Lower transmission structure of silicon carbide furnace and silicon carbide furnace

Abstract

The invention relates to the field of crystal preparation, and discloses a silicon carbide furnace lower transmission structure and a silicon carbide furnace. The lower transmission structure of the silicon carbide furnace comprises a bracket, a linear lifting mechanism, a mounting frame, a magnetofluid sealing element, a switching water nozzle, a slip ring structure, a crucible shaft, a rotating mechanism and a pyrometer, the linear lifting mechanism is in transmission connection with the mounting frame; the crucible shaft is rotationally connected with the mounting frame through the magnetic fluid sealing piece; the crucible shaft is provided with a temperature measuring channel and a cooling channel which extend in the axial direction. The crucible shaft comprises a first end and a second end which are opposite to each other, and the temperature measuring channel penetrates through the crucible shaft from the first end to the second end; the crucible shaft penetrates through the adapter water nozzle and the slip ring structure; the rotating mechanism is fixedly arranged on the mounting frame and is in transmission connection with the crucible shaft; the pyrometer is fixedly arranged at the second end, and the collection direction of the pyrometer faces the temperature measurement channel; the slip ring structure is communicated with the cooling channel through the adapter water nozzle; the slip ring structure is further electrically connected with the pyrometer and used for providing power for the pyrometer.

Description

Technical Field

[0001] The present application relates to the technical field of crystal preparation, and in particular to a transmission structure under a silicon carbide furnace and a silicon carbide furnace. Background Art

[0002] The third generation semiconductor silicon carbide (SiC) has the characteristics of wide bandgap, high breakdown voltage, large saturation drift velocity, high thermal conductivity, etc., which is conducive to the application of high-voltage, high-temperature, and high-frequency power devices. In recent years, PVT-SiC technology has encountered serious obstacles in improving crystal quality and reducing costs. It has been reported that high-quality SiC single crystals can be produced at a considerable rate through solution growth. The growth of SiC bulk in the liquid phase requires a lower temperature than the sublimation or deposition process, and it has shown excellent performance in producing P-type SiC substrates.

[0003] According to the requirements of the liquid phase silicon carbide crystal growth process, the crucible for placing silicon materials needs to have the functions of lifting and rotating, and has high precision requirements. At the same time, the bottom of the crucible needs to be measured in real time, so a stable and reliable lower transmission structure is needed to meet the requirements. Summary of the invention

[0004] The present application discloses a silicon carbide furnace lower transmission structure and a silicon carbide furnace, which are used to realize the lifting and lowering, self-rotation and real-time temperature measurement of a crucible.

[0005] In order to achieve the above objectives, this application provides the following technical solutions:

[0006] In a first aspect, an embodiment of the present application provides a transmission structure under a silicon carbide furnace, comprising: a bracket, a linear lifting mechanism, a mounting frame, a magnetic fluid seal, a transfer nozzle, a slip ring structure, a crucible shaft, a rotating mechanism, and a pyrometer;

[0007] The linear lifting mechanism is in driving connection with the mounting frame, and is used to drive the mounting frame to rise and fall relative to the bracket;

[0008] The crucible shaft is rotatably connected to the mounting frame through the magnetic fluid seal; the crucible shaft has a temperature measurement channel and a cooling channel extending in the axial direction; the crucible shaft includes a first end and a second end opposite to each other, and the temperature measurement channel runs through the crucible shaft from the first end to the second end; the cooling channel is arranged around the outside of the temperature measurement channel; the crucible shaft runs through the adapter nozzle and the slip ring structure;

[0009] The rotating mechanism is fixedly mounted on the mounting frame and is in driving connection with the crucible shaft, and is used to drive the crucible shaft to rotate.

[0010] The pyrometer is fixedly mounted at the second end, and the collection direction of the pyrometer is toward the temperature measurement channel;

[0011] The slip ring structure is in communication with the cooling channel through the adapter nozzle, and is used to provide cooling fluid for the crucible shaft; the slip ring structure is also electrically connected to the pyrometer, and is used to provide power for the pyrometer.

[0012] The above-mentioned silicon carbide furnace transmission structure is used to drive the crucible to rise and fall and rotate. Specifically, the silicon carbide furnace transmission structure as a whole is fixed in position by a bracket, the mounting frame on the bracket is driven by a linear lifting mechanism and is lifted relative to the bracket, and the crucible shaft is installed on the mounting frame by magnetic fluid rotation, so that when the mounting frame is lifted, the crucible shaft will be driven to rise and fall synchronously. The crucible shaft is driven by a rotating mechanism to rotate relative to the bracket. The crucible shaft is a hollow structure, having a hollow temperature measurement channel and a cooling channel surrounding the temperature measurement channel. The cooling fluid such as water or air enters the cooling channel from the slip ring structure through the adapter water nozzle and then is discharged through the adapter water nozzle and the slip ring structure, so as to realize the circulation of the cooling fluid and avoid deformation or even damage of the crucible shaft due to excessive temperature. The silicon carbide furnace transmission structure provided in the embodiment of the present application fixes the pyrometer at the second end of the crucible shaft, the first end of the crucible shaft is used to fix the crucible, and the temperature measurement channel runs through the crucible shaft from the first end to the second end, so that the pyrometer measures the temperature at the bottom of the crucible through the temperature measurement channel. Since the pyrometer rotates synchronously with the crucible shaft, the pyrometer is powered by a slip ring structure to prevent the pyrometer cable from getting twisted due to rotation.

[0013] In some embodiments, the slip ring structure includes a housing, a first rotating portion, and a second rotating portion;

[0014] The housing is relatively fixed to the mounting frame, and along the direction from the first end to the second end, the housing includes a first shaft section and a second shaft section;

[0015] The cooling fluid inlet and the cooling fluid outlet are both located at the first shaft segment, the first rotating part is fixedly arranged outside the crucible shaft and is rotatably connected to the first shaft segment, the first rotating part is provided with a first channel communicating with the cooling fluid inlet and a second channel communicating with the cooling fluid outlet, and the first channel and the second channel are both communicated with the cooling channel through the adapter nozzle;

[0016] The second shaft segment is provided with a first conductive part, the second rotating part is provided outside the crucible shaft and is rotatably connected to the second shaft segment; the second rotating part is provided with a second conductive part that cooperates with the first conductive part; the second conductive part is electrically connected to the pyrometer through a cable.

[0017] In some embodiments, the pyrometer is mounted to the second end via a mounting plate and a fixing plate;

[0018] The mounting plate comprises a locking plate and an adapter plate, the locking plate and the second end are locked by a locking member, the fixing plate is adjustably mounted on the adapter plate; the pyrometer is fixed on the fixing plate;

[0019] The locking plate has a temperature measuring window.

[0020] In some embodiments, the temperature measurement window includes a transparent cover plate, and the locking plate is used to install the transparent cover plate on the second end to block the temperature measurement channel.

[0021] In some embodiments, the slip ring structure includes a gas inlet and a third channel connecting the gas inlet and the temperature measurement channel.

[0022] In some embodiments, a tapered groove is provided at the first end, and a radial dimension of the tapered groove gradually decreases from the first end to the second end.

[0023] In some embodiments, the linear lifting mechanism includes a lifting motor and a lead screw that is transmission-connected to the lifting motor. The lead screw is rotatably mounted on the bracket, and the mounting frame is threadably matched with the lead screw.

[0024] In some embodiments, the bracket is provided with a slide rail arranged parallel to the lead screw, and the mounting frame is slidably connected to the slide rail.

[0025] In some embodiments, the rotating mechanism includes a rotating motor and a pulley assembly drivingly connected to the rotating motor, and the rotating motor is mounted on the mounting frame;

[0026] The pulley assembly comprises a driving wheel, a driven wheel and a wedge-shaped belt, wherein the driving wheel and the driven wheel are connected through the wedge-shaped belt transmission; the driven wheel is sleeved on the crucible shaft and relatively fixed.

[0027] In a second aspect, an embodiment of the present application provides a silicon carbide furnace, comprising any one of the silicon carbide furnace lower transmission structures in the embodiment of the first aspect. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of a silicon carbide furnace in the related art;

[0029] Figure 2 A three-dimensional stereogram of a transmission structure under a silicon carbide furnace provided in an embodiment of the present application;

[0030] Figure 3 A schematic diagram of one side structure of a transmission structure under a silicon carbide furnace provided in an embodiment of the present application;

[0031] Figure 4A cross-sectional view of a transmission structure under a silicon carbide furnace provided in an embodiment of the present application;

[0032] Figure 5 for Figure 4 Enlarged view of the pyrometer;

[0033] Figure 6 It is a structural schematic diagram of a crucible shaft;

[0034] Icons: 01-sealed cavity; 02-seed crystal rod; 03-seed crystal carrier; 04-crucible; 05-crucible shaft; 1-bracket; 2-linear lifting mechanism; 3-mounting frame; 4-magnetic fluid seal; 5-adapter nozzle; 6-slip ring structure; 7-crucible shaft; 8-rotating mechanism; 9-pyrometer; 10-bellows; 11-bottom plate; 12-mounting seat adjustment plate; 21-lifting motor; 22-worm gear reducer; 23-screw; 24-slide rail; 61-housing; 62-first rotating part; 63-second rotating part; 64-stop plate; 61 1-cooling fluid inlet; 612-cooling fluid outlet; 613-gas inlet; 71-first end; 711-conical groove; 72-second end; 73-temperature measurement channel; 74-cooling channel; 741-liquid inlet section; 742-cooling section; 743-connecting section; 744-first liquid outlet section; 745-second liquid outlet section; 81-rotating motor; 82-planetary reducer; 83-driving wheel; 84-driven wheel; 85-wedge belt; 91-mounting plate; 911-locking plate; 912-adapter plate; 913-transparent cover plate; 92-fixed plate. DETAILED DESCRIPTION

[0035] First, let me introduce the application scenario of this application: In the related technology, such as Figure 1 As shown, the silicon carbide furnace includes a sealed cavity 01, a seed crystal rod 02, a seed crystal platform 03, a crucible 04 and a crucible shaft 05. The upper end of the seed crystal rod 02 passes through the top plate of the sealed cavity 01 and is located above the sealed cavity 01; the lower end of the seed crystal rod 02 is located inside the sealed cavity 01 and is connected to the seed crystal platform 03. The upper end of the crucible shaft 05 is located inside the sealed cavity 01 and is connected to the crucible 04; the lower end of the crucible shaft 05 passes through the bottom plate of the sealed cavity 01 and is located below the sealed cavity 01; the crucible shaft 05 needs to drive the crucible 04 to rise and fall and rotate around the axis direction of the crucible shaft 05 inside the sealed cavity 01, and at the same time, the bottom of the crucible 04 needs to be measured in real time, so a stable and reliable lower transmission structure is required to meet the needs.

[0036] Based on the above application scenarios, an embodiment of the present application provides a transmission structure under a silicon carbide furnace, which is used to achieve high-precision lifting and rotation of the crucible shaft while meeting temperature measurement requirements.

[0037] The following will combine the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application. Among them, in the description of the embodiments of the present application, unless otherwise specified, " / " means or, for example, A / B can mean A or B; "and / or" in the text is only a description of the association relationship of associated objects, indicating that there can be three relationships, for example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone. In addition, in the description of the embodiments of the present application, "multiple" refers to two or more than two.

[0038] In the following, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as suggesting or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features, and in the description of the embodiments of the present application, unless otherwise specified, "plurality" means two or more.

[0039] First, as Figures 2 to 5 As shown, the embodiment of the present application provides a transmission structure under a silicon carbide furnace, including: a bracket 1, a linear lifting mechanism 2, a mounting frame 3, a magnetic fluid seal 4, a switching nozzle 5, a slip ring structure 6, a crucible shaft 7, a rotating mechanism 8 and a pyrometer 9;

[0040] The linear lifting mechanism 2 is in driving connection with the mounting frame 3, and is used to drive the mounting frame 3 to rise and fall relative to the bracket 1;

[0041] The crucible shaft 7 is rotatably connected to the mounting frame 3 through the magnetic fluid seal 4; the crucible shaft 7 has a temperature measuring channel 73 and a cooling channel 74 extending in the axial direction; the crucible shaft 7 includes a first end 71 and a second end 72 opposite to each other, and the temperature measuring channel 73 runs through the crucible shaft 7 from the first end 71 to the second end 72; the cooling channel 74 is arranged around the outside of the temperature measuring channel 73; the crucible shaft 7 runs through the adapter water nozzle 5 and the slip ring structure 6;

[0042] The rotating mechanism 8 is fixed to the mounting frame 3 and is in driving connection with the crucible shaft 7, so as to drive the crucible shaft 7 to rotate.

[0043] The pyrometer 9 is fixedly mounted at the second end 72, and the collection direction of the pyrometer 9 is toward the temperature measurement channel 73;

[0044] The slip ring structure 6 is connected to the cooling channel 74 through the adapter water nozzle 5 to provide cooling fluid for the crucible shaft 7 ; the slip ring structure 6 is also electrically connected to the pyrometer 9 to provide electricity for the pyrometer 9 .

[0045] It should be noted that the growth of silicon carbide by the liquid phase method follows the straight pulling growth. The silicon material melts in the graphite crucible, and the graphite crucible is placed on the top of the crucible shaft 7 of the lower transmission structure, i.e., the first end 71. When the coil is continuously heated, the silicon material begins to melt to form a melt. The melt temperature directly affects the crystal pulling process, and the actual temperature of the melt needs to be monitored before crystal induction. Therefore, it is necessary to measure the temperature of the graphite crucible and control the temperature in real time. Therefore, the crucible shaft 7 adopts a hollow design, water cooling, and a pyrometer 9 is fixed at the bottom of the crucible shaft 7. In order to make the temperature of the melt more uniform and controllable, the graphite crucible must have the functions of lifting and rotating.

[0046] The transmission structure under the silicon carbide furnace is used to drive the crucible to rise and fall and rotate. Specifically, the transmission structure under the silicon carbide furnace is fixed in position as a whole by the bracket 1, the mounting frame 3 on the bracket 1 is driven by the linear lifting mechanism 2 and rises and falls relative to the bracket 1, and the crucible shaft 7 is installed on the mounting frame 3 by magnetic fluid rotation, so that when the mounting frame 3 rises and falls, it will synchronously drive the crucible shaft 7 to rise and fall. The crucible shaft 7 is driven by the rotating mechanism 8 to rotate relative to the bracket 1. The crucible shaft 7 is a hollow structure, having a hollow temperature measuring channel 73 and a cooling channel 74 surrounding the temperature measuring channel 73. The cooling fluid such as water or air enters the cooling channel 74 from the slip ring structure 6 through the adapter water nozzle 5 and is then discharged through the adapter water nozzle 5 and the slip ring structure 6, so as to realize the circulation of the cooling fluid and avoid deformation or even damage of the crucible shaft 7 due to excessive temperature. The silicon carbide furnace transmission structure provided in the embodiment of the present application fixes the pyrometer 9 to the second end 72 of the crucible shaft 7, the first end 71 of the crucible shaft 7 is used to fix the crucible, and the temperature measurement channel 73 runs through the crucible shaft 7 from the first end 71 to the second end 72, so that the pyrometer 9 measures the temperature of the bottom of the crucible through the temperature measurement channel 73. Since the pyrometer 9 rotates synchronously with the crucible shaft 7, the slip ring structure 6 provides power to the pyrometer 9, so as to prevent the cable of the pyrometer 9 from being twisted due to rotation.

[0047] In some embodiments, Figure 4 As shown, the first end 71 is provided with a tapered groove 711, and the radial dimension of the tapered groove 711 gradually decreases from the first end 71 to the second end 72. The crucible shaft 7 is processed as a whole, and the conical surface positioning is used to improve the centering accuracy of the crucible shaft 7, so as to avoid the crucible shaft 7 and the upper transmission structure being non-concentric, resulting in the seed crystal drawing an arc.

[0048] In a possible implementation, the lower transmission structure is placed as a whole on the upper side of the bottom frame, and the bracket 1 includes a bottom plate 11 and a mounting seat adjustment plate 12 below. The bottom plate 11 is locked with the bottom frame by locking screws and leveled by horizontal adjustment nuts. The mounting seat adjustment plate 12 is installed above the bottom plate 11 and can be adjusted to the center in the front, back, left, and right directions. After the position is adjusted, it is pressed and locked by the locking plate 911. The bracket 1 is placed on the upper part of the mounting seat adjustment plate 12 and is locked and fixed by screws.

[0049] In some embodiments, the linear lifting mechanism 2 includes a lifting motor 21 and a lead screw 23 that is transmission-connected to the lifting motor 21 . The lead screw 23 is rotatably mounted on the bracket 1 , and the mounting frame 3 is threadedly engaged with the lead screw 23 .

[0050] In one possible implementation, the lifting motor 21 is connected to the worm gear reducer 22 for driving the worm gear reducer 22 to rotate. The screw 23 is inserted into the worm gear reducer 22. The worm gear reducer 22 drives the screw 23 to rotate, and the screw 23 drives the mounting frame 3 to lift and lower.

[0051] In some embodiments, the bracket 1 is provided with a slide rail 24 arranged parallel to the lead screw 23, and the mounting frame 3 is slidably connected to the slide rail 24. Figure 2 As shown, a linear guide rail 24 is installed in front of the bracket 1, one on each side. The mounting frame 3 is also installed on the linear guide rail 24, which guides the mounting frame 3 to ensure that the mounting frame 3 and the equipment on it can be lifted and lowered smoothly.

[0052] The magnetic fluid seal 4 is mounted on the mounting frame 3, the crucible shaft 7 passes through the magnetic fluid seal 4, and the crucible is placed on the crucible shaft 7. Exemplarily, the magnetic fluid seal 4 includes a fixed part and a rotating part, the fixed part is fixed to the mounting frame 3, and the rotating part is fixed to the crucible shaft 7. Figure 4 The middle cross-sectional view is only a schematic diagram of the magnetic fluid seal 4 and should not be used as a limitation on the structure of the magnetic fluid seal 4. The top flange of the bellows 10 is used to connect the furnace body, and the bottom of the bellows 10 is installed on the fixed part of the magnetic fluid seal 4 and rises and falls with the mounting frame 3.

[0053] In some embodiments, the rotating mechanism 8 includes a rotating motor 81 and a pulley assembly connected to the rotating motor 81, and the rotating motor 81 is installed on the mounting frame 3;

[0054] The pulley assembly comprises a driving wheel 83, a driven wheel 84 and a wedge-shaped belt 85. The driving wheel 83 and the driven wheel 84 are connected by transmission through the wedge-shaped belt 85; the driven wheel 84 is sleeved on the crucible shaft 7 and relatively fixed.

[0055] In one possible implementation, the rotating motor 81 drives the planetary reducer 82 to rotate, the planetary reducer 82 drives the driving wheel 83, i.e., the small pulley, to rotate, and the small pulley drives the driven wheel 84, i.e., the large pulley, to rotate through the wedge belt 85. The large pulley is synchronously fixed to the crucible shaft 7 through the key and keyway, thereby driving the crucible shaft 7 to rotate.

[0056] The crucible shaft 7 is connected to the slip ring structure 6 through the adapter water nozzle 5. The adapter water nozzle 5 can be ventilated with air or water to drive the rotor part of the slip ring structure 6 to rotate. The stator part is fixed to the rotating motor 81 seat by the anti-rotation plate 64, and the rotating motor 81 seat is fixed to the mounting frame 3. Figure 4The middle cross-sectional view is only a schematic diagram of the slip ring structure 6 and should not be used as a limitation of the slip ring structure 6 .

[0057] In some embodiments, Figure 4 As shown, the slip ring structure 6 includes a housing 61, a first rotating part 62 and a second rotating part 63;

[0058] The housing 61 is relatively fixed to the mounting frame 3. Along the direction from the first end 71 to the second end 72, the housing 61 includes a first shaft section and a second shaft section;

[0059] The cooling fluid inlet 611 and the cooling fluid outlet 612 are both located in the first shaft section. The first rotating part 62 is fixedly arranged outside the crucible shaft 7 and is rotatably connected to the first shaft section. The first rotating part 62 is provided with a first channel communicating with the cooling fluid inlet 611 and a second channel communicating with the cooling fluid outlet 612. The first channel and the second channel are both connected with the cooling channel 74 through the adapter nozzle 5.

[0060] The second shaft section is provided with a first conductive part, the second rotating part 63 is provided outside the crucible shaft 7 and is rotatably connected to the second shaft section; the second rotating part 63 is provided with a second conductive part that cooperates with the first conductive part; the second conductive part is electrically connected to the pyrometer 9 through a cable.

[0061] It is understandable that the slip ring structure 6 can also be a superimposed structure of a water slip ring and an electric slip ring, such as the water slip ring and the electric slip ring are arranged in the direction from the first end 71 to the second end 72, and the water slip ring is connected to the cooling channel 74 of the crucible shaft 7 through the adapter water nozzle 5. The electric slip ring is electrically connected to the pyrometer 9 to provide power to the pyrometer 9.

[0062] One possible implementation method is Figure 6As shown, the cooling channel 74 inside the crucible shaft 7 includes a liquid inlet section 741, a cooling section 742, a connecting section 743, a first liquid outlet section 744 and a second liquid outlet section 745 which are connected in sequence. The liquid inlet section 741 is connected to the cooling fluid inlet 611 on the slip ring structure 6 through the adapter water nozzle 5, and along the axial direction of the crucible shaft 7, the cooling section 742 is located on the side of the liquid inlet section 741 close to the first end 71, and the cooling section 742 is an annular cavity surrounding the temperature measuring channel 73, and the axis of the annular cavity coincides with the axis of the crucible shaft 7; along the axial direction of the crucible shaft 7, the connecting section 743 is located on the side of the cooling section 742 close to the first end 71, and the connecting section 743 is also an annular cavity surrounding the temperature measuring channel 73, and the axis of the annular cavity coincides with the axis of the crucible shaft 7; the first liquid outlet section 744 is located in the annular cavity of the cooling section 742, and illustratively, the first liquid outlet section 744 is another thin pipe located in the annular cavity of the cooling section 742. The connecting section 743 connects the cooling section 742 and the first liquid outlet section 744, and the first liquid outlet section 744 is connected to the second liquid outlet section 745 and their axes coincide. Along the axis direction of the crucible axis 7, the first liquid outlet section 744 is located between the connecting section 743 and the second liquid outlet section 745. The second liquid outlet section 745 is connected to the cooling fluid outlet 612 on the slip ring structure 6 through the adapter water nozzle 5. Exemplarily, the liquid inlet section 741 and the second liquid outlet section 745 are both thin pipes on the side wall of the temperature measuring channel 73.

[0063] It should be noted that the crucible shaft 7 is a whole shaft formed by welding a plurality of shaft segments, so as to ensure the coaxiality of the whole crucible shaft 7.

[0064] In some embodiments, the pyrometer 9 is mounted to the second end 72 via a mounting plate 91 and a fixing plate 92 ;

[0065] The mounting plate 91 includes a locking plate 911 and an adapter plate 912. The locking plate 911 is locked with the second end 72 by a locking member. The fixing plate 92 is adjustably mounted on the adapter plate 912. The pyrometer 9 is fixed on the fixing plate 92.

[0066] The locking plate 911 has a temperature measuring window.

[0067] like Figure 4 As shown, the measuring end of the pyrometer 9 faces the temperature measuring window, and the temperature measuring window coincides with the axis of the hollow temperature measuring channel 73 of the crucible shaft 7. When the crucible is placed at the first end 71 of the crucible shaft 7, the measuring end of the pyrometer 9 faces the bottom center of the crucible, so as to achieve the temperature measurement requirement of the bottom of the crucible. The pyrometer 9 is fixed to the second end 72 by the mounting plate 91 and the fixing plate 92. The coaxiality of the pyrometer 9 and the crucible shaft 7 can be ensured by the adjustable position function of the fixing plate 92 and the adapter plate 912.

[0068] In some embodiments, the temperature measurement window includes a transparent cover plate 913 such as a glass cover plate, and the locking plate 911 is used to install the transparent cover plate 913 on the second end 72 to block the temperature measurement channel 73.

[0069] In one possible implementation, the quartz glass is mounted on the second end 72 of the crucible shaft 7 and fixed to the crucible shaft 7 via a mounting plate 91. The fixing plate 92 is connected to the pyrometer 9 and the angle can be adjusted to ensure the coaxiality of the pyrometer 9 and the crucible shaft 7.

[0070] In some embodiments, the slip ring structure 6 includes a gas inlet 613 and a third channel connecting the gas inlet 613 and the temperature measurement channel 73 .

[0071] In a possible implementation, the gas inlet 613 is used to introduce protective gas, and the protective gas enters the interior of the silicon carbide furnace through the hollow temperature measuring channel 73. The protective gas can also clean the inner surface of the glass cover plate, thereby ensuring the accuracy of the reading of the pyrometer 9. Exemplarily, a vent hole connected to the temperature measuring channel 73 is provided on the circumferential side surface of the crucible shaft 7, and the protective gas can enter the interior of the silicon carbide furnace from the circumferential vent hole.

[0072] In a second aspect, an embodiment of the present application provides a silicon carbide furnace, comprising any one of the silicon carbide furnace lower transmission structures in the embodiment of the first aspect.

[0073] Obviously, those skilled in the art can make various changes and modifications to the embodiments of the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is also intended to include these modifications and variations.

Claims

1. A transmission structure under a silicon carbide furnace, characterized in that: include: Bracket, linear lifting mechanism, mounting frame, magnetic fluid seal, adapter nozzle, slip ring structure, crucible shaft, rotating mechanism and pyrometer; The linear lifting mechanism is in driving connection with the mounting frame, and is used to drive the mounting frame to rise and fall relative to the bracket; The crucible shaft is rotatably connected to the mounting frame through the magnetic fluid seal; the crucible shaft has a temperature measurement channel and a cooling channel extending in the axial direction; the crucible shaft includes a first end and a second end opposite to each other, and the temperature measurement channel runs through the crucible shaft from the first end to the second end; the cooling channel is arranged around the outside of the temperature measurement channel; the crucible shaft runs through the adapter nozzle and the slip ring structure; The rotating mechanism is fixedly mounted on the mounting frame and is in driving connection with the crucible shaft, and is used to drive the crucible shaft to rotate. The pyrometer is fixedly mounted at the second end, and the collection direction of the pyrometer is toward the temperature measurement channel; The slip ring structure is in communication with the cooling channel through the adapter nozzle, and is used to provide cooling fluid for the crucible shaft; The slip ring structure is also electrically connected to the pyrometer for providing power to the pyrometer.

2. The transmission structure under the silicon carbide furnace according to claim 1, characterized in that: The slip ring structure comprises a housing, a first rotating part and a second rotating part; The housing is relatively fixed to the mounting frame, and along the direction from the first end to the second end, the housing includes a first shaft section and a second shaft section; The cooling fluid inlet and the cooling fluid outlet are both located at the first shaft segment, the first rotating part is fixedly arranged outside the crucible shaft and is rotatably connected to the first shaft segment, the first rotating part is provided with a first channel communicating with the cooling fluid inlet and a second channel communicating with the cooling fluid outlet, and the first channel and the second channel are both communicated with the cooling channel through the adapter nozzle; The second shaft segment is provided with a first conductive part, the second rotating part is provided outside the crucible shaft and is rotatably connected to the second shaft segment; the second rotating part is provided with a second conductive part that cooperates with the first conductive part; the second conductive part is electrically connected to the pyrometer through a cable.

3. The transmission structure under the silicon carbide furnace according to claim 2, characterized in that: The pyrometer is mounted on the second end via a mounting plate and a fixing plate; The mounting plate comprises a locking plate and an adapter plate, the locking plate and the second end are locked by a locking member, the fixing plate is adjustably mounted on the adapter plate; the pyrometer is fixed on the fixing plate; The locking plate has a temperature measuring window.

4. The transmission structure under the silicon carbide furnace according to claim 3, characterized in that: The temperature measurement window includes a transparent cover plate, and the locking plate is used to install the transparent cover plate on the second end to block the temperature measurement channel.

5. The transmission structure under the silicon carbide furnace according to claim 1, characterized in that: The slip ring structure includes a gas inlet and a third channel connecting the gas inlet and the temperature measurement channel.

6. The transmission structure under the silicon carbide furnace according to claim 1, characterized in that: The first end is provided with a tapered groove, and the radial dimension of the tapered groove gradually decreases from the first end to the second end.

7. The transmission structure under the silicon carbide furnace according to claim 1, characterized in that: The linear lifting mechanism comprises a lifting motor and a lead screw which is transmission-connected to the lifting motor. The lead screw is rotatably mounted on the bracket, and the mounting frame is threadably matched with the lead screw.

8. The transmission structure under the silicon carbide furnace according to claim 7, characterized in that: The bracket is provided with a slide rail which is arranged parallel to the lead screw, and the mounting frame is slidably connected to the slide rail.

9. The transmission structure under the silicon carbide furnace according to claim 1, characterized in that: The rotating mechanism comprises a rotating motor and a pulley assembly drivingly connected to the rotating motor, and the rotating motor is mounted on the mounting frame; The pulley assembly comprises a driving wheel, a driven wheel and a wedge-shaped belt, wherein the driving wheel and the driven wheel are connected through the wedge-shaped belt transmission; the driven wheel is sleeved on the crucible shaft and relatively fixed.

10. A silicon carbide furnace, characterized in that: It comprises a silicon carbide furnace lower transmission structure as described in any one of claims 1-9.

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