Air floating drive device

Abstract

The present invention provides an air floating driving device, comprising a first air floating platform and a second air floating platform, the first air floating platform is located above the second air floating platform, the running directions of the first air floating platform and the second air floating platform are perpendicular to each other, the first air floating platform and the second air floating platform both comprise an air floating assembly and a motor assembly, the first air floating platform comprises a first guide rail device, the second air floating platform comprises a second guide rail device, the air floating assembly comprises an upper slide, a side slide and a lower slide, the first guide rail device and the second guide rail device both comprise side rails and a mounting groove located between the two side rails, the side rails comprise a top surface, a side surface and a bottom surface connected in sequence, the side slides are respectively mounted on the side surfaces of the side rails on both sides, the upper slide is located on the top surface of the side rails and is fixedly connected to the side slides on both sides, the lower slide is connected to one end of the side slide away from the upper slide, the upper slide, the side slide and the lower slide are all provided with air outlets, and the air outlets spray air toward the side rails.

Description

Technical Field

[0001] The invention relates to an air floating driving device which has stable operation, good durability and can drive multiple loads simultaneously, and belongs to the field of precision mechanical equipment. Background Art

[0002] In today's product manufacturing industry, such as laser processing or inspection of multiple small-size wafer equipment, large-size wafers, large-size panels, etc., high requirements are placed on the cleanliness and stability of the transmission process. Therefore, non-contact transmission methods are usually used, such as air flotation platforms.

[0003] When the suspension force is balanced with the gravity of the workpiece, the workpiece can be in a stable suspension state. The air flotation conveying method can avoid direct contact with the workpiece, will not cause scratches, and can also ensure the cleanliness of the workpiece. The suspension force and gravity in the existing air flotation platform are sometimes not always stable, and it is easy to malfunction, especially when the air flotation platform is heavily loaded, and occasionally there will be insufficient buoyancy.

[0004] In view of this, it is indeed necessary to improve the structure of the existing air floating drive device to solve the above problems. Summary of the invention

[0005] The object of the present invention is to provide an air-floating driving device which has precise control and can drive multiple loads simultaneously.

[0006] To achieve the above-mentioned purpose, the present invention provides an air flotation drive device, including a first air flotation platform and a second air flotation platform, the first air flotation platform and the second air flotation platform are stacked in a vertical direction, the first air flotation platform is located above the second air flotation platform, the running directions of the first air flotation platform and the second air flotation platform are perpendicular to each other, the first air flotation platform and the second air flotation platform both include an air flotation component and a motor component, the first air flotation platform includes a first guide rail device, the second air flotation platform includes a second guide rail device, in the first air flotation platform, the air flotation component is slidably connected to the first guide rail device, in the second air flotation platform, the air flotation component is slidably connected to the second guide rail device, and the air flotation component includes an upper slide The control board comprises a first guide rail device and a second guide rail device, each of which comprises side rails on both sides and a mounting groove between the two side rails, the motor assembly is mounted in the mounting groove, the side rail comprises a top surface, a side surface and a bottom surface connected in sequence, the side slides are respectively mounted on the sides of the side rails on both sides, the upper slide is located on the top surface of the side rails and is fixedly connected to the side slides on both sides, the lower slide is connected to an end of the side slide away from the upper slide, and an air outlet is provided on a side of the upper slide facing the side rail, a side of the side slide facing the side rail and a side of the lower slide facing the side rail, the air outlet is configured to spray air toward the side rail so that the air flotation assembly does not contact the side rail.

[0007] As a further improvement of the present invention, the air flotation drive device also includes an air supply device, which is installed on the side of the side slide facing away from the side rail. The air supply device includes an air inlet and three air supply ports, and the air supply ports are respectively connected to the upper slide, the side slide and the lower slide through pipelines.

[0008] As a further improvement of the present invention, the second guide rail device also includes a middle rail, which is located between the side rails on both sides. The air flotation assembly in the second air flotation platform also includes a middle slide, which is fixedly connected to the upper slide on one side of the second guide rail device, the middle slide is connected to the upper slide, and the middle rail extends into the middle slide.

[0009] As a further improvement of the present invention, the middle slide includes a first part parallel to the side slide and a second part parallel to the upper slide, the second part is located at the bottom of the middle rail, and an air outlet is provided on the side of the second part facing the middle rail.

[0010] As a further improvement of the present invention, the motor assembly includes a stator device and a mover device, the stator device is fixedly installed in the installation slot, the stator device is located between the side rails, an insertion slot is provided in the stator device, the mover device includes a fixed portion and an insertion portion, the insertion portion is perpendicular to the fixed portion, and the insertion portion is inserted into the insertion slot. As a further improvement of the present invention, in the first air floating platform, the insertion slot is parallel to the upper slide, and in the second air floating platform, the insertion slot is parallel to the side slide.

[0011] As a further improvement of the present invention, the second air floating platform includes two motor assemblies, and the second guide rail device includes at least two mounting grooves, and the mounting grooves are arranged in a one-to-one correspondence with the motor assemblies.

[0012] As a further improvement of the present invention, the first air-floating platform and the second air-floating platform also include a bearing part, the bearing part is connected to the side slide on one side, the bearing part extends from the side slide in a direction away from the upper slide, the bearing part is configured as a hanging cable connector, and the air-floating drive device also includes a drag chain, one end of the drag chain is connected to the bearing part.

[0013] As a further improvement of the present invention, an open harness hole is provided on the side of the bearing portion facing the drag chain, one end of the cable is connected to the mover device, and the other end passes through the harness hole and enters the drag chain.

[0014] As a further improvement of the present invention, the air floating drive device also includes a detection component, the detection component includes a scale and a reading device, the reading device is fixedly connected to the upper slide, the scale is installed on the side of the side rail facing the reading device, and the reading device is configured to read the value on the scale.

[0015] The beneficial effect of the present invention is that in the air-floating drive device, the first air-floating platform and the second air-floating platform are stacked in the vertical direction, and the running directions are perpendicular to each other. This design makes the entire drive device more flexible in spatial layout, realizes movement in multiple directions, and can adapt to different working environments and needs. At the same time, the upper slide, the side slide and the lower slide are all provided with air outlet holes, which can adjust the gas pressure, so that when the air-floating drive device is running, the top surface, the side surface and the bottom surface of the side rail are not in contact with the air-floating component, which reduces mechanical friction and significantly reduces energy loss, thereby improving the overall work efficiency and the load capacity of the air-floating drive device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional structural diagram of an air floating drive device according to an embodiment of the present invention.

[0017] Figure 2yes Figure 1 A three-dimensional structural diagram of the air floating drive device from another angle is shown.

[0018] Figure 3 yes Figure 1 A cross-sectional view of the air-floating drive device shown.

[0019] Figure 4 yes Figure 1 A cross-sectional view of the air floating drive device from another angle is shown.

[0020] Figure 5 yes Figure 4 Enlarged view of the circled area.

[0021] Figure 6 yes Figure 1 The three-dimensional structural diagram of the air flotation component in the air flotation drive device shown.

[0022] Figure 7 yes Figure 1 The three-dimensional structural diagram of the mover device in the air floating drive device is shown.

[0023] Figure 8 yes Figure 1 A three-dimensional structural diagram of the first guide rail device in the air floating drive device is shown.

[0024] Fig. 9 yes Figure 1 A three-dimensional structural diagram of the second guide rail device in the air floating drive device is shown.

[0025] Description of reference numerals:

[0026] 100-air floating drive device;

[0027] 110-first air floating platform, 120-second air floating platform, 130-first guide rail device, 131-installation groove, 132-side rail, 1321-top surface, 1322-side surface, 1323-bottom surface, 133-middle rail, 134-air outlet, 135-second guide rail device, 140-air floating assembly, 141-upper slide, 142-side slide, 143-lower slide, 144-middle slide, 1441 -First part, 1442-second part, 150-motor assembly, 151-stator device, 1512-insertion slot, 152-mover device, 1521-fixing part, 1522-insertion part, 160-air delivery device, 161-air inlet, 162-air delivery port, 170-bearing part, 171-wiring harness hole, 180-drag chain, 190-detection assembly, 191-scale, 192-reading device. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0029] It should be noted here that in order to avoid obscuring the present invention due to unnecessary details, only structures and / or processing steps closely related to the scheme of the present invention are shown in the accompanying drawings, while other details that are not closely related to the present invention are omitted.

[0030] In addition, it should be noted that the terms "comprises", "includes" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or apparatus.

[0031] See also Figures 1 to 9 As shown, an air floating drive device 100 provided by the present invention includes a first air floating platform 110 and a second air floating platform 120. The first air floating platform 110 and the second air floating platform 120 are stacked in a vertical direction. The first air floating platform 110 is located above the second air floating platform 120. The running directions of the first air floating platform 110 and the second air floating platform 120 are perpendicular to each other. The first air floating platform 110 and the second air floating platform 120 both include an air floating assembly 140 and a motor assembly 150. The first air floating platform 110 includes a first guide rail device 130, and the second air floating platform 120 includes a second guide rail device 135. In the first air floating platform 110, the air floating assembly 140 is slidably connected to the first guide rail device 130. In the second air floating platform 120, the air floating assembly 140 is slidably connected to the second guide rail device 135. The air floating assembly 140 includes an upper slide 141, a side slide 142 and a lower slide 143, the first guide rail device 130 and the second guide rail device 135 both include side rails 132 located on both sides and a mounting groove 131 located between the two side rails 132, the motor assembly 150 is installed in the mounting groove 131, the side rail 132 includes a top surface 1321, a side surface 1322 and a bottom surface 1323 connected in sequence, the side slides 142 are respectively installed on the side surfaces 1322 of the side rails 132 on both sides, and the upper slide 141 is located on the top of the side rails 132 The surface 1321 is fixedly connected to the side slides 142 on both sides, the lower slide 143 is connected to one end of the side slide 142 away from the upper slide 141, and the side of the upper slide 141 facing the side rail 132, the side of the side slide 142 facing the side rail 132 and the side of the lower slide 143 facing the side rail 132 are all provided with air outlet holes 134, and the air outlet holes 134 are configured to spray air toward the side rail 132 so that the air flotation component 140 does not contact the side rail 132.

[0032] The air-floating drive device 100, the first air-floating platform 110 and the second air-floating platform 120 are stacked in the vertical direction, and the running directions are perpendicular to each other. This design makes the entire drive device more flexible in spatial layout, realizes movement in multiple directions, and can adapt to different working environments and needs. At the same time, the upper slide 141, the side slide 142 and the lower slide 143 are all provided with air outlet holes 134, and these air outlet holes 134 can adjust the gas pressure, so that when the air-floating drive device 100 is running, the top surface 1321, the side surface 1322 and the bottom surface 1323 of the side rail 132 are not in contact with the air-floating component 140, which reduces mechanical friction and significantly reduces energy loss, thereby improving the overall work efficiency and significantly improving the load capacity of the air-floating drive device 100.

[0033] In this embodiment, the air flotation drive device 100 further includes an air delivery device 160, which is installed on the side of the side slide 142 facing away from the side rail 132. The air delivery device 160 includes an air inlet 161 and three air delivery ports 162, which are respectively connected to the upper slide 141, the side slide 142 and the lower slide 143 through pipelines to realize air delivery to the upper slide 141, the side slide 142 and the lower slide 143. The three independent air delivery ports 162 are used to supply air to the upper slide 141, the side slide 142 and the lower slide 143, respectively, so that the gas can be simultaneously output from the three air delivery ports 162 of the upper slide 141, the side slide 142 and the lower slide 143, so that the air flotation assembly 140 as a whole and the track device can ensure that the gas is more evenly distributed on the slide. This even distribution helps to form more and finer bubbles, thereby improving the air flotation effect.

[0034] In some embodiments, the second guide rail device 135 also includes a middle rail 133, which is located between the side rails 132 on both sides. The air flotation assembly 140 in the second air flotation platform 120 also includes a middle slide 144, which is fixedly connected to the side of the upper slide 141 facing the second guide rail device 135. The middle rail 133 extends into the middle slide 144. The middle slide 144 includes a first part 1441 parallel to the side slide 142 and a second part 1442 parallel to the upper slide 141. The second part 1442 is located at the bottom of the middle rail 133, and an air outlet 134 is provided on the side of the second part 1442 facing the middle rail 133. A more stable supporting structure is formed by the provision of the middle rail 133 and the middle slide 144. The design of the middle slide 144, especially the air outlet 134 thereon, enables the flotation gas to be more evenly distributed on the second guide rail device 135.

[0035] In this embodiment, in the first air floating platform 110 and the second air floating platform 120, the upper slide 141 is provided with air outlet holes 134 at the positions corresponding to the side rails 132 on both sides, wherein in the second air floating platform 120, the upper slide 141 is also provided with air outlet holes 134 at the positions corresponding to the middle rail 133, so that when the first air floating platform 110 or the second air floating platform 120 is in operation, the upper slide 141 and the track assembly always maintain a stable gap.

[0036] In some embodiments, air inlets are provided in the upper slide 141, the side slide 142, the lower slide 143 and the middle slide 144. In the first air flotation platform 110, three air inlets are provided on one end of the upper slide 141 perpendicular to the running direction of the first air flotation platform 110. The three air inlets are respectively located at the side rails 132 and the middle rail 133 on both sides. In this way, the three air outlets 134 in the upper slide 141 can release sufficient airflow to keep the upper slide 141 stable and smooth when sliding.

[0037] In some embodiments, in the second air floating platform 120, the air delivery devices 160 on the side slides 142 on both sides are installed in reverse, wherein one air outlet of the air delivery device 160 on one side is connected to the three air inlets in the upper slide 141, and one air delivery port 162 of the air delivery device 160 on the other side is connected to the air inlet in the middle slide 144, so as to deliver air to the middle slide 144, so that sufficient air can flow out of the middle slide 144, so that the middle slide 144 always maintains a stable gap with the middle rail 133 when sliding.

[0038] Compared with the case where there are only two side rails 132, the presence of the middle slide 144 makes the air floating force more balanced in the horizontal direction, reduces the local stress concentration caused by uneven air floating distribution, and thus improves the overall stability and durability of the air floating drive device 100 platform. By enhancing the load capacity of the air floating assembly 140 and optimizing the air floating distribution, the deformation and vibration of the upper slide 141 when carrying heavy objects are effectively reduced, and the motion accuracy and positioning stability of the air floating drive device 100 are improved, which is particularly important for application scenarios that require a high-stability platform (such as semiconductor manufacturing, optical instrument calibration, etc.).

[0039] In this embodiment, the motor assembly 150 includes a stator device 151 and a mover device 152. The stator device 151 is fixedly installed in the mounting groove 131. The stator device 151 is located between the side rails 132. An insertion groove 1512 is provided in the stator device 151. The mover device 152 includes a fixing portion 1521 and an insertion portion 1522. The insertion portion 1522 is perpendicular to the fixing portion 1521. The insertion portion 1522 is inserted into the insertion groove 1512. The stator device 151 of the motor assembly 150 is directly installed in the mounting groove 131, which further saves space and optimizes the overall spatial layout.

[0040] In this embodiment, in the first air floating platform 110, the insertion groove 1512 is parallel to the upper slide 141, and the space of the first air floating platform 110 located at the upper part in the vertical direction is relatively compact. By placing the stator device 151 horizontally, the height of the first air floating platform 110 in the vertical direction can be effectively compressed, making the first air floating platform 110 more compact and meeting the requirements of being used in a smaller space.

[0041] In this embodiment, the second air floating platform 120 includes two motor assemblies 150, and the second guide rail device 135 includes at least two mounting grooves 131. The mounting grooves 131 are arranged in a one-to-one correspondence with the motor assemblies 150. The insertion groove 1512 in the second air floating platform 120 is parallel to the side slide 142. The second air floating platform 120 is located below the first air floating platform 110, and the driven load is larger. Therefore, two mounting grooves 131 are arranged in the second guide rail device 135, and the two mounting grooves 131 are respectively located on both sides of the middle rail 133. In the second air floating platform 120, the stator device 151 is placed vertically, that is, the insertion groove 1512 is parallel to the side slide 142. This not only meets the requirement of large thrust of the second air floating platform 120, but also better controls the space of the second air floating platform 120 in the horizontal direction, thereby making the overall volume of the air floating drive device 100 relatively small.

[0042] In this embodiment, the first air floating platform 110 and the second air floating platform 120 also include a bearing portion 170, which is connected to the side slide 142 on one side, and extends from the side slide 142 in a direction away from the upper slide 141. The bearing portion 170 is configured to hang cables, and an open harness hole 171 is provided on the side of the bearing portion 170 facing the drag chain 180. One end of the cable is connected to the mover device 152, and the other end passes through the harness hole 171 and enters the drag chain 180. This can prevent the cable from being entangled during the operation of the mover device 152. At the same time, the open harness hole 171 also makes the installation and removal of the cable more convenient and quick.

[0043] In this embodiment, the air-floating drive device 100 further includes a detection component 190, which includes a scale 191 and a reading device 192. The reading device 192 is fixedly connected to the upper slide 141. The scale 191 is installed on the side of the side rail 132 facing the reading device 192. The reading device 192 is configured to read the value on the scale 191. By reading the value on the scale 191 by the reading device 192, high-precision displacement positioning can be achieved. This arrangement constitutes a fully closed-loop control system, which can directly measure the actual displacement of the upper slide 141 and feed it back to the control system, thereby eliminating all errors of the mechanical transmission mechanism and improving the positioning accuracy.

[0044] In summary, in the air-floating drive device 100 of the present invention, the first air-floating platform 110 and the second air-floating platform 120 are arranged in a vertically stacked manner, and the running directions are perpendicular to each other. This design makes the entire air-floating drive device 100 more flexible in spatial layout, realizes movement in multiple directions, and can adapt to different working environments and needs. At the same time, the upper slide 141, the side slide 142 and the lower slide 143 are all provided with air outlet holes 134, and these air outlet holes 134 can adjust the gas pressure, so that when the air-floating drive device 100 is running, the top surface 1321, the side surface 1322 and the bottom surface 1323 of the side rail 132 are not in contact with the air-floating assembly 140, which reduces mechanical friction and significantly reduces energy loss, thereby improving the overall work efficiency and the load capacity of the air-floating drive device 100.

[0045] The above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solution of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present invention.

Claims

1. An air floating drive device, characterized in that: It includes a first air-floating platform and a second air-floating platform, the first air-floating platform and the second air-floating platform are stacked in a vertical direction, the first air-floating platform is located above the second air-floating platform, the running directions of the first air-floating platform and the second air-floating platform are perpendicular to each other, the first air-floating platform and the second air-floating platform both include an air-floating component and a motor component, the first air-floating platform includes a first guide rail device, the second air-floating platform includes a second guide rail device, in the first air-floating platform, the air-floating component is slidably connected to the first guide rail device, in the second air-floating platform, the air-floating component is slidably connected to the second guide rail device, the air-floating component includes an upper slide, a side slide and a lower slide, the The first guide rail device and the second guide rail device both include side rails located on both sides and an installation groove located between the two side rails, the motor assembly is installed in the installation groove, the side rail includes a top surface, a side surface and a bottom surface connected in sequence, the side slides are respectively installed on the sides of the side rails on both sides, the upper slide is located on the top surface of the side rails and is fixedly connected to the side slides on both sides, the lower slide is connected to one end of the side slide away from the upper slide, one side of the upper slide facing the side rail, one side of the side slide facing the side rail and one side of the lower slide facing the side rail are all provided with air outlet holes, and the air outlet holes are configured to spray air flow toward the side rails so that the air flotation assembly does not contact the side rails.

2. The air floating drive device according to claim 1, characterized in that: The air flotation drive device also includes an air supply device, which is installed on the side of the side slide plate facing away from the side rail. The air supply device includes an air inlet and three air supply ports, which are respectively connected to the upper slide plate, the side slide plate and the lower slide plate through pipelines.

3. The air floating drive device according to claim 1, characterized in that: The second guide rail device also includes a middle rail, which is located between the side rails on both sides. The air flotation component in the second air flotation platform also includes a middle slide, which is fixedly connected to the side of the upper slide facing the second guide rail device, the middle slide is connected to the upper slide, and the middle rail extends into the middle slide.

4. The air floating drive device according to claim 3, characterized in that: The middle slide plate includes a first portion parallel to the side slide plates and a second portion parallel to the upper slide plate, the second portion is located at the bottom of the middle rail, and an air outlet is provided on one side of the second portion facing the middle rail.

5. The air floating drive device according to claim 1, characterized in that: The motor assembly includes a stator device and a mover device, wherein the stator device is fixedly installed in the installation groove, the stator device is located between the side rails, an insertion groove is provided in the stator device, and the mover device includes a fixing portion and an insertion portion, the insertion portion is perpendicular to the fixing portion, and the insertion portion is inserted into the insertion groove.

6. The air floating drive device according to claim 5, characterized in that: In the first air floating platform, the insertion groove is parallel to the upper slide plate, and in the second air floating platform, the insertion groove is parallel to the side slide plate.

7. The air floating drive device according to claim 1, characterized in that: The second air floating platform includes two motor assemblies, and the second guide rail device includes at least two mounting grooves, and the mounting grooves are arranged in a one-to-one correspondence with the motor assemblies.

8. The air floating drive device according to claim 5, characterized in that: The first air-floating platform and the second air-floating platform both include a bearing portion, the bearing portion is connected to the side slide on one side, the bearing portion extends from the side slide in a direction away from the upper slide, the bearing portion is configured as a hanging cable, and the air-floating drive device also includes a drag chain, one end of which is connected to the bearing portion.

9. The air floating drive device according to claim 8, characterized in that: An open harness hole is provided on one side of the bearing portion facing the drag chain. One end of the cable is connected to the mover device, and the other end passes through the harness hole and enters the drag chain.

10. The air floating drive device according to claim 1, characterized in that: The air-floating drive device also includes a detection component, which includes a scale and a reading device. The reading device is fixedly connected to the upper slide, the scale is installed on the side of the side rail facing the reading device, and the reading device is configured to read the value on the scale.

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