Defect inspection device

Abstract

The defect inspection device (100) includes: an excitation unit (1); a laser illuminator (2); an interference unit (30); a imaging unit (31); a holding member (4) that holds the imaging unit so as to be able to be disposed at a position separated from an inspection object (90) by a predetermined distance; a connection member (5) that connects the holding member or the imaging unit to the excitation unit; and a control unit (6) that generates an image (61) of the propagation of elastic waves with respect to the inspection object.

Description

Technical Field

[0001] The present invention relates to a defect inspection device. Background Art

[0002] There has been a conventionally known defect inspection device. A defect inspection device such as this is disclosed, for example, in Japanese Patent No. 6451695.

[0003] The defect inspection device disclosed in Japanese Patent No. 6451695 described above includes the following components: an excitation unit that excites elastic waves in an object to be inspected; an illumination unit that irradiates a measurement area on the surface of the object to be inspected with flash illumination; and a displacement measurement unit. The displacement measurement unit is configured to simultaneously measure displacements in the front-rear direction of each point in the measurement area at at least three different phases of the elastic waves by controlling the phase of the elastic waves and the timing of the flash illumination. The defect inspection device of Japanese Patent No. 6451695 uses the displacement measurement unit to photograph the vibration states (amplitude and phase) of each point in the measurement area. The defect inspection device of Japanese Patent No. 6451695 described above creates an image representing the difference in vibration displacement by the difference in brightness of the image based on the photographed vibration states of each point in the measurement area. The defect inspection device of Japanese Patent No. 6451695 detects a discontinuous portion of the vibration state as a defect by visually inspecting or performing image processing on the created image.

[0004] Prior Art Documents

[0005] Patent Documents

[0006] Patent Document 1: Japanese Patent No. 6451695 Summary of the Invention

[0007] Problems to be Solved by the Invention

[0008] However, it is considered that the relative positions of the excitation unit and the imaging unit in the defect inspection device described in Japanese Patent No. 6451695 are not fixed. Therefore, there is a possibility that the relative positions of the excitation unit and the imaging unit change each time an inspection is performed. When the relative positions of the excitation unit and the imaging unit change, there is a possibility that the vibration states of each point in the measurement area change when the same inspection area (imaging range) is inspected by re-measurement or the like. If the vibration states of each point in the measurement area change, the reproducibility of the inspection becomes poor. Therefore, a defect inspection device that can improve the reproducibility of the inspection is desired.

[0009] The present invention is an invention completed to solve the above-described problems, and an object of the present invention is to provide a defect inspection device that can improve the reproducibility of the inspection.

[0010] Solutions for Solving the Problems

[0011] To achieve the above object, a defect inspection device according to one aspect of the present invention includes: an excitation unit that excites elastic waves in an object to be inspected; a laser illuminator that irradiates the object to be inspected with laser light; an interference unit that causes interference of laser light reflected from different positions of the object to be inspected after being excited by the excitation unit; a imaging unit that captures the interfered laser light; a holding member that holds the imaging unit so as to be able to be disposed at a position separated from the object to be inspected by a predetermined distance; a connection member that connects the holding member or the imaging unit to the excitation unit; and a control unit that generates an image regarding the propagation of elastic waves in the object to be inspected based on the interfered laser light captured by the imaging unit.

[0012] Effects of the Invention

[0013] In one aspect of the present invention, there is provided a connection member that connects the holding member or the imaging unit to the excitation unit as described above. By providing the above connection member, the excitation unit and the imaging unit are connected either via the holding member or directly, so that a change in the relative position between the excitation unit and the imaging unit can be suppressed. As a result, a defect inspection device capable of improving the reproducibility of inspection can be provided. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic diagram showing the overall structure of a defect inspection device according to one embodiment.

[0015] Figure 2 is a perspective view showing a defect inspection device according to one embodiment.

[0016] Figure 3 is a block diagram for explaining the structure of a speckle shear interferometer.

[0017] Figure 4 is a diagram showing an example of an image regarding the transmission of elastic waves.

[0018] Figure 5 is a schematic cross-sectional view of an excitation unit according to one embodiment.

[0019] Figure 6 is a schematic cross-sectional view of an excitation unit and an adsorption unit provided in a connection member according to one embodiment.

[0020] Figure 7 is a schematic diagram of a defect inspection device according to a first modified example.

[0021] Figure 8 is a schematic diagram of a structure in which an excitation unit is provided inside an adsorption unit in a defect inspection device according to a second modified example.

[0022] Figure 9It is a schematic diagram of the structure in the defect inspection device of the second modification example where the excitation unit is provided outside the adsorption unit.

[0023] Figure 10 It is a schematic diagram of the defect inspection device of the third modification example.

[0024] Figure 11 It is a schematic diagram of the defect inspection device of the fourth modification example.

[0025] Figure 12 It is a schematic diagram of the defect inspection device of the fifth modification example.

[0026] Figure 13 It is a schematic diagram of the defect inspection device of the sixth modification example.

[0027] Figure 14 It is a schematic diagram of the defect inspection device of the seventh modification example.

[0028] Figure 15 It is a schematic diagram of the defect inspection device of the eighth modification example. Detailed implementation mode

[0029] The following describes the implementation modes for embodying the present invention based on the drawings.

[0030] Refer to Figures 1 to 6 The structure of the defect inspection device 100 of an implementation mode of the present invention will be described.

[0031] (Structure of the defect inspection device)

[0032] As Figure 1 shown, the defect inspection device 100 includes an excitation unit 1, a laser illuminator 2, a speckle shearing interferometer 3, a holding member 4, a connection member 5, a control unit 6, a signal generator 7, a display unit 8, an operation input unit 9, and a vacuum pump 10.

[0033] The excitation unit 1 receives an electrical signal from the signal generator 7 and excites elastic waves in the inspection object 90. The electrical signal received by the excitation unit 1 from the signal generator 7 includes, for example, an AC pulse signal. The excitation unit 1 is configured to be in contact with the inspection object 90, convert the AC electrical signal from the signal generator 7 into mechanical vibration, and excite elastic waves in the inspection object 90. The detailed structure of the excitation unit 1 will be described later.

[0034] The laser illuminator 2 receives an electrical signal from the signal generator 7 and irradiates the inspection object 90 with laser light. The laser illuminator 2 includes a laser light source (not shown) and an illumination light lens. The illumination light lens diffusely irradiates the entire inspection area 90a (refer to Figure 2 ) on the surface of the inspection object 90 with the laser light irradiated from the laser light source.

[0035] The excitation unit 1 and the laser illuminator 2 are connected to the signal generator 7 via a cable 20.

[0036] The speckle shearing interferometer 3 is configured to cause the laser light reflected from different positions of the inspection object 90 excited by the excitation unit 1 to interfere. The detailed structure of the speckle shearing interferometer 3 will be described later.

[0037] The holding member 4 is configured to hold the speckle shearing interferometer 3 at a position where it can be arranged at a predetermined distance from the inspection object 90. In addition, the holding member 4 is configured to be able to arrange the laser illuminator 2 at a position where it is separated from the inspection object 90 by a predetermined distance.

[0038] In addition, the holding member 4 has an interferometer holding portion 40 for holding the speckle shearing interferometer 3 and a plurality of legs 41 provided with the interferometer holding portion 40. The excitation unit 1 is provided on any one of the plurality of legs 41 by means of a connecting member 5. In addition, the interferometer holding portion 40 is an example of the "imaging unit holding portion" in the claims.

[0039] In addition, an adsorption portion 12 for supporting the holding member 4 by adsorbing to the inspection object 90 is provided on the plurality of legs 41.

[0040] The connecting member 5 is provided for connecting the excitation unit 1 and the holding member 4. Specifically, the excitation unit 1 is connected to one end face of the connecting member 5. In addition, the holding member 4 is connected to the other end face of the connecting member 5. In the present embodiment, the connecting member 5 has a flat plate shape. In addition, the connecting member 5 is configured to connect the holding member 4 or the speckle shearing interferometer 3 and the excitation unit 1. In the Figure 1 example shown, the connecting member 5 connects the holding member 4 and the excitation unit 1. The detailed structure of the connecting member 5 will be described later.

[0041] The control unit 6 is configured to generate an image 61 (refer to Figure 4 ) regarding the propagation of elastic waves by controlling the speckle shearing interferometer 3. In addition, the control unit 6 is configured to send an alternating current signal to the excitation unit 1 by controlling the signal generator 7. In addition, the control unit 6 is configured to send an electrical signal to the laser illuminator 2. In addition, the control unit 6 is configured to use the vacuum pump 10 to decompress the inside of the concave portion 12a (refer to Figure 6 ) of the adsorption portion 12 by controlling the solenoid valve 11. The control unit 6 is composed of a computer including a processor such as a CPU (Central Processing Unit) or an FPGA (Field Programmable Gate Array), a GPU (Graphics Processing Unit), and a volatile and / or non-volatile memory.

[0042] The signal generator 7 is configured to generate an alternating current signal transmitted to the excitation unit 1 under the control of the control unit 6. Additionally, the signal generator 7 is configured to generate an electrical signal transmitted to the laser illuminator 2 under the control of the control unit 6.

[0043] The display unit 8 is configured to display an image 61 regarding the propagation of elastic waves of the inspection object 90 created by the control unit 6. The display unit 8 includes, for example, a liquid crystal display.

[0044] The operation input unit 9 is configured to be able to receive an operation input from the inspector. The operation input unit 9 includes, for example, a touch panel.

[0045] The vacuum pump 10 is configured to suck the gas inside the concave portion 12a of the adsorption unit 12 (refer to Figure 6 ) under the control of the control unit 6. It is configured that by sucking the gas inside the concave portion 12a of the adsorption unit 12 using the vacuum pump 10, the adsorption unit 12 is adsorbed to the inspection object 90.

[0046] In the present embodiment, the control unit 6, the signal generator 7, and the display unit 8 are provided inside a mobile control device 110. The control device 110 is provided with, for example, a backrest (not shown). Thus, the inspector can perform the inspection of the inspection object 90 while carrying the control device 110 on the back. Additionally, the vacuum pump 10 is provided on the control device 110 in a manner that it can be carried together with the control device 110.

[0047] The inspection object 90 is, for example, a structure. Specifically, the inspection object 90 is the fuselage of an aircraft. More specifically, it is a painted steel plate with a coating film 92 applied to the surface of a steel plate 91 for the fuselage of an aircraft. The defect inspection device 100 inspects for defects in the inspection object 90. In Figure 1 an example of inspecting the inspection object 90 in which cracks 93 and peeling 94 have occurred as defects is shown.

[0048] As Figure 2 shown, the defect inspection device 100 of the present embodiment is configured to inspect the inspection object 90 in a state where the laser illuminator 2 and the speckle shear interferometer 3 are arranged in a relative orientation with respect to the inspection object 90 (inspection area 90a). Specifically, the defect inspection device 100 is configured to irradiate the inspection area 90a of the inspection object 90 with laser light.

[0049] In the present embodiment, the holding member 4 includes a first leg portion 41a, a second leg portion 41b, and a third leg portion 41c as a plurality of leg portions 41. The excitation unit 1 is provided on any one of the plurality of leg portions 41. In Figure 2 the example shown, the excitation unit 1 is provided on the first leg portion 41a. The excitation unit 1 is provided on the first leg portion 41a in a state where its relative position with respect to the first leg portion 41a is substantially fixed by means of a connecting member 5.

[0050] In addition, the excitation unit 1 is provided on the first leg portion 41a in such a manner that when the first leg portion 41a comes into contact with the inspection object 90, the excitation unit 1 comes into contact with the inspection object 90 at a position where the relative position with respect to the speckle shearing interferometer 3 is preset. In addition, the preset position means a position where the relative position of the excitation unit 1 with respect to the speckle shearing interferometer 3 is substantially the same at each inspection.

[0051] In addition, the holding member 4 is provided with a gripping portion 4a. The inspector brings the defect inspection device 100 into contact with the inspection object 90 while gripping the gripping portion 4a, and operates the operation input unit 9, whereby the defect inspection device 100 is adsorbed to the inspection object 90. In addition, since it is possible to fix the defect inspection device 100 in a state where it is in contact with the inspection object 90 by means of the adsorption unit 12, the inspector can perform the inspection without gripping.

[0052] (Speckle shearing interferometer)

[0053] Next, with reference to Figure 3 the structure of the speckle shearing interferometer 3 of the present embodiment will be described.

[0054] As Figure 3 shown, the speckle shearing interferometer 3 includes an interference unit 30 and an image sensor 31. The interference unit 30 includes a beam splitter 32, a phase shifter 33, a first mirror 34, a second mirror 35, and a condenser lens 36. In addition, the image sensor 31 is an example of the "imaging unit" in the claims.

[0055] The beam splitter 32 is a semi-transmissive semi-reflective mirror and is disposed at the position where the laser reflected from the surface of the inspection object 90 is incident.

[0056] The first mirror 34 is arranged at an angle of 45 degrees with respect to the reflection surface of the beam splitter 32 on the optical path of the laser reflected by the beam splitter 32.

[0057] The second mirror 35 is arranged at an angle slightly inclined from 45 degrees with respect to the reflection surface of the beam splitter 32 on the optical path of the laser transmitted through the beam splitter 32.

[0058] The phase shifter 33 is disposed between the beam splitter 32 and the first mirror 34, and changes (moves) the phase of the transmitted laser by the control of the control unit 6. The phase shifter 33 includes, for example, an optical member. The optical member constituting the phase shifter 33 includes, for example, a compound lens pair formed by integrating two lenses having different refractive indexes of the transmitted laser.

[0059] The image sensor 31 has a plurality of detection elements, which are arranged on the optical paths of the laser 60a and the laser 60b. The laser 60a is the laser that is reflected by the beam splitter 32 and then reflected by the first mirror 34 and passes through the beam splitter 32. The laser 60b is the laser that passes through the beam splitter 32 and is then reflected by the second mirror 35 and is reflected by the beam splitter 32.

[0060] The condenser lens 36 is arranged between the beam splitter 32 and the image sensor 31 to condense the laser 60a that has passed through the beam splitter 32 and the laser 60b that has been reflected by the beam splitter 32.

[0061] The laser 60a reflected by the point A 95 on the surface of the inspection object 90 and the first mirror 34 and the laser 60b reflected by the point B 96 on the surface of the inspection object 90 and the second mirror 35 interfere with each other and enter the same part of the image sensor 31.

[0062] The control unit 6 operates the phase shifter 33 arranged in the speckle shearing interferometer 3 by using an actuator (not shown), so as to change the phase of the transmitted laser. Thereby, the phase difference between the laser reflected by the point A 95 and the laser reflected by the point B 96 changes. Each detection element of the image sensor 31 detects the intensity of the interference light after the interference of these two lasers.

[0063] (Image of elastic wave propagation)

[0064] The control unit 6 controls the timing of the vibration of the excitation unit 1 and the irradiation of the laser of the laser illuminator 2 by means of the signal generator 7, and takes images while changing the phase shift amount. The phase shift amount changes by λ / 4 each time. The control unit 6 takes 32 images of the laser irradiation timing j (j = 0 to 7) at each phase shift amount (0, λ / 4, λ / 2, 3λ / 4). In addition, the control unit 6 takes a total of 5 images with the lights off before the image is taken, during the image taking of each phase (0, λ / 4, λ / 2, 3λ / 4), and after the image is taken. That is, the control unit 6 takes a total of 37 images. In addition, λ is the wavelength of the laser.

[0065] The control unit 6 processes the detection signals from each detection element according to the following steps to obtain an image 61 of the propagation of elastic waves.

[0066] According to the brightness values I j0 ~I j3 of the images (4 images each) with the same laser irradiation timing j (j = 0 to 7) and phase shift amounts that differ by λ / 4 each, the optical phase (the phase difference between the two optical paths when the phase shift amount is zero) Φ j is obtained by using Equation (1).

[0067] Φ j =-arctan{(I j3-I j1 ) / (I j2 -I j0 )}……(1)

[0068] Using the least squares method to approximate the optical phase Φ j by a sine wave, and obtain the approximate coefficients A, θ, and C in Equation (2).

[0069] Φ j = Acos(θ + jπ / 4) + C = Bexp(jπ / 4) + C……(2)

[0070] where B is the complex amplitude, expressed as in Equation (3).

[0071] B = Aexp(iθ): complex amplitude……(3)

[0072] Here, the complex amplitude B is the image information (two-dimensional spatial information of the complex amplitude) that forms the basis for outputting the image 61 regarding the propagation of elastic waves. According to the approximate equation obtained by removing the constant term C from Equation (2), a dynamic image (30 - 60 frames) showing the optical phase change at each phase moment ξ (0 ≤ ξ < 2π) of vibration is constructed and output as the image 61 regarding the propagation of elastic waves. In addition, during the above process, in order to remove noise, a spatial filter can also be appropriately applied to the complex amplitude B. Additionally, the phase shift amount and the step size of the laser irradiation timing (λ / 4 and T / 8 respectively in the above example, where T is the vibration period) are not limited to this. In this case, the calculation formula becomes a formula different from the above Equations (1) - (3).

[0073] When a defect occurs in the inspection object 90, as Figure 4 shown, in the image 61 regarding the propagation of elastic waves, there are parts 80 with discontinuous vibration states and parts 81 with discontinuous vibration states. By confirming the parts 80 and 81 with discontinuous vibration states generated in the image 61 regarding the propagation of elastic waves, the inspector can grasp whether a defect has occurred in the inspection object 90. In addition, Figure 4 shows an example of the part 80 with discontinuous vibration state when a crack 93 occurs as a defect. Additionally, Figure 4 shows an example of the part 81 with discontinuous vibration state when a peel 94 occurs as a defect.

[0074] (Excitation unit)

[0075] Next, with reference to Figure 5 the structure of the excitation unit 1 in this embodiment will be described.

[0076] As Figure 5As shown, the excitation unit 1 includes a housing 1a, an oscillator 1b, and a vibration absorption member 1c.

[0077] The housing 1a is connected to the first leg portion 41a by a connecting member 5. Specifically, the housing 1a is connected to the connecting member 5 by an excitation unit connecting member 5a. In addition, the excitation unit connecting member 5a has a joint portion 5b. The housing 1a is rotatably provided on the excitation unit connecting member 5a with the joint portion 5b as the center. Therefore, even when the first leg portion 41a is not perpendicular to the inspection object 90, by rotating the excitation unit 1 using the joint portion 5b, the excitation unit 1 can be brought into contact with the inspection object 90 perpendicularly.

[0078] The oscillator 1b and the vibration absorption member 1c are provided inside the housing 1a. The oscillator 1b is configured to be supplied with current via a cable 20. The oscillator 1b vibrates the vibration surface 1e in the X direction by converting the voltage of the supplied current. It is configured that by bringing the vibration surface 1e into contact with the inspection object 90, the oscillator 1b excites elastic waves toward the inspection object 90. The oscillator 1b includes, for example, a piezoelectric element.

[0079] The vibration absorption member 1c is provided between the excitation unit 1 and the speckle shearing interferometer 3 (image sensor 31). That is, the vibration absorption member 1c is provided in the middle of the connection structure between the excitation unit 1 and the image sensor 31. Specifically, the vibration absorption member 1c is provided between the housing 1a and the oscillator 1b. The vibration absorption member 1c is provided to absorb vibrations from the excitation unit 1. The vibration absorption member 1c includes, for example, an elastic member. The elastic member is, for example, a spring. The vibration absorption member 1c is composed of a spring that has an appropriate spring constant based on the amplitude, frequency, etc. of the vibration of the oscillator 1b so as to suppress the transmission of the vibration of the oscillator 1b to the housing 1a.

[0080] In addition, the vibration absorption member 1c is configured to apply a force to the oscillator 1b that forces the oscillator 1b in the direction of arrow 70. That is, in Figure 5 the example shown, the vibration absorption member 1c is arranged between the housing 1a and the oscillator 1b in a state of being shortened from its natural length.

[0081] As Figure 6 shown, the excitation unit 1 and the adsorption unit 12 are provided on the first leg portion 41a together. Specifically, the excitation unit 1 is provided on the first leg portion 41a together with a plurality of adsorption units 12 by a connecting member 5. In the present embodiment, the excitation unit 1 is arranged between two adsorption units 12. In addition, the excitation unit 1 and the plurality of adsorption units 12 are arranged in a row along the Y direction. Thereby, it is possible to suppress the adsorption unit 12 from being arranged in the inspection area 90a (refer to Figure 2 ).

[0082] The adsorption part 12 has a concave part 12a and a close contact part 12b that closely adheres to the inspection object 90. The concave part 12a is provided in the adsorption part 12 in such a manner that the end surface on the opening side can abut against the inspection object 90. The close contact part 12b is composed of an elastic member. The close contact part 12b includes, for example, rubber or the like. The close contact part 12b is provided so as to surround the entire circumference of the end surface on the opening side of the concave part 12a. Therefore, when the adsorption part 12 abuts against the inspection object 90, a closed space is formed by the concave part 12a, the close contact part 12b, and the inspection object 90. In addition, the adsorption part 12 is connected to the vacuum pump 10 via the pipe 21. The adsorption part 12 is configured to reduce the pressure in the above-mentioned closed space by sucking the gas in the closed space by using the vacuum pump 10 via the pipe 21, and thereby adsorb to the inspection object 90.

[0083] In addition, the connection member 5 includes an adsorption part connection member 5c. The adsorption part 12 is connected to the connection member 5 by means of the adsorption part connection member 5c. In addition, the adsorption part connection member 5c has a joint part 5d. The adsorption part 12 is rotatably provided on the adsorption part connection member 5c with the joint part 5d as the center. Therefore, even when the first leg part 41a is not perpendicular to the inspection object 90, by rotating the adsorption part 12 using the joint part 5d, the adsorption part 12 can abut against the inspection object 90 perpendicularly. Therefore, the holding member 4 can be stably supported by the adsorption part 12.

[0084] In addition, in the present embodiment, the plurality of leg parts 41 have a hollow cylindrical shape. In addition, the connection member 5 is formed to be hollow. The cable 20 is housed inside the first leg part 41a. In addition, the pipe 21 is housed inside the first leg part 41a.

[0085] [Effects of the present embodiment]

[0086] In the present embodiment, the following effects can be obtained.

[0087] In the present embodiment, by being configured as described above, the excitation part 1 is connected to the imaging part (image sensor 31) by means of the holding member 4, so that the relative position between the excitation part 1 and the imaging part (image sensor 31) can be suppressed from changing. As a result, the reproducibility of the inspection can be improved.

[0088] In addition, in the present embodiment, as described above, there is also provided a vibration absorption member 1c that is provided between the excitation part 1 and the imaging part (image sensor 31) and absorbs the vibration from the excitation part 1. Thereby, the vibration from the excitation part 1 can be suppressed from being transmitted to the imaging part (image sensor 31). As a result, the vibration of the imaging part (image sensor 31) due to the vibration from the excitation part 1 can be suppressed, and therefore the generation of noise in the image 61 regarding the propagation of elastic waves due to the vibration of the imaging part (image sensor 31) can be suppressed.

[0089] In addition, in the present embodiment, as described above, the holding member 4 has a camera unit holding portion (interferometer holding portion 40) that holds the camera unit (image sensor 31), and a plurality of legs 41 provided on the camera unit holding portion (interferometer holding portion 40). The excitation unit 1 is provided on any one of the plurality of legs 41 (first leg 41a) by means of the connection member 5. Thus, the excitation unit 1 and the camera unit (image sensor 31) are connected by the connection member 5 and the first leg 41a, and therefore, it is possible to easily suppress the change in the relative position of the excitation unit 1 with respect to the camera unit (image sensor 31).

[0090] In addition, in the present embodiment, as described above, the excitation unit 1 is provided on the first leg 41a in such a manner that when the first leg 41a comes into contact with the inspection object 90, the excitation unit 1 comes into contact with the inspection object 90 at a position where the relative position with respect to the camera unit (image sensor 31) is preset. Thereby, it is possible to easily suppress the change in the relative position between the excitation unit 1 and the camera unit (image sensor 31) during each inspection. As a result, it is possible to suppress a decrease in the reproducibility of the inspection.

[0091] In addition, in the present embodiment, as described above, the excitation unit 1 includes a housing 1a, an oscillator 1b, and a vibration absorbing member 1c. The housing 1a is connected to the first leg 41a by means of the connection member 5. The oscillator 1b and the vibration absorbing member 1c are provided inside the housing 1a, and the vibration absorbing member 1c is provided between the housing 1a and the oscillator 1b. Thus, it is possible to suppress the transmission of vibrations from the oscillator 1b to the housing 1a by the vibration absorbing member 1c. As a result, it is possible to suppress the transmission of vibrations from the oscillator 1b to the camera unit (image sensor 31) via the housing 1a, the connection member 5, and the first leg 41a. In addition, since the oscillator 1b can be forced by the vibration absorbing member 1c, the oscillator 1b can be made to closely adhere to the inspection object 90. As a result, even when the inspection object 90 is not flat, elastic waves can be excited in the inspection object 90, and therefore, the inspection accuracy can be improved.

[0092] In addition, in the present embodiment, as described above, adsorption portions 12 for supporting and holding the holding member 4 by adsorbing to the inspection object 90 are provided on the plurality of legs 41, and the excitation unit 1 and the adsorption portions 12 are provided on the first leg 41a together. Thus, the holding member 4 and the excitation unit 1 are supported by the adsorption portions 12, so that the inspector can perform the inspection without supporting the holding member 4. As a result, compared with a configuration in which the inspector performs the inspection while supporting the holding member 4, the burden on the inspector can be reduced. In addition, since the inspector can perform the inspection without supporting the holding member 4, it is possible to prevent the inspector from applying vibration to the holding member 4. As a result, noise generation in the image 61 regarding the propagation of elastic waves can be suppressed. Further, in the case of inspecting the inspection object 90 in the Z2 direction as in the fifth modification example described later, it may be that contact members 13 that come into contact with the inspection object 90 are provided on the plurality of legs 41, and the excitation unit 1 and the contact members 13 are provided on the first leg 41a together. Even with such a configuration, the same effects as those of the above-described configuration in which the excitation unit 1 and the adsorption portions 12 are provided together can be obtained.

[0093] In addition, in the present embodiment, as described above, the excitation unit 1 and the plurality of adsorption portions 12 are provided on the first leg 41a together. Thus, the excitation unit 1 can be brought into close contact with the inspection object 90 by the plurality of adsorption portions 12. Therefore, unlike a configuration in which the inspector brings the excitation unit 1 into contact with the inspection object 90 to perform the inspection, the excitation unit 1 can be brought into close contact with the inspection object 90 by a predetermined adsorption force. As a result, a situation in which the degree of close contact of the excitation unit 1 changes each time of inspection can be suppressed, and thus the reliability of the inspection can be improved.

[0094] In addition, in the present embodiment, as described above, the excitation unit 1 is configured to excite elastic waves in the inspection object 90 by supplying current through the cable 20, and the cable 20 is housed inside the first leg 41a. Thus, for example, compared with a configuration in which the cable 20 is not housed inside the first leg 41a, complication of the routing of the cable 20 can be suppressed. As a result, the workability of the inspection can be improved.

[0095] [Modification Example]

[0096] In addition, it should be considered that the embodiments disclosed this time are illustrative in all aspects and not restrictive. The scope of the present invention is represented by the claims, not by the description of the above embodiments, and the scope of the present invention also includes all changes (modification examples) within the meaning and scope equivalent to the claims.

[0097] (First Modification Example)

[0098] For example, although an example of a configuration in which the excitation unit 1 and the adsorption portions 12 are provided on the connection member 5 together is shown in the above embodiment, the present invention is not limited thereto. For example, it may be asFigure 7 As shown, the excitation unit 1 and the abutting member 13 are provided on the first leg portion 41a. The abutting member 13 is made of, for example, a resin or an elastic member. In addition, the adsorption unit 12 is provided on the second leg portion 41b and the third leg portion 41c where the excitation unit 1 is not provided.

[0099] When the defect inspection device 100 inspects the side surface of the fuselage of an aircraft, the defect inspection device 100 is arranged such that the second leg portion 41b and the third leg portion 41c are on the upper side (Z1 side) and the first leg portion 41a is on the lower side (Z2 side). If the defect inspection device 100 is arranged in this way, a moment as shown by the arrow 71 is generated with respect to the holding member 4. Therefore, a force as shown by the arrow 72 that is applied to the inspection object 90 acts on the excitation unit 1. Therefore, even in a structure where the adsorption unit 12 is not provided together with the excitation unit 1, the excitation unit 1 can be made to closely adhere to the inspection object 90.

[0100] In the first modification example, by being configured as described above, compared with a structure in which the excitation unit 1 and the adsorption unit 12 are provided together, an increase in the number of components can be suppressed. In addition, compared with a structure in which the excitation unit 1 and the adsorption unit 12 are provided together, an increase in the force applied to the excitation unit 1 can be suppressed. Therefore, it is possible to suppress the excitation unit 1 being overly pressed against the inspection object 90 due to the force applied to the excitation unit 1, thereby reducing the amplitude of the elastic wave transmitted from the excitation unit 1. As a result, it is possible to suppress a decrease in inspection accuracy caused by a decrease in the amplitude of the elastic wave.

[0101] (Second modification example)

[0102] In addition, although an example of a structure in which the excitation unit 1 and the adsorption unit 12 are provided together is shown in the above-described embodiment, the present invention is not limited thereto. For example, the excitation unit 1 and the adsorption unit 12 may be integrally provided inside or outside the adsorption unit 12. Specifically, as Figure 8 shown, by providing the excitation unit 1 in the concave portion 12a of the adsorption unit 12, the excitation unit 1 and the adsorption unit 12 are integrally formed inside the adsorption unit 12. In addition, in the example shown in Figure 8 , the excitation unit 1 and the adsorption unit 12 are integrally formed inside the adsorption unit 12, but as shown in Figure 9 , the excitation unit 1 and the adsorption unit 12 may be integrally formed outside the adsorption unit 12. Specifically, a recessed portion 1f may be provided on the surface of the excitation unit 1 that abuts against the inspection object 90, and the inside of the recessed portion 1f may be decompressed by the vacuum pump 10 to form the adsorption unit 12.

[0103] In the second modification example, by configuring as described above, compared with the structure in which the excitation unit 1 and the adsorption unit 12 are provided together on the first leg portion 41a, an increase in the number of components mounted on the first leg portion 41a can be suppressed. In addition, the excitation unit 1 and the adsorption unit 12 can be integrated, and complication of the processing of the holding member 4 can be suppressed.

[0104] (Third Modification Example)

[0105] In addition, although an example of the structure in which the excitation unit 1 is provided in a state where the relative position with respect to the first leg portion 41a is substantially fixed by the connection member 5 is shown in the above-described embodiment, the present invention is not limited thereto. For example, the connection member 5 may be configured to be able to adjust the contact position of the excitation unit 1 with respect to the inspection object 90.

[0106] Specifically, as Figure 10 shown, in the third modification example, the connection member 5 includes a first joint portion 50, a second joint portion 51, and a third joint portion 52. The first joint portion 50 and the second joint portion 51 are configured to be able to expand and contract.

[0107] The first joint portion 50 is connected to the third joint portion 52 by a joint head 53. The first joint portion 50 is configured to be able to rotate about the joint head 53. In addition, the first joint portion 50 is connected to the first leg portion 41a by a joint head 54. The first joint portion 50 is configured to be able to rotate about the joint head 54.

[0108] The second joint portion 51 is connected to the third joint portion 52 by a joint head 55. The second joint portion 51 is configured to be able to rotate about the joint head 55. In addition, the second joint portion 51 is connected to the first leg portion 41a by a joint head 56. The second joint portion 51 is configured to be able to rotate about the joint head 56.

[0109] The third joint portion 52 is connected to the first joint portion 50 by a joint head 53. In addition, the third joint portion 52 is connected to the second joint portion 51 by a joint head 55. In addition, an excitation unit 1 is provided at an end of the third joint portion 52 on the side opposite to the joint head 53.

[0110] The first joint portion 50 and the second joint portion 51 are arranged in parallel with each other. When the third joint portion 52 is moved in the X direction, the first joint portion 50 and the second joint portion 51 rotate about the joint head 54 and the joint head 56, respectively. Thereby, the third joint portion 52 can be moved in the X direction while maintaining the angle of the third joint portion 52 with respect to the inspection object 90. Therefore, the connection member 5 can adjust the position of the excitation unit 1 in the X direction while maintaining the angle of the excitation unit 1 with respect to the inspection object 90. The connection member 5 is configured as a so-called link mechanism.

[0111] In addition, the connecting member 5 includes a biasing member 5e that biases the exciting portion 1 with respect to the inspection object 90. The biasing member 5e is provided between the second joint portion 51 and the first leg portion 41a, and biases the second joint portion 51 in the direction of arrow 73. The acting force generated by the biasing member 5e is applied to the exciting portion 1 as an acting force in the direction of arrow 74 via the second joint portion 51 and the third joint portion 52. In addition, although an adsorption portion 12 is provided on the first leg portion 41a in the example shown in Figure 10 , a contact member 13 may be provided instead of the adsorption portion 12 (see Figure 7 ).

[0112] In the third modification, as described above, the connecting member 5 is configured to be able to adjust the position where the exciting portion 1 contacts the inspection object 90. Thus, for example, when the surface of the inspection object 90 has irregularities or when the surface of the inspection object 90 is curved, the exciting portion 1 can also be made to closely adhere to the inspection object 90. As a result, a predetermined elastic wave can be excited from the exciting portion 1 to the inspection object 90, and thus a decrease in inspection accuracy can be suppressed.

[0113] In addition, as described above, the connecting member 5 includes the biasing member 5e that biases the exciting portion 1 with respect to the inspection object 90. Thus, for example, when the surface of the inspection object 90 is inclined, the exciting portion 1 can also be easily made to closely adhere to the inspection object 90 by the acting force of the biasing member 5e. As a result, a predetermined elastic wave can be excited from the exciting portion 1 to the inspection object 90, and thus a decrease in inspection accuracy can be easily suppressed.

[0114] (Fourth Modification)

[0115] In addition, although an example of a structure in which the exciting portion 1 is provided in a state where its relative position with respect to the first leg portion 41a is substantially fixed by the connecting member 5 is shown in the above-described embodiment, the present invention is not limited thereto. For example, the connecting member 5 may be configured to be rotatable in the circumferential direction around the first leg portion 41a.

[0116] As Figure 11 shown, in the fourth modification, the connecting member 5 includes a fourth joint portion 57 and a cylindrical portion 58.

[0117] The fourth section 57 includes a first section member 57a and a second section member 57b extending in the Y direction, and a third section member 57c extending in the X direction. The fourth section 57 is formed by integrally forming the first section member 57a, the second section member 57b, and the third section member 57c. In addition, a connecting portion 59a and a connecting portion 59b are provided on the first section member 57a and the second section member 57b, respectively. The connecting portion 59a and the connecting portion 59b are each configured to enable the first section member 57a and the second section member 57b to expand and contract along the Y direction. In addition, the first section member 57a and the second section member 57b are each connected to the cylindrical portion 58. The cylindrical portion 58 is configured to be rotatable in the rotational direction about the center line 75 of the first leg portion 41a. Therefore, the connecting member 5 is configured to enable the excitation unit 1 to rotate about the first leg portion 41a. In addition, the cylindrical portion 58 is configured to be movable in the direction along the first leg portion 41a. The examiner adjusts the position and the rotation angle of the cylindrical portion 58 so that the excitation unit 1 is in a predetermined position with respect to the first leg portion 41a, and performs an inspection of the inspection object 90 in a state where the position of the cylindrical portion 58 is fixed by the positioning member 42. In addition, in Figure 11 the example shown, although the adsorption portion 12 is provided on the first leg portion 41a, a contact member 13 may be provided instead of the adsorption portion 12 (see Figure 7 ).

[0118] In the fourth modification, by configuring as described above, for example, even when the first leg portion 41a is disposed between the excitation unit 1 and the inspection region 90a, the position of the excitation unit 1 can be adjusted by rotating the excitation unit 1. As a result, the situation where the first leg portion 41a is disposed between the excitation unit 1 and the inspection region 90a can be suppressed, and thus a predetermined elastic wave can be excited in the inspection region 90a.

[0119] (Fifth Modification)

[0120] In addition, although an example of a structure in which the adsorption portion 12 is provided on each of the plurality of leg portions 41 is shown in the above-described embodiment, the present invention is not limited thereto. For example, a contact member 13 may be provided on the plurality of leg portions 41.

[0121] As Figure 12 shown, in the fifth modification, the plurality of leg portions 41 include an excitation leg portion 41d on which the excitation unit 1 is provided and a support leg portion 41e that supports and holds the member 4. In addition, the fifth modification assumes a case where the defect inspection device 100 is configured to inspect the inspection object 90 in the Z2 direction (the lower side in the vertical direction).

[0122] In the fifth modification, by configuring as described above, it is possible to excite elastic waves using the excitation leg 41d and support the holding member 4 using the support leg 41e. As a result, compared with the structure that supports the holding member 4 using the adsorption portion 12, an increase in the number of components can be suppressed. In addition, compared with the structure provided with the adsorption portion 12, an increase in the maintenance frequency of the support leg 41e can be suppressed, so the burden on the inspector can be reduced. In addition, since the holding member 4 and the excitation portion 1 are supported by the contact member 13, the inspector can perform the inspection without supporting the holding member 4. As a result, compared with the structure in which the inspector performs the inspection while supporting the holding member 4, the burden on the inspector can be reduced. In addition, since the inspector can perform the inspection without supporting the holding member 4, it is possible to prevent the inspector from applying vibration to the holding member 4. As a result, noise generation in the image 61 regarding the propagation of elastic waves can be suppressed.

[0123] In addition, although an example in which the excitation portion 1 is provided on any one of the plurality of legs 41 (the first leg 41a) is shown in the above-described embodiment, the present invention is not limited thereto. For example, as Figure 13 shown in the sixth modification, the excitation portion 1 is provided on at least two of the plurality of legs 41 via the connection member 5. In Figure 13 the example shown, the excitation portion 1 is arranged on the first leg 41a and the second leg 41b.

[0124] Here, in a structure in which elastic waves propagate from one part, at the front end of the part where a defect has occurred, the propagation of vibration weakens, and it becomes difficult to detect the discontinuous portions 80 and 81 of the vibration state. Therefore, in the sixth modification, by configuring as described above, elastic waves can be propagated from a plurality of parts (two parts). As a result, elastic waves can be propagated from different multiple parts. Therefore, different from the structure in which elastic waves propagate from one part, it is possible to suppress a situation where the portions where defect detection becomes difficult due to the weakening of vibration propagation increase.

[0125] In addition, although an example of a structure in which a sheet or the like that shields the space between the plurality of legs 41 is not provided is shown in the above-described embodiment, the present invention is not limited thereto. For example, as Figure 14 shown in the seventh modification, a light-shielding member 14 that covers the space 43 surrounded by the plurality of legs 41 is provided on each of the plurality of legs 41. In addition, in Figure 14 the example shown, for convenience, the light-shielding member 14 is shown shaded. In addition, in Figure 14 the example shown, the light-shielding member 14 is provided on each of the three legs 41. However, for example, it may also be configured such that in the inspection area 90a (refer to Figure 2Four legs 41 are provided on the outer sides of the four corners (four corners) of [], and a light-shielding member 14 is provided so as to cover the four legs 41 during imaging.

[0126] In the seventh modification, by configuring as described above, when performing an inspection outdoors or the like, the influence of external light such as sunlight can be eliminated. In addition, laser can be prevented from leaking from the inspection area 90a (refer to Figure 2 ) to the outside, and thus the inspector can be prevented from peeping at the laser. As a result, the safety of the inspector can be ensured.

[0127] (Eighth modification)

[0128] In addition, although an example of a structure in which the holding member 4 includes a plurality of legs 41 is shown in the above-described embodiment, the present invention is not limited thereto. For example, the excitation unit 1, the laser illuminator 2, and the speckle shear interferometer 3 may be provided with respect to the holding member 4 having a box shape. As Figure 15 shown, when using the holding member 4 having a box shape, the excitation unit 1 may be provided on the side surface of the holding member 4 by means of the connecting member 5.

[0129] (Other modifications)

[0130] In addition, although an example of a structure in which the speckle shear interferometer 3 including the interference unit 30 and the image sensor 31 is shown in the above-described embodiment, the present invention is not limited thereto. For example, the interference unit 30 and the image sensor 31 may be provided separately. In addition, the interference unit 30 may be configured by an interferometer other than the speckle shear interferometer 3.

[0131] In addition, although an example of a structure in which the defect inspection device 100 includes the vibration absorption member 1c is shown in the above-described embodiment, the present invention is not limited thereto. For example, the defect inspection device 100 may not include the vibration absorption member 1c. In the case of a structure in which the defect inspection device 100 does not include the vibration absorption member 1c, the housing 1a and the oscillator 1b of the excitation unit 1 may be fixed using a resin material or the like.

[0132] In addition, although the excitation unit 1 that is in contact with the surface of the inspection object 90 is used in the above-described embodiment, the present invention is not limited thereto. For example, a powerful speaker or the like provided at a position not in contact with the surface of the inspection object 90 may be used as the excitation unit 1.

[0133] In addition, in the present invention, on the optical path until the reflected light from the inspection object 90 enters the image sensor 31, a window, various optical filters, etc. may be arranged for the purpose of protecting optical components, improving the SN ratio of the device, etc.

[0134] In addition, although in the above-described embodiment the condenser lens 36 is disposed between the beam splitter 32 and the image sensor 31, the present invention is not limited to this configuration. In the present invention, the condenser lens 36 may also be composed of a plurality of lenses or a plurality of lens groups.

[0135] In addition, although in the above-described embodiment an example of a structure in which the signal generator 7, the excitation unit 1, and the laser illuminator 2 are connected by a cable 20 (wired) is shown, the present invention is not limited thereto. In the present invention, the signal generator 7, the excitation unit 1, and the laser illuminator 2 may also be wirelessly connected.

[0136] In addition, although in the above-described embodiment an example of a structure in which the holding member 4 includes three legs 41 is shown, the present invention is not limited thereto. For example, the holding member 4 may also be a structure including four legs 41. The number of legs 41 included in the holding member 4 may be arbitrary.

[0137] In addition, although in the above-described embodiment an example of a structure in which the connecting member 5 has a flat plate shape is shown, the present invention is not limited thereto. The connecting member 5 may have any shape. For example, a structure in which the excitation unit 1 and the first leg 41a are connected by a cord-like connecting member 5 may also be used.

[0138] In addition, although in the above-described embodiment an example of a structure in which the defect inspection device 100 inspects the fuselage of an aircraft is shown, the present invention is not limited thereto. For example, the defect inspection device 100 may also inspect a bridge girder or the like. In the case of inspecting a bridge girder or the like, there is a possibility that the adsorption portion 12 does not adsorb to the bridge girder or the like. Therefore, a structure in which the contact member 13 is provided on the leg 41 is preferable.

[0139] [Solution]

[0140] Those skilled in the art will understand that the above exemplary embodiments are specific examples of the following solutions.

[0141] (Item 1)

[0142] A defect inspection device, comprising:

[0143] An excitation unit that excites elastic waves in an inspection object;

[0144] A laser illuminator that irradiates the inspection object with laser light;

[0145] An interference unit that causes laser light reflected from different positions of the inspection object excited by the excitation unit to interfere with each other;

[0146] A photographing unit that photographs the laser light after interference;

[0147] A holding member that holds the imaging unit so as to be positionable at a predetermined distance from the inspection object;

[0148] A connecting member that connects the holding member or the imaging unit to the exciting unit; and

[0149] A control unit that generates an image of the propagation of elastic waves in the inspection object based on the laser after interference captured by the imaging unit.

[0150] (Item 2)

[0151] The defect inspection device according to Item 1, further comprising a vibration absorbing member provided between the exciting unit and the imaging unit and absorbing vibrations from the exciting unit.

[0152] (Item 3)

[0153] The defect inspection device according to Item 1 or Item 2, wherein

[0154] the holding member has an imaging unit holding portion that holds the imaging unit and a plurality of legs provided on the imaging unit holding portion,

[0155] the exciting unit is provided on any one of the plurality of legs by means of the connecting member.

[0156] (Item 4)

[0157] The defect inspection device according to Item 1 or Item 2, wherein

[0158] the holding member has an imaging unit holding portion that holds the imaging unit and a plurality of legs provided on the imaging unit holding portion,

[0159] the exciting unit is provided on at least two of the plurality of legs by means of the connecting member.

[0160] (Item 5)

[0161] The defect inspection device according to Item 3 or Item 4, wherein

[0162] the exciting unit is provided on the leg in such a manner that when the leg contacts the inspection object, the exciting unit contacts the inspection object at a position where the relative position with respect to the imaging unit is preset.

[0163] (Item 6)

[0164] The defect inspection device according to Item 3 or Item 4, wherein

[0165] the exciting unit includes a housing, an oscillator, and the vibration absorbing member,

[0166] The housing is connected to the leg by means of the connecting member.

[0167] The oscillator and the vibration absorption member are provided inside the housing.

[0168] The vibration absorption member is provided between the housing and the oscillator.

[0169] (Item 7)

[0170] The defect inspection device according to Item 3 or Item 4, wherein

[0171] An adsorption portion for supporting the holding member by adsorbing to the inspection object or an abutting member abutting against the inspection object is provided on the plurality of legs.

[0172] The excitation portion is provided on the leg together with the adsorption portion or the abutting member.

[0173] (Item 8)

[0174] The defect inspection device according to Item 7, wherein

[0175] The excitation portion is provided on the leg together with a plurality of the adsorption portions.

[0176] (Item 9)

[0177] The defect inspection device according to Item 7, wherein

[0178] The excitation portion is provided on the leg together with the abutting member,

[0179] The adsorption portion is provided on the leg where the excitation portion is not provided.

[0180] (Item 10)

[0181] The defect inspection device according to Item 7, wherein

[0182] The excitation portion is provided integrally with the adsorption portion inside or outside the adsorption portion.

[0183] (Item 11)

[0184] The defect inspection device according to Item 3 or Item 4, wherein

[0185] The connecting member is configured to be able to adjust the contact position of the excitation portion with respect to the inspection object.

[0186] (Item 12)

[0187] The defect inspection device according to Item 11, wherein

[0188] The connecting member includes a biasing member that biases the excitation portion relative to the inspection object.

[0189] (Item 13)

[0190] The defect inspection device according to item 11, wherein

[0191] The connecting member is configured to be rotatable in a circumferential direction around the leg portion.

[0192] (Item 14)

[0193] The defect inspection device according to item 3 or item 4, wherein:

[0194] The excitation unit is configured to excite the elastic wave to the inspection object by supplying current via a cable.

[0195] The cable is housed inside the leg.

[0196] (Item 15)

[0197] The defect inspection device according to item 3 or item 4, wherein:

[0198] The plurality of legs include an energizing leg on which the energizing portion is provided and a supporting leg that supports the holding member.

[0199] (Item 16)

[0200] The defect inspection device according to item 3 or item 4, wherein:

[0201] Each of the plurality of legs is provided with a light shielding member that covers a space surrounded by the plurality of legs.

[0202] Explanation of Reference Numerals

[0203] 1. Excitation unit; 1a. Shell; 1b. Vibrator; 1c. Vibration absorbing member; 2. Laser illuminator; 4. Holding member; 5. Connecting member; 5e. Force-applying member; 6. Control unit; 12. Adsorption unit; 13. Abutment member; 14. Light-shielding member; 20. Cable; 30. Interference unit; 31. Image sensor (camera unit); 40. Interferometer holding unit (camera unit holding unit); 41. Leg (multiple legs); 41a. First leg (multiple legs); 41b. Second leg (multiple legs); 41c. Third leg (multiple legs); 41d. Excitation unit leg; 41e. Support leg; 43. Space surrounded by multiple legs; 61. Image of propagation of elastic waves; 90. Inspection object; 100. Defect inspection device.

Claims

1. A defect inspection device, wherein, The defect inspection device includes: An excitation unit that excites elastic waves in an object to be inspected; A laser illuminator that irradiates the object to be inspected with laser light; An interference unit that causes laser light reflected from different positions of the object to be inspected after being excited by the excitation unit to interfere with each other; An imaging unit that captures the interfered laser light; A holding member that holds the imaging unit so that it can be disposed at a position separated from the object to be inspected by a predetermined distance; A connecting member that connects the holding member or the imaging unit to the excitation unit; A control unit that generates an image of the propagation of elastic waves in the object to be inspected based on the interfered laser light captured by the imaging unit, The holding member has an imaging unit holding portion that holds the imaging unit and a plurality of legs provided on the imaging unit holding portion, The excitation unit is provided on any one of the plurality of legs via the connecting member.

2. A defect inspection device, wherein, The defect inspection device includes: An excitation unit that excites elastic waves in an object to be inspected; A laser illuminator that irradiates the object to be inspected with laser light; An interference unit that causes laser light reflected from different positions of the object to be inspected after being excited by the excitation unit to interfere with each other; An imaging unit that captures the interfered laser light; A holding member that holds the imaging unit so that it can be disposed at a position separated from the object to be inspected by a predetermined distance; A connecting member that connects the holding member or the imaging unit to the excitation unit; A control unit that generates an image of the propagation of elastic waves in the object to be inspected based on the interfered laser light captured by the imaging unit, The holding member has an imaging unit holding portion that holds the imaging unit and a plurality of legs provided on the imaging unit holding portion, The excitation unit is provided on at least two of the plurality of legs via the connecting member.

3. The defect inspection device according to claim 1 or 2, wherein The defect inspection device further includes a vibration absorption member that absorbs vibration from the excitation unit and applies a force to the excitation unit to bring the excitation unit into close contact with the object to be inspected.

4. The defect inspection device according to claim 1 or 2, wherein The excitation unit is provided on the leg in such a manner that when the leg comes into contact with the object to be inspected, the excitation unit comes into contact with the object to be inspected at a position where the relative position with respect to the imaging unit is preset.

5. The defect inspection device according to claim 3, wherein The excitation unit includes a housing, an oscillator, and the vibration absorption member, The housing is connected to the leg via the connecting member, The oscillator and the vibration absorption member are provided inside the housing, The vibration absorption member is provided between the housing and the oscillator.

6. The defect inspection device according to claim 1 or 2, wherein An adsorption portion that supports the holding member by adsorbing to the object to be inspected or an abutting member that abuts against the object to be inspected is provided on the plurality of legs, The excitation unit is provided on the leg together with the adsorption portion or the abutting member.

7. The defect inspection device according to claim 6, wherein The excitation unit is provided on the leg together with a plurality of the adsorption portions.

8. The defect inspection device according to claim 6, wherein, the excitation unit and the abutting member are provided on the leg portion, the adsorption unit is provided on the leg portion where the excitation unit is not provided.

9. The defect inspection device according to claim 6, wherein, the excitation unit is integrally provided inside or outside the adsorption unit.

10. The defect inspection device according to claim 1 or 2, wherein, the connecting member is configured to be able to adjust the contact position of the excitation unit relative to the inspection object.

11. The defect inspection device according to claim 10, wherein, the connecting member includes a biasing member that biases the excitation unit relative to the inspection object.

12. The defect inspection device according to claim 10, wherein, the connecting member is configured to be able to rotate in the circumferential direction centered on the leg portion.

13. The defect inspection device according to claim 1 or 2, wherein, the excitation unit is configured to excite elastic waves in the inspection object by being supplied with current through a cable, the cable is housed inside the leg portion.

14. The defect inspection device according to claim 1 or 2, wherein, the plurality of leg portions include an excitation leg portion where the excitation unit is provided and a support leg portion that supports the holding member.

15. The defect inspection device according to claim 1 or 2, wherein, a light-shielding member that covers the space surrounded by the plurality of leg portions is provided on each of the plurality of leg portions.

Images