Large-aperture standard reflector adjusting device

Abstract

The invention relates to the technical field of optical system detection devices, in particular to a large-aperture standard reflector adjusting device, which specifically comprises a bottom plate, an orientation rotating device, a pitching rotating device and a reflector fixing device, and is characterized in that the orientation rotating device is arranged above the bottom plate; the pitching rotating device is arranged above the azimuth rotating device; the reflector fixing device is connected to the pitching rotating device, so that the azimuth rotating device can adjust the azimuth angle of the reflector fixing device, and the pitching rotating device can adjust the pitching angle of the reflector fixing device; wherein the azimuth rotating device and the pitching rotating device have a self-locking function. Therefore, under the condition that the surface type precision of the mirror surface of the standard reflecting mirror is ensured, the standard reflecting mirror can be precisely adjusted at a large angle in the azimuth angle and the pitching angle, and the detection requirement of an optical system is met.

Description

Technical Field

[0001] The invention relates to the technical field of optical system detection devices, and specifically provides a large-aperture standard reflector adjustment device. Background Art

[0002] Optical standard mirrors are of great significance in optical system inspection. During the use of optical standard mirrors, the azimuth angle and elevation angle of the optical standard mirrors need to be adjusted. Therefore, the adjustment range of the installation standard mirror device has a wider significance for the adjustment and use of optical standard mirrors.

[0003] However, the azimuth angle of the current standard mirror installation device is pushed by a push rod, and the maximum rotation range is generally between -20° and 20°, and the pitch angle adjustment range is generally between -5° and 5°. For optical detection systems that require large-angle adjustment of optical standard mirrors, there are certain limitations, such as small adjustment range and low adjustment accuracy, which affects detection efficiency. Summary of the invention

[0004] In order to solve the above problems, the present invention provides a large-aperture standard reflector adjustment device, which can achieve large-angle precision adjustment of the standard reflector in azimuth and elevation while ensuring the surface accuracy of the standard reflector, thereby meeting the needs of optical system detection.

[0005] The present invention provides a large-aperture standard reflector adjustment device, which specifically includes a base plate, an azimuth rotation device, a pitch rotation device and a reflector fixing device, wherein the azimuth rotation device is arranged above the base plate; the pitch rotation device is arranged above the azimuth rotation device; the reflector fixing device is connected to the pitch rotation device, so that the azimuth rotation device can adjust the azimuth angle of the reflector fixing device, and the pitch rotation device can adjust the pitch angle of the reflector fixing device; wherein the azimuth rotation device and the pitch rotation device have a self-locking function.

[0006] Preferably, the azimuth rotation device includes a shaft seat, a bearing assembly, an azimuth shaft, a worm gear assembly and an azimuth adjustment handwheel. A shaft seat is arranged above the base plate, and the bearing assembly is connected to the shaft seat; the azimuth shaft passes through the bearing assembly so that the axial direction of the azimuth shaft is arranged along the vertical direction; the worm gear assembly includes an azimuth worm wheel, an azimuth worm and a first coupling, the azimuth worm wheel is sleeved on the azimuth shaft, the azimuth worm is rotatably arranged on one side of the base plate, the azimuth worm is meshed with the azimuth worm wheel, and the first coupling is connected to the azimuth worm; the azimuth adjustment handwheel is connected to the first coupling. Preferably, the pitch rotation device includes a connecting plate, a first column, a second column, a first bearing, a second bearing, a first pitch axis, a second pitch axis, a second coupling, a worm gear reducer and a pitch adjustment hand wheel, a connecting plate is arranged above the azimuth axis, the first column and the second column are respectively connected to the two sides of the connecting plate, and the first column and the second column are arranged in the vertical direction; a first bearing is arranged on the first column, and the first pitch axis is passed through the first bearing, a second bearing is arranged on the second column, and the second pitch axis is passed through the second bearing; a second coupling is arranged on the first pitch axis, and the worm gear reducer is connected to the second coupling; the pitch adjustment hand wheel is connected to the worm gear reducer.

[0007] Preferably, the axes of the first pitch axis and the second pitch axis are located on the same straight line and coincide with the center line of the reflector fixing device; and the axes of the first pitch axis and the second pitch axis are parallel to the horizontal direction.

[0008] Preferably, the pitch rotation resolution and the minimum motion resolution of the pitch rotation device are calculated based on the rotation angle of the pitch adjustment hand wheel, the radius of the pitch adjustment hand wheel and the reduction ratio of the worm gear reducer.

[0009] Preferably, the worm gear assembly is a self-locking worm gear assembly; and the worm gear reducer is a self-locking worm gear reducer.

[0010] Preferably, the azimuth angle adjustment range of the azimuth rotation device is 0° to 360°; the pitch angle adjustment range of the pitch rotation device is -5° to 50°.

[0011] Preferably, the reflector fixing device includes a reflector back plate and a cone sleeve flexible joint assembly, and the two sides of the reflector back plate are respectively connected to the first pitch axis and the second pitch axis; multiple cone sleeve flexible joint assemblies are arranged on the reflector back plate, and the cone sleeve flexible joint assembly is used to connect with the standard reflector.

[0012] Preferably, the reflector fixing device further comprises protective blocks, and a plurality of protective blocks are arranged on the reflector back plate.

[0013] Compared with the prior art, the present invention can achieve the following beneficial effects: a large-caliber standard reflector adjustment device, specifically comprising a base plate, an azimuth rotation device, a pitch rotation device and a reflector fixing device, wherein the azimuth rotation device is arranged above the base plate; the pitch rotation device is arranged above the azimuth rotation device; the reflector fixing device is connected to the pitch rotation device, so that the azimuth rotation device can adjust the azimuth angle of the reflector fixing device, and the pitch rotation device can adjust the pitch angle of the reflector fixing device; wherein the azimuth rotation device and the pitch rotation device have a self-locking function. Thus, under the condition of ensuring the surface accuracy of the standard reflector, the standard reflector can be precisely adjusted at a large angle in the azimuth angle and the pitch angle, meeting the needs of optical system detection.

[0014] Among them, by arranging a self-locking worm gear assembly in the azimuth rotation device and a self-locking worm gear reducer in the pitch rotation device, and utilizing the transmission and self-locking characteristics of the worm gear, the azimuth angle and pitch angle of the reflector fixing device can be adjusted at a large angle and with high precision, thereby avoiding reversal or sliding of the adjustment device.

[0015] Among them, the reflector fixing device includes a cone sleeve flexible joint assembly, which connects the standard reflector to the reflector back plate through the cone sleeve flexible joint assembly, thereby preventing the deformation of the reflector back plate from being transmitted to the standard reflector, and preventing the standard reflector from being deformed when the reflector fixing device is rotated at a large angle, thereby ensuring that the surface accuracy of the standard reflector meets the technical requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a structural schematic diagram of a first viewing angle of a large-aperture standard reflector adjustment device provided according to an embodiment of the present invention; Figure 2 is a structural schematic diagram of a second viewing angle of a large-aperture standard reflector adjustment device provided according to an embodiment of the present invention; Figure 3 It is a schematic structural diagram of a worm gear assembly and an azimuth adjustment hand wheel provided according to an embodiment of the present invention.

[0017] The figure marks include: 1 base plate, 2 azimuth rotation device, 21 shaft seat, 22 azimuth axis, 231 azimuth worm wheel, 232 azimuth worm, 233 first coupling, 24 azimuth adjustment hand wheel, 25 housing, 3 pitch rotation device, 31 first column, 32 second column, 33 connecting plate, 34 first pitch axis, 35 second pitch axis, 36 worm gear reducer, 37 second coupling, 38 pitch adjustment hand wheel, 4 reflector fixing device, 41 reflector back plate, 42 cone sleeve flexible joint assembly, 43 protective block. DETAILED DESCRIPTION

[0018] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, the same modules are represented by the same reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, the detailed description thereof will not be repeated.

[0019] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation of the present invention.

[0020] Refer to the following Figures 1 to 3 A large-aperture standard reflector adjustment device provided according to some embodiments of the present invention is described.

[0021] like Figure 1 to Figure 2 As shown, a large-caliber standard reflector adjustment device provided according to an embodiment of the present invention specifically includes a base plate 1, an azimuth rotation device 2, a pitch rotation device 3 and a reflector fixing device 4. The azimuth rotation device 2 is arranged above the base plate 1, the pitch rotation device 3 is arranged above the azimuth rotation device 2, the reflector fixing device 4 is connected to the pitch rotation device 3, and the reflector fixing device 4 is used to install a standard mirror, so that the azimuth rotation device 2 can adjust the azimuth angle of the reflector fixing device 4, and the pitch rotation device 3 can adjust the pitch angle of the reflector fixing device 4, thereby adjusting the azimuth angle and pitch angle of the standard reflector through the azimuth rotation device 2 and the pitch rotation device 3.

[0022] The azimuth rotation device 2 and the elevation rotation device 3 have a self-locking function, thereby achieving fixation and angle adjustment of a large-aperture standard reflector. When adjusting at a large angle, the adjustment device can be prevented from sliding due to the gravity of the standard reflector.

[0023] Therefore, under the condition of ensuring the surface accuracy of the standard reflector, the standard reflector can be precisely adjusted at a large angle in azimuth and elevation to meet the needs of optical system detection.

[0024] like Figure 1 to Figure 2 As shown, the azimuth rotation device 2 includes a shaft seat 21, a bearing assembly, an azimuth shaft 22, a worm gear assembly, and an azimuth adjustment hand wheel 24. The shaft seat 21 is fixedly connected to the top of the base plate 1, the bearing assembly is fixedly connected to the shaft seat 21, and the azimuth shaft 22 is penetrated by the bearing assembly so that the axial direction of the azimuth shaft 22 is arranged in the vertical direction, so that the azimuth shaft 22 can rotate along the direction of its own axis.

[0025] like Figures 1 to 3As shown, the worm gear assembly includes an azimuth worm wheel 231, an azimuth worm 232 and a first coupling 233. The azimuth worm wheel 231 is fixedly sleeved on the azimuth shaft 22. A worm base is provided on one side of the bottom plate 1. The azimuth worm 232 is rotatably connected to the worm base. The azimuth worm 232 is meshed with the azimuth worm wheel 231. The first coupling 233 is connected to the azimuth worm 232. The azimuth adjustment hand wheel 24 is fixedly connected to the first coupling 233, so that when the azimuth adjustment hand wheel 24 is rotated, the first coupling 233 can be driven to rotate by the azimuth adjustment hand wheel 24, thereby driving the azimuth worm 232 to rotate. The azimuth worm 232 drives the meshed azimuth worm wheel 231 to rotate, thereby driving the azimuth shaft 22 to rotate, so as to achieve large-angle adjustment of the azimuth angle of the reflector fixing device 4.

[0026] Preferably, in some embodiments, the reduction ratio of the worm gear assembly is 1:30, so that the worm gear assembly has reduction and precision subdivision functions, can smoothly adjust the azimuth angle of the standard reflector, and avoid deviation of the azimuth angle of the standard reflector during long-term optical inspection.

[0027] Preferably, in some embodiments, the azimuth rotation device 2 further comprises a housing 25, which is connected to the bottom plate 1 and is sleeved on the outside of the azimuth shaft 22 seat 21, the bearing assembly and the turbine worm assembly, so as to protect the azimuth shaft 22 seat 21, the bearing assembly and the turbine worm assembly. The azimuth adjustment hand wheel 24 is located outside the housing 25, so that the azimuth rotation device 2 is adjusted by the azimuth adjustment hand wheel 24.

[0028] like Figure 1 to Figure 2 As shown, the pitch rotation device 3 includes a connecting plate 33, a first column 31, a second column 32, a first bearing, a second bearing, a first pitch axis 34, a second pitch axis 35, a coupling 37, a worm gear reducer 36, and a pitch adjustment hand wheel 38. A connecting plate 33 is arranged above the azimuth axis 22, so that when the azimuth rotation device 2 is adjusted, the azimuth axis 22 can drive the pitch rotation device 3 to change the azimuth angle as a whole. The first column 31 and the second column 32 are respectively connected to both sides of the connecting plate 33, and the first column 31 and the second column 32 are arranged in the vertical direction. The first bearing is fixedly arranged on the first column 31, and the first pitch axis 34 is penetrated by the first bearing. The second bearing is fixedly arranged on the second column 32, and the second pitch axis 35 is penetrated by the second bearing, so as to realize the pitch rotation function of the pitch rotation device 3.

[0029] like Figure 1 to Figure 2As shown, a second coupling 37 is provided on the first pitch axis 34, and a worm gear reducer 36 is connected to the second coupling 37, so that the rotation of the first pitch axis 34 can be adjusted through the worm gear reducer 36; a pitch adjustment hand wheel 38 is connected to the worm gear reducer 36, and when the pitch adjustment hand wheel 38 is rotated, the first pitch axis 34 can be driven to rotate through the worm gear reducer 36, so as to realize a large-angle adjustment of the pitch angle of the reflector fixing device 4.

[0030] The worm gear reducer 36 has the functions of speed reduction and precision subdivision, and can smoothly adjust the pitch angle of the standard reflector, and prevent the pitch angle of the standard reflector from deviating when performing optical inspection for a long time.

[0031] like Figure 1 to Figure 2 As shown, the axes of the first pitch axis 34 and the second pitch axis 35 are located on the same straight line and are parallel to the horizontal direction, so that the pitch rotation device 3 can adjust the pitch angle of the standard reflector relative to the horizontal plane. The axes of the first pitch axis 34 and the second pitch axis 35 coincide with the center line of the reflector fixture 4, so that when the azimuth angle and the pitch angle of the reflector fixture 4 are adjusted, the center position of the standard reflector remains unchanged to avoid affecting the optical system.

[0032] like Figure 1 to Figure 2 As shown, the pitch rotation resolution and the minimum motion resolution of the pitch rotation device 3 are calculated based on the rotation angle of the pitch adjustment hand wheel 38, the radius of the pitch adjustment hand wheel 38 and the reduction ratio of the worm gear reducer 36. The pitch rotation resolution of the pitch rotation device 3 refers to the pitch angle of the pitch rotation device 3 when the pitch adjustment hand wheel 38 rotates one circle; the minimum motion resolution of the pitch rotation device 3 refers to the minimum angle that the pitch rotation device 3 can rotate through the pitch adjustment hand wheel 38.

[0033] like Figures 1 to 3 As shown, the worm gear assembly is a self-locking worm gear assembly, and the worm gear reducer 36 is a self-locking worm gear reducer 36. Through the transmission and self-locking characteristics of the worm gear, the azimuth angle and pitch angle of the reflector fixing device 4 can be adjusted at a large angle, and the worm gear assembly or the worm gear reducer 36 can be prevented from reversing or sliding, thereby avoiding repeated adjustment of the position of the optical system, improving the installation efficiency of the optical system, and reducing costs.

[0034] like Figures 1 to 3 As shown, the azimuth angle adjustment range of the azimuth rotation device 2 is continuous rotation from 0° to 360°, so that in the detection of the optical system, when it is necessary to adjust the standard reflector at a large angle, there is no need to change the position of the optical system, and only the azimuth rotation device 2 needs to be adjusted to achieve the alignment angle, thereby improving the detection efficiency and safety of use and expanding the use range of the adjustment device.

[0035] like Figure 1 to Figure 2 As shown, the pitch angle adjustment range of the pitch rotation device 3 is -5° to 50°, within which the surface accuracy PV value of the standard reflector surface can be guaranteed to be less than 1 / 10λ, and the RMS value (Root Mean Square) is less than 1 / 50λ, where λ=632.8nm. In other words, adjusting the pitch angle of the pitch rotation device 3 will not cause the surface accuracy of the standard reflector surface to change.

[0036] like Figure 1 to Figure 2 As shown, the reflector fixing device 4 includes a reflector back plate 41 and a cone sleeve flexible joint assembly 42. Both sides of the reflector back plate 41 are fixedly connected to the first pitch axis 34 and the second pitch axis 35, respectively, and the center line of the reflector back plate 41 and the axis of the first pitch axis 34 and the second pitch axis 35 are in the same straight line, so that the reflector back plate 41 can adjust the pitch angle along its own center line. A plurality of cone sleeve flexible joint assemblies 42 are arranged on the reflector back plate 41, and the cone sleeve flexible joint assemblies 42 are used to connect with the standard reflector, that is, the standard reflector is connected to the reflector back plate 41 through the cone sleeve flexible joint assembly 42.

[0037] Specifically, due to the different linear expansion coefficients of the materials, the reflector back plate 41 will also deform accordingly when the temperature changes. By providing the cone sleeve flexible joint assembly 42, it is possible to prevent the deformation of the reflector back plate 41 from being transmitted to the standard reflector. On the other hand, the cone sleeve flexible joint assembly 42 can also prevent the standard reflector from being deformed when the reflector fixing device 4 is rotated at a large angle. Thereby, it can be ensured that the surface accuracy of the standard reflector meets the technical requirements.

[0038] The specific support position of the cone sleeve flexible joint assembly 42 can be determined by finite element analysis.

[0039] like Figure 1 to Figure 2 As shown, the reflector fixing device 4 also includes a protective block 43, and a plurality of protective blocks 43 are arranged on the reflector back plate 41 to protect the standard reflector and prevent the standard reflector from falling off. Specifically, the protective block 43 can be detachably connected to the edge of the reflector back plate 41 by bolts, and the standard reflector is clamped inside the reflector back plate 41. Preferably, three protective blocks 43 are provided, which are evenly distributed on the edge of the reflector back plate 41.

[0040] Although the embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and cannot be understood as limiting the present invention. Those skilled in the art may change, modify, replace and modify the above embodiments within the scope of the present invention.

[0041] The above specific implementations of the present invention do not constitute a limitation on the protection scope of the present invention. Any other corresponding changes and modifications made based on the technical concept of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A large-aperture standard reflector adjustment device, characterized in that: include: Bottom plate (1); An azimuth rotation device (2), wherein the azimuth rotation device (2) is arranged above the base plate (1); A pitch rotation device (3), wherein the pitch rotation device (3) is arranged above the azimuth rotation device (2); A reflector fixing device (4), the reflector fixing device (4) being connected to the pitch rotation device (3) so that the azimuth rotation device (2) can adjust the azimuth angle of the reflector fixing device (4), and the pitch rotation device (3) can adjust the pitch angle of the reflector fixing device (4); Wherein, the azimuth rotation device (2) and the pitch rotation device (3) have a self-locking function.

2. The large-aperture standard reflector adjustment device according to claim 1, characterized in that: The azimuth rotation device (2) comprises: A bearing assembly, wherein a shaft seat (21) is disposed above the base plate (1), and the bearing assembly is connected to the shaft seat (21); An azimuth axis (22), the azimuth axis (22) being inserted into the bearing assembly so that the axial direction of the azimuth axis (22) is arranged along the vertical direction; A worm gear assembly, the worm gear assembly comprising an azimuth worm wheel (231), an azimuth worm (232) and a first coupling (233), the azimuth worm wheel (231) being sleeved on the azimuth shaft (22), the azimuth worm (232) being rotatably arranged on one side of the base plate (1), the azimuth worm (232) being meshed with the azimuth worm wheel (231), and the first coupling (233) being connected to the azimuth worm (232); and an azimuth adjustment hand wheel (24), the azimuth adjustment hand wheel (24) being connected to the first coupling (233).

3. The large-aperture standard reflector adjustment device according to claim 2, characterized in that: The pitch rotation device (3) comprises: A first column (31) and a second column (32), a connecting plate (33) is arranged above the azimuth axis (22), the first column (31) and the second column (32) are respectively connected to two sides of the connecting plate (33), and the first column (31) and the second column (32) are arranged in a vertical direction; A first pitch axis (34) and a second pitch axis (35), wherein the first column (31) is provided with a first bearing, the first pitch axis (34) is passed through the first bearing, the second column (32) is provided with a second bearing, the second pitch axis (35) is passed through the second bearing; A worm gear reducer (36), wherein a second coupling (37) is provided on the first pitch shaft (34), and the worm gear reducer (36) is connected to the second coupling (37); A pitch adjustment hand wheel (38), wherein the pitch adjustment hand wheel (38) is connected to the worm gear reducer (36).

4. The large-aperture standard reflector adjustment device according to claim 3, characterized in that: The axes of the first pitch axis (34) and the second pitch axis (35) are located on the same straight line and coincide with the center line of the reflector fixing device (4); The axes of the first pitch axis (34) and the second pitch axis (35) are parallel to the horizontal direction.

5. The large-aperture standard reflector adjustment device according to claim 3, characterized in that: The pitch rotation resolution and the minimum motion resolution of the pitch rotation device (3) are calculated based on the rotation angle of the pitch adjustment hand wheel (38), the radius of the pitch adjustment hand wheel (38) and the reduction ratio of the worm gear reducer (36).

6. The large-aperture standard reflector adjustment device according to claim 3, characterized in that: The worm gear assembly is a self-locking worm gear assembly; The worm gear reducer (36) is a self-locking worm gear reducer (36).

7. The large-aperture standard reflector adjustment device according to claim 3, characterized in that: The azimuth angle adjustment range of the azimuth rotation device (2) is from 0° to 360°; The pitch angle adjustment range of the pitch rotation device (3) is from -5° to 50°.

8. The large-aperture standard reflector adjustment device according to claim 3, characterized in that: The reflector fixing device (4) comprises: A reflector back plate (41), wherein two sides of the reflector back plate (41) are respectively connected to the first pitch axis (34) and the second pitch axis (35); A cone sleeve flexible joint assembly (42), a plurality of the cone sleeve flexible joint assemblies (42) are arranged on the reflector back plate (41), and the cone sleeve flexible joint assembly (42) is used to connect with a standard reflector.

9. The large-aperture standard reflector adjustment device according to claim 8, characterized in that: The reflector fixing device (4) further comprises: A protective block (43), wherein a plurality of the protective blocks (43) are arranged on the reflector back plate (41).

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