Microvalve, microchannel device, and microchannel device handling apparatus

Abstract

The present invention makes it possible to provide a microvalve in which a communicating part that links a plurality of channels does not become joined to a joining member, and in which interface delamination between a housing and a joining surface of the joining member and fluid leakage from the channels do not occur. Provided is a normally-open microvalve that turns on / off the continuity of a plurality of channels. The microvalve has: a housing member (10) in which the channels are engraved; and a flexible joining member (20) that is joined to the housing member (10) to seal the channels. The housing member (10) comprises: an opening (11); a first channel (12) connected to the opening (11) and extending toward a bottom-surface side of the housing member (10); a valve plug insertion part (15) into which a valve plug (30) covering the opening (11) is fitted; and a second channel (13) formed on an upper-surface side of the housing member (10) and connected to the valve plug insertion part (15). The microvalve has: a communicating part (14) connecting the opening (11) and the second channel (13); and the valve plug (30). The joining member (20) is joined to the upper surface of the housing member (10), and in the closed state, the valve plug (30) is pressed from the joining member (20) side and elastically deformed to close up the communicating part (14).

Description

Microvalve, Microchannel Device, and Microchannel Device Handling Apparatus

[0001] The present invention relates to a microvalve in a microchannel device used for gene testing and the like.

[0002] Among microvalves in a microchannel device, there are types that open and close by compressing or expanding a member. In this type of microvalve, the housing or the joining member is composed of an elastic member and is deformed by an external force to open and close the flow path. As such microvalves, there are normally closed type (always closed type) and normally open type (always open type), but since both are formed by joining the housing and the joining member, there were the following problems.

[0003] Japanese Patent No. 5062327 Japanese Unexamined Patent Application Publication No. 2022-178478 Japanese Patent No. 5329952 Japanese Patent No. 5967552

[0004] First, in a microvalve of the type that opens and closes by compressing or expanding such a member, elasticity is required for one of the housing and the joining member, and rigidity that does not easily deform is required for the other, so the housing and the joining member are made of different types of materials, and it is necessary to join these. Such joining of different materials generally requires methods such as chemical conversion treatment (silane coupling treatment) or surface activation treatment (plasma treatment) because the joining strength becomes weak with simple thermocompression bonding. However, when forming a microvalve using such a method, there was a problem that the flow path of the microvalve and the joining member might be accidentally joined, or they might be joined when closing the valve.

[0005] Further, the valve has a role of blocking the communication part that connects a plurality of flow paths, and from the viewpoint of efficient control of the valve and the like, it is desirable to reduce the load applied to the valve. In order to achieve this, a device has been made to make the depth of the communication part shallower than the depth of the flow path for the purpose of reducing the displacement amount of the joining member. However, when the depth of the communication part is shallower than the depth of the flow path, there is also a problem that the communication part and the joining member are likely to be joined when the valve is closed.

[0006] Furthermore, in the practical environment of microfluidic devices, the flow path is heated in part or entirely, or suction and discharge are performed by a pump. This creates pressure within the flow path of the microvalve, causing delamination at the interface between the housing and the connecting member, or pushing up the valve which is blocked by external force, leading to fluid leakage from the flow path. In addition, increasing the bonding strength to prevent delamination increases the likelihood of incorrect bonding at the communication points.

[0007] Therefore, the inventors diligently conducted research and succeeded in developing a microvalve in which a housing and a connecting member are joined, in which the connecting portion that connects multiple flow paths is not joined to the connecting member, and no interfacial delamination occurs at the joint surface between the housing and the connecting member, nor does fluid leakage occur from the flow path, thus completing the present invention.

[0008] Specifically, in a normally open type microvalve, the housing member has an opening, a first flow path connected to the opening and extending toward the bottom surface of the housing member, a valve body insertion part into which a valve body covering the opening is fitted, and a second flow path formed on the upper surface of the housing member and connected to the valve body insertion part. Furthermore, a communication part and a valve body are provided connecting the opening and the second flow path, and in the closed state, the valve body is pressed from the joining member side, causing elastic deformation and closing the communication part. By configuring the valve in this way, a microvalve that does not suffer from the above-mentioned problems was obtained.

[0009] Here, Patent Document 1 discloses a microvalve in which a displacement member can open and close the opening of the valve housing with consistently stable sealing. Patent Document 2 discloses a fluid handling device that can be easily manufactured, allows for easy opening and closing of the flow path, and can be miniaturized. However, these documents did not disclose the configuration of the microvalve of the present invention. Furthermore, the microvalves described in Patent Documents 3 and 4 have a configuration in which the connecting member elastically deforms in the closed state to close the communication part, but the problem of the housing and connecting member being mistakenly joined together was not solved.

[0010] The present invention has been made in view of the above circumstances, and aims to provide a microvalve, a microfluidic device, and a microfluidic device handling device in which a housing and a joining member are joined, in which the connecting portion that connects multiple flow paths and the joining member are not joined, and interfacial delamination of the joining surface between the housing and the joining member and fluid leakage from the flow paths do not occur.

[0011] To achieve the above objective, the microvalve of the present invention is a normally open type microvalve that opens and closes the conductivity of a plurality of flow paths, and comprises a housing member on which the flow paths are engraved and a flexible joining member that is joined to the housing member and seals the flow paths, wherein the housing member comprises an opening, a first flow path connected to the opening and extending toward the bottom surface of the housing member, a valve body insertion portion into which a valve body covering the opening is fitted, and a second flow path formed on the upper surface of the housing member and connected to the valve body insertion portion, and comprises a communication portion connecting the opening and the second flow path and the valve body, wherein the joining member is joined to the upper surface of the housing member, and in the closed state, the valve body is pressed from the joining member side and elastically deforms to close the communication portion.

[0012] Furthermore, it is preferable that the microvalve of the present invention has a configuration in which the communication portion is provided on the housing member. Furthermore, it is preferable that the microvalve of the present invention has a configuration in which the communication portion is provided on the valve body. Furthermore, it is preferable that the microvalve of the present invention has a configuration in which the communication portion is not in contact with the joining member. Moreover, it is preferable that the microvalve of the present invention has a configuration in which the valve body and the joining member are joined together.

[0013] Furthermore, it is preferable that the microvalve of the present invention has a configuration in which the first flow path extends along the bottom surface of the housing member, and other connecting members are joined to the bottom surface of the housing member. Furthermore, it is preferable that the microvalve of the present invention has a configuration in which the cross-section of the flow path of the communication portion is a curved shape, an inverted triangle, a rectangle, an inverted trapezoid, an inverted trapezoid with a curved shape, an inverted triangle, or an inverted trapezoid on the lower side, or a rectangle with a curved shape, an inverted triangle, or an inverted trapezoid on the lower side.

[0014] Furthermore, it is preferable that the microvalve of the present invention has a configuration in which the valve body is cylindrical, an inverted frustocone, or a cylinder with an inverted frustocone on the lower side. Furthermore, it is preferable that the microvalve of the present invention has a configuration in which a plurality of the second flow paths are provided in the housing member.

[0015] Furthermore, it is preferable that, when the microvalve of the present invention is closed, the internal pressure of the first or second flow path is higher than the internal pressure of the other flow path. Moreover, it is preferable that the microvalve of the present invention be configured by combining various types of the above-mentioned microvalves.

[0016] The microfluidic device of this embodiment is configured to include any of the above-described microvalves. Furthermore, it is preferable that the microfluidic device of this embodiment has a temperature control region or a pressure control region on an extension of the first or second flow path. The microfluidic device handling device of this embodiment is configured to include any of the above-described microfluidic devices and a drive device having a pressing member for pressing the valve body from the joining member side.

[0017] Furthermore, it is preferable that the microfluidic device handling device of this embodiment is configured such that the pressing member, the valve body, and the opening are arranged concentrically. Moreover, it is also preferable that the microfluidic device handling device of this embodiment is configured such that the pressing surface of the pressing member is larger than the horizontal cross-section of the opening and smaller than the horizontal cross-section of the valve body.

[0018] According to the present invention, in a microvalve formed by joining a housing and a joining member, the connecting portion that connects multiple flow paths does not become joined to the joining member, and it is possible to provide a microvalve, a microfluidic device, and a microfluidic device handling device that prevent interfacial delamination of the joining surface between the housing and the joining member and fluid leakage from the flow paths.

[0019] This is a schematic diagram showing the configuration of a microfluidic device having a microvalve according to an embodiment of the present invention. This is a schematic diagram showing a cross-section (longitudinal section) of the microvalve in the open state according to an embodiment of the present invention. This is a schematic diagram showing a cross-section (transverse plane) of the microvalve in the open state according to an embodiment of the present invention. This is a schematic diagram showing a cross-section (longitudinal section) of the microvalve in the closed state according to an embodiment of the present invention. This is a schematic diagram showing a cross-section (transverse plane) of the microvalve in the closed state according to an embodiment of the present invention. This is a schematic diagram showing a cross-section (transverse plane) of the communication portion in the microvalve according to an embodiment of the present invention. This is a schematic diagram showing the configuration and cross-section of a modified example 1 of the microvalve according to an embodiment of the present invention (one with a communication portion on the valve body). This is a schematic diagram showing the configuration and cross-section of a modified example 2 of the microvalve according to an embodiment of the present invention (one with a cylindrical shape and an inverted truncated cone on the lower side of the valve body). This is a schematic diagram showing the configuration and cross-section of a modified example 3 of the microvalve according to an embodiment of the present invention (one with a plurality of second flow paths). This is a schematic diagram showing the configuration of a microfluidic device handling device according to an embodiment of the present invention (a type that presses the valve body from above and heats the second flow path with a heating device (A), and a type that heats the first flow path with a heating device (B)). This is a schematic diagram showing the configuration of a microfluidic device handling apparatus according to an embodiment of the present invention (a valve body that is pressed from below, with a heating device that heats the second flow path (C), and a pressurizing device that pressurizes the second flow path (D)). This is an explanatory diagram showing how, in a conventional normally open type microvalve, when the valve is closed, interfacial delamination at the joint surface between the housing and the joining member and fluid leakage from the flow path occur.

[0020] The following describes in detail the microvalve, microfluidic device, and microfluidic device handling apparatus according to embodiments of the present invention. However, the present invention is not limited to the specific details of the following embodiments.

[0021] A microvalve according to an embodiment of the present invention is a normally open type microvalve that opens and closes the conductivity of a plurality of flow paths, and comprises a housing member on which flow paths are engraved and a flexible joining member that is joined to the housing member and seals the flow paths, wherein the housing member comprises an opening, a first flow path connected to the opening and extending toward the bottom surface of the housing member, a valve body insertion portion into which a valve body covering the opening is fitted, and a second flow path formed on the upper surface of the housing member and connected to the valve body insertion portion, and has a communication portion connecting the opening and the second flow path and a valve body, the joining member is joined to the upper surface of the housing member and, in the closed state, the valve body is pressed from the joining member side and elastically deforms to close the communication portion.

[0022] Specifically, as shown in Figures 1 to 5, the microvalve according to this embodiment includes a housing member 10 and a connecting member 20. The housing member 10 is provided with an opening 11, a first flow path 12 connected to the opening 11 and extending toward the bottom surface of the housing member 10, a valve body insertion portion 15 into which a valve body 30 covering the opening 11 is fitted, and a second flow path 13 formed on the upper surface of the housing member 10 and connected to the valve body insertion portion 15.

[0023] Furthermore, the microvalve of this embodiment has a communication portion 14 connecting the opening 11 and the second flow path 13, and a valve body 30, and the joining member 20 is joined to the upper surface of the housing member 10. The upper surface of the housing member 10 has an opening in the area above the valve body insertion portion 15, and the joining member 20 is joined to this upper area, the second flow path 13, and the surface other than the opening 21 (joint surface) which will be described later. The microvalve of this embodiment is a normally open type microvalve in which the flow path is open in the normal state, and in the closed state, the valve body 30 is pressed from the joining member 20 side and elastically deforms, closing the communication portion 14.

[0024] In the microvalve of this embodiment, the upper surface of the housing member refers to the side on which the valve body insertion portion 15 is provided, and the bottom surface of the housing member 10 refers to the side opposite to the side on which the valve body insertion portion 15 is provided.

[0025] Here, referring to Figure 12, we will explain how, in a conventional normally open type microvalve, interfacial delamination at the joint surface between the housing and the joining member and fluid leakage from the flow path occur when the valve is closed. In the figure, a conventional normally open type microvalve has a joining member 200 joined to a housing member 100, and the housing member 100 is provided with a flow path 110, a flow path 120 and a connecting portion 130 connecting them, and the joining member 200 is pressed and deformed by a pressing member 300 to close the connecting portion 130.

[0026] In the practical environment of microfluidic devices, part or all of the fluid flow path is heated, or suction and discharge are performed by a pump. This creates pressure within the microvalve's flow path, and when the pressing member 300 presses the joining member 200, as shown in the right diagram of Figure 12, it can cause delamination at the interface of the joint between the housing member 100 and the joining member 200, or the valve may be pushed up by external force, causing fluid leakage from the flow path.

[0027] In contrast, the microvalve of this embodiment, as described above, is configured such that when closed, the valve body 30 is pressed from the joining member 20 side and elastically deforms, thereby closing the communication portion 14. This prevents delamination of the interface between the housing member 10 and the joining member 20, and prevents fluid leakage from the flow path even when external force is applied.

[0028] Here, the opening and closing of the flow path in the microvalve of this embodiment will be explained with reference to Figures 2 to 5. Figure 2 shows a longitudinal cross-section (vertical section) of the valve in the open state, and Figure 3 shows a short-side cross-section (horizontal section) of the valve in the open state. Figure 4 shows a longitudinal cross-section (vertical section) of the valve in the closed state, and Figure 5 shows a short-side cross-section (horizontal section) of the valve in the closed state.

[0029] In this embodiment, when the microvalve is in the open state, as shown in Figures 2 and 3, the joining member 20 is not pressed by the pressing member 40, the valve body 30 is in its normal position, and the communication portion 14 is open. At this time, the contact surfaces of the joining member 20 and the valve body 30 are on the same plane as the joining surface of the joining member 20 and the housing member 10.

[0030] On the other hand, in the closed state, as shown in Figures 4 and 5, the pressing member 40 presses the joining member 20, causing the area facing the bottom surface of the pressing member 40 to deform and sink, thereby pressing the valve body 30 and causing it to elastically deform, closing a part (or all) of the communication portion 14. At this time, the contact surface between the joining member 20 and the valve body 30 is moved approximately by the depth of the communication portion 14 below the joint surface between the joining member 20 and the housing member 10, causing a part of the valve body 30 to enter and close the communication portion 14. The opening 11 is also closed by the elastically deformed valve body 30.

[0031] Thus, the microvalve of this embodiment is configured to open and close the communication portion 14 by moving the pressing member 40 to a position where it presses against the joining member 20, and then moving it back to its original position where it does not press, thereby pushing and pulling the valve body 30 from the joining member 20 side and causing elastic deformation.

[0032] In this embodiment, the microvalve can prevent delamination at the interface of the joint between the housing member 10 and the joining member 20, and prevent fluid leakage from the flow path, by opening and closing the conductivity of the flow path in this manner. At the same time, the pressing member 40 closes the communication portion 14 via the valve body 30 and also plays a role in preventing delamination at the interface between the housing member 10 and the joining member 20.

[0033] Furthermore, in this embodiment of the microvalve, the communication portion 14 is provided in a non-contact manner with respect to the joining member 20. That is, the communication portion 14 is closed by the valve body 30 when closed and does not come into contact with the joining member 20. Therefore, it is possible to resolve the problem that, when the depth of the communication portion is made shallower than the depth of the flow path in order to reduce the load on the conventional valve, the communication portion and the joining member tend to come into contact when the valve is closed.

[0034] Furthermore, in the microvalve of this embodiment, the valve body 30 and the connecting member 20 are in contact, and it is preferable that the valve body 30 and the connecting member 20 are joined at this contact surface. With this configuration, the microvalve of this embodiment can more stably close the communication portion 14 via the connecting member 20 by the valve body 30. It should be noted that in the microvalve of this embodiment, it is also possible to have a configuration in which the valve body 30 and the connecting member 20 are not joined.

[0035] Furthermore, in the microvalve of this embodiment, it is also preferable to extend the first flow path 12 along the bottom surface of the housing member 10, and to have the other joining member 50 joined to the bottom surface of the housing member 10. By configuring the microvalve of this embodiment in this way, it becomes easier to engrave the first flow path 12 on the bottom surface side of the housing member 10, and the design freedom of the first flow path 12 can be increased.

[0036] Furthermore, in the microvalve of this embodiment, the communication portion 14 is provided in the valve body insertion portion 15 of the housing member 10. The opening 11 is provided approximately in the center of the valve body insertion portion 15 of the housing member 10. As will be described later, in the microvalve of this embodiment, it is also possible to provide a communication portion connecting the first flow path 12 and the second flow path 13 in the valve body 30 and form it as a valve body communication portion 31.

[0037] As shown in Figure 1, the microfluidic device having a microvalve in this embodiment has an opening 16 connected to the end of the first flow path 12 and an opening 21 facing the opening 16 provided on the connecting member 20. Furthermore, the connecting member 20 also has an opening 21 facing the end of the second flow path 13. In this embodiment, fluid is injected and discharged through these openings 21.

[0038] In the microvalve of this embodiment, the shape of the flow path cross-section of the communication portion 14 is preferably arched (a shape formed by the arc of a circle and the chord connecting its two ends), as shown in Figure 6(A). By making the flow path cross-section of the communication portion 14 this shape, it is possible to suitably close the communication portion 14 by the elastic deformation of the valve body 30.

[0039] Furthermore, in the microvalve of this embodiment, it is also preferable to have a cross-sectional shape of the flow path of the communication section 14, as shown in Figure 6(B), with an inverted trapezoid on the lower side of a rectangle. By having such a cross-sectional shape of the flow path of the communication section 14, it is possible to suitably close the communication section 14 by the elastic deformation of the valve body 30.

[0040] Furthermore, in the microvalve of this embodiment, the shape of the flow path cross-section of the communication section 14 can be made into various shapes as shown in Figure 6(C). For example, the shape of the flow path cross-section of the communication section 14 can be made into various shapes, such as other arched shapes, inverted triangles, rectangles, inverted trapezoids, inverted trapezoids with an arched shape, inverted triangle, or inverted trapezoid on the lower side, or a rectangle with an arched shape, inverted triangle, or inverted trapezoid on the lower side, as long as the communication section 14 can be closed by the elastic deformation of the valve body 30.

[0041] Furthermore, in the microvalve of this embodiment, the shape of the valve body 30 can also be varied, as long as the elastic deformation of the valve body 30 allows for the closure of the communication portion 14. For example, the shape of the valve body 30 can be a cylinder, an inverted frustocone, or a cylinder with an inverted frustocone on the lower side.

[0042] Furthermore, in the microvalve of this embodiment, it is preferable that the inner surface shape of the valve body insertion portion 15 that houses the valve body 30 is substantially homologous to the surface of the valve body 30. By having the valve body 30 and the valve body insertion portion 15 in this morphological relationship, when pressed, the valve body 30 makes even contact with the inner surface of the valve body insertion portion 15, and the effect of its elastic deformation is concentrated on the communication portion 14 and the opening 11, thereby enabling more reliable closure.

[0043] As the material of the housing member 10 in the microvalve of the present embodiment, those having a heat resistance temperature of 100° C. or higher, low autofluorescence, and a low elastic modulus can be preferably used. As such materials, for example, COP (Cyclo Olefin Polymer), COC (Cyclo Olefin Copolymer), PP (Polypropylene), PC (Polycarbonate), PMMA (Polymethyl methacrylate), PET (Poly-Ethylene-Terephthalate), ABS (Acrylonitrile-Ethylene-Styrene), silicone, PDMS (dimethylpolysiloxane), glass, etc. can be mentioned. The elastic modulus of the material of the housing member 10 can be adjusted by increasing the thickness, and preferably it can be 0.1 mm or more, more preferably 0.5 mm or more.

[0044] Also, as the material of the joining member 20 in the microvalve of the present embodiment, those having a heat resistance temperature of 100° C. or higher, high transmittance, low autofluorescence, and a high elastic modulus can be preferably used. As such materials, for example, COP (Cyclo Olefin Polymer), COC (Cyclo Olefin Copolymer), PP (Polypropylene), PC (Polycarbonate), PMMA (Polymethyl methacrylate), silicone, PDMS (dimethylpolysiloxane), etc. can be mentioned. The elastic modulus of the material of the joining member 20 can be adjusted by reducing the thickness, and preferably it can be 0.01 to 1 mm, more preferably 0.05 to 0.5 mm.

[0045] Furthermore, as the material of the valve body 30 in the microvalve of the present embodiment, those having a high elastic modulus can be preferably used. For example, general synthetic rubbers (such as silicone rubber, PDMS rubber, butyl rubber, butadiene rubber, fluororubber, nitrile rubber, chloroprene rubber, ethylene rubber, urethane rubber, etc.) can be used.

[0046] In the microvalve of the present embodiment, it is preferable that the elastic moduli of the housing member 10, the joining member 20, and the valve body 30 satisfy the following relationship: Valve body ≤ Joining member < Housing

[0047] Also, in the microvalve of the present embodiment, it is preferable that the housing member 10, the joining member 20, and the valve body 30 can withstand a pressure of 100 kPa and a heating at 100°C. Further, in the microvalve of the present embodiment, it is preferable that the adhesive strength between the housing member 10 and the joining member 20 is 100 kPa or more, and it is preferable that the joint surface between the housing member 10 and the joining member 20 does not peel off under the above-described pressurized or heated environment.

[0048] Also, as will be described later with respect to the microchannel device handling apparatus, the microvalve of the present embodiment is used by pressurizing or heating either the first channel 12 or the second channel 13. Therefore, the internal pressure of either the first channel 12 or the second channel 13 becomes higher than the internal pressure of the other channel. Accordingly, interfacial peeling at the joint surface between the housing member 10 and the joining member 20 and leakage of fluid from the channels are likely to occur. Therefore, it is important to prevent these by the above-described configuration of the microvalve of the present embodiment.

[0049] Next, a first modification of the microvalve of the present embodiment will be described with reference to FIG. 7. The first modification of the microvalve of the present embodiment is different from the microvalve of the present embodiment described above in that the communication portion is provided in the valve body instead of the housing member, and is the same as the microvalve of the present embodiment described above in other respects.

[0050] Specifically, the first modification of the microvalve of the present embodiment has a housing member 10a and a joining member 20a. The housing member 10a is provided with an opening 11a, a first channel 12a that is connected to the opening 11a and extends toward the bottom surface side of the housing member 10a, a valve body insertion portion 15a into which a valve body 30a that covers the opening 11a is fitted, and a second channel 13a that is formed on the upper surface side of the housing member 10a and is connected to the valve body insertion portion 15a.

[0051] Furthermore, in the first modified example of the microvalve of this embodiment, the valve body 30a is provided with a valve body communication portion 31a that connects the opening 11a and the second flow path 13a. In the first modified example of the microvalve of this embodiment, when in the closed state, the valve body 30a is pressed from the joining member 20a side and elastically deforms, thereby closing the valve body communication portion 31a.

[0052] Even with this modified example 1 of the microvalve of this embodiment, similar to the microvalve of this embodiment described above, the connecting portion that links multiple flow paths and the joining member are not joined together, and the effect of preventing interfacial delamination of the joining surface between the housing and the joining member and preventing fluid leakage from the flow paths is obtained.

[0053] Next, a modified example 2 of the microvalve of this embodiment will be described with reference to Figure 8. Modified example 2 of the microvalve of this embodiment differs from the microvalve of this embodiment described above in that the shape of the valve body has an inverted frustum of a cone on the lower side of the cylinder, but is otherwise the same as the microvalve of this embodiment described above.

[0054] Specifically, a modified example 2 of the microvalve of this embodiment includes a housing member 10b and a connecting member 20b. The housing member 10b is provided with an opening 11b, a first flow path 12b connected to the opening 11b and extending toward the bottom surface of the housing member 10b, a valve body insertion portion 15b into which a valve body 30b covering the opening 11b is fitted, and a second flow path 13b formed on the upper surface of the housing member 10b and connected to the valve body insertion portion 15b.

[0055] Furthermore, in Modification 2 of the microvalve of this embodiment, the valve body 30b has a shape with an inverted frustocone on the lower side of the cylinder, and the valve body insertion portion 15b also has an inverted frustocone shape that follows the valve body 30b. The communication portion 14b is formed on the housing member 10b along the side surface of the inverted frustocone of the valve body insertion portion 15b and is configured to connect the first flow path 12b and the second flow path 13b. In Modification 2 of the microvalve of this embodiment, when in the closed state, the valve body 30b is pressed from the joining member 20b side and elastically deforms, closing the communication portion 14b.

[0056] Even with this modified example 2 of the microvalve of this embodiment, the connecting portion that links multiple flow paths and the joining member are not joined together, and the effect of preventing interfacial delamination of the joining surface between the housing and the joining member and preventing fluid leakage from the flow paths can be obtained.

[0057] Next, a third modification of the microvalve of this embodiment will be described with reference to Figure 9. This third modification of the microvalve of this embodiment differs from the microvalve of this embodiment described above in that it is equipped with a plurality of second flow paths, and is otherwise the same as the microvalve of this embodiment described above.

[0058] Specifically, the third modified example of the microvalve of this embodiment includes a housing member 10c and a connecting member 20c. The housing member 10c is provided with an opening 11c, a first flow path 12c connected to the opening 11c and extending toward the bottom surface of the housing member 10c, a valve body insertion portion 15c into which a valve body 30c covering the opening 11c is fitted, and four second flow paths 13c formed on the upper surface of the housing member 10c and connected to the valve body insertion portion 15c.

[0059] Furthermore, in Modification 3 of the microvalve of this embodiment, the housing member 10c is provided with four connecting portions 14c that connect the opening 11c and the second flow path 13c. In Modification 3 of the microvalve of this embodiment, when in the closed state, the valve body 30c is pressed from the joining member 20c side and elastically deforms, closing the four connecting portions 14c.

[0060] Even with this modified example 3 of the microvalve of this embodiment, the connecting portion that links multiple flow paths and the joining member are not joined together, and the effect of preventing interfacial delamination of the joining surface between the housing and the joining member and preventing fluid leakage from the flow paths can be obtained.

[0061] The microfluidic device of this embodiment is characterized by comprising the microvalve of this embodiment described above, or any of the modified versions 1 to 3 of the microvalve of this embodiment, and can be configured as shown in Figure 1 or the upper diagrams of Figures 7 to 9.

[0062] The microfluidic device handling device of this embodiment is characterized by comprising the microfluidic device of this embodiment and a drive device having a pressing member for pressing the valve body from the joining member side. Specifically, as shown in Figure 10(A), in a microfluidic device having two microvalves of the type that press the valve body from above, the microvalves are connected by their respective second flow paths, and the device can be configured to include a pressing member 40d and a heating device 60d such as a heater. Note that in the same figure, the joining members joined to the upper and lower surfaces of the housing member 10d are omitted. The same applies to the following figures.

[0063] Each microvalve in this microfluidic device is provided with an opening 11d, a first channel 12d, a second channel 13d, a communication section 14d, a valve body insertion section 15d, and an open section 16d in a housing member 10d, with a valve body 30d inserted into the valve body insertion section 15d. The microfluidic device handling device is configured such that the valve body 30d is pressed by a pressing member 40d via a connecting member (not shown), causing the valve body 30d to elastically deform and close the communication section 14d. Furthermore, the device is configured to heat the second channel 13d with a heating device 60d. By performing such heating with both valves closed, the internal pressure of the second channel 13d becomes higher than the internal pressure of the first channel 12d.

[0064] Furthermore, the microfluidic device handling device of this embodiment can be configured as shown in Figure 10(B) for a microfluidic device having two microvalves of the type that press the valve body from above, with the microvalves connected by their respective first flow paths, and equipped with a pressing member 40e and a heating device 60e. This microvalve has an opening 11e, a first flow path 12e, a second flow path 13e, a communication part 14e, a valve body insertion part 15e, and an open part 16e in a housing member 10e, with a valve body 30e inserted into the valve body insertion part 15e.

[0065] The microfluidic device handling device is configured such that the valve body 30e is pressed by a pressing member 40e via a connecting member (not shown), causing the valve body 30e to elastically deform and close the communication portion 14e. Furthermore, the device is configured to heat the first flow path 12e with a heating device 60e. By performing this heating with both valves closed, the internal pressure of the first flow path 12e becomes higher than the internal pressure of the second flow path 13e.

[0066] Furthermore, the microfluidic device handling device of this embodiment can be configured as shown in Figure 11(A) for a microfluidic device having two microvalves of the type that press the valve body from below, in which the microvalves are connected by their respective second flow paths, and equipped with a pressing member 40f and a heating device 60f. This microvalve is provided with an opening 11f, a first flow path 12f, a second flow path 13f, a communication part 14f, a valve body insertion part 15f, and an open part 16f in the housing member 10f, with a valve body 30f inserted into the valve body insertion part 15f. This microvalve differs from the configurations in Figures 10(A) and (B) in that the first flow path of this microvalve does not have a portion that extends along the bottom surface of the housing member, but is directly connected to the open part.

[0067] The microfluidic device handling device is configured such that the valve body 30f is pressed by a pressing member 40f via a connecting member (not shown), causing the valve body 30f to elastically deform and close the communication portion 14f. Furthermore, the device is configured to heat the second flow path 13f with a heating device 60f. By performing this heating with both valves closed, the internal pressure of the second flow path 13f becomes higher than the internal pressure of the first flow path 12f.

[0068] Furthermore, the microfluidic device handling device of this embodiment can be configured as shown in Figure 11(B) for a microfluidic device having two microvalves of the type that press the valve body from below, in which the microvalves are connected by their respective second flow paths, and equipped with a pressing member 40g and a pressurizing device 70g such as a pump. This microvalve has an opening 11g, a first flow path 12g, a second flow path 13g, a communication part 14g, a valve body insertion part 15g, and an open part 16g in a housing member 10g, with a valve body 30g inserted into the valve body insertion part 15g. This microvalve differs from the configurations in Figures 10(A) and (B) in that the first flow path of this microvalve does not have a portion that extends along the bottom surface of the housing member, but is directly connected to the open part.

[0069] The microfluidic device handling device is configured such that the valve body 30g is pressed by a pressing member 40g via a connecting member (not shown), causing the valve body 30g to elastically deform and close the communication portion 14g. Furthermore, the device is configured to pressurize the second fluid channel 13g by pushing a pump. By performing this pressurization with both valves closed, the internal pressure of the second fluid channel 13g becomes higher than the internal pressure of the first fluid channel 12g. The second fluid channel 13g can also be depressurized by pulling a pump. By performing this depressurization, the internal pressure of the second fluid channel 13g becomes lower than the internal pressure of the first fluid channel 12g.

[0070] As described above, the microfluidic device handling apparatus of this embodiment has a temperature control region where a heating device is installed, or a pressure control region where a pressurizing device is installed, on the extension of the first or second flow path. With this configuration, the microfluidic device handling apparatus of this embodiment can be suitably used when handling microfluidic devices used in genetic testing and the like.

[0071] In the microfluidic device handling apparatus of Figures 10(A) and 10(B), the heating device can be replaced with the pressurizing device in the microfluidic device handling apparatus of Figure 11(B). Furthermore, in the microfluidic device handling apparatus of this embodiment, the heating device or pressurizing device may be placed in the flow path connecting the first flow path of one microvalve and the second flow path of the other microvalve. Moreover, these microfluidic device handling apparatuses can also be configured by combining a microvalve of the type that presses the valve body from below with a microvalve of the type that presses the valve body from above.

[0072] Furthermore, if ports for injecting chemicals, a liquid delivery pump, etc. are to be connected to the open portions 16d to 16g of the microfluidic device handling device of this embodiment, it is preferable to include these components in the microfluidic device handling device of this embodiment. It is also preferable to include a control device in the microfluidic device handling device of this embodiment that controls the operation of a drive device, heating device, pressurizing device, liquid delivery pump, etc. Furthermore, it is preferable to make the microfluidic device a separate component and replaceable in the microfluidic device handling device of this embodiment. In this case, it is preferable to include a mounting device that appropriately positions and grips the microfluidic device on the handling device.

[0073] In the microfluidic device handling device of this embodiment, it is preferable that the pressing members 40d to 40g, the valve bodies 30d to 30g, and the openings 11d to 11g are arranged concentrically. Furthermore, in the microfluidic device handling device of this embodiment, it is preferable that the pressing surface of the pressing members 40d to 40g is larger than the horizontal cross-section of the openings 11d to 11g and smaller than the horizontal cross-section of the valve bodies 30d to 30g. By configuring the microfluidic device handling device of this embodiment in this way, the closure of the communication portions 14d to 14g can be performed more effectively, and it is possible to more stably prevent interfacial delamination of the joint surface between the housing and the joining member and fluid leakage from the flow path.

[0074] As described above, the microvalve, microfluidic device, and microfluidic device handling device of this embodiment prevent the connecting portion that connects multiple flow channels from becoming joined to the joining member, thereby effectively preventing interfacial delamination at the joining surface between the housing and the joining member, as well as fluid leakage from the flow channels.

[0075] The present invention is not limited to the embodiments described above, and it goes without saying that various modifications can be made within the scope of the present invention. For example, the flow path can be modified as appropriate, such as having one or more bends instead of being a straight line, or having one or more branches.

[0076] The present invention can be suitably used in microfluidic devices used in genetic testing and the like.

[0077] All documents cited in this specification and the contents of the Japanese application specification on which this application has priority in Paris Convention are incorporated herein by reference.

[0078] 10, 10a-10g Housing member 11, 11a-11g Opening 12, 12a-12g First flow path 13, 13a-13g Second flow path 14, 14b-14g Communication section 15, 15a-15g Valve body insertion section 16, 16a-16g Open section 20, 20a, 20b, 20c Joining member 21, 21a, 21b, 21c Opening 30, 30a-30g Valve body 31a Valve body communication section 40, 40a-40g Pressing member 50, 50a, 50b, 50c Other joining member 60d-f Heating device 70g Pressurizing device

Claims

1. A normally open type microvalve for opening and closing the conduction of multiple flow channels, comprising a housing member on which the flow channels are engraved and a flexible joining member joined to the housing member to seal the flow channels, wherein the housing member comprises an opening, a first flow channel connected to the opening and extending toward the bottom surface of the housing member, a valve body insertion portion into which a valve body covering the opening is fitted, and a second flow channel formed on the upper surface of the housing member and connected to the valve body insertion portion, wherein the microvalve comprises a communication portion connecting the opening and the second flow channel and the valve body, the joining member is joined to the upper surface of the housing member, and in the closed state, the valve body is pressed from the joining member side and elastically deforms to close the communication portion.

2. The microvalve according to claim 1, characterized in that the communication portion is provided in the housing member.

3. The microvalve according to claim 1, characterized in that the communication portion is provided on the valve body.

4. The microvalve according to claim 1, characterized in that the communication portion is in non-contact with the joining member.

5. The microvalve according to claim 1, characterized in that the valve body and the joining member are joined together.

6. The microvalve according to claim 1, characterized in that the first flow path extends along the bottom surface of the housing member, and another joining member is joined to the bottom surface of the housing member.

7. The microvalve according to claim 1, characterized in that the flow channel cross-section of the communication portion is a curved shape, an inverted triangle, a rectangle, an inverted trapezoid, an inverted trapezoid with a curved shape, an inverted triangle, or an inverted trapezoid on the lower side, or a rectangle with a curved shape, an inverted triangle, or an inverted trapezoid on the lower side.

8. The microvalve according to claim 1, characterized in that the valve body is cylindrical, has the shape of an inverted frustocone, or is a cylinder with an inverted frustocone on the lower side.

9. The microvalve according to claim 1, characterized in that the housing member is provided with a plurality of the second flow channels.

10. A microfluidic device characterized by comprising the microvalve described in claim 1.

11. The microfluidic device according to claim 10, characterized in that it has a temperature control region or a pressure control region on an extension of the first or second fluid channel.

12. A microfluidic device handling device characterized by comprising the microfluidic device according to claim 10 and a drive device having a pressing member for pressing the valve body from the joining member side.

13. The microfluidic device handling apparatus according to claim 12, characterized in that the pressing member, the valve body, and the opening are arranged concentrically.

14. The microfluidic device handling apparatus according to claim 12, characterized in that the pressing surface of the pressing member is larger than the horizontal cross-section of the opening and smaller than the horizontal cross-section of the valve body.

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