High-entropy alloy coating material and method for manufacturing same

Abstract

The purpose of the present invention is to design a new coating material applied to the surface of an industrial roller used in a secondary battery manufacturing operation and to provide a method for forming the coating material. In accordance with the above purpose, the present invention provides a roller surface coating material of Ni-Co-Cr-Si-N using a high-entropy alloy target containing Ni-Co-Cr-Si.

Description

High-entropy alloy coating material and method for manufacturing the same

[0001] The present invention relates to a high-entropy alloy coating material and a method for manufacturing the same, and more specifically, to a surface coating material that can be applied to rollers, etc. included in secondary battery manufacturing equipment, and a method for manufacturing the same.

[0002] High entropy alloys (HEA) have high alloy stability and excellent mechanical properties. These high entropy alloys are applied in aerospace technology, nuclear power, cryogenic technology, etc. Registered Patent No. 10-1955370 describes a technology for forming a (CoaCrbFecMndNie)1-x-yNxOy high entropy alloy thin film on an inexpensive metal such as SUS or a flexible substrate.

[0003] Meanwhile, rollers are used in many processes within the electric vehicle battery manufacturing process, including the production of anodes and cathodes. The surfaces of these rollers require high hardness, wear resistance, and low friction characteristics, and must be capable of long-term use without causing adhesion to the electrode materials. Rollers used in the process of manufacturing electrodes using anode materials such as NCM and cathode materials such as carbon or silicon are exposed to a harsh environment involving the compression of dry powder, resulting in a very short lifespan. Surface coatings are applied to extend the lifespan of roller surfaces; however, wet plating, a currently commercialized coating technology, requires a large amount of chemicals based on a liquid solution. Despite this, it suffers from low density and durability, and generates numerous pores and residual materials, making it difficult to form a high-purity coating layer.

[0004] The objective of the present invention is to design a new coating material applied to the surface of an industrial roller used in a secondary battery manufacturing process and to provide a method for forming the same.

[0005] In other words, the objective of the present invention is to provide a new coating material that imparts high durability, anti-sticking properties, and excellent surface roughness to rollers used in the secondary battery manufacturing process, and can maintain the high purity of the electrode material produced by the rollers.

[0006] In accordance with the above objective, the present invention provides a roller surface coating material of Ni-Co-Cr-Si-N using a high-entropy alloy target comprising Ni-Co-Cr-Si.

[0007] In the above, a high-entropy alloy target containing Ni-Co-Cr-Si can be designed with a composition of Ni: 17~25%, Co: 17~25%, Cr: 17~25%, and Si: 25~49%.

[0008] In the above, a high-entropy alloy target containing Ni-Co-Cr-Si can be manufactured by sintering high-purity fine alloy powder made by casting, sintering, or atomizing.

[0009] That is, the present invention is,

[0010] As a coating material applied to the surface of industrial rollers,

[0011] Ni a Co b Cr c Si d C f The present invention provides a coating material characterized by being composed of a high-entropy alloy in which , 3<a<10, 3<b<10, 3<c<10, 5<d<15, 50<f<90, a+b+c+d+f=100.

[0012] In the above, a coating material is provided characterized by further including a first buffer layer made of a Ni-Co-Cr-Si-N material and a second buffer layer made of Ni-Co-Cr-Si-CN on the surface of an industrial roller before forming the coating material.

[0013]

[0014] As a coating material applied to the surface of industrial rollers,

[0015] Ni a Co b Cr c Si d N e The present invention provides a coating material characterized by being composed of a high-entropy alloy in which , 5<a<15, 5<b<15, 5<c<15, 25<d<40, 25<e<35, a+b+c+d+e=100.

[0016] In the above, the coating material is further provided with a first buffer layer made of Ni-Co-Cr-Si-N material and a second buffer layer on top of the first buffer layer before forming the coating material on an industrial roller surface, wherein the first buffer layer and the second buffer layer are gradient layers in which the nitrogen (N) component is gradually increased in a direction from the surface of the substrate toward the top layer.

[0017]

[0018] As a coating material applied to the surface of industrial rollers,

[0019] A first buffer layer made of Ni-Co-Cr-Si-C material, a second buffer layer on the first buffer layer, and Ni on the second buffer layer a Co b Cr c Si d C f The present invention provides a coating material characterized by having a high-entropy alloy formed as a top layer, wherein , 3<a<10, 3<b<10, 3<c<10, 5<d<15, 50<f<90, a+b+c+d+f=100.

[0020] In the above, the coating material is characterized in that the first buffer layer and the second buffer layer are gradient layers in which the carbon (C) content gradually increases in the direction from the surface of the base material toward the top layer.

[0021]

[0022] As a coating material applied to the surface of industrial rollers,

[0023] Ni a Co b Cr c Si dThe present invention provides a coating material characterized by being composed of a high-entropy alloy in which , 17≤a≤25, 17≤b≤25, 17≤c≤25, 25≤d≤49, and a+b+c+d=100.

[0024] In addition, the present invention,

[0025] For forming a coating material on the surface of a roller used in the secondary battery manufacturing process,

[0026] Chamber;

[0027] Sputter source; and

[0028] A coating device comprising an ion source; and

[0029] A high-entropy alloy target containing the above Ni-Co-Cr-Si is mounted in a sputter source, and

[0030] After adjusting the vacuum level inside the chamber,

[0031] A coating system is provided that forms a Ni-Co-Cr-Si-N roller surface coating material on a roller surface by supplying nitrogen and inert gas to an ion source and applying power to a sputter source and an ion source.

[0032] In the above, the Ni-Co-Cr-Si-N roller surface coating material is composed of 10.0~13.0 at% Ni, Co, and Cr, 34.0~39.0 at% Si, and the remainder being N.

[0033] In the above, a coating system is provided that forms a Ni-Co-Cr-Si-C roller surface coating material on the roller surface by supplying a hydrocarbon instead of nitrogen to the ion source.

[0034] In the above, the Ni-Co-Cr-Si-C roller surface coating material is composed of 4.4~6.5 at% Ni, Co, and Cr, 10.5~12.0 at% Si, and the remainder is C.

[0035] According to the present invention, by designing a high-entropy alloy target based on NCM, which is a cathode material for a secondary battery, and forming a coating material on the surface of a roller using the same, the durability, thermal stability, and anti-sticking properties of the roller are exhibited, and the purity of the manufactured electrode material is maintained.

[0036] In addition, according to the present invention, due to the stability exhibited by the high-entropy alloy, the stability of the coating surface is enhanced against high linear pressure applied to the roller and high-temperature environments.

[0037] In addition, the quaternary or higher high-entropy alloy coating material of the present invention forms a single-phase structure, exhibiting high strength at low, room, and high temperatures, and has excellent thermal stability, structural stability, and corrosion resistance.

[0038] Accordingly, the coating material of the present invention is suitable for both cold rolling rollers and hot rolling rollers.

[0039] In addition, the present invention aims to improve high hardness and low friction properties by doping a high-entropy alloy coating material with nitrogen and / or carbon.

[0040] The coating material produced according to the present invention can exhibit a mechanical hardness HIT of 7 to 17.73 GPa, an elastic modulus EIT of 162.8 to 189.1 GPa, and an Hv of 661.5 to 1675.4, so that the nitrogen content and / or carbon content can be controlled by adjusting the partial pressure of nitrogen and / or hydrocarbons during the process conditions to match the desired physical properties.

[0041] Figure 1 is a table summarizing the hardness and elastic modulus of candidate coating materials according to the present invention and a photograph of a high-entropy alloy target.

[0042] Figure 2 is a layered structure diagram of a coating material according to the present invention.

[0043] FIG. 3 is a schematic cross-sectional view illustrating the configuration of a coating system according to the present invention.

[0044] Figure 4 is a graph showing the change in mechanical properties of the coating material according to the nitrogen composition supplied to the ion source in the coating system of Figure 3, a TEM image showing the thickness of the coating material, and an XRD spectrum image showing the composition of the coating material.

[0045] Figure 5 is a graph showing the change in mechanical properties of the coating material according to carbon doping and ion source current in the coating system of Figure 3, a TEM image showing the thickness of the coating material, and an XRD spectrum image showing the composition of the coating material.

[0046] Figure 6 is a graph and table showing the friction coefficient and bonding strength of the coating material according to the present invention.

[0047] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings.

[0048] Most conventional industrial rollers consist of a wet coating of Cr on a SUS or copper substrate. Wet coating poses serious environmental pollution issues, and the coating film peels off easily, resulting in a short lifespan. Therefore, this invention aims to coat the roller surface using an eco-friendly dry hybrid plasma nanocomposite coating. Dry coating is an environmentally friendly process that emits no pollutants.

[0049] The constituent components of NCM, the cathode material for secondary batteries, are Ni, Co, and Mn. These cathode materials and anode materials, such as carbon or silicon, are each manufactured into electrodes through roller rolling. To extend the lifespan of the rollers, a durable coating film is formed on the roller surfaces. This coating film must possess durability and anti-sticking properties, as well as strength stability at low and high temperatures, thermal stability, structural stability, and corrosion resistance. This is because the high purity of the material to be compressed must not be compromised during the compression process while extending the roller's lifespan. In other words, the coating material must possess anti-sticking properties, adhesion strength, and structural stability; additionally, the possibility of even trace amounts of the coating film's composition being incorporated into the electrode material must be considered. In this regard, high-entropy alloy materials are suitable candidates for the coating material.

[0050] HEA or transition metal-based nanocomposite coating materials can be formed into multifunctional coating films with high density, high purity, and high durability, depending on their design. An alloy coating film can be formed by designing an alloy of elements capable of exhibiting desired properties, manufacturing it as an alloy target, and performing sputtering. Furthermore, the properties of the coating material can be further enhanced by adding an ion source to the coating equipment and supplying elements capable of improving properties as a gas.

[0051] Figure 1 shows a table summarizing the hardness (HIT) and elastic modulus (EIT) of five types of NCM alloy materials selected as candidates for roller coating materials by the present invention, and a photograph of the alloy target.

[0052] The present invention designs a coating material with a composition similar to that of an electrode material, wherein the coating material is composed of a quaternary or higher high-entropy alloy. Accordingly, a high-entropy alloy target is fabricated, and a coating film is formed using sputtering. As will be described later, an ion source is added to include nitrogen and / or carbon in the coating material.

[0053] The present invention designs an alloy target for forming a coating material as Ni-Co-Cr-Si and manufactures the alloy target by composing them into a high-entropy alloy. Although it is generally common for high-entropy alloys to have the same compositional ratio of each constituent element, the composition can be slightly adjusted to achieve desired properties. As shown in the table in FIG. 1, the composition can be selected by exploring properties while changing the alloy composition to see which one shows the best results.

[0054] The coating material utilizing a high-entropy alloy target has a composition similar to that of the electrode material, and has the advantage of hardly compromising the purity of the electrode material even if the coating material is incorporated into the electrode material in trace amounts during the rolling process. Furthermore, the coating material containing the high-entropy alloy of the present invention inherently possesses excellent adhesion to the base material, anti-sticking properties, and structural stability, so there is virtually no concern regarding incorporation during the rolling process.

[0055] The high-entropy alloy target comprising Ni-Co-Cr-Si according to the present invention can be designed with a composition of Ni: 17~25%, Co: 17~25%, Cr: 17~25%, and Si: 25~49%.

[0056] The manufacture of high-entropy alloy targets can be achieved by producing high-purity fine alloy powder through casting, sintering, or atomizing, followed by sintering the powder.

[0057] The design of the coating material using the manufactured high-entropy alloy target was carried out to include N and / or C to improve the mechanical properties of the coating material.

[0058] The quaternary or higher high-entropy alloy coating material of the present invention forms a single-phase structure, exhibiting high strength at low, room, and high temperatures, and possesses excellent thermal stability, structural stability, and corrosion resistance. Accordingly, the coating material of the present invention is suitable for both cold rolling rollers and hot rolling rollers.

[0059] Figure 2 is a layered structure diagram of a coating material according to the present invention.

[0060] A first buffer layer (100) and a second buffer layer (120) are formed on a base material (10), and a top layer (200) is formed thereon. The multilayer buffer layer design improves the bonding strength between the coating layer and the base material and strengthens durability.

[0061] The base material (10) can be HCr, but the coating material of the present invention can be applied to various base materials including metal.

[0062] The formation of the coating material can be carried out as follows using a hybrid coating system (see FIG. 3) in which a sputter source and an ion source are radially arranged around a substrate (rotated on a turntable).

[0063] First embodiment

[0064] The first buffer layer (100) is composed of Ni-Co-Cr-Si-N material using an ion source while sputtering a high-entropy alloy target, the second buffer layer (120) is composed of Ni-Co-Cr-Si-NC, and the top layer (200) is composed of Ni-Co-Cr-Si-C. At this time, the C in the top layer is amorphous carbon.

[0065] When forming the first buffer layer (100), the plasma discharge gas supplied from the sputter source is an inert gas (80 to 100 sccm) and nitrogen (0 to 100 sccm), and the gas supplied to the ion source is an inert gas (80 to 100 sccm) and nitrogen (0 to 100 sccm). The partial pressure of nitrogen in the chamber is controlled to 0 to 50%.

[0066] When forming the second buffer layer (120), the plasma discharge gas supplied from the sputter source is an inert gas (80 to 100 sccm) and nitrogen (0 to 100 sccm), and the gas supplied to the ion source is an inert gas (80 to 100 sccm) and a hydrocarbon gas (12 to 14.5 sccm). At this time, the partial pressure of nitrogen in the chamber is lower than when forming the first buffer layer, and the partial pressure of hydrocarbon is lower than when forming the top layer.

[0067] When forming the top layer (200), only an inert gas (50 to 80 sccm) is supplied to the sputter source, and a hydrocarbon gas (12 to 14.5 sccm) is supplied to the ion source. The partial pressure of hydrocarbon relative to the total amount of inert gas and hydrocarbon in the chamber is controlled at 15 to 22%. The higher the partial pressure of hydrocarbon, the better the HIT and Hv characteristics.

[0068] The current of the ion source is controlled from 100 to 200 mA. As the ion source current is increased, HIT, Hv, and EIT improve.

[0069] A current of 0.8 to 1.5 A is applied to the sputter source, and the bias voltage applied to the base material is 80 to 120 V.

[0070] In addition, it is preferable to perform plasma cleaning on the base material by introducing an inert gas into the ion source before forming the first buffer layer.

[0071] In other words, the initial vacuum chamber is 10 -5 ~10 -3 The surface of the base material is plasma cleaned by vacuuming to torr, applying a current of 30 to 120 mA and a voltage of 1000 to 2000 V to an ion source, and flowing an inert gas (such as Ar) at a rate of 10 to 20 sccm.

[0072] 2nd embodiment

[0073] The buffer layer and top layer are constructed using Ni-Co-Cr-Si-N material. The buffer layer is configured as a gradient layer with a gradually increasing composition ratio of N, while the top layer can be kept constant at a predetermined ratio. Specifically, the plasma discharge gas supplied from the sputter source consists of an inert gas (80 to 100 sccm) and nitrogen (0 to 100 sccm), and the gas supplied to the ion source consists of an inert gas (5 to 7 sccm) and nitrogen (5 to 7 sccm). The partial pressure of nitrogen in the chamber is controlled from 0 to 50%. The partial pressure of nitrogen is gradually increased from the first buffer layer to the second buffer layer, and when the top layer is formed, the partial pressure of nitrogen relative to the total atmospheric pressure including the inert gas and nitrogen is maintained at 17 to 23%. As the partial pressure of nitrogen increases from 0%, the HIT, Hv, and EIT characteristics improve, but when it exceeds a certain level, these characteristics decrease; therefore, it is desirable to find the optimal partial pressure.

[0074] The current of the ion source is controlled at 100 to 200 mA.

[0075] In addition, it is preferable to perform plasma cleaning on the base material by introducing an inert gas into the ion source before forming the first buffer layer.

[0076] The initial vacuum conditions, plasma cleaning conditions, and sputtering conditions for forming the buffer layer are the same as in Example 1.

[0077] Third embodiment

[0078] The buffer layer and top layer are constructed using Ni-Co-Cr-Si-C materials. The buffer layer is configured as a gradient layer in which the composition ratio of C is gradually increased, while the top layer can be kept constant at a predetermined ratio. That is, the plasma discharge gas supplied from the sputter source is an inert gas (50 to 80 sccm), and the gas supplied to the ion source is a hydrocarbon (12 to 14.5 sccm). The hydrocarbon partial pressure in the chamber is controlled at 15 to 22%, and the hydrocarbon partial pressure is gradually increased from the first buffer layer to the second buffer layer. When forming the top layer, the hydrocarbon partial pressure relative to the total pressure including the inert gas and hydrocarbon is maintained at 19 to 22%. The higher the hydrocarbon partial pressure, the more the HIT and Hv characteristics are improved.

[0079] The current of the ion source is controlled from 100 to 200 mA. As the ion source current is increased, HIT, Hv, and EIT improve.

[0080] In addition, it is preferable to perform plasma cleaning on the base material by introducing an inert gas into the ion source before forming the first buffer layer.

[0081] The initial vacuum conditions, plasma cleaning conditions, and sputtering conditions for forming the buffer layer are the same as in Example 1.

[0082] 4th embodiment

[0083] The coating material applied to the surface of industrial rollers is,

[0084] Ni a Co b Cr c Si d It can be composed of a high-entropy alloy with , 17≤a≤25, 17≤b≤25, 17≤c≤25, 25≤d≤49, and a+b+c+d=100. In this case, a separate buffer layer is not required.

[0085] To form the coating material, only an inert gas (50 to 80 sccm) is supplied to the sputter source.

[0086] A current of 0.8 to 1.5 A is applied to the sputter source, and the bias voltage applied to the base material is 80 to 120 V.

[0087] In addition, it is desirable to perform plasma cleaning on the base material by introducing an inert gas into the ion source before forming the coating layer.

[0088] In other words, the initial vacuum chamber is 10 -5 ~10 -3 The surface of the base material is plasma cleaned by vacuuming to torr, applying a current of 30 to 120 mA and a voltage of 1000 to 2000 V to an ion source, and flowing an inert gas (such as Ar) at a rate of 10 to 20 sccm.

[0089]

[0090] All of the above embodiments are carried out at room temperature without a separate heater.

[0091]

[0092] The mechanical hardness HIT of the coating material produced in this way is 7~17.73GPa, the elastic modulus EIT is 162.8~189.1GPa, and Hv is 661.5~1675.4.

[0093] That is, the roller surface having the Ni-Co-Cr-Si-N coating material of the present invention has hardness characteristics of HIT = 9.27~11.81 GPa, 875.9~1116.0 Hv, and EIT = 180.6~189.1 GPa, and

[0094] A roller surface with a Ni-Co-Cr-Si-C coating material has hardness characteristics of HIT = 9.51~17.73 GPa, 898.6~1675.4 HV, and EIT = 134.01~159.885 GPa.

[0095] If carbon is included, low friction characteristics can be expected in addition to high hardness characteristics.

[0096] Figure 6 is a graph and table showing the friction coefficient and bonding strength of the coating material according to the present invention.

[0097] The Ni-Co-Cr-Si-N coating material showed a coefficient of friction of 0.4, and the Ni-Co-Cr-Si-C coating material showed low friction with a coefficient of 0.02.

[0098] Therefore, by appropriately controlling the C content in the Ni-Co-Cr-Si-NC coating material, the friction coefficient of the coating material can be controlled to be 0.02 or higher and less than 0.4.

[0099] In addition, the friction coefficient can be lowered by controlling the C content while adding C to the second buffer layer in the Ni-Co-Cr-Si-N coating material.

[0100] The bonding strength of the Ni-Co-Cr-Si-N coating material and the Ni-Co-Cr-Si-C coating material is excellent with HF1.

[0101] Meanwhile, by modifying the above embodiment, as a coating material coated on the surface of an industrial roller, Ni a Co b Cr c Si d N e C f A coating material can be manufactured comprising a top layer made of a high-entropy alloy with , 3<a<15, 3<b<15, 3<c<15, 5<d<40, 25<e<35, 35<f<65, a+b+c+d+e+f=100, a first buffer layer made of Ni-Co-Cr-Si-N material, and a second buffer layer made of Ni-Co-Cr-Si-NC on the first buffer layer.

[0102]

[0103] Unless otherwise defined in the foregoing, all technical and scientific terms used in this specification have the same meaning as commonly understood by a skilled expert in the art to which the present invention pertains. Furthermore, terms defined in commonly used dictionaries are not to be interpreted ideally or excessively unless explicitly and specifically defined otherwise. Throughout the specification, when a part is described as "comprising" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components. Additionally, the singular form may include the plural form depending on the context.

[0104] In addition, in this specification, "on top of, on top of, or above," "below," or "below" means being located above or below the target part, and does not necessarily mean being located on the upper or lower side with respect to the direction of gravity.

[0105]

[0106] The rights of the present invention are not limited to the embodiments described above but are defined by what is stated in the claims, and it is obvious that a person skilled in the art can make various modifications and productions within the scope of the rights stated in the claims.

[0107]

[0108]

[0109] The present invention can be applied to rollers, etc. included in secondary battery manufacturing equipment.

Claims

1. As a coating material applied to the surface of an industrial roller, Ni a Co b Cr c Si d C f A coating material characterized by being composed of a high-entropy alloy in which , 3<a<10, 3<b<10, 3<c<10, 5<d<15, 50<f<90, a+b+c+d+f=100.

2. A coating material according to claim 1, characterized in that, before forming the coating material, it further comprises a first buffer layer made of a Ni-Co-Cr-Si-N material on the surface of an industrial roller and a second buffer layer made of Ni-Co-Cr-Si-CN on the first buffer layer.

3. As a coating material applied to the surface of an industrial roller, Ni a Co b Cr c Si d N e A coating material characterized by being composed of a high-entropy alloy in which , 5<a<15, 5<b<15, 5<c<15, 25<d<40, 25<e<35, a+b+c+d+e=100.

4. A coating material according to claim 3, wherein, before forming the coating material, a first buffer layer made of Ni-Co-Cr-Si-N material and a second buffer layer on the first buffer layer are further included on the surface of an industrial roller, and the first buffer layer and the second buffer layer are gradient layers in which the nitrogen (N) component is gradually increased in a direction from the surface of the substrate toward the top layer.

5. As a coating material applied to the surface of an industrial roller, A first buffer layer made of Ni-Co-Cr-Si-C material, a second buffer layer on the first buffer layer, and Ni on the second buffer layer a Co b Cr c Si d C f A coating material characterized by having a high-entropy alloy formed as a top layer, wherein , 3<a<10, 3<b<10, 3<c<10, 5<d<15, 50<f<90, a+b+c+d+f=100.

6. A coating material according to claim 5, characterized in that the first buffer layer and the second buffer layer are gradient layers in which the carbon (C) content gradually increases in the direction from the surface of the base material toward the top layer.

7. As a coating material applied to the surface of an industrial roller, Ni a Co b Cr c Si d A coating material characterized by being composed of a high-entropy alloy in which , 17≤a≤25, 17≤b≤25, 17≤c≤25, 25≤d≤49, and a+b+c+d=100.

8. A coating material according to any one of claims 1 to 7, characterized in that the mechanical hardness HIT of the coating material is 7 to 17.73 GPa, the elastic modulus EIT is 162.8 to 189.1 GPa, and Hv is 661.5 to 1675.

4.

9. A method for forming the high-entropy alloy coating material of claim 1, Prepare an industrial roller and a high-entropy alloy target designed with Ni: 17~25%, Co: 17~25%, Cr: 17~25%, Si: 25~49%, and Insert an industrial roller into the chamber, and Vacuum the chamber, Nitrogen, inert gas, and hydrocarbon gas are supplied into the chamber to generate plasma, and Ni is applied to the surface of industrial rollers. a Co b Cr c Si d C f A method for forming a high-entropy alloy coating material in which , 3<a<10, 3<b<10, 3<c<10, 5<d<15, 50<f<90, a+b+c+d+f=100.

10. A method for forming a high-entropy alloy coating material according to claim 9, wherein, in the supply of nitrogen, inert gas, and hydrocarbon gas, the inert gas is supplied at 50 to 80 sccm through a sputter source and the hydrocarbon gas is supplied at 12 to 14.5 sccm through an ion source, and the partial pressure of the hydrocarbon relative to the total amount of inert gas and hydrocarbon in the chamber is controlled at 15 to 22%.

11. In claim 9, before forming the high-entropy alloy coating material as the top layer, a first buffer layer made of Ni-Co-Cr-Si-N material and a second buffer layer made of Ni-Co-Cr-Si-CN are formed on the surface of an industrial roller, and To form the first buffer layer, an inert gas (80 to 100 sccm) and nitrogen (0 to 100 sccm) are supplied to a sputter source, and an inert gas (80 to 100 sccm) and nitrogen (0 to 100 sccm) are supplied to an ion source to generate plasma and coat, and the partial pressure of nitrogen in the chamber is adjusted to 0 to 50%. A method for forming a high-entropy alloy coating material, characterized by supplying an inert gas (80 to 100 sccm) and nitrogen (0 to 100 sccm) to a sputter source to form a second buffer layer, supplying an inert gas (80 to 100 sccm) and a hydrocarbon gas (12 to 14.5 sccm) to an ion source to generate plasma and form a coating, wherein the partial pressure of nitrogen in the chamber is lower than that during the formation of the first buffer layer and the partial pressure of the hydrocarbon is lower than that during the formation of the top layer.

12. A method for forming the high-entropy alloy coating material of claim 3, Prepare an industrial roller and a high-entropy alloy target designed with Ni: 17~25%, Co: 17~25%, Cr: 17~25%, Si: 25~49%, and Insert an industrial roller into the chamber, and Vacuum the chamber, Nitrogen, inert gas, and hydrocarbon gas are supplied into the chamber to generate plasma, and Ni is applied to the surface of industrial rollers. a Co b Cr c Si d N e A method for forming a high-entropy alloy coating material in which , 5<a<15, 5<b<15, 5<c<15, 25<d<40, 25<e<35, a+b+c+d+e=100.

13. A method for forming a high-entropy alloy coating material according to claim 12, wherein an inert gas (80 to 100 sccm) and nitrogen (0 to 100 sccm) are supplied to a sputter source, the plasma discharge gas is an inert gas (80 to 100 sccm) and nitrogen (0 to 100 sccm), and an inert gas (5 to 7 sccm) and nitrogen (5 to 7 sccm) are supplied to an ion source to generate plasma and coat, and the nitrogen partial pressure relative to the total atmospheric pressure including the inert gas and nitrogen is controlled to 17 to 23% to form the high-entropy alloy coating material as a top layer.

14. In paragraph 12, before forming the high-entropy alloy coating material as the top layer, a first buffer layer made of Ni-Co-Cr-Si-N material and a second buffer layer on the first buffer layer are formed on the surface of an industrial roller, wherein A method for forming a high-entropy alloy coating material, characterized by supplying an inert gas (80 to 100 sccm) and nitrogen (0 to 100 sccm) to a sputter source and supplying an inert gas (5 to 7 sccm) and nitrogen (5 to 7 sccm) to an ion source to generate and form a plasma, wherein the nitrogen partial pressure in the chamber is controlled from 0 to 50%, and the nitrogen partial pressure is gradually increased toward the first buffer layer and the second buffer layer, thereby forming a gradient layer in which the nitrogen (N) component is gradually increased from the surface of the base material toward the top layer.

15. A method for forming the high-entropy alloy coating material of claim 5, Prepare an industrial roller and a high-entropy alloy target designed with Ni: 17~25%, Co: 17~25%, Cr: 17~25%, Si: 25~49%, and Insert an industrial roller into the chamber, and Vacuum the chamber, Nitrogen, inert gas, and hydrocarbon gas are supplied into the chamber to generate plasma, and Ni is applied to the surface of industrial rollers. a Co b Cr c Si d C f A method for forming a high-entropy alloy coating material in which , 3<a<10, 3<b<10, 3<c<10, 5<d<15, 50<f<90, a+b+c+d+f=100.

16. In Clause 15, the buffer layer and the top layer are composed of Ni-Co-Cr-Si-C material, the buffer layer is composed of a gradient layer in which the composition ratio of C is gradually increased, and the top layer is constantly controlled at a predetermined ratio, In forming the buffer layer and the top layer, An inert gas (50 to 80 sccm) is supplied to a sputter source, and a hydrocarbon (12 to 14.5 sccm) is supplied to an ion source to generate plasma and coat, The hydrocarbon partial pressure in the chamber is controlled at 15 to 22%, and the hydrocarbon partial pressure is gradually increased toward the first buffer layer and the second buffer layer, and A method for forming a high-entropy alloy coating material characterized by controlling the partial pressure of hydrocarbons relative to the total atmospheric pressure, including inert gas and hydrocarbons, to 19 to 22% when forming the top layer.

17. A method for forming a high-entropy alloy coating material, characterized in that, in either claim 10 or claim 16, the current of the ion source is controlled at 100 to 200 mA to control the mechanical properties of the coating material.

18. In any one of paragraphs 11, 14, and 16, the initial vacuum chamber is 10 -5 ~10 -3 A method for forming a high-entropy alloy coating material, characterized by vacuuming to torr, applying a current of 30 to 120 mA and a voltage of 1000 to 2000 V to an ion source and plasma cleaning the surface of a base material by flowing an inert gas at a rate of 10 to 20 sccm before forming a buffer layer.

19. A high-entropy alloy target designed with Ni: 17~25%, Co: 17~25%, Cr: 17~25%, Si: 25~49%, used in any one of claims 9, 13, and 15, characterized in that it is manufactured by any one of the following methods: casting, sintering, or sintering after manufacturing alloy powder by atomizing.

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