Electromagnetic vacuum differential pressure isolating valve and system

Abstract

The invention discloses an electromagnetic vacuum differential pressure isolating valve and system, the electromagnetic vacuum differential pressure isolating valve mainly comprises an electromagnetic valve, a valve core and a valve body, the valve body comprises a valve main cavity, a high vacuum side interface flange and a low vacuum side interface flange, the valve core is arranged in the valve main cavity, the valve core comprises a cylinder body, the cylinder body and the valve body are in sliding connection through a guide assembly, and the guide assembly is arranged in the valve main cavity. The inside and the outside of the cylinder body are communicated through the side face communication hole, the high vacuum side interface flange is communicated with upstream high vacuum, the low vacuum side interface flange is communicated with the mechanical pump, and the electromagnetic valve is used for closing or conducting outside air. The vacuum differential pressure isolating valve is high in closing response speed and delayed in opening, the upstream high vacuum side is effectively protected against the influence of backflow of a mechanical pump while vacuum isolation is achieved, and the vacuum differential pressure isolating valve can be widely applied to the technical field of vacuum valves.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum valves, and in particular to an electromagnetic vacuum pressure difference isolation valve and a system thereof. Background Art

[0002] In ultra-high vacuum units, electromagnetic vacuum isolation valves are usually configured to control the flow of gas between the mechanical pump and the molecular pump to achieve isolation and protection of the upstream high vacuum.

[0003] At present, the common electromagnetic vacuum isolation valves, when used in conjunction with mechanical pumps, all act separately, that is, when closing, first close the electromagnetic vacuum isolation valve and then close the mechanical pump; when opening, first open the mechanical pump, and then open the electromagnetic vacuum isolation valve after the mechanical pump is fully rotated. The operation is complicated, the electromagnetic isolation valve has a long response time, and the isolation efficiency is low. When an unexpected power outage occurs, the speed of the mechanical pump decays rapidly, the pumping speed decreases, and the electromagnetic isolation valve relies on the spring's own restoring force to achieve gas circuit closure, which usually takes hundreds of milliseconds to seconds. During this period of time, the gas will flow back from the mechanical pump to the upstream high vacuum side due to the pressure difference of the system, affecting the vacuum degree and equipment safety of the upstream high vacuum side. On the contrary, when the mechanical pump and the electromagnetic isolation valve are powered on at the same time, the electromagnetic isolation valve opens instantly when powered on due to the lack of delayed opening function, and it takes a certain amount of time for the mechanical pump to achieve full rotation. At this time, the pressure at the inlet of the mechanical pump is high, which can easily cause system reflux, which will have a certain impact on the vacuum degree of the upstream high vacuum side. Summary of the invention

[0004] In view of this, the purpose of an embodiment of the present invention is to provide an electromagnetic vacuum pressure differential isolation valve and system, which has high vacuum isolation protection efficiency, is safe and reliable, and can effectively prevent the vacuum environment and equipment on the upstream high vacuum side from being affected by impact when the mechanical pump and the isolation valve are powered on and off at the same time.

[0005] In the first aspect, an embodiment of the present invention provides an electromagnetic vacuum pressure differential isolating valve, the electromagnetic vacuum pressure differential isolating valve mainly comprising: a solenoid valve, a valve core and a valve body, the valve body comprising a valve main cavity, a high vacuum side interface flange and a low vacuum side interface flange, the valve core is arranged in the valve main cavity, the valve core comprises a cylinder body, the valve core and the valve body are slidably connected via a guide assembly, the cylinder body is connected to the inside and outside of the cylinder body via a connecting hole, the guide assembly is used for axial positioning of the valve core, the pressure difference between the cylinder body and the upstream high vacuum pushes the valve core toward the high vacuum side interface flange to close the valve, the recovery assembly between the valve core and the high vacuum side interface flange is used to push the valve core away from the high vacuum side interface flange along the guide assembly to open the valve when the pressure difference between the cylinder body and the upstream high vacuum is less than the restoring force, the high vacuum side interface flange is connected to the upstream high vacuum, and the low vacuum side interface flange is connected to the mechanical pump;

[0006] The solenoid valve is communicated with the valve body and the valve core, and is used to close or conduct the outside air.

[0007] In some optional embodiments, the guide assembly includes a guide rod and a sleeve, and the guide rod is slidably connected to the sleeve.

[0008] In some optional embodiments, the outer side of the sleeve is fixedly connected to the second end cover of the valve core, the inner side of the sleeve is slidably connected to the guide rod, the guide rod is used for axial positioning of the valve core, and the recovery assembly includes a spring.

[0009] In some optional embodiments, a first sealing ring is provided on the valve core, and the first sealing ring is matched with the sealing surface at the other end of the high vacuum side interface flange.

[0010] In some optional embodiments, the valve body further includes a first end cover, the first end cover is provided with an air inlet hole, the first end of the guide rod is fixedly connected to the first end cover, and the second end of the guide rod is slidably connected to the sleeve.

[0011] In some optional embodiments, the communicating hole is provided on the valve core, and the communicating hole is used for conducting the inside and outside of the cylinder body itself.

[0012] In some optional embodiments, the solenoid valve is connected to the first end cover via an externally threaded right-angle joint. The solenoid valve is a normally open two-position two-way valve, which is used to feed the atmosphere into the cylinder body through the air inlet holes provided in the first end cover and the second end cover after power is off, and to isolate the atmosphere from the cylinder body after power is on.

[0013] In some optional embodiments, the valve core further includes a second end cover, and a diaphragm is disposed between the second end cover and the cylinder body.

[0014] In some optional embodiments, the high vacuum side interface flange and the valve main chamber are connected via a second sealing ring, and the low vacuum side interface flange and the valve main chamber are connected via a third sealing ring.

[0015] In the second aspect, an embodiment of the present invention provides an electromagnetic vacuum pressure differential isolation system, comprising the above-mentioned electromagnetic vacuum pressure differential isolation valve, a molecular pump and a mechanical pump, wherein the exhaust port of the molecular pump is connected to the high vacuum side interface flange, and the air inlet of the mechanical pump is connected to the low vacuum side interface flange.

[0016] The embodiment of the present invention includes the following beneficial effects: The embodiment of the present invention provides an electromagnetic vacuum pressure difference isolation valve, which mainly includes: an electromagnetic valve, a valve core and a valve body, wherein the valve body includes a valve main cavity, a first end cover, a high vacuum side interface flange and a low vacuum side interface flange, wherein the valve core is arranged in the valve main cavity, the valve core includes a cylinder body and a second end cover, the cylinder body and the valve body are connected by a guide assembly for sliding, the cylinder body communicates with its inner and outer sides through a connecting hole, and the guide assembly is used for axial positioning of the valve core. The high vacuum side interface flange is connected to the upstream high vacuum side, and the low vacuum side interface flange is connected to the air inlet of the mechanical pump; the electromagnetic valve is connected to the cylinder body for closing or conducting the outside air. The pressure difference isolation valve involved in this patent can not only protect the upstream high vacuum from being disturbed when the mechanical pump and the electromagnetic valve are started and stopped at the same time, but also protect the system vacuum degree of the upstream high vacuum side from fluctuations in the event of an accidental power failure. At the same time, the isolation valve and the mechanical pump can be independently controlled as needed like the use of a traditional vacuum isolation valve, and the performance is not affected. When the pressure differential isolation valve and the mechanical pump are powered off at the same time, the atmosphere is conducted through the solenoid valve, so that air at one atmospheric pressure quickly rushes into the cylinder body. Under the pressure difference of one atmosphere between the cylinder body and the upstream high vacuum side, the valve core can be pushed along the guide assembly to the inner sealing surface of the high vacuum side interface flange part within tens of milliseconds to achieve sealed isolation, thereby protecting the vacuum degree of the upstream high vacuum side from disturbance, and filling the mechanical pump cavity with atmosphere from the connecting hole on the side of the cylinder body, quickly breaking the air of the mechanical pump, and further effectively avoiding the backflow of the mechanical pump.

[0017] On the contrary, when the mechanical pump and the electromagnetic isolation valve are energized at the same time, the electromagnetic valve disconnects the external air. Due to its special pressure difference structural design, the air in the isolation valve cylinder needs to be pumped away by the mechanical pump through the cylinder's own connecting hole. Only when the pressure difference between the valve core cylinder and the outside is less than the restoring force of the built-in spring of the valve can the spring push the valve core along the guide assembly away from the inner sealing surface of the high vacuum side interface flange part valve body to achieve the connection between the upstream high vacuum and the downstream mechanical pump. Therefore, there is a delay in the opening process of the pressure difference isolation valve, which takes more than ten seconds. This is the special delayed opening process of this design. During this delay period, the mechanical pump can achieve full rotation and obtain a higher front-stage vacuum degree, avoiding the mechanical pump backflow caused by the front-stage pressure not yet reaching a pressure lower than the molecular pump outlet pressure, thereby avoiding the front-stage mechanical pump from affecting or damaging the vacuum degree of the upstream high vacuum side when the isolation valve and the mechanical pump are started at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of an electromagnetic vacuum pressure difference isolation valve provided by an embodiment of the present invention;

[0019] Figure 2 It is a schematic diagram of the structure of the guide assembly provided in an embodiment of the present invention.

[0020] Figure numerals: valve body main cavity 1, low vacuum side interface flange 2, connecting hole 3, first sealing ring 4, spring 5, third sealing ring 6, second sealing ring 7, high vacuum side interface flange 8, valve core 9, cylinder body 10, second end cover 11, sleeve 12, solenoid valve 13, external threaded right angle joint 14, guide rod 15, first end cover 16, diaphragm 17, air inlet hole 18. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] In the embodiments of the present invention, words such as "exemplary" or "for example" are used to indicate examples, illustrations or explanations. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present invention should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0023] In the following, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present invention, unless otherwise specified, "plurality" means two or more.

[0024] Reference Figure 1, an embodiment of the present invention provides an electromagnetic vacuum pressure differential isolation valve, the electromagnetic vacuum pressure differential isolation valve mainly includes: a solenoid valve 13, a valve core 9 and a valve body, the valve body includes a valve main chamber 1, a high vacuum side interface flange 8 and a low vacuum side interface flange 2, the valve core 9 is arranged in the valve main chamber 1, the valve core 9 includes a cylinder body 10, the cylinder body 10 and the valve body are slidably connected through a guide component, the cylinder body 10 is connected to the low vacuum side interface flange 2 through a connecting hole 3, the guide component is used for axial positioning of the valve core 9, the cylinder body 10 is connected to the upstream high vacuum Under the action of the pressure difference on the side, the valve core 9 is pushed toward the side of the high vacuum side interface flange 8 to realize vacuum isolation. The recovery component between the valve core 9 and the high vacuum side interface flange 8 is used to push the valve core 9 along the guide component away from the side of the high vacuum side interface flange 8 to open the valve when the pressure difference between the cylinder body 10 and the upstream high vacuum is less than the restoring force. The high vacuum side interface flange 8 is connected with the upstream high vacuum, and the low vacuum side interface flange 2 is connected with the mechanical pump; the solenoid valve 13 is connected with the first end cover 16 of the valve body, and is used to close or conduct the outside air.

[0025] Specifically, the electromagnetic vacuum pressure difference isolation valve is mainly composed of a solenoid valve 13, a valve core 9 and a valve body. The valve body includes a valve main cavity 1, a first end cover 16, a high vacuum side interface flange 8 and a low vacuum side interface flange 2. The valve core 9 is arranged in the valve main cavity, and the valve core 9 can move in the valve main cavity 1; the valve core 9 includes a cylinder body 10 and a second end cover 11, and the cylinder body 10 and the valve body are slidably connected through a guide assembly. The low vacuum side interface flange 2 is connected to the high vacuum side interface flange 8 through the main cavity 1 of the valve body, wherein the connecting hole 3 realizes the connection between the inside and outside of the cylinder body 10 in the valve core 9. The guide assembly is arranged between the first end cover 16 and the valve core 9, and has a guiding effect on the reciprocating motion of the valve core 9 and ensures reasonable concentricity (that is, the cylinder body is axially positioned by the guide assembly to ensure that the cylinder body reciprocates along the guide assembly). Specifically, when the power is off, the air passage between the solenoid valve 13 and the outside is opened, and the atmosphere quickly enters the cylinder body 10 after passing through the solenoid valve 13. Under a pressure difference of one atmosphere, the valve core 9 is quickly pushed to the right to the closed position through the guide component within tens of milliseconds (that is, the valve core 9 is pushed to the sealing surface of the high vacuum side interface flange 8 facing the inner side of the valve body, so as to achieve the vacuum seal and isolation between the high vacuum side interface flange 8 and the low vacuum side interface flange 2), so as to achieve the rapid closure of the valve, and at the same time, the mechanical pump at the low vacuum side interface flange 2 is synchronously broken through the connecting hole 3 on the cylinder body to prevent backflow. This structural design can effectively achieve the rapid closure of the electromagnetic vacuum isolation valve within tens of milliseconds, ensure that the vacuum degree of the upstream high vacuum side is not disturbed and affected when the electromagnetic vacuum isolation valve and the mechanical pump are simultaneously powered off, and can effectively protect the vacuum equipment on the upstream high vacuum side, such as molecular pumps. When power is turned on, the solenoid valve 13 closes the connection with the atmosphere, and the cylinder body 10 is emptied of air inside the cylinder body 10 through the connecting hole 3 on the valve core 9 by the mechanical pump. As the pressure difference on both sides of the valve core 9 decreases, the valve core 9 moves to the left through the shaft sleeve 12 and the guide rod 15 under the action of the restoring force of the spring 5 (that is, the valve core slowly moves away from the high vacuum side interface flange 8), and the valve is slowly opened, thereby connecting the high vacuum side with the front-stage mechanical pump. The valve opening action time is greater than or equal to the time for the cylinder body 10 to be emptied by the mechanical pump, and it takes more than ten seconds to complete, which effectively guarantees the time required for the mechanical pump to fully rotate, thereby realizing the delayed opening function, and effectively ensuring that the vacuum degree on the upstream high vacuum side is not affected during the opening process of the valve and the mechanical pump.

[0026] In some optional embodiments, the valve body further includes a first end cover 16 , on which an air inlet 18 is provided, the first end of the guide rod 15 is fixedly connected to the first end cover 16 , and the second end of the guide rod 15 is slidably connected to the sleeve 12 .

[0027] In some optional embodiments, the guide assembly includes a guide rod 15 and a sleeve 12 , and the guide rod 15 is slidably connected to the sleeve 12 .

[0028] In some optional embodiments, the outer side of the sleeve 12 is fixedly connected to the second end cover 11 , and the inner side of the sleeve 12 is slidably connected to the guide rod 15 , the guide rod 15 is used for axial positioning of the valve core 9 , and the recovery assembly includes a spring 5 .

[0029] In some optional embodiments, a second end cover 11 is disposed on the valve core 9 , and a diaphragm 17 is disposed between the first end cover 16 and the second end cover 11 .

[0030] Specifically, refer to Figure 1-2 , by arranging the cylinder 10 in the valve core 9, and transmitting the atmosphere to the cylinder 10 through the air inlet 18, so that the cylinder 10 is quickly rushed into the air of one atmosphere pressure when the power is off, and the valve core 9 is quickly closed under the action of the pressure difference between the inside and outside of the cylinder 10. The shaft sleeve 12 is inserted into the second end cover 11, and the valve core 9 is axially positioned by the guide rod 15. The valve core 9 is quickly pushed to the side of the high vacuum side interface flange 8 by the pressure difference between the cylinder 10 and the upstream high vacuum side, so as to achieve the rapid closure of the valve, thereby ensuring that the vacuum degree of the high vacuum side connected to the high vacuum side interface flange 8 is not affected. The shaft sleeve 12 is made of copper, and the diaphragm 17 is made of rubber diaphragm. The specific materials are not limited here. The guide rod 15 and the sleeve 12 move relative to each other, so that the valve core 9 can reciprocate along the guide rod 15. The processing and assembly accuracy of the guide rod 15 and the sleeve 12 ensures the coaxiality of the valve core 9 and the guide rod 15, so that the valve core 9 can be closed at the fastest speed, reducing the friction force when the valve core 9 reciprocates, and avoiding vibration. The first end of the guide rod 15 is fixedly connected to the first end cover 16 to ensure that the guide rod 15 is fixed, and the second end of the guide rod 15 is slidably connected to the sleeve 12, so that the valve core 9 can reciprocate in a fixed axial direction; the sleeve 12 is set in the groove penetrated by the second end cover 11, that is, the second end cover 11 is recessed into the cylinder body 10, and the groove of the second end cover 11 is slidably connected to the guide rod 15 through the sleeve 12. The outer edge of the diaphragm 17 is used for vacuum sealing between the first end cover 16 and the main cavity 1 of the valve body. The design of the diaphragm 17 is conducive to the long-term reliable operation of the valve core 9, ensuring that the sealing action of the valve core 9 is stable and easy to maintain.

[0031] In some optional embodiments, a first sealing ring 4 is provided on the valve core 9, and the first sealing ring 4 is matched with the sealing surface of the high vacuum side interface flange 8 facing the inner side of the valve body.

[0032] Specifically, refer to Figure 1 When the power is off, the valve core 9 is tightly connected to the sealing surface of the high vacuum side interface flange 8 facing the inner side of the valve body through the first sealing ring 4, ensuring the sealing performance so that the vacuum degree of the high vacuum side connected to the interface flange 8 is not affected.

[0033] In some optional embodiments, referring to Figure 1 The solenoid valve 13 is connected to the first end cover 16 through an external threaded right-angle joint 14. The solenoid valve 13 is used to connect the atmosphere to the cylinder body 10 through the air inlet holes on the first end cover 16 and the second end cover 18 after power is turned off, and to isolate the atmosphere from the cylinder body 10 after power is turned on.

[0034] In some optional embodiments, the communicating hole 3 is provided on the valve core 9 , and the communicating hole 3 is used to communicate the inside and the outside of the cylinder body 10 .

[0035] In some optional embodiments, the guide rod 15 is used to axially position the valve core 9 through the shaft sleeve 12 , and a spring 5 is provided between the valve core 9 and the high vacuum side interface flange 8 .

[0036] Specifically, refer to Figure 1 When the mechanical pump and the electromagnetic pressure differential isolation valve are powered on at the same time, the electromagnetic valve 13 quickly closes the connection with the atmosphere under the action of the electrical signal, and the mechanical pump starts to work. The mechanical pump evacuates the air inside the cylinder 10 of the valve core 9 through the connecting hole 3 on the cylinder body, and its air pressure gradually drops from atmospheric pressure. At the initial start-up of the mechanical pump, the spring 5 is in a compressed state and the valve is still closed. As the speed of the mechanical pump on the low vacuum side increases and the pumping speed increases, the pressure difference on both sides of the valve core 9 (that is, the cylinder 10 and the upstream high vacuum) decreases. When the pressure difference force on both sides of the valve core 9 gradually becomes smaller than the restoring force of the spring 5 itself, the valve core 9 moves to the left through the shaft sleeve 12 and the guide rod 15 under the restoring force of the spring 5, and the valve is slowly opened, thereby connecting the high vacuum with the previous mechanical pump. Due to the special pressure difference delay structure design, it takes seconds for the valve core cylinder to be emptied until the valve is fully opened. This is a typical delay process. During this delay period, the mechanical pump has fully achieved full rotation, which can ensure that the pressure at the inlet of the mechanical pump is less than or equal to the pressure at the outlet of the upstream molecular pump, so that gas reflux will not occur, thereby ensuring that the vacuum degree on the upstream high vacuum side is not disturbed or affected when the mechanical pump and the electromagnetic pressure difference isolation valve are energized at the same time.

[0037] In some optional embodiments, the high vacuum side interface flange 8 and the valve main chamber 1 are connected via a second sealing ring 7 , and the low vacuum side interface flange 2 and the valve main chamber 1 are connected via a third sealing ring 6 .

[0038] Specifically, refer to Figure 1 The high vacuum side interface flange 8 and the main chamber 1 are connected through the second sealing ring 7, which ensures the sealing of the connection between the high vacuum side interface flange 2 and the valve body main chamber 1. The low vacuum side interface flange 2 and the main chamber 1 are connected through the third sealing ring 6, which also ensures the sealing of the connection between the low vacuum side interface flange 2 and the main chamber 1.

[0039] In some optional embodiments, there is a step adjacent to the second end cover 11 and the cylinder body, and a diaphragm 17 made of rubber is placed in the step. The outer edge of the diaphragm 17 is connected to the first end cover 16, and the inner edge of the diaphragm 17 is connected to the valve core 9. The diaphragm 17 has a certain elasticity, and the two end parts play a sealing role. At the same time, it also ensures that the valve core 9 reciprocates along the guide rod 15 to meet the function of opening and closing the valve.

[0040] The embodiment of the present invention includes the following beneficial effects: The embodiment of the present invention provides an electromagnetic vacuum isolating valve, which mainly includes: an electromagnetic valve 13, a valve core 9 and a valve body, wherein the valve body includes a valve main cavity 1, a first end cover 16, a high vacuum side interface flange 8 and a low vacuum side interface flange 2, wherein the valve core 9 is arranged in the valve main cavity, wherein the valve core 9 includes a cylinder body 10 and a second end cover 11, wherein the valve core 9 is slidably connected to the valve body through a guide assembly, wherein the cylinder body 10 is connected to the inside and outside of the cylinder body 10 through a connecting hole 3, wherein the guide assembly is used for the axial positioning of the valve core 9 and the reciprocating motion of the valve core 9 when the valve is opened and closed. The pressure differential isolating valve involved in this patent can not only protect the upstream high vacuum from being disturbed when the mechanical pump and the pressure differential isolating valve are started and stopped at the same time, but also can protect the upstream high vacuum from being disturbed and affected due to its excellent closing response time and special mechanical pump emptying performance in the extreme case of accidental power failure. At the same time, the isolating valve and the mechanical pump can be independently controlled as needed, and the performance is not affected. When the pressure differential isolation valve and the mechanical pump are powered off at the same time, the atmosphere is conducted through the solenoid valve 13, so that the atmosphere can quickly enter the cylinder 10, and the pressure difference between the cylinder 10 and the upstream high vacuum side quickly increases to one atmosphere, thereby quickly pushing the valve core 9 to move along the guide assembly to the side of the high vacuum side interface flange 8 to achieve the sealing isolation of the valve. This action process can complete the response within tens of milliseconds in the early stage when the mechanical pump slows down and stops due to power failure and the pumping speed is significantly attenuated, so as to achieve the purpose of quickly isolating the upstream and downstream vacuum passages and protecting the vacuum degree of the upstream high vacuum side from being affected. In addition, the special pressure differential structure design can fill the atmosphere into the mechanical pump cavity from the vent hole 3, quickly break the mechanical pump, and effectively avoid the backflow of the mechanical pump.

[0041] On the contrary, when the mechanical pump and the electromagnetic vacuum pressure differential isolation valve are energized at the same time, since the electromagnetic pressure differential isolation valve has a delayed opening function in its structural design, there can be sufficient delay time to ensure that the valve is fully opened only after the front-stage mechanical pump has achieved full rotation, thereby achieving connectivity with the upstream high vacuum side. This design can effectively avoid system backflow caused by excessive inlet pressure due to the mechanical pump not having achieved full rotation, thereby avoiding destructive effects on the vacuum degree on the upstream high vacuum side.

[0042] In the second aspect, an embodiment of the present invention provides an electromagnetic vacuum pressure difference isolation system, including the above-mentioned electromagnetic vacuum isolation valve, a molecular pump and a mechanical pump, wherein the molecular pump is connected to the high vacuum side interface flange 8, and the mechanical pump is connected to the low vacuum side interface flange 2.

[0043] It can be seen that the contents of the above-mentioned electromagnetic vacuum pressure differential isolation valve are all applicable to the embodiments of this system. The functions specifically implemented by the embodiments of this system are the same as those of the above-mentioned electromagnetic vacuum pressure differential isolation valve embodiments, and the beneficial effects achieved are also the same as those achieved by the above-mentioned electromagnetic vacuum isolation valve embodiments.

[0044] In the description of this specification, the description with reference to the term "in a specific embodiment" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0045] The above is a specific description of the preferred implementation of the present invention, but the invention is not limited to the embodiments. Those skilled in the art can make various equivalent modifications or substitutions without violating the spirit of the present invention. These equivalent modifications or substitutions are all included in the scope defined by the claims of this application.

Claims

1. An electromagnetic vacuum pressure differential isolation valve, characterized in that: The electromagnetic vacuum pressure difference isolation valve mainly includes: a solenoid valve, a valve core and a valve body, the valve body includes a valve main cavity, a high vacuum side interface flange and a low vacuum side interface flange, the valve core is arranged in the valve main cavity, the valve core includes a cylinder body, the cylinder body and the valve body are slidably connected through a guide assembly, the cylinder body itself is connected inside and outside through a side connecting hole, the guide assembly is used for axial positioning of the valve core, the pressure difference between the cylinder body and the upstream high vacuum side pushes the valve core to the high vacuum side interface flange to close the valve, the recovery assembly between the valve core and the high vacuum side interface flange is used to push the valve core away from the high vacuum side interface flange along the guide assembly to open the valve when the pressure difference between the cylinder body and the upstream high vacuum is less than the restoring force, the high vacuum side interface flange is connected with the upstream high vacuum, and the low vacuum side interface flange is connected with the mechanical pump; The solenoid valve is connected to the cylinder body and is used to close or conduct external air.

2. The electromagnetic vacuum pressure difference isolation valve according to claim 1, characterized in that: The guide assembly comprises a guide rod and a shaft sleeve, and the guide rod is slidably connected to the shaft sleeve.

3. The electromagnetic vacuum pressure difference isolation valve according to claim 2, characterized in that: The outer side of the sleeve is fixedly connected to the second end cover of the valve core, and the inner side of the sleeve is slidably connected to the guide rod. The guide rod is used for axial positioning of the valve core. The recovery component includes a spring.

4. The electromagnetic vacuum pressure difference isolation valve according to claim 3, characterized in that: The valve core is provided with a first sealing ring, and the first sealing ring is matched with the sealing surface of the other end of the high vacuum side interface flange.

5. The electromagnetic vacuum pressure difference isolation valve according to claim 2, characterized in that: The valve body further comprises a first end cover, an air inlet hole is arranged on the first end cover, the first end of the guide rod is fixedly connected to the first end cover, and the second end of the guide rod is slidably connected to the shaft sleeve.

6. The electromagnetic vacuum pressure difference isolation valve according to claim 5, characterized in that: The communicating hole is arranged on the valve core, and the communicating hole is used for conducting the inside and outside of the cylinder body.

7. The electromagnetic vacuum pressure difference isolation valve according to claim 5, characterized in that: The valve core also includes a second end cover, and a diaphragm is arranged between the second end cover and the cylinder body.

8. The electromagnetic vacuum pressure difference isolation valve according to claim 7, characterized in that: The solenoid valve is connected to the first end cover via an external threaded right-angle joint. The solenoid valve is a normally open two-position two-way valve, which is used to feed the atmosphere into the cylinder body through the air inlet holes provided in the first end cover and the second end cover after power is off, and to isolate the atmosphere from the cylinder body after power is on.

9. The electromagnetic vacuum pressure difference isolation valve according to claim 7, characterized in that: The high vacuum side interface flange and the valve main chamber are connected via a second sealing ring, and the low vacuum side interface flange and the valve main chamber are connected via a third sealing ring.

10. An electromagnetic vacuum pressure difference isolation system, characterized in that: It comprises the electromagnetic vacuum pressure difference isolation valve, molecular pump and mechanical pump as described in any one of claims 1 to 9, the exhaust port of the molecular pump is connected to the high vacuum side interface flange, and the air inlet of the mechanical pump is connected to the low vacuum side interface flange.

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