Actuator assembly, anti-shake module and terminal

Abstract

The present application provides an actuator assembly, which is applied to the field of actuators. The actuator assembly includes a micro-electromechanical system MEMS driver and an electrical connection component. The MEMS driver includes a driving outer frame and a driving built-in component. The driving built-in component is arranged in the driving outer frame. The electrical connection component includes an electrical connection outer frame, an elastic connection component and an electrical connection built-in component. The electrical connection built-in component is arranged in the electrical connection outer frame. The electrical connection built-in component establishes an electrical connection with the electrical connection outer frame through the elastic connection component. The electrical connection component and the MEMS driver are stacked. The electrical connection outer frame is connected to the driving outer frame, and the electrical connection built-in component is connected to the driving built-in component. In the present application, the actuator assembly can provide an electrical signal to the electronic device through the electrical connection component. Therefore, the electrical connection between the electronic device and the driving built-in component is separated, so that the processing cost of the actuator assembly can be reduced.

Description

Technical Field

[0001] The present application relates to the field of actuators, and in particular to an actuator assembly, an anti-shake module and a terminal. Background Art

[0002] Taking photos or recording videos is a common function of a terminal. However, when a user holds the terminal to take photos or record videos, the terminal may shake, resulting in blurred images.

[0003] To this end, the terminal can compensate for jitter through a micro electro mechanical systems (MEMS) driver. The MEMS driver includes a driving outer frame, a driving elastic connector and a driving built-in component. The driving outer frame is fixed to the shell of the terminal. When the terminal shakes, the driving outer frame shakes with the shaking of the terminal. The driving built-in component is connected to the driving outer frame through the driving elastic connector. When a driving signal is applied to the driving built-in component through the driving elastic connector, the driving built-in component can translate or rotate within the driving outer frame. The image sensor is fixedly arranged on the driving built-in component. When the terminal shakes, the terminal jitter can be compensated by translating or rotating the driving built-in component, thereby reducing the impact of the jitter on the image quality.

[0004] However, in addition to the driving elastic connecting member, a flexure is also required between the driving outer frame and the driving inner member, and the flexure is used to provide electrical connection for the image sensor. Therefore, the structure of the MEMS driver is relatively complex and the processing cost is relatively high. Summary of the invention

[0005] The present application provides an actuator assembly, an anti-shake module and a terminal. By adding an electrical connection component, the electrical connection between the electronic device and the driving built-in component can be separated, thereby reducing the processing cost of the actuator assembly.

[0006] The first aspect of the present application provides an actuator assembly. The actuator assembly includes a MEMS driver and an electrical connection component. The MEMS driver includes a driving outer frame and a driving built-in component. The driving built-in component is arranged in the driving outer frame. The MEMS driver may also include a driving elastic connector. The driving built-in component is connected to the driving outer frame through the driving elastic connector. The actuator assembly provides a driving signal to the driving built-in component through the driving elastic connector. The electrical connection component includes an electrical connection outer frame, an elastic connector and an electrical connection built-in component. The electrical connection built-in component is arranged in the electrical connection outer frame. The electrical connection outer frame is connected to the electrical connection built-in component through the elastic connector. The electrical connection built-in component establishes an electrical connection with the electrical connection outer frame through the elastic connector. The electrical connection component and the MEMS driver are stacked. The electrical connection outer frame is connected to the driving outer frame. The electrical connection built-in component is connected to the driving built-in component.

[0007] In the present application, the actuator assembly can provide an electrical signal to the electronic device through the electrical connection component. Therefore, the electrical connection between the electronic device and the driving built-in component is separated, thereby reducing the processing cost of the actuator assembly.

[0008] In an optional manner of the first aspect, the built-in electrical connection component or the built-in driving component is used to connect to an electronic device. The built-in electrical connection component is used to establish an electrical connection with the electronic device.

[0009] In an optional manner of the first aspect, the electrical connection component is stacked on the MEMS driver. A first through hole is provided on the electrical connection built-in component. The electronic device is provided in the first through hole. By adding the first through hole, the height of the MEMS driver can be reduced, thereby reducing the thickness of the actuator assembly. When the actuator assembly is installed on the terminal, the thinner the thickness of the actuator assembly is, the thinner the lens part of the terminal can be made. Therefore, the present application can improve the user experience.

[0010] In an optional manner of the first aspect, the driving built-in component is used to connect with the electronic device. Wherein, when the electronic device is disposed in the first through hole, the electronic device can be connected to the side wall of the first through hole through the side wall. In this case, the processing cost of the actuator assembly is relatively high. In the present application, by connecting the electronic device to the driving built-in component, the processing cost of the actuator assembly can be reduced.

[0011] In an optional manner of the first aspect, the length of the first through hole is A micrometers (μm) longer than the length of the electronic device, or the width of the first through hole is A μm longer than the width of the electronic device, and the range of A is between 100 and 1000. When the value of A is large, the electrical connection built-in component needs to have a larger length or width, resulting in a larger size of the actuator assembly. When the value of A is small, the heat dissipation efficiency of the electronic device will be reduced. Therefore, the present application can limit the reasonable range of the A value to improve the heat dissipation efficiency of the electronic device while reducing the size of the actuator assembly.

[0012] In an optional manner of the first aspect, a first groove is provided on the driving built-in component. The electronic device is provided in the first groove. Wherein, by providing the first groove, the height of the electronic device can be reduced. When the actuator assembly is installed on the terminal, the front of the electronic device needs to be at a certain distance from other devices. The other devices may be filters. Therefore, the lower the height of the electronic device, the thinner the lens part of the terminal can be, thereby improving the user experience.

[0013] In an optional manner of the first aspect, a second through hole is provided on the driving built-in component. The area of ​​the second through hole is smaller than the area of ​​the first groove. The second through hole and the first groove form a step. The driving built-in component is used to be connected to the back of the electronic device through the step. By adding the second through hole, the heat dissipation efficiency of the electronic device can be improved.

[0014] In an optional manner of the first aspect, the length of the second through hole is shorter than the length of the electronic device by Bμm, or the width of the second through hole is shorter than the width of the electronic device by Bμm. B is between 100 and 1000. When the value of B is small, the connection between the back of the electronic device and the driving built-in component is more difficult, thereby increasing the processing cost of the actuator assembly. When the value of B is large, the area of ​​the second through hole is small, thereby reducing the heat dissipation efficiency of the electronic device. Therefore, the present application can limit the reasonable range of the B value to improve the heat dissipation efficiency of the electronic device while reducing the processing cost.

[0015] In an optional manner of the first aspect, a third through hole is provided on the driving built-in component. The electronic device is provided in the third through hole. The driving built-in component is used to be connected to the side wall of the electronic device through the side wall of the third through hole. By providing the third through hole, the height of the electronic device can be reduced, thereby improving the user experience.

[0016] In an optional manner of the first aspect, the electrical connection built-in component is used to establish an electrical connection with the electronic device by wire bonding. Wherein, when the electronic device is disposed in the first through hole, if the electronic device is connected to the electrical connection built-in component by bonding, conductive adhesive bonding or welding, the processing cost of the actuator assembly is high. In the present application, the processing cost of the actuator assembly can be reduced by wire bonding.

[0017] In an optional manner of the first aspect, a driving region is provided on the driving built-in component. The driving region is outside the target region. The target region is a projection region of the electronic device on the driving built-in component. The driving region generates a driving force through a driving signal. Therefore, the driving region generates heat. By arranging the driving region outside the target region, the heat dissipation efficiency of the electronic device can be improved.

[0018] In an optional manner of the first aspect, the MEMS driver is stacked on the electrical connection component, a first through hole is provided on the driver internal component, and the electronic device is provided in the first through hole. The thickness of the actuator assembly can be reduced by providing the first through hole.

[0019] In an optional manner of the first aspect, the electrical connection built-in component is used to connect to an electronic device. Wherein, when the electronic device is disposed in the first through hole, the electronic device can be connected to the side wall of the first through hole through the side wall. In this case, the processing cost of the actuator assembly is relatively high. In the present application, by connecting the electronic device to the electrical connection built-in component, the processing cost of the actuator assembly can be reduced.

[0020] In an optional manner of the first aspect, a first groove is provided on the electrical connection built-in component. The electronic device is provided in the first groove. By providing the first groove, the height of the electronic device can be reduced, thereby improving the user experience.

[0021] In an optional manner of the first aspect, a second through hole is provided on the built-in electrical connection component. The area of ​​the second through hole is smaller than the area of ​​the first groove. The second through hole and the first groove form a step. The built-in electrical connection component is used to be connected to the back of the electronic device through the step. By adding the second through hole, the heat dissipation efficiency of the electronic device can be improved.

[0022] In an optional manner of the first aspect, a third through hole is provided on the electrical connection built-in component, and the electronic device is provided in the third through hole. The electrical connection built-in component is used to be connected to the side wall of the electronic device through the side wall of the third through hole. By providing the third through hole, the height of the electronic device can be reduced, thereby improving the user experience.

[0023] In an optional manner of the first aspect, the electrically connected built-in component is used to establish an electrical connection with an electronic device having a signal source and a drive source. The electronic device may need to be connected to a drive source and may also need to output a signal source. In this case, the drive source can be transmitted through an elastic connector, and the signal source can be transmitted through an external wire. One end of the external wire is connected to the electronic device. The other end of the external wire is connected to the base. In this case, compared to the elastic connector, the external wire will provide additional resistance to the drive built-in component. The present application transmits the signal source and the drive source through an elastic connector, which is beneficial to the resistance balance of the drive built-in component, thereby improving the reliability of the actuator assembly.

[0024] In an optional manner of the first aspect, the thickness of the electrical connection component is between 100 μm and 1000 μm. The thicker the thickness of the electrical connection component, the thicker the thickness of the actuator assembly. When the actuator assembly is mounted on the terminal, the thicker the thickness of the actuator assembly, the thicker the thickness of the terminal. When the thickness of the terminal is too thick, the user experience will be reduced. Therefore, the present application can improve the user experience by setting the thickness of the electrical connection component.

[0025] In an optional manner of the first aspect, the material of the electrical connection component is single crystal silicon or polycrystalline silicon.

[0026] In an optional manner of the first aspect, the length or width of the electrical connection outer frame is between 4 mm (mm) and 30 mm. The larger the length or width of the electrical connection outer frame, the larger the size of the actuator assembly. By setting the length or width of the electrical connection outer frame, the size of the actuator assembly can be reduced.

[0027] In an optional manner of the first aspect, the number of elastic connectors is a multiple of 4. The elastic connectors also exert resistance on the driving built-in components. When the resistance to the driving built-in components is uneven, the reliability of the MEMS driver will be affected. In addition, the number of elastic connectors will affect the resistance balance. Therefore, when the shape of the electrically connected outer frame and the electrically connected built-in components is a rectangle or a square, the number of elastic connectors being a multiple of 4 is beneficial to the resistance balance.

[0028] In an optional manner of the first aspect, the length of the electrical connection outer frame is equal to the length of the driving outer frame. Or, the width of the electrical connection outer frame is equal to the width of the driving outer frame. When the length or width of the electrical connection outer frame is equal to the length or width of the driving outer frame, the difficulty of connecting the electrical connection component and the MEMS driver can be reduced, thereby reducing the processing cost.

[0029] In an optional manner of the first aspect, the actuator assembly further comprises a base, and the MEMS driver and the electrical connection component are arranged on the base.

[0030] The second aspect of the present application provides an anti-shake module. The anti-shake module includes a lens assembly, a filter, a housing, and the actuator assembly described in the first aspect and any optional method of the first aspect. The actuator assembly is arranged in the housing. The filter is arranged on the actuator assembly. The lens assembly is arranged on the filter.

[0031] The third aspect of the present application provides a terminal. The terminal includes a power supply, a processor and the anti-shake module described in the second aspect. The power supply is used to provide a driving source for the anti-shake module. The anti-shake module is used to obtain a signal source containing image information according to the driving source. The processor is used to perform data processing on the signal source.

[0032] In a fourth aspect, the present application provides a method for preparing an actuator assembly. The preparation method comprises the following steps: providing an electrical connection component and a MEMS driver. The MEMS driver comprises an outer drive frame and an inner drive component. The inner drive component is disposed in the outer drive frame. The electrical connection component comprises an outer electrical connection frame, an elastic connection component and an inner electrical connection component. The inner electrical connection component is disposed in the outer electrical connection frame. The inner electrical connection component establishes an electrical connection with the outer electrical connection frame through an elastic connection component to connect the electrical connection component to the MEMS driver. Among them, the outer electrical connection frame is connected to the outer drive frame, and the inner electrical connection component is connected to the inner drive component.

[0033] In an optional manner of the fourth aspect, the preparation method further comprises the following steps: connecting the electronic device to the driving built-in component or the electrical connection built-in component, and establishing an electrical connection between the electrical connection built-in component and the electronic device.

[0034] In an optional manner of the fourth aspect, connecting the electrical connection component to the MEMS driver includes: stacking the electrical connection component on the MEMS driver. The preparation method also includes: processing a first through hole on the driver built-in component. Connecting the electronic device to the driver built-in component or the electrical connection built-in component includes: installing the electronic device on the driver built-in component through the back of the electronic device. Wherein, the electronic device is located in the first through hole.

[0035] In an optional manner of the fourth aspect, the preparation method further includes: machining a first groove on the built-in driving component. Connecting the electronic device to the built-in driving component or the electrical connection component includes: installing the electronic device into the first groove of the built-in driving component through the back of the electronic device. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1a This is a first structural schematic diagram of an actuator assembly provided in an embodiment of the present application;

[0037] Figure 1b A second structural schematic diagram of the actuator assembly provided in an embodiment of the present application;

[0038] Figure 2 for Figure 1b a partial cross-sectional view of the actuator assembly shown;

[0039] Figure 3a A first partial cross-sectional view of an actuator assembly provided in an embodiment of the present application;

[0040] Figure 3b A second partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

[0041] Figure 3c A third partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

[0042] Figure 3d It is a fourth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

[0043] Figure 3e is a fifth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

[0044] Figure 4a It is a sixth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

[0045] Figure 4bIt is a seventh partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

[0046] Figure 4c It is an eighth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

[0047] Figure 4d It is a ninth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

[0048] Figure 5 It is a tenth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

[0049] Figure 6 This is a third structural schematic diagram of the actuator assembly provided in the embodiment of the present application;

[0050] Figure 7 for Figure 6 An expanded schematic diagram of the actuator assembly shown;

[0051] Figure 8 This is a schematic diagram of the structure of the anti-shake module provided in this application;

[0052] Fig. 9 This is a schematic diagram of the structure of the terminal provided in this application;

[0053] Fig.10 It is a schematic flow chart of the method for preparing the actuator assembly provided in the present application. DETAILED DESCRIPTION

[0054] The present application provides an actuator assembly, an anti-shake module and a terminal. By adding an electrical connection component, the electrical connection between the electronic device and the driving built-in component can be separated, thereby reducing the processing cost of the actuator assembly.

[0055] It should be understood that the terms "first", "second", "target", etc. used in this application are only used for the purpose of distinguishing descriptions, and should not be understood as indicating or implying relative importance, nor should they be understood as indicating or implying an order. In addition, for the sake of simplicity and clarity, reference numbers and / or letters are repeated in multiple figures of this application. Repetition does not indicate that there is a strict limiting relationship between various embodiments and / or configurations. For the convenience of description, in the embodiments of this application, the direction of the Z axis is the height direction. The direction of the X axis is the width direction. The direction of the Y axis is the length direction.

[0056] The actuator assembly in the present application is applied to the field of actuators. In the field of actuators, an electronic device can be fixed on a driving built-in component of a MEMS actuator. When the driving built-in component translates or rotates within a driving outer frame, the driving built-in component drives the electronic device to translate or rotate. However, the driving built-in component requires a driving signal. The electronic device connected to the driving built-in component also requires an electrical signal. Therefore, the structure of the MEMS actuator is relatively complex and the processing cost is relatively high.

[0057] To this end, the present application provides an actuator assembly. Figure 1a FIG. 1 is a first structural schematic diagram of an actuator assembly provided in an embodiment of the present application. Figure 1a As shown, the actuator assembly includes a MEMS driver and an electrical connection component. The MEMS driver includes a driving outer frame 102, a driving internal component 103 and a driving elastic connecting component 104. The driving internal component 103 is arranged in the driving outer frame 102. The driving internal component 103 is connected to the driving outer frame 102 through the driving elastic connecting component 104. The actuator assembly provides a driving signal to the driving internal component 103 through the driving elastic connecting component 104. Driven by the driving signal, the driving internal component 103 can translate or rotate in the driving outer frame 102.

[0058] The electrical connection component includes an electrical connection outer frame 105, an elastic connection member 106 and an electrical connection built-in member 101. The thickness of the electrical connection component is between 100μm and 1000μm. The material of the electrical connection component is a conductive material such as single crystal silicon or polycrystalline silicon, such as an SOI wafer. The length or width of the electrical connection outer frame 105 is between 4㎜ and 30㎜. The electrical connection built-in member 101 is arranged in the electrical connection outer frame 105. The electrical connection outer frame 105 is connected to the electrical connection built-in member 101 through an elastic connection member 106. The electrical connection component and the MEMS driver are stacked. The electrical connection outer frame 105 is connected to the drive outer frame 102. The electrical connection built-in member 101 is connected to the drive built-in member 103. For example, in Figure 1a In the embodiment, the electrical connection component is stacked on the MEMS driver. The electrical connection component and the MEMS driver are fixedly connected. The fixed connection method can be bonding, welding, or bonding. When the fixed connection is fixed by bonding, the bonding material can be various glues and epoxy resins. Among them, the electrical connection outer frame 105 and the driving outer frame 102 are fixedly connected. The electrical connection built-in component 101 and the driving built-in component 103 are fixedly connected. When the driving built-in component 103 translates or rotates in the driving outer frame 102, the driving built-in component 103 drives the electrical connection built-in component 101 to translate or rotate.

[0059] The electrical connection built-in component 101 or the driving built-in component 103 is used to connect to an electronic device, which may be an image sensor or a display. Figure 1bFIG. 2 is a second schematic diagram of the structure of the actuator assembly provided in the embodiment of the present application. Figure 1b As shown, in Figure 1a On the basis of the electronic device 107, the electronic device 107 is stacked on the electrical connection built-in component 101. The electronic device 107 is fixedly connected to the electrical connection built-in component 101. The fixed connection method can be bonding, welding, or bonding. In the subsequent description, when any two structures need to be connected, bonding, welding, or bonding can be used, and the subsequent description will not be repeated. Figure 1b In the embodiment, when the driving internal component 103 translates or rotates in the driving outer frame 102, the driving internal component 103 drives the electrical connection internal component 101 to translate or rotate. The electrical connection internal component 101 drives the electronic device 107 to translate or rotate.

[0060] The electronic device 107 is electrically connected to the electrical connection built-in component 101. The electrical connection can be wire bonding, bonding, conductive adhesive bonding, or welding. The elastic connector 106 is a conductive material. The electrical connection built-in component 101 is electrically connected to the electrical connection outer frame 105 through the elastic connector 106. The actuator assembly provides an electrical signal to the electronic device 107 through the electrical connection outer frame 105, the elastic connector 106, and the electrical connection built-in component 101.

[0061] In the present application, the electrical connection outer frame 105 provides a driving signal for the driving built-in component 103. The electrical connection component provides an electrical signal for the electronic device 107. Therefore, the electrical connection between the electronic device 107 and the driving built-in component 103 is separated, thereby reducing the processing cost of the actuator assembly.

[0062] It should be understood that Figure 1a and Figure 1b The actuator assembly provided in the figure is only an example provided by the present application. The shape or quantity of each structure in the figure shall not be used as a condition to limit the protection scope of the present application.

[0063] For example, in Figure 1a and Figure 1b In the embodiment, the electrically connected outer frame 105 and the driving outer frame 102 are directly connected, so that the positions of the electrically connected outer frame 105 and the driving outer frame 102 do not move relative to each other during the working process. The working process refers to the process of driving the built-in component 103 to translate or rotate in the driving outer frame 102. In practical applications, the actuator assembly may also include a base. The electrically connected outer frame 105 and the driving outer frame 102 may be fixedly connected to the base respectively. At this time, the electrically connected outer frame 105 and the driving outer frame 102 are indirectly connected through the base. The positions of the electrically connected outer frame 105 and the driving outer frame 102 do not move relative to each other during the working process.

[0064] For example, in Figure 1a, the number of elastic connectors 106 is 4. The 4 elastic connectors 106 correspond one to one to the 4 side walls of the electrical connection built-in component 101. In practical applications, the electrical connection component may include other numbers of elastic connectors 106. When the electrical connection component includes 8 elastic connectors 106, each side wall of the electrical connection built-in component 101 may correspond to 2 elastic connectors 106. In practical applications, the elastic connector 106 will also apply a resistance to the electrical connection built-in component 101. When the resistance to the electrical connection built-in component 101 is uneven, the resistance will affect the normal translation or rotation of the driving built-in component 103. Therefore, when the shape of the electrical connection outer frame and the electrical connection built-in component is a rectangle, a square, a circle, or an octagon, the number of elastic connectors may be a multiple of 4.

[0065] For example, it is assumed that the four elastic connectors 106 include elastic connector 1, elastic connector 2, elastic connector 3, and elastic connector 4. The four side walls of the electrical connection built-in component 101 include side wall 1, side wall 2, side wall 3, and side wall 4. The four side walls of the electrical connection outer frame 105 include side wall 11, side wall 12, side wall 13, and side wall 14. Side wall 1 is adjacent to side wall 11. Side wall 2 is adjacent to side wall 12. Side wall 3 is adjacent to side wall 13. Side wall 4 is adjacent to side wall 14. Figure 1a In the embodiment, each elastic connector 106 connects the adjacent side walls of the electrical connection built-in component 101 and the electrical connection outer frame 105. Specifically, elastic connector 1 is used to connect side wall 1 and side wall 11. Elastic connector 2 is used to connect side wall 2 and side wall 12. Elastic connector 3 is used to connect side wall 3 and side wall 13. Elastic connector 4 is used to connect side wall 4 and side wall 14. In practical applications, each elastic connector 106 can connect the non-adjacent side walls of the electrical connection built-in component 101 and the electrical connection outer frame 105. In one example, elastic connector 1 is used to connect side wall 1 and side wall 12. Elastic connector 2 is used to connect side wall 2 and side wall 13. Elastic connector 3 is used to connect side wall 3 and side wall 14. Elastic connector 4 is used to connect side wall 4 and side wall 11.

[0066] For example, in Figure 1a In the embodiment, the adjacent side walls of the side walls 11, 12, 13 and 14 are connected to each other to form an electrical connection outer frame 105 without a gap. In practical applications, the side walls 11, 12, 13 and 14 may not be connected to each other, so as to form an electrical connection outer frame 105 with a gap.

[0067] For example, in Figure 1aIn the figure, the shape of the electrical connection outer frame 105, the electrical connection built-in component 101, the drive outer frame 102 and the drive built-in component 103 on the X plane is a rectangle. The X plane is perpendicular to the X axis. In practical applications, the shape of the electrical connection outer frame 105, the electrical connection built-in component 101, the drive outer frame 102 and the drive built-in component 103 on the X plane can also be a square, a hexagon, a circle, etc.

[0068] Figure 2 for Figure 1b A partial cross-sectional view of the actuator assembly is shown. Figure 2 As shown, the actuator assembly includes a MEMS driver, an electrical connection component and an electronic device 107. The MEMS driver includes a driving outer frame 102, a driving built-in component 103 and a driving elastic connection component 104. The electrical connection component includes an electrical connection outer frame 105, an elastic connection component 106 and an electrical connection built-in component 101. In the height direction, the MEMS driver, the electrical connection component and the electronic device 107 are stacked. Among them, the electronic device 107 is stacked on the electrical connection component. The electrical connection component is stacked on the MEMS driver. In practical applications, the actuator assembly can be matched with other devices to form a module. For example, when the electronic device 107 is an image sensor, the other device can be a filter. At this time, there needs to be a certain distance between the front of the image sensor 107 and the filter. When the height of the image sensor 107 is higher, the height of the filter is also higher, resulting in a thicker thickness of the module. Therefore, the present application can reduce the thickness of the module by reducing the height of the image sensor 107.

[0069] Figure 3a FIG. 1 is a first partial cross-sectional view of an actuator assembly provided in an embodiment of the present application. Figure 3aAs shown, the actuator assembly includes a MEMS driver and an electrical connection component 107. The MEMS driver includes a driving outer frame 102, a driving built-in component 103 and a driving elastic connecting component 104. The electrical connection component includes an electrical connection outer frame 105, an elastic connecting component 106 and an electrical connection built-in component 101. In the height direction, the electrical connection component is stacked on the MEMS driver. The electrical connection outer frame 105 and the driving outer frame 102 are fixedly connected. The electrical connection built-in component 101 and the driving built-in component 103 are fixedly connected. A first through hole is provided in the electrical connection built-in component 101. The length of the first through hole is A μm longer than the length of the electronic device 107. The width of the first through hole is A μm longer than the width of the electronic device 107. A ranges from 100 to 1000. The value of A can be 100 or 1000. The electronic device 107 is provided in the first through hole. The electronic device 107 is fixedly connected to the driving built-in component 103 through the back. The black square in the figure represents the glue or welding point connecting the two. When the driving internal component 103 translates or rotates in the driving outer frame 102, the driving internal component 103 drives the electronic device 107 to translate or rotate. Electrodes are provided on the front of the electronic device 107. The electronic device 107 is electrically connected to the electrical connection internal component 101 by means of wire bonding.

[0070] Figure 3b FIG. 2 is a second partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. Figure 3b As shown, in Figure 3a On the basis of the embodiment of the present invention, a first groove is provided on the driving built-in component 103. The length of the first groove is 100 μm to 1000 μm longer than the length of the electronic device 107. The width of the first groove is 100 μm to 1000 μm longer than the width of the electronic device 107. The electronic device 107 is provided in the first groove. The electronic device 107 is fixedly connected to the driving built-in component 103 through the back of the electronic device 107. Figure 3a compared to, Figure 3b The height of the image sensor 107 can be further reduced.

[0071] Figure 3c FIG. 3 is a third partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. Figure 3c As shown, in Figure 3bOn the basis of, a second through hole is provided on the driving built-in component 103. The length of the second through hole is shorter than the length of the electronic device 107 by Bμm. The width of the second through hole is shorter than the width of the electronic device 107 by Bμm. B is between 100 and 1000. The value of B can be 100 or 1000. The length of the second through hole is less than the length of the first groove. The second through hole and the first groove form a step. The back of the electronic device 107 is fixedly connected to the driving built-in component 103 through the step. Among them, the back of the electronic device 107 can dissipate heat through the second through hole. Therefore, the present application can improve the heat dissipation efficiency of the electronic device 107.

[0072] Figure 3d FIG. 4 is a fourth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. Figure 3d As shown, in Figure 3a On the basis of the embodiment of the present invention, a third through hole is provided on the driving built-in component 103. The length of the third through hole is 100 μm to 1000 μm longer than the length of the electronic device 107. The width of the third through hole is 100 μm to 1000 μm longer than the width of the electronic device 107. The electronic device 107 is provided in the third through hole. The side wall of the electronic device 107 is connected to the side wall of the third through hole. Figure 3a to Figure 3c compared to, Figure 3d The height of the image sensor 107 can be further reduced.

[0073] In the aforementioned Figure 3a to 3d In the description, a first through hole is provided in the driving built-in component 103. The length of the first through hole is greater than the length of the electronic device 107. The width of the first through hole is greater than the width of the electronic device 107. In practical applications, the length of the first through hole may be less than the length of the electronic device 107. Or, the width of the first through hole may be less than the width of the electronic device 107. For example, Figure 3e FIG. 5 is a fifth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. Figure 3e As shown, a first through hole is provided in the electrical connection built-in component 101. The length of the first through hole is less than the length of the electronic device 107. The electronic device 107 is provided in the first through hole. A first groove is provided in the driving built-in component 103. The electronic device 107 is fixedly connected to the driving built-in component 103 through the back.

[0074] In the above description of the actuator assembly, the electrical connection component is stacked on the MEMS driver. In practical applications, the MEMS driver can be stacked on the electrical connection component.

[0075] Figure 4a FIG. 6 is a sixth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. Figure 4aAs shown, the actuator assembly includes a MEMS driver and an electrical connection component 107. The MEMS driver includes a driving outer frame 102, a driving built-in component 103 and a driving elastic connecting component 104. The electrical connection component includes an electrical connection outer frame 105, an elastic connecting component 106 and an electrical connection built-in component 101. In the height direction, the MEMS driver is stacked on the electrical connection component. The connecting outer frame 105 and the driving outer frame 102 are fixedly connected. The electrical connection built-in component 101 and the driving built-in component 103 are fixedly connected. A first through hole is provided in the driving built-in component 103. The length of the first through hole is 100μm to 1000μm longer than the length of the electronic device 107. The width of the first through hole is 100μm to 1000μm longer than the width of the electronic device 107. The electronic device 107 is provided in the first through hole. The electronic device 107 is fixedly connected to the electrical connection built-in component 101 through the back. When the driving built-in component 103 translates or rotates in the driving outer frame 102, the driving built-in component 103 drives the electrical connection built-in component 101 to translate or rotate. The electrical connection built-in component 101 drives the electronic device 107 to translate or rotate. Electrodes are provided on the front of the electronic device 107 and the electrical connection built-in component 101. The electronic device 107 is electrically connected to the electrical connection built-in component 101 by wire bonding.

[0076] Figure 4b FIG. 7 is a seventh partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. Figure 4b As shown, in Figure 4a On the basis of the first groove, the electrical connection built-in component 101 is provided with a first groove. The length of the first groove is 100 μm to 1000 μm longer than the length of the electronic device 107. The width of the first groove is 100 μm to 1000 μm longer than the width of the electronic device 107. The electronic device 107 is provided in the first groove. The back of the electronic device 107 is fixedly connected to the electrical connection built-in component 101. Figure 4a compared to, Figure 4b The height of the image sensor 107 can be further reduced.

[0077] Figure 4c FIG. 8 is an eighth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. Figure 4c As shown, in Figure 4b On the basis of, a second through hole is provided on the electrically connected built-in component 101. The length of the second through hole is 100μm to 1000μm shorter than the length of the electronic device 107. The width of the second through hole is 100μm to 1000μm shorter than the width of the electronic device 107. The length of the second through hole is less than the length of the first groove. The second through hole and the first groove form a step. The back of the electronic device 107 is fixedly connected to the electrically connected built-in component 101 through the step. Among them, the back of the electronic device 107 can dissipate heat through the second through hole, so the present application can improve the heat dissipation efficiency of the electronic device 107.

[0078] Figure 4d FIG. 9 is a ninth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. Figure 4d As shown, in Figure 4a On the basis of the electrical connection built-in component 101, a third through hole is provided. The length of the third through hole is 100 μm to 1000 μm longer than the length of the electronic device 107. The width of the third through hole is 100 μm to 1000 μm longer than the width of the electronic device 107. The electronic device 107 is provided in the third through hole. The side wall of the electronic device 107 is connected to the side wall of the third through hole. Figure 4a to Figure 4c compared to, Figure 4d The height of the image sensor 107 can be further reduced.

[0079] In practical applications, the actuator assembly may further include a base. The MEMS driver and the electrical connection components are disposed on the base. For example, Figure 5 FIG. 10 is a tenth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. Figure 5 As shown, the actuator assembly includes a base 501, a MEMS driver and an electrical connection component 107. The MEMS driver includes a driving outer frame 102, a driving built-in component 103 and a driving elastic connecting component 104. The electrical connection component includes an electrical connection outer frame 105, an elastic connecting component 106 and an electrical connection built-in component 101. In the height direction, the MEMS driver is stacked on the base 501. The thickness of the driving outer frame 102 is greater than the thickness of the driving built-in component 103. The driving outer frame 102 and the base 501 are fixedly connected. The driving built-in component 103 is suspended above the base 501. The electrical connection component is stacked on the MEMS driver. The electrical connection outer frame 105 and the driving outer frame 102 are fixedly connected. The electrical connection built-in component 101 and the driving built-in component 103 are fixedly connected. The electronic device 107 is stacked on the electrical connection component. The electronic device 107 and the electrical connection built-in component 101 are fixedly connected.

[0080] The driving inner component 103 and the driving outer frame 102 are electrically connected via the driving elastic connector 104. The driving outer frame 102 is electrically connected to the base 501. The base 501 can provide a driving signal to the driving inner component 103 via the driving outer frame 102 and the driving elastic connector 104.

[0081] The electronic device 107 is electrically connected to the electrical connection built-in component 101. The electrical connection built-in component 101 is electrically connected to the electrical connection outer frame 105 through the elastic connector 106. An electrical connection is established between the electrical connection outer frame 105 and the base 501. The base 501 is also called a substrate. The base 501 can provide an electrical signal to the electronic device 107 through path 1. Path 1 passes through the electrical connection outer frame 105, the elastic connector 106 and the electrical connection built-in component 101. The electrical signal may include a signal source and a driving source. The driving source is an electrical signal that drives the electronic device 107 to work. The signal source is an electrical signal output by the electronic device 107. In practical applications, the electronic device 107 can also directly establish an electrical connection of path 2 with the base 501. At this time, the electronic device 107 transmits the driving source through path 1. The electronic device 107 transmits the signal source through path 2. Alternatively, the electronic device 107 transmits the driving source through path 2. The electronic device 107 transmits the signal source through path 1.

[0082] In practical applications, a driving region is provided in the driving built-in component 103. The driving region generates a driving force through a driving signal. The driving force drives the driving built-in component 103 to translate or rotate in the driving outer frame 102. During the operation of the driving region, the driving region generates heat. During the operation of the electronic device 107, the electronic device 107 also generates heat. In order to improve the heat dissipation of the electronic device 107, the electronic device 107 and the driving region can be staggered.

[0083] Figure 6 FIG. 3 is a third structural schematic diagram of the actuator assembly provided in the embodiment of the present application. Figure 6 As shown, the actuator assembly includes a MEMS driver and an electrical connection component. The MEMS driver includes a driving outer frame 102, a driving built-in component 103 and a driving elastic connecting component 104. The electrical connection component includes an electrical connection outer frame 105, an elastic connecting component 106 and an electrical connection built-in component 101. In the height direction, the electrical connection component is stacked on the MEMS driver. The electrical connection outer frame 105 and the driving outer frame 102 are fixedly connected. The electrical connection built-in component 101 and the driving built-in component 103 are fixedly connected. The electronic device 107 is stacked on the electrical connection component. The electronic device 107 is fixedly connected to the electrical connection built-in component 101 through the back. A driving area 601 is provided on the driving built-in component 103.

[0084] Figure 7 for Figure 6 An expanded schematic diagram of the actuator assembly is shown in FIG. Figure 7As shown, the number of the driving elastic connecting members 104 is 8. Each side wall of the driving internal component 103 is connected to two driving elastic connecting members 104. Four driving areas 601 are arranged on the driving internal component 103. Each driving area 601 is between two driving elastic connecting members 104. The projection area of ​​the electronic device 107 on the MEMS driver is the target area. Figure 7 and Figure 6 It can be seen that the driving area 601 is outside the target area.

[0085] According to the previous Figure 1a From the description, we can see that Figure 1a The number of the elastic connectors 106 is just an example. In practical applications, the electrical connection component may also include other numbers of elastic connectors 106. Figure 7 In the embodiment, the number of the elastic connectors 106 is 20. There are 5 elastic connectors 106 in one group. Each group of elastic connectors 106 is connected to one side wall of the electrically connected built-in component 101.

[0086] The actuator assembly provided in the present application is described above. The anti-shake module provided in the present application is described below. Figure 8 Schematic diagram of the structure of the anti-shake module provided in this application. Figure 8 As shown, the anti-shake module includes a lens assembly 804, a filter 803, a housing 801 and an actuator assembly 802. The actuator assembly 802 is arranged in the housing 801. The filter 803 is fixedly connected to the housing 801. The filter 803 is arranged on the actuator assembly 802. The distance between the filter 803 and the actuator assembly 802 is between 0.05 mm and 25 mm. The lens assembly 804 is fixedly connected to the housing 801. The lens assembly 804 is arranged on the filter 803. The distance between the lens assembly 804 and the filter 803 is between 0.5 mm and 25 mm. The lens assembly 804 is used to receive a light beam and irradiate the light beam to the filter 803. The light beam reaches the actuator assembly 802 after passing through the filter 803. An electronic device is arranged on the actuator assembly 802. The electronic device is used to obtain an electrical signal according to the light beam. The actuator assembly 802 includes a MEMS driver. The MEMS driver is used to drive the electronic device to translate or rotate, so that the electronic device and the housing 801 generate relative motion.

[0087] It should be understood that Figure 8 For the description of the actuator assembly 802, please refer to the aforementioned Figure 1a-7 For example, the actuator assembly 802 includes a MEMS driver and an electrical connection component. The actuator assembly 802 provides an electrical signal to the electronic device 107 through the electrical connection component. For example, the actuator assembly 802 also includes a base. The MEMS driver and the electrical connection component are arranged on the base.

[0088] The anti-shake module provided in the present application is described above. The terminal provided in the present application is described below. Fig. 9 This is a schematic diagram of the structure of the terminal provided in this application. Fig. 9 As shown, the terminal 900 includes a power supply 901, an anti-shake module 902 and a processor 903. The power supply 901 is used to provide a driving source for the anti-shake module 902. The power supply 901 can be a rechargeable battery. The anti-shake module 902 is used to obtain a signal source containing image information according to the driving source. For a description of the anti-shake module 902, please refer to the aforementioned Figure 8 Related description in .

[0089] Processor 903 is used to process the signal source to obtain target data. Data processing includes editing, synthesis, beautification, sharing, or naming. Processor 903 can be a central processing unit (CPU), a network processor (NP) or a combination of CPU and NP. Processor 903 can further include a hardware chip or other general-purpose processor. The above-mentioned hardware chip can be an application specific integrated circuit (ASIC), a programmable logic device (PLD) or a combination thereof.

[0090] In other embodiments, the terminal 900 may further include a memory. The memory is used to store target data. The memory may be a volatile memory or a non-volatile memory, or may include both volatile and non-volatile memories. Among them, the non-volatile memory may be a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), or a flash memory. The volatile memory may be a random access memory (RAM).

[0091] The terminal provided in the present application is described above. The preparation method of the actuator assembly provided in the present application is described below. Fig.10 FIG. 1 is a schematic diagram of a process for preparing an actuator assembly provided in this application. Fig.10 As shown, the method for preparing the actuator assembly includes the following steps.

[0092] In step 1001, an electrical connection component and a MEMS driver are provided, wherein the MEMS driver includes a driving outer frame and a driving internal component. The electrical connection component includes an electrical connection outer frame and an electrical connection internal component. The MEMS driver can be connected via a driving elastic connection component. The electrical connection components can be connected via an elastic connection component. The driving elastic connection component and the elastic connection component are conductive materials.

[0093] In step 1002, the electrical connection component is connected to the MEMS driver. The electrical connection outer frame is connected to the driving outer frame, and the electrical connection built-in component is connected to the driving built-in component. The connection method can be bonding, welding, or bonding. In the height direction, the electrical connection component can be stacked on the MEMS driver. Alternatively, the MEMS driver is stacked on the electrical connection component. In the process of connecting the electrical connection component and the MEMS driver, the electrical connection component and the MEMS driver cannot be misaligned too much in the length or width direction. Therefore, a reference is needed to determine whether there is misalignment during the connection process. To this end, the length of the electrical connection outer frame can be equal to the length of the driving outer frame. The width of the electrical connection outer frame can be equal to the width of the driving outer frame. Alternatively, the length of the electrical connection built-in component can be equal to the length of the driving built-in component. The width of the electrical connection built-in component can be equal to the width of the driving built-in component.

[0094] It should be understood that the description of the method for preparing the actuator assembly can refer to the aforementioned Figure 1a-7 Description of the actuator assembly.

[0095] For example, in Figure 1b In the embodiment, the electronic device 107 is disposed on the electrical connection built-in component 101. Therefore, the preparation method may further include the following steps: installing the electronic device on the electrical connection built-in component. Establishing electrical connection between the electronic device and the electrical connection built-in component.

[0096] For example, in Figure 3a In the embodiment, when the electrical connection component is stacked on the MEMS driver, a first through hole is provided on the electrical connection built-in component 101. At this time, in the method for preparing the actuator assembly, the method may further include: processing the first through hole on the electrical connection built-in component. The electronic device is mounted in the first through hole through the back of the electronic device.

[0097] For example, in Figure 3b In the embodiment, a first groove is provided on the driving built-in component 103. The electronic device 107 is provided in the first groove. At this time, in the preparation method of the actuator assembly, the preparation method may further include: machining the first groove on the driving built-in component. The electronic device is installed in the first groove of the driving built-in component through the back of the electronic device.

[0098] For example, in Figure 4aIn the embodiment, when the MEMS driver is stacked on the electrical connection component, a first through hole is provided on the driving built-in component 103. At this time, in the method for preparing the actuator assembly, the method may further include: processing the first through hole on the electrical connection built-in component. The electronic device is mounted on the electrical connection built-in component through the back of the electronic device.

[0099] The above are only specific implementation methods of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be covered by the protection scope of the present application.

Claims

1. An actuator assembly, characterized in that: It includes a micro-electromechanical system (MEMS) actuator and electrical connection components, wherein: The MEMS driver comprises a driving outer frame and a driving inner component, wherein the driving inner component is arranged in the driving outer frame; The electrical connection component comprises an electrical connection outer frame, an elastic connection member and an electrical connection inner member, wherein the electrical connection inner member is arranged in the electrical connection outer frame, and the electrical connection inner member establishes an electrical connection with the electrical connection outer frame through the elastic connection member; The electrical connection component and the MEMS driver are stacked, the electrical connection outer frame is connected to the driver outer frame, and the electrical connection built-in component is connected to the driver built-in component.

2. The actuator assembly according to claim 1, characterized in that The electrical connection built-in component or the driving built-in component is used to be connected to an electronic device; The electrical connection built-in component is used to establish an electrical connection with the electronic device.

3. The actuator assembly according to claim 2, characterized in that The stacking of the electrical connection component and the MEMS driver includes: the electrical connection component is stacked on the MEMS driver; The electrical connection built-in component is provided with a first through hole, and the electronic device is arranged in the first through hole.

4. The actuator assembly according to claim 3, characterized in that The electrically connected built-in component or the driving built-in component is used to be connected to an electronic device, including: the driving built-in component is used to be connected to the electronic device.

5. The actuator assembly according to claim 3, characterized in that The length of the first through hole is longer than the length of the electronic device by A μm, or the width of the first through hole is longer than the width of the electronic device by A μm, and A ranges from 100 to 1000.

6. The actuator assembly according to claim 4, characterized in that The driving built-in component is provided with a first groove, and the electronic device is arranged in the first groove.

7. The actuator assembly according to claim 6, characterized in that The driving built-in component is provided with a second through hole, the area of ​​the second through hole is smaller than the area of ​​the first groove, and the second through hole and the first groove form a step; The built-in driving component is used to be connected to the electronic device, which includes: the built-in driving component is used to be connected to the back of the electronic device through the step.

8. The actuator assembly according to claim 7, characterized in that The length of the second through hole is shorter than the length of the electronic device by B μm, or the width of the second through hole is shorter than the width of the electronic device by B μm, where B is between 100 and 1000.

9. The actuator assembly according to claim 4, characterized in that The driving built-in component is provided with a third through hole, and the electronic device is arranged in the third through hole; The built-in driving component is used to be connected to the electronic device, which includes: the built-in driving component is used to be connected to the side wall of the electronic device through the side wall of the third through hole.

10. An actuator assembly according to any one of claims 4 to 9, characterized in that The built-in electrical connection component is used to establish an electrical connection with the electronic device, including: the built-in electrical connection component is used to establish an electrical connection with the electronic device by means of bonding.

11. An actuator assembly according to any one of claims 2 to 9, characterized in that The driving built-in component is provided with a driving area, and the driving area is outside a target area, and the target area is a projection area of ​​the electronic device on the driving built-in component.

12. The actuator assembly according to claim 2, characterized in that The stacking of the electrical connection component and the MEMS driver comprises: the MEMS driver is stacked on the electrical connection component, a first through hole is provided on the driving built-in component, and the electronic device is provided in the first through hole.

13. The actuator assembly according to claim 12, characterized in that The built-in electrical connection component or the built-in driving component is used to be connected to an electronic device, including: the built-in electrical connection component is used to be connected to the electronic device.

14. The actuator assembly according to claim 13, characterized in that The electrical connection built-in component is provided with a first groove, and the electronic device is arranged in the first groove.

15. The actuator assembly according to claim 14, characterized in that The electrical connection built-in component is provided with a second through hole, the area of ​​the second through hole is smaller than the area of ​​the first groove, and the second through hole and the first groove form a step; The built-in electrical connection component is used to be connected to the electronic device, which includes: the built-in electrical connection component is used to be connected to the back of the electronic device through the step.

16. The actuator assembly according to claim 13, characterized in that The electrical connection built-in component is provided with a third through hole, and the electronic device is arranged in the third through hole; The built-in electrical connection component is used to be connected to the electronic device, including: the built-in electrical connection component is used to be connected to the side wall of the electronic device through the side wall of the third through hole.

17. An actuator assembly according to any one of claims 2 to 9 or 12 to 16, characterized in that The built-in electrical connection component is used to establish an electrical connection with the electronic device, including: the built-in electrical connection component is used to establish an electrical connection with the electronic device having a signal source and a driving source.

18. An actuator assembly according to any one of claims 1 to 9 or 12 to 16, characterized in that The material of the electrical connection component is single crystal silicon or polycrystalline silicon.

19. An actuator assembly according to any one of claims 1 to 9 or 12 to 16, characterized in that The length or width of the electrical connection outer frame is between 4 mm and 30 mm.

20. An actuator assembly according to any one of claims 1 to 9 or 12 to 16, characterized in that The number of the elastic connecting members is a multiple of 4.

21. An actuator assembly according to any one of claims 1 to 9 or 12 to 16, characterized in that The length of the electrical connection outer frame is equal to the length of the driving outer frame, or the width of the electrical connection outer frame is equal to the width of the driving outer frame.

22. An actuator assembly according to any one of claims 1 to 9 or 12 to 16, characterized in that The thickness of the electrical connection component is between 100 μm and 1000 μm.

23. An actuator assembly according to any one of claims 1 to 9 or 12 to 16, characterised in that The actuator assembly also includes a base; The MEMS driver and the electrical connection component are arranged on the base.

24. An anti-shake module, characterized in that: comprising a lens assembly, a filter, a housing and an actuator assembly as claimed in any one of claims 1 to 23; The actuator assembly is arranged in the housing, the optical filter is arranged on the actuator assembly, and the lens assembly is arranged on the optical filter.

25. A terminal, characterized in that: The device comprises a power supply, a processor and the anti-shake module as claimed in claim 24, wherein: The power supply is used to provide a driving source for the anti-shake module; The anti-shake module is used to obtain a signal source containing image information according to the driving source; The processor is used for performing data processing on the signal source.

26. A method for preparing an actuator assembly, characterized in that: include: An electrical connection component and a MEMS driver are provided, wherein the MEMS driver comprises an outer driving frame and an inner driving component, wherein the inner driving component is arranged in the outer driving frame, and the electrical connection component comprises an outer electrical connection frame, an elastic connection component and an inner electrical connection component, wherein the inner electrical connection component is arranged in the outer electrical connection frame, and the inner electrical connection component is electrically connected to the outer electrical connection frame through the elastic connection component; The electrical connection component and the MEMS driver are stacked, wherein the electrical connection outer frame is connected to the driver outer frame, and the electrical connection inner component is connected to the driver inner component.

27. The preparation method according to claim 26, characterized in that: The method further comprises: Connecting an electronic device to the driving built-in component or the electrical connection built-in component; An electrical connection is established between the electrical connection built-in component and the electronic device.

28. The preparation method according to claim 27, characterized in that: Connecting the electrical connection component to the MEMS driver comprises: stacking the electrical connection component on the MEMS driver; The method further comprises: Processing a first through hole on the electrical connection built-in component; The connecting the electronic device to the built-in driving component or the built-in electrical connection component comprises: installing the electronic device on the built-in driving component through the back of the electronic device, wherein the electronic device is located in the first through hole.

29. The preparation method according to claim 28, characterized in that: The method further comprises: machining a first groove on the drive built-in component; The connecting the electronic device to the driving built-in component or the electrical connection built-in component comprises: installing the electronic device into the first groove of the driving built-in component through the back of the electronic device.

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