Magneto-optical chemical sensors for process chambers
Magneto-optical sensors using Faraday or Voigt rotation spectroscopy enhance sensitivity for radical detection in process chambers, addressing non-uniformity and non-stability issues, thereby improving process uniformity and stability.
WO2026111808A1PCT designated stage Publication Date: 2026-05-28APPLIED MATERIALS INC
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Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- APPLIED MATERIALS INC
- Filing Date
- 2025-09-23
- Publication Date
- 2026-05-28
AI Technical Summary
Technical Problem
Existing process chambers face challenges in achieving uniform processing conditions and process stability due to non-uniformity and non-stability, which are difficult to monitor using conventional sensors.
Method used
The implementation of magneto-optical sensors, utilizing Faraday or Voigt rotation spectroscopy, to detect radical species within process chambers with enhanced sensitivity, allowing real-time in situ monitoring and reducing interference from stable molecules.
Benefits of technology
The magneto-optical sensors provide a sensitivity enhancement of over an order of magnitude for radical detection, enabling real-time monitoring and reducing noise interference, thereby improving process uniformity and stability in process chambers.
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Abstract
Magneto-optical sensors for process or process chamber condition monitoring are described. In an example, a system includes a process chamber. The system also includes a laser source to provide a laser beam having an initial polarization, the laser beam to be directed through a first polarizer and then into the process chamber. The system also includes a magnet surrounding the process chamber, the magnet to provide a Faraday rotation of the laser beam, the laser beam to exit the process chamber and enter a second polarizer and then a detector to provide a detected polarization rotation for lock-in detection.
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