Temperature control device and method for three-axis turntable in vacuum environment

Abstract

The invention provides a three-axis turntable temperature control device and method in a vacuum environment. The three-axis turntable temperature control device comprises a heating circuit, a power control circuit, a temperature measurement circuit, a temperature sensor and a control module, the heating circuit is formed by electrically connecting a plurality of electric heating sheets; the heating circuit is arranged on the surface of the three-axis turntable; at least one temperature sensor is arranged on the surface of each heating circuit; the temperature measuring circuit is used for acquiring the temperature value of the temperature sensor, the power control circuit is used for acquiring the power of each heating circuit, and the control module is used for sending a control instruction to the power control circuit according to the power and the temperature value, so that the power control circuit controls each heating circuit to be connected or disconnected. According to the scheme, high-precision control over the working temperature of the three-axis rotary table in the vacuum environment is achieved.

Description

Technical Field

[0001] The present invention relates to the field of ground testing technology for space environment simulation in the field of aerospace, and in particular to a temperature control device and method for a three-axis turntable in a vacuum environment. Background Art

[0002] Star sensors are high-precision space attitude measurement devices that use stars as reference systems and the starry sky as working objects. They detect stars at different positions on the celestial sphere and perform calculations to provide accurate spatial orientation and reference for satellites, spacecraft and other aerospace vehicles. Therefore, sufficient ground simulation is necessary. The starry sky background ground simulation system composed of a three-axis turntable is an indispensable component. The system is located in a vacuum environment and can complete the test together with the simulation computer during ground tests.

[0003] In order to obtain the real working environment of the star sensor, the three-axis turntable is usually used with a thermal stability test vacuum tank, which can work stably in a vacuum environment and provide a high-precision position control test system for the tested product. The three-axis turntable consists of a three-axis turntable body, support columns, electrical control system, connecting cables, etc. The three-axis turntable works in a vacuum tank with a vacuum degree better than 1×10 -3 Pa, will be affected by the thermal radiation of the heat sink with a temperature of 100K in the vacuum tank. Since the three-axis turntable has high precision, its temperature requirements for the working environment are also relatively strict. Generally, the working environment of a high-precision turntable is consistent with its production environment, which is room temperature. In order to ensure that the temperature of the turntable itself is within the range of 20±1℃ when it is working, the control accuracy of the existing temperature control method is low. Therefore, there is an urgent need for a high-precision temperature control device and method for a three-axis turntable in a vacuum environment. Summary of the invention

[0004] The embodiment of the present invention provides a temperature control device and method for a three-axis turntable in a vacuum environment. The method can achieve high-precision control of the working temperature of the three-axis turntable in a vacuum environment, reducing the influence of the low-temperature vacuum environment on the accuracy of the three-axis turntable.

[0005] In a first aspect, an embodiment of the present invention provides a temperature control device for a three-axis turntable in a vacuum environment, which is applied to a three-axis turntable in a vacuum environment, and includes: a heating circuit, a power control circuit, a temperature measurement circuit, a temperature sensor, and a control module;

[0006] The heating circuit is composed of a plurality of electrically connected electric heating plates; the heating circuit is arranged on the surface of the three-axis turntable, and different heating circuits are arranged at different positions on the surface; wherein at least one temperature sensor is arranged on the surface where each heating circuit is located;

[0007] The temperature measurement circuit is connected to the temperature sensor and the control module respectively; the temperature measurement circuit is used to obtain the temperature value of the temperature sensor;

[0008] The power control circuit is connected to the heating circuit and the control module respectively; the power control circuit is used to obtain the power of each heating circuit;

[0009] The control module is used to send a control instruction to the power control circuit according to the power and / or the temperature value, so that the power control circuit controls each of the heating circuits to be turned on or off.

[0010] Optionally, the three-axis turntable includes, from bottom to top, a support, a base, an outer frame, a middle frame and a table top;

[0011] The surface of the pillar is provided with 3 to 6 heating circuits;

[0012] One to three heating circuits are arranged on the surface of the base;

[0013] 4 to 9 heating circuits are arranged on the surface of the outer frame;

[0014] 3 to 7 heating circuits are arranged on the surface of the middle frame;

[0015] The surface of the table top is provided with 3 to 6 heating circuits.

[0016] Optionally, the three-axis turntable includes, from bottom to top, a support, a base, an outer frame, a middle frame and a table top;

[0017] The surface of the pillar is provided with four heating circuits;

[0018] The surface of the base is provided with two heating circuits;

[0019] The surface of the outer frame is provided with seven heating circuits;

[0020] The surface of the middle frame is provided with five heating circuits;

[0021] The surface of the table top is provided with four heating circuits.

[0022] Optionally, the table top is connected to the middle frame via a first axis arranged at the bottom of the middle frame; the outer frame is connected to both ends of the middle frame via a second axis and a third axis respectively; the base is provided with a fourth axis, the fourth axis passes through the bottom of the outer frame to achieve the connection between the outer frame and the base; the pillar is connected to the base; the outer frame and the middle frame are both U-shaped;

[0023] Dividing the U-shaped outer frame into a first area connected to the second axis, a second area connected to the third axis, a third area below the second axis, a fourth area below the third axis, a fifth area connected to the fourth axis, a sixth area between the third area and the fifth area, and a seventh area between the fourth area and the fifth area;

[0024] A first heating circuit consisting of five electric heating sheets connected in series is arranged on the surface of the first area and the second area;

[0025] In the third area and the fourth area, a first sub-heating circuit consisting of two electric heating sheets in series is arranged on the front end surface and the rear end surface of each area, and the first sub-heating circuit is connected in parallel to obtain a second heating circuit;

[0026] A second sub-heating circuit consisting of three electric heating plates connected in series is arranged on the front end surface and the rear end surface of the fifth region, and the second sub-heating circuit is connected in parallel to obtain a third heating circuit;

[0027] In the sixth area and the seventh area, an electric heating sheet is disposed on the front end surface and the rear end surface of each area, and the electric heating sheets are connected in parallel to obtain a fourth heating circuit.

[0028] Preferably, the U-shaped middle frame is divided into an eighth area connected to the second axis, a ninth area connected to the third axis, a tenth area below the second axis, an eleventh area below the third axis, and a twelfth area connected to the first axis;

[0029] In the eighth region and the ninth region, a third sub-heating circuit consisting of three electric heating plates in series is arranged on the front end surface and the rear end surface of each region, and the third sub-heating circuit is connected in parallel to obtain a fifth heating circuit;

[0030] In the tenth region and the eleventh region, an electric heating sheet is disposed on the front end surface and the rear end surface of each region, and the electric heating sheets are connected in parallel to obtain a sixth heating circuit;

[0031] An electric heating sheet is disposed on the front end surface and the rear end surface of the twelfth region, and the electric heating sheets are connected in parallel to obtain a seventh heating circuit.

[0032] Optionally, the heating circuit of the pillar is evenly distributed along the circumferential wall surface, and the heating circuit is composed of 6 electric heating plates connected in series;

[0033] The heating circuit of the base is evenly distributed along the circumferential wall surface, and the heating circuit is composed of three electric heating plates connected in series;

[0034] The table top is divided into four sectors, each sector is provided with a heating circuit on its surface, and the heating circuit is composed of two electric heating plates connected in series.

[0035] Optionally, it also includes a current sampling circuit; the current sampling circuit is connected to the power control circuit and the control module respectively; the current sampling circuit is used to collect the current of the heating circuit connected to the power control circuit, and the control module is used to send a control instruction to the power control circuit according to the current, so that the power control circuit controls each of the heating circuits to be turned on or off.

[0036] Optionally, the surface of the heating circuit is coated with a heat insulating material.

[0037] Optionally, the thermal insulation material is obtained by alternately stacking polyimide films and polyester fiber mesh cloths or by alternately stacking polyethylene terephthalate and polyester fiber mesh cloths.

[0038] Optionally, the method further includes performing black oxidation treatment on the surface of the thermal insulation material.

[0039] Optionally, a heat dissipation surface is provided on a surface of the outer frame corresponding to where the second axis and the third axis are provided; a heat dissipation surface is provided on a surface of the base corresponding to where the fourth axis is provided; and the heat dissipation surface is not covered with heat insulation material.

[0040] In a second aspect, an embodiment of the present invention further provides a temperature control method for a three-axis turntable in a vacuum environment, the method comprising:

[0041] Obtain the temperature distribution of a three-axis turntable in a vacuum environment;

[0042] Dividing the surface of the three-axis turntable according to the temperature distribution to obtain a plurality of sub-areas;

[0043] A heating circuit is arranged in each of the sub-areas, and the number of electric heating plates included in the heating circuit and the resistance value of the electric heating plates are determined, and at least one temperature sensor is arranged on the surface where each heating circuit is located;

[0044] The temperature value of the temperature sensor is collected by a temperature measuring circuit; if the temperature value is less than a lower temperature threshold, a heating circuit on the surface of the temperature sensor corresponding to the temperature value is controlled to be turned on;

[0045] If the temperature value is not less than the lower temperature threshold and is greater than the upper temperature threshold, the heating circuit on the surface where the temperature sensor corresponding to the temperature value is located is controlled to be disconnected.

[0046] Optionally, the resistance value of the electric heating plate is determined by the following method:

[0047] Determining a temperature control range of the sub-region according to the temperature distribution of the sub-region and the target control temperature value;

[0048] The compensation heat is calculated according to the maximum value of the temperature control range;

[0049] The resistance value of the electric heating plate is calculated according to the compensation heat, the number of the electric heating plates in the sub-area and the connection mode of the heating circuit in the sub-area.

[0050] Optionally, it also includes:

[0051] If the temperature value is not less than the lower temperature threshold and not greater than the upper temperature threshold, the heating circuit on the surface where the temperature sensor corresponding to the temperature value is located is controlled to reduce the heating power.

[0052] Optionally, it also includes:

[0053] Collecting the current of each heating circuit through a current sampling circuit;

[0054] Determining whether the current is greater than a preset current threshold;

[0055] If the judgment result is yes, the heating circuit corresponding to the current is controlled to reduce the heating power.

[0056] In a third aspect, an embodiment of the present invention further provides a computing device, including a memory and a processor, wherein the memory stores a computer program, and when the processor executes the computer program, it implements any of the above-mentioned methods for controlling the temperature of a three-axis turntable in a vacuum environment.

[0057] In a fourth aspect, an embodiment of the present invention further provides a computer-readable storage medium having a computer program stored thereon, which, when executed in a computer, enables the computer to execute any of the above-mentioned methods for controlling the temperature of a three-axis turntable in a vacuum environment.

[0058] The present invention provides a temperature control device and method for a three-axis turntable in a vacuum environment. The device sets a heating circuit composed of a plurality of electric heating plates on the surface of the three-axis turntable, and the heating circuits set at different positions on the surface are different, so that the temperature of different surfaces can be controlled by different heating circuits; at the same time, a power control circuit and a control module are set to realize the on-off control of the heating circuit according to power, and a temperature measurement circuit, a temperature sensor and a control module are set to realize the on-off control of the heating circuit according to temperature, and the surface temperature of the three-axis turntable is further accurately controlled, so that the surface temperature of the three-axis turntable in the vacuum environment can be stabilized at 20°C±1°C, and finally high-precision control of the working temperature of the three-axis turntable in the vacuum environment is achieved, and the influence of the low-temperature vacuum environment on the accuracy of the three-axis turntable is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0059] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0060] Figure 1 It is a structural schematic diagram of a temperature control device for a three-axis turntable in a vacuum environment provided by an embodiment of the present invention;

[0061] Figure 2 It is a structural schematic diagram of a three-axis turntable provided by an embodiment of the present invention;

[0062] Figure 3 It is a schematic diagram of the distribution of a heating circuit on the surface of an outer frame of a three-axis turntable provided by an embodiment of the present invention;

[0063] Figure 4 It is a schematic diagram of the distribution of a heating circuit on the surface of a middle frame of a three-axis turntable provided by an embodiment of the present invention;

[0064] Figure 5 It is a schematic diagram of the distribution of a heating circuit on the surface of a support in a three-axis turntable provided by an embodiment of the present invention;

[0065] Figure 6 It is a schematic diagram of the distribution of a heating circuit on the surface of a base in a three-axis turntable provided by an embodiment of the present invention;

[0066] Figure 7 It is a schematic diagram of the distribution of a heating circuit on the surface of a table in a three-axis turntable provided by an embodiment of the present invention;

[0067] Figure 8 It is a schematic structural diagram of another temperature control device for a three-axis turntable in a vacuum environment provided by an embodiment of the present invention;

[0068] Fig. 9 It is a schematic diagram of the distribution of the heat dissipation surface in a three-axis turntable provided by one embodiment of the present invention;

[0069] Fig.10 It is a flow chart of a temperature control method of a three-axis turntable in a vacuum environment provided by an embodiment of the present invention;

[0070] Fig.11 It is a temperature field distribution diagram of a three-axis turntable in a cold static state provided by an embodiment of the present invention;

[0071] Fig.12This is a temperature field distribution diagram of a three-axis turntable under extreme low temperature conditions provided by an embodiment of the present invention;

[0072] Fig.13 This is a temperature field distribution diagram of a three-axis turntable under extreme high temperature conditions provided by an embodiment of the present invention;

[0073] Fig.14 It is a structural diagram of a device for implementing a temperature control method of a three-axis turntable under a vacuum environment provided by an embodiment of the present invention;

[0074] Reference numerals: 10 - heating circuit; 20 - power control circuit; 30 - temperature measurement circuit; 40 - temperature sensor; 50 - control module; 60 - current sampling circuit; 70 - heat dissipation surface;

[0075] 01-pillar; 02-base; 03-outer frame; 04-middle frame; 05-tabletop;

[0076] A-first axis; B-second axis; C-third axis; D-fourth axis;

[0077] 101 - a first heating circuit; 102 - a second heating circuit; 103 - a third heating circuit; 104 - a fourth heating circuit; 105 - a fifth heating circuit; 106 - a sixth heating circuit; 107 - a seventh heating circuit. DETAILED DESCRIPTION

[0078] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0079] The following is the concept of the present invention: Figure 1 As shown, the embodiment of the present invention provides a three-axis turntable temperature control device in a vacuum environment, including: a heating circuit 10, a power control circuit 20, a temperature measurement circuit 30, a temperature sensor 40 and a control module 50;

[0080] The heating circuit 10 is composed of a plurality of electrically connected electric heating sheets; the heating circuit 10 is arranged on the surface of the three-axis turntable, and different heating circuits 10 are arranged at different positions on the surface; wherein at least one temperature sensor 40 is arranged on the surface where each heating circuit 10 is located;

[0081] The temperature measuring circuit 30 is connected to the temperature sensor 40 and the control module 50 respectively; the temperature measuring circuit 30 is used to obtain the temperature value of the temperature sensor 40;

[0082] The power control circuit 20 is connected to the heating circuit 10 and the control module 50 respectively; the power control circuit 20 is used to obtain the power of each heating circuit 10;

[0083] The control module 50 is used to send a control instruction to the power control circuit 20 according to the power and / or temperature value, so that the power control circuit 20 controls each heating circuit 10 to be turned on or off.

[0084] In an embodiment of the present invention, the device sets a heating circuit composed of a plurality of electric heating plates on the surface of a three-axis turntable, and the heating circuits set at different positions on the surface are different, so that the temperature control of different surfaces can be achieved through different heating circuits; at the same time, a power control circuit and a control module are set to realize the on-off control of the heating circuit according to power, and a temperature measurement circuit, a temperature sensor and a control module are set to realize the on-off control of the heating circuit according to temperature, and the surface temperature of the three-axis turntable is further precisely controlled, so that the surface temperature of the three-axis turntable in a vacuum environment can be stabilized at 20°C±1°C, and finally high-precision control of the working temperature of the three-axis turntable in a vacuum environment is achieved, reducing the influence of the low-temperature vacuum environment on the accuracy of the three-axis turntable.

[0085] It should be noted that electrical connection refers to the form in which different components in the circuit structure are connected through physical lines such as wires that can transmit electrical signals. Preferably, the connection is made with wires. The electric heating sheet is preferably an adhesive film type electric heating sheet, and the electric heating sheets are arranged at intervals.

[0086] In the present invention, by setting at least one temperature sensor in each heating circuit, the temperature of the surface where the heating circuit is located can be monitored. Specifically, the temperature sensor is set at the surface of the three-axis turntable and the middle position of the gap between any two electric heating plates, avoiding setting the temperature sensor at the edge position, so as to achieve more accurate temperature measurement.

[0087] In a preferred embodiment, Figure 2 As shown, the three-axis turntable includes a support 01, a base 02, an outer frame 03, a middle frame 04 and a table top 05 from bottom to top;

[0088] The surface of the pillar 01 is provided with 3 to 6 (for example, 3, 4, 5 or 6) heating circuits;

[0089] The surface of the base 02 is provided with 1 to 3 (for example, 1, 2 or 3) heating circuits;

[0090] The surface of the outer frame 03 is provided with 4 to 9 (for example, 4, 5, 6, 7, 8 or 9) heating circuits;

[0091] The surface of the middle frame 04 is provided with 3 to 7 (for example, 3, 4, 5, 6 or 7) heating circuits;

[0092] The surface of the table 05 is provided with 3 to 6 (for example, 3, 4, 5 or 6) heating circuits.

[0093] like Figure 2 As shown, the three-axis turntable is located in a vacuum tank, which is used to provide a vacuum environment for the three-axis turntable. The product or object to be tested is placed on the table. The outer frame, middle frame and table constitute the body of the three-axis turntable, which is supported by a base and pillars. The body adopts a symmetrical overall structural form, and the symmetrical parts are made of the same material. It should be noted that the ambient temperature was taken into consideration when selecting the components (motor, bearing, encoder, etc.) of the three-axis turntable, and the turntable system can work normally under this condition.

[0094] In the present invention, since the geometric shape of the three-axis turntable is irregular and there are moving parts, and the temperature distribution of different components is different, heating circuits are respectively provided on different components of the three-axis turntable, so that independent temperature control of different components can be achieved; at the same time, different numbers of heating circuits are provided on different components, which can further achieve precise temperature control of each part for each component, reduce the temperature difference at different positions of the same component, and thus improve the temperature control accuracy.

[0095] In a preferred embodiment, Figure 2 As shown, the three-axis turntable includes a support 01, a base 02, an outer frame 03, a middle frame 04 and a table top 05 from bottom to top;

[0096] The surface of pillar 01 is provided with 4 heating circuits;

[0097] The surface of the base 02 is provided with two heating circuits;

[0098] The surface of the outer frame 03 is provided with 7 heating circuits;

[0099] The surface of the middle frame 04 is provided with 5 heating circuits;

[0100] The surface of table top 05 is provided with 4 heating circuits.

[0101] In a preferred embodiment, Figure 2 As shown, the table top 05 is connected to the middle frame 04 through a first axis A arranged at the bottom of the middle frame 04; the outer frame 03 is connected to both ends of the middle frame 04 through a second axis B and a third axis C respectively; the base 02 is provided with a fourth axis D, and the fourth axis D passes through the bottom of the outer frame 03 to realize the connection between the outer frame 03 and the base 02; the pillar 01 is connected to the base 02; the outer frame 03 and the middle frame 04 are both U-shaped.

[0102] It should be noted that motors are respectively provided at the first axis, the second axis, the third axis and the fourth axis, and all the motors work together to realize three-axis rotation, among which the motor at the first axis is used to realize the rotation of the table top; the fourth axis is used to realize the horizontal rotation of the outer frame.

[0103] In a more preferred embodiment, Figure 3 As shown, the U-shaped outer frame 03 is divided into a first area connected to the second axis B, a second area connected to the third axis C, a third area below the second axis B, a fourth area below the third axis C, a fifth area connected to the fourth axis D, a sixth area between the third area and the fifth area, and a seventh area between the fourth area and the fifth area;

[0104] A first heating circuit 101 consisting of five electric heating sheets connected in series is arranged on the surface of the first area and the second area;

[0105] In the third area and the fourth area, a first sub-heating circuit consisting of two electric heating plates in series is arranged on the front end surface and the rear end surface of each area, and the first sub-heating circuit is connected in parallel to obtain a second heating circuit 102;

[0106] A second sub-heating circuit consisting of three electric heating plates in series is arranged on the front and rear surfaces of the fifth region, and the second sub-heating circuits are connected in parallel to obtain a third heating circuit 103;

[0107] In the sixth area and the seventh area, an electric heating sheet is disposed on the front end surface and the rear end surface of each area, and the electric heating sheets are connected in parallel to obtain a fourth heating circuit 104 .

[0108] In the present invention, the U-shaped outer frame is divided into 7 areas, which not only takes into account the irregular shape of the outer frame, but also takes into account the temperature differences at different positions of the outer frame. Therefore, by respectively setting circuits on the surfaces of the 7 different areas, precise control of the surface temperature of the outer frame is achieved, reducing the surface temperature difference, so that the temperature of the outer frame in a low temperature environment can be precisely controlled at 20°C±1°C through the heating circuit.

[0109] In a more preferred embodiment, Figure 4 As shown, the U-shaped middle frame 04 is divided into an eighth region connected to the second axis B, a ninth region connected to the third axis C, a tenth region below the second axis B, an eleventh region below the third axis C, and a twelfth region connected to the first axis A;

[0110] In the eighth and ninth regions, a third sub-heating circuit consisting of three electric heating plates in series is provided on the front and rear surfaces of each region, and the third sub-heating circuit is connected in parallel to obtain a fifth heating circuit 105;

[0111] In the tenth area and the eleventh area, an electric heating sheet is disposed on the front end surface and the rear end surface of each area, and the electric heating sheets are connected in parallel to obtain a sixth heating circuit 106;

[0112] An electric heating plate is disposed on the front end surface and the rear end surface of the twelfth region, and the electric heating plates are connected in parallel to obtain a seventh heating circuit 107 .

[0113] In the present invention, the U-shaped middle frame is divided into five areas, which not only takes into account the irregular shape of the middle frame, but also takes into account the temperature differences at different positions of the middle frame. Therefore, by respectively setting circuits on the surfaces of the five different areas, the surface temperature of the middle frame is precisely controlled, and the surface temperature difference is reduced, so that the temperature of the middle frame in a low temperature environment can be precisely controlled at 20°C±1°C through the heating circuit.

[0114] It should be noted that the first heating circuit on the surface of the first area and the second area emphasizes that the connection method and the number of electric heating plates are the same, and the resistance values ​​of the electric heating plates used in different areas are not necessarily the same. The same applies to the second heating circuit, the fourth heating circuit, the fifth heating circuit, and the sixth heating circuit in different areas.

[0115] In a preferred embodiment, Figure 5 As shown, the heating circuit of the pillar 01 is evenly distributed along the circumferential wall, and the heating circuit is composed of 6 electric heating plates connected in series;

[0116] like Figure 6 As shown, the heating circuit of the base 02 is evenly distributed along the circumferential wall, and the heating circuit is composed of three electric heating plates connected in series;

[0117] like Figure 7 As shown, the table top 05 is divided into 4 sectors, and a heating circuit is arranged on the surface of each sector, and the heating circuit is composed of 2 electric heating plates connected in series.

[0118] In the present invention, each electric heating plate is provided with multiple electric heating plates on the surface of the pillar, the base, the table top, etc., so as to realize the special control of different components such as the pillar, the base, the table top, etc.

[0119] It should be noted that in Figure 5 In the figure, each color corresponds to a heating circuit, and four heating circuits are arranged on the pillar, and each heating circuit is composed of six electric heating plates connected in series; Figure 6 In the figure, only one heating circuit on the front surface of the base is shown, and there is another heating circuit on the rear surface, and both heating circuits are composed of two electric heating plates connected in series; Figure 7 In the embodiment, the table top is equally divided into four sectors, that is, each color corresponds to a heating circuit. Four heating circuits are arranged on the table top, and each heating circuit is composed of two electric heating plates connected in series.

[0120] In a preferred embodiment, Figure 8 As shown, the device also includes a current sampling circuit 60; the current sampling circuit 60 is connected to the power control circuit and the control module respectively; the current sampling circuit 60 is used to collect the current of the heating circuit connected to the power control circuit, and the control module is used to send a control instruction to the power control circuit according to the current, so that the power control circuit controls each heating circuit to be turned on or off.

[0121] In a preferred embodiment, the surface of the heating circuit is coated with a heat insulating material.

[0122] It should be noted that the wrapping of the thermal insulation material includes but is not limited to wrapping and fixing with Velcro, and the edges are sealed at the same time.

[0123] In a preferred embodiment, the heat insulating material is obtained by alternately stacking polyimide films and polyester fiber mesh cloths or by alternately stacking polyethylene terephthalate and polyester fiber mesh cloths.

[0124] In the present invention, a heating circuit and a heat-insulating material are sequentially arranged on the surface of the three-axis turntable, and the heat-insulating material is laid on the outermost layer to cover the heating circuit, and the heat-insulating material adopts a multi-layer heat-insulating material. In this way, the heat-insulating material can isolate the radiation heat dissipation from the three-axis turntable to the vacuum tank, so as to reduce the thermal compensation power demand in a low-temperature environment.

[0125] In a preferred embodiment, the method further comprises performing a black oxidation treatment on the surface of the thermal insulation material.

[0126] In the present invention, the outer surface of the heat insulation material is subjected to black oxidation treatment (ie, black carburization treatment) to reduce the influence of stray light on the optical device.

[0127] In a preferred embodiment, Fig. 9 As shown, the surface of the outer frame 03 corresponding to the second axis B and the third axis C is provided with a heat dissipation surface 70; the surface of the base 02 corresponding to the fourth axis D is provided with a heat dissipation surface 70; the heat dissipation surface 70 is not covered with heat insulation material.

[0128] In the present invention, if Figure 8 As shown in the figure, the second axis, the third axis, and the fourth axis are all equipped with motors, and the three motors are the main heat sources. Therefore, when the multi-layer insulation material is coated, a heat dissipation surface is left near the motor. Since the material surface of the three-axis turntable equipment is blackened, the emissivity is high, and there is no external radiation heat source, there is no need to perform additional surface treatment on the heat dissipation surface.

[0129] Specifically, the specific coating methods of multi-layer insulation materials are as follows, which need to be determined on site according to the implementation situation:

[0130] Middle frame: Since motors are arranged on the left and right sides of the U-shaped frame, in order not to affect the normal operation of the equipment, it is necessary to avoid and wrap the multi-layer insulation material in blocks;

[0131] Outer frame: The U-shaped outer frame is irregular, and a motor is installed at the bottom of the outer frame for horizontal rotation. In order not to affect the normal operation of the equipment, multiple layers of thermal insulation materials need to be avoided and covered in blocks;

[0132] Base: This area consists of three concentric cylinders with similar diameters, which can be wrapped with multiple layers of insulation materials in sections;

[0133] Pillars: This area is fully wrapped with multiple layers of insulation.

[0134] In the present invention, the following three problems are solved by the three-axis turntable temperature control device under the vacuum environment: First, the temperature control from the cooling and depressurization of the vacuum tank to the experimental process, including the overall temperature level and the temperature fluctuation level and temperature uniformity of the key parts of the table; Second, there is no thermal control lower computer or thermal control instrument support during the ground test, so it is necessary to develop a special device for temperature acquisition and dynamic control of the heating circuit; Third, the three-axis turntable needs to rotate around two axes during the test, and the gap between some frames with relative motion is small to ensure that the multi-layer insulation material is not scratched during the test, and the entanglement of the leads and the moving parts needs to be avoided, and the pulling force of the leads on the pasted electric heating plate during the movement is reduced. The coating method of the multi-layer insulation material and the routing method of the electric heating plate and the temperature measuring device are reasonably designed, and the implementation of thermal control is very difficult.

[0135] In the present invention, the control module is placed at the vacuum tank, and the control module includes but is not limited to intelligent control devices such as CPU. The control module is connected to the electric heating plate and temperature sensor attached to the three-axis turntable through the through-cabin cable and the vacuum tank connector, and performs feedback control.

[0136] It is to be understood that the structure illustrated in the embodiment of the present invention does not constitute a specific limitation on a temperature control device for a three-axis turntable in a vacuum environment. In other embodiments of the present invention, a temperature control device for a three-axis turntable in a vacuum environment may include more or fewer components than shown in the figure, or combine certain components, or split certain components, or arrange the components differently. The components shown in the figure may be implemented in hardware, software, or a combination of software and hardware.

[0137] The present invention also provides a method for controlling the temperature of a three-axis turntable in a vacuum environment, using any of the three-axis turntable temperature control devices in a vacuum environment as described above. Fig.10 As shown, the method includes:

[0138] Step 100, obtaining the temperature distribution of a three-axis turntable in a vacuum environment;

[0139] Step 102, dividing the surface of the three-axis turntable according to the temperature distribution to obtain a plurality of sub-areas;

[0140] Step 104, setting a heating circuit in each sub-area, determining the number of electric heating plates included in the heating circuit and the resistance value of the electric heating plates, and setting at least one temperature sensor on the surface where each heating circuit is located;

[0141] Step 106, collecting the temperature value of the temperature sensor through the temperature measuring circuit; if the temperature value is less than the lower temperature threshold, the heating circuit of the surface where the temperature sensor corresponding to the temperature value is located is controlled to be turned on; if the temperature value is not less than the lower temperature threshold and is greater than the upper temperature threshold, the heating circuit of the surface where the temperature sensor corresponding to the temperature value is located is controlled to be turned off.

[0142] It should be noted that the upper temperature limit is greater than the lower temperature limit. For example, the present invention controls the surface temperature of the three-axis turntable to be stable at 20°C ± 1°C, and the lower temperature threshold can be set to 19°C and the upper temperature threshold to 21°C.

[0143] In a preferred embodiment, in step 104, the resistance value of the electric heating plate is determined by the following method:

[0144] Determine the temperature control range of the sub-region according to the temperature distribution of the sub-region and the target control temperature value;

[0145] The compensation heat is calculated based on the maximum value of the temperature control range;

[0146] The resistance value of the electric heating plate is calculated according to the compensation heat, the number of the electric heating plates in the sub-area and the connection mode of the heating circuit in the sub-area.

[0147] In a preferred embodiment, step 106 further includes:

[0148] If the temperature value is not less than the lower temperature threshold and not greater than the upper temperature threshold, the heating circuit on the surface where the temperature sensor corresponding to the temperature value is located is controlled to reduce the heating power.

[0149] Specifically, the temperature control process uses a single chip microcomputer to output a PWM waveform to adjust the power of the electric heating plate to achieve coarse and fine temperature adjustment.

[0150] In a preferred embodiment, after step 106, the method further includes:

[0151] The current of each heating circuit is collected through a current sampling circuit;

[0152] Determine whether the current is greater than a preset current threshold;

[0153] If the judgment result is yes, the heating circuit corresponding to the current is controlled to reduce the heating power.

[0154] In the present invention, during the operation of the heating circuit, the current sampling circuit transmits the current information during operation to the control module, thereby forming a feedback system with the power control circuit to prevent excessive current from burning the circuit.

[0155] In the present invention, an independent closed-loop real-time temperature control system is formed based on the three-axis turntable temperature control device under the vacuum environment, ensuring that the three-axis turntable body can work normally in an ambient temperature of -173°C.

[0156] In a specific embodiment, Figure 2 The temperature field of the three-axis turntable shown in the figure is as follows when it is in a cold static state (i.e., all the equipment in the system is not powered, it is covered with multiple layers of thermal insulation materials, but the active temperature control is not turned on). Fig.11 As shown in the figure, it can be seen that the overall temperature is basically symmetrically distributed about the YZ plane, and the overall temperature is lower than the thermal control requirement (20℃±1℃), so an active heating circuit is required. Figures 3 to 9 A temperature control device for a three-axis turntable in a vacuum environment (hereinafter referred to as the temperature control device) is installed. According to the test state and working conditions of the three-axis turntable in the vacuum tank, two working conditions, extreme high temperature and extreme low temperature, are selected for thermal analysis of the system:

[0157] (1) Extreme high temperature conditions: Figure 2 The four motors A, B, C, and D work simultaneously and continuously for 90 hours. The temperature of the equipment to be tested on the table is 60°C, the temperature of the bracket is 25°C, and the temperature control device is working;

[0158] (2) Extreme low temperature conditions: All motors are not working, the temperature of the equipment to be tested on the table is -50°C, the temperature of the bracket is 0°C, and the temperature control device is working.

[0159] After arranging the heating circuit, coating with multiple layers of materials and reserving the heat dissipation surface according to the above scheme, the temperature distribution of the whole and each structure under the extremely low temperature condition when the thermal control is fully implemented is as follows Fig.12 As shown in the figure, under the combined effect of the heat dissipation surface and the active heating of the heating circuit, except for the counterweight and the cap which have no active thermal control measures and have a lower temperature, the overall temperature level of the turntable can be maintained at 20°C. The simulation results show that the above temperature control scheme can meet the temperature control requirements under low temperature conditions.

[0160] Similarly, under extremely high temperature conditions, the temperature distribution of the whole and each structure when thermal control is fully implemented is as follows: Fig.13As shown in the figure, under the combined effect of the active heating of the heat dissipation surface and the heating circuit, except for the low temperature of the counterweight and the cap without active thermal control measures, the overall temperature level of the turntable can also be maintained at 20°C. The simulation results show that the above temperature control scheme can meet the temperature control requirements under high temperature conditions.

[0161] like Fig.14 As shown, the embodiment of the present invention provides another three-axis turntable temperature control device in a vacuum environment. The device embodiment can be implemented by software, or by hardware or a combination of software and hardware. From the hardware level, Fig.14 As shown, it is a hardware architecture diagram of a computing device where another three-axis turntable temperature control device in a vacuum environment is located according to an embodiment of the present invention. Fig.14 In addition to the processor, memory, network interface, and non-volatile memory shown, the computing device where the apparatus in the embodiment is located may generally include other hardware, such as a forwarding chip responsible for processing messages, and the like.

[0162] The information interaction, execution process and other contents between the modules in the above-mentioned device are based on the same concept as the embodiment of the method of the present invention. For the specific contents, please refer to the description in the embodiment of the method of the present invention, and no further description is given here.

[0163] An embodiment of the present invention further provides a computing device, including a memory and a processor, wherein the memory stores a computer program, and when the processor executes the computer program, a temperature control method for a three-axis turntable in a vacuum environment according to any embodiment of the present invention is implemented.

[0164] An embodiment of the present invention further provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the processor executes a temperature control method for a three-axis turntable in a vacuum environment in any embodiment of the present invention.

[0165] Specifically, a system or device equipped with a storage medium can be provided, on which software program code that implements the functions of any of the above-mentioned embodiments is stored, and a computer (or CPU or MPU) of the system or device can read and execute the program code stored in the storage medium.

[0166] In this case, the program code itself read from the storage medium can realize the function of any one of the above-mentioned embodiments, and thus the program code and the storage medium storing the program code constitute a part of the present invention.

[0167] The storage medium embodiments for providing the program code include a floppy disk, a hard disk, a magneto-optical disk, an optical disk (such as CD-ROM, CD-R, CD-RW, DVD-ROM, DVD-RAM, DVD-RW, DVD+RW), a magnetic tape, a non-volatile memory card, and a ROM. Alternatively, the program code can be downloaded from a server computer by a communication network.

[0168] Computer-readable signal media may include data signals propagated in baseband or as part of a carrier wave, which carry computer-readable program code. Such propagated data signals may take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. Computer-readable signal media may also be any computer-readable medium other than a computer-readable storage medium, which may send, propagate, or transmit a program for use by or in conjunction with an instruction execution system, system, or device.

[0169] The program code embodied on the computer readable medium may be transmitted using any appropriate medium, including but not limited to wireless, wireline, optical fiber cable, RF, etc., or any suitable combination of the foregoing.

[0170] Computer program code for performing the operations of the present invention may be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages ​​such as Java, Smalltalk, C++, and conventional procedural programming languages ​​such as "C" or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, as a separate software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., through the Internet using an Internet service provider).

[0171] In addition, it should be clear that the functions of any of the above embodiments can be implemented not only by executing the program code read by the computer, but also by enabling an operating system operating on the computer to complete part or all of the actual operations based on instructions from the program code.

[0172] In addition, it can be understood that the program code read from the storage medium is written to a memory provided in an expansion board inserted into the computer or to a memory provided in an expansion module connected to the computer, and then based on the instructions of the program code, a CPU installed on the expansion board or expansion module is enabled to perform part or all of the actual operations, thereby realizing the functions of any of the above-mentioned embodiments.

[0173] It should be noted that, in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "comprise a ..." do not exclude the presence of other identical factors in the process, method, article or device including the elements.

[0174] A person of ordinary skill in the art can understand that all or part of the steps of implementing the above method embodiments can be completed by hardware related to program instructions, and the aforementioned program can be stored in a computer-readable storage medium. When the program is executed, it executes the steps of the above method embodiments; and the aforementioned storage medium includes: ROM, RAM, magnetic disk or optical disk, etc., various media that can store program codes.

[0175] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A temperature control device for a three-axis turntable in a vacuum environment, applied to a three-axis turntable in a vacuum environment, characterized in that: include: Heating circuit, power control circuit, temperature measurement circuit, temperature sensor and control module; The heating circuit is composed of a plurality of electrically connected electric heating plates; the heating circuit is arranged on the surface of the three-axis turntable, and different heating circuits are arranged at different positions on the surface; wherein at least one temperature sensor is arranged on the surface where each heating circuit is located; The temperature measurement circuit is connected to the temperature sensor and the control module respectively; the temperature measurement circuit is used to obtain the temperature value of the temperature sensor; The power control circuit is connected to the heating circuit and the control module respectively; the power control circuit is used to obtain the power of each heating circuit; The control module is used to send a control instruction to the power control circuit according to the power and / or the temperature value, so that the power control circuit controls each of the heating circuits to be turned on or off.

2. The device according to claim 1, characterized in that The three-axis turntable includes a support, a base, an outer frame, a middle frame and a table top from bottom to top; The surface of the pillar is provided with 3 to 6 heating circuits; One to three heating circuits are arranged on the surface of the base; 4 to 9 heating circuits are arranged on the surface of the outer frame; 3 to 7 heating circuits are arranged on the surface of the middle frame; The surface of the table top is provided with 3 to 6 heating circuits.

3. The device according to claim 1, characterized in that The three-axis turntable includes a support, a base, an outer frame, a middle frame and a table top from bottom to top; The surface of the pillar is provided with four heating circuits; The surface of the base is provided with two heating circuits; The surface of the outer frame is provided with seven heating circuits; The surface of the middle frame is provided with five heating circuits; The surface of the table top is provided with four heating circuits.

4. The device according to claim 3, characterized in that The table top is connected to the middle frame via a first axis arranged at the bottom of the middle frame; the outer frame is connected to both ends of the middle frame via a second axis and a third axis respectively; the base is provided with a fourth axis, which passes through the bottom of the outer frame to achieve the connection between the outer frame and the base; the pillar is connected to the base; the outer frame and the middle frame are both U-shaped; Dividing the U-shaped outer frame into a first area connected to the second axis, a second area connected to the third axis, a third area below the second axis, a fourth area below the third axis, a fifth area connected to the fourth axis, a sixth area between the third area and the fifth area, and a seventh area between the fourth area and the fifth area; A first heating circuit consisting of five electric heating sheets connected in series is arranged on the surface of the first area and the second area; In the third area and the fourth area, a first sub-heating circuit consisting of two electric heating sheets in series is arranged on the front end surface and the rear end surface of each area, and the first sub-heating circuit is connected in parallel to obtain a second heating circuit; A second sub-heating circuit consisting of three electric heating plates connected in series is arranged on the front end surface and the rear end surface of the fifth region, and the second sub-heating circuit is connected in parallel to obtain a third heating circuit; In the sixth area and the seventh area, an electric heating sheet is disposed on the front end surface and the rear end surface of each area, and the electric heating sheets are connected in parallel to obtain a fourth heating circuit; Preferably, the U-shaped middle frame is divided into an eighth area connected to the second axis, a ninth area connected to the third axis, a tenth area below the second axis, an eleventh area below the third axis, and a twelfth area connected to the first axis; In the eighth region and the ninth region, a third sub-heating circuit consisting of three electric heating plates in series is arranged on the front end surface and the rear end surface of each region, and the third sub-heating circuit is connected in parallel to obtain a fifth heating circuit; In the tenth region and the eleventh region, an electric heating sheet is disposed on the front end surface and the rear end surface of each region, and the electric heating sheets are connected in parallel to obtain a sixth heating circuit; An electric heating sheet is disposed on the front end surface and the rear end surface of the twelfth region, and the electric heating sheets are connected in parallel to obtain a seventh heating circuit; and / or, The heating circuit of the pillar is evenly distributed along the circumferential wall surface, and the heating circuit is composed of 6 electric heating plates connected in series; The heating circuit of the base is evenly distributed along the circumferential wall surface, and the heating circuit is composed of three electric heating plates connected in series; The table top is divided into four sectors, and a heating circuit is arranged on the surface of each sector, and the heating circuit is composed of two electric heating plates connected in series.

5. The device according to any one of claims 1 to 4, characterized in that It also includes a current sampling circuit; the current sampling circuit is connected to the power control circuit and the control module respectively; the current sampling circuit is used to collect the current of the heating circuit connected to the power control circuit, and the control module is used to send a control instruction to the power control circuit according to the current, so that the power control circuit controls each of the heating circuits to be turned on or off.

6. The device according to any one of claims 1 to 4, characterized in that The surface of the heating circuit is coated with a heat-insulating material; preferably, the heat-insulating material is obtained by alternatingly stacking polyimide film and polyester fiber mesh or by alternatingly stacking polyethylene terephthalate and polyester fiber mesh; more preferably, the surface of the heat-insulating material is subjected to black oxidation treatment.

7. The device according to claim 4, characterized in that The surface of the outer frame corresponding to the second axis and the third axis is provided with a heat dissipation surface; the surface of the base corresponding to the fourth axis is provided with a heat dissipation surface; the heat dissipation surface is not covered with heat insulation material.

8. A method for controlling the temperature of a three-axis turntable in a vacuum environment, based on the device as claimed in any one of claims 1 to 7, characterized in that: include: Obtain the temperature distribution of a three-axis turntable in a vacuum environment; Dividing the surface of the three-axis turntable according to the temperature distribution to obtain a plurality of sub-areas; A heating circuit is arranged in each of the sub-areas, and the number of electric heating plates included in the heating circuit and the resistance value of the electric heating plates are determined, and at least one temperature sensor is arranged on the surface where each heating circuit is located; Collecting the temperature value of the temperature sensor through a temperature measurement circuit; If the temperature value is less than the lower temperature threshold, the heating circuit on the surface where the temperature sensor corresponding to the temperature value is located is controlled to be turned on; If the temperature value is not less than the lower temperature threshold and is greater than the upper temperature threshold, the heating circuit on the surface where the temperature sensor corresponding to the temperature value is located is controlled to be disconnected.

9. The method according to claim 8, characterized in that The resistance value of the electric heating plate is determined by the following method: Determining a temperature control range of the sub-region according to the temperature distribution of the sub-region and the target control temperature value; The compensation heat is calculated according to the maximum value of the temperature control range; The resistance value of the electric heating plate is calculated according to the compensation heat, the number of the electric heating plates in the sub-area and the connection mode of the heating circuit in the sub-area.

10. The method according to claim 8 or 9, characterized in that: Also includes: If the temperature value is not less than the lower temperature threshold and not greater than the upper temperature threshold, then controlling the heating circuit on the surface where the temperature sensor corresponding to the temperature value is located to reduce the heating power; and / or, Collecting the current of each heating circuit through a current sampling circuit; Determining whether the current is greater than a preset current threshold; If the judgment result is yes, the heating circuit corresponding to the current is controlled to reduce the heating power.

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