Spectrometer having a carrier plate and a housing

Abstract

This invention relates to a spectrometer for performing spectral analysis of electromagnetic radiation. The spectrometer includes an entrance slit (03) for allowing the electromagnetic radiation to be analyzed to enter, and an imaging grid for diffracting the entered electromagnetic radiation. The spectrometer also includes a detector extending in at least one direction for detecting the diffracted electromagnetic radiation, and a support plate (01) in which the entrance slit (03) is arranged. The spectrometer further includes a housing (02) supported on the support plate (01), which covers the detector and the entrance slit (03) and supports the imaging grid. According to the invention, the spectrometer further includes at least three floating bearings (04, 06, 07) for levitating the housing (02) supported on the support plate (01), wherein the floating bearings (04, 07) respectively release movement between the housing and the support plate along a directional axis and are distributed around the central axis of the housing (02).

Description

Technical Field

[0001] This invention relates to a spectrometer comprising a support plate and a housing supported on the support plate. The housing has an imaging grid. At least one detector extending in one direction is arranged within the housing. This type of spectrometer is also referred to as a compact spectrometer. Background Technology

[0002] Because spectrometers are sensitive measuring devices, existing technologies have revealed solutions for designing spectrometers to resist environmental influences such as temperature fluctuations. This includes, for example, using materials with little or no thermal expansion. Solutions for compensating for length changes due to thermal expansion are also known. Especially in mass-produced, compact spectrometers, plastic components, such as housings made of plastic, are used. These plastics, mostly formed from polymers, typically have significant thermal expansion. Other components of the spectrometer, such as the support plate made of steel, have significantly less thermal expansion. These different thermal expansions require specific compensation measures.

[0003] DE 103 04 312A1 illustrates a spectrometer in which electrical and optical components are interconnected in a compact structural form. Minimal installation and adjustment work should be achieved through a small number of individual components. The compact spectrometer consists of an entrance slit, an imaging grid, one or more detector elements arranged in rows or a matrix, and elements of a manipulation and evaluation unit. The detector elements and the entrance slit are located on a common carrier, and the elements of the manipulation and evaluation unit are arranged on an empty surface of the common carrier. The entrance slit, detector elements, and a spherical imaging grid housed within the spectrometer housing are arranged symmetrically with respect to an imaginary central axis of the carrier. The compact spectrometer includes at least one fixed bearing and a floating bearing for supporting the spectrometer housing on the carrier.

[0004] US 6,650,412 B1 discloses a possibility for passive thermal compensation in optical devices, such as spectrometers. Thermal compensation should be performed not only parallel to the optical axis at the focal point but also perpendicular to the optical axis in lateral positioning. To maintain the objective lens's position, at least two polymer spacers are used along the optical axis between the objective lens holder and the floating flange that houses the objective lens. The polymer spacers have a coefficient of thermal expansion, causing the objective lens to move from the spacers toward the detector system as the temperature rises, thus compensating for the temperature-induced increase in the distance between the objective lens and the detector. A curved support that bends by a predetermined amount in one direction upon temperature change is used to connect the objective lens holder to the floating plate. This allows the objective lens to move laterally toward the optical axis.

[0005] A spectrometer configured using a photodetector is known from US 2004 / 0239931 A1. The photodetector includes a photodiode array having multiple photodiodes and a light input section with an opening in a predetermined positioning relationship with the photodiode array. A reflection diffraction grid is used to separate the incident light into its spectral components. The spectral components are detected using the photodiode array.

[0006] DE 10 2016 005 386 A1 illustrates a spectrometer for examining the spectrum of a light emission source. The spectrometer includes an optical component substrate, a light entrance opening fixedly connected to the optical component substrate, a dispersive element for generating a spectrum, and a detector for measuring the generated spectrum. For temperature compensation, a mirror assembly with two mirrors is disposed between the light entrance opening and the detector.

[0007] DE 10 2007 045 668 A1 illustrates a spectrometer having an entrance slit for measuring light and a housing. An imaging diffraction grid is arranged inside the housing to split and image the measuring light onto a photodetector device. The housing and a substrate are connected to each other by cooperating positioning devices for defining and positioning each other. The entrance slit, the positioning devices of the substrate, and the holding devices for housing and securing the detector device are fixed components of the substrate, and they are fabricated from the substrate. The positioning devices of the substrate and / or the holding devices of the detector device are constructed as elastic elements. Summary of the Invention

[0008] Based on the prior art, the objective of this invention is to provide a compactly constructed spectrometer that minimizes the effects of temperature changes with minimal cost.

[0009] The aforementioned task is addressed using a spectrometer for performing spectral analysis of electromagnetic radiation, the spectrometer comprising:

[0010] - An injection slit used to allow the electromagnetic radiation to be analyzed to enter;

[0011] - An imaging grid used to diffract incoming electromagnetic radiation;

[0012] - A detector that extends in at least one direction for detecting diffracted electromagnetic radiation;

[0013] - A support plate, in which the injection slot is arranged;

[0014] - A housing supported on the carrier plate, the housing covering the detector and the injection slit and carrying the imaging grid; and

[0015] - At least three floating bearings for floating the housing on the support plate, wherein the floating bearings release movement between the housing and the support plate in one direction axis, and wherein the floating bearings are distributed about the central axis of the housing.

[0016] The spectrometer according to the invention is used for spectral analysis of samples and is compactly constructed so that it can be implemented, in particular, as a miniaturized sensor capable of large-scale manufacturing. The spectrometer according to the invention can be used, for example, for routine analysis in laboratory settings, for process measurement techniques, or for quality monitoring during manufacturing processes.

[0017] The spectrometer includes an injection slit for allowing electromagnetic radiation to be analyzed to enter a cavity within the spectrometer. An imaging grid is located within the cavity to diffract the incoming electromagnetic radiation. A detector is also located within the cavity to detect the diffracted electromagnetic radiation. Therefore, the electromagnetic radiation diffracted by the grid is directed towards the detector. The detector extends in at least one direction to enable analysis of the diffracted electromagnetic radiation. The detector may be configured as a row detector or a matrix detector, for example. In addition to the grid and detector, the spectrometer preferably also includes a manipulation and evaluation unit.

[0018] The spectrometer includes a support plate, an injection slit arranged within the support plate, and a detector, preferably a printed circuit board, also preferably supported by the support plate. A housing of the spectrometer is supported on the support plate. The housing surrounds the aforementioned cavity. The housing covers or encloses the detector and the injection slit. The housing supports an imaging grid. The imaging grid can, for example, be constructed as a cover for the housing. The imaging grid can also, for example, be disposed on the inner side of the housing.

[0019] The spectrometer includes at least three floating bearings for buoyantly supporting the housing on a support plate. The supports are floating such that thermal expansion of the housing relative to the support plate is released. In other respects, the supports are completely fixed, preventing movement of the housing relative to the support plate. Specifically, the housing cannot move on the support plate. In this respect, the positioning of the housing relative to the support plate is fixed.

[0020] The floating bearings release movement between the housing and the support plate along a single axial direction. Preferably, the floating bearings release movement between the housing and the support plate along exactly one axial direction. Through the cooperation of at least three floating bearings, the housing can thermally expand relative to the support plate, but the housing cannot move relative to the support plate. For this purpose, the floating bearings are arranged in a manner distributed around the central axis of the housing. Because the cooperation of at least three floating bearings prevents the housing from moving relative to the support plate, the housing is preferably not supported on the support plate by fixed bearings or otherwise fixed to the support plate.

[0021] A particular advantage of the spectrometer is that the thermal expansion of the housing (which is greater than the thermal expansion of the support plate due to the different materials) does not cause changes in the relative positioning of the injection slit, grid, and detector.

[0022] In a preferred embodiment of the spectrometer, the housing is made of plastic, particularly polymer or thermoplastic. The support plate is preferably made of ceramic or metal, particularly steel.

[0023] In a preferred embodiment of the spectrometer, the directional axes of at least two floating bearings intersect at a single point. Preferably, the directional axes of all floating bearings intersect at this point. The directional axes are preferably all in a plane, which is preferably oriented parallel to the support plate and preferably located within the support plate. The plane also preferably contains the intersection of the directional axes of at least two floating bearings. The intersection forms a virtual fixed bearing. The intersection is preferably arranged within the support plate. The intersection is preferably covered or surrounded by a housing.

[0024] The intersection of the directional axes of at least two floating bearings is preferably located in the injection slot. Alternatively, the intersection of the directional axes of at least two floating bearings is preferably located in the injection slot in a plane offset from the bearing plate. This offset is less than one-quarter of the housing radius.

[0025] The shell is preferably tubular or can-shaped. The central axis of the shell, especially the tubular or can-shaped one, is preferably oriented perpendicular to the support plate. The tubular shell is preferably closed on a first side by the support plate, while the second side opposite the first side is closed by a grid. The grid is preferably arranged in a plane parallel to the support plate. Alternatively, the grid is preferably arranged in a plane inclined at an angle relative to the support plate, wherein the angle is preferably less than 15°; preferably between 5° and 10°. This plane is preferably arranged perpendicular to the central axis of the shell. If the shell is can-shaped, the grid is preferably arranged on the inner side of the bottom of the can shape. The tubular or can-shaped shell has a hollow cylindrical or hollow truncated conical base. The grid is preferably formed of spherical grids.

[0026] The directional axis of at least one of the floating bearings preferably intersects the central axis of the housing. In another preferred embodiment, the directional axes of all the floating bearings intersect the central axis of the housing. Alternatively, the intersection of the directional axes of all the floating bearings is preferably offset from the central axis of the housing by an offset dimension. This offset dimension is less than one-quarter of the housing radius.

[0027] The floating bearings are preferably arranged outside the housing. These floating bearings are preferably equidistant from the intersections with the directional axes. These floating bearings are preferably equidistant from the central axis of the housing.

[0028] The floating bearings are preferably arranged in a manner that is evenly distributed around the intersection points of the directional axes. The floating bearings are preferably arranged in a manner that is evenly distributed around the central axis of the housing. Preferably, one of the evenly distributed floating bearings is arranged offset from the even distribution by at most one coding distance, thereby making it less likely for the housing to be misinstalled on the load-bearing plate.

[0029] Preferably, the spectrometer includes exactly three floating bearings. Two of the three floating bearings have a preferred center point angle of 120° relative to each other. Alternatively, the center point angles are preferably 90°, 90°, and 180°, such that two of the three floating bearings and their intersection point are aligned in a straight line, and the directional axes of these two floating bearings are also aligned in a straight line.

[0030] In a preferred embodiment, the floating bearing releases movement between the housing and the support plate along exactly one axial direction. Therefore, the floating bearing has exactly one degree of freedom.

[0031] The floating bearings preferably each include a first component, such as a groove, constructed in a bearing plate, which defines the directional axis of the respective floating bearing. The floating bearings preferably each include a second component, such as a pin or rolling element guide that can be guided in the respective groove, constructed on the housing. The second component of the floating bearing is preferably constructed on the periphery of the housing.

[0032] In preferred embodiments, the floating bearings are implemented as planar bearings. In particularly preferred embodiments, the floating bearings each include a groove and rolling elements supported in the groove, and preferably include rolling element guides. The groove of the floating bearing is preferably constructed in a bearing plate. The groove is preferably constructed in a U-shape or V-shape. The rolling element guides are preferably constructed on the housing; particularly on the periphery of the housing. The rolling elements are preferably made of steel. The rolling elements preferably have a spherical or cylindrical shape. The rolling elements and / or the groove preferably have a coating for reducing friction.

[0033] The housing is preferably pressed against the support plate by at least one tension spring. Thus, rolling elements, if necessary, are pressed into the groove. The at least one tension spring is preferably formed of a bow-shaped spring.

[0034] A preferred embodiment of the spectrometer also includes an attachment optics unit located in front of the entrance slit, which optically influences the electromagnetic radiation to be analyzed, for example, by focusing or filtering. The attachment optics unit is arranged on the rear side of the support plate opposite to the housing. In this respect, the housing is arranged on the front or upper side of the support plate, while the attachment optics unit is arranged on the rear or lower side of the support plate. The attachment optics unit comprises an optical element arranged in front of the entrance slit and an attachment optics unit carrier supporting the optical element. The optical element is formed, for example, by a lens. The attachment optics unit carrier is supported on the support plate, i.e., on the rear or lower side of the support plate. The spectrometer also includes at least three rear-side floating bearings for floatingly supporting the attachment optics unit carrier on the support plate. In this respect, the three floating bearings for floating the housing on the support plate form the front floating bearings, while the floating bearings for floating the attachment optics unit carrier on the support plate form the rear floating bearings. The support is floating, allowing thermal expansion of the attached optical component carrier relative to the support plate to be released. In other respects, the support is completely fixed, preventing the attached optical component carrier from moving relative to the support plate. Specifically, the attached optical component carrier cannot move on the support plate. In this respect, the positioning of the attached optical component carrier relative to the support plate and, consequently, relative to the housing, is fixed.

[0035] The rear floating bearings release movement between the attached optical device carrier and the support plate along a directional axis. The rear floating bearings are arranged in a manner distributed around the central axis of the attached optical device carrier. Preferably, the rear floating bearings are arranged in a manner that is uniformly distributed around the central axis of the attached optical device carrier. Preferably, one of the uniformly distributed rear floating bearings is arranged offset from the uniform distribution by at most one coding distance, thereby reducing the likelihood of errors in the installation of the attached optical device carrier above or below the support plate. The central axis of the attached optical device carrier and the central axis of the housing preferably coincide.

[0036] The rear floating bearings release movement between the attached optical device carrier and the support plate along a single axial direction. Preferably, the rear floating bearings release movement between the attached optical device carrier and the support plate along exactly one axial direction. Through the cooperation of at least three rear floating bearings, the attached optical device carrier can thermally expand relative to the support plate, but it cannot move relative to the support plate. For this purpose, the rear floating bearings are arranged in a manner distributed around the central axis of the attached optical device carrier. Because the cooperation of at least three rear floating bearings prevents movement of the attached optical device carrier relative to the support plate, the attached optical device carrier is preferably not supported on the support plate by fixed bearings or otherwise fixed to the support plate.

[0037] In a preferred embodiment of the spectrometer, the carrier for attaching the optical components is made of plastic, particularly polymer or thermoplastic.

[0038] In a preferred embodiment of the spectrometer, the directional axes of at least two of the rear floating bearings intersect at a single point. Preferably, the directional axes of all the rear floating bearings intersect at this point. Preferably, the optical element for attaching the optics is located at this point. The directional axes preferably lie in a plane, which is preferably oriented parallel to the support plate and preferably located within the support plate. The intersection of the directional axes of at least two of the rear floating bearings is also preferably located in this plane. The intersection forms a virtual fixed bearing. The intersection is preferably arranged within the support plate.

[0039] The attachment optical device carrier preferably has at least three arms extending from the optical element. Each rear-side floating bearing preferably supports one of the arms. The arms are preferably arranged in a uniformly distributed manner, such that the angle between any two adjacent arms is the same. The attachment optical device carrier preferably has exactly three arms, wherein the angle between any two adjacent arms is 120°.

[0040] The attachment optical device carrier preferably includes a plurality of abutment feet, which are used to abut against a support plate. The abutment feet are preferably cylindrical, with the axis of the cylindrical shape of the abutment feet arranged perpendicular to the support plate. The plurality of abutment feet are preferably rigidly constructed, while the plurality of other abutment feet are preferably flexibly constructed to avoid overstability. Preferably, at least one abutment foot is arranged on each arm. Preferably, at least one rigid abutment foot and at least one flexible abutment foot are arranged on each arm.

[0041] The rear floating bearings are preferably equidistant from all intersections with the directional axis. The rear floating bearings are preferably equidistant from all optical elements. Preferably, the rear floating bearings are arranged radially further inward than those attached to the support legs.

[0042] In a preferred embodiment, the rear floating bearings release movement between the attached optical device carrier and the support plate along exactly one axial direction. Therefore, each rear floating bearing has exactly one degree of freedom.

[0043] The rear floating bearings preferably each include a first component, such as a groove, constructed in the support plate, which defines the directional axis of the respective rear floating bearing. The floating bearings preferably each include a second component constructed on the attached optical device carrier, such as a press-fit foot that can be guided in the respective groove, or a pin or rolling element guide that can be guided in the respective groove.

[0044] The carrier for attaching optical components is preferably pressed against the support plate by at least one tension spring. The at least one tension spring is preferably formed of a bow spring. Attached Figure Description

[0045] Further details and improvements of the present invention will be derived from the following description of preferred embodiments of the invention with reference to the accompanying drawings. Wherein:

[0046] Figure 1 : Showing a carrier plate and housing according to a preferred embodiment of the spectrometer according to the present invention;

[0047] Figure 2 : Show Figure 1 The spectrometer shown has a mounting plate and attached optical components.

[0048] Figure 3 : Shown in a separate view with detailed illustrations Figure 2 The carrier plate shown has additional optical components;

[0049] Figure 4 : Shown in a separate view with detailed illustrations Figure 1 and Figure 2 The carrier plate shown has a housing and additional optical components. Detailed Implementation

[0050] Figure 1 The view from below shows the support plate 01 and housing 02 of a preferred embodiment of the spectrometer according to the invention in an uninstalled state, thus showing the support plate 01 and housing 02 side by side. The support plate 01 is made of steel and has a disc shape. The housing 02 is made of polymer and has a tapered tube shape, wherein the central axis of the tube shape is perpendicular to the plane of the drawing. An injection slit 03 is arranged near the center of the support plate 01, through which electromagnetic radiation to be analyzed by the spectrometer can pass. Three front-side grooves 04 are also constructed in the support plate 01, each having an approximate V shape, and cylindrical rollers 06 operate in each groove (in... Figure 4 (As shown in the image). Cylindrical roller 06 (in...) Figure 4 (As shown in the image) In the installed state of the spectrometer, it extends between the front groove 04 and the cylindrical roller guide 07 constructed on the lower side of the housing 01. The front groove 04, the cylindrical roller 06 (in...) Figure 4(As shown in the diagram) and cylindrical roller guide 07 constitute a floating bearing for floating the housing 02 on the front side of the support plate 01, which respectively releases the movement between the housing 02 and the support plate 01 along the direction axis 08. The direction axes 08 intersect at intersection point 09, which is offset away from the injection gap 03 by an offset dimension. Each pair of adjacent direction axes 08 has an angle of 120° with respect to each other.

[0051] Three rear-side grooves 11 are also constructed in the support plate 01, which are referenced Figure 2 To provide a more detailed description.

[0052] The conical tube shape of housing 02 has an inner surface 12. The spectrometer also includes an imaging grid (not shown) for diffracting incident electromagnetic radiation, the imaging grid covering the conical tube shape of housing 02. The spectrometer also includes a detector (not shown) extending in one direction for detecting the diffracted electromagnetic radiation, the detector being arranged within housing 02 on a support plate 01. Housing 02 is pressed against support plate 01 by a tension spring (not shown).

[0053] Figure 2 The view from below or a cross-sectional view shows the product in its uninstalled state. Figure 1 The spectrometer shown includes a carrier plate 01 and an attached optics device 14, arranged side-by-side. The attached optics device 14 comprises an optical element 16 and an attached optics device carrier 17. The attached optics device carrier 17 is made of polymer and has three arms 18. Each arm 18 has a press-fit foot 19, which, in the mounted state of the spectrometer, is pressed into one of the rear slots 11 in the carrier plate 01. The rear slot 11 and the press-fit foot 19 constitute a floating bearing for the rear side of the attached optics device 14, which respectively releases movement between the attached optics device carrier 17 and the carrier plate 01 along a directional axis 21. The directional axes 21 intersect at an intersection point 22, where the optical element 16 is arranged. Each pair of adjacent directional axes 21 has an angle of 120° with respect to each other. Each arm 18 is provided with a rigid abutment foot 23 and a flexible abutment foot 24. In the installed state, the optical device carrier 17 is attached to the support plate 01 via the rigid abutment foot 23 and the flexible abutment foot 24.

[0054] Figure 3 Shown in perspective Figure 2 A detailed illustration shows the carrier plate 01 with the attached optical device 14, one of the rear grooves 11, and the press-in support 19 pressed therein. The carrier plate 01 and the attached optical device 14 are shown in the installed state.

[0055] Figure 4 Shown in another view Figure 1 and Figure 2 A detailed illustration shows a carrier plate 01 with a housing 02 and an attached optical component 14, one of the front grooves 14, a cylindrical roller 06 operating in the groove, and a cylindrical roller guide 07 guiding the cylindrical roller 06. The carrier plate 01, housing 02, and attached optical component 14 are shown in an installed state.

[0056] List of reference numerals

[0057] 01 Bearing plate

[0058] 02 Shell

[0059] 03 Inject into the gap

[0060] 04 Front groove

[0061] 05 -

[0062] 06 Cylindrical rollers

[0063] 07 Cylindrical roller guide

[0064] 08 Direction Axis

[0065] 09 Intersection

[0066] 10 -

[0067] 11. Rear groove

[0068] 12 inner surface

[0069] 13 -

[0070] 14. Attached optical components

[0071] 15 -

[0072] 16 Optical Components

[0073] 17. Attachment carrier for optical components

[0074] 18 arms

[0075] 19 Press in the support legs 20 - 21 Directional Axis

[0076] 22 intersections

[0077] 23 Rigid support feet 24 Flexible, support legs

Claims

1. Spectrometer for the spectral analysis of electromagnetic radiation, comprising: - an entrance slit (03) for the radiation of electromagnetic radiation to be analyzed, - an imaging grating for the diffraction of the radiation of the electromagnetic radiation, - a detector for the detection of the diffracted electromagnetic radiation, which extends at least in one direction, - a carrier plate (01) in which the entrance slit (03) is arranged, - a housing (02) which is supported on the carrier plate (01), which covers the detector and the entrance slit (03) and which carries the imaging grating, and - at least three floating bearings (04, 06, 07) for the floating support of the housing (02) on the carrier plate (01), wherein the floating bearings (04, 07) each release a movement of the housing (02) relative to the carrier plate (01) in one direction axis (08), wherein the direction axes (08) of the floating bearings (04, 06, 07) intersect in a point of intersection (09), wherein a thermal-induced expansion of the housing (02) relative to the carrier plate (01) is released and in other respects the support is completely defined so that the housing (02) cannot move relative to the carrier plate (01), and wherein the floating bearings (04, 06, 07) are distributed around a center axis of the housing (02). The housing (02) is made of plastic and the carrier plate (01) is made of metal. The housing (02) has a tubular shape, wherein the center axis of the tubular shape is oriented perpendicular to the carrier plate (01), wherein the tubular housing (02) is closed on a first side of the tubular housing (02) by the carrier plate (01) and wherein the tubular housing (02) is closed on a second side of the tubular housing (02) opposite the first side by the grating. The point of intersection (09) of the direction axes (08) of the floating bearings (04, 06, 07) lies in the center axis of the housing (02) or is offset from the center axis of the housing (02) by an offset dimension which is less than a quarter of the radius of the housing (02). The floating bearings (04, 06, 07) are arranged outside the housing (02) and at equal distance from the point of intersection (09) of the direction axes (08). The floating bearings (04, 06, 07) are arranged in a uniformly distributed manner around the point of intersection (09) of the direction axes (08), wherein one of the floating bearings (04, 06, 07) is arranged offset by at most one code distance from the uniform distribution. The floating bearings (04, 06, 07) each have exactly one degree of freedom.

2. The optical spectrometer of claim 1, wherein, The floating bearings (04, 06, 07) each comprise a groove (04) and a rolling body (06) supported in the groove (04), wherein the groove (04) is configured in the carrier plate (01).

3. The optical spectrometer of claim 1, wherein, The groove (04) is configured in a U-shape or a V-shape.

4. The optical spectrometer of claim 1, wherein, The rolling body (06) is made of steel.

5. The optical spectrometer of claim 1, wherein, ​ 6. The optical spectrometer of claim 1, wherein, ​ 7. The optical spectrometer of any one of claims 1 to 6, wherein, ​ 8. The optical spectrometer of any one of claims 1 to 6, wherein, ​ 9. The optical spectrometer of claim 8, wherein, ​ 10. The optical spectrometer of claim 8, wherein, ​ 11. The optical spectrometer of claim 8, wherein, The rolling body (06) and / or the groove (04) have a coating.

12. The optical spectrometer of claim 8, wherein, The housing (02) is pressed against the carrier plate (01) by at least one tension spring, whereby the rolling body (06) is pressed into the groove (04).

13. The optical spectrometer of any one of claims 1 to 6, wherein, The spectrometer further comprises an attachment optics (14) arranged on a rear side of the carrier plate (01) facing away from the housing (02), wherein the attachment optics (14) comprises an optical element (16) arranged in front of the entrance slit (03) and an attachment optics carrier (17) carrying the optical element (16), wherein the attachment optics carrier (17) is supported on the carrier plate (01), wherein the spectrometer further comprises at least three rear-side floating bearings (11, 19) for floatingly supporting the attachment optics carrier (17) on the carrier plate (01), wherein the rear-side floating bearings (11, 19) each release a movement of the attachment optics carrier (17) relative to the carrier plate (01) in one direction axis (21), and wherein the rear-side floating bearings (11, 19) are distributed around a center axis of the attachment optics carrier (17).

14. The optical spectrometer of claim 13, wherein, The direction axes (21) of the rear-side floating bearings (11, 19) intersect at an intersection point at which the optical element (16) of the attachment optics (14) is located.

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