Mass flow controller for measuring and regulating gas

Abstract

The present application discloses a mass flow controller for measuring and regulating gas, comprising a pipe, and further comprising a housing fixedly mounted on the pipe. The housing is provided with: a plurality of measurement plates, the pipe being provided with notches allowing for embedding of the measurement plates; and a triangular groove for guiding movement of the plurality of measurement plates. In the mass flow controller for measuring and regulating gas provided in the present application, during a measurement operation, gas flows through the pipe, and the measurement plates are embedded in the notches on the pipe; heat sources on the measurement plates generate heat to heat the gas flow in the pipe, temperature sensors on two sides of the heat sources measure the temperature of the gas on the two sides, and a gas flow rate is determined on the basis of a temperature difference; after the measurement plates has operated for a time period, a driving disc rotates to drive the plurality of measurement plates to move along the triangular groove, so that the measurement plates are sequentially embedded in the pipe for operation; and a cleaning block cleans the measurement plates pushed out of the pipe to prevent the measurement plates from being corroded by the gas.

Description

A mass flow controller for measuring and controlling gases Technical Field

[0001] This utility model relates to the field of flow detection technology, and more specifically to a mass flow controller for measuring and controlling gases. Background Technology

[0002] An air flow sensor is a device commonly used to detect the flow rate of gas in pipelines.

[0003] According to publication (announcement) number CN112577554A, published (announcement) date 2021-03-30, a high-sensitivity flow detector for liquids or gases is disclosed. This high-sensitivity flow detector for liquids or gases is used for flow detection in liquid or gas channels. It includes: a pipe body, the ends of which are bolted together; the outer end of the pipe body is connected to an external straight pipe section via a flange; plugs are respectively provided on opposite end faces of the pipe body; an orifice plate is provided between two plugs; multiple nozzles are provided on the orifice plate; a gas / liquid channel communicating with the inside of the pipe body is provided on one side of the plug; and a buffer groove communicating with the inside of the pipe body is provided on the inner wall of the other side of the plug. Two buffer grooves correspond to two gas / liquid channels and are symmetrically distributed on both sides of the orifice plate; the two gas / liquid channels are respectively connected to gas / liquid pipes; and nozzles are provided on the gas / liquid pipes. In this invention, fluid enters the pipe body through an external straight pipe section, passes through multiple nozzles on the orifice plate, and impacts a horizontal plate via nozzles on the gas / liquid pipe. This impacts a stroke rod, causing it to rotate and impact a high-sensitivity triboelectric generator sensor. By converting flow changes into electrical signal strength, the sensor reacts quickly. The electrical signal is generated by the back-and-forth separation of the elastic layer and the friction layer, avoiding direct impact on the triboelectric generator assembly and reducing the risk of damage to the sensor. This effectively improves sensitivity and protects the triboelectric generator assembly. A buffer groove in the sidewall of the plug guides the fluid impacting the front and rear sides of the orifice plate, reducing the impact force on the front and rear end faces of the orifice plate and reducing the turbulent shear force on the constricted and enlarged sections of the nozzles, thus extending the service life of the orifice plate.

[0004] In the prior art, including the aforementioned patent, MAMS chips are commonly used for detecting gas flow. They heat the airflow in the pipe by heating the heat source in the middle, while temperature sensors on both sides of the heat source detect the temperature of the gas on both sides and determine the gas flow based on the temperature difference. However, this type of chip has high requirements for gas quality during use and can only be used for detecting clean and dry gas. If the gas quality is poor, the chip is easily corroded. Utility Model Content

[0005] The purpose of this invention is to provide a mass flow controller for measuring and controlling gases, aiming to solve the above-mentioned problems.

[0006] To achieve the above objectives, this utility model provides a mass flow controller for measuring and controlling gas, including a pipeline and a housing fixedly installed on the pipeline, wherein the housing is provided with:

[0007] Multiple detection plates are provided, and the pipe has notches for the detection plates to be inserted.

[0008] A triangular groove is used to guide the movement of the multiple detection plates;

[0009] A drive disc, which rotates to move and alternately embed the plurality of detection plates into the pipe;

[0010] A cleaning block that moves back and forth to clean the detection plate.

[0011] Preferably, there are two detection plates, and each detection plate is provided with a tenon that matches the triangular groove.

[0012] Preferably, a pair of movable pieces are hinged to the triangular groove to limit the direction of movement of the tenon.

[0013] Preferably, a rocker arm is rotatably mounted on the drive disk, a plug rod is slidably mounted on the rocker arm, and a groove adapted to the plug rod is provided on the detection plate.

[0014] Preferably, the mounting shell is provided with a magnet that magnetically engages with the insertion rod, and the magnet has a groove adapted to the insertion rod.

[0015] Preferably, the drive disc is provided with a rotating ring, the rotating ring is provided with a guide groove, a slider is slidably arranged in the guide groove, a pull rope is provided between the slider and the cleaning block, and a spring is provided between the cleaning block and the housing.

[0016] In the above technical solution, the mass flow controller for measuring and controlling gas provided by this utility model has the following beneficial effects: When performing detection work, gas flows from the pipeline, the detection plate is embedded in the notch on the pipeline, the heat source on the detection plate heats up to heat the airflow in the pipeline, and at the same time, the temperature sensors on both sides of the heat source detect the temperature of the gas on both sides and determine the gas flow rate according to the temperature difference. After the detection plate has been working for a period of time, the drive disc rotates to drive multiple detection plates to move along the triangular groove, so that the detection plates are embedded in the pipeline in turn to work, and the cleaning block cleans the detection plate pushed out of the pipeline to prevent the detection plate from being corroded by the gas. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0018] Figure 1 is a schematic diagram of the overall structure provided in an embodiment of the present utility model;

[0019] Figure 2 is a schematic diagram of the internal structure provided in an embodiment of the present utility model;

[0020] Figure 3 is a schematic diagram of the triangular groove provided in an embodiment of the present invention;

[0021] Figure 4 is a schematic diagram of the side unfolded structure of the rotating ring provided in an embodiment of this utility model.

[0022] Explanation of reference numerals in the attached figures:

[0023] 1. Housing; 11. Detection plate; 111. Cleaning block; 112. Tenon block; 113. Triangular groove; 114. Movable piece; 115. Slider; 116. Pull rope; 12. Drive disc; 121. Rocker arm; 122. Insert rod; 123. Magnet; 124. Rotating ring; 125. Guide groove; 2. Pipe. Detailed Implementation

[0024] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0025] As shown in Figures 1-4, a mass flow controller for measuring and controlling gas includes a pipeline 2 and a housing 1 fixedly installed on the pipeline 2. The housing 1 is provided with:

[0026] Multiple detection plates 11 are provided, and the pipe 2 has notches for the detection plates 11 to be inserted.

[0027] Triangular groove 113 is used to guide the movement of multiple detection plates 11;

[0028] Drive disk 12, drive disk 12 rotates to move multiple detection plates 11 and insert them into pipe 2 in turn;

[0029] Cleaning block 111 moves back and forth to clean detection plate 11.

[0030] Specifically, in the above embodiment, the detection plate 11 is provided with a MAMS chip, the housing 1 is provided with a motor for driving the drive disk 12 to rotate, and the cleaning block 111 is specifically a combination of a rigid mounting plate and a sponge, with the sponge in contact with the detection plate 11.

[0031] Furthermore, during the detection process, gas flows from pipe 2, and the detection plate 11 is embedded in the notch on pipe 2. The heat source on the detection plate 11 heats the gas flow in pipe 2. At the same time, temperature sensors on both sides of the heat source detect the temperature of the gas on both sides and determine the gas flow rate based on the temperature difference. After the detection plate 11 has been working for a period of time, the drive disk 12 rotates to drive multiple detection plates 11 to move along the triangular groove 113, so that the detection plates 11 are embedded in pipe 2 in turn to work. The cleaning block 111 cleans the detection plates 11 pushed out of pipe 2 to prevent the detection plates 11 from being corroded by the gas.

[0032] In the above technical solution, during the detection work, gas flows from the pipe 2, the detection plate 11 is embedded in the notch on the pipe 2, the heat source on the detection plate 11 heats up the airflow in the pipe 2, and at the same time, the temperature sensors on both sides of the heat source detect the temperature of the gas on both sides and determine the gas flow rate based on the temperature difference. After the detection plate 11 has been working for a period of time, the drive disk 12 rotates to drive multiple detection plates 11 to move along the triangular groove 113, so that the detection plates 11 are embedded in the pipe 2 in turn to work, and the cleaning block 111 cleans the detection plate 11 pushed out of the pipe 2 to prevent the detection plate 11 from being corroded by the gas.

[0033] As a further embodiment of this utility model, there are two detection plates 11. Each detection plate 11 has a tenon 112 that matches a triangular groove 113. A pair of movable pieces 114 are hinged to the triangular groove 113 to limit the movement direction of the tenon 112. A rocker arm 121 is rotatably mounted on the drive disc 12, and a plug rod 122 is slidably mounted on the rocker arm 121. A groove matching the plug rod 122 is formed on the detection plate 11. A magnet 123 that magnetically engages with the plug rod 122 is provided on the mounting shell, and a sliding groove matching the plug rod 122 is formed on the magnet 123. A torsion spring is provided between the movable piece 114 and the housing 1. After one detection plate 11 has been in operation for a period of time... The motor drives the drive disc 12 and rotating ring 124 to rotate. The guide groove 125 on the rotating ring 124 pushes the slider 115 closer to the drive disc 12. The slider 115 drives the cleaning block 111 to move away from the detection plate 11 through the pull rope 116, and gradually separates from the detection plate 11. The spring between the cleaning block 111 and the housing 1 is compressed. The drive disc 12 drives the rocker arm 121 to move. The rocker arm 121 pushes the detection plate 11 closer to the pipe 2 and pushes the working detection plate 11 to separate from the pipe 2 until the detection plate 11 is directly facing the notch on the pipe 2. At this time, the magnet 123 attracts the insertion rod 122. Under the traction of the magnet 123, the insertion rod 122 connects with the side plate. Separating and embedding into the groove on the magnet 123, the drive disk 12 continues to rotate, and the rocker arm 121 pushes the insertion rod 122 to move until the insertion rod 122 is directly aligned with the groove on another detection plate 11. The insertion rod 122 separates from the magnet 123, and the insertion rod 122 is embedded into the groove inside the test tube of the detection plate 11 under the action of the spring. The insertion rod 122 pushes the detection plate 11 to move, and the tenon block 112 on the detection plate 11 pushes the movable piece 114, making the movable piece 114 give way to its movement space until the tenon block 112 moves to the end of the horizontal part of the triangular groove 113. The movable piece 114 separates from the tenon block 112, and the torsion spring of the movable piece 114 resets it, and the triangular groove 113 is repositioned. The horizontal portion of 3 is sealed off, and the drive disc 12 continues to rotate. The drive disc 12 drives the tenon 112 to move along the inclined portion of the triangular groove 113 via the rocker arm 121. This pushes another movable piece 114, which makes the movable piece 114 give way to the space for the tenon 112 to move until the tenon 112 moves to the starting point. The movable piece 114 of the magnet 123, under the action of the torsion spring, seals the inclined portion of the triangular groove 113. The slider 115 also moves away from the drive disc 12 along the guide groove 125 on the rotating ring 124. The pull rope 116 is released, and the cleaning block 111 is inserted into the groove on the detection plate 11 located at the starting point under the push of the spring, cleaning the detection plate 11.

[0034] As a further embodiment of this utility model, a rotating ring 124 is provided on the drive disk 12, and a guide groove 125 is provided on the rotating ring 124. A slider 115 is slidably disposed in the guide groove 125. A pull rope 116 is provided between the slider 115 and the cleaning block 111, and a spring is provided between the cleaning block 111 and the housing 1. After a detection plate 11 has been working for a period of time, the motor drives the drive disk 12 and the rotating ring 124 to rotate. The guide groove 125 on the rotating ring 124 pushes the slider 115 closer to the drive disk 12. The slider 115 drives the cleaning block 111 away from the detection plate 111 through the pull rope 116. The measuring plate 11 moves in the direction of the test plate 11 and gradually separates from the detection plate 11. The spring between the cleaning block 111 and the housing 1 is compressed. The drive disk 12 drives the rocker arm 121 to move. The rocker arm 121 pushes the detection plate 11 closer to the pipe 2 and pushes the working detection plate 11 to separate from the pipe 2 until the detection plate 11 is directly facing the notch on the pipe 2. At this time, the magnet 123 attracts the insertion rod 122. Under the traction of the magnet 123, the insertion rod 122 separates from the connecting plate and is embedded in the groove on the magnet 123. The drive disk 12 continues to rotate, and the rocker arm 121 pushes the insertion rod 122 to move until the insertion rod 122 is directly facing the notch on the pipe 2. On another detection plate 11, the insertion rod 122 separates from the magnet 123. Under the action of a spring, the insertion rod 122 embeds into the groove inside the test tube of the detection plate 11. The insertion rod 122 pushes the detection plate 11 to move. The tenon 112 on the detection plate 11 pushes the movable piece 114, causing the movable piece 114 to make room for its movement until the tenon 112 moves to the end of the horizontal portion of the triangular groove 113. The movable piece 114 then separates from the tenon 112, and resets under the action of the torsion spring, sealing the horizontal portion of the triangular groove 113. The drive disc 12 continues to rotate. The rocker arm 121 drives the tenon 112 to move along the inclined portion of the triangular groove 113, which pushes another movable piece 114, making the movable piece 114 give way to the space for the tenon 112 to move until the tenon 112 moves to the starting point. The movable piece 114 of the magnet 123, under the action of the torsion spring, seals the inclined portion of the triangular groove 113. The slider 115 also moves away from the drive disk 12 along the guide groove 125 on the rotating ring 124. The pull rope 116 is released, and the cleaning block 111 is pushed by the spring and embedded in the groove on the detection plate 11 located at the starting point to clean the detection plate 11.

[0035] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A mass flow controller for measuring and controlling gas, comprising a pipeline (2), characterized in that, It also includes a housing (1) fixedly installed on the pipe (2), and the housing (1) is provided with: Multiple detection plates (11) are provided, and the pipe (2) has notches for the detection plates (11) to be inserted; A triangular groove (113) is used to guide the movement of the plurality of the detection plates (11); A drive disk (12) rotates to move the plurality of detection plates (11) and alternately embed them into the pipe (2). A cleaning block (111) moves back and forth to clean the detection plate (11).

2. The mass flow controller for measuring and controlling gas according to claim 1, characterized in that, The number of the detection plates (11) is two, and the detection plates (11) are provided with tenons (112) that are adapted to the triangular groove (113).

3. A mass flow controller for measuring and controlling gas according to claim 2, characterized in that, A pair of movable pieces (114) are hinged to the triangular groove (113) to limit the direction of movement of the tenon (112).

4. A mass flow controller for measuring and controlling gas according to claim 3, characterized in that, A rocker arm (121) is rotatably mounted on the drive disk (12), and a plug rod (122) is slidably mounted on the rocker arm (121). A groove adapted to the plug rod (122) is provided on the detection plate (11).

5. A mass flow controller for measuring and controlling gas according to claim 4, characterized in that, The mounting housing is provided with a magnet (123) that magnetically engages with the insertion rod (122), and the magnet (123) has a groove adapted to the insertion rod (122).

6. A mass flow controller for measuring and controlling gas according to claim 5, characterized in that, A rotating ring (124) is provided on the drive disk (12), and a guide groove (125) is provided on the rotating ring (124). A slider (115) is slidably arranged in the guide groove (125). A pull rope (116) is provided between the slider (115) and the cleaning block (111), and a spring is provided between the cleaning block (111) and the housing (1).

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