned adjacent to the actuator chamber and a flexible membrane is positioned between the actuator chamber and the jetting chamber to form a surface of the actuator chamber and a surface of the jetting chamber and thereby separates the actuator fluid from the fluid. Activation of the heating device causes the actuator fluid to nucleate and form a vapor bubble within the actuator chamber that actuates the flexible membrane to eject a drop of the fluid via the nozzle. Unlike conventional thermal inkjet technology, the actuator fluid and the fluid may be different and the fluid may be non-aqueous and / or non-solvent based.

Description

PATENT Client Ref. 2024-149-02 Practitioner Docket No. UOCO.P2097WO / 00646566SYSTEMS AND METHODS FOR MEMBRANE- ASSISTED THERMAL JETTING OF NON-SOL VENT-BASED AND NON-AQUEOUS-BASED LIQUIDSRELATED APPLICATION

[0001] The application claims priority to US Patent Application Serial Number 63 / 683,640, titled “Actuation Devices and Methods, Membrane-Assisted Thermal Inkjet Droplet Ejection for Complex Inks, and Associated Methods,” filed August 15, 2024, and incorporated herein by reference in its entirety.BACKGROUND

[0002] Modem inkjet technology, now four decades old, has revolutionized the manipulation and deposition of extremely small fluid volumes, on the order of picoliters, finding applications in reproducing images, 3D printing, printed electronics, and bioprinting. The formation of inkjet droplets is continuous, where a liquid stream is forced through small nozzles to form droplets, or digital, known as drop-on-demand, where droplets of ink are generated only when needed. While continuous inkjet has been used in high-volume production such as organic light emitting diodes and marking and coding, drop-on-demand inkjet is more cost-effective, compact, and versatile finding use in multi-material 3D printing, single cell isolation, as well as marking and coding. Despite its commercial success, material limitations inherent to drop generation physics continue to be a long-standing issue in drop-on- demand inkjet technologies.SUMMARY

[0003] One aspect of the present embodiments includes the realization that conventional thermal inkjet (TIJ) drop-on-demand (DOD) technology almost exclusively relies on solvent-based or aqueous-based inks that nucleate a strong vapor bubble and withstand high temperatures, thereby making the technology unavailable for other types of liquid. The present embodiment solve this problem by providing a membrane-assisted thermal inkjet droplet ejector that includes a impermeable flexible membrane between (a) a source chamber, filled with liquid that nucleates a strong vapor bubble and withstand high temperatures, and (b) a jetting chamber with a nozzle that is filled with a TIJ-incompatible liquid. Advantageously, the membrane-assisted thermal inkjet droplet ejector removes the solvent-based or aqueous-1LEGAL\79425645\2PATENTClient Ref. 2024-149-02 Attorney Docket No. UOCO.P2097WO / 00646566 based limitation on the ejected liquid, thereby opening the technology for use in many different fields.

[0004] In certain embodiments, the techniques described herein relate to an actuator device for thermal jetting of non-solvent-based and non-aqueous-based fluids, including: an actuator chamber having a heating device and an actuator fluid therein; a jetting chamber forming a nozzle and having a fluid therein; a flexible membrane forming one surface of the actuator chamber and positioned between the actuator chamber and the jetting chamber to separate the actuator fluid and the fluid; and wherein activation of the heating device causes the actuator fluid to nucleate and form a vapor bubble within the actuator chamber that actuates the flexible membrane and ejects a drop of the fluid via the nozzle.

[0005] In certain embodiments, the techniques described herein relate to a method for manufacturing an actuator device for membrane-assisted thermal jetting of a jetting fluid, including: providing an actuator chamber having a heating device to heat an actuator fluid in the actuator chamber; providing a flexible membrane forming a surface of the actuator chamber, the flexible membrane actuating in response to a vapor bubble formed in the actuator fluid in response to activation of the heating device; and providing a jetting chamber on an opposite side of the flexible membrane from the actuator chamber, the flexible membrane forming a surface of the jetting chamber.

[0006] In certain embodiments, the techniques described herein relate to a method for thermal drop-on-demand inkjet printing, including providing a control signal to activate a heating device within an actuator chamber to cause an actuator fluid in the actuating chamber to nucleate and form a vapor bubble that actuates a flexible membrane forming one surface of the actuator chamber and one surface of a jetting chamber positioned on the other side of the flexible membrane from the actuator chamber such that the actuation of the flexible membrane causes a drop of a fluid in the jetting chamber to eject from a nozzle of the jetting chamber.BRIEF DESCRIPTION OF THE FIGURES

[0007] FIG. 1 is a schematic diagram illustrating one example actuator device, in embodiments.

[0008] FIG. 2 is a schematic diagram illustrating example operation of the actuator device of FIG. 1, in embodiments.

[0009] FIG. 3 is a perspective exploded view of an actuator device illustrating example construction, in embodiments.2LEGAL\79425645\2PATENTClient Ref. 2024-149-02Attorney Docket No. UOCO.P2097WO / 00646566

[0010] FIG. 4 is a time sequence of bubble-dynamics images illustrating simulated operation of the actuator device of FIG. 1, in embodiments.

[0011] FIG. 5 is a flowchart illustrating one example method for manufacturing an actuator device, in embodiments.

[0012] FIG. 6 is a diagram illustrating membrane vibrometry dynamics of the flexible membrane of FIG. 3 as a results of fluid structure interaction (FSI) motion caused by the vapor bubble, in embodiments.DESCRIPTION

[0013] Thermal inkjet (TIJ) drop-on-demand (DOD) technology ejects a droplet of ink by rapidly heating a micro-resistor to cause explosive boiling. Throughout the last four decades, material limitations have been a long-standing issue in TIJ technology. Existing TIJ-compatible inks almost exclusively rely on solvent-based or aqueous-based inks that can nucleate a strong vapor bubble and withstand high temperatures, limiting material choices. Systems and methods herein disclose a new membrane-assisted thermal jet (MA-TJ) architecture that may be used for jetting many different types of fluid beyond solvent-based or aqueous-based liquids. The MA-TJ architecture improves on conventional TIJ-based architectures, and when used for drop ejection of ink may be referred to as “membrane-assisted thermal inkjet (MA-TIJ).” Advantageously, the MA-TJ architecture allows for drop ejection of previously TIJ- incompatible inks and other liquids. At least some embodiments of this MA-TJ architecture consists of two chambers, a source chamber filled with an actuator fluid (e.g., water) and a micro-resistor that causes strong vapor bubble nucleation of the actuator fluid, and a jetting chamber that may be filled with a letting liquid (e.g., a TIJ-incompatible ink or other liquid), where the source chamber and the jetting chamber are separated by a thin, elastic membrane. A high-pressure vapor bubble in the source chamber deflects the thin, elastic membrane which ejects a droplet of the fluid from the jetting chamber. Fluid- structure interaction modeling as well as high-speed imaging of jetting provides evidence of the MA-TJ architecture’s ability to jet dimethyl sulfoxide and mineral oil (e.g., previously TIJ-incompatible inks and liquids), thereby extending the range of materials that may be thermally jetted.

[0014] FIG. 1 is a schematic diagram illustrating one example actuator device 100, in embodiments. FIG. 2 is a schematic diagram illustrating example operation of actuator device 100 of FIG. 1, in embodiments. FIGs. 1 and 2 are best viewed together with the following description.3LEGAL\79425645\2PATENTClient Ref. 2024-149-02Attorney Docket No. UOCO.P2097WO / 00646566

[0015] Actuator device 100 includes an actuator chamber 102 having actuator fluid 104 therein and a jetting chamber 112 having a fluid 114 therein (which may also be referred to as a “jettable fluid”). Actuator chamber 102 and jetting chamber 112 are positioned adjacent to one another. Actuator device 100 further includes a flexible membrane 106 positioned between actuator chamber 102 and jetting chamber 112 to form a surface of actuator chamber 102 and a surface of jetting chamber 112. Flexible membrane 106 thereby separates actuator fluid 104 from jettable fluid 114. In certain embodiments, flexible membrane 106 is one of a mylar film and a Kapton film with a thickness between 2.5pm and 5pm. Flexible membrane 106 may be made of other material and have different membrane characteristics without departing from scope hereof.

[0016] Actuator fluid 104 is a highly vaporizable fluid, such as water or any other highly vaporizable fluid. In certain embodiments, actuator fluid 104 is water, since it is efficiently vaporized by heating device 108. Actuator device 100 includes a heating device 108 in, or thermally coupled with, the actuator chamber 102 that provides Joule heat to actuator fluid 104 under control of a controller 128. Heating device 108 may be a micro-resistor or a resistive heater. When activated (e.g., turned on, or caused to heat at or above a specific heat threshold) by controller 128, heating device 108 causes actuator fluid 104 to nucleate and form a vapor bubble 204 that rapidly deflects 206 flexible membrane 106 as shown in FIG. 2. A deflection distance 208 of flexible membrane 106 is between 10pm and 60pm, for example. Once heating device 108 is deactivated, vapor bubble 204 reduces over time and deflection of flexible membrane 106 reduces to return to a nominal original state (e.g., flat). Controller 128 may generate a control signal as a pulse 202 that causes heating device 108 to heat briefly, where a width of pulse 202 may be controlled to define the amount of heat generated by heating device 108. Alternatively, controller 128 may control an amplitude (e.g., voltage) of pulse 202 to define the amount of heat generated by heating device 108. Jetting chamber 112 forms an nozzle 116 (e.g., an aperture or opening) that allows jettable fluid 114 to exit in response to flexing of flexible membrane 106, thereby resulting in jetting of a drop 208 of jettable fluid 114 via nozzle 116.

[0017] Advantageously, by including flexible membrane 106, actuator fluid 104 may be different from jettable fluid 114, and allows jettable fluid 114 to be a non-aqueous fluid or a non-solvent based fluid. Accordingly, actuator device 100 is able to “jet” non-aqueous fluids and non-solvent based fluids, which is particularly advantageous over conventional thermal ink-jetting that does not work for non-aqueous and non-solvent based fluids, since heating4LEGAL\79425645\2PATENT Client Ref. 2024-149-02 Attorney Docket No. UOCO.P2097WO / 00646566 device 108 cannot cause the non-aqueous and non-solvent based fluids to nucleate and create vapor bubble 204.

[0018] In certain embodiments, actuator device 100 includes a second heating device 118 that is thermally coupled with jetting chamber 112 and / or jettable fluid 114. Second heating device 118 may be controlled by controller 128 to heat jettable fluid 114 to an operable temperature. For example, when jettable fluid 114 is an additive manufacturing material, second heating device 118 may heat the additive manufacturing material to a low viscosity state such that it may be ejected via nozzle 116. It should be appreciated that non-aqueous fluids may include one or more of oil, mineral oil, oil-based fluids, high-viscosity resin, resinbased fluids, fluids for use in additive manufacturing, and the like. In embodiments, the term “high-viscosity” means fluids having a viscosity measurement greater than or equal to twenty centipoise.

[0019] Actuator device 100 may also include an actuator fluid reservoir 120 fluidically coupled to actuator chamber 102 via an inlet 122. Actuator fluid reservoir 120 may store additional actuator fluid 104 to maintain actuator fluid 104 at an operable level threshold within actuator chamber 102, should actuator fluid 104 evaporates or otherwise reduce. Actuator device 100 may also include jettable fluid reservoir 124 fluidly coupled to jetting chamber 112 via an inlet 126. Jettable fluid reservoir 124 may store additional jettable fluid 114 such that as jettable fluid 114 is ejected from nozzle 116 (or otherwise reduces by evaporation etc.), the level of jettable fluid 114 within jetting chamber 112 is maintained at an operable threshold level.

[0020] In certain embodiments, elements of actuator device 100 are encapsulated in a cartridge, where the cartridge may include multiple actuator devices 100. In additional or alternative embodiments, actuator fluid reservoir 120 and jettable fluid reservoir 124 are located external the cartridge, and inlets 122, 126 fluidically couple with an inlet port on an outer portion of the cartridge. As such, actuator fluid reservoir 120 and / or jettable fluid reservoir 124 may be a component of the inkjet printing device or external thereto.

[0021] In certain embodiments, multiple actuator chambers 102, jetting chambers 112 (and associated nozzles 116) may be formed on a single substrate and are controlled by a single controller 128. That is, the single controller 128 may be communicatively coupled to control a plurality of heating devices 108 located in a plurality of actuator chambers located on a single substrate or on different substrates. Alternatively or additionally, a single controller 128 may be communicatively coupled to control a plurality of heating devices 108 located in a plurality5LEGAL\79425645\2PATENT Client Ref. 2024-149-02 Attorney Docket No. UOCO.P2097WO / 00646566 of actuator chambers 102 formed on different substrates, whereby controller 128 mechanically actuates a plurality of different jetting chambers.

[0022] It should be appreciated that actuator device 100 may be used in non-inkjet applications. For example, actuator device 100 may be used in a pump system where actuator chamber 102, actuator fluid 104, flexible membrane 106, and heating device 108 operate as a pump to move fluid through a second chamber (e.g., jetting chamber 112). Actuator device 100 therefore may be used in fluid-movement applications where actuation of flexible membrane 106 operates to pump a high-particle liquid (e.g., blood) from an inlet to an outlet of jetting chamber 112.

[0023] FIG. 3 is a perspective exploded view of an actuator device 300 illustrating example construction, in embodiments. Actuator device 300 may represent actuator device 100 of FIG. 1. Resistor 308 and electrical connection areas 309(1) and 309(2) are formed on a surface of an actuator substrate 301. Actuator substrate 301 is a glass substrate, in embodiments. Resistor 308 represents heating device 108. Resistor 308 may be formed by one or more of a deposition process, an etching process, and a laser cutting process on actuator substrate 301.

[0024] An actuator chamber substrate 310 is processed to form two reservoirs 312 coupled to straight channels 314 and 316 of a “U” shaped channel 318, where opposite ends of straight channels 314 and 316 are joined together by a curved channel 320. An actuator chamber 322 is formed by a portion of straight channel 314. In embodiments, actuator chamber substrate 310 is an adhesive layer coupled to actuator substrate 301. For example, a 3M 467MP two-sided adhesive film is laser cut to form a 57pm “U” shaped channel 318.

[0025] A flexible membrane 330 forms two apertures 332 that align with reservoirs 312 of actuator chamber substrate 310. Flexible membrane 330 attaches to (e.g., adheres to) actuator chamber substrate 310 to form a surface of actuator chamber 322. In embodiments, actuator chamber substrate 310 is an adhesive layer coupled between actuator substrate 301 and flexible membrane 330.

[0026] Jetting chamber substrate 340 forms a channel 342 and a channel 344 that are joined, where channel 342 is positioned such that a jetting chamber 348 overlays actuator chamber 322 and channel 344 forms a reservoir 346. Jetting chamber substrate 340 secures to flexible membrane 330.

[0027] A capping layer 350 is positioned over jetting chamber substrate 340 to enclose channels 342 and 344 and reservoir 346 and jetting chamber 348. Capping layer 350 forms an6LEGAL\79425645\2PATENTClient Ref. 2024-149-02Attorney Docket No. UOCO.P2097WO / 00646566 nozzle 352 (e.g., an aperture or opening) that aligns with jetting chamber 348 and an aperture 354 that aligns with reservoir 346.

[0028] Channels 314, 316, 320, 342, and 344 may have any shape without departing from the scope hereof. Any portion of “U” shaped channel 318 may be positioned over resistor 308 to form actuator chamber 322 in that portion, whereby jetting chamber 348 and nozzle 352 are aligned accordingly. For example, a portion of straight channel 316 may be positioned over resistor 308 to form actuator chamber 322 therein, whereby channel 342 of jetting chamber substrate 340 and nozzle 352 of capping layer 350 are similarly aligned. Actuator device 300 is assembled by coupling actuator chamber substrate 310 with actuator substrate 301, coupling flexible membrane 330 with actuator chamber substrate 310, coupling jetting chamber substrate 340 with flexible membrane 330, and coupling capping layer 350 with jetting chamber substrate 340 such that nozzle 352, jetting chamber 348 (channel 342), and actuator chamber 322 (straight channel 314) are aligned, in a direction normal to actuator substrate 301, with resistor 308. When resistor 308 is activated to form a microbubble (e.g., vapor bubble 204) in actuator chamber 322, the microbubble interaction with flexible membrane 330 causes a portion of a jettable fluid (e.g., jettable fluid 114) within jetting chamber 348 to eject through nozzle 352.

[0029] Aperture 354 of capping layer 350 provides an inlet to reservoir 346 for filling reservoir 346 with the jettable fluid. Aperture 354 may also couple with an external reservoir of jettable fluid and thereby provide a feed of the jettable fluid into reservoir 346. Apertures 332 provides inlets for reservoirs 312 and allow filling of reservoirs 312 with an actuator fluid (e.g., actuator fluid 104). It should be appreciated that aperture 354 may couple with an external reservoir (not shown) that feeds second fluid into channel 344.

[0030] Actuator device 300 shown in FIG. 3 is just one example of how actuator device 100 may be manufactured and does not show all components shown in FIG. 1. It should be appreciated that aspects of actuator device 100 not shown in FIG. 3 may be embodied in the example of actuator device 300 without departing from scope hereof. Actuator device 100 and actuator device 300 may have additional features without departing from scope hereof.

[0031] Referring back to FIG. 1, electronic components (e.g., heating device 108 and / or second heating device 118) are electrically coupled with controller 128. Controller 128 may be included with actuator device 100, or may be external to actuator device 100 and be a component of another device. For example, controller 128 may be a component of an inkjet printer, where actuator device 100 (or actuator device 300) are components of a thermal drop-7LEGAL\79425645\2PATENT Client Ref. 2024-149-02 Attorney Docket No. UOCO.P2097WO / 00646566 on-demand printing cartridge. For example, the cartridge may include electrical contacts for coupling heating device 108 and / or second heating device 118 to the externally-located controller 128. Controller 128 may include a processor and memory with machine-readable instructions executable by the processor to control functionality of actuator device 100 and / or actuator device 300 discussed herein.

[0032] FIG. 4 is a time sequence of bubble-dynamics images 402(l)-(8) illustrating simulated operation of actuator device 100 of FIG. 1, in embodiments. Images 402 are generated by modelling of actuator device 100 using a simulator (e.g., OpenFOAM). Images 402(l)-(8) represent times of O.Ops, l.Ops, 3. Ops, 5. Ops, 9. Ops, 13. Ops, 16.5ps, and 22. Ops, respectively, and depict ejection of jettable fluid 114 into air 404 from nozzle 116 as a result of coupling between vapor bubble 204, heating device 108, and the fluid structure interaction (FSI) motion of flexible membrane 106. In this simulation, nozzle 116 is at a nominal distance of 57pm from flexible membrane 106 and both actuator fluid 104 and jettable fluid 114 are water. As shown, vapor bubble 204 reaches a maximum size at image 402(5) (e.g., 9. Ops) resulting in maximum FSI motion of flexible membrane 106 and ejection of jettable fluid 114 from nozzle 116.

[0033] FIG. 5 is a flowchart illustrating one example method 500 for manufacturing an actuator device, in embodiments. Method 500 is for example used to manufacture actuator device 100 of FIG. 1 and actuator device 300 of FIG. 3.

[0034] At block 510, method 500 provides an actuator chamber having a heating device to heat an actuator fluid in the actuator chamber. In one example of block 510, actuator chamber 102 is provided with heating device 108. In another example of block 510, actuator substrate 301 is provided with resistor 308 thereon via a laser cutting process of actuator substrate 301 and actuator chamber substrate 310 is added to actuator substrate 301 to provide actuator chamber 102. In certain embodiments, actuator chamber substrate 310 is an adhesive layer that is laser cut to form “U” shaped channel 318.

[0035] At block 520, method 500 provides a flexible membrane forming a surface of the actuator chamber, the flexible membrane actuating in response to activation of the heating device causing actuator fluid in the actuator chamber to form a vapor bubble. In one example of block 520, flexible membrane 106 is provided. In another example of block 520, flexible membrane 330 is provided in which it is adhered to actuator substrate 301 directly or via adhesive layer forming first actuator chamber substrate 310.8LEGAL\79425645\2PATENT Client Ref. 2024-149-02 Attorney Docket No. UOCO.P2097WO / 00646566

[0036] At block 530, method 500 provides a jetting chamber on an opposite side of the flexible membrane from the actuator chamber, the flexible membrane forming a surface of the jetting chamber. In one example of 530, jetting chamber 112 is provided. In another example of 530, jetting chamber substrate 340 is applied to flexible membrane 330, and capping layer 350 is applied over jetting chamber substrate 340.

[0037] Method 500 may include providing other features discussed above with respect to FIGs. 1 and 2. For example, method 500 may include providing a second heater such as second heating device 118. As another alternative or additional example, method 500 may include providing actuator fluid 104 and / or jettable fluid 114. As another alternative or additional example, method 500 may include providing one or more reservoirs, such as actuator fluid reservoir 120 and / or jettable fluid reservoir 124. Actuator fluid reservoir 120 may be coupled to channel 302 via a hole within adhesive layer that is further filled with adhesive.

[0038] The systems and methods herein provide distinct advantages over traditional inkjet systems and processes by allowing thermal ink-jetting of a non-aqueous fluid is particularly advantageous because typically thermal ink-jetting is not available with nonaqueous fluids because a heating device cannot create a vapor bubble with typical non-aqueous fluids used in thermal inkjet processes. However, by separating the non-aqueous fluid from the heating element, and using the flexible membrane discussed herein, the system is able to “jet” non-aqueous fluids.

[0039] Actuator device 100 and actuator device 300 provide distinct advantages over conventional thermal inkjet printing devices by reducing heating element fouling. By separating actuator fluid 104 from jettable fluid 114, jettable fluid 114 does not contact heating device 108, and since actuator fluid 104 is not jetted, actuator fluid 104 is not required to have the same characteristics as jettable fluid 114. In conventional thermal inkjet solutions, depending on the density of protein composition of the jettable fluid, it would foul the heating device. However, the present embodiments prevent fouling of heating device 108, since actuator fluid 104 if separate from jettable fluid 114 and actuator fluid 104 may be selected to minimize degradation of heating device 108 and is not required to share any of the properties of jettable fluid 114. By protecting heating device 108 from jettable fluid 114, an operation life of actuator device 100 is extended. For example, a resistor in a conventional inkjet cartridge becomes fouled with ink over time and may break after about 10k firings, However, since actuator device 100 separates actuator fluid 104 and jettable fluid 114, actuator fluid 104 may contain fewer heater fouling contaminants. For example, when actuator fluid 104 is water,9LEGAL\79425645\2PATENT Client Ref. 2024-149-02 Attorney Docket No. UOCO.P2097WO / 00646566 heating device 108 to last for a million or more firings as compared to conventional thermal inkjet devices.

[0040] In certain embodiments, actuator chamber 102 and actuator fluid 104 operate as a pump that may be used to move fluid through jetting chamber 112 (e.g., to move ink through a printer). Since actuator fluid 104 is separate from jettable fluid 114, actuator device 100 may pump different types of fluid and is not restricted by the requirement that the pumped fluid be one of aqueous or solvent-based.

[0041] FIG. 6 is a diagram illustrating membrane vibrometry dynamics of flexible membrane 306 of FIG. 3 as a results of fluid structure interaction (F SI) motion caused by vapor bubble 204, in embodiments. In this embodiment, heating device 308 is a 500pm x 1000pm resistor formed in “U” shaped channel 318. Particularly, FIG. 6 shows propagation of a wavefront across flexible membrane 306 and illustrates the affect of a greater voltage to resistor 308.

[0042] Changes may be made in the above methods and systems without departing from the scope hereof. It should thus be noted that the matter contained in the above description or shown in the accompanying drawings should be interpreted as illustrative and not in a limiting sense. The following claims are intended to cover all generic and specific features described herein, as well as all statements of the scope of the present method and system, which, as a matter of language, might be said to fall therebetween.Combination of Features

[0043] Features described above as well as those claimed below may be combined in various ways without departing from the scope hereof. The following enumerated examples illustrate some possible, non-limiting combinations:

[0044] (Al) An actuator device for thermal jetting of non-solvent-based and nonaqueous-based fluids, including: an actuator chamber having a heating device and an actuator fluid therein; a jetting chamber forming a nozzle and having a jettable fluid therein; a flexible membrane forming one surface of the actuator chamber and positioned between the actuator chamber and the jetting chamber to separate the actuator fluid and the jettable fluid; and wherein activation of the heating device causes the actuator fluid to nucleate and form a vapor bubble within the actuator chamber that actuates the flexible membrane and ejects a drop of the jettable fluid via the nozzle.10LEGAL\79425645\2PATENTClient Ref. 2024-149-02 Attorney Docket No. UOCO.P2097WO / 00646566

[0045] (A2) In embodiments of (Al), the actuator fluid is different from the jettable fluid.

[0046] (A3) In either of embodiments (Al) or (A2), the jettable fluid is a non-aqueous fluid.

[0047] (A4) In any of embodiments of (A1)-(A3), the jettable fluid is a non-solvent fluid.

[0048] (A5) In any of the embodiments (A1)-(A4), the jettable fluid is one or more of oil, mineral oil, oil-based fluids, high-viscosity resin, resin-based fluids, and fluids for use in additive manufacturing.

[0049] (A6) Any of the embodiments (A1)-(A5) further including a second heating device coupled with the jetting chamber to heat the jettable fluid.

[0050] (A7) In any of the embodiments (A1)-(A6), the actuator chamber having an inlet coupled to an actuator fluid reservoir for maintaining an amount of the actuator fluid within the actuator chamber.

[0051] (A8) In any of the embodiments (A1)-(A7), the jetting chamber having an inlet coupled to a jettable fluid reservoir for maintaining an amount of the jettable fluid within the jetting chamber.

[0052] (A9) In any of the embodiments (A1)-(A8), the jettable fluid reservoir refilling the jetting chamber with the jettable fluid.

[0053] (A10) In any of the embodiments (A1)-(A9), the actuator fluid is water.

[0054] (Al 1) In any of the embodiments (Al)-(A10), the flexible membrane is a mylar film.

[0055] (A12) In any of the embodiments (Al)-(Al l), the flexible membrane has a thickness of 2.5 micrometers.

[0056] (A13) In any of the embodiments (A1)-(A12), the actuator chamber including: an actuator substrate having the heating device formed thereon or embedded therein; and an actuator chamber substrate forming a fluid channel for containing the actuator fluid, the actuator chamber substrate being between the actuator substrate and the flexible membrane.

[0057] (A14) In any of the embodiments (A1)-(A13), the actuator substrate is a glass substrate.

[0058] (Al 5) In any of the embodiments (A1)-(A14), the actuator chamber substrate is an adhesive layer coupled to the actuator substrate and the flexible membrane.11LEGAL\79425645\2PATENTClient Ref. 2024-149-02 Attorney Docket No. UOCO.P2097WO / 00646566

[0059] (A16) In any of the embodiments (A1)-(A15), the heating device is a resistor formed during an etching process of the actuator substrate.

[0060] (A17) In any of the embodiments (A1)-(A16), the heating device being a resistor.

[0061] (Al 8) In any of the embodiments (A1)-(A7), the actuator chamber, the jetting chamber, and the flexible membrane are part of a thermal drop-on-demand printing cartridge.

[0062] (Bl) A method for manufacturing an actuator device for membrane-assisted thermal jetting of a jetting fluid, comprising: providing an actuator chamber having a heating device to heat an actuator fluid in the actuator chamber; providing a flexible membrane forming a surface of the actuator chamber, the flexible membrane actuating in response to a vapor bubble formed in the actuator fluid in response to activation of the heating device; and providing a jetting chamber on an opposite side of the flexible membrane from the actuator chamber, the flexible membrane forming a surface of the jetting chamber.

[0063] (Cl) A method for thermal drop-on-demand inkjet printing, comprising providing a control signal to activate a heating device within an actuator chamber to cause an actuator fluid in the actuator chamber to nucleate and form a vapor bubble that actuates a flexible membrane forming one surface of the actuator chamber and one surface of a jetting chamber positioned on an opposite side of the flexible membrane from the actuator chamber such that the actuation of the flexible membrane causes a drop of a jettable fluid in the jetting chamber to eject from a nozzle of the jetting chamber.12LEGAL\79425645\2

Claims

PATENTClient Ref. 2024-149-02Attorney Docket No. UOCO.P2097WO / 00646566CLAIMSWhat is claimed is:

1. An actuator device for thermal jetting of non-solvent-based and non-aqueous-based fluids, comprising: an actuator chamber having a heating device and an actuator fluid therein; a jetting chamber forming a nozzle and having a fluid therein; a flexible membrane forming one surface of the actuator chamber and positioned between the actuator chamber and the jetting chamber to separate the actuator fluid and the fluid; and wherein activation of the heating device causes the actuator fluid to nucleate and form a vapor bubble within the actuator chamber that actuates the flexible membrane and ejects a drop of the fluid via the nozzle.

2. The actuator device of claim 1, the actuator fluid being different from the fluid.

3. The actuator device of claim 1, the fluid being a non-aqueous fluid.

4. The actuator device of claim 1, the fluid being a non-solvent fluid.

5. The actuator device of claim 1, the fluid being one or more of oil, mineral oil, oil-based fluids, high-viscosity resin, resin-based fluids, and fluids for use in additive manufacturing.

6. The actuator device of claim 1, further comprising a second heating device coupled with the jetting chamber to heat the fluid.

7. The actuator device of claim 1, the actuator chamber having an inlet coupled to an actuator fluid reservoir for maintaining an amount of the actuator fluid within the actuator chamber.

8. The actuator device of claim 1, the jetting chamber having an inlet coupled to a fluid reservoir for maintaining an amount of the fluid within the jetting chamber.13LEGAL\79425645\2PATENT Client Ref. 2024-149-02 Attorney Docket No. UOCO.P2097WO / 006465669. The actuator device of claim 8, the fluid reservoir refilling the jetting chamber with the fluid.

10. The actuator device of claim 1, the actuator fluid being water.

11. The actuator device of claim 1, the flexible membrane being a mylar film.

12. The actuator device of claim 11, the flexible membrane having a thickness of 2.5 micrometers.

13. The actuator device of claim 1, the actuator chamber comprising: an actuator substrate having the heating device formed thereon or embedded therein; and an actuator chamber substrate forming a fluid channel for containing the actuator fluid, the actuator chamber substrate being between the actuator substrate and the flexible membrane.

14. The actuator device of claim 13, the actuator substrate being a glass substrate.

15. The actuator device of claim 13, the actuator chamber substrate being an adhesive layer coupled to the actuator substrate and the flexible membrane.

16. The actuator device of claim 13, the heating device being a resistor formed during an etching process of the actuator substrate.

17. The actuator device of claim 1, the heating device being a resistor.

18. The actuator device of claim 1, the actuator chamber, the jetting chamber, and the flexible membrane being part of a thermal drop-on-demand printing cartridge.

19. A method for manufacturing an actuator device for membrane-assisted thermal jetting of a jetting fluid, comprising: providing an actuator chamber having a heating device to heat an actuator fluid in the actuator chamber;14LEGAL\79425645\2PATENT Client Ref. 2024-149-02 Attorney Docket No. UOCO.P2097WO / 00646566 providing a flexible membrane forming a surface of the actuator chamber, the flexible membrane actuating in response to a vapor bubble formed in the actuator fluid in response to activation of the heating device; and providing a jetting chamber on an opposite side of the flexible membrane from the actuator chamber, the flexible membrane forming a surface of the jetting chamber.

20. A method for thermal drop-on-demand inkjet printing, comprising providing a control signal to activate a heating device within an actuator chamber to cause an actuator fluid in the actuator chamber to nucleate and form a vapor bubble that actuates a flexible membrane forming one surface of the actuator chamber and one surface of a jetting chamber positioned on an opposite side of the flexible membrane from the actuator chamber such that the actuation of the flexible membrane causes a drop of a fluid in the jetting chamber to eject from a nozzle of the jetting chamber.15LEGAL\79425645\2

Images