Vacuum chamber comprising temperature block and manufacturing method therefor

Abstract

The present invention provides a vacuum chamber comprising: a main body; a temperature block arranged inside the main body; connecting bridges integrally connecting the main body and the temperature block; a cooling hole which penetrates through the main body, the temperature block, and the connecting bridges and through which a liquid or gas flows; and a lid coupled to the top surface of the main body.

Description

Vacuum chamber including a temperature block and method of manufacturing the same

[0001] The present invention relates to a vacuum chamber, and more specifically, to a vacuum chamber comprising a temperature block integrally connected to a main body and a method for manufacturing the same.

[0002] The present invention provides the following project information as a result of the project.

[0003] [Ministry Name] Ministry of Education

[0004] [Name of Project Management (Specialized) Agency] National Research Foundation of Korea

[0005] [Research Project Name] Support for Advanced Industry-Academic-Research Cooperation

[0006] [Project Title] LINC 3.0 (0.5)

[0007] [Name of Project Performing Organization] Hoseo University

[0008] [Research Period] 2023-03-01 ~ 2024-02-29

[0009]

[0010] When performing electrical measurements sensitive to the surrounding environment, changes in sample characteristics are measured while varying the temperature with the sample placed inside a vacuum chamber, or additionally, changes in characteristics are measured while applying light or controlling the internal gas.

[0011] For such measurements, a temperature control block capable of changing the temperature while supporting the sample inside the vacuum chamber is required; to achieve rapid temperature changes, the thermal capacity of the temperature control block must be minimized, and liquid or gas for cooling must be circulated inside the block as needed.

[0012] This vacuum chamber is explained with reference to the drawing.

[0013] Figure 1 is a cross-sectional view illustrating a conventional vacuum chamber.

[0014] As illustrated in FIG. 1, a conventional vacuum chamber (10) includes a main body (20), a lid (22), a temperature block (24), and a cooling tube (42).

[0015] An exhaust port (44) is provided on the bottom surface of the main body (20), and a vacuum can be formed by exhausting the inside of the main body (20) through the exhaust port (44).

[0016] The lid (22) is attached to the upper surface of the main body (20) to cover and seal the inside of the main body (20).

[0017] A temperature block (24) is placed inside the main body (20), a heater (26) is placed inside the temperature block (24), and a power wiring (28) of the heater (26) is placed through the main body (20).

[0018] The cooling pipe (42) is positioned to penetrate the main body (20) and the temperature block (24), and the temperature of the temperature block (24) can be controlled by circulating liquid or gas through the cooling pipe (42).

[0019] In this vacuum chamber (10), a sample is placed on the upper surface of a temperature block (24), and the change in the characteristics of the sample can be measured while controlling the temperature of the sample using a heater (26) and a cooling tube (42).

[0020] However, since the cooling tube (42) is positioned to penetrate the side wall of the main body (20), the gap between the cooling tube (42) and the main body (20) must be sealed well so that there is no gap. If the seal between the cooling tube (42) and the main body (20) is not complete, external gas leaks into the main body (20), causing problems such as difficulty in exhausting the main body (20) and difficulty in forming a vacuum.

[0021] Also, since the cooling tube (42) is positioned to penetrate the side wall of the temperature block (24), the gap between the cooling tube (42) and the temperature block (24) must be sealed well so that there is no gap. However, if the seal between the cooling tube (42) and the temperature block (24) is not complete, the liquid or gas of the cooling tube (42) leaks into the interior, causing a leakage problem.

[0022] To solve this, the cooling tube (42) may be arranged to wrap around the outer surface of the temperature block (24) without penetrating the temperature block (24), but in this case, there is a problem that the cooling efficiency is reduced due to the thermal resistance between the cooling tube (42) and the temperature block (24).

[0023]

[0024] The present invention is presented to solve these problems and aims to provide a vacuum chamber including a temperature block and a method for manufacturing the same, wherein the main body and the temperature block are formed as a single unit, thereby preventing leakage and water leakage, facilitating vacuum formation, and reducing manufacturing costs.

[0025]

[0026] To solve the above problem, the present invention provides a vacuum chamber comprising: a main body; a temperature block disposed inside the main body; a connecting bridge integrally connected between the main body and the temperature block; a cooling hole through which a liquid or gas flows, penetrating the main body, the temperature block and the connecting bridge; and a lid coupled to the upper surface of the main body.

[0027] In addition, the thickness of the connecting bridge is smaller than the thickness of the temperature block, and the upper surface of the temperature block can be positioned higher than the upper surface of the connecting bridge.

[0028] In addition, the connecting bridge can be connected between at least two sides of the temperature block and at least two side walls of the main body.

[0029] In addition, the vacuum chamber may further include a heater disposed inside the temperature block; and an exhaust port disposed on the bottom surface of the main body and connected to a vacuum pump.

[0030] Additionally, the vacuum chamber may further include a power hole through which power wiring connected to the heater is arranged, penetrating the main body, the temperature block, and the connecting leg.

[0031] In addition, the vacuum chamber may further include a measuring hole in which a thermocouple is disposed, penetrating the main body, the temperature block, and the connecting leg.

[0032] In addition, the vacuum chamber may further include a vacuum connection portion disposed at the end of the exhaust port and formed integrally with the main body.

[0033] Meanwhile, the present invention provides a method for manufacturing a vacuum chamber comprising the steps of: preparing a metal block; cutting the metal block to form an outer wall of a main body; cutting the inner upper side of the main body to form an upper surface and a side surface of a temperature block and a connecting leg; processing the interior of the temperature block to form a space; cutting the inner lower side of the main body to form a lower surface of the temperature block and the connecting leg and a bottom surface of the main body; processing the bottom surface of the main body to form an exhaust port; processing the main body, the temperature block, and the connecting leg to form a cooling hole penetrating the main body, the temperature block, and the connecting leg; and attaching a lid to the main body.

[0034] In addition, the method for manufacturing the vacuum chamber may further include the step of processing the main body, the temperature block, and the connecting leg to form a power hole through which power wiring connected to a heater in the space of the temperature block is arranged.

[0035]

[0036] The present invention has the effect of preventing leakage and water leakage, facilitating vacuum formation, and reducing manufacturing costs by forming the main body and the temperature block as a single unit.

[0037]

[0038] FIG. 1 is a cross-sectional view illustrating a conventional vacuum chamber.

[0039] FIG. 2 is a cross-sectional view illustrating a vacuum chamber according to a first embodiment of the present invention.

[0040] FIG. 3 is a cross-sectional view illustrating a vacuum chamber according to a second embodiment of the present invention.

[0041] FIGS. 4a and 4b are cross-sectional views illustrating a method for manufacturing a vacuum chamber according to a second embodiment of the present invention.

[0042] FIG. 5 is a flowchart illustrating a method for manufacturing a vacuum chamber according to a second embodiment of the present invention.

[0043]

[0044] Hereinafter, a vacuum chamber and a method for manufacturing the same according to the present invention will be described with reference to the attached drawings.

[0045]

[0046] FIG. 2 is a cross-sectional view illustrating a vacuum chamber according to a first embodiment of the present invention.

[0047] As illustrated in FIG. 2, the vacuum chamber (110) according to the first embodiment of the present invention includes a main body (120), a lid (122), a temperature block (124), and a connecting leg (140).

[0048] An exhaust port (144) is provided on the bottom surface of the main body (120), and a vacuum pump (not shown) is connected to the exhaust port (144). The vacuum pump can form a vacuum by exhausting the inside of the main body (120) through the exhaust port (144).

[0049] For example, the cross-section of the main body (120) may be a polygonal shape such as a circle, square, pentagon, or hexagon.

[0050] A vacuum connection part (not shown), such as a vacuum flange, may be disposed at the end of the exhaust port (144), and the vacuum connection part may be formed integrally with the main body (120).

[0051] The lid (122) is attached to the upper surface of the main body (120) to cover and seal the inside of the main body (120), and an O-ring (not shown) for sealing may be placed between the main body (120) and the lid (122).

[0052] The temperature block (124) is placed inside the main body (120), and a sample can be placed on the upper surface of the temperature block (124).

[0053] A heater (126) is placed inside the temperature block (124), and power wiring (128) for supplying power is connected to both ends of the heater (126), and the power wiring (128) can be placed through the main body (120) and the temperature block (124).

[0054] For example, the power wiring (128) can be connected to an external power source through a sealed connection such as a vacuum feedthrough located on the side wall of the main body (120).

[0055] The connecting bridge (140) is connected between at least two sides of the temperature block (124) and at least two side walls of the main body (120), respectively, and the main body (120), the temperature block (124), and the connecting bridge (140) are connected as a single unit.

[0056] For example, the main body (120) and the temperature block (124) can be integrally connected by two, three, or four connecting legs (140) arranged symmetrically.

[0057] The fact that the main body (120), the temperature block (124), and the connecting bridge (140) are connected as a single unit means that the main body (120), the temperature block (124), and the connecting bridge (140) are not connected by welding or the like after being processed separately, but are formed by processing a single metal block.

[0058] For example, the main body (120), the temperature block (124), and the connecting bridge (140) may be made of a metallic material such as aluminum, stainless steel, or duralumin.

[0059] In order to minimize the heat capacity of the temperature block (124), the thickness (vertical width) of the connecting bridge (140) may be smaller than the thickness (vertical width) of the temperature block (124), and the upper surface of the temperature block (124) may be positioned higher than the upper surface of the connecting bridge (140).

[0060] A cooling hole (142) is formed in the main body (120), the temperature block (124), and the connecting bridge (140) and penetrates the main body (120), the temperature block (124), and the connecting bridge (140), and the temperature of the temperature block (124) can be controlled by circulating liquid or gas through the cooling hole (142).

[0061] A connecting part, such as a flange, can be formed integrally with the main body (120) at the end of the cooling hole (142).

[0062] In this vacuum chamber (110), a sample is placed on the upper surface of a temperature block (124), and changes in the characteristics of the sample can be measured while controlling the temperature of the sample using a heater (126) and a liquid or gas in a cooling hole (142).

[0063] In addition, the main body (120), the temperature block (124), and the connecting bridge (140) are connected as a single unit, and a cooling hole (142) for the circulation of liquid or gas is formed in the connecting bridge (140), thereby preventing leakage of external gas at the connection point between the main body (120) and the connecting bridge (140) or leakage of liquid or gas at the connection point between the connecting bridge (140) and the temperature block (124), and facilitating vacuum formation.

[0064]

[0065] In another embodiment, power holes may be additionally formed in the main body, the temperature block, and the connecting leg, which will be explained with reference to the drawings.

[0066] FIG. 3 is a cross-sectional view illustrating a vacuum chamber according to a second embodiment of the present invention, and the description of parts identical to those in the first embodiment is omitted.

[0067] As illustrated in FIG. 3, the vacuum chamber (210) according to the second embodiment of the present invention includes a main body (220), a lid (222), a temperature block (224), and a connecting leg (240).

[0068] An exhaust port (244) is provided on the bottom surface of the main body (220), and a vacuum pump (not shown) is connected to the exhaust port (244). The vacuum pump can form a vacuum by exhausting the inside of the main body (220) through the exhaust port (244).

[0069] For example, the cross-section of the main body (220) may be a polygonal shape such as a circle, square, pentagon, or hexagon.

[0070] A vacuum connection part (not shown), such as a vacuum flange, may be disposed at the end of the exhaust port (244), and the vacuum connection part may be formed integrally with the main body (220).

[0071] The lid (222) is attached to the upper surface of the main body (220) to cover and seal the inside of the main body (220), and an O-ring (not shown) for sealing may be placed between the main body (220) and the lid (222).

[0072] The temperature block (224) is placed inside the main body (220), and a sample can be placed on the upper surface of the temperature block (224).

[0073] A heater (226) is placed inside the temperature block (224), and power wiring (228) for supplying power is connected to both ends of the heater (226).

[0074] The connecting bridge (240) is connected between at least two sides of the temperature block (224) and at least two side walls of the main body (220), respectively, and the main body (220), the temperature block (224), and the connecting bridge (240) are connected as a single unit.

[0075] For example, the main body (220) and the temperature block (224) can be integrally connected by two, three, or four connecting legs (240) arranged symmetrically.

[0076] The fact that the main body (220), the temperature block (224), and the connecting bridge (240) are connected as a single unit means that the main body (220), the temperature block (224), and the connecting bridge (240) are not connected by welding or the like after being processed separately, but are formed by processing a single metal block.

[0077] For example, the main body (220), the temperature block (224), and the connecting bridge (240) may be made of a metallic material such as aluminum, stainless steel, or duralumin.

[0078] In order to minimize the heat capacity of the temperature block (224), the thickness (vertical width) of the connecting bridge (240) may be smaller than the thickness (vertical width) of the temperature block (224), and the upper surface of the temperature block (224) may be positioned higher than the upper surface of the connecting bridge (240).

[0079] In the main body (220), the temperature block (224), and the connecting bridge (240), a cooling hole (242) and a power hole (246) are formed that penetrate the main body (220), the temperature block (224), and the connecting bridge (240).

[0080] Liquid or gas flows through the cooling hole (242), and the temperature of the temperature block (224) can be controlled by using the liquid or gas in the cooling hole (242) to reduce the temperature increased by the heater (226).

[0081] A connecting part, such as a flange, can be formed integrally with the main body (120) at the end of the cooling hole (242).

[0082] Power wiring (228) is arranged in the power hole (246), and the power wiring (228) can be exposed to the outside of the main body (220) through the power hole (246) and connected to a power supply unit (not shown).

[0083] Accordingly, manufacturing costs can be reduced by omitting a separate sealed connection part, such as a vacuum feedthrough, for exposing the power wiring (228) to the outside of the main body (220) without vacuum breakdown.

[0084] A connecting part, such as a flange, can be formed integrally with the main body (220) at the end of the power hole (242).

[0085] In this vacuum chamber (210), a sample is placed on the upper surface of a temperature block (224), and changes in the characteristics of the sample can be measured while controlling the temperature of the sample using a liquid or gas from a heater (226) and a cooling hole (242).

[0086] In addition, the main body (220), the temperature block (224), and the connecting bridge (240) are connected as a single unit, and a cooling hole (242) for the circulation of liquid or gas is formed in the connecting bridge (240), thereby preventing leakage of external gas at the connection point between the main body (220) and the connecting bridge (240) or leakage of liquid or gas at the connection point between the connecting bridge (240) and the temperature block (224), and facilitating vacuum formation.

[0087] In addition, the main body (220), the temperature block (224), and the connecting bridge (240) are connected as a single unit, and a power hole (246) for power wiring (228) is formed in the connecting bridge (240), so a separate sealed connection part is omitted, thereby reducing manufacturing costs.

[0088] In another embodiment, additional measuring holes other than the cooling hole (242) and power hole (246) can be formed in the main body (220), temperature block (224), and connecting leg (240) to omit a sealed connection such as a feedthrough, for example, a measuring hole can be formed in the connecting leg (240) and a thermocouple for temperature measurement can be placed in the measuring hole.

[0089]

[0090] A method for manufacturing such a vacuum chamber (210) is described with reference to the drawings.

[0091] FIGS. 4a and 4b are cross-sectional views illustrating a method for manufacturing a vacuum chamber according to a second embodiment of the present invention, and FIG. 5 is a flowchart illustrating a method for manufacturing a vacuum chamber according to a second embodiment of the present invention, and the description of parts identical to those of the first embodiment is omitted.

[0092] As illustrated in FIGS. 4a and 5, a metal block (260) with a volume larger than the vacuum chamber (210) to be manufactured is prepared (st110).

[0093] The metal block (260) can be made of a metallic material such as aluminum, stainless steel, or duralumin.

[0094] As shown in FIGS. 4b and 5, the metal block (260) is cut to form the outer wall of the main body (220), and the inner side of the main body (220) is cut to form the upper and side surfaces of the temperature block (224) and the connecting bridge (240) (st112).

[0095] For example, the cross-section of the main body (220) may be a polygonal shape such as a circle, square, pentagon, or hexagon.

[0096] In addition, to minimize the heat capacity of the temperature block (124), the upper surface of the temperature block (224) may be positioned higher than the upper surface of the connecting bridge (240).

[0097] Additionally, the connecting bridge (240) can be formed with 2, 3, or 4 symmetrically arranged bridges.

[0098] As shown in FIGS. 4c and FIGS. 5, the interior of the temperature block (224) is machined to form a space for the heater (226) to be placed (st114).

[0099] As shown in FIGS. 4d and 5, the lower side of the main body (220) is cut to form the lower surface of the temperature block (224) and the connecting leg (240) and the lower surface of the main body (220) (st116).

[0100] The main body (220), the temperature block (224), and the connecting bridge (240) are not connected by welding or the like after being processed separately, but are formed by processing a single metal block (260), so the main body (220), the temperature block (224), and the connecting bridge (240) are connected as a single unit.

[0101] For example, in order to minimize the heat capacity of the temperature block (224), the thickness (vertical width) of the connecting bridge (240) may be formed to be smaller than the thickness (vertical width) of the temperature block (224).

[0102] As shown in FIGS. 4e and FIGS. 5, the bottom surface of the main body (220) is machined to form an exhaust port (244) (st118).

[0103] For example, a vacuum connection part (not shown), such as a vacuum flange, may be formed integrally with the main body (220) at the end of the exhaust port (244).

[0104] As shown in FIGS. 4f and FIGS. 5, the main body (220), the temperature block (224), and the connecting leg (240) are machined to form a cooling hole (242) that penetrates the main body (220), the temperature block (224), and the connecting leg (240) (st120).

[0105] For example, liquid or gas flows through the cooling hole (242), and the temperature of the temperature block (224) can be controlled by using the liquid or gas in the cooling hole (242) to reduce the temperature increased by the heater (226).

[0106] And, at the end of the cooling hole (242), a connecting part such as a flange can be formed integrally with the main body (120).

[0107] As illustrated in FIG. 4g and FIG. 5, the main body (220), the temperature block (224), and the connecting leg (240) are processed to form a power hole that penetrates the main body (220), the temperature block (224), and the connecting leg (240) (st122).

[0108] Afterwards, a heater (226) is placed in the space of the temperature block (224), and power wiring (228) connected to both ends of the heater (226) is placed in the power hole (246).

[0109] For example, the power wiring (228) can be exposed outside the main body (220) through the power hole (246) and connected to a power supply unit (not shown).

[0110] And, at the end of the power hole (242), a connecting part such as a flange can be formed integrally with the main body (220).

[0111] As shown in FIGS. 4h and FIGS. 5, a separate metal block is processed to form a lid (222), and the lid (222) is attached to the main body (220) (st124).

[0112] For example, the lid (222) is attached to the upper surface of the main body (220) to cover and seal the inside of the main body (220), and an O-ring (not shown) for sealing may be placed between the main body (220) and the lid (222).

[0113]

[0114] As described above, in the vacuum chamber according to the embodiment of the present invention, the main body, the temperature block, and the connecting leg are formed as a single unit, and by forming a cooling hole for the circulation of liquid or gas in the connecting leg, leakage of external gas at the connection point between the main body and the connecting leg or leakage of liquid or gas at the connection point between the connecting leg and the temperature block can be prevented and vacuum formation can be facilitated.

[0115] In addition, by forming the main body, temperature block, and connecting leg as a single unit and forming a power hole for power wiring in the connecting leg, manufacturing costs can be reduced by omitting a separate sealed connection part.

[0116]

[0117] Although the foregoing has been described with reference to preferred embodiments of this specification, those skilled in the art will understand that various modifications and changes can be made to this specification without departing from the technical spirit and scope of this specification as set forth in the following claims.

Claims

1. The main body and; A temperature block disposed inside the main body; A connecting bridge integrally connected between the main body and the temperature block; A cooling hole penetrating the main body, the temperature block, and the connecting bridge, through which liquid or gas flows; A lid coupled to the upper surface of the above main body A vacuum chamber including 2. In Paragraph 1, A vacuum chamber in which the thickness of the connecting bridge is smaller than the thickness of the temperature block, and the upper surface of the temperature block is positioned higher than the upper surface of the connecting bridge.

3. In Paragraph 1, The above connecting bridge is a vacuum chamber that is respectively connected between at least two sides of the temperature block and at least two side walls of the main body.

4. In Paragraph 1, A heater disposed inside the above temperature block; An exhaust port disposed on the bottom surface of the above main body and connected to a vacuum pump A vacuum chamber further comprising 5. In Paragraph 4, A vacuum chamber further comprising a power hole through which power wiring connected to the heater is disposed, penetrating the main body, the temperature block, and the connecting leg.

6. In Paragraph 5, A vacuum chamber further comprising a measuring hole through which a thermocouple is disposed, penetrating the main body, the temperature block, and the connecting leg.

7. In Paragraph 4, A vacuum chamber further comprising a vacuum connection portion disposed at the end of the exhaust port and formed integrally with the main body.

8. The step of preparing a metal block and; A step of forming the outer wall of the main body by cutting the above metal block; A step of cutting the inner side of the above main body to form the upper and side surfaces of the temperature block and the connecting bridge; A step of forming a space by processing the interior of the above-mentioned temperature block; A step of cutting the lower side of the main body to form the lower surface of the temperature block and the connecting bridge and the bottom surface of the main body; A step of forming an exhaust port by processing the bottom surface of the above-mentioned main body; A step of processing the main body, the temperature block, and the connecting bridge to form a cooling hole penetrating the main body, the temperature block, and the connecting bridge; Step of attaching the lid to the main body A method for manufacturing a vacuum chamber including 9. In Paragraph 8, A method for manufacturing a vacuum chamber, further comprising the step of processing the main body, the temperature block, and the connecting leg to form a power hole through which power wiring connected to a heater in the space of the temperature block is arranged.

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