Substrate storage container

Abstract

This substrate storage container comprises: a container body capable of storing a plurality of substrates vertically in multiple stages; a lid body that closes an opening on a front surface of the container body; a front retainer provided on the lid body; and a support structure that is provided on left and right side surfaces or a back surface of the container body and holds the plurality of substrates between the front retainer and the support structure in a state in which the opening of the container body is closed by the lid body. The front retainer has: a base part that is attached to the lid body; and a plurality of substrate pressing parts that are disposed in the vertical direction and each include a holding part that supports the substrate. The holding part includes a holding groove for holding the substrate, a lead-in surface for raising the substrate to the holding groove, and a pull-out surface for pulling out the substrate from a receiving groove of the support structure. The boundary between the pull-out surface and the lead-in surface is formed as a curved surface. The radius of curvature of an outer portion of the curved surface that is close to the left and right side surfaces is greater than the radius of curvature of an inner portion of the curved surface that is far from the left and right side surfaces.

Description

Substrate storage container

[0001] The present disclosure relates to a substrate storage container.

[0002] The substrate storage container includes a container body capable of storing substrates, and a lid for closing the opening of the container body, and is held by a front retainer having a multi-stage substrate pressing portion in the vertical direction, enabling storage of a plurality of (e.g., 25) substrates in an airtight state.

[0003] The substrate pressing portion has a holding portion that contacts and holds the substrate, and an arm portion that absorbs impacts and vibrations generated during transportation of the substrate storage container, etc. (see, for example, Patent Documents 1 and 2). The holding portion includes a V-shaped holding groove, a pull-out surface connected to the holding groove, and a lead-in surface that lifts the substrate and guides it into the holding groove as the lid is closed.

[0004] Japanese Patent Application Laid-Open No. 2008-521259 International Publication No. 2018 / 131363

[0005] However, in the holding portion of the above substrate storage container, the intersection boundary region between the lead-in surface and the pull-out surface is substantially rectangular, and depending on the molding conditions, the surface roughness and dimensional accuracy of the holding portion may vary. Therefore, at this intersection boundary region, the substrate may stagnate (remain) due to frictional force, resulting in lead-in failure at the front retainer or lifting failure at the rear retainer (see FIGS. 8A and 8B). On the other hand, although it is conceivable to form the intersection boundary region between the lead-in surface and the pull-out surface as a curved surface, since the area of the continuously connected pull-out surface will be reduced, there is a concern that pull-out failure or slipping-off failure may occur at the rear retainer (see FIGS. 8C and 8D).

[0006] The present disclosure provides a substrate storage container capable of improving the certainty of the lead-in operation and pull-out operation of substrates.

[0007] (1) A substrate storage container according to one aspect of the present disclosure comprises a container body capable of storing a plurality of substrates in multiple vertical stages, a lid that closes an opening on the front of the container body, a front retainer provided on the lid, and a support structure provided on the left and right sides or the back of the container body, which holds the plurality of substrates between itself and the front retainer when the opening of the container body is closed by the lid. The front retainer has a base that is attached to the lid, and a plurality of substrate pressing parts arranged in the vertical direction, each including a holding part that supports a substrate. The holding part includes a holding groove for holding the substrate, a lead-in surface that pulls the substrate up to the holding groove, and a pull-out surface that pulls the substrate out of the receiving groove of the support structure. The boundary between the pull-out surface and the lead-in surface is formed by a curved surface. The radius of curvature of the outer portion of the curved surface that is close to the left and right sides is greater than the radius of curvature of the inner portion of the curved surface that is far from the left and right sides.

[0008] (2) In the substrate housing container of (1) above, the radius of curvature of the outer portion may be 1.5 mm or more, and the radius of curvature of the inner portion may be 0.5 mm or less.

[0009] (3) In the substrate storage container of (1) or (2) above, the inclination angle of the pulling surface with respect to the substrate surface of the substrate may be greater than 0 degrees and less than or equal to 30 degrees.

[0010] (4) In any one of the substrate storage containers described in (1) to (3) above, the inclination angle of the lead-in surface with respect to the substrate surface of the substrate may be 50 degrees or more and 60 degrees or less.

[0011] (5) In any one of the substrate storage containers described in (1) to (4) above, the curved surface may be formed such that, during the closing operation in which the lid is attached to the opening of the container body, the contact point between the substrate and the substrate retaining portion moves from the lead-in surface to the outer portion and reaches the retaining groove, and during the opening operation in which the lid is removed from the opening of the container body, the contact point moves to the inner portion and moves away from the substrate retaining portion.

[0012] According to this disclosure, it is possible to provide a substrate storage container that can improve the reliability of substrate lead-in and pull-out operations.

[0013] Figure 1 is an exploded perspective view showing a substrate storage container according to one embodiment. Figure 2 is a perspective view showing the back surface of the lid according to one embodiment. Figure 3A is a front view showing the front retainer. Figure 3B is a top view showing the front retainer. Figure 3C is a side view showing the front retainer. Figure 3D is a rear view showing the front retainer. Figure 4A is a front view showing the substrate holding portion. Figure 4B is a top view showing the substrate holding portion. Figure 4C is a rear view showing the substrate holding portion. Figure 4D is a perspective view showing the substrate holding portion. Figure 4E is an enlarged side view showing the substrate holding portion. Figure 4F is an enlarged cross-sectional view showing the substrate holding portion cut along line A-A in Figure 4A. Figure 5A is an enlarged front view showing the holding portion. Figure 5B is an enlarged perspective view showing the holding portion. Figure 5C is a schematic side view showing the holding portion. Figure 6A is a schematic diagram showing the state after the substrate lead-in operation. Figure 6B is a schematic diagram showing the state after the substrate pull-out operation. Figure 7A is a front view showing the movement of the contact point with the substrate in the holding part. Figure 7B is a perspective view showing the movement of the contact point with the substrate in the holding part. Figure 8A is a schematic diagram showing a defective lead-in state of the substrate. Figure 8B is a schematic diagram showing a defective rise-up state of the substrate. Figure 8C is a schematic diagram showing a defective pull-out state of the substrate. Figure 8D is a schematic diagram showing a defective slide-down state of the substrate.

[0014] The embodiments of this disclosure will be described in detail below with reference to the drawings. Throughout the embodiments of this disclosure, the same reference numerals are used for the same components.

[0015] Figure 1 is an exploded perspective view showing a substrate storage container 1 according to one embodiment.

[0016] As shown in Figure 1, the substrate storage container 1 comprises a container body 10 for storing substrates, a lid 20 for closing the opening 11 of the container body 10, and an annular sealing member 30 provided between the container body 10 and the lid 20.

[0017] The container body 10 is a box-shaped body into which multiple substrates can be inserted, and is a front-opening type with a frame-shaped opening 11 formed on the front. The opening 11 is bent with a step so as to widen outwards, and the surface of this step is formed on the inner periphery of the front of the opening 11 as a sealing surface 12 in contact with the sealing member 30.

[0018] Support structures, namely support bodies 13, are positioned on the left and right sides 18 inside the container body 10. The support bodies 13 have the function of temporarily placing and positioning the substrate until the opening 11 of the container body 10 is (completely) closed by the lid 20. Specifically, multiple grooves are formed in the height direction of the support bodies 13, forming so-called groove teeth. The substrate is placed on two groove teeth on the left and right sides at the same height. The material of the support bodies 13 may be the same as the material of the container body 10, but it may also be a different material to improve cleanability and sliding properties.

[0019] A rear retainer 17 is additionally positioned on the rear surface 16 located at the back of the interior of the container body 10, serving as a support structure. When the opening 11 of the container body 10 is closed by the lid 20, the rear retainer 17, in conjunction with the front retainer 40 (described later), holds the substrate by clamping it. For this reason, the substrate receiving portion of the rear retainer 17 is formed as a V-shaped receiving groove.

[0020] The support 13 and the rear retainer 17 may be integrally provided in the container body 10 by insert molding or the like. Alternatively, the support 13 and the rear retainer 17 may be provided as separate components attached to the container body 10 by fitting or the like.

[0021] In a top view, the central plane of the container body 10 is defined as the plane passing through the center of the substrate supported by the support 13 or sandwiched between the front retainer 40 and the rear retainer 17, and including the closing direction of the lid 20.

[0022] A mounting section 14 for a robotic flange is provided in the center of the ceiling of the container body 10. The robotic flange is detachably attached to the mounting section 14. The substrate storage container 1 is grasped by the robotic flange by a transport robot in the factory and transported to processing equipment for each process of processing the substrate.

[0023] The outer surface of the left and right sides 18 of the container body 10 is provided with attachment points 15 for manual handles. Manual handles, which are held by the operator, are detachably attached to the left and right attachment points 15.

[0024] For example, an air intake valve and an exhaust valve may be provided on the bottom surface of the container body 10. Each of the air intake valve and exhaust valve has a filter for filtering gas and also has a check valve function. By supplying an inert gas such as nitrogen gas or dry air from the air intake valve to the inside of the sealed substrate storage container 1, which is closed by the lid 20, and discharging it from the exhaust valve as needed, the gas inside the substrate storage container 1 is replaced or the airtight state is maintained. The number and position of the air intake valve and exhaust valve are arbitrary.

[0025] Next, the lid 20 will be described. Figure 2 is a perspective view showing the back surface of the lid 20 according to one embodiment.

[0026] The lid 20 is attached to the front of the opening 11 of the container body 10 and has a substantially rectangular shape. The lid 20 has a locking mechanism (not shown), and is locked when a locking claw is fitted into a locking hole formed in the container body 10. As shown in Figure 2, an elastic front retainer 40 is provided in the center of the lid 20 to hold the front edge of the substrate horizontally.

[0027] The front retainer 40, like the grooved teeth of the support 13 and the rear retainer 17, is a part that comes into direct contact with the substrate, and therefore is made of a material with good cleanability and sliding properties. The front retainer 40 may be detachably attached to the cover 20 by fitting and locking, or it may be integrally molded by insert molding.

[0028] A mounting groove for attaching the sealing member 30 is formed on the underside of the lid 20. More specifically, a protrusion smaller than the step of the opening 11 is formed in an annular shape on the underside of the lid 20, thereby forming a mounting groove with a roughly U-shaped cross-section. When the lid 20 is attached to the container body 10, this protrusion is recessed beyond the step of the opening 11.

[0029] Examples of materials for the container body 10 and lid 20 mentioned above include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetheretherketone, and liquid crystal polymer. Conductive agents such as conductive carbon or conductive polymer, various antistatic agents, ultraviolet absorbers, etc., may be further added to these thermoplastic resins as appropriate.

[0030] The sealing member 30 adheres tightly to the sealing surface 12 and the lid 20 when the lid 20 is attached to the container body 10, ensuring the airtightness of the substrate storage container 1. The sealing member 30 reduces the intrusion of dust and moisture from the outside into the substrate storage container 1, and also reduces the leakage of gas and liquid from the inside into the substrate storage container 1.

[0031] The sealing member 30 has an annular shape that corresponds to the front shape of the lid 20 (and the shape of the opening 11 of the container body 10) (see Figure 2). The annular sealing member 30 may be substantially ring-shaped, substantially elliptical, or substantially oblong before being attached to the lid 20.

[0032] If there is any looseness in the sealing member 30 when it is fitted into the mounting groove, variations will occur in the sealing area of ​​the seal lip. For this reason, the inner circumference of the frame of the sealing member 30 is formed to be slightly smaller (about 1% to 5%) than the annular circumferential surface located at the back of the mounting groove.

[0033] The sealing member 30 is molded using thermoplastic elastomers such as polyester elastomers, polyolefin elastomers, fluorine elastomers, and urethane elastomers, or elastic materials such as fluororubber, ethylene propylene rubber, and silicone rubber. From the viewpoint of improving adhesion, these materials may be selectively to which fillers such as carbon, glass fiber, mica, talc, silica, and calcium carbonate, and resins such as polyethylene, polyamide, polyacetal, fluorine resins, and silicone resins are added in predetermined amounts. From the viewpoint of providing conductivity and antistatic properties, carbon fiber, metal oxides, or various antistatic agents may be added as appropriate. The hardness of the sealing member 30 may be 40 to 90 degrees or 60 to 90 degrees on the Shore A hardness scale.

[0034] The substrate storage container 1 can store substrates with a diameter of, for example, 300 mm or 450 mm. The type of substrate stored in the substrate storage container 1 is not particularly limited and may be, for example, a silicon wafer, a quartz wafer, or a gallium arsenide wafer.

[0035] Now, let's describe the front retainer 40. Figure 3A is a front view of the front retainer 40. Figure 3B is a top view of the front retainer 40. Figure 3C is a side view of the front retainer 40. Figure 3D is a rear view of the front retainer 40. Figure 4A is a front view of the substrate holding portion 42. Figure 4B is a top view of the substrate holding portion 42. Figure 4C is a rear view of the substrate holding portion 42. Figure 4D is a perspective view of the substrate holding portion 42. Figure 4E is an enlarged side view of the substrate holding portion 42. Figure 4F is an enlarged cross-sectional view of the substrate holding portion 42 taken along line A-A in Figure 4A. Figure 5A is an enlarged front view of the holding portion 422. Figure 5B is an enlarged perspective view of the holding portion 422. Figure 5C is a schematic side view of the holding portion 422.

[0036] As shown in Figures 3A to 3D, the front retainer 40 has a base portion 41 that is attached to the cover 20 and a plurality of (stages) of substrate pressing portions 42 arranged in the vertical direction.

[0037] The base portion 41 has a roughly rectangular plate shape. The base portion 41 is attached to the lid 20 by the locking portions 411 on both sides of the base portion 41 being fitted or locked by fixing means formed in the recess of the lid 20 (see Figure 2). At this time, the base portion 41 is attached slightly away from the bottom surface of the recess of the lid 20 by a plurality of protrusions 412 formed on the surface opposite to the surface from which the substrate pressing portion 42 extends (see Figures 3C and 3D).

[0038] Each substrate retaining portion 42 supports the substrate. Each substrate retaining portion 42 includes an arm portion 421 that extends from one side of a pair of left and right base portions 41 and is connected to them. In the front retainer 40 of this embodiment, 25 substrate retaining portions 42 are spanned across the left and right base portions 41.

[0039] The arm portion 421 is elastically deformable as a whole in the front-to-back direction (closing direction) connecting the back surface 16 of the container body 10 and the lid 20.

[0040] The arm portion 421 includes a holding portion 422 that contacts and presses against the substrate. In this embodiment, the arm portion 421 includes a pair of holding portions 422 positioned symmetrically on the left and right sides of the arm portion 421. The bridging portion 423 located between the left and right pair of holding portions 422, 422 is curved or bent in a direction away from the back surface 16 (see Figures 3B and 4B).

[0041] The retaining portion 422 has a beak-like shape with an open upper and lower jaw, and has a retaining groove 45 formed on its inner side (the part facing the back surface 16). More specifically, the retaining portion 422 has an upper first inclined surface 45a that is inclined with respect to the substrate surface (or horizontal (reference) surface) of the substrate held by the retaining portion 422, and a lower second inclined surface 45b that is inclined on the opposite side from the first inclined surface 45a with respect to the substrate surface, and the first inclined surface 45a and the second inclined surface 45b form a retaining groove 45 that is approximately V-shaped in side view (see Figures 5A to 5C). The substrate surface is the surface of the substrate and is the surface that intersects the vertical direction.

[0042] The holding portions 422 of each stage are formed such that the inclination angle θ1 of the first inclined surface 45a with respect to the substrate surface is equal to or greater than the inclination angle θ2 of the second inclined surface 45b with respect to the substrate surface. The inclination angle θ1 is the angle formed by the substrate surface and the first inclined surface 45a. The inclination angle θ2 is the angle formed by the substrate surface and the second inclined surface 45b. When the inclination angles θ1 and θ2 are the same angle, the inclination angles θ1 and θ2 may be, for example, about 30 degrees or more and 60 degrees or less. When the inclination angles θ1 and θ2 are different angles, the inclination angle θ1 may be, for example, about 55 degrees or more and 75 degrees or less, and the inclination angle θ2 may be, for example, about 30 degrees or more and 50 degrees or less.

[0043] As shown in FIGS. 5A to 5C, the holding portion 422 includes a lead-in surface 46 that lifts the substrate up to the holding groove 45 below the holding groove 45, and a pulling-out surface 47 that pulls the substrate out from the receiving groove of the substrate receiving portion of the retainer 17.

[0044] The lead-in surface 46 is continuous with the lower end of the pulling-out surface 47. The lead-in surface 46 is inclined so as to approach the back surface 16 as it goes downward. The inclination angle θ3 of the lead-in surface 46 with respect to the substrate surface may be, for example, 45 degrees or more and 75 degrees or less, or 50 degrees or more and 60 degrees or less. The inclination angle θ3 is the angle formed by the substrate surface and the lead-in surface 46. Note that the lead-in surface 46 is also inclined so as to approach the back surface 16 as it goes from the center in the left-right direction of the substrate pressing portion 42 toward the side surface 18.

[0045] The pulling-out surface 47 is continuous with the lower end of the second inclined surface 45b. The pulling-out surface 47 is inclined so as to approach the back surface 16 as it goes downward. The inclination angle θ4 of the pulling-out surface 47 with respect to the substrate surface may be, for example, more than 0 degrees and 30 degrees or less. The inclination angle θ4 is the angle formed by the substrate surface and the pulling-out surface 47.

[0046] The boundary between the lead-in surface 46 and the pulling-out surface 47 is formed by a curved surface 48 (hereinafter referred to as "boundary curved surface 48") so that the substrate can slide smoothly.

[0047] The boundary surface 48 is formed with different curvatures in the outer portion 481 and the inner portion 482. Specifically, the radius of curvature of the outer portion 481 is larger than that of the inner portion 482. The outer portion 481 is a portion of the boundary surface 48 that is closer to the side surface 18 closer to the holding portion 422 among the left and right side surfaces 18. The inner portion 482 is a portion of the boundary surface 48 that is farther from the side surface 18 closer to the holding portion 422 among the left and right side surfaces 18. In other words, the outer portion 481 is closer to the side surface 18 closer to the holding portion 422 among the left and right side surfaces 18 than the inner portion 482. The inner portion 482 is closer to the center in the left - right direction of the pair of holding portions 422 (that is, the center in the left - right direction of the substrate pressing portion 42) than the outer portion 481. The radius of curvature of the outer portion 481 may be, for example, 1.5 mm or more and 5.0 mm or less, and the radius of curvature of the inner portion 482 may be 0.1 mm or more and 0.5 mm or less.

[0048] Finally, the state of the lead - in operation and the pulling - out operation of the substrate in the substrate storage container 1 will be described. FIG. 6A is a schematic diagram showing the state after the lead - in operation of the substrate. FIG. 6B is a schematic diagram showing the state after the pulling - out operation of the substrate. The lead - in operation is an operation of guiding the substrate supported by the support 13 into the holding groove 45 of the holding portion 422 and the receiving groove of the rear retainer 17. The pulling - out operation is an operation in which the substrate is pulled out toward the lid body 20 as the lid body 20 is opened.

[0049] In the closing operation of the lid body 20, when the lid body 20 is pressed toward the rear surface 16 of the container body 10 in the closing direction, the peripheral edge of the substrate facing the lid body 20 contacts the holding portion 422 of the substrate pressing portion 42 that has moved, and the peripheral edge of the substrate facing the rear surface 16 contacts the rear retainer 17.

[0050] Then, as shown in FIG. 6A, the substrate is in a state of being separated (floating) from the support 13 and is held (sandwiched) between the holding portion 422 of the substrate pressing portion 42 and the receiving groove of the rear retainer 17. Note that the substrate pressing portion 42 is disposed at a position facing the substrate receiving portion of the rear retainer 17 provided on the rear surface 16.

[0051] When the lid 20 is opened, as the holding portion 422 of the substrate pressing portion 42 retracts, the peripheral edge of the substrate facing the lid 20 is dragged by the pulling surface 47, and the peripheral edge of the substrate facing the back surface 16 is pulled out from the receiving groove of the substrate receiving portion of the rear retainer 17 toward the lid 20.

[0052] The substrate is then supported by the support 13 of the container body 10 and the lower end of the receiving groove of the rear retainer 17, as shown in Figure 6B. The closing and opening of the lid 20 is performed by an operator or a robotic hand.

[0053] Next, we will explain how the contact points between the substrate and the holding portion 422 move during the lead-in operation of the substrate accompanying the closing operation of the lid 20 and the pull-out operation of the substrate accompanying the opening operation of the lid 20. Figure 7A is a front view showing how the contact points between the substrate and the holding portion 422 move. Figure 7B is a perspective view showing how the contact points between the substrate and the holding portion 422 move. In Figures 7A and 7B, the solid arrows represent the trajectory of the contact points during the closing operation, and the dashed arrows represent the trajectory of the contact points during the opening operation.

[0054] In the operation of attaching and closing the lid 20 to the opening of the container body 10, as the lid 20 is pressed toward the back surface 16 of the container body 10 in the closing direction, the peripheral edge of the substrate facing the lid 20 comes into contact with the lead-in surface 46 of the moving substrate holding portion 42 at the sit position (the height position of the substrate supported by the support 13). Subsequently, as the arm portion 421 of the substrate holding portion 42 begins to elastically deform, the peripheral edge of the substrate facing the lid 20 moves from the lead-in surface 46, sliding along the outer portion 481 of the boundary curved surface 48, and through the second inclined surface 45b to the back of the V-shaped holding groove 45.

[0055] In other words, as shown by the solid arrows in Figures 7A and 7B, the contact point between the substrate and the retaining portion 422 moves from the lead-in surface 46 to the outer portion 481 of the boundary curved surface 48, approaching the side surface 18 that is closer to the retaining portion 422, and reaches the retaining groove 45.

[0056] During the opening operation of the lid 20, as the lid 20 retracts, the elastic restoration of the arm portion 421 of the substrate holding portion 42 is completed first. As a result, the peripheral edge of the substrate facing the lid 20 slides down the second inclined surface 45b from the bottom of the holding groove 45 due to the retraction of the holding portion 422, and then slides along the inner portion 482 of the boundary curved surface 48 via the pull-out surface 47, and then separates from the lead-in surface 46. As a result, the substrate as a whole is pulled out toward the lid 20 by a certain amount.

[0057] In other words, the contact point between the substrate and the retaining portion 422 moves from the retaining groove 45 to the inner portion 482 of the boundary curved surface 48, as shown by the dashed arrows in Figures 7A and 7B, and separates from (detaches from) the retaining portion 422.

[0058] This section describes various defects in conventional substrate storage containers, including substrate lead-in defects. Figure 8A is a schematic diagram showing a substrate lead-in defect. Figure 8B is a schematic diagram showing a substrate lift-up defect. Figure 8C is a schematic diagram showing a substrate pull-out defect. Figure 8D is a schematic diagram showing a substrate slide-down defect.

[0059] A lead-in failure, as shown in Figure 8A, occurs when the substrate is held in the correct position by the rear retainer 17, but not in the correct position at the back of the retaining groove 45, resulting in the substrate being tilted from a horizontal position. A rise-up failure, as shown in Figure 8B, occurs when the substrate is held in the correct position by the retaining groove 45, but not in the correct position by the rear retainer 17, resulting in the substrate being tilted from a horizontal position.

[0060] A pull-out failure, as shown in Figure 8C, occurs when the substrate is supported by the support 13 but not by the rear retainer 17, causing the substrate to protrude toward the lid 20. A slide-down failure, as shown in Figure 8D, occurs when the substrate is not held in the correct position by the support 13 and is not held in the correct position by the rear retainer 17, causing the substrate to be tilted from a horizontal position.

[0061] As described above, the substrate storage container 1 comprises a container body 10 capable of storing multiple substrates in multiple vertical rows, a lid 20 that closes the opening on the front of the container body 10, a front retainer 40 provided on the lid 20, and a rear retainer (support structure) 17 provided on the back surface 16 of the container body 10, which holds the substrates between itself and the front retainer 40 when the opening of the container body 10 is closed by the lid 20. The front retainer 40 has a base portion 41 that is attached to the lid 20 and a plurality of substrate pressing portions 42 arranged in the vertical direction. The holding portion 422 of each substrate pressing portion 42 includes a holding groove 45 for holding the substrate, a lead-in surface 46 that pulls the substrate up to the holding groove 45, and a pull-out surface 47 that pulls the substrate out from the receiving groove of the rear retainer 17. The boundary between the pull-out surface 47 and the lead-in surface 46 is formed by a boundary curved surface 48. The radius of curvature of the outer portion 481 of the boundary surface 48, which is close to the left and right side surfaces 18, is greater than the radius of curvature of the inner portion 482 of the boundary surface 48, which is farther from the left and right side surfaces 18.

[0062] As a result, during the closing operation in which the lid 20 is attached to the opening of the container body 10, the contact point between the substrate and the holding portion 422 of the substrate retaining portion 42 moves from the lead-in surface 46 to the outer portion 481 of the boundary curved surface 48 and reaches the holding groove 45. On the other hand, during the opening operation in which the lid 20 is removed from the opening of the container body 10, the contact point between the substrate and the holding portion 422 of the substrate retaining portion 42 moves along the inner portion 482 and moves away from the holding portion 422 of the substrate retaining portion 42. This is because the timing of the bending and bending-back movements of the arm portion 421 of the substrate retaining portion 42 is different during the closing operation and the opening operation. In this way, the contact point with the substrate at the holding portion 422 can be made to follow different paths during the substrate lead-in operation and the substrate pull-out operation, thereby improving the reliability of both operations.

[0063] Furthermore, if the radius of curvature of the outer portion 481 and the inner portion 482 of the boundary curved surface 48 is made small in common, the transition from the lead-in surface 46 to the drag-out surface 47 may not occur smoothly. On the other hand, if the radius of curvature of the outer portion 481 and the inner portion 482 of the boundary curved surface 48 is made large in common, the area of ​​the drag-out surface 47 becomes too small, making drag-out defects more likely to occur.

[0064] In the front retainer 40, the radius of curvature of the outer portion 481 is 1.5 mm or more, and the radius of curvature of the inner portion 482 is 0.5 mm or less. As a result, only the outer portion 481 that comes into contact with the substrate during the mounting operation of the lid 20 has a large radius of curvature. Therefore, the outer portion 481 is made into a smooth curved surface, and the area of ​​the outer portion 481 connected to the lead-in surface 46 is increased, while also ensuring the area of ​​the pull-out surface 47.

[0065] The pulling surface 47 of the front retainer 40 has an inclination angle θ4 with respect to the substrate surface that is greater than 0 degrees and less than or equal to 30 degrees. This allows the inclination angle of the pulling surface 47 for pulling out the substrate to be sufficiently large.

[0066] The lead-in surface 46 of the front retainer 40 has an inclination angle θ3 of 50 degrees or more and 60 degrees or less with respect to the substrate surface. This allows the inclination angle of the lead-in surface 46 that lifts the substrate to be sufficiently large.

[0067] While preferred embodiments of this disclosure have been described in detail above, this disclosure is not limited to the embodiments described above, and various modifications or changes are possible within the scope of the gist of this disclosure as described in the claims.

[0068] (Modification) In the above embodiment, a rear retainer 17 is formed or arranged on the back surface 16 of the container body 10 as a support structure and functions as a substrate receiving portion. However, the portions of the support bodies 13 provided on the left and right sides 18 that are close to the back surface 16 may be formed in a shape that functions as a substrate receiving portion without the rear retainer 17 being arranged. In this case, the substrate is held between the holding portion 422 of the substrate pressing portion 42 and the pocket end of the portion of the support body 13 that is close to the back surface 16. That is, in Figures 6A and 6B, the rear retainer 17 is replaced by the pocket end of the support body 13.

[0069] 1. Substrate storage container 10. Container body 11. Opening 12. Seal surface 13. Support (support structure) 14. Attached part 15. Attached part 16. Back surface 17. Rear retainer (support structure) 18. Side surface 20. Lid 30. Seal member 40. Front retainer 41. Base 411. Locked part 412. Protrusion 42. Substrate pressing part 421. Arm part 422. Holding part 423. Bridging part 45. Holding groove 45a. First inclined surface 45b. Second inclined surface 46. Lead-in surface 47. Pull-out surface 48. Boundary curved surface 481. Outer part 482. Inner part θ1, θ2, θ3, θ4. Inclination angle

Claims

1. A substrate storage container comprising: a container body capable of storing multiple substrates in multiple vertical rows; a lid that closes the opening on the front of the container body; a front retainer provided on the lid; and a support structure provided on the left and right sides or the back of the container body, which holds the multiple substrates between itself and the front retainer when the opening of the container body is closed by the lid, wherein the front retainer has a base that is attached to the lid, and a plurality of substrate pressing parts arranged in the vertical direction, each including a holding part that supports a substrate, the holding part includes a holding groove for holding the substrate, a lead-in surface that pulls the substrate up to the holding groove, and a pull-out surface that pulls the substrate out from the receiving groove of the support structure, the boundary between the pull-out surface and the lead-in surface is formed by a curved surface, and the radius of curvature of the outer part of the curved surface near the left and right sides is greater than the radius of curvature of the inner part of the curved surface farther from the left and right sides.

2. The substrate storage container according to claim 1, wherein the radius of curvature of the outer portion is 1.5 mm or more, and the radius of curvature of the inner portion is 0.5 mm or less.

3. The substrate storage container according to claim 1 or 2, wherein the inclination angle of the pulling surface with respect to the substrate surface of the substrate is greater than 0 degrees and less than or equal to 30 degrees.

4. The substrate storage container according to claim 1 or 2, wherein the inclination angle of the lead-in surface with respect to the substrate surface of the substrate is 50 degrees or more and 60 degrees or less.

5. The substrate storage container according to claim 1 or 2, wherein the curved surface is formed such that, during a closing operation in which the lid is attached to the opening of the container body, the contact point between the substrate and the substrate retaining portion moves from the lead-in surface to the outer portion and reaches the retaining groove, and during an opening operation in which the lid is removed from the opening of the container body, the contact point moves to the inner portion and moves away from the substrate retaining portion.

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