The
package (100) includes a first integrated device (105) having a first plurality of interconnects (254), a plurality of solder interconnects (170a) coupled to the first plurality of interconnects (254), a second integrated device (107a) having a second plurality of interconnects (270a+272a), the second integrated device (107a) coupled to the first integrated device (105) via the second plurality of interconnects (270a+272a), the plurality of solder interconnects (170a), and the first plurality of interconnects (254), a
polymer layer (192a) located between the first integrated device (105) and the second integrated device (107a), and a plurality of spacer balls (109a) located between the first integrated device (105) and the second integrated device (107a). The spacer balls (190a) help ensure that variations in the gap between the
integrated devices (105, 107a) (e.g., due to tilting of one of the
integrated devices (105, 107a) relative to an adjacent integrated device (105, 107a)) are reduced and / or eliminated. The
polymer layer (192a) may include an
adhesive layer. The spacer balls (190a) may be located at least partially within the
polymer layer (192a). The spacer balls (190a) may include monodisperse particles, silica, glass, polymer,
ceramic, and / or
metal-containing particles, and may include
polyethylene polymer particles, in particular. The
package (100) may further include an underfill (204a) between the first integrated device (105) and the second integrated device (107a). The first plurality of interconnects (254) may include a first plurality of pillar interconnects, and the second integrated device is coupled to the first integrated device via the second plurality of interconnects (270a+272a), the plurality of solder interconnects (170a), and the first plurality of pillar interconnects. The second integrated device (107a) may include a second die (e.g., a first memory die), and the first integrated device (105) may include a first die (e.g., a logic die or a second memory die).The
package (100) may further comprise a third integrated device (107b) having a third plurality of interconnects (270b+272b), a second polymer layer (192b) located between the third integrated device (107b) and the second integrated device (107a), and a second plurality of spacer balls (190b) located between the third integrated device (107b) and the second integrated device (107a), and the third integrated device (107b) may be coupled to the second integrated device (107a) via the third plurality of interconnects (270b+272b) and the second plurality of solder interconnects (170b), and the second integrated device (107a) may include a plurality of through-substrate vias (275a). The first plurality of interconnects (254) may include a first plurality of pillar interconnects and / or a first plurality of pad interconnects (254), and the second plurality of interconnects (270a+272a) may include a second plurality of pillar interconnects (272a) and / or a second plurality of pad interconnects (270a). The first integrated device (105) may include a third plurality of interconnects (250+252), where the first plurality of interconnects (254) is located on a first surface of the first integrated device (105) and the third plurality of interconnects (250+252) is located on a second surface of the first integrated device (105). The package (100) may comprise a substrate (104) and a stack (101) of first and second
integrated devices (105, 107a) coupled to the substrate (104) via a further plurality of solder interconnects (150). The first integrated device (105) may be coupled to the second integrated device (107a) via front-to-front bonding, front-to-backside bonding, back-to-front bonding, or back-to-backside bonding.In a method of fabricating a package (100), the second plurality of pad interconnects (370), the second plurality of pillar interconnects (372), and the plurality of solder interconnects (170) are formed on a second
wafer (600) including uncut second integrated devices (307a, 307b), and a plurality of spacer balls (190) and a polymer layer (192) are disposed between the uncut second integrated devices (307a, 307b), for example, in a
cut region ( 504), an underfill (204) is formed on the uncut second integrated devices (307a, 307b), a first
wafer (610) including the uncut first integrated devices (305a, 305b), the first plurality of pad interconnects (350), and the first plurality of pillar interconnects (352) is bonded to the second
wafer (600) by a solder reflow process, and the wafers (600, 610) are
cut along the
cut lines (620).