Electrical terminal connector, substrate holder, and substrate processing apparatus

Abstract

The invention provides an electrical terminal connector, a substrate support, and a substrate processing apparatus. The electrical terminal connector includes a housing unit mounted by penetrating the heater cup and having a housing ring, and a terminal connection unit mounted to reciprocate within the housing unit and having a terminal connection portion to which the electrical terminal is attached and detached. The terminal connection portion is variable such that the electrical terminal is insertable when the terminal connection portion is separated from the housing ring, and the electrical terminal is fixed when the terminal connection portion is inserted into the housing ring together with the inserted electrical terminal.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims the benefit of priority from Korean Patent Application No. 10-2023-0122513 filed on September 14, 2023 in the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] The present disclosure relates to an electric terminal connector for connecting an electric terminal with a cable, a substrate supporter including the electric terminal connector, and a substrate processing device. Background Art

[0004] In order to manufacture a semiconductor device, various processes such as photolithography, etching, deposition, ion implantation and cleaning are performed. Among them, the photolithography process is a process for forming a pattern and plays an important role in obtaining a high degree of integration of a semiconductor device.

[0005] The photolithography process can be mainly divided into a coating process, an exposure process, and a development process, and a baking process can be performed before and after the exposure process. The baking process can be a process of heat-treating the substrate. When the substrate is set on a heating plate, the substrate can be heat-treated by a heater set in the heating plate.

[0006] The heating plate may be formed with an electrical terminal connected to the heater to supply power to the heater. A cable may be assembled and electrically connected to such an electrical terminal, but a problem may occur that the cable may be easily disconnected from the electrical terminal due to external force or high temperature, resulting in disconnection. Summary of the invention

[0007] An aspect of the present disclosure is to provide an electric terminal connector which can easily and securely assemble an electric terminal and a cable.

[0008] According to an aspect of the present invention, an electrical terminal connector includes: a housing unit installed by penetrating a heater cup and having a housing ring; and a terminal connection unit installed to reciprocate within the housing unit and having a terminal connection portion to which an electrical terminal is attached and detached from the terminal connection portion. The terminal connection portion is variable so that when the terminal connection portion is separated from the housing ring, the electrical terminal is insertable, and when the terminal connection portion is inserted into the housing ring together with the inserted electrical terminal, the electrical terminal is fixed.

[0009] The terminal connection unit may include a hollow shaft having a terminal connection portion, and the hollow shaft may include: a hollow body; and a terminal connection portion, which is provided by penetrating the housing ring and extends in a radial direction while extending from an end of the hollow body. The terminal connection portion may be formed of a plurality of parts spaced apart from each other, and when the plurality of parts are separated from the housing ring, the distance between the plurality of parts may gradually increase.

[0010] The terminal connection unit may further include an elastic member connecting the housing unit and the hollow shaft and applying an elastic force to the hollow shaft so that when the terminal connection part is separated from the housing ring, the terminal connection part moves back into the housing ring.

[0011] The terminal connection unit may further include: a connecting tube having one end and the other end, the end of the hollow shaft being inserted into and fastened to the one end, and the cable being insertable into the other end; and a supporting member provided with a supporting hole, the other end of the connecting tube being inserted into and fastened to the supporting hole. The supporting member may be provided with a fixing groove, the elastic member being fixed in the fixing groove, and the hollow shaft may be connected to the elastic member through the connecting tube and the supporting member.

[0012] The hollow shaft and the connecting tube may be formed of an electrically conductive material.

[0013] The housing unit may include: a base member installed by penetrating the heater cup and having a base hole; a threaded pipe installed in the base hole and having a pipe hole; and the housing ring installed in the pipe hole.

[0014] The base member may be provided with a base entrance portion connected to the base hole, and an inner space of the base entrance portion may be tapered toward the base hole.

[0015] The housing unit may include: a base body installed by penetrating the heater cup and having a body hole; a housing installed by penetrating the body hole, having a housing hole, and having a housing groove provided on a side to have a space spaced apart from an inner surface of the body hole; a snap ring provided between a lower jaw of the base body and a lower jaw of the housing; a threaded pipe installed in the housing hole and having a pipe hole; and the housing ring installed in the pipe hole.

[0016] The housing may have a housing inlet connected to the housing hole, and an inner space of the housing inlet may be tapered toward the housing hole.

[0017] According to aspects of the present disclosure, a substrate support includes: a heating plate equipped with a heater and an electric terminal connected to the heater; a heater cup formed with a bottom having a supporting pin supporting the heating plate; and an electric terminal connector mounted on the heater cup. The electric terminal connector includes: a housing unit installed by penetrating the heater cup and having a housing ring; and a terminal connection unit installed to reciprocate within the housing unit and having a terminal connection portion to which an electric terminal can be attached and from which an electric terminal can be detached. The terminal connection portion has a variable structure so that when the terminal connection portion is separated from the housing ring, the electric terminal is insertable, and when the terminal connection portion is inserted into the housing ring together with the inserted electric terminal, the electric terminal is fixed.

[0018] According to aspects of the present disclosure, a substrate processing device includes: a processing chamber including an upper body and a lower body to form a processing space in the processing chamber; a substrate supporter disposed in the processing space and supporting and heating a substrate; and a substrate lifting unit including a lifting pin that lifts and lowers while penetrating the substrate supporter, and a pin driving member that lifts and lowers the lifting pin. The substrate supporter includes: a heating plate equipped with a heater and an electrical terminal connected to the heater; a heater cup formed with a bottom having a supporting pin that supports the heating plate; and an electrical terminal connector mounted on the heater cup. The electrical terminal connector includes: a housing unit installed by penetrating the heater cup and having a housing ring; and a terminal connection unit installed to reciprocate within the housing unit and having a terminal connection portion to which an electrical terminal can be attached and detached. The terminal connection portion has a variable structure so that when the terminal connection portion is separated from the housing ring, the electrical terminal is insertable, and when the terminal connection portion is inserted into the housing ring together with the inserted electrical terminal, the electrical terminal is fixed. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and other aspects, features and advantages of the present disclosure will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which:

[0020] Figure 1 and Figure 2 is a schematic diagram showing a cable connected to an electrical terminal according to the related art;

[0021] Figure 3 is a perspective view showing a substrate processing apparatus according to an embodiment;

[0022] Figure 4 It is observed from above Figure 3 A view of a substrate processing device;

[0023] Figure 5 Observed in the AA direction Figure 4 A view of a substrate processing device;

[0024] Figure 6 Observed in the BB direction Figure 4 A view of a substrate processing device;

[0025] Figure 7 is a schematic diagram showing a processing chamber including a substrate support according to an embodiment;

[0026] Figure 8 is a view showing an upper portion of a substrate supporter according to an embodiment;

[0027] Fig. 9 is shown in the heating plate assembled to the Figure 8 A cross-sectional view of a state before the heater cup in the substrate support;

[0028] Fig.10 It is shown Fig. 9 A schematic diagram of a heater cup;

[0029] Fig.11 It is shown Fig. 9 A view of a lower portion of the heater cup;

[0030] Fig.12 It is shown installed in Fig.10 and Fig.11 A longitudinal cross-sectional view of an electrical terminal connector in a heater cup;

[0031] Figures 13 to 16 It is shown that Fig. 9 A cross-sectional view of a process of inserting and fixing the electrical terminals of the heating plate into the electrical terminal connectors of the heater cup when the heating plate is assembled to the heater cup;

[0032] Fig.17 is a schematic diagram showing an electrical terminal connector according to another embodiment;

[0033] Fig.18 It is shown Fig.17 A longitudinal cross-sectional view of an electrical terminal connector; and

[0034] Fig.19 It is shown Fig.17 An exploded perspective view of an electrical terminal connector. DETAILED DESCRIPTION

[0035] Hereinafter, the embodiments will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily practice the present disclosure. However, when describing the preferred embodiments in detail, if it is determined that the detailed description of the related known functions or configurations may unnecessarily obscure the main points of the present disclosure, the detailed description will be omitted. In addition, for components with similar functions and actions, the same figure numbers are used throughout the accompanying drawings. In addition, in this specification, terms such as "upper", "upper part", "upper surface", "lower", "lower part", "lower surface", "side", etc. are based on the accompanying drawings and may change according to the direction in which the components are actually set.

[0036] In addition, throughout the specification, when a component is referred to as being "connected" to another component, it is not only "directly connected" but also "indirectly connected" to other components therebetween. In addition, unless otherwise specified, "comprising" a certain component means that other components may also be included, rather than excluding other components.

[0037] Figures 3 to 6 is a schematic diagram schematically illustrating a substrate processing apparatus according to an embodiment. Figure 3 is a perspective view showing a substrate processing apparatus, Figure 4 Observed from the top Figure 3 A view of a substrate processing device, Figure 5 Observed from AA direction Figure 4 A view of a substrate processing device, and Figure 6 Observed from BB direction Figure 4 View of a substrate processing device.

[0038] refer to Figures 3 to 6 The substrate processing equipment STA includes a loading port 100, an index module 200, a buffer module 300, an application and development module 400, and a cleaning module 800. The loading port 100, the index module 200, the buffer module 300, the application and development module 400, and the interface module 600 are arranged sequentially in one direction.

[0039] Hereinafter, the direction in which the loading port 100, the indexing module 200, the buffer module 300, the coating and developing module 400 and the interface module 600 are arranged is referred to as the first direction Y, and when viewed from the top, the direction perpendicular to the first direction Y is referred to as the second direction X, and the directions perpendicular to the first direction Y and the second direction X, respectively, are referred to as the third direction Z.

[0040] The substrate S moves while being stored in a wafer cassette 110. The wafer cassette 110 has a structure that can be sealed from the outside. As an example, a front opening unified pod (FOUP) having a door at the front may be used as the wafer cassette 110.

[0041] Hereinafter, the load port 100 , the index module 200 , the buffer module 300 , the coating and developing module 400 , and the interface module 600 will be described in detail.

[0042] The load port 100 has a susceptor 120 on which a wafer carrier 110 carrying a substrate S is placed. A plurality of susceptors 120 are provided, and the susceptors 120 are arranged in a row along the second direction X. Figure 4 , an example in which four bases 120 are provided is shown, but the number may be changed.

[0043] The indexing module 200 transfers the substrate S between the wafer carrier 110 disposed on the base 120 of the loading port 100 and the buffer module 300. The indexing module 200 includes a frame 210, an indexing robot 220, and a guide rail 230. The frame 210 is generally configured in the shape of a rectangular parallelepiped having an empty interior, and is disposed between the loading port 100 and the buffer module 300. The frame 210 of the indexing module 200 may be disposed at a lower height than the frame 310 of the buffer module 300. The indexing robot 220 and the guide rail 230 are disposed within the frame 210. The indexing robot 220 is provided so that a gripper 221 that directly manipulates the substrate S can move and rotate in a first direction Y, a second direction X, and a third direction Z. The indexing robot 220 includes a gripper 221, an arm 222, a supporter 223, and a pedestal 224. The gripper 221 is fixedly mounted on the arm 222. The arm 222 is provided in a retractable structure and a rotatable structure. The supporter 223 is provided so that its longitudinal direction is provided as a third direction Z. The arm 222 is coupled to the supporter 223 so as to be movable along the supporter 223. The supporter 223 is fixedly coupled to the base 224. The guide rail 230 is provided so that the longitudinal direction is provided along the second direction X. The base 224 is coupled to the guide rail 230 so that it can move linearly along the guide rail 230. In addition, although not shown, the frame 210 is also provided with a door opener for opening and closing the door of the wafer carrier 110.

[0044] The buffer module 300 includes a frame 310, a first buffer 320, a second buffer 330, a cooling chamber 350, and a first buffer robot 360. The frame 310 is configured to have a rectangular parallelepiped shape with an empty interior, and is disposed between the indexing module 200 and the coating and developing module 400. The first buffer 320, the second buffer 330, the cooling chamber 350, and the first buffer robot 360 are located within the frame 310. The cooling chamber 350, the second buffer 330, and the first buffer 320 are sequentially arranged from below along the third direction Z. The first buffer 320 is located at a height corresponding to the coating module 401 of the coating and developing module 400, and the second buffer 330 and the cooling chamber 350 are disposed at a height corresponding to the developing module 402 of the coating and developing module 400. The first buffer robot 360 is positioned at a distance from the second buffer 330, the cooling chamber 350, and the first buffer 320 in the second direction X. The first buffer 320 and the second buffer 330 each temporarily store a plurality of substrates S. The second buffer 330 has a shell 331 and a plurality of supports 332. The supports 332 are arranged in the shell 331 and are spaced apart from each other along the third direction Z. One substrate S is arranged on each support 332. The shell 331 has an opening in the direction in which the transfer robot 220 is arranged and in the direction in which the first buffer robot 360 is arranged, so that the transfer robot 220 and the first buffer robot 360 can load or unload the substrate S into or from the support 332 in the shell 331. The first buffer 320 has a structure substantially similar to that of the second buffer 330. However, the shell 321 of the first buffer 320 has an opening in the direction in which the first buffer robot 360 is arranged and in the direction in which the coater robot 432 located in the coating module 401 is arranged. The number of the holders 322 provided in the first buffer 320 and the number of the holders 332 provided in the second buffer 330 may be the same or different. According to an example, the number of the holders 332 provided in the second buffer 330 may be greater than the number of the holders 322 provided in the first buffer 320.

[0045] The first buffer robot 360 transfers the substrate S between the first buffer 320 and the second buffer 330. Figure 4As shown in . The first cache robot 360 includes a gripper 361, an arm 362 and a supporter 363. The gripper 361 is fixedly mounted on the arm 362. The arm 362 is configured as a retractable structure so that the gripper 361 can move along the second direction X. The arm 362 is connected to the supporter 363 so as to be able to move linearly in the third direction Z along the supporter 363. The supporter 363 has a length extending from a position corresponding to the second cache 330 to a position corresponding to the first cache 320, and the supporter 363 can be configured to be longer than the length in the upward or downward direction. The first cache robot 360 can be configured so that the gripper 361 is driven only on two axes along the second direction X and the third direction Z.

[0046] The cooling chamber 350 cools the substrate S respectively, such as Figure 5 As shown in . The cooling chamber 350 includes a shell 351 and a cooling plate 352. The cooling plate 352 has an upper surface on which a substrate S is disposed and a cooling unit 353 for cooling the substrate S. In the cooling unit 353, various methods such as cooling using a coolant or cooling using a thermoelectric element can be used. In addition, the cooling chamber 350 can be provided with a lifting pin assembly for positioning the substrate S on the cooling plate 352. The shell 351 has openings in the direction in which the transfer robot 220 is disposed and in the direction in which the developer robot is disposed, so that the transfer robot 220 and the developer robot disposed in the development module 402 can load the substrate S into the cooling plate 352 or unload the substrate S from the cooling plate 352. In addition, the cooling chamber 350 can be provided with a door for opening and closing the above-mentioned opening.

[0047] The coating module 401 includes a process of applying a photosensitive liquid such as a photoresist to a substrate S and a heat treatment process of heating and cooling the substrate S before and after the resist coating process. The coating module 401 has a coating chamber 410, a baking chamber unit 500, and a transfer chamber 430. The coating chamber 410, the transfer chamber 430, and the baking chamber unit 500 are sequentially arranged along the second direction X. For example, based on the transfer chamber 430, the coating chamber 410 is disposed on one side of the transfer chamber 430, and the baking chamber unit 500 is disposed on the other side of the transfer chamber 430.

[0048] The coating chamber 410 may be provided in plurality, and a plurality of coating chambers 410 are provided in each of the first direction Y and the third direction Z. The baking chamber unit 500 includes a plurality of baking chambers 510, and a plurality of baking chambers 510 are provided in each of the first direction Y and the third direction Z. The transfer chamber 430 is positioned parallel to the first buffer 320 of the first buffer module 300 in the first direction Y. The coater robot 432 and the guide rail 433 are located in the transfer chamber 430. The transfer chamber 430 has a substantially rectangular shape. The coater robot 432 transfers the substrate S between the baking chamber 510, the coating chamber 410, and the first buffer 320 of the first buffer module 300.

[0049] The guide rail 433 is arranged so that its longitudinal direction is parallel to the first direction Y. The guide rail 433 guides the applicator robot 432 to move linearly in the first direction Y. Figure 6 As shown in , the applicator robot 432 has a gripper 434, an arm 435, a supporter 436 and a base 437. The gripper 434 is fixedly mounted on the arm 435. The arm 435 is configured to be retractable so that the gripper 434 can move in the horizontal direction. The supporter 436 is configured so that its longitudinal direction is arranged along the third direction Z. The arm 435 is coupled to the supporter 436 so as to be able to move linearly in the third direction Z along the supporter 436. The supporter 436 is fixedly coupled to the base 437, and the base 437 is coupled to the guide rail 433 so as to be able to move along the guide rail 433.

[0050] All coating chambers 410 may have the same structure, but may differ in the type of chemical solution used in the respective coating chambers 410. As the chemical solution, a chemical solution for forming a photoresist film or an anti-reflection film may be used.

[0051] The coating chamber 410 applies a chemical solution on a substrate S. The coating chamber 410 has a cup 411, a substrate supporter 412, and a nozzle 413. The cup 411 has an open top. The substrate supporter 412 is located in the cup 411 and supports the substrate S. The substrate supporter 412 is provided to be rotatable. The nozzle 413 supplies the chemical solution to the substrate S provided on the substrate supporter 412. The chemical solution is applied to the substrate S using a spin coating method. In addition, in the coating chamber 410, a nozzle 414 for supplying a cleaning solution such as deionized water (DIW) to clean the surface of the substrate S on which the chemical solution is applied and a backwash nozzle (not shown) for cleaning the lower surface of the substrate S may also be provided.

[0052] The baking chamber 510 is equipped with a substrate supporter 511 and a heater 512 built into the substrate supporter 511 in an internal processing space, and when the substrate S is set on the substrate supporter 511, the coater robot 432 thermally processes the substrate S. For example, before applying the photoresist, the baking chamber 510 performs a pre-baking process of removing organic matter or moisture on the surface of the substrate S by heating the substrate S to a predetermined temperature, performs a soft baking process after applying the photoresist to the substrate S, etc., and performs a cooling process after each heating process to cool the substrate S, etc.

[0053] The interface module 600 connects the coating and developing module 400 and the external exposure device 700. The interface module 600 includes an interface frame 610, a first interface buffer 620, a second interface buffer 630 and a transfer robot 640, and the transfer robot 640 transfers the substrate S that has been returned to the first interface buffer 620 and the second interface buffer 630 to the exposure device 700 after the coating and developing module 400 is completed. The first interface buffer 620 and the second interface buffer 630 include a housing 621 and a supporter 622, and the transfer robot 640 and the coater robot 432 load the substrate S into the supporter 622 and unload the substrate S from the supporter 622.

[0054] Figure 7 is a schematic diagram illustrating a processing chamber including a substrate supporter according to an embodiment.

[0055] 1. Referring to the drawings, a substrate treating apparatus STA according to an embodiment of the present disclosure may include a process chamber 10, a substrate supporter 20, and a substrate lifting unit 30.

[0056] The processing chamber 10 has a processing space therein in which the substrate S is heat-treated. The processing chamber 10 may include an upper body 11 and a lower body 12 to form the processing space. A sealing member 13 may be installed on one of the upper body 11 and the lower body 12, and a body lifting member 14 may be installed on the upper body 11. A gas supply line g is connected to the upper hole 11a of the upper body 11 so that gas can be supplied to the substrate S. During the heating of the substrate S, gas may be supplied to the processing space to increase the adhesion rate of the photoresist (photosensitive liquid) to the substrate. The processing chamber 10 may be the above-mentioned baking chamber ( Figure 6 510 in the figure), and is not limited by the above description, and can be used in any process for heating a substrate.

[0057] In addition, the substrate supporter 20 is provided in the processing space, and supports and heats the substrate S, which will be described later.

[0058] The substrate lifting unit 30 may include lifting pins 31 and pin driving members 32. The lifting pins 31 are lifted while penetrating the substrate supporter 20 through the pinholes 20h of the substrate supporter 20, and the pin driving members 32 are connected to the lifting pins 31 to lift and lower the lifting pins 31. When the lifting pins 31 are lifted by the pin driving members 32, the lifting pins 31 support the substrate S and lift the substrate S.

[0059] Figure 8 is a view showing an upper portion of a substrate supporter according to an embodiment, Fig. 9 is shown in the heating plate assembled to Figure 8 A cross-sectional view of a state before the heater cup in the substrate support, Fig.10 It is shown Fig. 9 A view of the heater cup, and Fig.11 It is shown Fig. 9 A view of the lower part of the heater cup.

[0060] Referring to the drawings, the substrate supporter 20 may include a heating plate 21 , a heater cup 22 , and an electrical terminal connector 1000 .

[0061] The heating plate 21 has a circular plate shape, and the substrate S is mounted on its upper surface. In addition, the heating plate 21 is equipped with a heater (not shown) and an electric terminal 21a to heat the placed substrate S. The heater is installed inside the heating plate 21, and may be a heating wiring or a thermoelectric element. A plurality of heaters may be arranged in a concentric circle shape, and the electric terminal 21a may be mounted on the end of each of the plurality of heaters. For example, a plurality of electric terminals 21a may be mounted and fixed to the heating plate 21. In addition, a pinhole 20h may be formed in the heating plate 21.

[0062] In addition, the heater cup 22 is formed with a bottom 22b having a support pin 22a supporting the heating plate 21. The heater cup 22 has a structure that supports and surrounds the heating plate 21, and the support pin 22a is installed on the upper portion of the bottom 22b. In addition, a hole cylinder 20c may be installed by penetrating the bottom 22b to communicate with the pinhole 20h of the heating plate 21.

[0063] The electric terminal connector 1000 is installed in the heater cup 22. The electric terminal connector 1000 is used to connect the electric terminal 21a of the heating plate 21 and the cable C, and thus, the power received from the cable C can be supplied to the heater through the electric terminal 21a.

[0064] Prior to a detailed description of the electric terminal connector 1000 according to an embodiment of the present disclosure, a structure of an electric terminal connecting a cable to a heating plate in the related art is as follows.

[0065] Figure 1 and Figure 2 is a schematic diagram showing a cable connected to an electric terminal according to the related art.

[0066] Referring to the drawings, an electric terminal 1a mounted on a heating wiring 1 of a heating plate 21 is formed to protrude downward from a lower surface of the heating plate 21. A cable terminal 2a is formed on an end of a cable 2 in order to be connected to the electric terminal 1a.

[0067] For details, refer to Figure 1 The cable terminal 2a has a female terminal structure formed with an assembly hole, and the electrical terminal 1a has a male terminal structure formed to be inserted into the assembly hole. In order to connect the cable 2 to the electrical terminal 1a of this structure, the electrical terminal 1a is forcibly inserted into the assembly hole of the cable terminal 2a and assembled.

[0068] In addition, refer to Figure 2 , the cable terminal 2a has a female terminal structure with an assembly hole and has a thread line formed on the inner peripheral surface, and the electric terminal 1a has a male terminal structure formed to be inserted into the assembly hole and has a thread line formed on the outer peripheral surface. In order to connect the electric terminal 1a and the cable 2 having this structure to each other, the electric terminal 1a is inserted into the assembly hole of the cable terminal 2a and assembled, and the cable terminal 2a is tightened and rotated.

[0069] However, according to Figure 1 and Figure 2 A problem with the assembly structure of the related art disclosed in is that the cable 2 is easily separated from the electric terminal 1a due to external force or high temperature, which causes disconnection.

[0070] In order to prevent the above-mentioned problem, the electric terminal connector according to the embodiment of the present disclosure is configured as follows.

[0071] Fig.12 It is shown installed in Fig.10 and Fig.11 a longitudinal cross-sectional view of an electrical terminal connector on a heater cup, and Figures 13 to 16 It shows that when Fig. 9 A cross-sectional view of the process of inserting and fixing the electrical terminals of the heating plate into the electrical terminal connectors of the heater cup when the heating plate is assembled to the heater cup.

[0072] 1. Referring to the drawings, a housing unit 1100 of an electric terminal connector 1000 according to an embodiment is mounted by penetrating a heater cup 22 and has a housing ring 1150.

[0073] In addition, the terminal connection unit 1200 is installed to reciprocate within the housing unit 1100, the electrical terminal 21a is attached to and detached from the upper portion of the terminal connection unit 1200, and the cable C can be inserted into and fixed to the lower portion of the terminal connection unit 1200.

[0074] The terminal connection unit 1200 is formed with a terminal connection portion 1212 to which the electric terminal 21 a is attached and detachable.

[0075] In this case, the terminal connection portion 1212 is changed so that the electric terminal 21 a can be inserted when separated from the housing ring 1150, and the electric terminal 21 a can be fixed when inserted into the housing ring 1150 with the inserted electric terminal 21 a.

[0076] In order to examine the variable structure of the above-described terminal connection portion 1212 , the configuration of the terminal connection unit 1200 is examined in detail as follows.

[0077] The terminal connection unit 1200 may include a hollow shaft 1210 having a terminal connection portion 1212 .

[0078] The hollow shaft 1210 has a shaft structure in which a hollow 1210a is formed along a longitudinal direction. At this time, the hollow 1210a is a part into which the electric terminal 21a is inserted.

[0079] The hollow shaft 1210 may include a hollow body 1211 and a terminal connection portion 1212 .

[0080] The terminal connection part 1212 extends from the end of the hollow body 1211. In the drawings, the hollow body 1211 is located on the lower part, and the terminal connection part 1212 is located on the upper part. In this way, since the terminal connection part 1212 has a structure extending from the hollow body 1211, the hollow 1210a is formed along the inside of the hollow body 1211 and the terminal connection part 1212.

[0081] The terminal connection part 1212 is provided by penetrating the housing ring 1150, and, for example, has a structure inserted into the housing ring 1150. In addition, the terminal connection part 1212 extends from the hollow body 1211 and is formed to expand in the radial direction. In detail, the terminal connection part 1212 may have a shape that expands toward the top in the radial direction.

[0082] In more detail, the terminal connection portion 1212 may be composed of a plurality of parts. The plurality of parts have a structure surrounding the hollow 1210a. When the plurality of parts are separated from the housing ring 1150, the distance between the plurality of parts gradually becomes farther. For example, the plurality of parts are formed so that their lower ends extend upward from the hollow body 1211, and as shown in FIG. Fig.14 and Fig.15 As shown in , when the plurality of parts move upward and separate from the housing ring 1150, the pressure caused by the housing ring 1150 is released, thereby increasing the distance between the plurality of parts. In detail, the plurality of parts have a shape that is expanded upward when the plurality of parts are not inserted into the housing ring 1150, and as shown in Fig.16 As shown in , when the plurality of parts are inserted into the housing ring 1150 and pressed by the housing ring 1150 , the plurality of parts have an inwardly contracted shape.

[0083] like Fig.14 and Fig.15 As shown in , when separated from the housing ring 1150, the terminal connection portion 1212 configured as described above allows the electric terminal 21a to be inserted. For example, the plurality of portions move upward and separate from the housing ring 1150 so that the distance between them becomes larger toward the upper side. Therefore, the diameter of the longitudinal hollow 1210a surrounded by the plurality of portions becomes larger toward the top to allow easy insertion of the electric terminal 21a.

[0084] Furthermore, on the contrary, Fig.16 As shown in , when the housing ring 1150 is inserted together with the electrical terminal 21a, the terminal connection portion 1212 fixes the electrical terminal 21a. For example, the plurality of portions move downward and move within the housing ring 1150, thereby reducing the gap therebetween. As a result, the diameter of the longitudinal hollow 1210a surrounded by the plurality of portions becomes smaller, thereby pressing the electrical terminal 21a and fixing the electrical terminal 21a.

[0085] On the other hand, the terminal connection unit 1200 may further include an elastic member 1220, such as Figures 12 to 16 as shown in .

[0086] The elastic member 1220 connects the housing unit 1100 and the hollow shaft 1210, and when the terminal connection portion 1212 is separated from the housing ring 1150, an elastic force is applied to the hollow shaft 1210 so that the terminal connection portion 1212 moves back into the housing ring 1150. For example, the hollow shaft 1210 is connected to the housing unit 1100 fixed to the heater cup 22 through the elastic member 1220, and when the hollow shaft 1210 rises upward to be separated from the housing ring 1150 of the housing unit 1100, the hollow shaft 1210 is pulled by the elastic force of the elastic member 1220, moves downward, and moves back into the housing ring 1150. At this time, the connection structure of the elastic member 1220 to the housing unit 1100 and the hollow shaft 1210 includes not only a direct connection structure but also an indirect connection structure.

[0087] As a detailed example of the indirect connection structure, the terminal connection unit 1200 may further include a connection pipe 1230 and a support member 1240 .

[0088] The connecting tube 1230 has a structure in which the end of the hollow shaft 1210 is inserted and fastened to one end thereof and the cable C can be inserted into the other end thereof. For example, the connecting tube 1230 has a tube hole 1230a formed therein, and the lower end of the hollow shaft 1210 is inserted into and fastened to the upper end of the connecting tube 1230, and the cable C can be inserted into the lower end thereof. In this way, as the cable C is inserted into the lower part of the connecting tube 1230, by inserting the electric terminal 21a into the connecting tube 1230 through the hollow shaft 1210, the electric terminal 21a and the cable C can contact each other and be electrically connected to each other. The hollow shaft 1210 and the connecting tube 1230 can be formed of a conductive material. Therefore, in the case where there is no direct contact between the electric terminal 21a and the cable C, the electric terminal 21a and the cable C can be electrically connected through the hollow shaft 1210 and the connecting tube 1230.

[0089] In addition, the support member 1240 may be formed with a support hole 1240a into which the other end of the connecting pipe 1230 is inserted and fastened. A fixing groove 1240b may be formed in the support member 1240, the elastic member 1220 is fixed in the fixing groove 1240b, and the hollow shaft 1210 may be connected to the elastic member 1220 through the connecting pipe 1230 and the support member 1240. As a detailed example, the support member 1240 may be composed of a sleeve 1241 and a pusher 1242 assembled together. The support hole 1240a is formed in the sleeve 1241, the fixing groove 1240b is formed in the pusher 1242, and the assembly hole 1242a may be formed in the pusher 1242 into which the lower portion of the sleeve 1241 is screwed.

[0090] like Fig.14 and Fig.15As shown in , when external force is applied upward to the pusher 1242 of the above-mentioned support member 1240, since the sleeve 1241 and the hollow shaft 1210 are pushed upward together with the pusher 1242, the terminal connection part 1212 of the hollow shaft 1210 rises and separates from the housing ring 1150, and the electric terminal 21a can be inserted into the terminal connection part 1212. In this way, as Fig.16 As shown in the figure, when the electrical terminal 21a is inserted into the terminal connecting part 1212 and the external force applied to the pusher 1242 disappears, the sleeve 1241 and the hollow shaft 1210 are pushed downward together with the pusher 1242 by the elastic force of the elastic member 1220, the terminal connecting part 1212 of the hollow shaft 1210 is lowered and re-enters the shell ring 1150, and therefore, the electrical terminal 21a is fixed to the terminal connecting part 1212.

[0091] As described above, a separate jig (not shown) may be used to apply external force to the pusher 1242. A plurality of pressing portions are formed in the jig so that pressure can be simultaneously applied to a plurality of pushers 1242 formed on a plurality of electrical terminal connectors 1000.

[0092] Meanwhile, as an example, the housing unit 1100 may include a base member 1110 , a threaded tube 1140 , and a housing ring 1150 .

[0093] The base member 1110 is installed by penetrating the bottom 22b of the heater cup 22, and can be installed by screwing, for example. The base member 1110 may have a base hole 1110a formed in the longitudinal direction. Moreover, a base entrance portion 1110b connected to the base hole 1110a is formed in the base member 1110, and the inner space of the base entrance portion 1110b may be tapered toward the base hole 1110a. The base entrance portion 1110b formed in a tapered manner can guide the electric terminal 21a of the heating plate 21 to be inserted into the base hole 1110a.

[0094] In addition, as an example, the threaded pipe 1140 is installed in the base hole 1110a and may be installed by screwing. The threaded pipe 1140 may have a pipe hole 1140a formed in a longitudinal direction.

[0095] In addition, the housing ring 1150 is installed and fixed in the tube hole 1140a, and in detail, may be disposed in an upper portion inside the tube hole 1140a. The housing ring 1150 has a ring shape, and has a structure surrounding and pressing the terminal connection part 1212 disposed therein.

[0096] Fig.17 is a schematic diagram showing an electrical terminal connector according to another embodiment, Fig.18 It is shown Fig.17A longitudinal cross-sectional view of an electrical terminal connector, and Fig.19 It is shown Fig.17 An exploded perspective view of an electrical terminal connector.

[0097] 1. Referring to the drawings, a housing unit 1100 according to another embodiment may include a base body 1111, a housing 1112, a snap ring 1130, a threaded tube 1140, and a housing ring 1150.

[0098] The base body 1111 may be installed by penetrating the heater cup 22, and may have a body hole 1111a.

[0099] In addition, the housing 1112 may be installed by penetrating the body hole 1111a, and may have a housing hole 1112a formed in the housing 1112. In the housing 1112, even if there is a slight difference in the position between the plurality of electrical terminals 21a and the plurality of electrical terminal connectors 1000, the side of the housing 1112 may be separated from the inner surface of the body hole 1111a by an appropriate distance, thereby solving the difference. The plurality of electrical terminals 21a are installed on the heating plate 21, and the plurality of electrical terminal connectors 1000 are installed on the heater cup 22 to correspond thereto. The plurality of electrical terminal connectors 1000 should be located on the heater cup 22 to correspond to the positions of the plurality of electrical terminals 21a, and in this case, some of the plurality of electrical terminal connectors 1000 may have a slight difference in position with the corresponding electrical terminals 21a. The housing 1112 may have a housing groove 1112b formed on the side to have a space spaced apart from the inner surface of the body hole 1111a, so that despite these position differences, the plurality of electrical terminals 21a can be smoothly and firmly connected to the plurality of electrical terminal connectors 1000. For example, the housing 1112 is installed by penetrating the body hole 1111a, and the housing groove 1112b is formed along the outer peripheral surface so that the housing 1112 can be set at an appropriate distance from the inner surface of the body hole 1111a. By adopting this structure, the housing 1112 can be moved laterally to a certain extent within the body hole 1111a, and the terminal connection unit 1200 can also be moved, and the electrical terminal 21a is attached to the terminal connection unit 1200 and can be detached. Therefore, even if the positions of the electrical terminals 21a and the electrical terminal connector 1000 corresponding to each other are slightly different, by moving the terminal connection unit 1200 of the electrical terminal connector 1000 to the corresponding position of the electrical terminal 21a, the corresponding electrical terminal 21a and the electrical terminal connector 1000 can be smoothly and firmly connected.

[0100] In addition, a housing inlet 1112c connected to the housing hole 1112a is formed in the housing 1112, and the inner space of the housing inlet 1112c may be tapered toward the housing hole 1112a. The housing inlet 1112c formed as a tapered shape in this way can guide the electric terminal 21a of the heating plate 21 into the housing hole 1112a.

[0101] In addition, a snap ring 1130 may be provided between a lower jaw of the base body 1111 and a lower jaw of the housing 1112. The snap ring 1130 is inserted between the lower jaw of the base body 1111 and the lower jaw of the housing 1112, thereby preventing the housing 1112 from being separated.

[0102] The threaded tube 1140 is installed in the housing hole 1112a, and as an example, may be installed by screwing. The threaded tube 1140 may have a tube hole 1140a formed in a longitudinal direction.

[0103] In addition, the housing ring 1150 is installed and fixed in the tube hole 1140a, and in detail, may be disposed in an upper portion inside the tube hole 1140a. The housing ring 1150 has a ring shape, and has a structure surrounding and pressing the terminal connection part 1212 disposed therein.

[0104] In addition, Figures 17 to 19 Components not described in Figures 12 to 16 Components having the same reference numerals as those shown in FIG. 1 have the same structures, and thus, description thereof will be omitted.

[0105] Therefore, the electrical terminal connector 1000 according to the embodiment of the present disclosure has the terminal connection part 1212, and the terminal connection part 1212 has a variable structure, thereby reducing the number of man-hours for assembling the cable C to the electrical terminal 21a, and furthermore, the electrical terminal 21a and the cable C can be securely assembled. In detail, in the present disclosure, when the terminal connection part 1212 is separated from the housing ring 1150, the electrical terminal 21a is configured to be inserted into the terminal connection part 1212, and when the terminal connection part 1212 is inserted into the housing ring 1150 together with the electrical terminal 21a, a structure for fixing the electrical terminal 21a can be obtained. Therefore, in the present disclosure, the electrical terminal 21a can be easily inserted into and fixed to the terminal connection part 1212, thereby reducing the number of man-hours for assembling the cable C for the electrical terminal 21a, and furthermore, the electrical terminal 21a and the cable C can be securely assembled.

[0106] In addition, the electrical terminal connector 1000 according to the embodiment of the present disclosure is installed by penetrating the heater cup 22, and therefore, it is possible to prevent a plurality of cables C from being complicatedly arranged in the space between the heating plate 21 and the heater cup 22, and therefore, during forced cooling, cooling can be obtained well and evenly. In detail, as an example during a baking process, forced cooling can be performed to reduce the temperature from 120°C to 90°C. For this cooling, cooling air can be supplied between the bottom 22b of the heater cup 22 and the heating plate 21. However, in the related art, the cable C is directly connected to the electrical terminal 21a of the heating plate 21, and therefore, many cables C are complicatedly and irregularly arranged between the heating plate 21 and the bottom 22b of the heater cup 22, and in the supply of cooling air, there is also a limitation that cooling cannot be performed well and cannot be performed evenly due to interference from a large number of cables C. In contrast, the present disclosure adopts a structure in which the electrical terminal 21a and the cable C are connected by the electrical terminal connector 1000 arranged by penetrating the heater cup 22. Therefore, in the present disclosure, as Figures 9 to 11 As shown in FIG. 2 , since a large number of cables C are disposed below the bottom 22 b of the heater cup 22 rather than between the heating plate 21 and the bottom 22 b of the heater cup 22 , and during forced cooling, cooling can be obtained well and uniformly.

[0107] As set forth above, according to the embodiment, when the terminal connection portion having a variable structure is configured, the number of hours for fitting the cable to the electric terminal can be reduced, and also the effect of firmly fitting the electric terminal and the cable can be obtained.

[0108] Furthermore, in the embodiment, the electric terminal and the electric cable are connected via the electric terminal connector provided by penetrating the heater cup, and therefore, a relatively large amount of electric cable is provided under the bottom of the heater cup, rather than between the heating plate and the bottom of the heater cup. Therefore, cooling occurs well during forced cooling, and further, it has the advantage of allowing uniform cooling.

[0109] While exemplary embodiments have been shown and described above, it will be apparent to those skilled in the art that modifications and variations may be made without departing from the scope of the present disclosure as defined by the appended claims.

Claims

1. An electrical terminal connector, comprising: a housing unit mounted by penetrating the heater cup and having a housing ring; as well as a terminal connection unit installed to reciprocate within the housing unit and having a terminal connection portion to which an electric terminal is attached and from which an electric terminal is detached, The terminal connection part is variable so that the electrical terminal can be inserted when the terminal connection part is separated from the housing ring, and the electrical terminal is fixed when the terminal connection part is inserted into the housing ring together with the inserted electrical terminal.

2. The electrical terminal connector according to claim 1, wherein: The terminal connection unit includes a hollow shaft having the terminal connection portion, Wherein, the hollow shaft comprises: A hollow body; and The terminal connection portion is provided by penetrating the housing ring and extends in a radial direction while extending from an end of the hollow body, The terminal connection portion is formed of a plurality of portions that are spaced apart from each other, and when the plurality of portions are separated from the housing ring, a distance between the plurality of portions gradually increases.

3. The electrical terminal connector according to claim 2, wherein: The terminal connection unit further includes an elastic member connecting the housing unit and the hollow shaft and applying an elastic force to the hollow shaft so that when the terminal connection part is separated from the housing ring, the terminal connection part moves back into the housing ring.

4. The electrical terminal connector according to claim 3, wherein: The terminal connection unit further includes: a connecting pipe having one end into which the end of the hollow shaft is inserted and fastened, and another end into which a cable can be inserted; and a supporting member provided with a supporting hole into which the other end of the connecting pipe is inserted and fastened, The supporting member is provided with a fixing groove, the elastic member is fixed in the fixing groove, and the hollow shaft is connected to the elastic member through the connecting pipe and the supporting member.

5. The electrical terminal connector according to claim 4, wherein: The hollow shaft and the connecting pipe are formed of a conductive material.

6. The electrical terminal connector according to claim 1, wherein: The housing unit comprises: a base member mounted by penetrating the heater cup and having a base hole; a threaded pipe installed in the base hole and having a pipe hole; and The shell ring is installed in the pipe hole.

7. The electrical terminal connector according to claim 6, wherein: The base member is provided with a base entrance portion connected to the base hole, and an inner space of the base entrance portion is tapered toward the base hole.

8. The electrical terminal connector according to claim 1, wherein: The housing unit comprises: a base body mounted by penetrating the heater cup and having a body hole; a housing mounted by penetrating the body hole, having a housing hole, and having a housing groove provided on a side portion to have a space spaced apart from an inner surface of the body hole; A snap ring, disposed between the lower jaw of the base body and the lower jaw of the shell; a threaded pipe installed in the housing hole and having a pipe hole; and The shell ring is installed in the pipe hole.

9. The electrical terminal connector according to claim 8, wherein: The housing has a housing inlet connected to the housing hole, and an inner space of the housing inlet is tapered toward the housing hole.

10. A substrate support device comprising: a heating plate provided with a heater and electrical terminals connected to the heater; a heater cup formed with a bottom having support pins for supporting the heater plate; as well as an electrical terminal connector mounted on the heater cup, Wherein, the electrical terminal connector comprises: a housing unit mounted by penetrating the heater cup and having a housing ring; and a terminal connection unit installed to reciprocate within the housing unit and having a terminal connection portion to which an electric terminal can be attached and detached, and The terminal connection portion has a variable structure so that the electric terminal is insertable when the terminal connection portion is separated from the housing ring, and the electric terminal is fixed when the terminal connection portion is inserted into the housing ring together with the inserted electric terminal.

11. The substrate support according to claim 10, wherein: The terminal connection unit includes a hollow shaft having the terminal connection portion, Wherein, the hollow shaft comprises: a hollow body disposed through the housing ring; and The terminal connection portion extends from an end of the hollow body and has a gradually expanding cross-sectional area; and The terminal connection portion has a structure in which a distance between a plurality of portions spaced apart from each other increases as being away from the hollow body.

12. The substrate support according to claim 11, wherein: The terminal connection unit further includes an elastic member connecting the housing unit and the hollow shaft and providing elastic force to the hollow shaft so that when the terminal connection part is separated from the housing ring, the terminal connection part moves back into the housing ring.

13. The substrate support according to claim 12, wherein: The terminal connection unit further includes: a connecting pipe having one end into which the end of the hollow shaft is inserted and fastened, and another end into which a cable can be inserted; and a supporting member provided with a supporting hole into which the other end of the connecting pipe is inserted and fastened, The supporting member is provided with a fixing groove, the elastic member is fixed in the fixing groove, and the hollow shaft is connected to the elastic member through the connecting pipe and the supporting member, and The hollow shaft and the connecting pipe are made of conductive material.

14. The substrate support according to claim 10, wherein: The housing unit comprises: a base member installed by penetrating the bottom of the heater cup and having a base hole; a threaded pipe installed in the base hole and having a pipe hole; and The housing ring is installed in the pipe hole. Wherein, the base member is provided with a base entrance portion connected to the base hole, and an inner space of the base entrance portion is tapered toward the base hole.

15. The substrate support according to claim 10, wherein: The housing unit comprises: a base body mounted by penetrating the bottom of the heater cup and having a body hole therein; a housing mounted by penetrating the body hole, having a housing hole in the housing, and having a housing groove provided on a side portion to have a space spaced apart from an inner surface of the body hole; A snap ring, disposed between the lower jaw of the base body and the lower jaw of the shell; a threaded pipe installed in the housing hole and having a pipe hole; and The housing ring is installed in the pipe hole. The housing has a housing inlet connected to the housing hole, and an inner space of the housing inlet is tapered toward the housing hole.

16. A substrate processing device comprising: a processing chamber, comprising an upper body and a lower body to form a processing space in the processing chamber; a substrate supporter disposed in the processing space and supporting and heating the substrate; as well as a substrate lifting unit including a lifting pin that lifts and lowers while penetrating the substrate supporter, and a pin driving member that lifts and lowers the lifting pin, Wherein, the substrate support comprises: a heating plate provided with a heater and electrical terminals connected to the heater; a heater cup formed with a bottom having support pins for supporting the heater plate; and an electrical terminal connector mounted on the heater cup, Wherein, the electrical terminal connector comprises: a housing unit mounted by penetrating the heater cup and having a housing ring; and a terminal connection unit installed to reciprocate within the housing unit and having a terminal connection portion to which an electric terminal can be attached and detached, and The terminal connection portion has a variable structure so that the electric terminal is insertable when the terminal connection portion is separated from the housing ring, and the electric terminal is fixed when the terminal connection portion is inserted into the housing ring together with the inserted electric terminal.

17. The substrate processing apparatus according to claim 16, wherein: The terminal connection unit includes a hollow shaft having the terminal connection portion, Wherein, the hollow shaft comprises: a hollow body disposed through the housing ring; and the terminal connection portion having a gradually expanding cross-sectional area while extending from an end of the hollow body, and The terminal connection portion has a structure in which a distance between a plurality of portions spaced apart from each other increases as being away from the hollow body.

18. The substrate processing apparatus according to claim 17, wherein: The terminal connection unit further includes an elastic member connecting the housing unit and the hollow shaft and providing elastic force to the hollow shaft so that when the terminal connection part is separated from the housing ring, the terminal connection part moves back into the housing ring.

19. The substrate processing apparatus according to claim 18, wherein: The terminal connection unit further includes: a connecting pipe having one end into which the end of the hollow shaft is inserted and fastened, and another end into which a cable can be inserted; and a supporting member provided with a supporting hole into which the other end of the connecting pipe is inserted and fastened, wherein the supporting member is provided with a fixing groove, the elastic member is fixed in the fixing groove, and the hollow shaft is connected to the elastic member through the connecting pipe and the supporting member, and The hollow shaft and the connecting pipe are made of conductive material.

20. The substrate processing apparatus according to claim 16, wherein: The housing unit comprises: a base body mounted by penetrating the bottom of the heater cup and having a body hole therein; a housing mounted by penetrating the body hole, having a housing hole in the housing, and having a housing groove provided on a side portion to have a space spaced apart from an inner surface of the body hole; A snap ring, disposed between the lower jaw of the base body and the lower jaw of the shell; a threaded pipe installed in the housing hole and having a pipe hole; and The housing ring is mounted in the pipe hole, and The housing has a housing inlet connected to the housing hole, and an inner space of the housing inlet is tapered toward the housing hole.

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