Vibration filling process for solid chemicals

Abstract

A system comprising: a container for containing a filling material; and a vibration source connected to the container. The vibration source may increase the bulk density of the fill material. A filler material ratio may be defined as a particle density of the filler material divided by the bulk density of the filler material after vibration. The filler material ratio may be in a range from about 0.15 to about 0.75 after the vibration source increases the bulk density of the filler material.

Description

Technical Field

[0001] The present disclosure relates to the field of processing solid state chemicals. Background Art

[0002] Various systems and methods can be used to process and store solid state chemicals. Summary of the Invention

[0003] The solid chemical delivery system (e.g., solid precursor material delivery system) has a complex structure that improves delivery to the manufacturing tool. The delivery system transfers heat to enhance the sublimation process. The solid chemical delivery system can have a controlled carrier gas flow.

[0004] In some instances, a process for filling a solid delivery ampoule (e.g., a solid delivery ampoule used in a solid precursor material delivery system) with a fill material (e.g., a powder) involves removing a large diameter flange cap and then removing the internal structure / tray inside a glove box and manually measuring and layering the solid back into the solid delivery ampoule.

[0005] As the size of containers (e.g., solid delivery ampoules) increases, handling the fill material and tray can become increasingly difficult. For example, in addition to the container becoming larger, the increase in container size can also include an increase in weight. The increase in weight and size can similarly make the container more difficult to handle as part of a solid chemical delivery system.

[0006] New processes are needed to maximize fill weight and reduce overall labor to make delivery systems, such as solid chemical delivery systems, manufacturable in high volumes.

[0007] One way to reduce the increased size of a container is to increase the amount of solid-state chemical that can be packaged within a given volume. By reducing the amount of volume required to accommodate a given amount of solid-state chemical, a container with a smaller internal volume can be used. In some embodiments, a reduction in the internal volume of the container can result in a corresponding reduction in weight. Alternatively, the container size can remain constant and the amount of solid-state chemical packaged in the container can be increased. In either case, the required container size for a given amount of solid-state chemical can be reduced, thereby reducing the labor required to handle the given amount of solid-state chemical.

[0008] One way to accomplish this is to introduce the fill material (e.g., solid chemical powder) through a single, small-diameter port on the top of the container. Vibration is applied directly to the container to force the solid chemical powder to move through and out of the container. Sufficient time is allowed for the powder to become compacted, thereby increasing the bulk density of the powder by expelling excess air pores and increasing the total fill weight.

[0009] The process of the present disclosure can be used in manufacturing processes, among other processes. One reason the present disclosure can be used in various manufacturing processes is because the filling process does not require removal of the inner container assembly inside the glove box.

[0010] The disclosed process achieves high bulk density, which allows for higher fill weights, thereby meeting important customer needs. High bulk density can be achieved by directly and / or indirectly vibrating the container to increase the density of the powder and improve flowability. Fill times can be achieved quickly by reducing voids in the powder, thereby providing superior results at high fill weights (e.g., in vapor extraction applications).

[0011] In some aspects, the technology described herein relates to a system comprising: a container for holding a fill material; and a vibration source connected to the container, wherein the vibration source is configured to increase the volume density of the fill material, wherein a fill material ratio comprises a particle density of the fill material divided by the volume density of the fill material after vibration, and wherein after the vibration source increases the volume density of the fill material, the fill material ratio may be greater than 0.15, less than 0.75, or within a range from about 0.15 to about 0.75.

[0012] In some aspects, the technology described herein relates to a system wherein the fill material comprises a solid precursor material.

[0013] In some aspects, the technology described herein relates to a system wherein the bulk density of the filler material can be greater than 0.5, less than 2, or in a range from about 0.5 to about 2.

[0014] In some aspects, the technology described herein relates to a system in which the vibration source includes more than one vibration device.

[0015] In some aspects, the technology described herein relates to a system further comprising a funnel.

[0016] In some aspects, the technology described herein relates to a system wherein the funnel is connected to a top portion of the container, and wherein the funnel is configured to direct the fill material into the container.

[0017] In some aspects, the technology described herein relates to a system wherein the container includes a fill port.

[0018] In some aspects, the technology described herein relates to a system wherein the fill material enters the container through the fill port.

[0019] In some aspects, the technology described herein relates to a container comprising: sidewalls and a bottom defining an interior volume; and a solid precursor material contained in the interior volume of the container, wherein a solid precursor material ratio comprises a particle density of the solid precursor material divided by a bulk density of the solid precursor material after vibration, and wherein the solid precursor material ratio may be greater than 0.15, less than 0.75, or within a range from about 0.15 to about 0.75.

[0020] In some aspects, the technology described herein relates to a container wherein the bulk density of the solid precursor material can be greater than 0.5, less than 2, or in a range from about 0.5 to about 2.

[0021] In some aspects, the technology described herein relates to a method comprising: filling an interior volume of a container with a filler material, wherein the interior volume of the container is defined by sidewalls and a bottom of the container; and vibrating the container to thereby increase a volume density of the filler material, wherein a filler material ratio comprises a particle density of the filler material divided by the volume density of the filler material after vibration, and wherein after increasing the volume density of the filler material, the filler material ratio may range from greater than 0.15, less than 0.75, or within a range from about 0.15 to about 0.75.

[0022] In some aspects, the technology described herein relates to a method wherein vibrating the container includes directly vibrating a body of the container.

[0023] In some aspects, the technology described herein relates to a method wherein vibrating the container includes vibrating the container via a vibration device.

[0024] In some aspects, the technology described herein relates to a method wherein vibrating the container includes vibrating the container via two or more vibration devices.

[0025] In some aspects, the technology described herein relates to a method wherein vibrating the container includes vibrating the container continuously or applying the vibration in a step function.

[0026] In some aspects, the technology described herein relates to a method wherein the filling the interior volume of the container with the fill material includes introducing the fill material through a fill port of the container.

[0027] In some aspects, the technology described herein relates to a method wherein the diameter of the fill port is in a range from about 0.25 inches to about 0.75 inches.

[0028] In some aspects, the technology described herein relates to a method wherein the vibrating the container reduces a void fraction of the container having the fill material.

[0029] In some aspects, the technology described herein relates to a method wherein the fill material comprises a solid precursor material.

[0030] In some aspects, the technology described herein relates to a method wherein the bulk density of the filler material can be greater than 0.5, less than 2, or in a range from about 0.5 to about 2. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Some embodiments of the present disclosure are described herein by way of example only with reference to the accompanying drawings. With specific and detailed reference now to the drawings, it should be emphasized that the embodiments shown are by way of example and for purposes of illustrative discussion of the embodiments of the present disclosure. In this regard, the description together with the drawings will make apparent to those skilled in the art how the embodiments of the present disclosure may be practiced.

[0032] Figure 1A Depicted is a non-limiting example of a container prior to vibration.

[0033] Figure 1B Depicts a non-limiting example of a container after vibration.

[0034] Figure 2 Depicts non-limiting embodiments of the systems described herein.

[0035] Figure 3 Flowcharts showing some embodiments of methods according to the present disclosure. DETAILED DESCRIPTION

[0036] Among the benefits and improvements disclosed, other objects and advantages of the present disclosure will become apparent from the following description taken in conjunction with the accompanying drawings. Detailed embodiments of the present disclosure are disclosed herein; however, it should be understood that the disclosed embodiments are merely illustrative of the disclosure that can be embodied in various forms. Additionally, each example given with respect to various embodiments of the present disclosure is intended to be illustrative and not restrictive.

[0037] Throughout the specification and claims, the following terms take the meanings explicitly associated herein, unless the context clearly indicates otherwise. As used herein, the phrases "in one embodiment," "in an embodiment," and "in some embodiments" do not necessarily refer to the same embodiment, although they may. Furthermore, as used herein, the phrases "in another embodiment" and "in some other embodiments" do not necessarily refer to different embodiments, although they may. All embodiments of the present disclosure are intended to be combinable without departing from the scope or spirit of the present disclosure.

[0038] As used herein, the term "based on" is non-exclusive and allows for being based on additional factors not described unless the context clearly indicates otherwise. Additionally, throughout the specification, the meanings of "a," "an," and "the" include plural referents. The meaning of "in..." includes "in" and "on."

[0039] As used herein, "bulk density" (which may also be referred to as apparent density or bulk density) is the ratio of the weight of the filler material divided by the total volume. Unless otherwise provided herein, the units of bulk density are g / cm 3 .

[0040] As used herein, "void fraction" is the ratio of void volume to solid volume.

[0041] Solid state chemical delivery systems may have complex structures to transfer heat to enhance the sublimation process allowing delivery to the manufacturing tool.

[0042] In some examples, the process of filling a solid delivery container with fill material involves removing the large diameter flange cover and then removing the internal structure / tray inside the glove box and manually measuring and layering the solids back into the container. The larger the container, the more labor-intensive the process of the present disclosure may be.

[0043] The disclosed process reduces the overall labor required to manufacture the delivery system for a specific range of fill weights, thereby allowing the delivery system to be manufactured in high volumes.

[0044] In some embodiments, the process of the present disclosure includes introducing a filler material (e.g., solid chemical powder) through a single small diameter port on the top of the container. The present disclosure may include applying vibration directly and / or indirectly to the container to force the filler material to move throughout the container. In some embodiments, vibration may only be applied indirectly to the container. A certain amount of time may elapse so that the filler material itself becomes compacted, thereby increasing the bulk density of the powder and optimizing the total fill mass. In some embodiments, the amount of time the filler material is compacted may be greater than one minute, less than 10 minutes, or within the range of one minute to ten minutes. In some embodiments, the amount of time the filler material is compacted may be greater than one minute, less than 120 minutes, or within the range of one minute to 120 minutes.

[0045] In some embodiments, the methods of the present disclosure may be used on filler materials (e.g., high-density filler materials) comprising solid chemical powders (e.g., solid chemical powders of AICl3 or MoO2Cl2) to achieve higher fill weights and reduce overall cost of ownership based on customer requirements year after year.

[0046] The present disclosure encompasses attaching a vibration device directly (as well as indirectly) to the container body to increase movement of the powder, thereby driving excess air voids out of the container and maximizing bulk density in the powder.

[0047] Figure 1A The system 100 is depicted with a container 110 filled with a filling material 120 in a pre-vibration state. A fill line 130 indicates the fill level of the filling material 120 in the container 110 in the pre-vibration state. In some examples, the process of filling the container 110 with the filling material 120 does not include vibration. Thus, compared to a system in which the container is vibrated (e.g., Figure 1B In the example of the system 100' in FIG, the filling material 120 includes more pores within the filling material 120. The volume density of the system 100 can be increased by reducing the number of pores within the filling material 120. Therefore, by reducing the pores within the filling material 120, more filling material 120 can fill the volume of the container 110. That is, the void fraction of the filling material 120 can be reduced, and more filling material 120 can be added to the container 110.

[0048] In some embodiments, the filler material 120 includes, consists of, or consists essentially of at least one of the following: hafnium chloride (HfCl4), zirconium chloride (ZrCl4), indium trichloride, indium monochloride, aluminum trichloride, titanium iodide, tungsten carbonyl, Ba(DPM)2, strontium bis(tetramethylheptanedione) (Sr(DPM)2), TiO(DPM)2, tetrakis(tetramethylheptanedione)zirconium (Zr(DPM)4), decaborane, octadecaborane, phosphorus, arsenic, a precursor with an alkyl-amidine ligand, an organometallic precursor, tetrakis(dimethylamino)titanium (TDMAT), penta(dimethylamino)tantalum (PDMAT), penta(ethylmethylamino)tantalum (PEMAT), tetrakis(dimethylamino)zirconium (Zr(NMe2)4), xenon difluoride (XeF2), xenon tetrafluoride (XeF4), xenon hexafluoride (XeF6), or any combination thereof.

[0049] In some embodiments, the filler material 120 includes, consists of, or consists essentially of at least one of the following: decaborane, hafnium tetrachloride, zirconium tetrachloride, indium trichloride, a metal organic β-diketone complex, cyclopentadienyl-cycloheptatrienyl-titanium (CpTiCht), aluminum trichloride, titanium iodide, cyclooctatetraenyl-cyclopentadienyl titanium, biscyclopentadienyl titanium diazide, trimethyl indium, tungsten carbonyl, or any combination thereof.

[0050] In some embodiments, the filler material 120 includes, consists of, or consists essentially of at least one of elemental phosphorus, decaborane, gallium halide, indium halide, antimony halide, arsenic halide, gallium halide, aluminum iodide, titanium iodide, MoO2Cl2, MoOCl4, MoCl5, WCl5, WOCl4, WCl6, cyclopentadienyl-cycloheptatrienyl titanium (CpTiCht), cyclooctatetraenyl-cyclopentadienyl titanium, biscyclopentadienyl titanium diazide, In(CH3)2(hfac), dibromomethyl antimonide, tungsten carbonyl, metal organic β-diketone complex, metal organic alkoxide complex, metal organic carboxylate complex, metal organic aromatic complex, metal organic amide complex, or any combination thereof. In some embodiments, the filler material 120 includes, consists of, or consists essentially of at least one of: MoO 2 Cl 2 , MoOCl 4 , WO 2 Cl 2 , WOCl 4 , or any combination thereof.

[0051] Figure 1B The system 100' is depicted with a container 110' filled with a filling material 120' in a post-vibration state. The filling line 130' indicates the filling level of the filling material 120' in the container 110' in the post-vibration state. Figure 1A The amount of filler material 120 in Figure 1B Due at least in part to the reduction in porosity of fill material 120', fill line 130' is lowered.

[0052] The container 110' can be repeatedly filled with the filling material 120' and vibrated. In this manner, the fill line 130' is moved upward along the container 110'. For example, the container 110' can be filled and vibrated until the container 110' is completely filled with the filling material 120'. When the container 110' is completely filled with the filling material 120', the fill line 130' will be at the top of the container 110'. In some embodiments, the void fraction of the container 110' with the filling material 120' can be greater than 50%, less than 80%, or within a range from 50% to 80%.

[0053] Figure 2 Describes a non-limiting embodiment of the system 200 described herein. For the sake of brevity of this description, the previously discussed Figure 1A and 1BUnless otherwise specifically indicated, the features of system 200 are described. System 200 includes a container 210 having a fill line 230 of fill material. Container 210 has sidewalls 212, a bottom 214, and a top 216. Sidewalls 212 and bottom 214 define an interior volume 218 of container 210. In some embodiments, system 200 includes a vibration source 240 connected to container 210. In some embodiments, vibration source 240 is connected to an attachment mechanism 250. In some embodiments, attachment mechanism 250 attaches vibration source 240 to container 210. In some embodiments, container 210 includes a fill port 260. In some embodiments, fill material enters container 210 through fill port 260. In some embodiments, system 200 includes a funnel 270 to assist in filling container 210 with fill material through fill port 260. In some embodiments, fill material is added to container 210 through fill port 260 without using funnel 270.

[0054] In some embodiments, the vibration source 240 can increase the bulk density of the fill material in the container 210. The fill material ratio can be defined as the particle density of the fill material divided by the bulk density of the fill material after vibration.

[0055] In some embodiments, vibration source 240 vibrates container 210 by continuously vibrating container 210 or applying vibration in a stepping function. Vibration source 240 may vary the frequency and amplitude of the vibration. For example, container 210 may be continuously vibrated at a constant frequency and amplitude. Alternatively, vibrating container 210 may include varying one or both of the frequency and amplitude.

[0056] In some embodiments, the particle density of the filler material may be greater than 0.5, less than 2, or within a range from about 0.5 to about 2. In some embodiments, in the pre-vibration state, the bulk density of the filler material may be greater than 0.1, less than 0.5, or within a range from about 0.1 to about 0.5. In some embodiments, in the post-vibration state, the bulk density of the filler material may be greater than 0.5, less than 2, or within a range from about 0.5 to about 2. In some embodiments, in the post-vibration state, the bulk density of the filler material may be greater than 1, less than 5, or within a range from about 1 to 5.

[0057] In some embodiments, after the vibration source 240 increases the bulk density of the fill material, the fill material ratio may be greater than 0.15, less than 0.75, or within a range from about 0.15 to about 0.75.

[0058] In some embodiments, vibration source 240 includes more than one vibration device. For example, vibration source 240 may include two vibration devices. In some embodiments, when system 200 includes more than one vibration device for vibration source 240, the vibration devices may be identical or substantially similar. In some embodiments, when system 200 includes more than one vibration device for vibration source 240, the vibration devices may be different from each other. For example, one vibration device may directly vibrate container 210, while another vibration device may indirectly vibrate container 210.

[0059] In some embodiments, the vibration source 240 is not connected to the container 210 via the attachment mechanism 250. For example, in some embodiments, the vibration source 240 can be a vibrating surface on which and / or adjacent to which the container 210 is placed.

[0060] In some embodiments, the diameter of the fill port 260 ranges from about 0.25 inches to about 0.75 inches. In some embodiments, the container 210 may include more than one fill port 260. For example, the container 210 may include three fill ports 260. In some embodiments, the fill port 260 is positioned on a side of the container 210. In some embodiments, when the container 210 includes more than one fill port 260, one fill port 260 may be positioned on the top 216 of the container 210 and another fill port 260 may be positioned on a side of the container 210. In some embodiments, fill material is added to the container 210 through the fill port 260 without using a funnel 270.

[0061] In some embodiments, a funnel 270 is connected to the container 210. In some embodiments, the funnel 270 is connected to the top 216 of the container 210. In some embodiments, the funnel 270 is connected to the side of the container 210. The funnel 270 can guide the filling material into the container 210. In some embodiments, the funnel 270 is not connected to the container 210. In some embodiments, the funnel 270 remains stationary while a new container (a multiple of the container 210) is brought under the funnel 270. The funnel 270 can then be aligned with the fill port 260 and the filling material to be added to the container 210.

[0062] In some embodiments, the system 200 includes more than one funnel 270. In some embodiments, more than one funnel 270 is connected to a single fill port 260. In some embodiments, the system includes more than one fill port 260 and more than one funnel 270. In some embodiments, a first funnel 270 can be connected to a first fill port 260 on a side of the container 210, and a second funnel 270 can be connected to the top 216 of the container 210. In some embodiments, a first funnel 270 can be connected to a first fill port 260 on a side of the container 210, and a second funnel 270 can be connected to a side of the container 210. In some embodiments, a first funnel 270 can be connected to a first fill port 260 on a top 216 of the container 210, and a second funnel 270 can be connected to the top 216 of the container 210.

[0063] Figure 3 Flowchart showing some embodiments of methods according to the present disclosure. The system used in method 300 can be any embodiment described herein (e.g., system 200). Method 300 includes filling 310 an interior volume of a container with a fill material, wherein the interior volume of the container is defined by the sidewalls and bottom of the container; and vibrating 320 the container, thereby increasing the bulk density of the fill material.

[0064] In some embodiments, vibrating 320 the container includes directly vibrating the container's body. In some embodiments, vibrating the container includes vibrating the container via a single vibration device. In some embodiments, vibrating the container includes vibrating the container via two or more vibration devices. In some embodiments, vibrating the container includes vibrating the container continuously or applying vibration in a step-by-step manner. In some embodiments, vibrating 320 the container reduces the void ratio of the container with the fill material. In some embodiments, vibrating the container can increase the fill weight of the container by 5% to 30% relative to the fill weight of the container without vibration.

[0065] In some embodiments, filling 310 the interior volume of the container with a fill material includes introducing the fill material through a fill port of the container.

[0066] aspect

[0067] Various aspects are described below. It should be understood that any one or more of the features recited in the following aspects may be combined with any one or more other aspects.

[0068] Aspect 1. A system comprising: a container for holding a filler material; and a vibration source connected to the container, wherein the vibration source is configured to increase the volume density of the filler material, wherein a filler material ratio comprises a particle density of the filler material divided by the volume density of the filler material after vibration, and wherein after the vibration source increases the volume density of the filler material, the filler material ratio is in a range from about 0.15 to about 0.75.

[0069] Aspect 2. The system of aspect 1, wherein the filler material comprises a solid precursor material.

[0070] Aspect 3. The system of aspect 1 or aspect 2, wherein the bulk density of the filler material is in a range from about 0.5 to about 2.

[0071] Aspect 4. The system according to any of the preceding aspects, wherein the vibration source comprises more than one vibration device.

[0072] Aspect 5. The system according to any of the preceding aspects, further comprising a funnel.

[0073] Aspect 6. The system of aspect 5, wherein the funnel is connected to a top portion of the container, and wherein the funnel is configured to direct the fill material into the container.

[0074] Aspect 7. The system according to any of the preceding aspects, wherein the container includes a fill port.

[0075] Aspect 8. The system of aspect 7, wherein the fill material enters the container through the fill port.

[0076] Aspect 9. A container comprising: sidewalls and a bottom defining an internal volume; and a solid precursor material contained in the internal volume of the container, wherein a solid precursor material ratio comprises a particle density of the solid precursor material divided by a volume density of the solid precursor material after vibration, and wherein the solid precursor material ratio is in a range from about 0.15 to about 0.75.

[0077] Aspect 10. The container of aspect 9, wherein the bulk density of the solid precursor material is in a range from about 0.5 to about 2.

[0078] Aspect 11. A method comprising: filling an interior volume of a container with a filling material, wherein the interior volume of the container is defined by the sidewalls and bottom of the container; and vibrating the container to thereby increase the volume density of the filling material, wherein a filling material ratio comprises a particle density of the filling material divided by the volume density of the filling material after vibration, and wherein after increasing the volume density of the filling material, the filling material ratio is in a range from about 0.15 to about 0.75.

[0079] Aspect 12. The method according to aspect 11, wherein vibrating the container comprises directly vibrating a body of the container.

[0080] Aspect 13. The method according to aspect 11 or aspect 12, wherein vibrating the container comprises vibrating the container via a vibration device.

[0081] Aspect 14. The method according to any of the preceding aspects, wherein vibrating the container comprises vibrating the container via two or more vibration devices.

[0082] Aspect 15. The method according to any one of the preceding aspects, wherein vibrating the container comprises vibrating the container continuously or applying vibration in a step function.

[0083] Aspect 16. The method according to any of the preceding aspects, wherein filling the interior volume of the container with the fill material comprises introducing the fill material through a fill port of the container.

[0084] Aspect 17. The method of aspect 16, wherein the diameter of the fill port is in the range of from about 0.25 inches to about 0.75 inches.

[0085] Aspect 18. The method according to any of the preceding aspects, wherein vibrating the container reduces a void ratio of the container with the filling material.

[0086] Aspect 19. The method according to any of the preceding aspects, wherein the filler material comprises a solid precursor material.

[0087] Aspect 20. The method according to any of the preceding aspects, wherein the bulk density of the filler material is in the range from about 0.5 to about 2.

[0088] It should be understood that changes may be made in details, particularly in the materials of construction employed and the shape, size, and arrangement of parts, without departing from the scope of the present disclosure. This specification and described embodiments are examples only, with the true scope and spirit of the disclosure being indicated by the appended claims.

Claims

1. A system comprising: A container for containing a filling material; and a vibration source connected to the container, wherein the vibration source is configured to increase the bulk density of the filler material, wherein the fill material ratio comprises the particle density of the fill material divided by the volume density of the fill material after vibration, and Wherein after the vibration source increases the volume density of the fill material, the fill material ratio is in a range from about 0.15 to about 0.

75.

2. The system of claim 1, wherein the fill material comprises a solid precursor material.

3. The system of claim 1, wherein the bulk density of the fill material is in a range from about 0.5 to about 2.

4. The system of claim 1, wherein the vibration source comprises more than one vibration device.

5. The system of claim 1, further comprising a funnel.

6. The system of claim 5, wherein the funnel is connected to a top portion of the container, and wherein the funnel is configured to direct the fill material into the container.

7. The system of claim 1, wherein the container includes a fill port.

8. The system of claim 7, wherein the fill material enters the container through the fill port.

9. A container comprising: side walls and a bottom defining an interior volume; and a solid precursor material contained within the interior volume of the container, wherein the solid precursor material ratio comprises the particle density of the solid precursor material divided by the volume density of the solid precursor material after vibration, and wherein the solid precursor material ratio is in a range from about 0.15 to about 0.

75.

10. The container of claim 9, wherein the bulk density of the solid precursor material is in the range from about 0.5 to about 2.

11. A method comprising: filling an interior volume of a container with a filling material, wherein the interior volume of the container is defined by a sidewall and a bottom of the container; and vibrating the container, thereby increasing the bulk density of the fill material, wherein the fill material ratio comprises the particle density of the fill material divided by the volume density of the fill material after vibration, and Wherein, after increasing the volume density of the filling material, the filling material ratio is in a range from about 0.15 to about 0.

75.

12. The method of claim 11, wherein said vibrating said container comprises directly vibrating a body of said container.

13. The method of claim 11, wherein said vibrating said container comprises vibrating said container via a vibrating device.

14. The method of claim 11, wherein said vibrating said container comprises vibrating said container via two or more vibrating devices.

15. The method of claim 11, wherein the vibrating the container comprises vibrating the container continuously or applying vibration in a step function.

16. The method of claim 11, wherein said filling the interior volume of the container with the fill material comprises introducing the fill material through a fill port of the container.

17. The method of claim 16, wherein the fill port has a diameter ranging from about 0.25 inches to about 0.75 inches.

18. The method of claim 11, wherein the vibrating the container reduces a void ratio of the container having the filling material.

19. The method of claim 11, wherein the fill material comprises a solid precursor material.

20. The method of claim 11, wherein the bulk density of the fill material is in a range from about 0.5 to about 2.

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