An integrated device (e.g.,
flip chip) (100) includes a die portion (102) including a plurality of pads (107a, 107b) and a plurality of under bump metallization interconnects (109a, 109b) coupled to the plurality of pads (107a, 107b); and a plurality of pillar interconnects (104a, 104b) including a first pillar interconnect (104a) including a first cavity (209) and a second pillar interconnect (104b) including a second cavity (209). The cavity (209) can extend partially through a height of the pillar interconnect (104a, 104b). A planar cross-section of the cavity (209) extending through the pillar interconnect (104a, 104b) can include an O-shape. A plurality of solder interconnects (106a, 106b) can be coupled to the plurality of pillar interconnects (104a, 104b) and can include a
solder interconnect (106a, 106b) located in the cavity (209) of the pillar interconnect (104a, 104b). The pillar interconnect (104a, 104b) can include a first pillar interconnect portion (204) including a first width and a second pillar interconnect portion (206) including a second width different from (e.g., smaller than) the first width, where the cavity (209) of the pillar interconnect (104a, 104b) can be located in the second pillar interconnect portion (206). The pillar interconnect (104a, 104b) can include a shape of a top hat. A method (700) for manufacturing an integrated device (100) can include providing a die portion (102) and forming a plurality of pillar interconnects (104). Forming the plurality of pillar interconnects (104) can include forming and patterning a first
photoresist layer (600) over the die portion (102); forming a first pillar interconnect portion (602) (e.g., ring-shaped); removing the first
photoresist layer (600); forming and patterning a second
photoresist layer (610) (e.g., having a circular pattern with a
diameter between an inner
diameter and an outer
diameter of the ring-shaped first interconnect portion (602)) over the die portion (102); and forming a second pillar interconnect portion over the first pillar interconnect portion (602) such that a first cavity (209) is formed in the second pillar interconnect portion. Forming the plurality of pillar interconnects (104) can also include forming a
solder interconnect (106) over the cavity (209) of the pillar interconnect (104). The second photoresist layer (610) can be removed after forming the first
solder interconnect (106). Portions of the under bump metallization layer (109) can then be removed, and the plurality of solder interconnects (106) can be reflowed. A
package (400) includes a substrate (402) and an integrated device (100) coupled to the substrate (402) by a plurality of pillar interconnects (104a, 104b) and a plurality of solder interconnects (106a, 106b).The solder interconnects (106a, 106b) can include
intermetallic compounds (IMCs) (406a, 406b) that can be formed when metals from the substrate interconnects (422a, 422b) and / or the post interconnects (104a, 104b) diffuse in the solder interconnects (106a, 106b) upon a solder reflow process used to couple the integrated device (100) to the substrate (402). The cavities (209) allow more surface area of the solder interconnects (106a, 106b) to couple, providing a more robust and reliable bond between the integrated device (100) and the substrate (402). The cavities (209) also allow more solder interconnects (106a, 106b) to be located between the post interconnects (104a, 104b) and the substrate (402) without causing shorts between adjacent interconnects (104a, 104b) of the substrate (402).