Cooling device for heating cavity of sputter coating machine

Abstract

The invention provides a cooling device for a heating cavity of a sputter coating machine, the sputter coating machine comprises a control cavity shell and a heating cavity shell, a plurality of heating lamps, a reflecting cover and a partition plate are arranged in the control cavity shell, the reflecting cover is arranged in the control cavity shell, and the outer circle of the reflecting cover is connected with the upper part of the heating cavity shell through a connecting plate; the heating lamps are evenly distributed in the reflecting cover and located on the upper portion of the heating cavity shell, a partition plate is arranged on the other side, provided with the heating lamps, of the reflecting cover, a cooling device is arranged at the partition plate and comprises a water inlet, a water outlet and a flow channel, the water inlet and the water outlet are formed in one side of the cooling device, and the flow channel is annularly arranged in the middle of the cooling device. One end of the flow channel is connected with the water inlet through the water inlet pipe, the other end of the flow channel is connected with the water outlet through the water outlet pipe, and cooling liquid enters the flow channel and finally flows out of the water outlet after being introduced into the water inlet, so that the cooling device can isolate high temperature of the heating cavity shell and prevent a circuit system from being damaged after the control cavity shell is subjected to high temperature.

Description

Technical Field

[0001] The present invention relates to the field of coating technology, and more specifically, to a cooling device for a heating chamber of a sputtering coating machine. Background Art

[0002] Sputtering coating technology uses ions to bombard the target surface. The phenomenon of atoms of the target being knocked out is called sputtering. The atoms generated by sputtering are deposited on the surface of the substrate to form a film, which is called sputtering coating. In order to obtain high-quality optical thin films, a certain amount of working gas is filled in the magnetron sputtering device, and the gas is ionized by igniting the target gun. The ions hit the target under the action of the electric field and magnetic field, and the atoms of the target are sputtered and deposited on the substrate to form a film. Accurately control the reaction gas pressure, the distance between the target and the substrate, the sputtering power and other parameters to accurately control the deposition rate to obtain high-quality optical thin film materials.

[0003] If the high temperature during sputtering coating continues, it is easy to cause the circuit system of the heating chamber to be damaged by the high temperature. Therefore, a cooling device needs to be set in the heating chamber. The prior art, such as CN 117305791 B, discloses a constant temperature heating device for a magnetron sputtering coating machine, and discloses a water cooling mechanism in the heating chamber, including a water tank, a fan group, a cooling pipe and a water pump. The water pump pumps cold water in the water tank into the cooling pipe, and dissipates heat to the outer shell through the cooling pipe. The fan group cools down the water inside the box, and the water pump will pump the water in the box into the water tank again after the water inside the box cools down. However, the cooling pipe of this design takes up a large space, and the water pump needs to continuously pump water and the fan group needs to continuously blow air to the water tank. Although the water can be recycled to achieve the cooling effect, the energy consumption is also increased.

[0004] Therefore, there is a need to provide a cooling device for the heating chamber of a sputtering coating machine that saves energy and effectively isolates the high temperature of the heating chamber. Summary of the invention

[0005] In view of this, in order to solve the above problems, the present invention proposes a cooling device for the heating chamber of a sputtering coating machine, which effectively isolates the high temperature of the heating chamber shell by setting a partition, thereby preventing the control chamber shell from being damaged by the high temperature. By setting an annular flow channel in the water cooling device and a temperature sensor, the partition temperature can be monitored in real time. When the set temperature is exceeded, an alarm can be sounded, and coolant is introduced to use the cooling device to cool the partition, thereby further enhancing the cooling effect.

[0006] A cooling device for a heating chamber of a sputtering coating machine, the sputtering coating machine comprising a control chamber shell 2 and a heating chamber shell 1, the control chamber shell 2 being arranged at the upper part of the heating chamber shell 1, a plurality of heating lamps 62, a reflector 4, and a partition 5 being arranged in the control chamber shell 2, the reflector 4 being arranged in the control chamber shell 2 and the outer circle of the reflector 4 being connected to the upper part of the hot chamber shell 1 through a connecting plate 3, the heating lamps 62 being evenly distributed inside the reflector 4 and being located at the upper part of the heating chamber shell 1, characterized in that: a partition is arranged on the other side of the reflector 4 where the heating lamps 62 are installed 5. A cooling device is provided at the partition 5, and the cooling device includes a water inlet 51, a water outlet 53, and a flow channel 55. The water inlet 51 and the water outlet 53 are provided on one side of the cooling device, and the flow channel 55 is arranged in a ring in the middle of the cooling device. One end of the flow channel 55 is connected to the water inlet 51 through a water inlet pipe 52, and the other end of the flow channel 55 is connected to the water outlet 53 through a water outlet pipe 54. After the coolant is introduced into the water inlet 51, it enters the flow channel 55 and finally flows out from the water outlet 53, so that the cooling device can isolate the high temperature of the heating chamber shell 1 and prevent the circuit system of the control chamber shell 2 from being damaged by the high temperature.

[0007] Furthermore, the partition 5 is made of a copper plate. Using a copper plate as the partition 5 has a good heat dissipation effect and further isolates the high temperature of the heating chamber shell 1.

[0008] Furthermore, a socket fixing plate 6 is connected to the top of the partition 5 , and socket mounting grooves 56 are evenly spaced on the partition 5 . The socket mounting grooves 56 are used to pass the lamp holder of the heating lamp 62 and enable the lamp holder of the heating lamp 62 to be installed on the socket fixing plate 6 .

[0009] Furthermore, the socket mounting groove 56 is arranged on the partition plate 5 and is located at the periphery of the flow channel 55 , and the socket mounting groove 56 corresponds to the lamp holder of the heating lamp 62 one by one.

[0010] Furthermore, the socket fixing plate 6 is annular, and sockets 61 are evenly spaced on the socket fixing plate 6 . The bottom of each socket 61 is connected to a lamp holder of a heating lamp 62 , and the socket 61 is used to control the turning on or off of the heating lamp 62 or the brightness of the heating lamp 62 .

[0011] Furthermore, a positive connecting block 71 and a negative connecting block 72 are provided in a ring shape of the socket fixing plate 6. The positive connecting block 71 is used to connect the positive wire led out of the lamp holder of the heating lamp 62, and the negative connecting block 72 is used to connect the negative wire led out of the lamp holder of the heating lamp 62. The positive connecting block 71 is also connected to an external power supply, so that the heating lamp 62 is energized through the positive connecting block 71 and the negative connecting block 72.

[0012] Furthermore, the positive electrode connection block 71 and the negative electrode connection block 72, and the negative electrode connection block 72 and the separator 5 are connected by a plurality of insulating columns 73, so that there is no electrical conduction between the positive electrode connection block 71, the negative electrode connection block 72, and the separator 5.

[0013] Furthermore, the reflector 4 includes a top plate 41, a focusing plate 42 is extended downward from the outer circle of the top plate 41, a reflector 43 is extended downward from the middle of the top plate 41, and the heating lamp 62 is distributed in a ring between the focusing plate 42 and the reflector 43 to make the heating surface of the heating lamp 62 more uniform.

[0014] Furthermore, the reflector 43 is arranged in an inverted cone shape, and the angle between the inclined surface of the cone and the bottom edge is 135°. The focusing plate 42 is arranged in an outwardly inclined ring, and the inclination angle of the inclined surface of the ring is 110°, so that the light of the heating lamp 62 can be emitted vertically downward, thereby ensuring a greater light utilization rate of the heating lamp 62.

[0015] Furthermore, a first protective cover 8 is connected to the upper part of the outer circle of the partition 5 , and the first protective cover 8 and the partition 5 isolate the socket fixing plate 6 , the positive electrode connection block 71 , and the negative electrode connection block 72 inside.

[0016] Furthermore, the first protective cover 8 is made of metal, has strong supporting force and is resistant to knocking, which is conducive to better protecting internal equipment.

[0017] Furthermore, one side of the first protective cover 8 includes a protective plate 88, and the protective plate 88 is arc-shaped and is used to avoid the edge correction device.

[0018] Furthermore, the outer cover of the first protective cover 8 is provided with a second protective cover 9, the bottom of the control chamber shell 2 is provided with a connecting plate 3, the top of the heating chamber shell 1 is provided with a heating chamber cover plate 11, and the second protective cover 9 is connected to the heating chamber cover plate 11 through the connecting plate 3. The second protective cover 9 is made of plastic and is used for insulation.

[0019] Furthermore, a temperature sensor 57 is provided on one side of the partition 5 for monitoring the temperature of the partition 5. When the set temperature reaches 145°C, the temperature sensor 57 can alarm, and then coolant is introduced into the water cooling device. If the set temperature is not reached, the introduction of coolant is stopped to save energy.

[0020] Beneficial effects of the present invention: The present invention proposes a cooling device for a heating chamber of a sputtering coating machine, which effectively isolates the high temperature of the heating chamber shell by setting a partition 5 to prevent the control chamber shell from being damaged by the high temperature circuit system; a cooling device is provided at the partition 5, and the cooling device includes a water inlet 51, a water outlet 53, and a flow channel 55. The water inlet 51 and the water outlet 53 are arranged on one side of the cooling device, and the flow channel 55 is arranged in a ring in the middle of the cooling device. One end of the flow channel 55 is connected to the water inlet 51 through a water inlet pipe 52. The other end is connected to the water outlet 53 through the water outlet pipe 54. The coolant is introduced into the water inlet 51 and then enters the flow channel 55 and finally flows out from the water outlet 53, so that the cooling device can isolate the high temperature of the heating chamber shell 1 and prevent the circuit system of the control chamber shell 2 from being damaged by the high temperature. A temperature sensor is provided to monitor the partition temperature in real time. When the set temperature is exceeded, an alarm is sounded, and coolant is introduced to cool the partition using the cooling device, thereby further enhancing the cooling effect. If the set temperature is not reached, the introduction of coolant is stopped to save energy. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is an overall structural diagram of the heating chamber and preheating chamber of the sputtering coating machine of the present invention.

[0022] Figure 2 It is a structural diagram of the preheating chamber of the sputtering coating machine of the present invention.

[0023] Figure 3 It is a structural diagram of the cooling device of the heating chamber of the sputtering coating machine of the present invention.

[0024] Figure 4 It is a horizontal cross-sectional view of the cooling device of the heating chamber of the sputtering coating machine of the present invention.

[0025] Figure 5 It is a bottom plan view of the preheating chamber of the sputtering coating machine of the present invention.

[0026] Figure 6 This is a structural diagram of the reflective cover of the preheating chamber of the sputtering coating machine of the present invention.

[0027] Figure 7 It is a vertical cross-sectional view of the reflective cover of the preheating chamber of the sputtering coating machine of the present invention.

[0028] Figure 8 This is a diagram of the internal structure of the preheating chamber of the sputtering coating machine of the present invention.

[0029] Main component symbols

[0030] Heating chamber shell 1, heating chamber cover 11, control chamber shell 2, connecting plate 3, reflector 4, top plate 41, focusing plate 42, reflector 43, partition 5, water inlet 51, water inlet pipe 52, water outlet 53, water outlet pipe 54, flow channel 55, socket mounting groove 56, temperature sensor 57, socket fixing plate 6, socket 61, heating lamp 62, positive electrode connecting block 71, negative electrode connecting block 72, insulating column 73, first protective cover 8, protective plate 88, second protective cover 9.

[0031] The following specific implementation manner will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0032] like Figure 1 As shown in FIG. 1 , it is an overall structural diagram of the heating chamber and preheating chamber of the sputtering coating machine of the present invention; Figure 2 As shown in FIG. 1 , it is a structural diagram of the preheating chamber of the sputtering coating machine of the present invention; Figure 3 As shown, it is a structural diagram of the cooling device of the heating chamber of the sputtering coating machine of the present invention; Figure 4 As shown, it is a horizontal cross-sectional view of the cooling device of the heating chamber of the sputtering coating machine of the present invention; Figure 5 As shown, it is a bottom plan view of the preheating chamber of the sputtering coating machine of the present invention; Figure 6 As shown, it is a structural diagram of a reflector cover of a cooling device of a heating chamber of a sputtering coating machine of the present invention; Figure 7 As shown, it is a vertical cross-sectional view of the reflector cover of the cooling device of the heating chamber of the sputtering coating machine of the present invention; Figure 8 The figure shows the internal structure of the preheating chamber of the sputtering coating machine of the present invention. Embodiment 1:

[0033] A cooling device for a heating chamber of a sputtering coating machine, the sputtering coating machine comprising a control chamber shell 2 and a heating chamber shell 1, the control chamber shell 2 being arranged at the upper part of the heating chamber shell 1, a plurality of heating lamps 62, a reflector 4, and a partition 5 being arranged in the control chamber shell 2, the reflector 4 being arranged in the control chamber shell 2 and the outer circle of the reflector 4 being connected to the upper part of the hot chamber shell 1 through a connecting plate 3, the heating lamps 62 being evenly distributed inside the reflector 4 and being located at the upper part of the heating chamber shell 1, characterized in that: a partition is arranged on the other side of the reflector 4 where the heating lamps 62 are installed 5. A cooling device is provided at the partition 5, and the cooling device includes a water inlet 51, a water outlet 53, and a flow channel 55. The water inlet 51 and the water outlet 53 are provided on one side of the cooling device, and the flow channel 55 is arranged in a ring in the middle of the cooling device. One end of the flow channel 55 is connected to the water inlet 51 through a water inlet pipe 52, and the other end of the flow channel 55 is connected to the water outlet 53 through a water outlet pipe 54. After the coolant is introduced into the water inlet 51, it enters the flow channel 55 and finally flows out from the water outlet 53, so that the cooling device can isolate the high temperature of the heating chamber shell 1 and prevent the circuit system of the control chamber shell 2 from being damaged by the high temperature.

[0034] The material of the partition 5 is a copper plate. Using the copper plate as the partition 5 has a good heat dissipation effect and further isolates the high temperature of the heating chamber shell 1.

[0035] A socket fixing plate 6 is connected to the top of the partition 5 , and socket mounting grooves 56 are evenly spaced on the partition 5 . The socket mounting grooves 56 are used to pass the lamp holder of the heating lamp 62 and enable the lamp holder of the heating lamp 62 to be installed on the socket fixing plate 6 .

[0036] The socket mounting groove 56 is arranged on the partition plate 5 and is located at the periphery of the flow channel 55 . The socket mounting groove 56 corresponds to the lamp holder of the heating lamp 62 one by one.

[0037] The socket fixing plate 6 is annular, and sockets 61 are evenly spaced on the socket fixing plate 6 . The bottom of each socket 61 is connected to a lamp holder of a heating lamp 62 , and the socket 61 is used to control the on or off of the heating lamp 62 or the brightness of the heating lamp 62 .

[0038] A positive connecting block 71 and a negative connecting block 72 are provided in the ring shape of the socket fixing plate 6. The positive connecting block 71 is used to connect the positive wire led out of the lamp holder of the heating lamp 62, and the negative connecting block 72 is used to connect the negative wire led out of the lamp holder of the heating lamp 62. The positive connecting block 71 is also connected to an external power supply, so that the heating lamp 62 is energized through the positive connecting block 71 and the negative connecting block 72.

[0039] The positive electrode connection block 71 and the negative electrode connection block 72 , as well as the negative electrode connection block 72 and the separator 5 are connected via a plurality of insulating columns 73 , so that there is no electrical conduction between the positive electrode connection block 71 , the negative electrode connection block 72 and the separator 5 .

[0040] The reflector 4 includes a top plate 41, a focusing plate 42 is extended downward from the outer circle of the top plate 41, a reflector 43 is extended downward from the middle of the top plate 41, and the heating lamps 62 are distributed in an annular manner between the focusing plate 42 and the reflector 43 to make the heating surface of the heating lamps 62 more uniform.

[0041] The reflector 43 is arranged in an inverted cone shape, and the angle between the inclined surface of the cone and the bottom edge is 135°. The focusing plate 42 is arranged in an outwardly inclined ring, and the inclined surface of the ring is inclined at an angle of 110°, so that the light of the heating lamp 62 can be emitted vertically downward, thereby ensuring a greater light utilization rate of the heating lamp 62.

[0042] A first protective cover 8 is connected to the upper part of the outer circle of the partition 5 , and the first protective cover 8 and the partition 5 isolate the socket fixing plate 6 , the positive electrode connection block 71 , and the negative electrode connection block 72 inside.

[0043] The first protective cover 8 is made of metal, has strong supporting force and is resistant to knocking, which is conducive to better protecting the internal equipment.

[0044] One side of the first protective cover 8 includes a protective plate 88, and the protective plate 88 is arc-shaped and is used to avoid the edge correction device.

[0045] The outer cover of the first protective cover 8 is provided with a second protective cover 9, the bottom of the control chamber shell 2 is provided with a connecting plate 3, the top of the heating chamber shell 1 is provided with a heating chamber cover plate 11, the second protective cover 9 is connected to the heating chamber cover plate 11 through the connecting plate 3, and the second protective cover 9 is made of plastic for insulation.

[0046] A temperature sensor 57 is provided on one side of the partition 5 for monitoring the temperature of the partition 5. When the set temperature reaches 145°C, the temperature sensor 57 will alarm, and coolant will be introduced into the water cooling device. If the set temperature is not reached, the introduction of coolant will be stopped to save energy.

[0047] Beneficial effects of the present invention: The present invention proposes a cooling device for a heating chamber of a sputtering coating machine, which effectively isolates the high temperature of the heating chamber shell by setting a partition 5 to prevent the control chamber shell from being damaged by the high temperature circuit system; a cooling device is provided at the partition 5, and the cooling device includes a water inlet 51, a water outlet 53, and a flow channel 55. The water inlet 51 and the water outlet 53 are arranged on one side of the cooling device, and the flow channel 55 is arranged in a ring in the middle of the cooling device. One end of the flow channel 55 is connected to the water inlet 51 through a water inlet pipe 52. The other end is connected to the water outlet 53 through the water outlet pipe 54. The coolant is introduced into the water inlet 51 and then enters the flow channel 55 and finally flows out from the water outlet 53, so that the cooling device can isolate the high temperature of the heating chamber shell 1 and prevent the circuit system of the control chamber shell 2 from being damaged by the high temperature. A temperature sensor is provided to monitor the partition temperature in real time. When the set temperature is exceeded, an alarm is sounded, and coolant is introduced to cool the partition using the cooling device, thereby further enhancing the cooling effect. If the set temperature is not reached, the introduction of coolant is stopped to save energy.

[0048] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A cooling device for a heating chamber of a sputtering coating machine, the sputtering coating machine comprising a control chamber shell (2) and a heating chamber shell (1), the control chamber shell (2) being arranged on the upper part of the heating chamber shell (1), the control chamber shell (2) being provided with a plurality of heating lamps (62), a reflective cover (4), and a partition (5), the reflective cover (4) being arranged in the control chamber shell (2) and the outer circle of the reflective cover (4) being connected to the upper part of the heating chamber shell 1 through a connecting plate (3), the heating lamps (62) being evenly distributed inside the reflective cover (4) and being located on the upper part of the heating chamber shell (1), characterized in that: A partition (5) is provided on the other side of the reflector (4) where the heating lamp (62) is installed. A cooling device is provided on the partition (5). The cooling device comprises a water inlet (51), a water outlet (53), and a flow channel (55). The water inlet (51) and the water outlet (53) are provided on one side of the cooling device. The flow channel (55) is arranged in a ring in the middle of the cooling device. One end of the flow channel (55) is connected to the water inlet (51) via a water inlet pipe (52), and the other end of the flow channel (55) is connected to the water outlet (53) via a water outlet pipe (54). After the coolant is introduced into the water inlet (51), it enters the flow channel (55) and finally flows out from the water outlet (53), so that the cooling device can isolate the high temperature of the heating chamber shell (1) and prevent the circuit system of the control chamber shell (2) from being damaged by the high temperature.

2. The cooling device for the heating chamber of the sputtering coating machine according to claim 1, characterized in that: A socket fixing plate (6) is connected to the top of the partition plate (5), and socket mounting grooves (56) are evenly spaced on the partition plate (5), wherein the socket mounting grooves (56) are used to pass through the lamp holder of the heating lamp (62) and enable the lamp holder of the heating lamp (62) to be mounted on the socket fixing plate (6).

3. The cooling device for the heating chamber of the sputtering coating machine as claimed in claim 2, characterized in that: The socket mounting groove (56) is arranged on the partition (5) and is located at the periphery of the flow channel (55), and the socket mounting groove (56) corresponds one-to-one to the lamp holder of the heating lamp (62).

4. The cooling device for the heating chamber of the sputtering coating machine as claimed in claim 2, characterized in that: The socket fixing plate (6) is annular in shape, and sockets (61) are evenly spaced on the socket fixing plate (6). The bottom of each socket (61) is connected to a lamp holder of a heating lamp (62), and the turning on or off of the heating lamp (62) or the brightness of the heating lamp (62) is controlled by the socket (61).

5. The cooling device for the heating chamber of the sputtering coating machine as claimed in claim 2, characterized in that: A positive connection block (71) and a negative connection block (72) are provided in a ring shape of the socket fixing plate (6); the positive connection block (71) is used to connect a positive wire led out of a lamp holder of the heating lamp (62); the negative connection block (72) is used to connect a negative wire led out of a lamp holder of the heating lamp (62); the positive connection block (71) is also connected to an external power source, so that the heating lamp (62) is energized via the positive connection block (71) and the negative connection block (72).

6. The cooling device for the heating chamber of the sputtering coating machine as claimed in claim 1, characterized in that: The reflector (4) comprises a top plate (41), a condenser plate (42) extending downward from the outer circle of the top plate (41), a reflector plate (43) extending downward from the middle of the top plate (41), and the heating lamps (62) are distributed in an annular manner between the condenser plate (42) and the reflector plate (43) so as to make the heating surface of the heating lamps (62) more uniform.

7. The cooling device for the heating chamber of the sputtering coating machine according to claim 6, characterized in that: The reflective plate (43) is arranged in an inverted frustum shape, and the focusing plate (42) is arranged in an outwardly inclined circular ring.

8. The cooling device for the heating chamber of the sputtering coating machine according to claim 1, characterized in that: A first protective cover (8) is connected above the outer circle of the partition (5), and the first protective cover (8) and the partition (5) isolate the socket fixing plate (6), the positive electrode connection block (71), and the negative electrode connection block (72).

9. The cooling device for the heating chamber of the sputtering coating machine as claimed in claim 8, characterized in that: The outer cover of the first protective cover (8) is provided with a second protective cover (9), the bottom of the control chamber shell (2) is provided with a connecting plate (3), the top of the heating chamber shell (1) is provided with a heating chamber cover plate (11), and the second protective cover (9) is connected to the heating chamber cover plate (11) via the connecting plate (3).

10. The cooling device for the heating chamber of the sputtering coating machine according to claim 1, characterized in that: A temperature sensor (57) is provided on one side of the partition (5) for monitoring the temperature of the partition (5).

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