Magnetic field measurement device and magnetic field measurement method

Abstract

The embodiment of the invention discloses a magnetic field measuring device and a magnetic field measuring method. The magnetic field measuring device is used for measuring a magnetic lens and comprises a gauss meter, a constant current source, a first movement mechanism and a second movement mechanism, the gauss meter comprises a gauss meter probe; a fixing piece is arranged on the first movement mechanism; an opening is formed in the fixing piece, and the gauss meter probe penetrates through the opening and is exposed out; the second movement mechanism is used for bearing the magnetic lens, and the movement direction of the first movement mechanism is the same as the axial direction of the magnetic lens; the constant current source is electrically connected with the magnetic lens, and the constant current source is used for providing preset current for the magnetic lens. According to the technical scheme, through the design of a mechanical structure, the gauss meter probe is fixed to the first movement mechanism through the opening of the fixing piece, the second movement mechanism is used for bearing the magnetic lens, the axis of the magnetic lens is in the first direction, the load of the second movement mechanism can be reduced, and the directivity of the axis of the magnetic lens can be guaranteed; measurement of the magnetic field of the magnetic lens is realized, and the performance of the magnetic lens is evaluated.

Description

Technical Field

[0001] The present invention relates to the technical field of magnetic field measurement, and in particular to a magnetic field measurement device and a magnetic field measurement method. Background Art

[0002] The magnetic lens uses the non-uniform magnetic field excited by a short current-carrying coil to achieve the focusing of charged particles. Magnetic lenses are currently widely used in the field of vacuum electron optics. In cathode ray tubes, electron microscopes and vacuum devices, magnetic lenses are often used to focus electron beams. Therefore, it is very important to test the magnetic field of the magnetic lens after design and processing. For a magnetic lens, it is generally necessary to test the magnetic field distribution generated by it under a fixed excitation current in its axial direction to determine the quality of its performance.

[0003] In the prior art, the magnetic field is usually measured by a fixed measurement method, where the Gauss meter probe is fixed at the position where the magnetic field size needs to be tested, and the measurement is completed by reading the Gauss meter reading. However, the fixed measurement method is no longer applicable to the magnetic field test of the magnetic lens, and the magnetic lens is heavy, which requires a high load on the motion mechanism. Summary of the invention

[0004] The present invention provides a magnetic field measuring device and a magnetic field measuring method, so as to realize the measurement of the magnetic field of a magnetic lens, and further complete the data analysis and performance evaluation of the magnetic lens.

[0005] According to one aspect of the present invention, a magnetic field measuring device is provided, the magnetic field measuring device is used to measure a magnetic lens, the magnetic field measuring device comprises: a Gauss meter, a constant current source, a first motion mechanism and a second motion mechanism; The gaussmeter includes a gaussmeter probe; a fixing member is provided on the first motion mechanism; an opening is provided on the fixing member, and the gaussmeter probe passes through the opening and leaks out; The second motion mechanism is used to carry the magnetic lens, and the motion direction of the first motion mechanism is the same as the axial direction of the magnetic lens; The constant current source is electrically connected to the magnetic lens, and is used to provide a preset current for the magnetic lens.

[0006] Optionally, the magnetic field measuring device further includes: a host computer; The host computer is electrically connected to the gaussmeter and exchanges data with the gaussmeter; The host computer is electrically connected to the constant current source and is used to control the output current of the constant current source.

[0007] Optionally, the host computer is electrically connected to the first motion mechanism; The host computer is used to control the first motion mechanism to move along the first direction, so as to drive the Gauss meter probe to extend into or move out of the magnetic lens along the first direction.

[0008] Optionally, the host computer is also electrically connected to the second motion mechanism; The host computer is used to adjust the second motion mechanism so that the axis of the magnetic lens coincides with the Gaussmeter probe.

[0009] Optionally, the magnetic field measuring device further comprises: a fastening mechanism; The fastening mechanism is used to adjust the diameter of the opening to fix the Gaussmeter probe.

[0010] Optionally, the magnetic field measuring device further comprises: a zero magnetic field cavity; a Gauss meter probe wrapped in the zero magnetic field cavity; The zero magnetic field cavity is used to control the Gauss meter to zero.

[0011] Optionally, the magnetic field measuring device further comprises: a fixed platform; The fixed platform is used to fix the first motion mechanism and the second motion mechanism.

[0012] According to another aspect of the present invention, a magnetic field measurement method is provided, the magnetic field measurement method comprising: The second motion mechanism is adjusted so that the magnetic lens placed on the second motion mechanism is coaxial with the Gauss meter probe; Turn on the constant current source to provide a preset current to the magnetic lens; Control the Gaussmeter to collect the magnetic field data of the magnetic lens.

[0013] Optionally, before the constant current source is turned on to provide a preset current to the magnetic lens, the method further includes: Wrap the Gaussmeter probe with a zero magnetic field cavity to control the Gaussmeter to return to zero; Remove the zero magnetic field cavity.

[0014] Optionally, controlling the Gaussmeter to collect magnetic field data of the magnetic lens includes: The first motion mechanism is controlled to drive the Gaussmeter probe to step at a preset distance, and the Gaussmeter probe is controlled to collect magnetic field data of the magnetic lens.

[0015] The technical solution of the embodiment of the present invention, through the design of mechanical structure, uses the second motion mechanism to carry the magnetic lens, so that the axis of the magnetic lens is in the first direction, which can reduce the load of the second motion mechanism and ensure the directionality of the axis of the magnetic lens. The Gaussmeter probe is fixed on the first motion mechanism through the opening of the fixing part, and the movement direction of the Gaussmeter probe is the same as the axial direction of the magnetic lens. When the constant current source provides current to the magnetic lens, the Gaussmeter probe is driven to move through the first motion mechanism, thereby penetrating into the electronic path of the magnetic lens, measuring the magnetic field of the magnetic lens, and realizing the performance evaluation of the magnetic lens.

[0016] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 Schematic diagram of the structure of a magnetic field measuring device provided according to an embodiment of the present invention.

[0019] Figure 2 is a flow chart of a magnetic field measurement method provided according to an embodiment of the present invention.

[0020] Figure 3 is a flow chart of another magnetic field measurement method provided according to an embodiment of the present invention. DETAILED DESCRIPTION

[0021] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0022] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0023] Figure 1 is a schematic diagram of the structure of a magnetic field measurement device provided according to an embodiment of the present invention. Figure 1As shown, the magnetic field measuring device is used to measure the magnetic lens 10, and the magnetic field measuring device includes: a gaussmeter 20, a constant current source 30, a first motion mechanism 40 and a second motion mechanism 50; the gaussmeter 20 includes a gaussmeter probe 201; a fixing part 401 is provided on the first motion mechanism 40; an opening is provided on the fixing part 401, and the gaussmeter probe 201 passes through the opening and leaks out; the second motion mechanism 50 is used to carry the magnetic lens 10, and the movement direction of the first motion mechanism 40 is the same as the axial direction of the magnetic lens 10; the constant current source 30 is electrically connected to the magnetic lens 10, and the constant current source 30 is used to provide a preset current for the magnetic lens 10.

[0024] The magnetic lens 10 can converge a uniform charged particle beam by using a non-uniform magnetic field excited by a short coil carrying a current. The magnetic lens 10 can be generated by a solenoid, an electromagnet or a permanent magnet. The magnetic lens 10 is used in devices such as electron and ion microscopes or charged particle accelerators. Since the magnetic lens 10 is composed of a copper coil and a magnetic circuit with high magnetic permeability, it is heavy. If the axis of the magnetic lens 10 is in a horizontal direction, when measuring the magnetic field of the magnetic lens 10, the load requirement for the motion mechanism carrying the magnetic lens 10 is high. In an embodiment of the present invention, when measuring the magnetic field of the magnetic lens 10, the gauss meter probe 201 is fixed to the first motion mechanism 40 through a fixing member 401, and the motion direction of the first motion mechanism 40 is the first direction Z. At the same time, the second motion mechanism 50 is used to carry the magnetic lens 10, and the axis of the magnetic lens 10 is in the first direction Z. On the basis of reducing the load of the second motion mechanism 50, the directionality of the axis of the magnetic lens 10 can be better guaranteed. Exemplarily, the first motion mechanism 40 can be an electrically controlled precision moving guide rail capable of moving in a vertical direction, and its movement is controlled by an electrically controlled device connected to a computer. The second motion mechanism 50 can be a displacement stage for adjusting the magnetic lens 10 in the horizontal direction. The fixing member 401 can be a fixed plate, and the fixed plate and the moving stage on the first motion mechanism 40 can be fixedly connected by screws. The fixed plate is perpendicular to the movement direction of the first motion mechanism 40. An opening is provided on the fixed plate. The Gaussmeter probe 201 passes through the opening and leaks out, so that when the magnetic field of the magnetic lens 10 is subsequently measured, when the first motion mechanism 40 is driven by a motor, the Gaussmeter probe 201 can move in the first direction Z, thereby penetrating into the electron path of the magnetic lens 10 and measuring the magnetic field distribution on the axis of the magnetic lens 10.

[0025] The gaussmeter 20, also called a milliteslameter, is an instrument for measuring magnetic induction intensity based on the Hall effect. The gaussmeter 20 includes a gaussmeter probe 201 and a test instrument 202. The gaussmeter probe 201 is a Hall probe. The gaussmeter probe 201 generates a Hall voltage in a magnetic field due to the Hall effect. After the Hall voltage is measured, the magnitude of the magnetic induction intensity is determined according to the Hall voltage formula and the known Hall coefficient. The magnetic field measured by the gaussmeter 20 is the magnetic field in the top area of ​​the gaussmeter probe 201.

[0026] The magnetic lens 10 is an object that needs to measure the magnetic field in the embodiment of the present invention. After a constant current is passed through the coil of the magnetic lens 10, a specific magnetic field will be generated on the axis of the magnetic lens 10. The magnetic field distribution is related to the structural parameters of the coil and the magnetic lens 10. The magnetic field determines the focusing effect of the magnetic lens 10 on the electron beam and other charged particle beams. In the embodiment of the present invention, a constant current source 30 is used to pass a constant current through the coil of the magnetic lens 10. The constant current source 30 is a power supply that can provide a constant current to the load. Even if the resistance of the load changes, when the circuit needs a stable current without fluctuation, the constant current source 30 can be used. The constant current source 30 is connected to the magnetic lens 10 through a wire. When the constant current source 30 output is turned on, current can be provided to the magnetic lens 10. The preset current is the current provided by the constant current source 30 to the magnetic lens 10 when the magnetic field of the magnetic lens 10 is pre-set. When the magnetic field of the magnetic lens 10 is measured, a given current can be provided to the magnetic lens 10 through the constant current source 30. When the magnetic field measurement is completed, the output current of the constant current source 30 can be controlled to be zero.

[0027] The technical solution of the embodiment of the present invention, through the design of mechanical structure, uses the second motion mechanism to carry the magnetic lens, so that the axis of the magnetic lens is in the first direction, which can reduce the load of the second motion mechanism and ensure the directionality of the axis of the magnetic lens. The Gaussmeter probe is fixed on the first motion mechanism through the opening of the fixing part, and the movement direction of the Gaussmeter probe is the same as the axial direction of the magnetic lens. When the constant current source provides current to the magnetic lens, the Gaussmeter probe is driven to move through the first motion mechanism, thereby penetrating into the electronic path of the magnetic lens, measuring the magnetic field of the magnetic lens, and realizing the performance evaluation of the magnetic lens.

[0028] Based on the technical solution of the above invention embodiment, Figure 1 Optionally, the magnetic field measuring device further includes: a host computer 60; the host computer 60 is electrically connected to the gaussmeter 20 and exchanges data with the gaussmeter 20; the host computer 60 is electrically connected to the constant current source 30 and is used to control the output current of the constant current source 30.

[0029] In the embodiment of the present invention, illustratively, the host computer 60 can be an industrial computer or a single-chip microcomputer. The industrial computer is a reinforced enhanced personal computer, which is a tool that uses a bus structure to detect and control the production process and electromechanical equipment and process equipment. The host computer 60 is electrically connected to the gaussmeter 20, and the host computer 60 exchanges data with the gaussmeter 20. The gaussmeter 20 can also be controlled on the host computer 60 to collect magnetic field data. The host computer 60 is also electrically connected to the constant current source 30. The host computer 60 can control the current output by the constant current source 30 to the magnetic lens 10. Exemplarily, when the magnetic field of the magnetic lens 10 is measured, the constant current source 30 can be controlled by the host computer 60 to provide a given current to the magnetic lens 10. When the magnetic field measurement is completed, the host computer 60 can control the output current of the constant current source 30 to be zero.

[0030] Based on the technical solution of the above invention embodiment, Figure 1 Optionally, the host computer 60 is electrically connected to the first motion mechanism 40; the host computer 60 is used to control the first motion mechanism 40 to move along the first direction Z to drive the Gaussmeter probe 201 along the first direction Z to extend into or move out of the magnetic lens 10.

[0031] In the embodiment of the present invention, the first motion mechanism 40 may be an electrically controlled precision moving guide rail, the first motion mechanism 40 is controlled by an electric control device (such as a motor), the electric control device is electrically connected to the host computer 60, and the host computer 60 controls the operation of the electric control device to thereby realize that the first motion mechanism 40 drives the Gauss meter probe 201 to move along the first direction Z. The host computer 60 may control the step amplitude and frequency of the first motion mechanism 40 according to the test program, and then drive the Gauss meter probe 201 along the first direction Z with the set step amplitude and frequency through the first motion mechanism 40 to extend into or move out of the electronic path of the magnetic lens 10, and measure the magnetic field data of the magnetic lens 10.

[0032] Based on the technical solution of the above invention embodiment, Figure 1 Optionally, the host computer 60 is also electrically connected to the second motion mechanism 50 ; the host computer 60 is used to adjust the second motion mechanism 50 so that the axis of the magnetic lens 10 coincides with the Gaussmeter probe 201 .

[0033] In an embodiment of the present invention, the surface where the second motion mechanism 50 is located is the plane where the XY direction is located, and the magnetic lens 10 is placed on the second motion mechanism 50. Through adjustment in the XY directions, the axis of the magnetic lens 10 coincides with the Gaussmeter probe 201, thereby improving the accuracy of the magnetic field measurement of the magnetic lens 10.

[0034] The technical solution of the embodiment of the present invention, through the design of the mechanical structure, and the control of the first motion mechanism 40, the second motion mechanism 50, the constant current source 30 and the Gaussmeter 20 through the host computer 60, uses an automatic magnetic field measurement program to achieve rapid measurement of the magnetic field of the magnetic lens 10, and compares the magnetic field data collected by the Gaussmeter 20 received by the host computer 60 with the design data to evaluate the performance of the measured magnetic lens 10.

[0035] Based on the technical solution of the above invention embodiment, Figure 1 Optionally, the magnetic field measuring device further includes: a fastening mechanism; the fastening mechanism is used to adjust the diameter of the opening to fix the Gaussmeter probe 201.

[0036] In the embodiment of the present invention, the fastening mechanism can be arranged on the first motion mechanism 40, and can be a knob capable of adjusting the size of the opening diameter. The diameter of the opening is adjusted by the fastening mechanism, and the Gauss meter probe 201 is fixed in the opening of the fixing member 401. The host computer 60 can control the first motion mechanism 40 to move along the first direction Z, thereby driving the Gauss meter probe 201 to move along the first direction Z, and complete the measurement of the magnetic field of the magnetic lens 10.

[0037] Based on the technical solution of the above-mentioned invention embodiment, optionally, the magnetic field measuring device further includes: a zero magnetic field cavity; the zero magnetic field cavity wraps the Gaussmeter probe; the zero magnetic field cavity is used to control the Gaussmeter to return to zero.

[0038] In an embodiment of the present invention, the magnetic field measuring device further includes a zero magnetic field cavity. The zero magnetic field cavity is used to provide a zero magnetic field environment for the Gauss meter probe. When measuring the magnetic field of the magnetic lens, after the Gauss meter is heated up, the zero magnetic field cavity is used to wrap the Gauss meter probe, and the Gauss meter is controlled to zero on the industrial computer or the panel of the Gauss meter. After zeroing, the zero magnetic field cavity is removed, and the magnetic field of the magnetic lens is continued to be measured.

[0039] On the basis of the technical solution of the above-mentioned embodiment of the invention, optionally, the magnetic field measuring device further comprises: a fixed platform; the fixed platform is used to fix the first motion mechanism and the second motion mechanism.

[0040] In the embodiment of the present invention, the fixed platform can be a marble platform or an optical platform, which is not specifically limited here. The first motion mechanism and the second motion mechanism can be fixed on the fixed platform by screws, so that the first motion mechanism and the second motion mechanism are more stable, and the accuracy of the magnetic field measurement of the magnetic lens is improved. Fixing the first motion mechanism and the second motion mechanism on the fixed platform is also conducive to adjusting the coincidence of the axis of the magnetic lens and the Gauss meter probe.

[0041] Figure 2 1 is a flow chart of a magnetic field measurement method provided according to an embodiment of the present invention. The embodiment of the present invention can be applied to the measurement of the magnetic field of a magnetic lens. The magnetic field measurement method can be performed by a magnetic field measurement device, and the magnetic field measurement device can be implemented in the form of hardware and / or software. Figure 2 As shown, the magnetic field measurement method includes: S110, adjusting the second motion mechanism so that the magnetic lens placed on the second motion mechanism is coaxial with the Gaussmeter probe.

[0042] Specifically, the magnetic lens to be tested is first placed on the second motion mechanism, and then the magnetic field measuring device is powered on. The host computer controls the second motion mechanism to move and adjust in the XY plane so that the magnetic lens is coaxial with the Gauss meter probe, and then the constant current source is turned on, and the test program of the industrial computer controls the constant current source to provide current to the magnetic lens.

[0043] S120, turning on the constant current source to provide a preset current for the magnetic lens.

[0044] Specifically, the gaussmeter is calibrated for the magnetic field, and then the constant current source is connected to the magnetic lens through a wire, the constant current source is electrically connected to the industrial computer, and the constant current source is controlled by the test program of the industrial computer to provide excitation current to the magnetic lens.

[0045] S130, controlling the Gauss meter to collect magnetic field data of the magnetic lens.

[0046] Exemplarily, the industrial computer is electrically connected to the first motion mechanism, and the first motion mechanism is controlled to move in the vertical direction through the test program of the industrial computer, thereby driving the Gaussmeter probe fixed on the fixed plate to step according to the amplitude and frequency set by the program, and at the same time controlling the Gaussmeter probe to measure the magnetic field of the magnetic lens. The Gaussmeter collects measurement data and transmits the data to the industrial computer.

[0047] When the Gauss meter probe completes the stepping mileage set by the program, the industrial computer controls the first motion mechanism to stop moving and controls the first motion mechanism to reset. The collected magnetic field data of the magnetic lens are used to draw the magnetic field distribution diagram on the magnetic lens axis through the setting program in the industrial computer, and compared and analyzed with the design data to evaluate the performance of the measured magnetic lens. The drawn magnetic field distribution diagram on the magnetic lens axis can be printed and the test report can be downloaded. After that, the power is turned off to power off the magnetic lens magnetic field measurement device, the magnetic field measurement of the magnetic lens is completed, and the connection of each device in the magnetic lens magnetic field measurement device is disconnected.

[0048] The technical solution of the embodiment of the present invention is to use the second motion mechanism to carry the magnetic lens through the design of the mechanical structure, so that the axis of the magnetic lens is in the first direction, which can reduce the load of the second motion mechanism and ensure the directionality of the axis of the magnetic lens. The Gaussmeter probe is fixed on the first motion mechanism through the opening of the fixing member, and the movement direction of the Gaussmeter probe is the same as the axial direction of the magnetic lens. When the constant current source provides current to the magnetic lens, the Gaussmeter probe is driven to move through the first motion mechanism, so as to penetrate into the electronic path of the magnetic lens to measure the magnetic field of the magnetic lens. The first motion mechanism, the second motion mechanism, the constant current source and the Gaussmeter are controlled by an industrial computer, and the automatic magnetic field measurement program is used to realize the rapid measurement of the magnetic field of the magnetic lens. The magnetic field data collected by the Gaussmeter received by the industrial computer is compared with the design data to realize the performance evaluation of the magnetic lens.

[0049] Figure 3 FIG. 1 is a flow chart of another magnetic field measurement method provided according to an embodiment of the present invention. This embodiment is a detailed description of the technical features of the above embodiment. Figure 3 As shown, the magnetic field measurement method includes: S210, adjusting the second motion mechanism so that the magnetic lens placed on the second motion mechanism is coaxial with the Gaussmeter probe.

[0050] S220, wrap the Gaussmeter probe with the zero magnetic field cavity to control the Gaussmeter to return to zero.

[0051] Specifically, after adjusting the magnetic lens to be coaxial with the Gaussmeter probe, wait for the Gaussmeter to warm up, wrap the Gaussmeter probe with the zero magnetic field cavity, and control the Gaussmeter to zero on an industrial computer or a Gaussmeter panel.

[0052] S230, taking out the zero magnetic field cavity.

[0053] Specifically, after the Gaussmeter is controlled to be zeroed, the zero magnetic field cavity is removed, and then the magnetic field of the magnetic lens is measured.

[0054] S240, turning on the constant current source to provide a preset current for the magnetic lens.

[0055] S250, controlling the first motion mechanism to drive the Gaussmeter probe to step at a preset distance, and controlling the Gaussmeter probe to collect magnetic field data of the magnetic lens.

[0056] Specifically, the preset distance is the preset distance that the industrial computer controls the first motion mechanism to drive the Gaussmeter probe to step each time. Exemplarily, the first motion mechanism is an electrically controlled precision moving guide rail with a total mileage of 300 mm, and the industrial computer controls the first motion mechanism to drive the Gaussmeter probe to step each time with a distance of 10 mm. Each time the Gaussmeter probe steps once, it collects magnetic field data of the measured magnetic lens and transmits it to the industrial computer through the Gaussmeter.

[0057] When the Gauss meter probe completes the stepping mileage set by the program, the industrial computer controls the first motion mechanism to stop moving and controls the first motion mechanism to reset. The collected magnetic field data of the magnetic lens are used to draw the magnetic field distribution diagram on the magnetic lens axis through the setting program in the industrial computer, and compared and analyzed with the design data to evaluate the performance of the measured magnetic lens. The drawn magnetic field distribution diagram on the magnetic lens axis can be printed and the test report can be downloaded. After that, the power is turned off to power off the magnetic lens magnetic field measurement device, the magnetic field measurement of the magnetic lens is completed, and the connection of each device in the magnetic lens magnetic field measurement device is disconnected.

[0058] The magnetic field measuring device provided in the embodiment of the present invention can execute the magnetic field measuring method provided in any embodiment of the present invention, and has the corresponding functional modules and beneficial effects of the execution method.

[0059] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the present invention can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution of the present invention can be achieved, and this document does not limit this.

[0060] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A magnetic field measuring device, characterized in that: Used to measure magnetic lens, the magnetic field measuring device comprises: a Gauss meter, a constant current source, a first motion mechanism and a second motion mechanism; The gaussmeter includes a gaussmeter probe; a fixing member is provided on the first motion mechanism; an opening is provided on the fixing member, and the gaussmeter probe passes through the opening and leaks out; The second motion mechanism is used to carry the magnetic lens, and the motion direction of the first motion mechanism is the same as the axial direction of the magnetic lens; The constant current source is electrically connected to the magnetic lens, and is used to provide a preset current for the magnetic lens.

2. The magnetic field measuring device according to claim 1, characterized in that: Also includes: Host computer; The host computer is electrically connected to the gaussmeter and exchanges data with the gaussmeter; The host computer is electrically connected to the constant current source and is used to control the output current of the constant current source.

3. The magnetic field measuring device according to claim 2, characterized in that: The host computer is electrically connected to the first motion mechanism; The host computer is used to control the first motion mechanism to move along a first direction, so as to drive the Gaussmeter probe to extend into or move out of the magnetic lens along the first direction.

4. The magnetic field measuring device according to claim 3, characterized in that: The host computer is also electrically connected to the second motion mechanism; The host computer is used to adjust the second motion mechanism so that the axis of the magnetic lens coincides with the Gaussmeter probe.

5. The magnetic field measuring device according to claim 1, characterized in that: Also includes: Fastening mechanism; The fastening mechanism is used to adjust the diameter of the opening to fix the Gaussmeter probe.

6. The magnetic field measuring device according to claim 1, characterized in that: Also includes: A zero magnetic field cavity; the zero magnetic field cavity encapsulates the Gaussmeter probe; The zero magnetic field cavity is used to control the Gaussmeter to return to zero.

7. The magnetic field measuring device according to claim 1, characterized in that: Also includes: Fixed platform; The fixed platform is used to fix the first motion mechanism and the second motion mechanism.

8. A magnetic field measurement method, characterized in that: The magnetic field measuring device according to any one of claims 1 to 7; the magnetic field measuring method comprising: adjusting the second motion mechanism so that the magnetic lens placed on the second motion mechanism is coaxial with the Gaussmeter probe; Turning on a constant current source to provide a preset current to the magnetic lens; The Gauss meter is controlled to collect magnetic field data of the magnetic lens.

9. The magnetic field measurement method according to claim 8, characterized in that: Before the constant current source is turned on to provide a preset current for the magnetic lens, the method further includes: Wrapping the Gaussmeter probe with a zero magnetic field cavity to control the Gaussmeter to return to zero; Take out the zero magnetic field cavity.

10. The magnetic field measurement method according to claim 8, characterized in that: The controlling the Gaussmeter to collect the magnetic field data of the magnetic lens comprises: The first motion mechanism is controlled to drive the Gaussmeter probe to step at a preset distance, and the Gaussmeter probe is controlled to collect magnetic field data of the magnetic lens.

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