The invention relates to the technical field of
semiconductor technologies, and provides a
laser annealing
breakpoint supplementary scanning method and device,
electronic equipment and
laser annealing device.The method comprises the steps that under the condition that alarm information or abnormal information of the
laser annealing technology of a target object is received, a laser is controlled to be
shut down, and current position information of a motion table
system is recorded; and initial position information can be provided for subsequent complementary scanning. Under the condition that the laser is determined to be
shut down, the motion platform
system is controlled to stop moving, and heat accumulation caused by
continuous irradiation of the laser on the target object is avoided. The current position information of the motion platform
system is utilized, and the
breakpoint repairing formula of the
laser annealing process is automatically generated in combination with the original formula of the
laser annealing process, so that the generation efficiency can be improved, and the generation error can be reduced. Under the condition that the
breakpoint complementary scanning
signal of the target object is received, breakpoint complementary scanning is performed on the target object from the breakpoint position information of the
laser annealing process of the target object by using the breakpoint complementary scanning formula, so that the accuracy of a complementary scanning result can be improved.