Maxwell electromagnetic two-axis positioning platform equipment and working method thereof

Abstract

The invention discloses Maxwell electromagnetic two-axis positioning platform equipment and a working method thereof.The Maxwell electromagnetic two-axis positioning platform equipment comprises a motion platform, a guide mechanism and a driving mechanism, the driving mechanism comprises a stator, a coil and a rotor, the stator is provided with two driving sets, and the first driving set comprises two stator arms arranged in the first direction; the first driving group comprises two stator arms arranged along a first direction, the second driving group comprises two stator arms arranged along a second direction, the first driving group and the second driving group both form a U-shaped magnetic flux loop, a stator is of a double-U-shaped crossed structure to ensure compactness, a mover is arranged in a movable area enclosed by the stator arms, the mover is in driving connection with the motion platform and is in guide fit with the guide mechanism, and each driving group is wound with a coil. The positioning platform has the advantages of high integration level, light weight, large stroke and the like, direct-current bias magnetic flux generated by the permanent magnets only passes through the side face of the rotor in the movement direction, magnetic disturbance force cannot be generated in the non-movement direction, parasitic movement in the non-movement direction is avoided, and the comprehensive performance of positioning platform equipment is improved.

Description

Technical Field

[0001] The present invention relates to the field of precision drive technology, and in particular to a Maxwell electromagnetic two-axis positioning platform device and a working method thereof. Background Art

[0002] With the development of ultra-precision manufacturing, the manufacturing accuracy of parts has reached the nanometer level. At the same time, in order to meet the needs of nano-processing, corresponding nano-level metrology equipment has also emerged, such as nano-level positioning platform equipment. Through its nano-level positioning accuracy and resolution, and scanning and other methods, it can detect the size, surface quality, etc. of the parts placed on it. The driving modes of these nano-positioning platforms are mainly divided into electromagnetic force drive (such as Lorentz force shear stress electromagnetic drive, Maxwell normal stress electromagnetic drive) and intelligent material drive (such as piezoelectric drive, magnetostrictive drive).

[0003] Taking smart material drive as an example, although piezoelectric drive has the properties of small size, high force density, high stiffness, high bandwidth, and high motion resolution, the travel range is limited due to the characteristics of the piezoelectric material itself, usually a few tens of microns. If a flexible hinge amplification mechanism is used to increase the piezoelectric travel, the overall motion mass will increase and the motion frequency will be reduced. The performance of magnetostrictive drive is not higher than that of piezoelectric drive, so it has not been widely used in the field of micro-nano drive.

[0004] Taking electromagnetic force drive as an example, although the nanopositioning platform driven by shear stress electromagnetic drive of voice coil motor can reach the millimeter level, it has low force density, low bandwidth, and low energy utilization, and cannot meet the use requirements of nanopositioning platforms with a stroke of tens or even hundreds of microns; while Maxwell normal stress electromagnetic drive, although the introduction of permanent magnetic bias flux forms a linear relationship between driving force and driving current and displacement, can better control precision motion, and has advantages such as high force density and large stroke (hundreds of microns), but when driving multi-axis motion, it is generally just a simple combination and superposition of traditional single-axis drive units, which also greatly increases the motion mass and the overall volume of the device, resulting in a decrease in the performance of the platform such as stroke and frequency. In addition, the introduction of permanent magnetic bias flux will exert a coupling magnetic interference force in the non-movement direction, generate parasitic motion in the non-movement direction, and thus interfere with the normal scanning detection results in the main motion direction.

[0005] In summary, the structure of the nanopositioning platform in the related art cannot take into account long travel, light weight and high integration at the same time, and the overall comprehensive performance of the nanopositioning platform needs to be improved. Summary of the invention

[0006] The object of the present invention is to provide a Maxwell electromagnetic two-axis positioning platform device and a working method thereof, so as to solve the problem that the positioning platform in the related art cannot simultaneously meet the requirements of large stroke, high motion bandwidth, high integration and no Z-direction vertical parasitic motion.

[0007] The technical solution adopted by the present invention is: a Maxwell electromagnetic two-axis positioning platform device, comprising a motion platform, a driving mechanism and a guiding mechanism, wherein the motion platform is used to place the parts to be detected, the driving mechanism is used to drive the motion platform, and the guiding mechanism is used to constrain the motion path of the motion platform so that the motion platform can only move in the horizontal direction.

[0008] The driving mechanism includes a first direction stator, a second direction stator, a coil, a mover and a permanent magnet. The first direction stator and the second direction stator are both provided with coils. The first direction stator has a first substrate, the first substrate includes a first through hole in the center, and two first stator arms are protruded from the first end surface of the substrate. The second direction stator has a second substrate, the second substrate includes a second through hole in the center, and two second stator arms are protruded from the first end surface of the second substrate. A space is enclosed between the two first stator arms and the two second stator arms. The mover is movably arranged in the space. The motion platform is connected to the upper surface of the mover. The first direction stator is installed on the upper part of the second direction stator. The permanent magnet is arranged between the first direction stator and the second direction stator.

[0009] The guide mechanism passes through the second through hole and the first through hole from bottom to top and is connected to the bottom surface of the mover.

[0010] Furthermore, the first direction stator further includes first protrusions located on all sides, the second direction stator further includes second protrusions located on all sides, and the permanent magnets include four pieces, which are respectively arranged between the first protrusions and the second protrusions on all sides.

[0011] Furthermore, the guide mechanism is composed of four symmetrical straight circular flexible hinges of the same size, forming a parallelogram flexible hinge structure with two degrees of freedom, thereby realizing the constraint of the two-axis motion path of the mover.

[0012] Furthermore, it also includes a base, and the guide mechanism is fixedly connected to the mounting groove in the center of the base.

[0013] Furthermore, coils are wound around the two first stator arms and the two second stator arms.

[0014] Furthermore, it also includes a mounting shell, the bottom of which is mounted on the base and accommodates and wraps the entire driving mechanism. The upper surface of the mounting platform is provided with a receiving hole, and the motion platform passes through the receiving hole.

[0015] Furthermore, it also includes a first displacement sensor and a second displacement sensor. The mounting platform is provided with a first mounting hole and a second mounting hole. The first displacement sensor and the second displacement sensor are respectively arranged in the first mounting hole and the second mounting hole.

[0016] Further, the two first stator arms are arranged in sequence along the first direction, and the two second stator arms are arranged in sequence along the second direction, and the first direction and the second direction intersect.

[0017] Furthermore, the first direction and the second direction are perpendicular.

[0018] A working method according to the above-mentioned Maxwell electromagnetic two-axis positioning platform device,

[0019] After the coil is energized, an alternating magnetic flux with changing direction and magnitude is generated on the side surface of the mover along the first and second directions, and the directions of the alternating magnetic flux entering and exiting the side surface of the mover are consistent. The magnet generates a bias magnetic flux with constant magnitude and direction on the side surface of the mover along the first and second directions, and the directions of the bias magnetic flux entering and exiting the side surface of the mover are opposite, thereby generating a difference in magnetic induction intensity on the side surface of the mover along the first and second directions. In this case, two Maxwell electromagnetic driving forces are generated on the mover along the first and second directions. Under the constraint of the guide mechanism, the mover generates horizontal motion in the first and second directions, driving the motion platform to move along the first and second directions. By changing the magnitude and direction of the current in the coil, the magnitude and direction of the driving force in the first and second directions can be changed, thereby controlling any motion of the mover in the horizontal plane.

[0020] Compared with the prior art, the beneficial effects of the present invention are as follows: the present application optimizes the structure of the positioning platform device, specifically, a driving mechanism including a stator, a coil and a mover is set, the stator has two groups of driving groups, the first group of driving groups includes two stator arms arranged along the first direction, the second group of driving groups includes two stator arms arranged along the second direction, the first group of driving groups forms a U-shaped magnetic flux loop, the second group of driving groups also forms a U-shaped magnetic flux loop, the stator has a double U-shaped cross structure to ensure compactness, a mover is arranged in an active area surrounded by four stator arms, the driving mechanism is connected to the motion platform through the mover drive, and coils are wound in each group of driving groups, so that, by adopting a double U-shaped cross structure of the stator, it is possible to realize that when different coils are selected to be energized, the mover can be electromagnetically driven to move in the first direction or the second direction in the active area, thereby realizing the movement of the motion platform in the first direction or the second direction;

[0021] In terms of the way in which the driving mechanism realizes multi-axis motion, in the present application, the stator is set to a double U-shaped cross structure, and the stator and the mover cooperate with each other to form an electromagnetic driving mechanism, thereby replacing the driving mechanism formed by simply superimposing multiple single-axis driving mechanisms in the related art. The structure of the driving mechanism in the present application can be simplified, thereby improving the compactness of the positioning platform equipment, and reducing the mass and volume of the positioning platform equipment. At the same time, this electromagnetic driving method can make the positioning platform stroke reach ±200 microns, so that the positioning platform equipment has a good balance of advantages such as lightweight, high integration, and large stroke, thereby improving the comprehensive performance of the positioning platform equipment. In addition, the guiding mechanism in the present application directly provides high-rigidity support for the motion platform in the vertical direction, and there is no coupled permanent magnet interference force in the vertical motion direction, which is smaller than the two-dimensional electromagnetic drive positioning platform in the related art. The vertical parasitic motion is smaller.

[0022] In addition to the above-described purposes, features and advantages, the present invention has other purposes, features and advantages. The present invention will be further described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Overall structural diagram of the positioning platform device of the present invention.

[0024] Figure 2 Internal structure diagram of the positioning platform device of the present invention.

[0025] Figure 3 Schematic diagram of the driving mechanism structure of the present invention.

[0026] Figure 4 Schematic diagram of the stator structure in the first direction of the driving mechanism of the present invention.

[0027] Figure 5 Schematic diagram of the stator structure in the second direction of the driving mechanism of the present invention.

[0028] Figure 6 Schematic diagram of the permanent magnet flux path of the drive mechanism of the present invention.

[0029] Figure 7 Driving principle diagram of the driving mechanism of the present invention.

[0030] Figure 8 Schematic diagram of the guide mechanism assembly of the present invention.

[0031] Fig. 9 Schematic diagram of the guide mechanism structure of the present invention.

[0032] Fig.10 Schematic diagram of the base structure of the present invention.

[0033] Fig.11 Schematic diagram of the housing structure of the present invention. DETAILED DESCRIPTION

[0034] The specific implementation modes of the present invention are described in detail below with reference to the accompanying drawings.

[0035] Please refer to Figures 1 to 11 The positioning platform device disclosed in the present application can be a nano-level positioning platform used in the field of ultra-precision manufacturing. The platform is used as a metrology device and can be used for the inspection of parts after fine processing. The following is a detailed description.

[0036] The positioning platform device of the present application includes a motion platform 500, a driving mechanism 400 and a guiding mechanism 700, wherein the motion platform 500 can be used to place the parts to be inspected, and the driving mechanism 400 can be used to drive the motion platform 500, so that the parts to be inspected can move with the motion platform 500, and in the process of this movement, in combination with detection methods such as laser scanning, the size, shape and position tolerance, etc. of the parts to be inspected can be detected.

[0037] like Figure 2 and Figure 3 As shown, the driving mechanism 400 includes a first direction stator 410, a second direction stator 420, a coil 430 and a mover 440.

[0038] The stators 410 and 420 are the installation base of the entire driving mechanism 400 and can provide installation positions for other parts. The coil 430 and the mover 440 are arranged on the stators 410 and 420. The stators 410 and 420 and the mover 440 can be connected by electromagnetic driving. The coil 430 is the conversion medium between the electric field and the magnetic field.

[0039] Specifically, if Figure 4 and Figure 5 As shown, the stator 410 has an "I-shaped" base plate 412, the base plate 412 includes a central square through hole 413 and surrounding protrusions 414, and two stator arms 411 are protruded from the first end surface of the base plate. The stator 420 also has a base plate 421, the base plate 421 includes a central square through hole 423 and surrounding protrusions 424, and two stator arms 422 are protruded from the first end surface of the base plate 421, and the stator arms 422 are positioned and fixedly connected through the notches on the base plate 421. The four stator arms 411 and 422 surround an active area, and the mover 440 is movably arranged in the active area. The driving mechanism 400 is driven by the mover 440 to connect to the motion platform 500.

[0040] The stator arms 411 and 422 are arranged in pairs to form two drive groups, and the two stator arms 411 in the first drive group are arranged in sequence along the first direction X. The two stator arms 422 in the second drive group are arranged in sequence along the second direction Y. The first direction X and the second direction Y intersect, so that the motion platform 500 can move in two different directions.

[0041] Each driving group is wound with a coil 430. When the coil 430 is energized, the mover 440 can move in the first direction X or the second direction Y in the active area. Specifically, when the coil 430 disposed in the first driving group is energized, under the action of electromagnetic induction, a magnetic driving force along the first direction X will be generated between the two stator arms 411 in the first driving group, and the magnetic driving force will drive the mover 440 to move along the first direction X, thereby allowing the motion platform 500 to move along the first direction X with the mover 440; when the coil 430 disposed in the second driving group is energized, under the action of electromagnetic induction, a magnetic driving force along the second direction Y will be generated between the two stator arms 422 in the second driving group, and the electromagnetic driving force will drive the mover 440 to move along the second direction Y, thereby allowing the motion platform 500 to move along the second direction Y with the mover 440.

[0042] It can be seen that the plane defined by the first direction X and the second direction Y is the motion plane of the motion platform 500. Through the electromagnetic drive between the driving mechanism 400 and the motion platform 500, the motion platform 500 can be moved along the first direction X or the second direction Y, and after the motions of the motion platform 500 in two different directions are synthesized, it can be moved to any desired position in the motion plane, thereby realizing the detection of the parts to be detected placed on the motion platform 500.

[0043] In summary, compared with the setting method of realizing multi-axis motion by simply superimposing multiple single-axis drive mechanisms in the related art, the device of the present application optimizes the structure of the stators 410 and 420, such as setting the stators 410 and 420 as a double U-shaped structure, so that the four stator arms thereon are grouped in pairs to form drive groups located in different directions, so that the drive mechanism 400 forms an electromagnetic drive mechanism that can realize multi-axis motion, so that the stators 410 and 420 can drive the mover 440 to move in different directions, thereby realizing the multi-axis motion of the motion platform 500. This setting method will improve the compactness of the drive mechanism 400, thereby greatly reducing the mass and volume of the positioning platform device of the present application. This electromagnetic drive method can make the stroke of the positioning platform reach ±200 microns. Compared with the related art, the positioning platform device of the present application can well take into account the advantages of high integration, light weight and large stroke, and the comprehensive performance of the positioning platform device is greatly improved.

[0044] For the specific azimuth layout of the first direction X and the second direction Y, the first direction X can be perpendicular to the second direction Y. This perpendicular layout allows the first direction X and the second direction Y to cooperate with each other to form a plane coordinate system. The preset position of the control motion platform 500 is the origin of the plane coordinate system. The relative position that the control motion platform 500 needs to reach can be expressed in the form of coordinate points in the coordinate system. This setting method is more conducive to controlling the movement of the motion platform 500, thereby ensuring the required detection accuracy of the parts to be tested.

[0045] like Figure 3 As shown, the driving mechanism 400 also includes four permanent magnets 450, which are arranged between four protrusions 414, 424 around the stator 410, 420 substrates 412, 421, and are clamped between the first direction and second direction stator 410, 420 substrates along the vertical direction of the substrate end surface to separate the first and second direction stator substrates.

[0046] The arrangement of the magnet 450 can further ensure the motion accuracy, and its principle is described in detail below:

[0047] like Figure 6 and Figure 7 As shown, taking the movement of the mover 440 in the first direction X as an example, when the coil 430 at the corresponding position is energized, an AC magnetic flux will be formed between the two stator arms 411 in the first drive group, and the magnetic induction intensity of this AC magnetic flux is B1, and the DC magnetic flux generated by the four magnets 450 from the N level will flow from the stator 410 substrate into the two stator arms 411, and pass through the air gap between the stator arm 411 and the mover 440 into the mover 440, and then flow from the mover 440 through the air gap between the stator arm 422 and the mover 440, and finally flow into the stator substrate 421 along the stator arm 422 and return to the permanent magnet S level.

[0048] It can be seen that the DC magnetic flux generated by the magnet 450 converges into the two side surfaces of the mover 440 along the first and second movement directions, and does not pass through the upper and lower surfaces of the mover 440, so no coupled interference magnetic force is generated in the upper and lower directions of the mover 440, thereby avoiding parasitic movement in the upper and lower directions to improve the scanning detection accuracy.

[0049] The magnet 450 generates a DC magnetic flux in the air gap between the stator arm 411 and the mover 440. The magnetic induction intensities generated by the magnet 450 in the gaps between the two stator arms 411 and the mover 440 are recorded as B2 and B3 respectively. It can be seen that the direction of the AC magnetic flux is consistent with the direction of one of the DC magnetic fluxes and opposite to the direction of the other DC magnetic flux. For example, B1 is consistent with B2 in direction, and B1 is opposite to B3 in direction. In this way, the magnetic fluxes on one side of the mover 440 are superimposed on each other, that is, the magnetic flux B=B1+B2 on one side, and the magnetic flux B′=B1-B3 on the other side cancel each other out, that is, the magnetic flux B′=B1-B3 on the other side. In this way, a difference in magnetic induction intensity is generated on both sides of the mover 440, that is, the difference T=BB′=B2+B3. In this case, the first direction will generate a Maxwell electromagnetic driving force on the mover 440. Under the constraint of the guide mechanism 700, the mover 440 generates horizontal movement in the first direction to drive the motion platform 500 to move along the first direction. The movement principle in the second direction is the same. By changing the magnitude and direction of the current in the coil 430 , the magnitude and direction of the driving force in the first and second directions can be changed, thereby controlling any movement of the mover 440 in the XY plane.

[0050] Under this driving mode, the setting of the magnet 450 can better control the magnetic driving force required for the movement of the mover 440, and the DC magnetic flux generated by the magnet 450 can make the driving force and the driving current, as well as the driving force and the displacement of the mover 440, have a linear relationship, thereby better controlling the movement accuracy of the device of the present application.

[0051] like Figure 2 and Figure 3 As shown, the mover 440 is provided with a first driving pole face and a second driving pole face, wherein the first driving pole face is located between two stator arms 411 arranged in sequence along the first direction X, so that the two stator arms 411 along the first direction X can generate a magnetic driving force on the first driving pole face, thereby driving the mover 440 to move along the first direction X; and the second driving pole face is located between two stator arms 422 arranged in sequence along the second direction Y, so that the two stator arms 422 along the second direction Y can generate a magnetic driving force on the second driving pole face, thereby driving the mover 440 to move along the second direction Y. With the arrangement of the first driving pole face and the second driving pole face in the mover 440, the magnetic driving force can drive the mover 440 in a surface driving manner, and the driving manner is more stable, thereby making it easier to control the motion trajectory of the motion platform 500 and the motion accuracy that can be achieved.

[0052] The first driving pole surface can be perpendicular to the first direction X. This design in which the magnetic driving force and the driven surface are perpendicular to each other can make the force density of the first driving pole surface, that is, the driving force per unit area of ​​the first driving pole surface, reach the maximum value. The two stator arms 411 arranged along the first direction X will drive the mover 440 to move in a positive stress driving manner, and the driving method is more effective and reasonable. Similarly, the second driving pole surface can also be arranged perpendicular to the second direction Y, which will not be described in detail here.

[0053] Two first driving pole faces and two second driving pole faces can be provided, the two first driving pole faces are provided on opposite sides of the mover 440, the two second driving pole faces are also provided on opposite sides of the mover 440, the first driving pole faces and the second driving pole faces are provided alternately, and the two first driving pole faces and the two second driving pole faces form a closed annular surface, and this arrangement of the mover 440 can further improve the driving effect.

[0054] The mover 440 may be configured as a cube, that is, adjacent first driving pole surfaces and second driving pole surfaces are perpendicular to each other, so as to facilitate the processing and manufacturing of the mover 440 and the installation of the driving mechanism 400 .

[0055] Each stator arm 411 is wound with a coil 430. Specifically, two stator arms 411 arranged along the first direction X are wound with a coil 430, and two stator arms 422 arranged along the second direction Y are wound with a coil 430. Such an arrangement will generate a greater magnetic induction intensity, thereby more effectively driving the mover 440 to move. It should also be pointed out that the two stator arms 411 in the same drive group are wound with coils 430, which can ensure that the air gap magnetic flux density generated on both sides of the mover 440, that is, between the mover 440 and the stator arm 411, can be as equal as possible, thereby ensuring the symmetry of the magnetic circuit and driving the mover 440 more smoothly.

[0056] like Figure 8 and Fig. 9 As shown, the guide mechanism 700 can be used to constrain the motion path of the motion platform 500 .

[0057] Specifically, the guide mechanism 700 is connected to the mover 440, and the mover 440 is guided and matched with the guide mechanism 700. In this way, under the constraint of the guide mechanism 700, the mover 440 can maintain movement along the first direction X and the second direction Y, thereby avoiding abnormalities such as deflection during the movement process, thereby ensuring the movement accuracy of the motion platform 500.

[0058] As for the specific structure of the guide mechanism 700, it is mainly composed of four symmetrical straight circular flexible hinges 710 of the same size, forming a two-degree-of-freedom parallelogram flexible hinge structure, thereby realizing the two-axis motion path constraint of the mover 440. In the present application, the flexible branch chain can undergo corresponding deformation as the position of the mover 440 changes, thereby generating an elastic deformation force to realize the path constraint of the mover 440.

[0059] The flexible branched chain structure of the guide mechanism 700 is elastically bent and deformed, so it can be reset in a non-stressed state, and thus the mover 440 can be restored from the current position to the preset position after the movement is completed, so as to be ready for the next use.

[0060] The two-degree-of-freedom parallelogram flexible guide mechanism 700 composed of a straight circular flexible hinge 710 can be fixedly connected to a central mounting groove 310 of a base 300. The guide mechanism 700 is inserted into the central square through holes 413 and 423 of the two stator 410 and 420 substrates, and its upper end face is fixedly connected to the lower end face of the mover. It can be seen that since the parallelogram hinge structure can be elastically deformed as the position of the motion platform 440 changes, then after the mover 440 finishes deforming, the mover 440 can be reset along with the reset of the two-way quadrilateral hinge structure, that is, the mover 440 is restored from the current position to the preset position.

[0061] like Figure 1 and Figure 2 As shown, the positioning platform device also includes a base 300, which can be used as the installation base for other components of the entire positioning platform device. Specifically, the base 300 can be provided with a first installation surface, the first installation surface is concavely provided with a mounting groove 320, the second direction stator 420 is embedded in the mounting groove 320, the base 300 can be provided with a mounting flange 330, the first direction stator 410 is embedded in the mounting flange 330, and the motion platform 500 is provided on the side of the driving mechanism 400 away from the first installation surface. This structure can ensure the position stability of the driving mechanism 400 in the positioning platform device.

[0062] The stators 410 and 420 can be arranged in an intersecting cross installation layout, and the four stator arms 411 and 422 can be arranged at the ends of each stator substrate, that is, the two stator arms 411 in the first direction X and the stator 410 substrate 412 form a "U"-shaped magnetic flux circuit, which is recorded as the first magnetic flux circuit, and the mover 440 is at the opening position of the "U"-shaped first magnetic flux circuit; and the two stator arms 422 in the second direction Y and the other stator 420 substrate 421 form another "U"-shaped magnetic flux circuit, which is recorded as the second magnetic flux circuit, and the mover 440 is also at the opening position of the "U"-shaped second magnetic flux circuit. The arrangement of the first magnetic flux circuit and the second magnetic flux circuit makes the appearance of the drive mechanism 400 present a double "U"-shaped cross structure, which can make the structure of the drive mechanism 400 more compact. At the same time, a mounting groove 320 is provided on the base 300 so that the I-shaped bases of the stators 410 , 420 can be embedded in the mounting groove 320 and the mounting flange 330 .

[0063] The positioning platform device also includes a mounting shell 100. The bottom of the mounting shell is mounted on the base 300 and the driving mechanism 400 is contained and wrapped therein as a whole. The mounting platform 100 may be provided with a receiving hole 110. The mounting shell 100 is sleeved on the motion platform 500 through the receiving hole 110, so that the motion range of the motion platform 500 will be further limited to the area surrounded by the receiving hole 110. Through this arrangement, the mounting platform 100 can provide peripheral protection for the motion platform 500 to prevent it from being damaged by bumps.

[0064] like Figure 1 As shown, the positioning platform device may also include a first sensor 200 and a second sensor 600. The first sensor 200 and the second sensor 600 are both fixedly mounted on the mounting platform 100, and the first sensor 200 and the second sensor 600 may further ensure the motion accuracy of the device of the present application. Specifically, the first sensor 200 may be arranged in sequence with the motion platform 500 along the first direction X, so that the first sensor 200 may ensure the position accuracy of the motion platform 500 in the first direction X by detecting the relative distance between the first sensor 200 and the motion platform 500, and the second sensor 600 may be arranged in sequence with the motion platform 500 along the second direction Y, so that the second sensor 600 may ensure the position accuracy of the motion platform 500 in the second direction Y by detecting the relative distance between the second sensor 600 and the motion platform 500.

[0065] For the installation of the first sensor 200 and the second sensor 600, a first installation hole 120 and a second installation hole 130 may be provided on the installation platform 100, and then the first sensor 200 is provided in the first installation hole 120, and the second sensor 600 is provided in the second installation hole 130, for example, by plugging, to ensure the installation firmness of the two.

[0066] The above description is only an advantageous embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A Maxwell electromagnetic two-axis positioning platform device, characterized in that: The invention comprises a motion platform (500), a driving mechanism (400) and a guiding mechanism (700), wherein the motion platform (500) is used to place a part to be inspected, the driving mechanism (400) is used to drive the motion platform (500), and the guiding mechanism (700) is used to constrain the motion path of the motion platform (500) so that the motion platform (500) can only move in a horizontal direction. The driving mechanism (400) comprises a first direction stator (410), a second direction stator (420), a coil (430), a mover (440) and a permanent magnet (450); the first direction stator (410) and the second direction stator (420) are both provided with a coil (430); the first direction stator (410) comprises a first substrate (412); the first substrate (412) comprises a first through hole (413) at the center; two first stator arms (411) are protruding from a first end surface of the substrate; the second direction stator (420) comprises a second substrate (421); the second substrate (4 21) comprises a second through hole (423) in the center, two second stator arms (422) are protrudingly provided on the first end surface of the second substrate (421), a space is enclosed between the two first stator arms (411) and the two second stator arms (422), the mover (440) is movably arranged in the space, the motion platform (500) is connected to the upper surface of the mover (440), the first direction stator (410) is installed on the upper part of the second direction stator (420), and the permanent magnet (450) is arranged between the first direction stator (410) and the second direction stator (420), The guide mechanism (700) passes through the second through hole (423) and the first through hole (413) from bottom to top and is connected to the bottom surface of the mover (440).

2. The Maxwell electromagnetic two-axis positioning platform device according to claim 1, characterized in that: The first direction stator (410) further includes first protrusions (414) located on the periphery, and the second direction stator (420) further includes second protrusions (424) located on the periphery. The permanent magnets (450) include four pieces, and the four permanent magnets (450) are respectively arranged between the first protrusions (414) and the second protrusions (424) located on the periphery.

3. The Maxwell electromagnetic two-axis positioning platform device according to claim 1, characterized in that: The guide mechanism (700) is composed of four symmetrical straight circular flexible hinges 710 of the same size, forming a parallelogram flexible hinge structure with two degrees of freedom, thereby realizing the constraint of the two-axis motion path of the mover (440).

4. The Maxwell electromagnetic two-axis positioning platform device according to claim 3, characterized in that: It also includes a base (300), and the guide mechanism (700) is fixedly connected to the installation groove (310) at the center of the base (300).

5. The Maxwell electromagnetic two-axis positioning platform device according to claim 1, characterized in that: The two first stator arms (411) and the two second stator arms (422) are both wound with a coil (430).

6. The Maxwell electromagnetic two-axis positioning platform device according to claim 4, characterized in that: It also includes a mounting shell (100), the bottom of which is mounted on the base (300) and accommodates and wraps the driving mechanism (400) as a whole, and a receiving hole (110) is provided on the upper surface of the mounting platform (100), and the motion platform (500) passes through the receiving hole (110).

7. The Maxwell electromagnetic two-axis positioning platform device according to claim 6, characterized in that: The device also comprises a first displacement sensor (200) and a second displacement sensor (600); a first mounting hole (120) and a second mounting hole (130) are provided on the mounting platform (100); the first displacement sensor (200) and the second displacement sensor (600) are respectively arranged in the first mounting hole (120) and the second mounting hole (130).

8. The Maxwell electromagnetic two-axis positioning platform device according to any one of claims 1 to 7, characterized in that: The two first stator arms (411) are arranged in sequence along a first direction, and the two second stator arms (422) are arranged in sequence along a second direction, and the first direction and the second direction intersect.

9. The Maxwell electromagnetic two-axis positioning platform device according to claim 8, characterized in that: The first direction is perpendicular to the second direction.

10. A working method of the Maxwell electromagnetic two-axis positioning platform device according to claim 8 or 9, characterized in that: After the coil (430) is energized, an alternating magnetic flux with a changing direction and magnitude is generated on the side surface of the mover (440) along the first and second directions, and the directions of the alternating magnetic flux entering and exiting the side surface of the mover (440) are consistent. The magnet (450) generates a bias magnetic flux with a constant magnitude and direction on the side surface of the mover (440) along the first and second directions, and the directions of the bias magnetic flux entering and exiting the side surface of the mover (440) are opposite, thereby generating a difference in magnetic induction intensity on the side surface of the mover (440) along the first and second directions. In this case, two Maxwell electromagnetic driving forces are generated on the mover (440) along the first and second directions. Under the constraint of the guide mechanism (700), the mover (440) generates horizontal motion in the first and second directions, driving the motion platform (500) to move in the first and second directions. By changing the magnitude and direction of the current in the coil (430), the magnitude and direction of the driving force in the first and second directions can be changed, thereby controlling any motion of the mover (440) in the horizontal plane.

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