Liquid source gas phase transport system and method

Abstract

This application provides a liquid-source gas-phase transport system and method, relating to the semiconductor field. The liquid-source gas-phase transport system includes a storage device, a reaction device, and a transport pipeline. The storage device includes a container and a container heating assembly, which heats the container to vaporize the liquid raw material within it. The transport pipeline connects the container and the reaction chamber of the reaction device. The transport pipeline includes an inner tube, an outer tube sleeved around the inner tube, and a pipeline heating assembly disposed outside the outer tube. A protective gas is filled between the outer and inner tubes, and the interior of the inner tube is used to transport the gaseous raw material. The liquid-source gas-phase transport system and method provided in this application can uniformly heat the raw material, reducing the likelihood of condensation and particulate contamination. Furthermore, the liquid-source gas-phase transport system and method offer superior safety.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and more specifically, to a liquid source gas phase transport system and method. Background Technology

[0002] In the semiconductor industry, some raw materials are heated to a gaseous state and then transported through pipelines to reaction chambers to participate in the reaction and fabricate semiconductor devices. For example, certain silicon precursors (SCPs), used as process reaction sources, have very low vapor pressure at room temperature and exist in a liquid state. They must be converted into a gaseous state before participating in the process reaction. In existing technologies, SCPs are prone to uneven vaporization before entering the reaction chamber, causing them to contaminate the interior of the reaction chamber as small droplets or particles. Furthermore, introducing SCPs from the plant to the reaction chamber requires a considerable length of pipeline, which is prone to leakage and poses a safety hazard. Therefore, this proposal suggests a liquid-source gas phase transport system employing multi-stage heating and a double-layered tubing design to more stably convert SCPs into a gaseous state and reduce chamber particle contamination. Summary of the Invention

[0003] The purpose of this application is to provide a liquid source gas phase transport system and method that enables the transported raw materials to be uniformly vaporized, avoids particulate contamination, and has better safety.

[0004] The embodiments of this application can be implemented as follows:

[0005] In a first aspect, this application provides a liquid source gas phase transport system, comprising:

[0006] A storage device includes a container and a container heating assembly, wherein the container is used to store liquid raw materials and the container heating assembly is used to heat the container to vaporize the liquid raw materials in the container;

[0007] The reaction apparatus includes a reaction chamber;

[0008] The delivery pipeline connects the container and the reaction chamber. The delivery pipeline includes an inner tube, an outer tube sleeved outside the inner tube, and a pipeline heating assembly located outside the outer tube. A protective gas is filled between the outer tube and the inner tube. The inner tube is used to deliver gaseous raw materials, and the pipeline heating assembly is used to heat the gaseous raw materials in the delivery pipeline.

[0009] In an optional implementation, the protective gas includes one or more of nitrogen, argon, and helium.

[0010] In an optional embodiment, both the container heating assembly and the pipeline heating assembly include a heating band. The heating band of the container heating assembly is wrapped around the outer surface of the container, and the heating band of the pipeline heating assembly is wrapped around the outer surface of the outer pipe.

[0011] In an optional embodiment, the delivery pipeline includes a main pipeline and at least two branch pipelines, the reaction device includes at least two reaction chambers, one end of the main pipeline is connected to a storage device, the other end of the main pipeline is connected to one end of each branch pipeline, and the other end of each branch pipeline is connected to each reaction chamber respectively.

[0012] In an optional embodiment, the pipeline heating assembly includes a first heating assembly wrapped around the outside of the main pipeline and a second heating assembly wrapped around the outside of the branch pipeline, wherein the first heating assembly and each of the second heating assemblies are independently controlled.

[0013] In an optional embodiment, the second heating component includes a front heating section, a middle heating section, and a rear heating section sequentially from upstream to downstream along the conveying direction; the front heating section, the middle heating section, and the rear heating section are all independently controlled.

[0014] Secondly, this application provides a liquid source gas phase transport method, which uses the liquid source gas phase transport system of any of the foregoing embodiments to transport raw materials. The liquid source gas phase transport method includes:

[0015] The container heating assembly is controlled to heat the liquid raw material inside the container, so that the liquid raw material is vaporized into a gaseous raw material;

[0016] The control pipeline heating component heats the gaseous raw material in the conveying pipeline, and the temperature of the gaseous raw material gradually increases along the conveying direction.

[0017] In an optional embodiment, the delivery pipeline includes a main pipeline and at least two branch pipelines, the reaction device includes at least two reaction chambers, one end of the main pipeline is connected to a storage device, the other end of the main pipeline is connected to one end of each branch pipeline, and the other end of each branch pipeline is connected to each reaction chamber. The pipeline heating assembly includes a first heating assembly wrapped around the outside of the main pipeline and a second heating assembly wrapped around the outside of each branch pipeline, and the first heating assembly and each of the second heating assemblies are independently controlled. The step of controlling the pipeline heating assembly to heat the gaseous raw material in the delivery pipeline includes:

[0018] The gaseous raw material in the main heating pipeline is controlled by the first heating component so that the gaseous raw material is heated to 36-42°C before entering the branch pipeline;

[0019] The gaseous raw material in the heating branch line is controlled by the second heating component so that the gaseous raw material is heated to 80-100°C before entering the reaction chamber.

[0020] In an optional embodiment, the second heating assembly includes a front heating section, a middle heating section, and a rear heating section sequentially from upstream to downstream along the conveying direction, and the front heating section, the middle heating section, and the rear heating section are all independently controlled; the step of controlling the second heating assembly to heat the gaseous raw material in the branch pipeline so that the gaseous raw material is heated to 80-100°C before entering the reaction chamber includes:

[0021] The preheating section controls the heating of gaseous raw materials to 43–60°C;

[0022] The heating section in the control room heats the gaseous raw material to 80-100℃;

[0023] The temperature of the gaseous raw material before it enters the reaction chamber is maintained at 80-100°C in the post-heating section.

[0024] In an optional embodiment, the step of controlling the container heating assembly to heat the liquid raw material inside the container to vaporize the liquid raw material into a gaseous raw material includes:

[0025] The control container heating assembly heats the liquid raw material to 25–35°C;

[0026] The pressure inside the control container is kept below the saturated vapor pressure of the liquid raw material at the current temperature.

[0027] The beneficial effects of the embodiments of this application include, for example:

[0028] The liquid-to-gas transfer system provided in this application includes a storage device, a reaction device, and a delivery pipeline. The storage device includes a container and a container heating assembly, which heats the container to vaporize the liquid raw material within it. The delivery pipeline connects the container and the reaction chamber of the reaction device. The delivery pipeline includes an inner pipe, an outer pipe sleeved around the inner pipe, and a pipeline heating assembly disposed outside the outer pipe. A protective gas is filled between the outer and inner pipes, and the inner pipe is used to transport the gaseous raw material. The delivery pipeline in this application has a double-layered pipe structure. The pipeline heating assembly first heats the protective gas between the inner and outer pipes, and then the protective gas transfers heat to the inner pipe and the raw material inside. The protective gas is fluid, so even if there is uneven heating in the circumferential direction of the pipeline heating assembly, the temperature of the protective gas itself easily becomes uniform through flow. Simultaneously, the protective gas can tightly surround the outer side of the inner pipe, uniformly heating the inner pipe and preventing uneven heating due to loose adhesion. The protective gas itself has a low thermal conductivity. Once its temperature reaches the target temperature, it is less prone to significant temperature fluctuations due to power fluctuations in the pipeline heating components. Therefore, the temperature of the raw material in the inner tube is more stable. It is evident that the liquid-source gas phase transfer system provided in this embodiment can uniformly heat the raw material, reducing the likelihood of fluctuations in the gaseous raw material due to uneven heating or power fluctuations. Consequently, the raw material is less likely to condense and cause particulate contamination. Furthermore, if a leak occurs in the inner tube, the outer tube can prevent the raw material from leaking out and causing harm to the environment and personnel, thus providing superior safety.

[0029] The liquid source gas phase transport method provided in this application embodiment includes using the above-mentioned liquid source gas phase transport system for raw material transport, thus having the advantages of uniform raw material gasification and high safety. Attached Figure Description

[0030] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0031] Figure 1 This is a schematic diagram of a liquid-gas phase source transport system in one embodiment of this application;

[0032] Figure 2 This is a cross-sectional view of a delivery pipeline in one embodiment of this application.

[0033] Icons: 010-Liquid source gas phase transfer system; 100-Storage device; 110-Container; 120-Container heating assembly; 200-Reaction device; 210-Reaction chamber; 220-Top cover; 230-Spray head; 301-Inner pipe; 302-Outer pipe; 303-Protective gas; 304-Pipeline heating assembly; 310-Main pipeline; 320-Branch pipeline; 400-Gas control box. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0035] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0036] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0037] In the description of this application, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of the invention is usually placed during use, they are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0038] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0039] It should be noted that, where there is no conflict, the features in the embodiments of this application can be combined with each other.

[0040] Taking the delivery of silicon precursor (SCP) as an example, SCP is heated to a gaseous state in a gas cylinder and then transported through a pipeline. The pipeline in this technology is a single-layered tube surrounded by a heating element to heat the SCP, thus inputting heat to ensure it enters the reaction chamber in gaseous form. However, the heating element is difficult to fit perfectly and evenly, potentially leading to uneven heating in certain areas. Furthermore, the heating element is prone to power fluctuations, resulting in uneven heat input over time. These issues can easily lead to uneven vaporization of the raw material, causing SCP to condense into small droplets or particles, contaminating the inside of the reaction chamber. Moreover, long-distance pipeline transport carries the risk of leakage, potentially causing environmental pollution and endangering personal safety.

[0041] To address the shortcomings of the prior art, this application provides a liquid-source gas-phase transport system and method. By employing a double-layered sleeve design in the transport pipeline, the raw material is vaporized more stably and uniformly, reducing particulate contamination in the reaction chamber.

[0042] Figure 1 This is a schematic diagram of a liquid-gas phase source transport system in one embodiment of this application. Figure 1 As shown, the liquid-gas phase source transport system provided in this application embodiment includes a storage device 100, a reaction device 200, and a transport pipeline. The storage device 100 includes a container 110 and a container heating assembly 120. The container 110 is used to store liquid raw materials, and the container heating assembly 120 is used to heat the container 110 to vaporize the liquid raw materials in the container 110. The reaction device 200 includes a reaction chamber 210, in which the gaseous raw materials can form the desired product. The transport pipeline connects the container 110 and the reaction chamber 210. The pipeline heating assembly 304 is used to heat the gaseous raw materials in the transport pipeline to adjust the temperature of the gaseous raw materials so that they enter the reaction chamber 210 at a suitable temperature.

[0043] The liquid-gas phase source transport system in this application embodiment can be used to process semiconductor materials, such as silicon precursors (SCP). Taking the heating and transport of silicon precursors as an example, the container 110 of the storage device 100 can be a steel cylinder, and the container heating component 120 can be a heating belt wrapped around the outer surface of the container 110. Specifically, in this embodiment, the heating belt wraps around the bottom and sides of the container 110 to uniformly heat the liquid material and vaporize it. In other optional embodiments, the heating belt can only cover the bottom or sidewalls, or wrap around the top, sidewalls, and bottom of the container 110. The heating belt can use a multi-layer structure of silicone rubber insulation layer and Teflon fiberglass cloth, with the heat-conducting wires arranged in a meandering manner within the multi-layer structure. The specific structure and heating principle of the heating belt can be found in the prior art, and will not be repeated here.

[0044] Furthermore, the heating belt can be processed using a 1:1 mold opening method. To ensure sufficient vaporization of the raw material, the storage device 100 may also include a pressure monitoring device (not shown in the figure) to monitor the gas pressure inside the container 110. By controlling the pressure of the container 110 to be maintained below the saturated vapor pressure of the raw material during the heating process, it is ensured that the liquid raw material can be under vaporization conditions. And as the gas is continuously consumed, as long as the pressure is maintained, the liquid source material can be continuously vaporized.

[0045] Optionally, the storage device 100 may include two containers 110, both connected to the delivery pipeline. The two containers 110 may selectively supply gaseous raw materials to the delivery pipeline, and when the raw materials in one container 110 are exhausted, the supply may be switched to the other container 110.

[0046] Figure 2 This is a cross-sectional view of a delivery pipeline in one embodiment of this application. Figure 2 As shown in this embodiment, the conveying pipeline includes an inner pipe 301, an outer pipe 302 sleeved outside the inner pipe 301, and a pipeline heating assembly 304 disposed outside the outer pipe 302. A protective gas 303 is filled between the outer pipe 302 and the inner pipe 301. The inner pipe 301 is used to convey gaseous raw materials. In this embodiment, the inner pipe 301 and the outer pipe 302 are concentrically arranged to ensure a uniform gap between them, thereby ensuring uniform heat transfer. The inner pipe 301 and the outer pipe 302 can be made of materials with high thermal conductivity, such as steel.

[0047] In this embodiment, the protective gas 303 between the inner tube 301 and the outer tube 302 can be a chemically stable gas such as nitrogen, helium, or argon. Since the pipeline is under constant heating, choosing this type of protective gas 303 to fill the gap between the inner tube 301 and the outer tube 302 not only facilitates heat transfer but also reduces corrosion (e.g., oxidation) to both the inner and outer tubes. Taking nitrogen as an example, at 20°C, the thermal conductivity of nitrogen is approximately 0.025 W / mK, which is relatively low for a heat-conducting medium. When the temperature rises to 100°C, the thermal conductivity of nitrogen increases slightly to 0.028 W / mK. The relatively stable thermal conductivity of nitrogen makes it suitable for applications requiring stable thermal conductivity.

[0048] The conveying pipeline in this embodiment adopts a double-tube structure, with a protective gas 303 filling the gap between them. When the outer tube 302 is heated, it transfers heat to the protective gas 303, which then transfers heat to the inner tube 301. The inner tube 301 then ultimately transfers heat to the raw material being conveyed inside. Because the protective gas 303 has a certain degree of fluidity, even if the pipeline heating assembly 304 experiences uneven heating in the circumferential direction of the pipeline, the temperature of the protective gas 303 itself easily becomes more uniform through its flow. Simultaneously, the protective gas 303 can tightly surround the outer side of the inner tube 301, providing uniform heating without uneven heating due to loose adhesion. The protective gas 303 itself has a low thermal conductivity; once its temperature reaches the target temperature, it is less prone to significant temperature fluctuations due to power fluctuations in the pipeline heating assembly 304. Therefore, the temperature of the inner tube 301 and the raw material within it will be more stable. In addition, if the inner tube 301 leaks, the raw material will first enter the gap between the outer tube 302 and the inner tube 301, which can prevent the raw material from leaking directly and causing harm to the environment and personnel, thus providing better safety.

[0049] To detect whether there is a raw material leakage in the inner tube 301, a pressure sensor can be installed to detect the pressure of the protective gas 303 between the inner tube 301 and the outer tube 302. The change in this pressure can be used to determine whether a leak has occurred, such as a sudden change in pressure that may occur during a leak.

[0050] Similar to the container heating assembly 120, the pipeline heating assembly 304 can also be a heating strip, which wraps around the outer surface of the outer tube 302. The structure and principle of the heating strip of the pipeline heating assembly 304 can be referred to the above description of the heating strip of the container heating assembly 120, and will not be repeated here.

[0051] In this embodiment, the pipeline heating assembly 304 may include multiple heating sections arranged in the raw material conveying direction. Each heating section can independently control its heating power to heat the raw material in the pipeline at its respective location. By independently controlling each heating section, the temperature of the raw material at different locations on the conveying pipeline can be freely adjusted so that the temperature of the raw material at different locations meets the needs of the current location and finally enters the reaction chamber 210 at a suitable temperature.

[0052] To better implement segmented heating and prevent the heat input to adjacent heating sections from affecting each other due to the cross-flow of protective gas 303, in an optional embodiment, the gaps in the delivery pipelines corresponding to different heating sections are separated; in other words, the protective gas 303 in the upstream section of the pipeline will not exchange with the protective gas 303 in the downstream section of the pipeline.

[0053] In this embodiment, the delivery pipeline includes a main pipeline 310 and two branch pipelines 320. The reaction device 200 includes two reaction chambers 210. One end of the main pipeline 310 is connected to the storage device 100, and the other end of the main pipeline 310 is connected to one end of each branch pipeline 320. The other end of each branch pipeline 320 is connected to each reaction chamber 210. It should be understood that both the main pipeline 310 and the branch pipelines 320 have the same basic structure, both including an inner pipe 301, an outer pipe 302, and an outermost heating component.

[0054] In this embodiment, the reaction device 200 includes two reaction chambers 210 and the delivery pipeline includes two branch pipelines 320 as an example. In other optional embodiments, the reaction device 200 may include more reaction chambers 210 and the number of branch pipelines 320 may be increased accordingly.

[0055] In this embodiment, by setting the branch line 320 to have a smaller diameter, the gaseous raw material in the branch line 320 can have a higher flow rate and a lower pressure (compared to the gas in the main line 310). This ensures that even if a small amount of liquid droplets are generated in the gaseous raw material transported in the main line 310, they will vaporize after entering the branch line 320 due to the decrease in pressure.

[0056] The pipeline heating assembly 304 includes a first heating assembly wrapped around the main pipeline 310 and a second heating assembly wrapped around the branch pipeline 320. In this embodiment, the first heating assembly and each of the second heating assemblies are independently controlled. Further, the second heating assembly includes a front heating section, a middle heating section, and a rear heating section sequentially from upstream to downstream along the conveying direction; the front heating section, middle heating section, and rear heating section are all independently controlled. The front heating section, middle heating section, and rear heating section can be continuous or intermittent.

[0057] In this embodiment, the liquid source gas phase transmission system 010 also includes a gas control box 400, which may include several valves and flow meters for monitoring and controlling the flow of each branch pipeline 320.

[0058] In this embodiment, a spray head 230 is provided on the top cover 220 of the reaction chamber 210. The spray head 230 is connected to the branch pipeline 320. The gaseous raw material in the branch pipeline 320 is sprayed out through the spray head 230 and then enters the interior of the reaction chamber 210 through the channel on the top cover 220 for deposition.

[0059] Please refer to Figure 1In this embodiment, by controlling the heating power of the first heating component, the temperature of the gaseous raw material before entering the branch pipeline 320 can be controlled, such as the gas temperature in area A of the figure. The preheating section of the second heating component can control the gas temperature in area B of the figure, which can be the area corresponding to the gas control box 400. The middle heating section of the second heating component can control the gas temperature in area C of the figure, which is downstream of area B. The middle heating section of the second heating component can control the gas temperature in area D of the figure, which corresponds to the pipeline before the spray head 230.

[0060] This application also provides a liquid source gas phase transport method, applied to the liquid source gas phase transport system 010 provided in this application embodiment. The liquid source gas phase transport method includes:

[0061] The control container heating assembly 120 heats the liquid raw material in the container 110 to vaporize the liquid raw material into a gaseous raw material; the control pipeline heating assembly 304 heats the gaseous raw material in the conveying pipeline, and the temperature of the gaseous raw material gradually increases along the conveying direction.

[0062] Taking the liquid-gas phase transfer system provided in this application embodiment as an example, the step of controlling the container heating assembly 120 to heat the liquid raw material in the container 110 may specifically include:

[0063] The control container heating assembly 120 heats the liquid raw material to 25-35°C; the control container 110 has a gas pressure lower than the saturated vapor pressure of the liquid raw material at the current temperature.

[0064] It should be understood that when the gas pressure inside container 110 is lower than the saturated vapor pressure of the liquid raw material at the current temperature, the liquid raw material can be in a "boiling" state, that is, continuously vaporized, and then enter the conveying pipeline.

[0065] Furthermore, the step of controlling the pipeline heating assembly 304 to heat the gaseous raw material in the conveying pipeline may specifically include:

[0066] The first heating component is controlled to heat the gaseous raw material in the main heating pipeline 310 so that the gaseous raw material is heated to 36-42°C before entering the branch pipeline 320; the second heating component is controlled to heat the gaseous raw material in the branch pipeline 320 so that the gaseous raw material is heated to 80-100°C before entering the reaction chamber 210.

[0067] Furthermore, the step of controlling the gaseous raw material in the heating branch line 320 of the second heating component to raise the temperature of the gaseous raw material to 80-100°C before entering the reaction chamber 210 specifically includes:

[0068] The preheating section heats the gaseous raw material to 43-60°C; the intermediate heating section heats the gaseous raw material to 80-100°C; and the postheating section maintains the temperature of the gaseous raw material before it enters the reaction chamber 210 at 80-100°C.

[0069] By using the above-described step-by-step heating method, complete vaporization of the raw materials can be ensured. Even if local condensation occurs and small droplets are generated, these droplets can be re-vaporized through the subsequent high-temperature, low-pressure pipeline.

[0070] In summary, the liquid source gas phase transfer system 010 provided in this application embodiment includes a storage device 100, a reaction device 200, and a delivery pipeline. The storage device 100 includes a container 110 and a container heating assembly 120, which heats the container 110 to vaporize the liquid raw material in the container 110. The delivery pipeline connects the container 110 and the reaction chamber 210 of the reaction device 200. The delivery pipeline includes an inner pipe 301, an outer pipe 302 sleeved outside the inner pipe 301, and a pipeline heating assembly 304 disposed outside the outer pipe 302. A protective gas 303 is filled between the outer pipe 302 and the inner pipe 301, and the interior of the inner pipe 301 is used to transport gaseous raw materials. The conveying pipeline in this application has a double-layered sleeve structure. The pipeline heating component 304 first heats the protective gas 303 between the inner pipe 301 and the outer pipe 302, and then the protective gas 303 transfers heat to the inner pipe 301 and the raw material inside the inner pipe 301. The protective gas 303 is fluid, so even if there is uneven heating in the circumferential direction of the pipeline heating component 304, the temperature of the protective gas 303 itself can easily become uniform through flow. At the same time, the protective gas 303 can tightly surround the outside of the inner pipe 301, uniformly heating the inner pipe 301, and will not cause uneven heating due to loose adhesion. The protective gas 303 itself has a low thermal conductivity, and when its temperature rises to the target temperature, it is not easy to have significant temperature fluctuations due to power fluctuations of the pipeline heating component 304, so the temperature of the raw material in the inner pipe 301 will also be more stable. As can be seen, the liquid source gas phase transmission system 010 provided in this application embodiment can uniformly heat the raw material, and is not prone to fluctuations in the gaseous raw material due to uneven heating or power fluctuations. Therefore, the raw material is less likely to condense and cause particulate contamination. In addition, if the inner pipe 301 leaks, the outer pipe 302 can also prevent the raw material from leaking out and causing harm to the environment and personnel, thus having better safety.

[0071] The liquid source gas phase transport method provided in this application embodiment includes using the above-mentioned liquid source gas phase transport system 010 for raw material transport, thus having the advantages of uniform raw material gasification and high safety.

[0072] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A liquid-source gas phase transport system, characterized in that, The liquid source vapor phase transmission system comprises: a storage device comprising a container for storing liquid raw material and a container heating assembly for heating the container to vaporize the liquid raw material in the container, wherein the pressure in the container is maintained below the saturated vapor pressure of the raw material; a reaction device comprising a reaction chamber; a delivery pipeline connecting the container and the reaction chamber, the delivery pipeline comprising an inner tube for delivering gaseous raw material, an outer tube sleeved outside the inner tube, and a pipeline heating assembly arranged outside the outer tube, the outer tube being filled with a protective gas between the outer tube and the inner tube, and the pipeline heating assembly being used to heat the gaseous raw material in the delivery pipeline; wherein the pipeline heating assembly comprises a plurality of heating sections arranged in the direction of raw material delivery, and each of the heating sections is independently controllable.

2. The liquid source vapor transport system of claim 1, wherein, The protective gas comprises one or more of nitrogen, argon and helium.

3. The liquid source gas phase transport system of claim 1, wherein, The container heating assembly and the pipeline heating assembly each comprise a heating belt, the heating belt of the container heating assembly being wrapped around the outer surface of the container, and the heating belt of the pipeline heating assembly being wrapped around the outer surface of the outer tube.

4. The liquid source vapor transport system of claim 1, wherein, The delivery pipeline comprises a main pipeline and at least two branch pipelines, and the reaction device comprises at least two reaction chambers, one end of the main pipeline is connected to the storage device, the other end of the main pipeline is connected to one end of each of the branch pipelines, and the other end of each of the branch pipelines is connected to each of the reaction chambers.

5. The liquid source gas phase transport system of claim 4, wherein, The pipeline heating assembly comprises a first heating assembly wrapped around the outer side of the main pipeline and a second heating assembly wrapped around the outer side of each of the branch pipelines, and each of the first heating assembly and the second heating assemblies is independently controllable.

6. The liquid source gas phase transport system of claim 5, wherein, The second heating assembly comprises, in the direction of delivery, from upstream to downstream, a front heating section, a middle heating section and a rear heating section, and each of the front heating section, the middle heating section and the rear heating section is independently controllable.

7. A liquid source vapor transport method, comprising: The liquid source vapor phase transmission method comprises: controlling the container heating assembly to heat the liquid raw material in the container to vaporize the liquid raw material into gaseous raw material; controlling the pipeline heating assembly to heat the gaseous raw material in the delivery pipeline, and the temperature of the gaseous raw material gradually increases in the direction of delivery.

8. The liquid source vapor transport method of claim 7, wherein, The delivery pipeline comprises a main pipeline and at least two branch pipelines, and the reaction device comprises at least two reaction chambers, one end of the main pipeline is connected to the storage device, the other end of the main pipeline is connected to one end of each of the branch pipelines, and the other end of each of the branch pipelines is connected to each of the reaction chambers, the pipeline heating assembly comprises a first heating assembly wrapped around the outer side of the main pipeline and a second heating assembly wrapped around the outer side of each of the branch pipelines, and each of the first heating assembly and the second heating assemblies is independently controllable; the step of controlling the pipeline heating assembly to heat the gaseous raw material in the delivery pipeline comprises: controlling the first heating assembly to heat the gaseous raw material in the main pipeline, so that the gaseous raw material is heated to 36-42℃ before entering the branch pipeline; controlling the second heating assembly to heat the gaseous raw material in the branch pipeline, so that the gaseous raw material is heated to 80-100℃ before entering the reaction chamber.

9. The liquid source vapor transport method of claim 8, wherein, The second heating assembly comprises a front heating section, a middle heating section and a rear heating section in sequence from upstream to downstream along the conveying direction, and the front heating section, the middle heating section and the rear heating section are independently controlled. controlling the front heating section to heat the gaseous raw material to 43-60℃; controlling the middle heating section to heat the gaseous raw material to 80-100℃; controlling the rear heating section to maintain the temperature of the gaseous raw material before entering the reaction chamber at 80-100℃.

10. The liquid source vapor transport method of claim 7, wherein, controlling the container heating assembly to heat the liquid raw material in the container, so that the liquid raw material is gasified into gaseous raw material, comprising: controlling the container heating assembly to heat the liquid raw material to 25-35℃; controlling the air pressure in the container to be lower than the saturated vapor pressure of the liquid raw material at the current temperature.

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