Phase shifter and antenna

Abstract

The invention discloses a phase shifter and an antenna. A phase shifter wire of the phase shifter comprises at least one transmission unit, each transmission unit comprises a first wire segment and a second wire segment which are connected with each other, a first through hole is formed in a grounding electrode layer, the first wire segment is covered with the first through hole in the direction perpendicular to the plane where the grounding electrode layer is located, and the second wire segment is covered with the grounding electrode layer in the direction perpendicular to the plane where the grounding electrode layer is located. In the first direction, the length of the second wiring section is larger than that of the first wiring section, and the first direction is perpendicular to the extension direction of the phase shifter wiring. According to the phase shifter and the antenna provided by the embodiment of the invention, through the defected ground structure and the parallel branch structure, the equivalent inductor and the equivalent capacitor are introduced on the phase shifter wiring, so that the slow wave effect is realized, the length of the phase shifter wiring can be remarkably shortened, the transmission path length of a radio frequency signal on the phase shifter wiring is reduced, and the transmission efficiency of the antenna is improved. The loss of a radio frequency signal on a phase shifter wire is reduced, and the beam quality and the radiation power of the antenna are improved.

Description

Technical Field

[0001] The present invention relates to the field of communication technology, and in particular to a phase shifter and an antenna. Background Art

[0002] Phase shifters are key components for adjusting the phase of radio frequency signals. They are widely used in satellite communications and 5G millimeter wave base stations. Their main function is to control the propagation characteristics of electromagnetic waves by changing the phase of the signal. In phased array antenna systems, phase shifters are particularly important, as they determine the phase difference between multiple antenna elements, thereby affecting the superposition direction and beam pointing of electromagnetic waves.

[0003] Phase shifters can be used in phased array antennas to maximize the signal sensitivity or transmission power in a certain direction. In order to enhance electromagnetic radiation in a certain direction, the phased array antenna contains multiple closely distributed radiating electrodes, and the phase difference of the signals transmitted or received by these radiating electrodes can be predetermined to maximize the signal superposition in a specific direction, thereby enhancing the signal sensitivity or transmission power in that direction.

[0004] However, existing phase shifters have the problem of large signal loss, which affects the beam quality and radiation power of the antenna. Summary of the invention

[0005] The present invention provides a phase shifter and an antenna to reduce signal loss and improve the beam quality and radiation power of the antenna.

[0006] According to one aspect of the present invention, there is provided a phase shifter, comprising at least one phase shifting unit;

[0007] The phase shift unit comprises a phase shifter line, an adjustable dielectric layer and a ground electrode layer, the phase shifter line and the ground electrode layer are arranged opposite to each other, and the adjustable dielectric layer is located between the phase shifter line and the ground electrode layer;

[0008] The phase shifter routing includes at least one transmission unit;

[0009] The transmission unit comprises a first routing segment and a second routing segment connected to each other, and a first through hole is provided on the ground electrode layer;

[0010] Along a direction perpendicular to the plane where the ground electrode layer is located, the first through hole covers the first routing segment, and the ground electrode layer covers the second routing segment;

[0011] Along the first direction, the length of the second routing segment is greater than the length of the first routing segment;

[0012] The first direction is perpendicular to an extending direction of the phase shifter wiring.

[0013] According to another aspect of the present invention, an antenna is provided, comprising the phase shifter described in the first aspect.

[0014] The phase shifter and antenna provided in the embodiments of the present invention are provided with a phase shifter line including at least one transmission unit. By providing a defective ground structure and a parallel branch structure in the transmission unit, an equivalent inductance and an equivalent capacitance are introduced on the phase shifter line, the distributed inductance and distributed capacitance on the phase shifter line are increased, the phase velocity and the wavelength are reduced, and the slow wave effect is achieved. In this way, the same or greater phase change can be achieved within a shorter physical length, so that the length of the phase shifter line can be significantly shortened, thereby reducing the transmission path length of the radio frequency signal on the phase shifter line, reducing the loss of the radio frequency signal on the phase shifter line, and thus improving the beam quality and radiation power of the antenna.

[0015] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0017] Figure 1 A schematic diagram of the structure of a phase shifter provided by an embodiment of the present invention;

[0018] Figure 2 for Figure 1 A schematic diagram of the enlarged structure at A;

[0019] Figure 3 for Figure 2 Schematic diagram of the cross-sectional structure along the B-B' direction;

[0020] Figure 4 A schematic diagram of an equivalent circuit of a transmission unit provided by an embodiment of the present invention;

[0021] Figure 5 A schematic diagram of a partial structure of a phase shifter provided in an embodiment of the present invention;

[0022] Figure 6 A schematic diagram of a partial structure of another phase shifter provided in an embodiment of the present invention;

[0023] Figure 7 A schematic diagram of a partial structure of another phase shifter provided in an embodiment of the present invention;

[0024] Figure 8 A schematic diagram of the structure of another phase shifter provided by an embodiment of the present invention;

[0025] Fig. 9 for Figure 8 A schematic diagram of the enlarged structure at C;

[0026] Fig.10 A schematic diagram of an equivalent circuit of another transmission unit provided by an embodiment of the present invention;

[0027] Fig.11 A schematic diagram of a partial structure of another phase shifter provided in an embodiment of the present invention;

[0028] Fig.12 A schematic diagram of a partial structure of another phase shifter provided in an embodiment of the present invention;

[0029] Fig.13 A schematic diagram of a partial structure of another phase shifter provided in an embodiment of the present invention;

[0030] Fig.14 A schematic diagram of the structure of an antenna provided by an embodiment of the present invention;

[0031] Fig.15 A schematic diagram of a partial cross-sectional structure of an antenna provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0032] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0033] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0034] Figure 1 A schematic diagram of the structure of a phase shifter provided in an embodiment of the present invention is shown in FIG. Figure 2 for Figure 1 A schematic diagram of the enlarged structure at A. Figure 3 for Figure 2 The schematic diagram of the cross-sectional structure along the B-B' direction is as follows: Figure 1-Figure 3 As shown, the phase shifter provided in the embodiment of the present invention includes at least one phase shift unit 10. The phase shift unit 10 includes a phase shifter line 101, an adjustable dielectric layer 102 and a ground electrode layer 103. The phase shifter line 101 and the ground electrode layer 103 are arranged opposite to each other, and the adjustable dielectric layer 102 is located between the phase shifter line 101 and the ground electrode layer 103. The phase shifter line 101 includes at least one transmission unit 20. The transmission unit 20 includes a first line segment 201 and a second line segment 202 connected to each other, and a first through hole 30 is arranged on the ground electrode layer 103. In a direction perpendicular to the plane where the ground electrode layer 103 is located, the first through hole 30 covers the first line segment 201, and the ground electrode layer 103 covers the second line segment 202. In the first direction X, the length of the second line segment 202 is greater than the length of the first line segment 201. The first direction X is perpendicular to the extension direction of the phase shifter line 101.

[0035] Specifically, Figure 1-Figure 3 As shown, the phase shifter includes at least one phase shift unit 10 , each phase shift unit 10 includes a phase shifter trace 101 , the phase shifter trace 101 is used to transmit a radio frequency signal, and the phase shift unit 10 is used to implement a phase shift function of the radio frequency signal transmitted on the phase shifter trace 101 .

[0036] Among them, the phase shifter may include a plurality of phase shifting units 10 distributed in an array to simultaneously shift the phase of the RF signals transmitted on a plurality of phase shifter traces 101, control the phase of the RF signal in each phase shifting unit 10, and then control the phase difference between each phase shifting unit 10 to achieve control of the direction of the antenna radiation beam and realize efficient beam scanning.

[0037] It should be noted that Figure 1 In the figure, the phase shifter includes four phase shifting units 10 as an example for illustration. In other embodiments, those skilled in the art may set the number and layout of the phase shifting units 10 according to actual needs, and the embodiment of the present invention is not limited thereto.

[0038] Continue to refer Figure 1-Figure 3 The phase shift unit 10 includes a phase shifter line 101 and a ground electrode layer 103 that are arranged opposite to each other, and an adjustable dielectric layer 102 is arranged between the phase shifter line 101 and the ground electrode layer 103. The radio frequency signal transmitted on the phase shifter line 101 is transmitted in the adjustable dielectric layer 102 between the phase shifter line 101 and the ground electrode layer 103.

[0039] The adjustable dielectric layer 102 is made of a dielectric material with an adjustable dielectric constant, and the dielectric constant of the adjustable dielectric layer 102 can be dynamically adjusted by applying different light or voltage.

[0040] The change in the dielectric constant of the adjustable dielectric layer 102 affects the propagation speed and phase of the RF signal in the adjustable dielectric layer 102. For example, a higher dielectric constant will slow down the propagation speed of the RF signal, resulting in a greater phase delay; conversely, a lower dielectric constant will make the RF signal propagate faster and reduce the phase delay.

[0041] Therefore, by precisely controlling the dielectric constant of the adjustable dielectric layer 102 , the RF signal transmitted on the phase shifter trace 101 can be phase shifted, thereby changing the phase of the RF signal and achieving a phase shifting function of the RF signal.

[0042] It should be noted that the material of the adjustable dielectric layer 102 can be set according to actual needs, and the embodiment of the present invention does not specifically limit this.

[0043] Optional, such as Figure 1-Figure 3 As shown, taking a liquid crystal phase shifter (LCPS) as an example, the adjustable dielectric layer 102 includes a liquid crystal layer 30. At this time, a driving voltage can be connected through the phase shifter wiring 101 to form an electric field between the phase shifter wiring 101 and the ground electrode layer 103. The electric field can drive the liquid crystal molecules 300 in the liquid crystal layer 30 to deflect, thereby changing the dielectric constant of the liquid crystal layer 30, and realizing dynamic adjustment of the dielectric constant of the adjustable dielectric layer 102.

[0044] The driving voltage may also be connected through other wirings except the phase shifter wiring 101 to form an electric field between the phase shifter wiring 101 and the ground electrode layer 103 , which is not specifically limited in the embodiment of the present invention.

[0045] In other embodiments, the tunable dielectric layer 102 may also include a photodielectric layer. In this case, by introducing light of different intensities or different wavelengths into the photodielectric layer, the structure and morphology of the material molecules in the photodielectric layer may change, thereby modulating the anisotropy of the physical properties of the photodielectric layer material and changing the dielectric constant of the photodielectric layer, thereby achieving dynamic adjustment of the dielectric constant of the tunable dielectric layer 102.

[0046] The material of the photodielectric layer may include liquid crystal polymer, azo dye or azo polymer, etc., which is not specifically limited in the embodiment of the present invention.

[0047] Continue to refer Figure 1-Figure 3Optionally, the phase shifter includes a first substrate 11 and a second substrate 12 that are relatively arranged, and the phase shift unit 10 can be arranged between the first substrate 11 and the second substrate 12, wherein the first substrate 11 and the second substrate 12 can provide stable mechanical support for the phase shift unit 10, enhance the strength and durability of the phase shifter, and facilitate manufacturing.

[0048] Specifically, Figure 1-Figure 3 As shown, the ground electrode layer 103 in the phase shift unit 10 can be prepared on the first substrate 11 , the phase shifter trace 101 can be prepared on the second substrate 12 , and the adjustable dielectric layer 102 is filled between the first substrate 11 and the second substrate 12 .

[0049] Optionally, the first substrate 11 and the second substrate 12 can be made of a glass substrate or a printed circuit board (PCB) to ensure efficient signal transmission and provide good mechanical strength. The glass substrate can achieve higher preparation accuracy and higher transparency, which can make the appearance of the antenna more beautiful. The printed circuit board is conducive to the setting of the circuit. The printed circuit board can adopt a high-frequency substrate so that the frequency can be above 1 GHz. By using a low-loss high-frequency substrate, the loss of the printed circuit board to the radio frequency signal can be effectively reduced, thereby improving the performance of the antenna. The embodiment of the present invention does not make any specific limitations.

[0050] Furthermore, the inventors have discovered through research that the longer the distance that the RF signal propagates on the phase shifter trace 101, the greater the accumulated phase delay, and the greater the adjustable range of the phase. Therefore, in order to achieve the expected adjustable range of the phase difference, it is usually necessary to arrange a longer phase shifter trace 101 to provide sufficient phase change. However, as the length of the phase shifter trace 101 increases, the path that the RF signal propagates on the phase shifter trace 101 will become longer, which will in turn increase the loss of the RF signal on the phase shifter trace 101, ultimately affecting the beam quality and radiation power of the antenna.

[0051] Based on the above technical problems, in this embodiment, if Figure 1-Figure 3 As shown, the phase shifter routing 101 includes at least one transmission unit 20, and each transmission unit 20 is composed of two interconnected routing segments.

[0052] At the same time, a first through hole 30 is provided on the ground electrode layer 103. In a direction perpendicular to the plane where the ground electrode layer 103 is located, the routing segment in the transmission unit 20 that overlaps with the first through hole 30 is a first routing segment 201, and the routing segment in the transmission unit 20 that overlaps with the ground electrode layer 103 is a second routing segment 202.

[0053] Among them, the first through hole 30 and the first routing segment 201 constitute a defective ground structure (Defected Ground Structure, DGS), which sets the first through hole 30 on the ground electrode layer 103 so that the return current on the ground electrode layer 103 cannot flow along the original path, but is forced to bypass the first through hole 30, thereby changing the return path of the return current on the ground electrode layer 103, so that the actual path of the return current becomes longer. Since the inductance is proportional to the path length of the current, therefore, setting the defective ground structure in the transmission unit 20 is equivalent to connecting an equivalent inductor in series on the phase shifter routing 101, thereby increasing the distributed inductance on the phase shifter routing 101.

[0054] Furthermore, a parallel stub structure is formed between the second wiring segment 202 and the ground electrode layer 103 overlapping therewith, wherein Figure 1-Figure 3 As shown, along the direction perpendicular to the extension direction of the phase shifter line 101, or in other words, along the direction perpendicular to the transmission direction of the RF signal on the phase shifter line 101 (i.e., the first direction X), the length D0 of the second line segment 202 is greater than the length D4 of the first line segment 201, so that an additional conductor branch is introduced on at least one side of the phase shifter line 101. The additional conductor branch can increase the capacitive coupling area between the second line segment 202 and the ground electrode layer 103. Therefore, providing a parallel branch structure in the transmission unit 20 is equivalent to introducing a parallel capacitance branch on the phase shifter line 101, which can increase the distributed capacitance of the phase shifter line 101.

[0055] Figure 4 An equivalent circuit diagram of a transmission unit provided by an embodiment of the present invention is shown in FIG. Figure 1-Figure 4 As shown, in the transmission unit 20 , the defective ground structure can be equivalent to adding a series equivalent inductor 201L on the phase shifter wiring 101 , and the parallel branch structure can be equivalent to adding a parallel equivalent capacitor 202C on the phase shifter wiring 101 .

[0056] The RF signal can satisfy the formula when transmitting

[0057] Among them, v φ is the phase velocity, ie, the speed at which the RF signal propagates in the phase shifter trace 101 .

[0058] L is the distributed inductance, which refers to the inductance per unit length.

[0059] C is the distributed capacitance, which refers to the capacitance per unit length.

[0060] f is the frequency of the RF signal.

[0061] λ is the wavelength of the RF signal.

[0062] It can be seen that by setting a defective ground structure and a parallel branch structure in the transmission unit 20, an equivalent inductance 201L and an equivalent capacitance 202C are introduced on the phase shifter line 101, and the distributed inductance L and the distributed capacitance C on the phase shifter line 101 are increased. The increase of the distributed inductance L and the distributed capacitance C can reduce the phase velocity v φ , to achieve a slow wave effect, the wavelength λ will also decrease under the condition that the frequency f remains unchanged, so that the same or greater phase change can be achieved in a shorter physical length, so that the length of the phase shifter trace 101 can be significantly shortened, thereby reducing the transmission path length of the RF signal on the phase shifter trace 101, reducing the loss of the RF signal on the phase shifter trace 101, and thus improving the beam quality and radiation power of the antenna.

[0063] Furthermore, the performance index of the phase shifter can be evaluated by the figure of merit (FoM), and the figure of merit FoM satisfies the formula FoM = ΔΦ b,max / IL max .

[0064] Among them, ΔΦ b,max Indicates the maximum phase deviation of the phase shifter. This is the maximum phase change that the phase shifter can achieve, usually expressed in degrees (°) or radians (rad).

[0065] IL max Indicates the maximum insertion loss of the phase shifter. Insertion loss refers to the power loss when the signal passes through the phase shifter, usually in decibels (dB).

[0066] As mentioned above, in this embodiment of the invention, by setting a defective ground structure and a parallel branch structure in the transmission unit 20, the distributed inductance L and the distributed capacitance C on the phase shifter line 101 are increased, and the phase velocity v is reduced. φ , realizing the slow wave effect, the same or greater phase change can be achieved in a shorter physical length, so that the length of the phase shifter trace 101 can be significantly shortened, reducing the loss of the RF signal on the phase shifter trace 101, which is conducive to increasing the maximum phase shift ΔΦ of the phase shifter b,max , and reduce the maximum insertion loss IL of the phase shifter max , achieving a higher quality factor FoM and improving the overall performance of the phase shifter.

[0067] Furthermore, in the embodiment of the present invention, only the pattern shape of the phase shifter wiring 101 needs to be changed and the first through hole 30 is correspondingly provided on the ground electrode layer 103 . No extra processing steps need to be added during manufacturing, and the manufacturing difficulty is low and easy to implement.

[0068] In summary, the phase shifter provided in the embodiment of the present invention is provided with a phase shifter routing including at least one transmission unit, and a defective ground structure and a parallel branch structure are provided in the transmission unit to introduce equivalent inductance and equivalent capacitance on the phase shifter routing, increase the distributed inductance and distributed capacitance on the phase shifter routing, reduce the phase velocity and wavelength, and realize the slow wave effect. In this way, the same or greater phase change can be achieved within a shorter physical length, so that the length of the phase shifter routing can be significantly shortened, thereby reducing the transmission path length of the RF signal on the phase shifter routing, reducing the loss of the RF signal on the phase shifter routing, and thereby improving the beam quality and radiation power of the antenna.

[0069] Continue to refer Figure 2 Optionally, along the first direction X, the first routing segment 201 includes a first boundary S1 and a second boundary S2 that are arranged oppositely, and the second routing segment 202 includes a third boundary S3 and a fourth boundary S4 that are arranged oppositely. Along the first direction X, the third boundary S3 is located on a side of the first boundary S1 away from the second boundary S2, and the fourth boundary S4 is located on a side of the second boundary S2 away from the first boundary S1.

[0070] Specifically, Figure 2 As shown, the first boundary S1 and the second boundary S2 are two relative boundaries of the first routing segment 201, and the first boundary S1 and the second boundary S2 are arranged along a direction perpendicular to the extension direction of the phase shifter routing 101 (i.e., the first direction X), and the extension direction of the first boundary S1 and the second boundary S2 can be parallel to the extension direction of the phase shifter routing 101.

[0071] The third boundary S3 and the fourth boundary S4 are two relative boundaries of the second routing segment 202. The arrangement direction of the third boundary S3 and the fourth boundary S4 is perpendicular to the extension direction of the phase shifter routing 101 (i.e., the first direction X), and the extension direction of the third boundary S3 and the fourth boundary S4 can be parallel to the extension direction of the phase shifter routing 101.

[0072] Continue to refer Figure 2 In this embodiment, along the direction perpendicular to the extension direction of the phase shifter line 101, or in other words, along the direction perpendicular to the transmission direction of the RF signal on the phase shifter line 101 (i.e., the first direction X), the third boundary S3 and the fourth boundary S4 are both located outside the first line segment 201, so that the length D0 of the second line segment 202 in the first direction X can be greater than the length D4 of the first line segment 201 in the first direction X, thereby introducing additional conductor branches on both sides of the phase shifter line 101, increasing the capacitive coupling area between the second line segment 202 and the ground electrode layer 103, thereby increasing the distributed capacitance of the phase shifter line 101 and reducing the phase velocity v φand wavelength λ, realizing a slow wave effect to achieve the same or greater phase change in a shorter physical length, so that the length of the phase shifter trace 101 can be significantly shortened, reducing the loss of the RF signal on the phase shifter trace 101, and improving the beam quality and radiation power of the antenna.

[0073] Among them, by introducing conductor branches on both sides of the phase shifter line 101, compared with introducing conductor branches only on one side of the phase shifter line 101, a larger capacitive coupling area can be achieved in a limited space, so that a larger equivalent capacitance can be achieved in the same space, which is beneficial to improving the integration of the phase shifter, reducing the space occupied by the phase shifter line 101, and realizing a miniaturized design.

[0074] Continue to refer Figure 2 Optionally, along the first direction X, a distance d1 between the third boundary S3 and the first boundary S1 is equal to a distance d2 between the fourth boundary S4 and the second boundary S2.

[0075] Specifically, Figure 2 As shown, by setting the distance d1 between the third boundary S3 of the second routing segment 202 and the first boundary S1 of the first routing segment 201 in the first direction X to be equal to the distance d2 between the fourth boundary S4 of the second routing segment 202 and the second boundary S2 of the first routing segment 201 in the first direction X, in the direction perpendicular to the extension direction of the phase shifter routing 101 (i.e., the first direction X), the conductor branches introduced on both sides of the phase shifter routing 101 are symmetrically distributed relative to the first routing segment 201. Such a setting is helpful to achieve a larger capacitive coupling area in a limited space, thereby achieving a larger equivalent capacitance, which is beneficial to further reduce the occupied space of the phase shifter routing 101, improve the integration of the phase shifter, and achieve miniaturized design.

[0076] Figure 5 A partial structural diagram of a phase shifter provided in an embodiment of the present invention, Figure 6 A partial structural diagram of another phase shifter provided in an embodiment of the present invention is shown in FIG. Figure 5 and Figure 6 As shown, optionally, in the transmission unit 20, a conductor branch can be introduced only on one side of the phase shifter line 101 to increase the capacitive coupling area between the second line segment 202 and the ground electrode layer 103, thereby realizing a slow wave effect, so as to achieve the same or greater phase change within a shorter physical length, so that the length of the phase shifter line 101 can be significantly shortened, reducing the loss of the RF signal on the phase shifter line 101, and improving the beam quality and radiation power of the antenna.

[0077] Among them, Figure 5As shown, the conductor branches introduced in different transmission units 20 can all be located on the same side of the phase shifter line 101, so that the transmission unit 20 can be optimized through unified design parameters (such as length and width, etc.) to ensure that the performance of each transmission unit 20 is consistent; Figure 6 As shown, the conductor branches introduced in adjacent transmission units 20 may also be located on different sides of the phase shifter wiring 101, which is conducive to making the electric field distribution more uniform and preventing the inhomogeneity and reflection of the RF signal during the transmission process. The embodiment of the present invention does not make specific limitations on this.

[0078] It should be noted that Figure 2 , Figure 5 and Figure 6 The conductor branch is only taken as a rectangle as an example for illustration, but it is not limited to this. The shape of the conductor branch can be flexibly designed according to specific application requirements and performance requirements, such as using a semicircle, triangle or trapezoid, etc., as long as the capacitive coupling area between the second routing segment 202 and the ground electrode layer 103 can be increased to achieve the slow wave effect.

[0079] Continue to refer Figure 2 Optionally, along the first direction X, a length D1 of the first through hole 30 is greater than or equal to a length D4 of the first routing segment 201 .

[0080] Among them, the inventors have found through research that, in the direction perpendicular to the extension direction of the phase shifter wiring 101 (i.e., the first direction X), the larger the length D1 of the first through hole 30 is, the longer the actual path of the return current on the ground electrode layer 103 is, and the inductance value of the equivalent inductance of the defective ground structure formed by the first wiring segment 201 and the first through hole 30 is extremely large; at the same time, in the direction perpendicular to the extension direction of the phase shifter wiring 101 (i.e., the first direction X), the smaller the length D4 of the first wiring segment 201 is, the greater the inductance value of the equivalent inductance of the defective ground structure formed by the first wiring segment 201 and the first through hole 30 is.

[0081] In this embodiment, in the direction perpendicular to the extending direction of the phase shifter line 101 (i.e., the first direction X), by setting the length D1 of the first through hole 30 to be greater than or equal to the length D4 of the first line segment 201, a sufficiently large equivalent inductance can be introduced on the phase shifter line 101, thereby facilitating the increase of the distributed inductance on the phase shifter line 101 and reducing the phase velocity v φ and wavelength λ, realizing a slow wave effect to achieve the same or greater phase change in a shorter physical length, so that the length of the phase shifter trace 101 can be significantly shortened, reducing the loss of the RF signal on the phase shifter trace 101, thereby improving the beam quality and radiation power of the antenna.

[0082] Continue to refer Figure 2Optionally, in a direction perpendicular to the extension direction of the phase shifter trace 101 (i.e., the first direction X), the first through hole 30 is symmetrically arranged relative to the first trace segment 201, so that the electric field and current can be distributed more evenly, which helps to reduce the unevenness and reflection of the RF signal during transmission and improve the signal quality.

[0083] It should be noted that, in the direction perpendicular to the extension direction of the phase shifter wiring 101 (i.e., the first direction X), the specific values ​​of the length D1 of the first through hole 30 and the length D4 of the first wiring segment 201 can be set according to actual needs. For example, the length D1 of the first through hole 30 is set to about three times the length D4 of the first wiring segment 201, but it is not limited to this. The embodiment of the present invention does not make specific limitations on this.

[0084] Figure 7 A partial structural diagram of another phase shifter provided in an embodiment of the present invention is shown in FIG. Figure 7 As shown, optionally, the first through hole 30 includes a first through hole section 301, a second through hole section 302 and a third through hole section 303 that are interconnected, and the first through hole section 301, the second through hole section 302 and the third through hole section 303 are arranged in sequence along the first direction X. In a direction perpendicular to the plane where the ground electrode layer 103 is located, the second through hole section 302 overlaps with the first routing segment 201. In the extension direction of the phase shifter routing 101 (for example, the second direction Y), the length d3 of the second through hole section 302 is less than the length d4 of the first through hole section 301, and the length d3 of the second through hole section 302 is less than the length d5 ​​of the third through hole section 303.

[0085] Specifically, Figure 7 As shown, the first through hole 30 can be divided into a first through hole section 301, a second through hole section 302 and a third through hole section 303 which are interconnected, wherein, in a direction perpendicular to the plane where the ground electrode layer 103 is located, the overlapping portion of the first through hole 30 and the first routing segment 201 is the second through hole section 302, and along a direction perpendicular to the extending direction of the phase shifter routing 101 (i.e., the first direction X), the first through hole section 301 and the third through hole section 303 are respectively located on opposite sides of the second through hole section 302.

[0086] Among them, the inventors have found through research that the defective ground structure formed by the first through hole 30 and the first routing segment 201 can form a low-pass filter, which has specific passband and band-stop characteristics, and may cause the phase shifter to have a large loss in certain frequency ranges, affecting impedance matching, which is not conducive to ensuring the transmission quality of the RF signal.

[0087] In this embodiment, the shape of the first through hole 30 is designed, specifically, as follows: Figure 7As shown, along the extension direction of the phase shifter trace 101 (for example, the second direction Y), the length d4 of the first through hole section 301 and the length d5 ​​of the third through hole section 303 are both greater than the length d3 of the second through hole section 302. At this time, the second through hole section 302 is narrower, and the first through hole section 301 and the third through hole section 303 are both wider, so that the first through hole 30 forms a dumbbell-like shape.

[0088] In this way, the overlapping area between the phase shifter wiring 101 and the ground electrode layer 103 can be increased in the defective ground structure part to introduce capacitance, so that the frequency response of the defective ground structure can be adjusted so that the frequency response of the defective ground structure is more matched with the operating frequency of the phase shifter, which helps to reduce losses, optimize impedance matching, improve the transmission quality of RF signals, and is conducive to expanding bandwidth and improving phase shift accuracy.

[0089] Optionally, along the extension direction of the phase shifter trace 101 (for example, the second direction Y), the length d3 of the second through hole section 302 is greater than 0, wherein, in order to reduce the difficulty of the manufacturing process, the minimum value of the length d3 of the second through hole section 302 may be determined by the process limit, for example, the length d3 of the second through hole section 302 is greater than or equal to 10 μm, or greater than or equal to 4 μm, which is not specifically limited in the embodiment of the present invention.

[0090] In addition, the shapes of the first through-hole section 301 and the third through-hole section 303 can be flexibly designed according to specific application requirements and performance requirements, such as using a semicircle, a triangle or a trapezoid, etc., as long as the capacitive coupling area between the second routing segment 202 and the ground electrode layer 103 can be increased to achieve the slow-wave effect. The embodiment of the present invention does not make any specific limitations on this.

[0091] Figure 8 A schematic diagram of the structure of another phase shifter provided in an embodiment of the present invention, Fig. 9 for Figure 8 The enlarged structural diagram at C is as follows: Figure 8 and Fig. 9 As shown, optionally, the phase shifter routing 101 includes a first routing section 21, a second routing section 22, and a third routing section 23, the first routing section 21 includes at least one transmission unit 20, and the transmission units 20 in the first routing section 21 are sequentially connected along a third direction Z. The third routing section 23 includes at least one transmission unit 20, and the transmission units 20 in the third routing section 23 are sequentially connected along a fourth direction P, and the third direction Z intersects with the fourth direction P. The second routing section 22 is connected between the first routing section 21 and the third routing section 23, and the second routing section 22 includes one transmission unit 20.

[0092] If the phase shifter line 101 is designed as a straight line and extends only in the same direction, the phase shifter line 101 will occupy a large space. To achieve a compact design, the phase shifter line 101 is likely to overlap with adjacent phase shift units 10 , thereby forming crosstalk between adjacent phase shift units 10 .

[0093] Based on the above technical problems, in this embodiment, if Figure 8 and Fig. 9 As shown, the phase shifter line 101 includes a first line section 21 extending along a third direction Z, a third line section 23 extending along the first line section 21, and a second line section 22 connected between the first line section 21 and the first line section 21, wherein the third direction Z and the fourth direction P intersect to form a corner, so that the phase shifter line 101 can be turned or circled in the phase shift unit 10, so that the phase shifter line 101 can be flexibly arranged in a limited space, which helps to reduce the occupied space of the phase shifter line 101 and improve the space utilization. Furthermore, in a compact design, the phase shifter line 101 can be prevented from overlapping with adjacent phase shift units 10, thereby reducing the mutual crosstalk between adjacent phase shift units 10.

[0094] Among them, a transmission unit 20 connected in series along the third direction Z is arranged in the first routing section 21 to realize a slow wave effect, so as to achieve the same or greater phase change within a shorter physical length, so that the length of the first routing section 21 can be significantly shortened, thereby reducing the transmission path length of the RF signal on the first routing section 21, which is beneficial to reducing the loss of the RF signal on the phase shifter routing 101 and improving the beam quality and radiation power of the antenna.

[0095] Similarly, a transmission unit 20 connected in series along the fourth direction P is arranged in the third routing section 23 to realize a slow wave effect, so as to achieve the same or greater phase change within a shorter physical length, so that the length of the third routing section 23 can be significantly shortened, thereby reducing the transmission path length of the RF signal on the third routing section 23, which is beneficial to reducing the loss of the RF signal on the phase shifter routing 101 and improving the beam quality and radiation power of the antenna.

[0096] Furthermore, the second routing section 22 is used to transmit RF signals between the first routing section 21 and the third routing section 23. A transmission unit 20 is set in the second routing section 22 to achieve a slow wave effect, so that the same or greater phase change can be achieved within a shorter physical length, so that the length of the second routing section 22 can be significantly shortened, thereby reducing the transmission path length of the RF signal on the second routing section 22, which is beneficial to reducing the loss of the RF signal on the phase shifter routing 101 and improving the beam quality and radiation power of the antenna.

[0097] At the same time, the transmission unit 20 is provided in the first routing section 21, the second routing section 22 and the third routing section 23, which is also conducive to optimizing impedance matching, ensuring that the impedances of each routing section match each other, helping to reduce reflections and improve the transmission efficiency of RF signals.

[0098] It should be noted that the second routing section 22 may include only one transmission unit 20 to reduce the space occupied by the second routing section 22 , simplify the wiring design, and reduce the complexity of the second routing section 22 , but the present invention is not limited thereto.

[0099] In other embodiments, the second routing section 22 may also be provided with more transmission units 20 to increase the length of the second routing section 22, thereby facilitating the expansion of the spacing between the first routing section 21 and the third routing section 23, helping to avoid physical contact between the first routing section 21 and the third routing section 23, and reducing potential structural conflicts.

[0100] Continue to refer Figure 8 and Fig. 9 Optionally, the transmission unit 20 in the first routing section 21 and the third routing section 23 is a first transmission unit 20A, and the transmission unit 20 in the second routing section 22 is a second transmission unit 20B, and the impedance of the first transmission unit 20A and the second transmission unit 20B are the same.

[0101] Among them, when the impedances of different parts of the phase shifter routing 101 (such as the first routing section 21 and the third routing section 23 of the straight section and the second routing section 22 of the corner section) are not matched, part of the RF signal will be reflected, resulting in increased loss and affecting the transmission quality of the RF signal.

[0102] In this embodiment, by setting the first transmission unit 20A in the first routing section 21 and the third routing section 23 and the second transmission unit 20B in the second routing section 22 to have the same impedance, good impedance matching can be maintained in different parts of the phase shifter routing 101, reducing the reflection and loss of the RF signal, and improving the transmission efficiency of the RF signal.

[0103] It can be understood that in order to achieve uniform impedance distribution on the phase shifter routing 101, all first transmission units 20A in the first routing section 21 can have the same impedance, all first transmission units 20A in the third routing section 23 can have the same impedance, and all second transmission units 20B in the second routing section 22 can have the same impedance.

[0104] Fig.10 Another equivalent circuit diagram of a transmission unit provided by an embodiment of the present invention is shown in FIG. Figure 8-Figure 10As shown, optionally, the first routing segment 201 and the first through hole 30 form an equivalent inductor 201L. The second routing segment 202 and the ground electrode layer 103 arranged opposite thereto form an equivalent capacitor 202C. In the first transmission unit 20A, the inductance value of the equivalent inductor 201L is L1, and the capacitance value of the equivalent capacitor 202C is C1. In the second transmission unit 20B, the inductance value of the equivalent inductor 201L is L2, and the capacitance value of the equivalent capacitor 202C is C2. Wherein, L1 / C1=L2 / C2.

[0105] Specifically, as mentioned above, the first through hole 30 and the first routing segment 201 constitute a defective ground structure (DGS), which can be equivalent to an inductor element, namely, an equivalent inductor 201L. At the same time, the second routing segment 202 and the ground electrode layer 103 arranged opposite thereto can be equivalent to a parallel plate capacitor, namely, an equivalent capacitor 202C.

[0106] Furthermore, the impedance Z c Satisfy the formula

[0107] Among them, L is the distributed inductance, which refers to the inductance value per unit length.

[0108] C is the distributed capacitance, which refers to the capacitance per unit length.

[0109] Therefore, in this embodiment, by setting the ratio L1 / C1 between the inductance value L1 of the equivalent inductor 201L in the first transmission unit 20A and the capacitance value C1 of the equivalent capacitor 202C to be equal to the ratio L2 / C2 between the inductance value L2 of the equivalent inductor 201L and the capacitance value C2 of the equivalent capacitor 202C in the second transmission unit 20B, the first transmission unit 20A and the second transmission unit 20B have the same impedance, thereby maintaining good impedance matching in different parts of the phase shifter routing 101 (for example, the first routing section 21, the second routing section 22 and the third routing section 23), reducing the reflection and loss of the RF signal, and improving the transmission efficiency of the RF signal.

[0110] It should be noted that the inductance value of the equivalent inductance 201L of the defective ground structure formed by the first through hole 30 and the first wiring segment 201 depends on its geometric parameters, such as the size of the first through hole 30 and the size of the first wiring segment 201 .

[0111] Among them, electromagnetic simulation tools can be used for modeling and simulation to calculate the inductance value of the equivalent inductance 201L of the defective ground structure. The simulation tool can accurately calculate the inductance effect of the defective ground structure based on specific geometric parameters and material properties.

[0112] In some embodiments, it can also be estimated by using an empirical formula. For example, for a simple defective ground structure of a circular first through hole 30, the inductance value L01 of the equivalent inductor 201L can be approximately expressed as:

[0113]

[0114] Wherein, μ0 is the vacuum magnetic permeability, h1 is the height of the first through hole 30 , and d1 is the diameter of the first through hole 30 .

[0115] In addition, the first wiring segment 201 itself may also generate a certain inductance effect, and the inductance value may depend on the geometric parameters (such as length, width and thickness) of the first wiring segment 201 .

[0116] Therefore, the inductance value of the first line segment 201 can be estimated by its geometric parameters. For example, for a simple microstrip line or coplanar waveguide, the inductance value L02 of the first line segment 201 can be calculated using the inductance formula:

[0117]

[0118] Wherein, l is the length of the first routing segment 201 , w is the line width of the first routing segment 201 , and h2 is the distance between the first routing segment 201 and the ground electrode layer 103 .

[0119] It is understandable that those skilled in the art can design the size of the first through hole 30 and the size of the first routing segment 201 to achieve the desired inductance value of the equivalent inductor 201L. For example, a larger first through hole 30 size and a smaller first routing segment 201 line width can increase the inductance value of the equivalent inductor 201L, and the embodiment of the present invention does not specifically limit this.

[0120] Similarly, the capacitance value of the equivalent capacitor 202C formed by the second wiring segment 202 and the ground electrode layer 103 arranged opposite thereto can also be calculated by modeling and simulation using an electromagnetic simulation tool.

[0121] In some embodiments, an estimation can be performed using an empirical formula. For example, for a simple parallel plate capacitor, the capacitance value C01 of the equivalent capacitor 202C can be expressed as:

[0122]

[0123] Among them, ∈ r is the relative dielectric constant of the medium, ∈0 is the dielectric constant of vacuum, A is the overlapping area of ​​the second routing segment 202 and the ground electrode layer 103 opposite thereto, and d2 is the distance between the second routing segment 202 and the ground electrode layer 103 opposite thereto.

[0124] In addition, the first wiring segment 201 itself may also generate a certain inductance effect, and the inductance value may depend on the geometric parameters (such as length, width and thickness) of the first wiring segment 201 .

[0125] It is understandable that those skilled in the art can design the size of the second routing segment 202 to achieve the desired capacitance value of the equivalent capacitor 202C. For example, increasing the overlapping area between the second routing segment 202 and the ground electrode layer 103 opposite thereto, and reducing the distance between the second routing segment 202 and the ground electrode layer 103 opposite thereto can increase the capacitance value of the equivalent capacitor 202C. The embodiments of the present invention do not specifically limit this.

[0126] Optionally, L1=L2, C1=C2.

[0127] Specifically, as mentioned above, the impedance Z c Satisfy the formula

[0128] Therefore, in the present embodiment, by setting the inductance value L1 of the equivalent inductor 201L in the first transmission unit 20A to be equal to the inductance value L2 of the equivalent inductor 201L in the second transmission unit 20B, and the capacitance value C1 of the equivalent capacitor 202C in the first transmission unit 20A to be equal to the capacitance value C2 of the equivalent capacitor 202C in the second transmission unit 20B, the first transmission unit 20A and the second transmission unit 20B have the same impedance, so that good impedance matching is maintained in different parts of the phase shifter routing 101 (for example, the first routing section 21, the second routing section 22, and the third routing section 23), the reflection and loss of the RF signal are reduced, and the transmission efficiency of the RF signal is improved.

[0129] Furthermore, as mentioned above, the inductance value of the equivalent inductor 201L of the defective ground structure formed by the first through hole 30 and the first routing segment 201 depends on its geometric parameters. Therefore, the geometric parameters of the defective ground structure in the first transmission unit 20A and the second transmission unit 20B can be set to be consistent so that the inductance value L1 of the equivalent inductor 201L in the first transmission unit 20A is equal to the inductance value L2 of the equivalent inductor 201L in the second transmission unit 20B.

[0130] For example, the first through hole 30 in the first transmission unit 20A and the second transmission unit 20B has the same size, and the first routing segment 201 has the same size, so as to achieve the inductance value L1 of the equivalent inductor 201L in the first transmission unit 20A and the inductance value L2 of the equivalent inductor 201L in the second transmission unit 20B to be equal, but it is not limited to this.

[0131] Similarly, the capacitance value of the equivalent capacitor 202C formed by the second routing segment 202 and the ground electrode layer 103 arranged opposite thereto also depends on their geometric parameters. Therefore, the geometric parameters of the defective ground structure in the first transmission unit 20A and the second transmission unit 20B can be set to be consistent so that the inductance value L1 of the equivalent inductor 201L in the first transmission unit 20A is equal to the inductance value L2 of the equivalent inductor 201L in the second transmission unit 20B.

[0132] For example, the overlapping area between the second routing segment 202 in the first transmission unit 20A and the second transmission unit 20B and the ground electrode layer 103 opposite thereto is the same, and the spacing between the second routing segment 202 and the ground electrode layer 103 opposite thereto is the same, so as to achieve that the capacitance value C1 of the equivalent capacitor 202C in the first transmission unit 20A and the capacitance value C2 of the equivalent capacitor 202C in the second transmission unit 20B are equal, but it is not limited to this.

[0133] It should be noted that the impedance in the embodiment of the present invention refers to characteristic impedance (Characteristic impedance), and characteristic impedance refers to the impedance per unit length on the phase shifter trace 101 when a radio frequency signal is propagated on the phase shifter trace 101.

[0134] In this embodiment, the characteristic impedance can be set to 50 ohms, where 50 ohms can achieve a good balance between the medium in the air (such as free space) and the typical printed circuit board (PCB) material, providing sufficient bandwidth while maintaining low loss, but is not limited to this and the embodiments of the present invention do not make specific limitations on this.

[0135] Furthermore, in the transmission unit 20, the inductance value of the equivalent inductance 201L of the defective ground structure formed by the first through hole 30 and the first routing segment 201, and the capacitance value of the equivalent capacitor 202C formed by the second routing segment 202 and the ground electrode layer 103 arranged opposite thereto can be set according to the characteristic impedance.

[0136] Among them, in the transmission unit 20, the inductance value of the equivalent inductance 201L of the defective ground structure formed by the first through hole 30 and the first routing segment 201 can be in the order of nH (for example, between several nH and tens of nH), and the capacitance value of the equivalent capacitor 202C formed by the second routing segment 202 and the ground electrode layer 103 arranged opposite thereto can be in the order of pF (for example, between several pF and tens of pF), and the embodiment of the present invention does not make specific limitations on this.

[0137] Furthermore, in the transmission unit 20, the size of the defective ground structure formed by the first through hole 30 and the first routing segment 201, and the size of the second routing segment 202 and the ground electrode layer 103 arranged opposite thereto can be set according to the requirements for the inductance value of the equivalent inductor 201L and the capacitance value of the equivalent capacitor 202C.

[0138] For example, in the transmission unit 20, along the extension direction of the phase shifter routing 101 (i.e., the transmission direction of the RF signal on the phase shifter routing 101), the length of the first routing segment 201 in the transmission unit 20 can be set to about 100 microns, and the length of the second routing segment 202 in the transmission unit 20 can be set to about 100 microns. Then, the length of the phase shifter routing 101 in the transmission unit 20 can also be set to about 100 microns to achieve better antenna performance in high-frequency applications, but is not limited to this.

[0139] Continue to refer Fig. 9 Optionally, the transmission unit 20 in the first routing section 21 and the third routing section 23 is a first transmission unit 20A, the transmission unit 20 in the second routing section 22 is a second transmission unit 20B, and the electrical length of the first transmission unit 20A is equal to the electrical length of the second transmission unit 20B.

[0140] The specific structural configuration of the first transmission unit 20A and the second transmission unit 20B may refer to any of the above embodiments, which will not be described in detail here.

[0141] Furthermore, the electrical length refers to the ratio between the distance that the RF signal propagates in the phase shifter trace 101 and its wavelength. The electrical length can be expressed as a multiple of the wavelength, such as λ / 4 or λ / 2.

[0142] In this embodiment, by setting the first transmission unit 20A in the first routing section 21 and the third routing section 23 and the second transmission unit 20B in the second routing section 22 to have equal electrical lengths, it can be ensured that the phase velocity and wavelength of the RF signal propagating in the first transmission unit 20A and the second transmission unit 20B are consistent, so that the phase change of the RF signal in different routing sections can be consistent, avoiding phase offset and discontinuity, which is beneficial to improving the phase control accuracy.

[0143] Among them, the electrical length can depend on the physical length of the phase shifter line 101 in the transmission unit 20. Therefore, the physical length of the phase shifter line 101 in the transmission unit 20 can be adjusted so that the physical lengths of the phase shifter line 101 in the first transmission unit 20A and the second transmission unit 20B are equal or close to each other, so as to achieve that the electrical length of the first transmission unit 20A is equal to the electrical length of the second transmission unit 20B.

[0144] Optionally, along the extension direction of the phase shifter line 101 (ie, the RF signal transmission direction on the phase shifter line 101 ), the length of the phase shifter line 101 in the transmission unit 20 may be set to be about 100 microns, but is not limited thereto.

[0145] Furthermore, the electrical length is also related to parameters such as the characteristic impedance and dielectric constant of the phase shifter wiring 101. Therefore, the size of the first through hole 30 and the size of the first wiring segment 201 in the transmission unit 20 can be adjusted to change the inductance effect of the defective ground structure formed by the first through hole 30 and the first wiring segment 201, so as to achieve that the electrical length of the first transmission unit 20A is equal to the electrical length of the second transmission unit 20B.

[0146] Optionally, the equivalent capacitance 202C in the transmission unit 20 can be changed by adjusting the overlapping area between the second routing segment 202 in the transmission unit 20 and the ground electrode layer 103 opposite thereto, as well as the spacing between the second routing segment 202 and the ground electrode layer 103 opposite thereto, so as to achieve that the electrical length of the first transmission unit 20A is equal to the electrical length of the second transmission unit 20B, but this is not limited to this and the embodiments of the present invention do not make specific limitations on this.

[0147] Continue to refer Fig. 9 Optionally, the transmission unit 20 in the first routing section 21 and the third routing section 23 is a first transmission unit 20A, and the transmission unit 20 in the second routing section 22 is a second transmission unit 20B. In the first transmission unit 20A, along the first direction X, the length of the first through hole 30 is D1; ​​in the second transmission unit 20B, along the first direction X, the length of the first through hole 30 is D2, and D2<D1.

[0148] The specific structural configuration of the first transmission unit 20A and the second transmission unit 20B may refer to any of the above embodiments, which will not be described in detail here.

[0149] In this embodiment, if Fig. 9 As shown, along a direction perpendicular to the extension direction of the phase shifter line 101 (e.g., the second direction Y), or in other words, along a direction perpendicular to the transmission direction of the RF signal on the phase shifter line 101 (e.g., the second direction Y) (i.e., the first direction X), the length D2 of the first through hole 30 in the second transmission unit 20B is less than the length D1 of the first through hole 30 in the first transmission unit 20A. In this way, the size of the first through hole 30 in the second transmission unit 20B at the corner of the phase shifter line 101 can be reduced to reduce the space occupied by the phase shifter line 101 at the corner, thereby achieving a compact design.

[0150] The specific values ​​of the length D2 of the first through hole 30 in the second transmission unit 20B and the length D1 of the first through hole 30 in the first transmission unit 20A can be set according to actual needs, and the embodiment of the present invention does not specifically limit this.

[0151] Continue to refer Fig. 9 Optionally, the transmission unit 20 in the second routing section 22 is a second transmission unit 20B. In the second transmission unit 20B, along the first direction X, the length of the first through hole 30 is D2, the length of the second routing segment 202 is D3, and D2≤D3.

[0152] The specific structural configuration of the second transmission unit 20B may refer to any of the above embodiments, which will not be described in detail here.

[0153] In this embodiment, if Fig. 9 As shown, along a direction perpendicular to the extension direction of the phase shifter line 101 (e.g., the second direction Y), or in other words, along a direction perpendicular to the transmission direction of the RF signal on the phase shifter line 101 (e.g., the second direction Y) (i.e., the first direction X), the length D2 of the first through hole 30 in the second transmission unit 20B is set to be less than or equal to the length D3 of the second line segment 202, so that the size of the first through hole 30 in the second transmission unit 20B at the corner of the phase shifter line 101 can be reduced, so as to reduce the space occupied by the phase shifter line 101 at the corner, and realize a compact design.

[0154] The specific values ​​of the length D2 of the first through hole 30 in the second transmission unit 20B and the length D3 of the second routing segment 202 can be set according to actual needs, and the embodiment of the present invention does not specifically limit this.

[0155] Continue to refer Fig. 9 Optionally, the transmission unit 20 in the first routing section 21 and the third routing section 23 is a first transmission unit 20A, and the transmission unit 20 in the second routing section 22 is a second transmission unit 20B. In the first transmission unit 20A, along the first direction X, the length of the first routing segment 201 is D4. In the second transmission unit 20B, along the first direction X, the length of the first routing segment 201 is D5. D5<D4.

[0156] The specific structural configuration of the first transmission unit 20A and the second transmission unit 20B may refer to any of the above embodiments, which will not be described in detail here.

[0157] It is understandable that in order to reduce the space occupied by the phase shifter trace 101 at the corner, the length D2 of the first through hole 30 in the second transmission unit 20B at the corner of the phase shifter trace 101 can be shortened, which will reduce the inductance value L2 of the equivalent inductor 201L in the second transmission unit 20B.

[0158] In this embodiment, if Fig. 9 As shown, along a direction perpendicular to the extension direction of the phase shifter wiring 101 (for example, the second direction Y), or in other words, along a direction perpendicular to the transmission direction of the RF signal on the phase shifter wiring 101 (for example, the second direction Y) (i.e., the first direction X), the length D5 of the first wiring segment 201 in the second transmission unit 20B is set to be smaller than the length D4 of the first wiring segment 201 in the first transmission unit 20A, so as to reduce the line width of the first wiring segment 201 in the second transmission unit 20B, so that the inductance value of the equivalent inductor 201L in the second transmission unit 20B can be increased to L2, thereby compensating for the reduction in inductance caused by the reduction in the length D2 of the first through hole 30 in the second transmission unit 20B, thereby ensuring that the first transmission unit 20A and the second transmission unit 20B have the same impedance, maintaining good impedance matching, reducing the reflection and loss of the RF signal, and improving the transmission efficiency of the RF signal.

[0159] The specific values ​​of the length D5 of the first routing segment 201 in the second transmission unit 20B and the length D4 of the first routing segment 201 in the first transmission unit 20A can be set according to actual needs, and the embodiment of the present invention does not specifically limit this.

[0160] Continue to refer Fig. 9 Optionally, the transmission unit 20 in the first routing section 21 and the third routing section 23 is a first transmission unit 20A, and the transmission unit 20 in the second routing section 22 is a second transmission unit 20B. In the first transmission unit 20A, along the extension direction of the phase shifter routing 101, the length of the first routing segment 201 is D6. In the second transmission unit 20B, along the extension direction of the phase shifter routing 101, the length of the first routing segment 201 is D7, and D7>D6.

[0161] The specific structural configuration of the first transmission unit 20A and the second transmission unit 20B may refer to any of the above embodiments, which will not be described in detail here.

[0162] As mentioned above, to reduce the space occupied by the phase shifter trace 101 at the corner, the length D2 of the first through hole 30 in the second transmission unit 20B at the corner of the phase shifter trace 101 can be shortened, thereby reducing the inductance value L2 of the equivalent inductor 201L in the second transmission unit 20B.

[0163] In this embodiment, if Fig. 9As shown, along the extension direction of the phase shifter routing 101 (for example, the second direction Y), or along the RF signal transmission direction on the phase shifter routing 101 (for example, the second direction Y), the length D7 of the first routing segment 201 in the second transmission unit 20B is set to be greater than the length D6 of the first routing segment 201 in the first transmission unit 20A, so as to increase the length of the first routing segment 201 in the second transmission unit 20B, so that the inductance value of the equivalent inductor 201L in the second transmission unit 20B can be increased to L2, thereby compensating for the inductance reduction caused by the reduction of the length D2 of the first through hole 30 in the second transmission unit 20B, thereby ensuring that the first transmission unit 20A and the second transmission unit 20B have the same impedance, maintaining good impedance matching, reducing the reflection and loss of the RF signal, and improving the transmission efficiency of the RF signal.

[0164] At the same time, increasing the length of the first routing segment 201 in the second transmission unit 20B is also beneficial to expanding the spacing between the first routing section 21 and the third routing section 23, helping to avoid physical contact between the first routing section 21 and the third routing section 23 and reducing potential structural conflicts.

[0165] The specific values ​​of the length D7 of the first routing segment 201 in the second transmission unit 20B and the length D6 of the first routing segment 201 in the first transmission unit 20A can be set according to actual needs, and the embodiment of the present invention does not specifically limit this.

[0166] Continue to refer Fig. 9 Optionally, the transmission unit 20 in the second routing section 22 is a second transmission unit 20B. In the second transmission unit 20B, the first routing segment 201 includes a first sub-segment 31 and a second sub-segment 32 connected to each other. The first sub-segment 31 extends along the third direction Z, and the second sub-segment 32 extends along the fourth direction P.

[0167] The specific structural configuration of the second transmission unit 20B may refer to any of the above embodiments, which will not be described in detail here.

[0168] In this embodiment, if Fig. 9 As shown, the first routing segment 201 in the second transmission unit 20B includes a first sub-segment 31 extending along the third direction Z and a second sub-segment 32 extending along the fourth direction P, and the first sub-segment 31 and the second sub-segment 32 are used to introduce a corner on the first routing segment 201, so that the second transmission unit 20B is connected between the first routing division 21 and the third routing division 23 to form a continuous transmission path.

[0169] Optional, such as Fig. 9As shown, the third direction Z and the fourth direction P are perpendicular to each other. At this time, a 90-degree corner is formed on the first routing segment 201 in the second transmission unit 20B, which is beneficial to reducing the space occupied by the phase shifter routing 101 and realizing a compact miniaturized design.

[0170] In other embodiments, other angles may be formed between the third direction Z and the fourth direction P, such as 45 degrees or 60 degrees, so that the most suitable turning angle can be flexibly selected according to actual space limitations and layout requirements to achieve optimal performance and space utilization.

[0171] Fig.11 A partial structural diagram of another phase shifter provided in an embodiment of the present invention is shown in FIG. Fig.11 As shown, optionally, in the second transmission unit 20B, along the first direction X, the first sub-segment 31 includes a fifth boundary S5 and a sixth boundary S6 arranged relatively, and the second sub-segment 32 includes a seventh boundary S7 and an eighth boundary S8 arranged relatively. In the second transmission unit 20B, the first routing segment 201 also includes a first chamfered boundary S01 and a second chamfered boundary S02. The first chamfered boundary S01 is connected between the fifth boundary S5 and the seventh boundary S7, and the angle between the first chamfered boundary S01 and the fifth boundary S5 is an obtuse angle, and the angle between the first chamfered boundary S01 and the seventh boundary S7 is an obtuse angle. The second chamfered boundary S02 is connected between the sixth boundary S6 and the eighth boundary S8, and the angle between the second chamfered boundary S02 and the sixth boundary S6 is an obtuse angle, and the angle between the second chamfered boundary S02 and the eighth boundary S8 is an obtuse angle.

[0172] Specifically, Fig.11 As shown, in the first routing segment 201 of the second transmission unit 20B, the fifth boundary S5 and the sixth boundary S6 of the first sub-segment 31 can be arranged along the fourth direction P and extend along the third direction Z, and the seventh boundary S7 and the eighth boundary S8 of the second sub-segment 32 can be arranged along the third direction Z and extend along the fourth direction P.

[0173] Among them, in the first routing segment 201 of the second transmission unit 20B, the fifth boundary S5 of the first sub-segment 31 and the seventh boundary S7 of the second sub-segment 32 are connected by the first chamfered boundary S01, and the angle between the first chamfered boundary S01 and the fifth boundary S5 is greater than 90°, and the angle between the first chamfered boundary S01 and the seventh boundary S7 is greater than 90°, so that the fifth boundary S5 and the seventh boundary S7 are connected by chamfering, so that the edge of the first sub-segment 31 between the fifth boundary S5 and the seventh boundary S7 can be smoother, avoiding the electric field from being concentrated at this position, thereby reducing the concentration of local field strength, which is beneficial to reducing unnecessary radiation and loss.

[0174] Furthermore, the first chamfered edge S01 may be a straight line, which is simple in design and easy to implement. In other embodiments, the first chamfered edge S01 may also be a curve, thereby providing a smoother transition between the fifth edge S5 and the seventh edge S7, reducing electric field concentration, and further reducing unnecessary radiation and loss, which is not specifically limited in the embodiments of the present invention.

[0175] Continue to refer Fig.11 Optionally, setting the length of the first chamfered boundary S01 in the first direction X to be less than or equal to half the length of the first sub-segment 31 in the first direction X can ensure the electrical connection performance between the first sub-segment 31 and the second sub-segment 32.

[0176] Similarly, if Fig.11 As shown, in the first routing segment 201 of the second transmission unit 20B, the sixth boundary S6 of the first sub-segment 31 and the eighth boundary S8 of the second sub-segment 32 are connected by the second chamfered boundary S02, and the angle between the second chamfered boundary S02 and the sixth boundary S6 is greater than 90°, and the angle between the second chamfered boundary S02 and the eighth boundary S8 is greater than 90°, so that the sixth boundary S6 and the eighth boundary S8 are connected by chamfering, so that the edge of the first sub-segment 31 between the sixth boundary S6 and the eighth boundary S8 can be smoother, avoiding the electric field from being concentrated at this position, thereby reducing the concentration of local field strength, which is beneficial to reducing unnecessary radiation and loss.

[0177] Furthermore, the second chamfered edge S02 may be a straight line, which is simple in design and easy to implement. In other embodiments, the second chamfered edge S02 may also be a curve, thereby providing a smoother transition between the sixth edge S6 and the eighth edge S8, reducing electric field concentration, and further reducing unnecessary radiation and loss, which is not specifically limited in the embodiments of the present invention.

[0178] Continue to refer Fig.11 Optionally, setting the length of the second chamfered boundary S02 in the first direction X to be less than or equal to half the length of the first sub-segment 31 in the first direction X can ensure the electrical connection performance between the first sub-segment 31 and the second sub-segment 32.

[0179] Fig.12 A partial structural diagram of another phase shifter provided in an embodiment of the present invention is shown in FIG. Fig.12 As shown, optionally, the transmission unit 20 in the second routing section 22 is a second transmission unit 20B, and in the second transmission unit 20B, the first routing segment 201 is an arc.

[0180] The specific structural configuration of the second transmission unit 20B may refer to any of the above embodiments, which will not be described in detail here.

[0181] In this embodiment, if Fig.12 As shown, in the second transmission unit 20B, the first routing segment 201 is set as an arc, which can achieve smoother electromagnetic field distribution at the corner, reduce the concentration of local field strength, and further reduce unnecessary radiation and loss.

[0182] Fig.13 A partial structural diagram of another phase shifter provided in an embodiment of the present invention is shown in FIG. Fig.13 As shown, optionally, the transmission unit 20 in the second routing section 22 is a second transmission unit 20B, and in the second transmission unit 20B, the first routing segment 201 is a straight line.

[0183] The specific structural configuration of the second transmission unit 20B may refer to any of the above embodiments, which will not be described in detail here.

[0184] In this embodiment, if Fig.13 As shown, in the second transmission unit 20B, the first routing segment 201 is set as a straight line, and the extension direction of the first routing segment 201 in the second transmission unit 20B intersects with the third direction Z and the fourth direction P, so that the second transmission unit 20B is connected between the first routing division 21 and the third routing division 23 to form a continuous transmission path.

[0185] At the same time, in the second transmission unit 20B, setting the first routing segment 201 as a straight line can also achieve a smoother electromagnetic field distribution, reduce the concentration of local field strength, and further reduce unnecessary radiation and loss.

[0186] Continue to refer Figure 8 Optionally, the phase shifter line 101 forms a spiral structure to reduce the space occupied by the phase shifter line 101 and improve space utilization. In a compact design, the phase shifter line 101 can be prevented from overlapping with adjacent phase shifting units 10, thereby reducing mutual crosstalk between adjacent phase shifting units 10.

[0187] In other embodiments, the phase shifter trace 101 may also be formed in other shapes to fully utilize the phase shifter space, such as U-shape, W-shape or serpentine shape, etc., which is not limited in the embodiment of the present invention.

[0188] Based on the same inventive concept, an embodiment of the present invention further provides an antenna, which includes the phase shifter described in any embodiment of the present invention. Therefore, the antenna provided by the embodiment of the present invention has the technical effect of the technical solution in any of the above embodiments, and the structures that are the same or corresponding to the above embodiments and the explanation of terms are no longer repeated here.

[0189] Fig.14 A schematic diagram of the structure of an antenna provided by an embodiment of the present invention, Fig.15 A schematic diagram of a partial cross-sectional structure of an antenna provided in an embodiment of the present invention is shown in FIG. Fig.14 and Fig.15 As shown, optionally, the antenna further includes a feed network 40 and a radiation electrode 41, and the feed network 40 is coupled to the phase shifter trace 101. In a direction perpendicular to the plane where the ground electrode layer 103 is located, the ground electrode layer 103 at least partially overlaps with the radiation electrode 41. The ground electrode layer 103 includes a first hollow portion 51, and in a direction perpendicular to the plane where the ground electrode layer 103 is located, the phase shifter trace 101 at least partially overlaps with the first hollow portion 51, and the radiation electrode 41 covers the first hollow portion 51.

[0190] Specifically, Fig.14 and Fig.15 As shown, the radiation electrode 41 can be located on a side of the ground metal layer 103 away from the phase shifter wiring 101, the ground electrode layer 103 is provided with a first hollow portion 51, and the vertical projection of the radiation electrode 41 on the plane where the ground electrode layer 103 is located covers the first hollow portion 51. The radio frequency signal is transmitted between the phase shifter wiring 101 and the ground electrode layer 103, and the adjustable dielectric layer 102 between the phase shifter wiring 101 and the ground electrode layer 103 shifts the phase of the radio frequency signal to change the phase of the radio frequency signal. The phase-shifted radio frequency signal is coupled to the radiation electrode 41 at the first hollow portion 51 of the ground electrode layer 103, and the radiation electrode 41 radiates the signal outward.

[0191] The shape and size parameters of the first hollow portion 51 can be set according to actual conditions, and the embodiment of the present invention does not limit this.

[0192] It should be noted that the radiation electrodes 41 may be arranged corresponding to the phase shifting units 10 . For example, the radiation electrodes 41 and the phase shifting units 10 are arranged one-to-one, and the radiation electrodes 41 corresponding to different phase shifting units 10 are insulated from each other.

[0193] In other embodiments, the radiation electrode 41 may also be located on a side of the phase shifter wiring 101 away from the ground electrode layer 103 , that is, the phase shifter is flip-chip configured, which is not specifically limited in the embodiment of the present invention.

[0194] Continue to refer Fig.14 and Fig.15 Optionally, the antenna in the embodiment of the present invention further includes a feeding network 40, which is used to transmit the RF signal to each phase shift unit 10, wherein the feeding network 40 may be distributed in a dendrite-like manner and include multiple branches, and one branch provides a RF signal to one phase shift unit 10.

[0195] like Fig.14 and Fig.15As shown, the feed network 40 can be arranged in the same layer as the radiation electrode 41, that is, the feed network 40 and the radiation electrode 41 are arranged in the same plane, and in this case, the feed network 40 and the phase shifter trace 101 are located in different layers. A second hollow portion 52 can be arranged on the ground electrode layer 103, and the vertical projection of the feed network 40 on the plane where the ground electrode layer 103 is located overlaps with the second hollow portion 52 at least partially, so that the RF signal transmitted by the feed network 40 is coupled to the phase shifter trace 101 at the second hollow portion 52 of the ground electrode layer 103, and then the phase shifting of the RF signal on the phase shifter trace 101 is achieved by controlling the dielectric constant of the adjustable dielectric layer 102.

[0196] It should be noted that, in this embodiment, by arranging the feeding network 40 and the radiation electrode 41 on the same layer, the feeding network 40 and the phase shifter wiring 101 can be arranged separately, which helps to prevent the voltage signal transmitted in the phase shifter wiring 101 from crosstalking between the phase shifting units 10, thereby improving the reliability of the antenna operation.

[0197] In other embodiments, the feeding network 40 may also be arranged on the same layer as the phase shifter trace 101, that is, the feeding network 40 and the phase shifter trace 101 are arranged on the same plane. At this time, the feeding network 40 is coupled to the phase shifter trace 101. Compared with the RF signal transmitted by the feeding network 40 being coupled to the phase shifter trace 101 through the adjustable dielectric layer 102, the feeding network 40 can directly transmit the RF signal to the phase shifter trace 101, thereby reducing the RF signal loss and improving the antenna performance. The embodiment of the present invention does not make specific limitations on this.

[0198] Continue to refer Fig.14 and Fig.15 Optionally, the antenna provided in the embodiment of the present invention further includes a radio frequency signal interface 61 and a solder pad 62. One end of the radio frequency signal interface 61 is connected to the feed network 40 and fixed by the solder pad 62, and the other end of the radio frequency signal interface 61 is used to connect to external circuits such as high-frequency connectors. The radio frequency signal interface 61 can be set according to actual conditions. Fig.14 and Fig.15 What is shown in FIG. 1 is only an optional setting method.

[0199] Continue to refer Fig.14 and Fig.15 Optionally, the phase shifter further includes a rubber frame 63 , which is disposed around the adjustable dielectric layer 102 and can be used to support the first substrate 11 and the second substrate 12 , thereby providing a housing space for the adjustable dielectric layer 102 and sealing the adjustable dielectric layer 102 .

[0200] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the present invention can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution of the present invention can be achieved, and this document does not limit this.

[0201] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A phase shifter, characterized in that: comprising at least one phase shifting unit; The phase shift unit comprises a phase shifter line, an adjustable dielectric layer and a ground electrode layer, the phase shifter line and the ground electrode layer are arranged opposite to each other, and the adjustable dielectric layer is located between the phase shifter line and the ground electrode layer; The phase shifter routing includes at least one transmission unit; The transmission unit comprises a first routing segment and a second routing segment connected to each other, and a first through hole is provided on the ground electrode layer; Along a direction perpendicular to the plane where the ground electrode layer is located, the first through hole covers the first routing segment, and the ground electrode layer covers the second routing segment; Along the first direction, the length of the second routing segment is greater than the length of the first routing segment; The first direction is perpendicular to an extending direction of the phase shifter wiring.

2. The phase shifter according to claim 1, characterized in that: Along the first direction, the first routing segment includes a first boundary and a second boundary that are oppositely arranged, and the second routing segment includes a third boundary and a fourth boundary that are oppositely arranged; Along the first direction, the third boundary is located on a side of the first boundary away from the second boundary, and the fourth boundary is located on a side of the second boundary away from the first boundary.

3. The phase shifter according to claim 2, characterized in that: Along the first direction, a distance between the third boundary and the first boundary is equal to a distance between the fourth boundary and the second boundary.

4. The phase shifter according to claim 1, characterized in that: Along the first direction, the length of the first through hole is greater than or equal to the length of the first routing segment.

5. The phase shifter according to claim 4, characterized in that: The first through hole comprises a first through hole section, a second through hole section and a third through hole section which are interconnected, and the first through hole section, the second through hole section and the third through hole section are arranged in sequence along the first direction; Along a direction perpendicular to the plane where the ground electrode layer is located, the second through hole segment overlaps with the first routing segment; Along the extending direction of the phase shifter wiring, the length of the second through-hole section is smaller than the length of the first through-hole section, and the length of the second through-hole section is smaller than the length of the third through-hole section.

6. The phase shifter according to claim 1, characterized in that: The phase shifter routing includes a first routing section, a second routing section and a third routing section; The first routing section includes at least one transmission unit, and the transmission units in the first routing section are sequentially connected along a third direction; The third routing section includes at least one transmission unit, and the transmission units in the third routing section are connected in sequence along a fourth direction; The third direction intersects with the fourth direction; The second routing section is connected between the first routing section and the third routing section; The second routing section includes one transmission unit.

7. The phase shifter according to claim 6, characterized in that: The transmission units in the first routing section and the third routing section are first transmission units; The transmission unit in the second routing section is a second transmission unit; The first transmission unit and the second transmission unit have the same impedance.

8. The phase shifter according to claim 7, characterized in that The first wiring segment and the first through hole form an equivalent inductance; The second wiring segment and the ground electrode layer arranged opposite thereto form an equivalent capacitor; In the first transmission unit, the inductance value of the equivalent inductor is L1, and the capacitance value of the equivalent capacitor is C1; In the second transmission unit, the inductance value of the equivalent inductor is L2, and the capacitance value of the equivalent capacitor is C2; Among them, L1 / C1=L2 / C2.

9. The phase shifter according to claim 8, characterized in that L1=L2, C1=C2.

10. The phase shifter according to claim 6, characterized in that The transmission units in the first routing section and the third routing section are first transmission units; The transmission unit in the second routing section is a second transmission unit; The electrical length of the first transmission unit is equal to the electrical length of the second transmission unit.

11. The phase shifter according to claim 6, characterized in that The transmission units in the first routing section and the third routing section are first transmission units; The transmission unit in the second routing section is a second transmission unit; In the first transmission unit, along the first direction, the length of the first through hole is D1; In the second transmission unit, along the first direction, the length of the first through hole is D2; D2<D1.

12. The phase shifter according to claim 6, characterized in that The transmission unit in the second routing section is a second transmission unit; In the second transmission unit, along the first direction, the length of the first through hole is D2, and the length of the second routing segment is D3; D2≤D3.

13. The phase shifter according to claim 6, characterized in that The transmission units in the first routing section and the third routing section are first transmission units; The transmission unit in the second routing section is a second transmission unit; In the first transmission unit, along the first direction, the length of the first routing segment is D4; In the second transmission unit, along the first direction, the length of the first routing segment is D5; D5<D4.

14. The phase shifter according to claim 6, characterized in that The transmission units in the first routing section and the third routing section are first transmission units; The transmission unit in the second routing section is a second transmission unit; In the first transmission unit, along the extension direction of the phase shifter line, the length of the first line segment is D6; In the second transmission unit, along the extension direction of the phase shifter line, the length of the first line segment is D7; D7>D6.

15. The phase shifter according to claim 6, characterized in that The transmission unit in the second routing section is a second transmission unit; In the second transmission unit, the first routing segment includes a first sub-segment and a second sub-segment connected to each other, the first sub-segment extends along the third direction, and the second sub-segment extends along the fourth direction.

16. The phase shifter according to claim 15, characterized in that In the second transmission unit, along the first direction, the first sub-line segment includes a fifth boundary and a sixth boundary that are oppositely arranged, and the second sub-line segment includes a seventh boundary and an eighth boundary that are oppositely arranged; In the second transmission unit, the first routing segment further includes a first chamfered edge and a second chamfered edge; The first chamfered boundary is connected between the fifth boundary and the seventh boundary, and the included angle between the first chamfered boundary and the fifth boundary is an obtuse angle, and the included angle between the first chamfered boundary and the seventh boundary is an obtuse angle; The second chamfered boundary is connected between the sixth boundary and the eighth boundary, and an included angle between the second chamfered boundary and the sixth boundary is an obtuse angle, and an included angle between the second chamfered boundary and the eighth boundary is an obtuse angle.

17. The phase shifter according to claim 6, characterized in that The transmission unit in the second routing section is a second transmission unit; In the second transmission unit, the first routing segment is an arc.

18. The phase shifter according to claim 6, characterized in that The transmission unit in the second routing section is a second transmission unit; In the second transmission unit, the first routing segment is a straight line.

19. An antenna, characterized in that: A phase shifter comprising any one of claims 1-18.

20. The antenna according to claim 19, characterized in that The antenna also includes a feeding network and a radiating electrode; The feeding network is coupled and connected to the phase shifter wiring; Along a direction perpendicular to the plane where the ground electrode layer is located, the ground electrode layer at least partially overlaps with the radiation electrode; The ground electrode layer includes a first hollow portion, and along a direction perpendicular to a plane where the ground electrode layer is located, the phase shifter wiring at least partially overlaps with the first hollow portion, and the radiation electrode covers the first hollow portion.

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