Bell jar type reduction furnace capable of being heated uniformly

Abstract

The uniformly-heated bell jar type reduction furnace comprises a bell jar body, the bottom end of the bell jar body is inserted into the top end of an insertion cavity, the insertion cavity is installed at the top end of a base, a heat transfer box is installed at the top end of the base, a heat conduction layer is installed at the top end of the heat transfer box, and a limiting cavity is installed at the top end of the heat conduction layer. A limiting cavity is formed in the top end of the base, a raw material containing cavity is formed in the top end of the limiting cavity, a first rotating cavity is formed in the bottom end of the raw material containing cavity, a first rotating block is rotationally connected into the first rotating cavity, and a spiral conveying rod is installed at the top end of the first rotating block. And the polycrystalline silicon raw materials are uniformly heated, so that the heated and reduced polycrystalline silicon raw materials are uniformly heated, the subsequent screening step is reduced, the problems of non-uniform growth of silicon rods and non-uniform grain size distribution are avoided, and the practicability and convenience of the device are improved.

Description

Technical Field

[0001] The invention relates to the technical field of bell-type reduction furnaces, in particular to a bell-type reduction furnace with uniform heating. Background Art

[0002] Polysilicon is the basic material of the solar photovoltaic industry. Its main production process is the modified Siemens method (trichlorosilane reduction method, SiHCl3+H2→Si+3HCl). This process has been used on a large scale in my country for nearly 10 years. Due to the lack of breakthroughs in core technology, the circulation volume of refined trichlorosilane reaches 55-60 tons for every ton of polysilicon produced, and about 16 tons of silicon tetrachloride are produced at the same time. In addition, it takes about 100 hours of deposition time for silicon rods to grow to a diameter of 135-150mm, resulting in high energy consumption in polysilicon production. The main reason is that during the growth of polysilicon rods, there is an excessively thick gas boundary layer (the Boundary Layer) on the surface of the hot silicon rods. At the same time, the HCl produced on the hot silicon rod surface cannot diffuse rapidly through the interface layer, causing the silicon rod to be corroded, resulting in a very slow deposition rate and a very low TCS conversion rate. A large amount of TCS and H2 that have not passed through the diffusion layer enter the recovery unit with the tail gas, causing the recovery system to be overloaded and resulting in a greatly increased circulation amount of refined trichlorosilane.

[0003] In the prior art, the reduction furnace will cause the surface temperature of the silicon rod to be different due to uneven heating during the heating and reduction process of polysilicon, which will lead to different deposition rates. The deposition rate is slow in places with high temperature and easily produce pits, while the deposition rate is fast in places with low temperature and produce protrusions, making the surface of the silicon rod rough and loose, affecting its mechanical strength and photoelectric conversion efficiency. Uneven heating will cause the growth rate of the silicon rod to be different in the upper and lower parts or different parts, and the upper part may be thicker and the lower part may be thinner. When the difference in thickness between the upper and lower parts reaches a certain level, the thinner silicon rod at the lower part cannot withstand the upper pressure, and the rod is prone to fall over, increasing production risks and costs. The uneven temperature will cause uneven distribution of polysilicon grain size, thereby affecting the structural stability of the crystal, and ultimately affecting the performance of polysilicon.

[0004] After searching, for example, a Chinese patent document discloses a forced circulation type polysilicon reduction furnace bell (publication number: CN203794641U), a forced circulation type polysilicon reduction furnace bell, but it still has the following defects: Although the above-mentioned forced circulation polysilicon reduction furnace bell jar realizes a forced circulation device to reduce the excessive thickness of the gas interface layer on the surface of the polysilicon rods during the growth of the polysilicon rods and improve the uniformity of the gas field and temperature field in the reduction furnace, it still has the problem of poor polysilicon product quality due to uneven heating during the heating reduction process. Summary of the invention

[0005] The object of the present invention is to provide a bell-shaped reduction furnace with uniform heating, so as to solve the problem of poor quality of polysilicon products due to uneven heating during the heating and reduction process mentioned in the background art.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a bell-type reduction furnace with uniform heating, comprising a bell body, the bottom end of the bell body is plugged into the top of the plug-in cavity, and the plug-in cavity is installed at the top of the base, a heat transfer box is installed at the top of the base, and a heat conductive layer is installed at the top of the heat transfer box, a limiting cavity is installed at the top of the heat conductive layer, and a raw material placement cavity is installed at the top of the limiting cavity, a first rotating cavity is opened at the bottom of the raw material placement cavity, and a first rotating block is rotatably connected inside the first rotating cavity, a spiral conveying rod is installed at the top of the first rotating block, a plurality of groups of heating components are arranged inside the bell body, and a centrifugal suction device is installed at the top of the bell body, a first connecting pipe is installed at the top of the centrifugal suction device, and the other end of the first connecting pipe passes through the bottom end of the base and is connected to one end of the heat transfer pipe, the heat transfer pipe is installed inside the heat transfer box, and the inside of the heat transfer box is filled with heating liquid, a second connecting pipe is installed on the outer wall of the heat transfer box, and one end of the second connecting pipe is connected to the other end of the heat transfer pipe.

[0007] Preferably, a second rotating cavity is opened inside the bottom end of the base, and a second rotating block is rotatably connected inside the second rotating cavity, a connecting block is installed on the top end of the second rotating block, and the top end of the connecting block is magnetically attracted to the bottom end of the first rotating block.

[0008] Preferably, a first transmission disc is installed at the bottom end of the second rotating block, and a first transmission belt is connected to the inside of the first transmission disc, the other end of the first transmission belt is connected to the inside of the second transmission disc, and the second transmission disc is rotatably connected to the bottom end of the mounting seat.

[0009] Preferably, the mounting seat is installed on the outer wall of the base, and the top end of the second transmission plate is connected to the bottom end of the first guide rod, the top end of the first guide rod is sleeved inside the bottom end of the first guide sleeve, and the top end of the first guide sleeve is installed with a third transmission plate.

[0010] Preferably, a second transmission belt is installed inside the third transmission disc, and the other end of the second transmission belt is connected to the inside of the fourth transmission disc, the bottom end of the fourth transmission disc is connected to the top end of the first bevel gear, and the first bevel gear is rotatably connected to the top end of the connecting seat, a motor is installed at the bottom end of the connecting seat, and the output end of the motor is transmission-connected to the bottom end of the first bevel gear.

[0011] Preferably, the top end of the fourth transmission disk is connected to the bottom end of the transmission shaft, and a disc-type electromagnetic clutch is installed at the top end of the transmission shaft, and the input end provided inside the disc-type electromagnetic clutch is connected to the transmission shaft, the top end of the rotor of the disc-type electromagnetic clutch is connected to the bottom end of the first connecting block, and a transmission screw is installed at the top end of the first connecting block.

[0012] Preferably, the outer side wall of the transmission screw is meshingly connected with a connecting screw sleeve, the connecting screw sleeve is installed through the inside of the second connecting block, and one end of the second connecting block is connected to one end of the mounting frame, and the mounting frame is installed on the top of the bell cover body.

[0013] Preferably, the outer wall of the first bevel gear is meshedly connected with the second bevel gear, and one end of the second bevel gear is connected to one end of the third bevel gear through a linkage rod, the outer wall of the third bevel gear is meshedly connected with the fourth bevel gear, a second guide rod is provided on one side of the fourth bevel gear, and a fifth transmission disk is provided at the bottom end of the second guide rod and the top end of the fourth bevel gear, and a third transmission belt is internally installed between the two fifth transmission disks.

[0014] Preferably, the top end of the second guide rod is sleeved inside the bottom end of the second guide sleeve, and the bottom end of the second guide sleeve is magnetically attracted to the top end of the magnetic block, the magnetic block is installed at the top end of the second guide rod, and the top end of the second guide sleeve is installed with a sixth transmission disk, a transmission belt is installed inside the sixth transmission disk, and the other end of the transmission belt is installed inside the seventh transmission disk.

[0015] Preferably, the seventh transmission disk is rotatably connected to the top of the gas mixing chamber, and the gas mixing chamber is installed at the top of the bell cover body, a mixing shaft is provided inside the gas mixing chamber, and the top of the mixing shaft is transmission-connected to the bottom end of the seventh transmission disk, and a mixing plate is installed on the outer wall of the mixing shaft.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. During use, the present invention can improve the efficiency of heating and reducing polysilicon raw materials, and heat the polysilicon raw materials evenly. Since the polysilicon raw materials heated and reduced by the present invention are heated evenly, the subsequent screening steps are reduced, and the problem of uneven growth of silicon rods and uneven grain size distribution is avoided, thereby improving the practicality and convenience of the device.

[0017] 2. During use, the present invention reuses the heat energy generated during the dehumidification operation to achieve heat recycling, improve the heating and reduction efficiency of polysilicon, and heat the bottom of the polysilicon to make it more evenly heated. In the process of double uniform heating by the spiral conveying rod, the heating and reduction effect can be further improved.

[0018] 3. During use of the present invention, the mixing shaft and the mixing plate can be linked in a manner to mix hydrogen, trichlorosilane and silicon tetrachloride during the heating and reduction of the polysilicon raw materials, so that the mixed gas can more easily evenly reduce the polysilicon raw materials, and the spiral conveying rod can be linked to operate at the same time, which can reduce hardware costs and maintenance costs and facilitate unified regulation. In this way, it is possible to effectively avoid the problem that when hydrogen, trichlorosilane and silicon tetrachloride and other chemical reagents are injected in a segmented manner, only the upper polysilicon material can contact the chemical reagents, thereby causing uneven reduction effect, and subsequent inspections need to be carried out one by one. In this way, the present invention can be operated by the spiral conveying rod while the mixing shaft is linked to work in real time to perform mixing operations, which can ensure that all polysilicon materials are evenly contacted with the chemical reagents, so that all polysilicon materials can maintain a relatively average reduction effect.

[0019] The linkage design of the centrifugal input device, the screw conveying rod and the mixing shaft achieves multiple improvements (heat, gas, dynamic conveying) and overcomes the limitations of existing technologies BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the main structure of the present invention; Figure 2 It is a side view structural schematic diagram of the present invention; Figure 3 It is a schematic diagram of the cross-sectional structure of the bell jar body of the present invention; Figure 4 It is a schematic diagram of the structure of the combined parts of the base, the heat transfer box, the placement chamber, the raw material placement chamber and the spiral conveying rod in the present invention; Figure 5 It is a schematic diagram of the structure of the combined parts of the heat transfer box, the heat conducting layer, the placement chamber, the raw material placement chamber, the first rotating block and the spiral conveying rod in the present invention; Figure 6 It is a schematic diagram of the structure of the combined parts of the base, the connecting block, the second rotating block, the first transmission disc, the first transmission belt and the second transmission disc in the present invention; Figure 7 It is a schematic diagram of the structure of the combined parts of the fourth transmission plate, the first bevel gear, the connecting seat, the transmission shaft, the disc-type electromagnetic clutch, the first connecting block, the transmission screw and the connecting screw sleeve in the present invention; Figure 8 It is a schematic diagram of the structure of the combined parts of the second guide rod, the magnetic suction block and the second guide sleeve in the present invention; Fig. 9 It is a schematic diagram of the structure of the combined parts of the seventh transmission disc, the gas mixing chamber, the mixing shaft and the mixing plate in the present invention; Fig.10It is a schematic diagram of the cross-sectional structure of the heat transfer box in the present invention.

[0021] In the figure: 1, bell housing; 2, plug-in cavity; 3, base; 4, heat transfer box; 5, heat conducting layer; 6, limit cavity; 7, raw material placement cavity; 8, first rotating block; 9, screw conveying rod; 10, connecting block; 11. second rotating block; 12. first transmission disc; 13. first transmission belt; 14. second transmission disc; 15. mounting seat; 16. first guide rod; 17. first guide sleeve; 18. third transmission disc; 19. second transmission belt; 20. fourth transmission disc; 21. first bevel gear; 22. connecting seat; 23. motor; 24. transmission shaft; 25. disc-type electromagnetic clutch; 26. first connecting block; 27. transmission screw; 28. connecting screw sleeve; 29. ​​second connecting block; 30. second bevel gear; 31. third bevel gear; 32. fourth bevel gear; 33. third transmission belt; 34. fifth transmission disc; 35. second guide rod; 36. magnetic block; 37. second guide sleeve; 38. sixth transmission disc; 39. seventh transmission disc; 40. gas mixing chamber; 41. mixing shaft; 42. mixing plate; 43. centrifugal suction device; 44. first connecting pipe; 45. second connecting pipe; 46. transmission pump; 47. heat transfer pipe. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0023] See also Figure 1-Figure 10The present invention provides a bell-shaped reduction furnace with uniform heating, comprising a bell-shaped body 1, wherein a plurality of heating components for heating and reducing polysilicon are fixedly connected inside the bell-shaped body 1, and a sensor for monitoring the temperature and humidity inside the bell-shaped body 1 is arranged inside the bell-shaped body 1, and the bottom end of the bell-shaped body 1 is plugged into the top end of a plug-in cavity 2 arranged in a "U"-shaped structure, and the plug-in cavity 2 is fixedly connected to the top end of a base 3, and a heat transfer box 4 fixedly connected to the middle part of the top end of the base 3 is arranged inside the bell-shaped body 1, and a heat transfer pipe 47 is arranged inside the heat transfer box 4, and the heat transfer pipe 47 is arranged at The heating liquid is filled inside the heat transfer box 4, and the output end and input end of the heat transfer tube 47 are fixedly connected with the first connecting tube 44 and the second connecting tube 45, and the two ends of the first connecting tube 44 are set as hard material structures, and the middle section is set as flexible material structure. The other end of the first connecting tube 44 is fixedly connected to the input end of the centrifugal suction device 43, and the centrifugal suction device 43 is fixedly connected to the top of the bell cover body 1, and the centrifugal suction device 43 is a centrifugal fan with an output motor structure. The heat transfer tube 47 is a curved structure set inside the heat transfer box 4.

[0024] By setting up the centrifugal suction device 43, when the temperature and humidity monitoring sensor inside the bell cover body 1 detects that the humidity is too high, the centrifugal suction device 43 can be started by transmitting electricity and signals through wires through the control computer and controller and other structures to inhale a certain amount of air, and transmit it to the heat transfer pipe 47 through the first connecting pipe 44, and discharge it to the designated location through the second connecting pipe 45. At this time, since the inhaled air contains heat, the heat will be absorbed by the heating liquid, so that the heat can be reused, the heating and reduction efficiency of the polysilicon is improved, and the bottom end of the polysilicon is heated to make it more evenly heated. Since the outer wall of the heat transfer pipe 47 is in contact with the heating liquid inside the heat transfer box 4, its thermal conductivity effect is further improved.

[0025] The top of the heat transfer box 4 is fixedly connected to a heat conducting layer 5 with a hollow structure, and the heat conducting layer 5 is a copper material structure. The top of the heat conducting layer 5 is fixedly connected to the bottom end of a limiting cavity 6 with a hollow structure, and a raw material placement cavity 7 is placed inside the limiting cavity 6. A first rotating cavity for rotating a first rotating block 8 is opened inside the bottom end of the raw material placement cavity 7, and a screw conveying rod 9 is fixedly connected to the top of the first rotating block 8. The top of the screw conveying rod 9 is slightly higher than the inner wall height of the raw material placement cavity 7.

[0026] By setting up the raw material placement chamber 7, the polysilicon raw material that needs to be heated and reduced is placed through the raw material placement chamber 7 during use, and during the heating and reduction process, the first rotating block 8 rotates to drive the screw conveying rod 9 to rotate at a uniform speed, and the polysilicon raw material stored at the bottom of the raw material placement chamber 7 is turned over to the top due to the characteristics of the screw conveying rod 9, so that the polysilicon raw material stored in the raw material placement chamber 7 is relatively evenly located above the inside of the raw material placement chamber 7, and further contacts the chemical reagents evenly, and can be evenly heated, thereby improving its quality. Because the top end of the screw conveying rod 9 is slightly higher than the inner wall height of the raw material placement chamber 7, the polysilicon raw material it transports is prevented from being damaged due to a large drop.

[0027] The first rotating block 8 is set as a magnetic material structure, and the bottom end of the first rotating block 8 is magnetically fixed to the top of the connecting block 10 set with a magnet structure, the bottom end of the connecting block 10 is fixedly connected to the top of the second rotating block 11 rotatably connected inside the second rotating cavity, the bottom end of the second rotating block 11 is fixedly connected to the first transmission disk 12, and a second transmission disk 14 is set on one side of the first transmission disk 12, a first transmission belt 13 is sleevedly connected between the second transmission disk 14 and the first transmission disk 12, and the second transmission disk 14 is rotatably connected to the bottom end of the mounting seat 15.

[0028] By setting the second transmission disk 14, the second transmission disk 14 is rotated during use, so that the second transmission disk 14 cooperates with the first transmission belt 13 to drive the first transmission disk 12 to rotate, so that the second rotating block 11 and the connecting block 10 are driven to rotate synchronously during the rotation of the first transmission disk 12. Because the connecting block 10 is magnetically fixed to the bottom end of the first rotating block 8, the first rotating block 8 drives the spiral conveying rod 9 to rotate completely. When the bell cover body 1 is closed, the top of the connecting block 10 will conflict with and be magnetically attracted to the bottom end of the first rotating block 8. When the bell cover body 1 is opened, the top of the connecting block 10 will be separated from the bottom end of the first rotating block 8.

[0029] The top end of the second transmission disc 14 is transmission-connected to the bottom end of the first guide rod 16, and the top end of the first guide rod 16 is inserted into the bottom end of the first guide sleeve 17. The inner wall of the first guide sleeve 17 and the outer wall of the first guide rod 16 are both rectangular structures. The top end of the first guide sleeve 17 is fixedly connected to the third transmission disc 18, and a fourth transmission disc 20 is provided on one side of the third transmission disc 18. A second transmission belt 19 is sleevedly connected between the fourth transmission disc 20 and the third transmission disc 18.

[0030] The fourth transmission disc 20 is rotated to cooperate with the second transmission belt 19 to drive the third transmission disc 18 to rotate, and then the third transmission disc 18 drives the second transmission disc 14 to rotate through the first guide rod 16 and the first guide sleeve 17, and when closed, the top end of the first guide rod 16 will be inserted into the bottom end of the first guide sleeve 17, and then the first guide rod 16 and the first guide sleeve 17 can be transmitted. When the bell cover body 1 is opened, the top end of the first guide rod 16 will be separated from the bottom end of the first guide sleeve 17, and then the second transmission disc 14 will not be transmitted to rotate.

[0031] The bottom end of the fourth transmission disk 20 is fixedly connected to the first bevel gear 21, and the first bevel gear 21 is rotatably connected to the top of the connecting seat 22, the connecting seat 22 is fixedly connected to the top of the base 3, and the bottom end of the connecting seat 22 is fixedly connected to the motor 23, the output end of the motor 23 is transmission-connected to the bottom end of the first bevel gear 21, the top end of the fourth transmission disk 20 is fixedly connected to the transmission shaft 24, and the top end of the transmission shaft 24 is inserted into the inside of the disc type electromagnetic clutch 25, and is fixedly connected to the input end provided inside the disc type electromagnetic clutch 25, the rotor part provided at the top of the disc type electromagnetic clutch 25 is fixedly connected to the bottom end of the first connecting block 26, and the setter part at the bottom end of the disc type electromagnetic clutch 25 is fixedly connected to the top of the base 3.

[0032] By setting up the motor 23, when the motor 23 performs output operation, when the internal coil of the disc-type electromagnetic clutch 25 is energized, the rotor and the input end are attracted and fixed to realize power transmission, thereby driving the first bevel gear 21 to rotate, and the rotation of the first bevel gear 21 drives the fourth transmission plate 20, the transmission shaft 24 and the rotor end of the disc-type electromagnetic clutch 25 to rotate. Then, when the bell cover body 1 needs to be lifted, opened or closed, the rotor part of the disc-type electromagnetic clutch 25 is fixed to the input end after the disc-type electromagnetic clutch 25 is energized, and the rotation of the input end drives the rotor part to rotate synchronously, thereby driving the first connecting block 26 and other components to rotate.

[0033] The fixed end of the disc type electromagnetic clutch 25 may also be fixed by a fixing structure such as a fixing rod to prevent the disc type electromagnetic clutch 25 from rotating and causing the wires to be entangled.

[0034] The top of the first connecting block 26 is fixedly connected with a transmission screw 27, and the outer side wall of the transmission screw 27 is meshedly connected with a connecting screw sleeve 28, the connecting screw sleeve 28 and the transmission screw 27 constitute a screw transmission structure, the connecting screw sleeve 28 passes through and is fixedly connected to the inside of the second connecting block 29, one end of the second connecting block 29 is connected to one end of a mounting frame arranged in a "concave" structure, and the mounting frame is fixedly connected to the top of the bell cover body 1 by screws.

[0035] By setting the first connecting block 26, when the first connecting block 26 rotates, the transmission screw 27 is driven to rotate. Since the connecting screw sleeve 28 and the transmission screw 27 form a screw transmission structure, the connecting screw sleeve 28 can move vertically, and the bell cover body 1 can be driven to move up and down through the mounting frame to meet the activity requirements of the bell cover body 1.

[0036] A second bevel gear 30 is vertically meshed and connected to one side of the first bevel gear 21, and a third bevel gear 31 is provided on one side of the second bevel gear 30, a linkage rod is fixedly connected between the third bevel gear 31 and the second bevel gear 30, the linkage rod passes through and is movably connected to the inside of the movable sleeve, and the movable sleeve is fixedly connected to the top of the base 3, a fourth bevel gear 32 is parallelly meshed and connected to one side of the third bevel gear 31, a second guide rod 35 is provided on one side of the fourth bevel gear 32, and the bottom ends of the second guide rod 35 and the fourth bevel gear 32 are fixedly connected to the fifth transmission disc 34, and a third transmission belt 33 is internally mounted between the fifth transmission disc 34.

[0037] The first bevel gear 21 is set to rotate, thereby driving the meshing second bevel gear 30 to rotate. Because the second bevel gear 30 and the third bevel gear 31 are fixedly connected with a linkage rod, when the second bevel gear 30 rotates, the third bevel gear 31 is driven to rotate, and the third bevel gear 31 drives the meshing fourth bevel gear 32 to rotate. When the fourth bevel gear 32 rotates, it drives the fifth transmission plate 34 to rotate. The fifth transmission plate 34 cooperates with the third transmission belt 33 to drive the fifth transmission plate 34 set on the other side to rotate.

[0038] The top end of the second guide rod 35 is fixedly connected with a magnetic block 36, and the top end of the second guide rod 35 is inserted into the bottom end of the second guide sleeve 37. The bottom end of the second guide sleeve 37 is provided with a magnetic material structure, and the top end of the bottom end of the second guide sleeve 37 conflicts with the top end of the magnetic block 36 and is magnetically attracted. The top end of the second guide sleeve 37 is fixedly connected with a sixth transmission disk 38. The magnetic tensile strength of the magnetic block 36 and the top end of the bottom end of the second guide sleeve 37 meets the force required by the fifth transmission disk 34 to drive the second guide sleeve 37, the second guide rod 35 and other components to rotate.

[0039] By rotating the fifth transmission plate 34 fixedly connected to the bottom end of the second guide rod 35, the second guide rod 35 is driven to rotate, and then the second guide rod 35 and the second guide sleeve 37 are magnetically attracted, thereby driving the sixth transmission plate 38 to rotate. When the bell cover body 1 moves upward and opens, the second guide rod 35 and the bottom ends of the second guide sleeve 37 are separated internally, and when the bell cover body 1 is closed, the second guide rod 35 and the second guide sleeve 37 are magnetically connected and fixed by the magnetic attraction block 36.

[0040] A gas mixing chamber 40 is fixedly connected to the top of the bell jar body 1, and a mixing shaft 41 is movably connected inside the gas mixing chamber 40, and a mixing plate 42 is fixedly connected to the outer wall of the mixing shaft 41 at equal intervals, the top of the mixing shaft 41 is transmission-connected to the bottom end of the seventh transmission disk 39, and a transmission belt is internally mounted between the seventh transmission disk 39 and the sixth transmission disk 38, the outer wall of the gas mixing chamber 40 is connected to a gas transmission pipe, a transmission pump 46 is provided at the bottom end of the gas mixing chamber 40, and the output end of the transmission pump 46 is plugged into the top of the bell jar body 1.

[0041] Hydrogen, trichlorosilane and silicon tetrachloride used for heating and reducing the polysilicon raw materials are transmitted to the interior of the gas mixing chamber 40 in a specified proportion through a gas transmission pipe, and are fully mixed by a mixing plate 42 driven by a mixing shaft 41, and then injected into the interior of the bell jar body 1 for heating and reducing the polysilicon raw materials. During the rotation of the sixth transmission disk 38, the seventh transmission disk 39 is driven to rotate by a transmission belt, thereby driving the mixing shaft 41 to rotate.

[0042] The specific use process of this embodiment is as follows: First, the polysilicon raw material to be heated and reduced is placed inside the raw material placement cavity 7 and installed inside the limiting cavity 6, so that it is heated to a specified temperature by the heating component provided in the bell housing body 1 to start reduction; Secondly, when the humidity inside the bell housing body 1 is too high, the centrifugal suction device 43 is started to suck in a certain amount of air, and the air is transferred to the heat transfer pipe 47 through the first connecting pipe 44, and discharged to a designated location through the second connecting pipe 45. At this time, the heat in the sucked air will be absorbed by the heating liquid because the heat exists in the air. Then, the motor 23 performs output operation, and through the linkage of multiple components, the spiral conveying rod 9 rotates, and the spiral conveying rod 9 flips the polysilicon raw material stored at the bottom of the raw material placement chamber 7 to the top, so that it can be evenly heated. At the same time, the hydrogen, trichlorosilane and silicon tetrachloride used for heating and reducing the polysilicon raw material are transmitted to the inside of the gas mixing chamber 40 according to the specified proportion through the gas transmission pipe, and the mixing plate 42 is driven by the mixing shaft 41 to fully mix them, and then injected into the inside of the bell jar body 1 for heating and reducing the polysilicon raw material; Finally, after the reduction is completed, the disc-type electromagnetic clutch 25 is used to electromagnetically absorb the bottom end of the first connecting block 26, thereby driving the first connecting block 26 and other components to rotate, so that the transmission screw 27 is rotated. In this way, the connecting screw sleeve 28 and the transmission screw 27 form a screw transmission structure. In this way, the connecting screw sleeve 28 can move vertically, and the bell body 1 can be driven to move up and down through the mounting frame to meet the activity requirements of the bell body 1. In this way, a bell-type reduction furnace with uniform heating is completed.

[0043] The present invention adopts the design of centrifugal suction device 43 to introduce the waste heat generated during the heating process into the heat transfer liquid to maintain the temperature uniformity at the bottom of the reduction furnace. This design solves the problems of severe heat loss and uneven temperature distribution in the prior art.

[0044] The polysilicon material is dynamically turned over by the spiral conveying rod 9, so that the heating uniformity of the bottom and top materials is optimized, eliminating the local unevenness caused by static heating.

[0045] The gas mixing chamber 40 ensures a uniform distribution of hydrogen and trichlorosilane through the cooperation of the mixing shaft 41 and the mixing plate 42, thereby improving the reduction reaction efficiency. Compared with the prior art method that only relies on gas inlet optimization, this method is more innovative.

[0046] The spiral conveying rod 9, the motor 23, the disc-type electromagnetic clutch 25, the transmission pump 46 and the centrifugal suction device 43 in the present invention are all prior arts.

[0047] It should be noted that the present invention is a bell-type reduction furnace with uniform heating. All components are universal standard parts or components known to those skilled in the art. The structure and principle can be known to those skilled in the art through technical manuals or conventional experimental methods. In the idle part of this device, all the above-mentioned electrical components, which refer to power elements, electrical components, and compatible monitoring computers and power supplies, are connected through wires. The specific connection means should refer to the above-mentioned working principle, and the electrical connection is completed in the working order of each electrical component. The detailed connection means are well known in the art.

[0048] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A bell-shaped reduction furnace with uniform heating, comprising a bell-shaped body (1), characterized in that: The bottom end of the bell housing body (1) is plugged into the top of the plug-in cavity (2), and the plug-in cavity (2) is mounted on the top of the base (3). A heat transfer box (4) is mounted on the top of the base (3), and a heat conduction layer (5) is mounted on the top of the heat transfer box (4). A limit cavity (6) is mounted on the top of the heat conduction layer (5), and a raw material placement cavity (7) is mounted on the top of the limit cavity (6). A first rotating cavity is formed at the bottom of the raw material placement cavity (7), and a first rotating block (8) is rotatably connected to the inside of the first rotating cavity. A screw conveying rod (9) is mounted on the top of the first rotating block (8). The bell housing body ( 1) is provided with a plurality of groups of heating components, and a centrifugal suction device (43) is installed at the top of the bell housing body (1), a first connecting pipe (44) is installed at the top of the centrifugal suction device (43), and the other end of the first connecting pipe (44) passes through the bottom end of the base (3) and is connected to one end of a heat transfer pipe (47), the heat transfer pipe (47) is installed in the heat transfer box (4), and the interior of the heat transfer box (4) is filled with heating liquid, and a second connecting pipe (45) is installed on the outer wall of the heat transfer box (4), and one end of the second connecting pipe (45) is connected to the other end of the heat transfer pipe (47).

2. The bell-shaped reduction furnace with uniform heating according to claim 1, characterized in that: A second rotating cavity is provided inside the bottom end of the base (3), and a second rotating block (11) is rotatably connected inside the second rotating cavity. A connecting block (10) is installed at the top end of the second rotating block (11), and the top end of the connecting block (10) is magnetically attracted to the bottom end of the first rotating block (8).

3. The bell-shaped reduction furnace with uniform heating according to claim 2, characterized in that: A first transmission disc (12) is mounted at the bottom end of the second rotating block (11), and a first transmission belt (13) is connected to the interior of the first transmission disc (12); the other end of the first transmission belt (13) is connected to the interior of a second transmission disc (14), and the second transmission disc (14) is rotatably connected to the bottom end of the mounting seat (15).

4. The bell-shaped reduction furnace with uniform heating according to claim 3, characterized in that: The mounting seat (15) is mounted on the outer wall of the base (3), and the top end of the second transmission plate (14) is connected to the bottom end of the first guide rod (16), the top end of the first guide rod (16) is sleeved inside the bottom end of the first guide sleeve (17), and the top end of the first guide sleeve (17) is mounted with a third transmission plate (18).

5. The bell-shaped reduction furnace with uniform heating according to claim 4, characterized in that: A second transmission belt (19) is installed inside the third transmission disc (18), and the other end of the second transmission belt (19) is connected to the inside of the fourth transmission disc (20), the bottom end of the fourth transmission disc (20) is connected to the top end of the first bevel gear (21), and the first bevel gear (21) is rotatably connected to the top end of the connecting seat (22), and a motor (23) is installed at the bottom end of the connecting seat (22), and the output end of the motor (23) is transmission-connected to the bottom end of the first bevel gear (21).

6. The bell-shaped reduction furnace with uniform heating according to claim 5, characterized in that: The top end of the fourth transmission disc (20) is connected to the bottom end of the transmission shaft (24), and a disc-type electromagnetic clutch (25) is installed at the top end of the transmission shaft (24), and an input end provided inside the disc-type electromagnetic clutch (25) is connected to the transmission shaft (24), and the top end of the rotor of the disc-type electromagnetic clutch (25) is connected to the bottom end of the first connecting block (26), and a transmission screw (27) is installed at the top end of the first connecting block (26).

7. The bell-shaped reduction furnace with uniform heating according to claim 6, characterized in that: The outer wall of the transmission screw (27) is meshedly connected with a connecting screw sleeve (28), the connecting screw sleeve (28) is installed through the inside of the second connecting block (29), and one end of the second connecting block (29) is connected to one end of a mounting frame, and the mounting frame is installed on the top end of the bell housing body (1).

8. The bell-shaped reduction furnace with uniform heating according to claim 5, characterized in that: The outer wall of the first bevel gear (21) is meshedly connected with a second bevel gear (30), and one end of the second bevel gear (30) is connected to one end of a third bevel gear (31) via a linkage rod, and the outer wall of the third bevel gear (31) is meshedly connected with a fourth bevel gear (32), a second guide rod (35) is provided on one side of the fourth bevel gear (32), and a fifth transmission disc (34) is provided at the bottom end of the second guide rod (35) and the top end of the fourth bevel gear (32), and a third transmission belt (33) is internally sleeved between the two fifth transmission discs (34).

9. The bell-shaped reduction furnace with uniform heating according to claim 8, characterized in that: The top end of the second guide rod (35) is sleeved inside the bottom end of the second guide sleeve (37), and the bottom end of the second guide sleeve (37) is magnetically attracted to the top end of the magnetic block (36), the magnetic block (36) is mounted on the top end of the second guide rod (35), and the top end of the second guide sleeve (37) is mounted with a sixth transmission disc (38), a transmission belt is mounted inside the sixth transmission disc (38), and the other end of the transmission belt is mounted inside the seventh transmission disc (39).

10. The bell-shaped reduction furnace with uniform heating according to claim 9, characterized in that: The seventh transmission disk (39) is rotatably connected to the top end of the gas mixing chamber (40), and the gas mixing chamber (40) is installed at the top end of the bell housing body (1). A mixing shaft (41) is arranged inside the gas mixing chamber (40), and the top end of the mixing shaft (41) is transmission-connected to the bottom end of the seventh transmission disk (39), and a mixing plate (42) is installed on the outer side wall of the mixing shaft (41).

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