Probe and inspection device

Abstract

This probe includes: a base end part; a tip part that comes into contact with an inspection object; a first beam part that is connected to the base end part; and a second beam part that is connected to the first beam part and supports the tip part. The first beam part has a structure for increasing deflection of the first beam part when the tip part is pushed into the inspection object.

Description

Probes and Inspection Equipment

[0001] The present invention relates to a probe and an inspection device.

[0002] 2. Description of the Related Art In recent years, various probes have been developed for use in inspection devices such as probe cards for inspecting inspection objects such as wafers.

[0003] Patent Document 1 describes a conductive probe. The probe includes a cantilever portion. The cantilever portion has an attachment portion attached to a post of a substrate, a solid section, and a hollow section. The solid section is located between the attachment portion and the hollow section.

[0004] U.S. Patent No. 9,052,342

[0005] The probe may include a beam portion that supports the tip portion that comes into contact with the test object. In the probe, there is a need to reduce the load on the beam portion that supports the tip portion.

[0006] One object of the present invention is to reduce the load on a beam that supports the tip of a probe. Other objects of the present invention will become apparent from the description of this specification.

[0007] One aspect of the present invention is a probe comprising: a base end; a tip end that contacts an object to be inspected; a first beam portion connected to the base end; and a second beam portion connected to the first beam portion and supporting the tip end, wherein the first beam portion has a structure for increasing the deflection of the first beam portion when the tip end is pressed into the object to be inspected.

[0008] One aspect of the present invention is an inspection device including the above-described probe.

[0009] One aspect of the present invention is a probe comprising: a base end; a tip end that contacts an object to be inspected; a first beam portion connected to the base end; and a second beam portion connected to the first beam portion and supporting the tip end, wherein the first beam portion is at least partially folded back from a portion connected to the base end of the first beam portion to a portion connected to the second beam portion of the first beam portion toward a side away from the side where the object to be inspected is located.

[0010] According to the above aspect of the present invention, the load on the beam supporting the tip of the probe can be reduced.

[0011] FIG. 1 is a schematic side view of a probe card according to an embodiment. FIG. 2 is a side view of a probe according to an embodiment. FIG. 3 is a side view of a probe according to an embodiment in a state where a tip portion is pressed into a pad of a test object. FIG. 4 is a side view for explaining an elastic beam portion according to another example of an embodiment. FIG. 5 is a side view for explaining an elastic beam portion according to yet another example of an embodiment. FIG. 6 is a side view of a probe according to a first modified example in a state where a tip portion is pressed into a pad of a test object. FIG. 7 is a side view of a probe according to a second modified example. FIG. 8 is a side view of a probe according to a second modified example in a state where a tip portion is pressed into a pad of a test object.

[0012] Hereinafter, embodiments and modifications of the present invention will be described with reference to the drawings. In all the drawings, similar components are designated by similar reference numerals, and descriptions thereof will be omitted as appropriate.

[0013] FIG. 1 is a schematic side view of a probe card 10 according to an embodiment.

[0014] To explain the directions, the X direction and the Z direction are defined. The Z direction is a direction parallel to the direction from one side where the probe card 10 is located to the other side where the test object 20 to be tested by the probe card 10 is located. The direction indicated by the arrow of the Z axis indicating the Z direction is the direction from the side where the test object 20 is located to the side where the probe card 10 is located. The X direction is one of the horizontal directions perpendicular to the Z direction.

[0015] Hereinafter, the +X side refers to the side indicated by the X-axis arrow indicating the X direction, and the −X side refers to the side opposite to the side indicated by the X-axis arrow indicating the X direction. Hereinafter, the +Z side refers to the side indicated by the Z-axis arrow indicating the Z direction, and the −Z side refers to the side opposite to the side indicated by the Z-axis arrow indicating the Z direction.

[0016] As shown in FIG. 1 , a probe card 10 according to the embodiment includes a test board 100, a relay board 200, and a plurality of probes 300. The probe card 10 is used to test a test object 20. The test object 20 is, for example, a wafer. The test object 20 is arranged substantially perpendicular to the Z direction. The test board 100 is arranged substantially perpendicular to the Z direction. The test board 100 is, for example, a rigid board such as a printed circuit board (PCB). The relay board 200 is located on the −Z side of the test board 100 and arranged substantially perpendicular to the Z direction. The relay board 200 is, for example, a rigid board such as a ceramic board. In the example shown in FIG. 1 , four probes 300 are schematically illustrated aligned in the X direction. The four probes 300 are located on the −Z side of the relay board 200. The number and arrangement of the probes 300 provided on the relay board 200 are not limited to the example shown in FIG. 1 .

[0017] Fig. 2 is a side view of the probe 300 according to the embodiment. In Fig. 2, a part of the test object 20 and a part of the relay board 200 are shown together with the probe 300 according to the embodiment.

[0018] 2, the probe 300 according to the embodiment has a base end portion 310, a tip end portion 320, and a beam portion 330. In the embodiment, the base end portion 310 and the beam portion 330 are integrally formed as a conductor such as a metal.

[0019] 2, the base end 310 is located on the -Z side surface of the relay board 200. The base end 310 is a hump that protrudes from the -Z side surface of the relay board 200. The conductor patterns (not shown) provided on the +Z side surface of the base end 310 and the -Z side surface of the relay board 200 are joined to each other by a joining means such as soldering, adhesive, welding, or pressure welding, and are electrically connected to each other. Alternatively, the base end 310 may be formed directly on the conductor pattern (not shown) provided on the -Z side surface of the relay board 200 by, for example, electroforming.

[0020] 2, the tip portion 320 is provided at the tip of the -Z side of a tip beam portion 338, which will be described later. The tip portion 320 and the tip beam portion 338 may be formed integrally. The tip portion 320 is directed toward a pad 22 provided on the surface of the inspection object 20 on the +Z side. When the tip portion 320 comes into contact with the pad 22, the pad 22 and the tip portion 320 are electrically connected to each other.

[0021] The beam portion 330 supports the tip portion 320 on the base end portion 310. With the pad 22 and the tip portion 320 in contact with each other, the pad 22 and the conductor pattern provided on the −Z side surface of the relay board 200 are electrically connected to each other via the probe 300. As shown in FIG. 2 , the beam portion 330 includes an elastic beam portion 332, a connecting beam portion 334, a horizontal support beam portion 336 a, an inclined support beam portion 336 b, and a tip beam portion 338.

[0022] As shown in FIG. 2, the elastic beam portion 332 includes a horizontal extension portion 332a, a vertical extension portion 332b, and an inclined extension portion 332c.

[0023] As shown in FIG. 2 , the horizontal extension portion 332a includes a first end 333a connected to a side surface perpendicular to the Z direction of the −Z side end of the base end portion 310, and a second end 333b spaced from the first end 333a toward the +X side, away from the −X side where the base end portion 310 is located. The horizontal extension portion 332a extends in a substantially linear manner in a direction non-parallel to the Z direction from the first end 333a to the second end 333b. In the example shown in FIG. 2 , the first end 333a corresponds to the −X side end of the horizontal extension portion 332a, and the second end 333b corresponds to the +X side end of the horizontal extension portion 332a. In the example shown in FIG. 2 , the horizontal extension portion 332a extends in a substantially linear manner in a direction substantially parallel to the X direction from the first end 333a to the second end 333b.

[0024] 2, the horizontal extending portion 332a has a longitudinal direction that is approximately parallel to the X direction from the first end 333a to the second end 333b. Therefore, the horizontal extending portion 332a is configured to be elastically flexible due to the longitudinal shape of the horizontal extending portion 332a. Specifically, the horizontal extending portion 332a is configured such that when the horizontal extending portion 332a is flexible so that the second end 333b is displaced toward the +Z side, the second end 333b is biased toward the -Z side.

[0025] As shown in FIG. 2 , the vertical extension portion 332b includes a third end 333c connected to the second end 333b and a fourth end 333d spaced from the third end 333c toward the +Z side, away from the −Z side where the inspection target 20 is located. The vertical extension portion 332b extends in a substantially linear manner in a direction non-perpendicular to the Z direction from the third end 333c to the fourth end 333d. In the example shown in FIG. 2 , the third end 333c corresponds to the −Z side end of the vertical extension portion 332b, and the fourth end 333d corresponds to the +Z side end of the vertical extension portion 332b. In the example shown in FIG. 2 , the vertical extension portion 332b extends in a substantially linear manner in a direction substantially parallel to the Z direction from the third end 333c to the fourth end 333d.

[0026] As shown in FIG. 2, the inclined extension portion 332c includes a fifth end 333e connected to the fourth end 333d and a sixth end 333f spaced from the fifth end 333e toward the −X side where the base end 310 is located. The inclined extension portion 332c extends in a substantially linear manner from the fifth end 333e toward the sixth end 333f in a direction non-parallel to the Z direction. In the example shown in FIG. 2, the fifth end 333e corresponds to the +X side end of the inclined extension portion 332c, and the sixth end 333f corresponds to the −X side end of the inclined extension portion 332c. In the example shown in FIG. 2, the inclined extension portion 332c extends in a substantially linear manner in a direction inclined toward the −Z side from the fifth end 333e to the sixth end 333f.

[0027] As shown in FIG. 2 , the elastic beam portion 332 is at least partially folded back from the horizontal extending portion 332a to the inclined extending portion 332c toward the +Z side, away from the −Z side where the inspection target 20 is located. Hereinafter, unless otherwise specified, the folded back portion of the elastic beam portion 332 refers to the folded back portion of the elastic beam portion 332 from the horizontal extending portion 332a to the inclined extending portion 332c. The folded back portion of the elastic beam portion 332 is configured to be elastically flexible due to the shape of the folded back portion of the elastic beam portion 332. Specifically, the folded back portion of the elastic beam portion 332 is configured such that the sixth end portion 333f is biased toward the +Z side when the folded back portion of the elastic beam portion 332 is bent so that the sixth end portion 333f is displaced toward the −Z side.

[0028] As shown in FIG. 2 , the connection beam 334 connects the elastic beam 332 to a plurality of support beams, including a horizontal support beam 336 a and an inclined support beam 336 b. The connection beam 334 includes a seventh end 335 a connected to the sixth end 333 f and an eighth end 335 b spaced from the seventh end 335 a toward the +Z side, away from the −Z side where the object under test 20 is located. The connection beam 334 extends substantially linearly from the seventh end 335 a to the eighth end 335 b in a direction non-perpendicular to the Z direction. In the example shown in FIG. 2 , the seventh end 335 a corresponds to the −Z side end of the connection beam 334, and the eighth end 335 b corresponds to the +Z side end of the connection beam 334. In the example shown in FIG. 2, the connecting beam portion 334 extends substantially linearly in a direction substantially parallel to the Z direction from the seventh end 335a to the eighth end 335b.

[0029] As shown in FIG. 2 , the horizontal support beam 336a includes a ninth end 337a connected to a portion between the seventh end 335a and the eighth end 335b of the connecting beam 334, and a tenth end 337b spaced from the ninth end 337a toward the +X side, away from the −X side where the base end 310 is located. The horizontal support beam 336a extends in a substantially linear manner from the ninth end 337a to the tenth end 337b in a direction non-parallel to the Z direction. In the example shown in FIG. 2 , the ninth end 337a corresponds to the −X side end of the horizontal support beam 336a, and the tenth end 337b corresponds to the +X side end of the horizontal support beam 336a. In the example shown in FIG. 2 , the horizontal support beam 336a extends in a substantially linear manner from the ninth end 337a to the tenth end 337b in a direction substantially parallel to the X direction.

[0030] 2, the horizontal support beam 336a has a longitudinal direction that is approximately parallel to the X direction from the ninth end 337a to the tenth end 337b. Therefore, the horizontal support beam 336a is configured to be elastically flexible due to the longitudinal shape of the horizontal support beam 336a. Specifically, the horizontal support beam 336a is configured such that the tenth end 337b is biased toward the −Z side when the horizontal support beam 336a is bent so that the tenth end 337b is displaced toward the +Z side.

[0031] As shown in FIG. 2 , the inclined support beam 336b includes an eleventh end 337c connected to the eighth end 335b and a twelfth end 337d spaced from the eleventh end 337c toward the +X side, away from the −X side where the base end 310 is located. The inclined support beam 336b extends in a substantially linear manner in a direction non-parallel to the Z direction from the eleventh end 337c to the twelfth end 337d. In the example shown in FIG. 2 , the eleventh end 337c corresponds to the −X side end of the inclined support beam 336b, and the twelfth end 337d corresponds to the +X side end of the inclined support beam 336b. In the example shown in FIG. 2 , the inclined support beam 336b extends in a substantially linear manner in a direction inclined toward the −Z side from the eleventh end 337c to the twelfth end 337d.

[0032] 2, the inclined support beam 336b has a longitudinal direction that is inclined with respect to the X direction from the eleventh end 337c to the twelfth end 337d. Therefore, the inclined support beam 336b is configured to be elastically flexible due to the longitudinal shape of the inclined support beam 336b. Specifically, the inclined support beam 336b is configured such that the twelfth end 337d is biased toward the −Z side when the inclined support beam 336b is in a flexible state so that the twelfth end 337d is displaced toward the +Z side.

[0033] 2, when the tip portion 320 is not pressed into the pad 22 of the test object 20, the inclined support beam 336b is inclined toward the −Z side from the eleventh end 337c to the twelfth end 337d. Therefore, as shown in FIG. 3, which will be described later, even if the tip portion 320 is pressed into the pad 22 of the test object 20 and the inclined support beam 336b is bent so that the twelfth end 337d is displaced toward the +Z side, contact between the −Z side surface of the relay board 200 and the inclined support beam 336b can be suppressed compared to when the inclined support beam 336b is parallel to the X direction. The inclined support beam 336b may extend in a direction substantially parallel to the X direction.

[0034] The tip beam portion 338 includes a thirteenth end 339a connected to the twelfth end 337d and a fourteenth end 339b spaced from the thirteenth end 339a toward the -Z side where the inspection target 20 is located. The tenth end 337b and a portion of the tip beam portion 338 between the thirteenth end 339a and the fourteenth end 339b are connected to each other. The tip beam portion 338 extends in a substantially linear manner in a direction non-perpendicular to the Z direction from the thirteenth end 339a to the fourteenth end 339b. The tip portion 320 is provided at the fourteenth end 339b. Therefore, the horizontal support beam portion 336a and the inclined support beam portion 336b support the tip beam portion 338, thereby supporting the tip portion 320. 2, the thirteenth end 339a corresponds to the +Z side end of the tip beam portion 338, and the fourteenth end 339b corresponds to the −Z side end of the tip beam portion 338. In the example shown in Fig. 2, the tip beam portion 338 extends approximately linearly in a direction approximately parallel to the Z direction from the thirteenth end 339a to the fourteenth end 339b.

[0035] Fig. 3 is a side view of the probe 300 according to the embodiment, in a state where the tip portion 320 is pressed into the pad 22 of the test object 20. Fig. 3 illustrates a part of the test object 20 and a part of the relay board 200, together with the probe 300 according to the embodiment. In the example shown in Fig. 3, the test object 20 is moved to the +Z side with the pad 22 and the tip portion 320 in contact with each other, and the tip portion 320 is pressed into the pad 22 of the test object 20. A known configuration can be used as the configuration for moving the test object 20 to the +Z side.

[0036] 3, when the test object 20 moves toward the +Z side and the tip portion 320 is pressed into the pad 22 of the test object 20, the horizontal support beam portion 336a and the inclined support beam portion 336b bend such that the tenth end 337b and the twelfth end 337d are displaced toward the +Z side. Also, as shown in FIG. 3, when the test object 20 moves toward the +Z side and the tip portion 320 is pressed into the pad 22 of the test object 20, the elastic beam portion 332 also bends such that the second end 333b is displaced toward the +Z side and the sixth end 333f is displaced toward the −Z side. Therefore, compared to a case where the ninth end 337a and the eleventh end 337c are directly connected to the base end portion 310 without the elastic beam portion 332, the deflection of the horizontal support beam portion 336a and the inclined support beam portion 336b when the tip portion 320 is pressed into the pad 22 of the test object 20 can be distributed to the elastic beam portion 332. By distributing the deflection of the horizontal support beam portion 336a and the inclined support beam portion 336b to the elastic beam portion 332, the stress caused by the deflection of the horizontal support beam portion 336a and the inclined support beam portion 336b, i.e., the load of the horizontal support beam portion 336a and the inclined support beam portion 336b, can be distributed to the elastic beam portion 332. By distributing the load of the horizontal support beam portion 336a and the inclined support beam portion 336b to the elastic beam portion 332, the load of the horizontal support beam portion 336a and the inclined support beam portion 336b can be reduced.

[0037] In the embodiment, the folded portion of the elastic beam portion 332 is configured to increase the deflection of the elastic beam portion 332 when the tip portion 320 is pressed into the pad 22 of the test object 20. Specifically, the folded portion of the elastic beam portion 332 can increase the length from the first end 333a to the sixth end 333f of the elastic beam portion 332 within a limited range in the X direction, compared to when the elastic beam portion 332 simply extends only in the X direction, making it easier to deflect the elastic beam portion 332. Therefore, in the embodiment, compared to when the elastic beam portion 332 simply extends only in the X direction, the deflection of the horizontal support beam portion 336a and the inclined support beam portion 336b when the tip portion 320 is pressed into the pad 22 of the test object 20 can be distributed to the elastic beam portion 332, and the load on the horizontal support beam portion 336a and the inclined support beam portion 336b can be reduced.

[0038] The configuration for causing a portion of the elastic beam portion 332 to bend more than the other portions of the elastic beam portion 332 when the tip portion 320 is pressed into the pad 22 of the inspection target 20 is not limited to the folded portion of the elastic beam portion 332 according to the embodiment. For example, the number of folded portions of the elastic beam portion 332 is not limited to one, but may be two or more.

[0039] In the embodiment, compared to when the elastic beam portion 332 simply has a shape extending in one direction, the folded-back portion of the elastic beam portion 332 can increase the length from the first end 333a to the sixth end 333f of the elastic beam portion 332. The longer the length from the first end 333a to the sixth end 333f of the elastic beam portion 332, the more the deflection of the horizontal support beam portion 336a and the inclined support beam portion 336b when the tip portion 320 is pressed into the pad 22 of the inspection object 20 can be distributed to the elastic beam portion 332, thereby reducing the load on the horizontal support beam portion 336a and the inclined support beam portion 336b.

[0040] In the probe 300, the load on the beam portion 330 tends to increase as the amount of pressing of the tip portion 320 into the pad 22 in the Z direction increases. In the embodiment, as described above, the elastic beam portion 332 can reduce the load on the horizontal support beam portion 336a and the inclined support beam portion 336b. Therefore, in the embodiment, the amount of pressing of the tip portion 320 into the pad 22 in the Z direction can be increased in a state where the load on the horizontal support beam portion 336a and the inclined support beam portion 336b is further reduced compared to when the elastic beam portion 332 is not provided.

[0041] In the embodiment, the tip beam 338 is supported by the horizontal support beam 336a and the inclined support beam 336b. Furthermore, the distance in the Z direction between the horizontal support beam 336a and the inclined support beam 336b decreases from the ninth end 337a and the eleventh end 337c toward the tenth end 337b and the twelfth end 337d. Therefore, when the tip portion 320 is pressed into the pad 22 of the test object 20, the horizontal support beam 336a and the inclined support beam 336b can be deflected so that the tip portion 320 is displaced toward the −X side. In other words, when the tip portion 320 is pressed into the pad 22 of the test object 20, the horizontal support beam 336a and the inclined support beam 336b bend so that the tip portion 320 moves in a direction approaching the base end 310.

[0042] In the embodiment, when the tip portion 320 is pressed into the pad 22 of the test object 20, the folded portion of the elastic beam portion 332 bends so that the second end 333b is displaced toward the +Z side and the sixth end 333f is displaced toward the -Z side. Therefore, when the tip portion 320 is pressed into the pad 22 of the test object 20, the folded portion of the elastic beam portion 332 can be bent so that the tip portion 320 is displaced toward the +X side. In other words, when the tip portion 320 is pressed into the pad 22 of the test object 20, the elastic beam portion 332 bends so that the tip portion 320 moves in a direction away from the base end portion 310.

[0043] From the above explanation regarding the deflection of the elastic beam portion 332, the horizontal support beam portion 336a, and the inclined support beam portion 336b, in the embodiment, by at least partially canceling out the displacement of the tip portion 320 toward the +X side by the elastic beam portion 332 and the displacement of the tip portion 320 toward the -X side by the horizontal support beam portion 336a and the inclined support beam portion 336b, it is possible to adjust the displacement in the X direction of the tip portion 320 when the tip portion 320 is pressed into the pad 22 of the object to be inspected 20, i.e., the scrub in the X direction of the tip portion 320.

[0044] Furthermore, in the embodiment, the elastic beam portion 332 is at least partially folded back from the horizontal extending portion 332a to the inclined extending portion 332c toward the +Z side, away from the -Z side where the inspection target 20 is located. Therefore, even if the length from the first end 333a to the sixth end 333f of the elastic beam portion 332 is relatively long to reduce the load on the horizontal support beam portion 336a and the inclined support beam portion 336b, scrubbing of the tip portion 320 toward the +X side by the elastic beam portion 332 can be reduced compared to when the elastic beam portion 332 simply extends linearly without being folded back. Therefore, in the embodiment, the length from the first end 333a to the sixth end 333f of the elastic beam portion 332 can be relatively long while limiting the displacement of the tip portion 320 toward the +X side to a certain range, thereby reducing the load on the horizontal support beam portion 336a and the inclined support beam portion 336b compared to when the elastic beam portion 332 simply extends linearly without being folded back.

[0045] Hereinafter, unless otherwise specified, the expression "the elastic beam portion 332 is folded back toward the +Z side" means that the elastic beam portion 332 is at least partially folded back from the horizontal extending portion 332a to the inclined extending portion 332c toward the +Z side away from the -Z side where the inspection object 20 is located, as shown in Figures 2 and 3 of the embodiment. Hereinafter, unless otherwise specified, the expression "the elastic beam portion 332 is folded back toward the -Z side" means that the elastic beam portion 332 is at least partially folded back from the horizontal extending portion 332a to the inclined extending portion 332c toward the -Z side where the inspection object 20 is located, as shown in Figure 6 described later.

[0046] When the tip portion 320 is pressed into the pad 22 of the test object 20, the displacement of the tip portion 320 toward the +X side caused by the elastic beam portion 332 when the elastic beam portion 332 is folded back toward the +Z side can be made smaller than the displacement of the tip portion 320 toward the +X side caused by the elastic beam portion 332 when the elastic beam portion 332 is folded back toward the −Z side. Therefore, even if the length from the first end 333a to the sixth end 333f of the elastic beam portion 332 is made relatively long to reduce the load on the horizontal support beam portion 336a and the inclined support beam portion 336b, when the elastic beam portion 332 is folded back toward the +Z side, the displacement of the tip portion 320 toward the +X side caused by the elastic beam portion 332 when the tip portion 320 is pressed into the pad 22 of the test object 20 can be reduced compared to when the elastic beam portion 332 is folded back toward the −Z side. Therefore, when the elastic beam portion 332 is folded back toward the +Z side, compared to when the elastic beam portion 332 is folded back toward the -Z side, the length from the first end 333a to the sixth end 333f of the elastic beam portion 332 can be made relatively long while limiting the displacement of the tip portion 320 toward the +X side within a certain range, thereby reducing the load on the horizontal support beam portion 336a and the inclined support beam portion 336b. As will be described later with reference to FIG. 6, the elastic beam portion 332 may be folded back toward the -Z side.

[0047] The structure in which the distance in the Z direction between the horizontal support beam 336a and the inclined support beam 336b decreases from the ninth end 337a and the eleventh end 337c toward the tenth end 337b and the twelfth end 337d is not limited to the structure described above. For example, while the inclined support beam 336b extends in a direction substantially parallel to the X direction, the horizontal support beam 336a may extend substantially linearly in a direction inclined toward the +Z side from the ninth end 337a toward the tenth end 337b. Alternatively, both the horizontal support beam 336a and the inclined support beam 336b may extend substantially linearly in a direction inclined with respect to the X direction toward each other in the Z direction from the ninth end 337a and the eleventh end 337c toward the tenth end 337b and the twelfth end 337d.

[0048] In the embodiment, the scrubbing of the tip portion 320 in the X direction is adjusted by the displacement of the tip portion 320 toward the +X side by the elastic beam portion 332 and the displacement of the tip portion 320 toward the −X side by the horizontal support beam portion 336a and the inclined support beam portion 336b. However, a beam portion different from the beam portion 330 according to the embodiment may be employed, and the scrubbing of the tip portion 320 in the X direction may be adjusted by the displacement of the tip portion 320 toward the −X side by the beam portion corresponding to the elastic beam portion 332 and the displacement of the tip portion 320 toward the +X side by the beam portion corresponding to the horizontal support beam portion 336a and the inclined support beam portion 336b. That is, when the tip portion 320 is pressed into the pad 22 of the test object 20, the elastic beam portion 332 may be configured to bend so that the tip portion 320 moves in a direction approaching the base end portion 310. When the tip portion 320 is pressed into the pad 22 of the object to be inspected 20, the horizontal support beam portion 336a and the inclined support beam portion 336b may be configured to bend so that the tip portion 320 moves in a direction away from the base end portion 310.

[0049] 4 is a side view illustrating an elastic beam portion 332 according to another example of the embodiment. In the example illustrated in FIG. 4, similar to the embodiment, the description will be given assuming that the tip portion 320 is pressed into the pad 22 of the test object 20 outside the range illustrated in FIG. 4.

[0050] As shown in FIG. 4 , the horizontally extending portion 332a may define a single hollow portion 332d. The single hollow portion 332d extends from the first end 333a to the second end 333b of the horizontally extending portion 332a. The horizontally extending portion 332a is essentially two beam portions separated from each other by the single hollow portion 332d. As shown in FIG. 4 , the two beam portions separated by the single hollow portion 332d extend in a direction approximately parallel to the X direction. When the tip portion 320 is pressed into the pad 22 of the test object 20, in the example shown in FIG. 4 , the horizontally extending portion 332a is two beam portions separated from each other by the hollow portion 332d, and therefore, the deflection of the horizontally extending portion 332a can be reduced compared to when the single hollow portion 332d is not provided. Therefore, in the example shown in FIG. 4, compared to when a single hollow portion 332d is not provided, the displacement of the tip portion 320 toward the +X side by the elastic beam portion 332 can be reduced, and scrubbing of the tip portion 320 toward the +X side can be reduced.

[0051] 4, when the tip portion 320 is pressed into the pad 22 of the test object 20, the load on the horizontal support beam portion 336a and the inclined support beam portion 336b can be reduced by the elastic beam portion 332. Furthermore, in the example shown in Fig. 4, by at least partially canceling out the displacement of the tip portion 320 toward the +X side by the elastic beam portion 332 and the displacement of the tip portion 320 toward the -X side by the horizontal support beam portion 336a and the inclined support beam portion 336b, it is possible to adjust the scrub of the tip portion 320 in the X direction when the tip portion 320 is pressed into the pad 22 of the test object 20.

[0052] Fig. 5 is a side view illustrating an elastic beam portion 332 according to yet another example of the embodiment. In the example illustrated in Fig. 5, similar to the embodiment, the tip portion 320 is assumed to be pressed into the pad 22 of the test object 20 outside the range illustrated in Fig. 5.

[0053] 5, the horizontally extending portion 332a may define a plurality of hollow portions 332e. The hollow portions 332e are dispersedly disposed from the first end 333a to the second end 333b of the horizontally extending portion 332a. The deflection of the horizontally extending portion 332a when the tip portion 320 is pressed into the pad 22 of the test object 20 can be changed depending on conditions such as the number, size, and shape of the hollow portions 332e. Therefore, by adjusting the conditions of the hollow portions 332e and thereby adjusting the deflection of the horizontally extending portion 332a, the scrubbing of the tip portion 320 in the X direction can be adjusted.

[0054] 5, when the tip portion 320 is pressed into the pad 22 of the test object 20, the load on the horizontal support beam portion 336a and the inclined support beam portion 336b can be reduced by the elastic beam portion 332. Furthermore, in the example shown in Fig. 5, by at least partially canceling out the displacement of the tip portion 320 toward the +X side by the elastic beam portion 332 and the displacement of the tip portion 320 toward the -X side by the horizontal support beam portion 336a and the inclined support beam portion 336b, it is possible to adjust the scrub of the tip portion 320 in the X direction when the tip portion 320 is pressed into the pad 22 of the test object 20.

[0055] 6 is a side view of the probe 300A according to the first modification in a state where the tip portion 320 is pressed into the pad 22 of the test object 20. The probe 300A according to the first modification is similar to the probe 300 according to the embodiment, except for the following points. In the example shown in FIG. 6, the test object 20 is moved to the +Z side with the pad 22 and the tip portion 320 in contact with each other, and the tip portion 320 is pressed into the pad 22 of the test object 20.

[0056] As shown in FIG. 6 , in the elastic beam 332A according to Modification 1, the inclined extending portion 332c is located on the −Z side relative to the horizontal extending portion 332a. The third end 333c of the vertical extending portion 332b corresponds to the +Z side end of the vertical extending portion 332b, and the fourth end 333d of the vertical extending portion 332b corresponds to the −Z side end of the vertical extending portion 332b. The seventh end 335a of the connecting beam 334 corresponds to the +Z side end of the connecting beam 334, and the eighth end 335b of the connecting beam 334 corresponds to the −Z side end of the connecting beam 334. As shown in FIG. 6 , the elastic beam 332A of the beam 330A according to Modification 1 is at least partially folded back from the horizontal extending portion 332a to the inclined extending portion 332c toward the −Z side where the inspection target 20 is located.

[0057] Similar to the elastic beam 332 according to the embodiment, the folded portion of the elastic beam 332A according to the first modification is configured to increase the deflection of the elastic beam 332A when the tip 320 is pressed into the pad 22 of the test object 20. Specifically, the folded portion of the elastic beam 332A can increase the length from the first end 333a to the sixth end 333f of the elastic beam 332A within a limited range in the X direction, compared to when the elastic beam 332A simply extends in the X direction, making it easier to deflect the elastic beam 332A. As shown in FIG. 6 , when the tip 320 is pressed into the pad 22 of the test object 20, the elastic beam 332A deflects such that the second end 333b is displaced toward the +Z side and the sixth end 333f is displaced toward the −Z side. Therefore, similar to the embodiment, the load on the horizontal support beam portion 336a and the inclined support beam portion 336b when the tip portion 320 is pressed into the pad 22 of the object to be inspected 20 can be reduced compared to when the elastic beam portion 332A is not provided.

[0058] In the first modification, similarly to the embodiment, when the tip portion 320 is pressed into the pad 22 of the test object 20, the horizontal support beam portion 336a and the inclined support beam portion 336b can be deflected so that the tip portion 320 is displaced toward the −X side. Furthermore, when the tip portion 320 is pressed into the pad 22 of the test object 20, the folded-back portion of the elastic beam portion 332A can be deflected so that the tip portion 320 is displaced toward the +X side. Therefore, by at least partially canceling out the displacement of the tip portion 320 toward the +X side by the elastic beam portion 332B and the displacement of the tip portion 320 toward the −X side by the horizontal support beam portion 336a and the inclined support beam portion 336b, it is possible to adjust the displacement in the X direction of the tip portion 320 when the tip portion 320 is pressed into the pad 22 of the test object 20, i.e., the scrub in the X direction of the tip portion 320.

[0059] Fig. 7 is a side view of a probe 300B according to Modification 2. Fig. 7 illustrates the probe 300B according to Modification 2, as well as a portion of the test object 20 and a portion of the relay board 200. The probe 300B according to Modification 2 is similar to the probe 300 according to the embodiment, except for the following points.

[0060] As shown in FIG. 7 , the elastic beam portion 332B of the beam portion 330B according to Modification 2 includes a fifteenth end 333g connected to a side surface perpendicular to the Z direction of the −Z side end of the base end 310, and a sixteenth end 333h spaced from the fifteenth end 333g toward the +X side, away from the −X side where the base end 310 is located. The elastic beam portion 332B extends in a direction non-parallel to the Z direction from the fifteenth end 333g to the sixteenth end 333h. In the example shown in FIG. 7 , the fifteenth end 333g corresponds to the −X side end of the elastic beam portion 332B, and the sixteenth end 333h corresponds to the +X side end of the elastic beam portion 332B. In the example shown in FIG. 7 , the elastic beam portion 332B extends in a direction substantially parallel to the X direction from the fifteenth end 333g to the sixteenth end 333h.

[0061] As shown in FIG. 7, the -Z side surface of the elastic beam portion 332B is approximately parallel to the X direction. As shown in FIG. 7, the +Z side surface of the elastic beam portion 332B is inclined toward the -Z side as it approaches the approximately central portion of the elastic beam portion 332B in the X direction. Therefore, the cross-sectional area of ​​the elastic beam portion 332B perpendicular to the X direction decreases as it approaches the approximately central portion of the elastic beam portion 332B in the X direction. In other words, the cross-sectional area of ​​the elastic beam portion 332B perpendicular to the X direction is partially smaller in the approximately central portion of the elastic beam portion 332B in the X direction. Therefore, the approximately central portion of the elastic beam portion 332B in the X direction is structured to increase the deflection of the elastic beam portion 332B when the tip portion 320 is pressed into the pad 22 of the test object 20.

[0062] Fig. 8 is a side view of the probe 300B according to the second modification in a state where the tip portion 320 is pressed into the pad 22 of the test object 20. Fig. 8 illustrates the probe 300B according to the second modification, as well as a portion of the test object 20 and a portion of the relay board 200. In the example shown in Fig. 8, with the pad 22 and the tip portion 320 in contact with each other, the test object 20 moves to the +Z side, and the tip portion 320 is pressed into the pad 22 of the test object 20.

[0063] 8 , when the test object 20 moves to the +Z side and the tip portion 320 is pressed into the pad 22 of the test object 20, the horizontal support beam 336a and the inclined support beam 336b bend so that the tenth end 337b and the twelfth end 337d are displaced toward the +Z side, and the elastic beam 332B also bends so that the sixteenth end 333h is displaced toward the +Z side. Therefore, similar to the embodiment, compared to when the elastic beam 332B is not provided, the bending of the horizontal support beam 336a and the inclined support beam 336b when the tip portion 320 is pressed into the pad 22 of the test object 20 can be distributed to the elastic beam 332B, and the load on the horizontal support beam 336a and the inclined support beam 336b can be reduced. Furthermore, compared to when the cross-sectional area perpendicular to the X direction of the elastic beam portion 332B is relatively large over the entire X direction of the elastic beam portion 332B, when the tip portion 320 is pressed into the pad 22 of the object to be inspected 20, it is possible to make it easier to deflect the approximately central portion of the elastic beam portion 332B in the X direction, thereby reducing the load on the horizontal support beam portion 336a and the inclined support beam portion 336b.

[0064] 8 , when the tip portion 320 is pressed into the pad 22 of the test object 20, the horizontal support beam portion 336a and the inclined support beam portion 336b can be deflected so that the tip portion 320 is displaced toward the −X side. Furthermore, when the tip portion 320 is pressed into the pad 22 of the test object 20, the elastic beam portion 332B can be deflected so that the tip portion 320 is displaced toward the +X side. Therefore, by at least partially canceling out the displacement of the tip portion 320 toward the +X side by the elastic beam portion 332A and the displacement of the tip portion 320 toward the −X side by the horizontal support beam portion 336a and the inclined support beam portion 336b, it is possible to adjust the displacement in the X direction of the tip portion 320 when the tip portion 320 is pressed into the pad 22 of the test object 20, i.e., the scrub in the X direction of the tip portion 320.

[0065] Although the embodiments and modifications of the present invention have been described above with reference to the drawings, these are merely examples of the present invention, and various configurations other than those described above can also be adopted.

[0066] The probes according to the embodiments and modifications are described as probes used in a probe card. However, the probes according to the embodiments and modifications can be used not only in probe cards for testing semiconductor test objects such as wafers in the front-end process, but also in sockets for testing semiconductor test objects such as semiconductor chips in the back-end process. In other words, the probes according to the embodiments and modifications can be used in testing devices such as probe cards and sockets.

[0067] According to this specification, the following aspects of the probe and inspection device are provided: (Aspect 1) In Aspect 1, the probe includes a base end, a tip end that contacts an object to be inspected, a first beam connected to the base end, and a second beam connected to the first beam and supporting the tip end, and the first beam has a structure for increasing the deflection of the first beam when the tip end is pressed into the object to be inspected.

[0068] The "first beam" corresponds to the "elastic beam" in the above-described embodiment and modified examples. The "second beam" corresponds to the "horizontal support beam" and the "inclined support beam" in the above-described embodiment and modified examples.

[0069] According to the above-described aspect, compared to when the first beam portion is not provided, the deflection of the second beam portion when the tip portion is pressed into the test object can be distributed to the first beam portion. Therefore, according to the above-described aspect, compared to when the first beam portion is not provided, the load on the second beam portion supporting the tip portion can be reduced.

[0070] (Mode 2) In mode 2, when the tip portion is pressed into the object to be inspected, the first beam portion bends so that the tip portion moves in one of the directions approaching the base end and moving away from the base end, and when the tip portion is pressed into the object to be inspected, the second beam portion bends so that the tip portion moves in the other direction different from the one direction of the directions approaching the base end and moving away from the base end.

[0071] According to the above-described aspect, the displacement of the tip portion caused by the first beam portion and the displacement of the tip portion caused by the second beam portion can be at least partially offset, thereby adjusting the scrub of the tip portion.

[0072] (Aspect 3) In aspect 3, the structure of the first beam portion includes at least a partially folded portion of the first beam portion.

[0073] According to the above-described aspect, compared to when the first beam portion simply extends in only one direction, the length of the first beam portion can be increased within a limited range in that one direction, making it easier to flex the first beam portion.

[0074] (Aspect 4) In aspect 4, the structure of the first beam portion includes a portion of the first beam portion where the cross-sectional area is partially reduced.

[0075] According to the above-described aspect, the first beam portion can be more easily deflected compared to when the cross-sectional area of ​​the first beam portion is relatively large over the entire first beam portion.

[0076] (Aspect 5) In aspect 5, an inspection device includes the above-described probe.

[0077] The "inspection device" corresponds to the "probe card" or "socket" in the above-described embodiment and modified examples.

[0078] According to the above-described aspect, similarly to aspect 1, the load on the second beam portion supporting the tip portion can be reduced compared to the case where the first beam portion is not provided.

[0079] (Aspect 6) In aspect 6, the probe comprises a base end, a tip end that contacts the object to be inspected, a first beam connected to the base end, and a second beam connected to the first beam and supporting the tip end, and the first beam is at least partially folded back from a portion connected to the base end of the first beam to a portion connected to the second beam of the first beam toward a side away from the side where the object to be inspected is located.

[0080] The "first beam" corresponds to the "elastic beam" in the above-described embodiment and modified examples. The "second beam" corresponds to the "horizontal support beam" and the "inclined support beam" in the above-described embodiment and modified examples.

[0081] According to the above-described aspect, the displacement of the tip portion caused by the first beam portion when the tip portion is pressed into the inspection object can be reduced compared to when the first beam portion is folded back toward the side where the inspection object is located. Therefore, even if the length of the first beam portion is relatively long to reduce the load on the second beam portion, the displacement of the tip portion caused by the first beam portion when the tip portion is pressed into the inspection object can be reduced compared to when the first beam portion is folded back toward the side where the inspection object is located. Therefore, according to the above-described aspect, the length of the first beam portion can be relatively long to reduce the load on the second beam portion compared to when the first beam portion is folded back toward the side where the inspection object is located.

[0082] This application claims priority based on Japanese Patent Application No. 2024-154593, filed September 9, 2024, the disclosure of which is incorporated herein in its entirety by reference.

[0083] 10 probe card, 20 test object, 22 pad, 100 test board, 200 relay board, 300, 300A, 300B probe, 310 base end, 320 tip end, 330, 330A, 330B beam part, 332, 332A, 332B elastic beam part, 332a horizontally extending part, 332b Vertical extension part, 332c Inclined extension part, 332d, 332e Hollow part, 333a First end part, 333b Second end part, 333c Third end part, 333d Fourth end part, 333e Fifth end part, 333f Sixth end part, 333g Fifteenth end part, 333h Sixteenth end part, 334 Connection beam part, 335a Seventh end, 335b Eighth end, 336a Horizontal support beam, 336b Inclined support beam part, 337a 9th end part, 337b 10th end part, 337c 11th end part, 337d 12th end part, 338 Tip beam part, 339a 13th end part, 339b 14th end part

Claims

1. A probe comprising: a base end; a tip end that contacts an object to be inspected; a first beam connected to the base end; and a second beam connected to the first beam and supporting the tip end, wherein the first beam has a structure for increasing the deflection of the first beam when the tip end is pressed into the object to be inspected.

2. The probe described in claim 1, wherein, when the tip portion is pressed into the object to be inspected, the first beam portion bends so that the tip portion moves in one of a direction approaching the base end and a direction away from the base end, and when the tip portion is pressed into the object to be inspected, the second beam portion bends so that the tip portion moves in the other direction different from the one direction of a direction approaching the base end and a direction away from the base end.

3. The probe of claim 1 or 2, wherein the structure of the first beam portion includes an at least partially folded portion of the first beam portion.

4. The probe according to claim 1 or 2, wherein the structure of the first beam portion includes a portion of the first beam portion where the cross-sectional area is partially reduced.

5. An inspection device comprising the probe according to claim 1 or 2.

6. A probe comprising: a base end; a tip end that contacts an object to be inspected; a first beam connected to the base end; and a second beam connected to the first beam and supporting the tip end, wherein the first beam is at least partially folded back from a portion connected to the base end of the first beam to a portion connected to the second beam of the first beam toward a side away from the side where the object to be inspected is located.

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