Radio frequency driving device and radio frequency power supply system

Abstract

The invention provides a radio frequency driving device and a radio frequency power supply system. The radio frequency driving device comprises an input end, an output end, N radio frequency driving units and a gating unit, the N radio frequency driving units are connected in parallel between the input end and the gating unit, the gating unit is connected between the N radio frequency driving units and the output end, the input end is used for being connected with a direct-current power supply, and the output end is used for being connected with the radio frequency generating device; wherein each radio frequency driving unit is used for receiving direct-current electric energy output by the direct-current power supply through the input end and converting the direct-current electric energy into target electric energy. The gating unit is used for selectively conducting connection between one target radio frequency driving unit and the output end, so that target electric energy generated by the target radio frequency driving unit is output to the radio frequency generation device through the output end. Wherein the voltage values of the target electric energy generated by the N radio frequency driving units are different from each other. According to the invention, the radio frequency generation device can be protected.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a radio frequency driving device and a radio frequency power supply system. Background Art

[0002] At present, with the rapid development of radio frequency (RF) technology, RF power systems are increasingly commonly used in high-power scenarios to provide the load with the required RF power. Among them, RF generators are often used to generate RF power and transmit it to the load. However, RF generators are easily affected by reflected power, and large reflected power can destroy RF generators in a short time. Therefore, how to protect RF generators has become a problem that needs to be considered. Summary of the invention

[0003] The present application provides a radio frequency driving device and a radio frequency power supply system, which can quickly and effectively protect a radio frequency generating device to prevent the radio frequency generating device from being destroyed.

[0004] In a first aspect, a radio frequency driving device is provided, the radio frequency driving device comprises an input end, an output end, N radio frequency driving units and a gating unit, the N radio frequency driving units are connected in parallel between the input end and the gating unit, the gating unit is connected between the N radio frequency driving units and the output end, the input end is used to connect to a direct current power supply, and the output end is used to connect to a radio frequency generating device; wherein, when the input end and the output end of the radio frequency driving device are respectively connected to the direct current power supply and the radio frequency generating device, each radio frequency driving unit is used to receive the direct current power output by the direct current power supply through the input end, and convert the direct current power into target power. The gating unit is used to selectively conduct the connection between one of the target radio frequency driving units and the output end, so that the target power generated by the target radio frequency driving unit is output to the radio frequency generating device through the output end. wherein, the voltage values ​​of the target power generated by the N radio frequency driving units are different from each other, and when the target power of the target radio frequency driving unit is output to the radio frequency generating device, the target power of the other N-1 radio frequency driving units stops being output to the radio frequency generating device, wherein N≥2.

[0005] In a possible implementation, each of the RF driving units includes a voltage regulating module and an energy storage module, and the voltage regulating module and the energy storage module are sequentially connected between the input end and the gating unit. The voltage regulating module is used to receive and adjust the voltage value of the DC power to obtain the target power, and the energy storage module is used to charge according to the target power to store power.

[0006] In a possible implementation, the RF driving device further includes at least one discharge circuit. The at least one discharge circuit includes N first discharge circuits, the N first discharge circuits correspond to the N RF driving units one by one, and each first discharge circuit is connected between the voltage regulating module and the energy storage module of the corresponding RF driving unit, and is connected to the ground; and / or, the at least one discharge circuit includes a second discharge circuit, the second discharge circuit is connected between the gating unit and the output end, and is connected to the ground. Each discharge circuit has a first connection state and a second connection state, and each discharge circuit is used to continuously transmit the target electric energy to the energy storage module or the RF generating device when in the first connection state, and to stop transmitting the target electric energy to the energy storage module or the RF generating device when in the second connection state, and discharge the electric energy of the energy storage module or the RF generating device to the ground accordingly.

[0007] In a possible implementation, the RF driving device further includes a control unit, the control unit being connected to at least each of the discharge circuits and the gating unit, respectively, the control unit being used to control each of the discharge circuits to be in the first connection state or the second connection state, and controlling the gating unit to selectively conduct the connection between the target RF driving unit and the output end.

[0008] In a possible implementation, the RF driving device further includes a parameter acquisition unit, and the parameter acquisition unit is used to connect to the RF generating device to obtain a first parameter of the RF generating device. The control unit is also connected to the parameter acquisition unit, and the control unit is also used to receive the first parameter, and when the first parameter does not meet the first preset condition, the gating unit is controlled according to the first parameter to conduct the connection between the target RF driving unit and the output end, so that the target electric energy generated by the target RF driving unit is output to the RF generating device, and when the first parameter meets the first preset condition, the gating unit is controlled to disconnect the connection between any RF driving unit and the output end, so that the target electric energy generated by any RF driving unit stops being output to the RF generating device.

[0009] In a possible implementation manner, the control unit is further configured to, when the first parameter does not satisfy the first preset condition, control each of the discharge circuits to be in the first connection state so that the target electric energy is continuously transmitted to the energy storage module or the radio frequency generating device, and, when the first parameter satisfies the first preset condition, control each of the discharge circuits to be in the second connection state so that the target electric energy stops being transmitted to the energy storage module or the radio frequency generating device, and discharges the electric energy of each energy storage module and / or the radio frequency generating device to ground accordingly.

[0010] In a possible implementation manner, the first parameter includes a reflected power value, and the first preset condition is that the reflected power value is greater than or equal to a first preset value.

[0011] In a possible implementation, each discharge circuit includes a switch module, a first discharge module, and a second discharge module. The switch module is connected between the voltage regulation module and the energy storage module or between the gating unit and the output end, and the switch module is used to be in a first on state or a first off state to respectively turn on or off the connection path between the voltage regulation module and the energy storage module, so as to correspondingly make the target electric energy continuously transmitted or stopped transmitted to the energy storage module; or, respectively turn on or off the connection path between the gating unit and the output end, so as to correspondingly make the target electric energy continuously transmitted or stopped transmitted to the radio frequency generating device. The first discharge module is connected in parallel with the switch module between the voltage regulation module and the energy storage module or between the gating unit and the output end, and is connected to the ground, and the first discharge module is used to be in a second on state or a second off state to correspondingly discharge or stop discharge of the electric energy of the energy storage module; or, correspondingly discharge or stop discharge of the electric energy of the radio frequency generating device. The second discharge module is connected between the connection point between the switch module and the energy storage module and the ground or between the connection point between the switch module and the output end and the ground, and the second discharge module is used to be in the third on state or the third off state to discharge or stop discharging the electric energy of the energy storage module; or, to discharge or stop discharging the electric energy of the radio frequency generating device. When the switch module is in the first on state, the first discharge module is in the second off state, and the second discharge module is in the third off state, the corresponding discharge circuit is in the first connection state; when the switch module is in the first off state, the first discharge module is in the second on state and / or the second discharge module is in the third on state, the corresponding discharge circuit is in the second connection state.

[0012] In a possible implementation, the second connection state includes a first discharge connection state, a second discharge connection state, and a third discharge connection state; when the first discharge module is in the second conduction state and the second discharge module is in the third conduction state, the corresponding discharge circuit is in the first discharge connection state; when the first discharge module is in the second conduction state and the second discharge module is in the third disconnection state, the corresponding discharge circuit is in the second discharge connection state; when the first discharge module is in the second disconnection state and the second discharge module is in the third conduction state, the corresponding discharge circuit is in the third discharge connection state. Wherein, when any discharge circuit is in the first discharge connection state, the second discharge connection state, and the third discharge connection state, the discharge speed of the electric energy of the energy storage module or the radio frequency generating device is successively reduced.

[0013] In the second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system includes a direct current power supply, a radio frequency generating device and a radio frequency driving device. The radio frequency driving device includes an input end, an output end, N radio frequency driving units and a gating unit, the N radio frequency driving units are connected in parallel between the input end and the gating unit, the gating unit is connected between the N radio frequency driving units and the output end, the input end is used to connect to the direct current power supply, and the output end is used to connect to the radio frequency generating device; wherein, when the input end and the output end of the radio frequency driving device are respectively connected to the direct current power supply and the radio frequency generating device, each radio frequency driving unit is used to receive the direct current power output by the direct current power supply through the input end, and convert the direct current power into target power. The gating unit is used to selectively conduct the connection between one of the target radio frequency driving units and the output end, so that the target power generated by the target radio frequency driving unit is output to the radio frequency generating device through the output end. Among them, the voltage values ​​of the target electric energy generated by the N RF driving units are different from each other, and when the target electric energy of the target RF driving unit is output to the RF generating device, the target electric energy of the other N-1 RF driving units stops being output to the RF generating device, wherein N≥2.

[0014] The RF driving device and RF power supply system of the present application are configured with N RF driving units connected in parallel, and the voltage values ​​of the target electric energy generated by the N RF driving units are different from each other, so that the target electric energy with different voltage values ​​can be output to the RF generating device, and the connection between one of the target RF driving units and the output end is selectively turned on by configuring a gating unit, so that the target electric energy generated by the target RF driving unit is output to the RF generating device through the output end, so that when the RF generating device does not need protection, the target electric energy with a higher voltage value can be selected to be output to the RF generating device to generate RF electric energy, and when the RF generating device needs protection, the target electric energy with a lower voltage value can be selected to be output to the RF generating device, so as to quickly reduce the reflected power, quickly and effectively protect the RF generating device, and avoid the RF generating device from being destroyed. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 FIG. 4 is a block diagram of a radio frequency driving device in an embodiment of the present application.

[0017] Figure 2 Schematic diagram of a block diagram of a radio frequency driving unit in an embodiment of the present application.

[0018] Figure 3 FIG. 4 is a block diagram of a radio frequency driving device in another embodiment of the present application.

[0019] Figure 4 Schematic diagram of a block diagram of a discharge circuit in an embodiment of the present application.

[0020] Figure 5 FIG. 4 is a circuit diagram of a discharge circuit in an embodiment of the present application.

[0021] Figure 6 Schematic diagram of a circuit of a radio frequency driving unit in an embodiment of the present application.

[0022] Figure 7 FIG. 4 is a block diagram of a radio frequency driving device in yet another embodiment of the present application.

[0023] Figure 8 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application.

[0024] Description of the accompanying drawings: 1000, RF power supply system, DC, direct current power supply, DC1, direct current power, PA, RF generating device, 10, RF driving device, In, input end, Out, output end, 100, RF driving unit, 110, target RF driving unit, 120, voltage regulation module, S4, fourth switch, L2, second inductor, D2, second diode, 130, energy storage module, C1, first capacitor, 200, selection unit, S5, fifth switch, 300, discharge circuit, 310, first discharge circuit, 320, second discharge circuit, 330, switch module, S3, third switch, 340, first discharge module, D1, first diode, L1, first inductor, S1, first switch, 350, second discharge module, R1, first resistor, S2, second switch, 400, control unit, 500, parameter acquisition unit, P1, first parameter, DC2, target power, GND, ground. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0026] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0027] In the following, the terms "first", "second", "third", and "fourth" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", "third", and "fourth" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more.

[0028] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0029] See also Figure 1 , Figure 1 FIG. 1 is a block diagram of a radio frequency driving device in an embodiment of the present application. Figure 1 As shown, the present application provides a radio frequency driving device 10, the radio frequency driving device 10 includes an input terminal In, an output terminal Out, N radio frequency driving units 100 and a gating unit 200, the N radio frequency driving units 100 are connected in parallel between the input terminal In and the gating unit 200, the gating unit 200 is connected between the N radio frequency driving units 100 and the output terminal Out, the input terminal In is used to connect to a direct current power source DC, and the output terminal Out is used to connect to a radio frequency generating device PA; wherein, when the input terminal In and the output terminal Out of the radio frequency driving device 10 are connected to the direct current power source DC and the radio frequency generating device PA respectively, each radio frequency driving unit 100 is used to receive the direct current power DC1 output by the direct current power source DC through the input terminal In, and convert the direct current power DC1 into the target power DC2. The gating unit 200 is used to selectively conduct the connection between one of the target radio frequency driving units 110 and the output terminal Out, so that the target power DC2 generated by the target radio frequency driving unit 110 is output to the radio frequency generating device PA through the output terminal Out. Among them, the voltage values ​​of the target electric energy DC2 generated by the N RF driving units 100 are different from each other, and when the target electric energy DC2 of the target RF driving unit 110 is output to the RF generating device PA, the target electric energy DC2 of the other N-1 RF driving units 100 stops being output to the RF generating device PA, wherein N≥2.

[0030] Thus, the above-mentioned RF driving device 10 in the present application can output target electric energy DC2 with different voltage values ​​to the RF generating device PA by setting N RF driving units 100 connected in parallel, and the voltage values ​​of the target electric energy DC2 generated by the N RF driving units 100 are different from each other, and the connection between one of the target RF driving units 110 and the output terminal Out is selectively turned on by setting the gating unit 200, so that the target electric energy DC2 generated by the target RF driving unit 110 is output to the RF generating device PA through the output terminal Out, so that when the RF generating device PA does not need protection, the target electric energy DC2 with a higher voltage value can be selected to be output to the RF generating device PA to generate RF electric energy, and when the RF generating device PA needs protection, the target electric energy DC2 with a lower voltage value can be selected to be output to the RF generating device PA, so as to quickly reduce the reflected power, quickly and effectively protect the RF generating device PA, and avoid the RF generating device PA from being destroyed.

[0031] Specifically, the magnitude of the reflected power is related to the voltage value of the RF power generated by the RF generator PA. In high-power scenarios, the voltage value of the RF power is very high, and the corresponding voltage value of the target power DC2 also needs to be very high. Therefore, when the impedance is mismatched, the reflected power is very large, which will destroy the RF generator PA in a very short time. Therefore, by quickly reducing the voltage value of the target power DC2, the reflected power is also quickly reduced, which can effectively prevent the RF generator PA from being destroyed.

[0032] It should be noted that the gating unit 200 can be used to disconnect all N RF driving units 100 from the output terminal Out, that is, the gating unit 200 can not conduct the connection between any target RF driving unit 110 and the output terminal Out, thereby disconnecting all N RF driving units 100 from the output terminal Out, so that the target electric energy DC2 generated by all RF driving units 100 stops being output to the RF generating device PA through the output terminal Out. Thereby, the reflected power can be reduced to a greater extent, and the RF generating device PA can be better protected.

[0033] Further, when the gating unit 200 switches on the connection between one of the N RF driving units 100 and the output terminal Out, the one of the RF driving units 100 switched on by the gating unit 200 is the target RF driving unit 110 .

[0034] In one or more embodiments, the voltage value of the target electric energy DC2 generated by at least one RF driving unit 100 is smaller than the second preset value, thereby ensuring that the RF generating device PA is not destroyed.

[0035] In one or more embodiments, the DC power supply DC may include a DC source that outputs DC power DC1, and may also include an AC source that outputs AC power and a rectifier device, wherein the rectifier device is used to rectify the AC power into DC power DC1, so that the DC power supply DC outputs DC power DC1.

[0036] In one or more embodiments, each RF driving unit 100 can convert DC power DC1 into DC target power DC2 or convert DC power DC1 into AC target power DC2 according to the needs of the RF generating device PA to drive the RF generating device PA.

[0037] In one or more embodiments, the RF generating device PA can be used to generate RF power according to the target power DC2 and transmit the RF power to the load. The RF generating device PA can include a RF power amplifier.

[0038] Please also read Figure 2 , Figure 2 FIG. 1 is a block diagram of a radio frequency driving unit in an embodiment of the present application. Figure 1 , Figure 2 As shown, each RF driving unit 100 includes a voltage regulating module 120 and an energy storage module 130, and the voltage regulating module 120 and the energy storage module 130 are sequentially connected between the input terminal In and the gating unit 200. Among them, the voltage regulating module 120 is used to receive and adjust the voltage value of the direct current power DC1 to obtain the target power DC2, and the energy storage module 130 is used to charge according to the target power DC2 to store power.

[0039] Therefore, the above-mentioned RF driving device 10 in the present application can realize the conversion and storage of direct current power DC1 by configuring the RF driving unit 100 to include a voltage regulating module 120 and an energy storage module 130.

[0040] In one or more embodiments, the voltage regulation module 120 and the energy storage module 130 may also be connected to the ground GND.

[0041] Please also read Figure 3 , Figure 3 FIG. 1 is a block diagram of a radio frequency driving device in another embodiment of the present application. Figure 2 , Figure 3As shown, the RF driving device 10 further includes at least one discharge circuit 300. The at least one discharge circuit 300 includes N first discharge circuits 310, the N first discharge circuits 310 correspond to the N RF driving units 100 one by one, and each first discharge circuit 310 is connected between the voltage regulating module 120 and the energy storage module 130 of the corresponding RF driving unit 100, and is connected to the ground GND; and / or, the at least one discharge circuit 300 includes a second discharge circuit 320, the second discharge circuit 320 is connected between the gating unit 200 and the output terminal Out, and is connected to the ground GND. Each discharge circuit 300 has a first connection state and a second connection state. Each discharge circuit 300 is used to continuously transmit the target electric energy DC2 to the energy storage module 130 or the radio frequency generating device PA when in the first connection state, and to stop transmitting the target electric energy DC2 to the energy storage module 130 or the radio frequency generating device PA when in the second connection state, and to discharge the electric energy of the energy storage module 130 or the radio frequency generating device PA to the ground GND accordingly.

[0042] Therefore, the RF driving device 10 in the present application can discharge the electric energy of the energy storage module 130 or the RF generating device PA to the ground GND when needed by providing a discharge circuit 300 connected to a corresponding position.

[0043] It should be noted that the first discharge circuit 310 and the second discharge circuit 320 are only different in the connection position. In fact, the first discharge circuit 310 and the second discharge circuit 320 can have the same circuit structure, that is, each of the first discharge circuit 310 and the second discharge circuit 320 has a first connection state and a second connection state.

[0044] In particular, each first discharge circuit 310 can be used to continuously transmit the target electric energy DC2 to the energy storage module 130 when in the first connection state, and to stop transmitting the target electric energy DC2 to the energy storage module 130 when in the second connection state, and to discharge the electric energy of the energy storage module 130 to the ground GND accordingly. Each second discharge circuit 320 can be used to continuously transmit the target electric energy DC2 to the radio frequency generating device PA when in the first connection state, and to stop transmitting the target electric energy DC2 to the radio frequency generating device PA when in the second connection state, and to discharge the electric energy of the radio frequency generating device PA to the ground GND accordingly.

[0045] like Figure 3As shown, the RF driving device 10 further includes a control unit 400, which is connected to at least each discharge circuit 300 and the gating unit 200, respectively. The control unit 400 is used to control each discharge circuit 300 to be in a first connection state or a second connection state, and to control the gating unit 200 to selectively conduct the connection between the target RF driving unit 110 and the output terminal Out.

[0046] Therefore, the RF driving device 10 in the present application is provided with a control unit 400 to control the connection state of each discharge circuit 300 and the gating unit 200 .

[0047] like Figure 3 As shown, the RF driving device 10 further includes a parameter acquisition unit 500, which is used to connect to the RF generating device PA to obtain a first parameter P1 of the RF generating device PA. The control unit 400 is also connected to the parameter acquisition unit 500, and the control unit 400 is also used to receive the first parameter P1, and when the first parameter P1 does not meet the first preset condition, control the gating unit 200 to conduct according to the first parameter P1. Figure 1 The connection between the target RF driving unit 110 and the output terminal Out is shown so that Figure 1 The target electric energy DC2 generated by the target RF driving unit 110 is output to the RF generating device PA, and when the first parameter P1 satisfies the first preset condition, the control selection unit 200 disconnects the connection between any RF driving unit 100 and the output terminal Out, so that the target electric energy DC2 generated by any RF driving unit 100 stops being output to the RF generating device PA.

[0048] Therefore, the RF driving device 10 in the present application can enable the control unit 400 to control the gating unit 200 according to the first parameter P1 by setting the parameter acquisition unit 500 to acquire the first parameter P1 of the RF generating device PA.

[0049] In one or more embodiments, the control unit 400 is further configured to control each discharge circuit 300 to be in a first connection state when the first parameter P1 does not satisfy the first preset condition, so that the target electric energy DC2 is continuously transmitted to the energy storage module 130 or the radio frequency generating device PA, and to control each discharge circuit 300 to be in a second connection state when the first parameter P1 satisfies the first preset condition, so that the target electric energy DC2 stops being transmitted to the energy storage module 130 or the radio frequency generating device PA, and discharges the electric energy of each energy storage module 130 and / or the radio frequency generating device PA to the ground GND accordingly.

[0050] Therefore, in the above-mentioned RF driving device 10 in the present application, the control unit 400 is specifically configured to control each discharge circuit 300 to be in the first connection state when the first parameter P1 does not meet the first preset condition, and to control each discharge circuit 300 to be in the second connection state when the first parameter P1 meets the first preset condition.

[0051] Specifically, when the first parameter P1 does not meet the first preset condition, it indicates that the reflected power is small, and the target power DC2 can be normally output to the radio frequency generating device PA without controlling any discharge circuit 300 to be in the second connection state. When the first parameter P1 meets the first preset condition, it indicates that the reflected power is large, and the target power DC2 cannot continue to be output to the radio frequency generating device PA, and in order to protect the radio frequency generating device PA, each discharge circuit 300 is controlled to be in the second connection state, so that the target power DC2 stops being transmitted to the energy storage module 130 or the radio frequency generating device PA, and the power of each energy storage module 130 and / or the radio frequency generating device PA is discharged to the ground GND accordingly, so as to achieve the fastest protection.

[0052] Furthermore, when at least one discharge circuit 300 includes N first discharge circuits 310 and one second discharge circuit 320, when the RF generating device PA needs to be protected, the electric energy of each energy storage module 130 and the RF generating device PA can be discharged to the ground GND, which can further ensure that the RF generating device PA is not destroyed.

[0053] In one or more embodiments, the first parameter P1 includes a reflection power value, and the first preset condition is that the reflection power value is greater than or equal to the first preset value.

[0054] Thus, the above-mentioned RF driving device 10 in the present application, by configuring the first parameter P1 to include a reflected power value, the first preset condition is that the reflected power value is greater than or equal to the first preset value, so that the control unit 400 can control the selection unit 200 to disconnect the connection between any RF driving unit 100 and the output terminal Out when the reflected power value is too large, that is, when the reflected power value is greater than or equal to the first preset value, and control each discharge circuit 300 to be in the second connection state, thereby protecting the RF generating device PA.

[0055] In one or more embodiments, the first parameter P1 may also include one or more parameters such as voltage standing wave ratio, reflection coefficient, transmission power ratio, etc., and the first preset condition is the relationship between the corresponding parameter and the first preset value.

[0056] Please also read Figure 4 , Figure 4 FIG. 1 is a block diagram of a discharge circuit in an embodiment of the present application. Figure 3 , Figure 4As shown, each discharge circuit 300 includes a switch module 330, a first discharge module 340 and a second discharge module 350. The switch module 330 is connected between the voltage regulating module 120 and the energy storage module 130 or between the gating unit 200 and the output terminal Out. The switch module 330 is used to be in a first on state or a first off state to respectively turn on or off the connection path between the voltage regulating module 120 and the energy storage module 130, thereby correspondingly making the target electric energy DC2 continuously transmitted or stopped transmitted to the energy storage module 130; or, respectively, turning on or off the connection path between the gating unit 200 and the output terminal Out, thereby correspondingly making the target electric energy DC2 continuously transmitted or stopped transmitted to the radio frequency generating device PA. The first discharge module 340 is connected in parallel with the switch module 330 between the voltage regulating module 120 and the energy storage module 130 or between the selection unit 200 and the output terminal Out, and is connected to the ground GND. The first discharge module 340 is used to be in the second on state or the second off state, so as to discharge or stop the electric energy of the energy storage module 130; or, to discharge or stop the electric energy of the radio frequency generating device PA. The second discharge module 350 is connected between the connection point between the switch module 330 and the energy storage module 130 and the ground GND or between the connection point between the switch module 330 and the output terminal Out and the ground GND. The second discharge module 350 is used to be in the third on state or the third off state, so as to discharge or stop the electric energy of the energy storage module 130; or, to discharge or stop the electric energy of the radio frequency generating device PA. Among them, when the switch module 330 is in the first on state, the first discharge module 340 is in the second off state, and the second discharge module 350 is in the third off state, the corresponding discharge circuit 300 is in the first connection state; when the switch module 330 is in the first off state, the first discharge module 340 is in the second on state and / or the second discharge module 350 is in the third on state, the corresponding discharge circuit 300 is in the second connection state.

[0057] Thus, the above-mentioned RF driving device 10 of the present application sets the switch module 330 of each discharge circuit 300 in the first on state or the first off state to respectively turn on or off the connection path between the voltage regulating module 120 and the energy storage module 130 or between the gating unit 200 and the output terminal Out, thereby correspondingly realizing the continuous transmission or stop of the target electric energy DC2 to the energy storage module 130 or the RF generating device PA, and by setting the first discharge module 340 and the second discharge module 350, not only can the electric energy of the energy storage module 130 or the RF generating device PA be discharged or stopped, but also the first discharge module 340 and / or the second discharge module 350 can be selected according to actual needs to discharge the electric energy of the energy storage module 130 or the RF generating device PA, thereby better protecting the RF generating device PA.

[0058] In one or more embodiments, the second connection state includes a first discharge connection state, a second discharge connection state, and a third discharge connection state; when the first discharge module 340 is in the second conduction state and the second discharge module 350 is in the third conduction state, the corresponding discharge circuit 300 is in the first discharge connection state; when the first discharge module 340 is in the second conduction state and the second discharge module 350 is in the third disconnection state, the corresponding discharge circuit 300 is in the second discharge connection state; when the first discharge module 340 is in the second disconnection state and the second discharge module 350 is in the third conduction state, the corresponding discharge circuit 300 is in the third discharge connection state. Wherein, when any discharge circuit 300 is in the first discharge connection state, the second discharge connection state, and the third discharge connection state, the discharge speed of the electric energy of the energy storage module 130 or the radio frequency generating device PA is successively reduced.

[0059] Thus, the above-mentioned RF driving device 10 of the present application, by configuring the second connection state to include the first discharge connection state, the second discharge connection state and the third discharge connection state, and by configuring any discharge circuit 300 to sequentially reduce the discharge speed of the electric energy of the energy storage module 130 or the RF generating device PA when they are in the first discharge connection state, the second discharge connection state and the third discharge connection state respectively, when the RF generating device PA needs to be protected, each discharge circuit 300 can be in one of the first discharge connection state, the second discharge connection state and the third discharge connection state according to actual needs, thereby effectively preventing the RF generating device PA from being destroyed.

[0060] In one or more embodiments, the parameter acquisition unit 500 may also be connected to the energy storage module 130 or the voltage regulation module 120 to obtain the voltage value at the energy storage module 130 or the voltage regulation module 120. The control unit 400 is also used to receive the voltage value at the energy storage module 130 or the voltage regulation module 120, and when the driving regulation unit is in the second connection state, control each discharge circuit 300 to be in any one of the first discharge connection state, the second discharge connection state, and the third discharge connection state according to the voltage value at the energy storage module 130 or the voltage regulation module 120.

[0061] Further, the control unit 400 controls each discharge circuit 300 to be in any one of the first discharge connection state, the second discharge connection state and the third discharge connection state according to the relationship between the voltage value at the energy storage module 130 or the voltage value at the voltage regulation module 120 and the first voltage threshold, the second voltage threshold and the third voltage threshold, respectively. The first voltage threshold, the second voltage threshold and the third voltage threshold decrease in sequence.

[0062] Thus, the control unit 400 determines whether the RF generating device PA needs to be protected through the relationship between the reflected power value and the first preset value, and determines the required protection strength of the RF generating device PA through the relationship between the voltage value at the energy storage module 130 or the voltage value at the voltage regulation module 120 and the first voltage threshold, the second voltage threshold and the third voltage threshold, thereby effectively preventing the RF generating device PA from being destroyed.

[0063] Please also read Figure 5 , Figure 5 FIG. 1 is a circuit diagram of a discharge circuit in an embodiment of the present application. Figure 3 , Figure 5 As shown, the first discharge module 340 includes a first diode D1, a first inductor L1 and a first switch S1, the cathode of the first diode D1 is connected to the connection point between the voltage regulating module 120 or the gating unit 200 and the switch module 330, the anode of the first diode D1 is connected to one end of the first inductor L1, the other end of the first inductor L1 is connected to the connection point between the switch module 330 and the energy storage module 130 or the output terminal Out, one end of the first switch S1 is connected to the connection point between the anode of the first diode D1 and one end of the first inductor L1, and the other end of the first switch S1 is grounded GND. The first switch S1 is turned on or off to correspondingly make the first discharge module 340 in the second on state or the second off state.

[0064] Therefore, the above-mentioned RF driving device 10 in the present application, by providing the first discharge module 340 coordinated with the first diode D1, the first inductor L1 and the first switch S1, can utilize the unidirectional conduction characteristic of the first diode D1 when the first switch S1 is disconnected, so that the first inductor L1 is not charged and discharged, and can, when the first switch S1 is turned on, according to the voltage difference between the two ends of the first inductor L1, allow the electric energy of the energy storage module 130 or the RF generating device PA to enter the first inductor L1 through the other end of the first inductor L1, charge the first inductor L1, and continuously discharge the electric energy to the ground GND through the first switch S1.

[0065] like Figure 3 , Figure 5 As shown, the second discharge module 350 includes a first resistor R1 and a second switch S2, one end of the first resistor R1 is connected to the connection point between the switch module 330 and the energy storage module 130 or the output terminal Out, and the other end of the first resistor R1 is selectively grounded GND through the second switch S2. The second switch S2 is turned on or off to correspondingly make the second discharge module 350 in the third on state or the third off state.

[0066] It should be noted that the energy consumption rate of the first resistor R1 is lower than the energy discharge rate of the first inductor L1, so that the energy discharge rate of the second discharge module 350 is lower than the energy discharge rate of the first discharge module 340, and then when the first discharge module 340 is in the second conduction state and the second discharge module 350 is in the third conduction state, the driving adjustment unit can be in the first discharge connection state; when the first discharge module 340 is in the second conduction state and the second discharge module 350 is in the third disconnection state, the driving adjustment unit can be in the second discharge connection state; when the first discharge module 340 is in the second disconnection state and the second discharge module 350 is in the third conduction state, the driving adjustment unit can be in the third discharge connection state.

[0067] like Figure 3 , Figure 5 As shown, the switch module 330 includes a third switch S3, which is connected between the voltage regulating module 120 and the energy storage module 130 or between the gating module and the output terminal Out, and has a first on state and a first off state.

[0068] In one or more embodiments, the control unit 400 can control each discharge circuit 300 to be in the first connection state or the second connection state by respectively controlling the on or off state of the first switch S1, the second switch S2, and the third switch S3, that is, control each discharge circuit 300 to be in any one of the first connection state, the first discharge connection state, the second discharge connection state, and the third discharge connection state.

[0069] Please also read Figure 6 , Figure 6 FIG. 1 is a circuit diagram of a radio frequency driving unit in an embodiment of the present application. Figure 1 , Figure 6 As shown, the voltage regulating module 120 may include a fourth switch S4, a second diode D2 and a second inductor L2, the fourth switch S4 and the second inductor L2 are connected in sequence between the direct current power supply DC and the energy storage module 130, the cathode of the second diode D2 is connected to the connection point between the fourth switch S4 and the second inductor L2, and the anode of the second diode D2 is grounded GND.

[0070] like Figure 1 , Figure 6 As shown, the energy storage module 130 may include a first capacitor C1 , one end of the first capacitor C1 is connected to a connection point between the second inductor L2 and the gating unit 200 , and the other end of the second capacitor is grounded GND.

[0071] Therefore, the fourth switch S4 , the second diode D2 , the second inductor L2 and the first capacitor C1 of the voltage regulating module 120 form a buck circuit to adjust the voltage value of the input direct current power DC1 , thereby obtaining the target power DC2 .

[0072] In one or more embodiments, the voltage regulation module 120 may also be a voltage regulation circuit such as a boost circuit, a boost-buck circuit, etc.

[0073] In one or more embodiments, the control unit 400 may also be connected to the voltage regulating module 120. Specifically, the control unit 400 may adjust the voltage value of the input DC power DC1 by controlling the fourth switch S4 to be alternately turned on and off at a certain duty cycle, thereby obtaining the target power DC2.

[0074] See also Figure 7 , Figure 7 FIG. 1 is a block diagram of a radio frequency driving device in another embodiment of the present application. Figure 7 As shown, the gating unit 200 may include at least one fifth switch S5. The number of the fifth switches S5 may be N, and the N fifth switches S5 correspond to the N RF driving units 100 one by one. Each fifth switch S5 is connected between the corresponding RF driving unit 100 and the output terminal Out. The conduction or disconnection of each fifth switch S5 enables the gating unit 200 to selectively conduct the connection between one of the target RF driving units 110 and the output terminal Out. Figure 7 As shown, the fifth switch S5 corresponding to the target RF driving unit 110 is turned on, and the other N-1 fifth switches S5 are turned off, so that the target RF driving unit 110 is connected to the output terminal Out, and the other N-1 RF driving units 100 are disconnected from the output terminal Out.

[0075] In one or more embodiments, the number of the fifth switch S5 may also be one ( Figure 7 Not shown), that is, the gating unit 200 may also include only one fifth switch S5, and the fifth switch S5 may be a single-pole multi-throw switch, such as a single-pole N-throw switch, the fixed end of the fifth switch S5 is connected to the output end Out, and the fifth switch S5 also includes N free ends, the N free ends are respectively connected to the N RF driving units 100, and the movable end of the fifth switch S5 is selectively connected to the N free ends, and then selectively connected to the N RF driving units 100, so that the gating unit 200 selectively conducts the connection between one of the target RF driving units 110 and the output end Out. Wherein, when the movable end of the fifth switch S5 is suspended, the movable end of the fifth switch S5 is disconnected from the N RF driving units 100, so that the gating unit 200 disconnects all the N RF driving units 100 from the output end Out.

[0076] In one or more embodiments, the gating unit 200 includes Figure 7 In the structure shown, the control unit 400 can control each fifth switch S5 to be turned on or off so that the gating unit 200 selectively turns on the connection between one of the target RF driving units 110 and the output terminal Out. Alternatively, the control unit 400 can control all the fifth switches S5 to be turned off to disconnect all the N RF driving units 100 from the output terminal Out, so that the target electric energy DC2 generated by all the RF driving units 100 stops being output to the RF generating device PA through the output terminal Out.

[0077] In one or more embodiments, when the gating switch includes a single-pole N-throw switch, the control unit 400 can control the movable end to be connected to one of the free ends, so that the gating unit 200 selectively conducts the connection between one of the target RF driving units 110 and the output end Out. Alternatively, the control unit 400 can also control the movable end not to be connected to any free end, and disconnect the connection between all N RF driving units 100 and the output end Out, so that the target electric energy DC2 generated by all RF driving units 100 stops being output to the RF generating device PA through the output end Out.

[0078] In one or more embodiments, the control unit 400 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0079] The RF driving device 10 of the present application, through the above structure, can select at most one target electric energy DC2 to be output to the RF generating device PA according to the specific situation of the RF generating device PA, and cooperate with the use of a discharge circuit 300 with multiple discharge current connection states to quickly and effectively protect the RF generating device PA to prevent the RF generating device PA from being destroyed. It can also switch the target electric energy DC2 for output to meet the actual needs of the load.

[0080] See also Figure 8 , Figure 8FIG. 1 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application. Figure 8 As shown, the present application further provides a radio frequency power supply system 1000, which includes a direct current power supply DC, a radio frequency generating device PA, and the radio frequency driving device 10 in any of the aforementioned embodiments.

[0081] Please refer again Figure 1 .like Figure 1 As shown, the RF driving device 10 includes an input terminal In, an output terminal Out, N RF driving units 100 and a gating unit 200, wherein the N RF driving units 100 are connected in parallel between the input terminal In and the gating unit 200, and the gating unit 200 is connected between the N RF driving units 100 and the output terminal Out, wherein the input terminal In is used to connect to a DC power supply DC, and the output terminal Out is used to connect to a RF generating device PA; wherein, when the input terminal In and the output terminal Out of the RF driving device 10 are connected to the DC power supply DC and the RF generating device PA respectively, each RF driving unit 100 is used to receive the DC power DC1 output by the DC power supply DC through the input terminal In, and convert the DC power DC1 into the target power DC2. The gating unit 200 is used to selectively conduct the connection between one of the target RF driving units 110 and the output terminal Out, so that the target power DC2 generated by the target RF driving unit 110 is output to the RF generating device PA through the output terminal Out. Among them, the voltage values ​​of the target electric energy DC2 generated by the N RF driving units 100 are different from each other, and when the target electric energy DC2 of the target RF driving unit 110 is output to the RF generating device PA, the target electric energy DC2 of the other N-1 RF driving units 100 stops being output to the RF generating device PA, wherein N≥2.

[0082] The more specific structure of the RF driving device 10 can refer to the relevant content of the RF driving device 10 in any of the aforementioned embodiments, which will not be repeated here.

[0083] The RF driving device 10 and the RF power supply system 1000 of the present application, through the above-mentioned structure, can select at most one target electric energy DC2 to be output to the RF generating device PA according to the specific situation of the RF generating device PA, and cooperate with the use of a discharge circuit 300 with multiple discharge current connection states to quickly and effectively protect the RF generating device PA to prevent the RF generating device PA from being destroyed, and can also switch the target electric energy DC2 for output to meet the actual needs of the load.

[0084] In the multiple embodiments provided in the present application, it should be understood that the disclosed devices and equipment can be implemented in other ways. For example, the device embodiments described above are only schematic; for example, the division of units is only a logical function division, and there may be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0085] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0086] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may be physically included separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of hardware plus software functional units.

[0087] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A radio frequency driving device, characterized in that: The invention comprises an input end, an output end, N radio frequency driving units and a gating unit, wherein the N radio frequency driving units are connected in parallel between the input end and the gating unit, the gating unit is connected between the N radio frequency driving units and the output end, the input end is used to be connected to a direct current power source, and the output end is used to be connected to a radio frequency generating device; wherein, when the input end and the output end of the radio frequency driving device are respectively connected to the direct current power source and the radio frequency generating device, each radio frequency driving unit is used to receive the direct current power output by the direct current power source through the input end, and convert the direct current power into target power; The gating unit is used to selectively conduct the connection between one of the target RF driving units and the output end, so that the target electric energy generated by the target RF driving unit is output to the RF generating device through the output end; Among them, the voltage values ​​of the target electric energy generated by the N RF driving units are different from each other, and when the target electric energy of the target RF driving unit is output to the RF generating device, the target electric energy of the other N-1 RF driving units stops being output to the RF generating device, wherein N≥2.

2. The RF driving device according to claim 1, characterized in that: Each of the RF driving units comprises a voltage regulating module and an energy storage module, and the voltage regulating module and the energy storage module are sequentially connected between the input end and the gating unit; The voltage regulating module is used to receive and regulate the voltage value of the direct current electric energy to obtain the target electric energy, and the energy storage module is used to charge according to the target electric energy to store electric energy.

3. The RF driving device according to claim 2, characterized in that: The radio frequency driving device further comprises at least one discharge circuit; The at least one discharge circuit includes N first discharge circuits, the N first discharge circuits correspond to the N RF driving units one by one, and each first discharge circuit is connected between the voltage regulating module and the energy storage module of the corresponding RF driving unit, and is connected to the ground; and / or, the at least one discharge circuit includes a second discharge circuit, the second discharge circuit is connected between the gating unit and the output end, and is connected to the ground; Wherein, each discharge circuit has a first connection state and a second connection state, and each discharge circuit is used to enable the target electric energy to be continuously transmitted to the energy storage module or the radio frequency generating device when in the first connection state, and to stop transmitting the target electric energy to the energy storage module or the radio frequency generating device when in the second connection state, and to discharge the electric energy of the energy storage module or the radio frequency generating device to the ground accordingly.

4. The radio frequency driving device according to claim 3, characterized in that: The RF driving device also includes a control unit, which is connected to at least each of the discharge circuits and the gating unit respectively, and is used to control each of the discharge circuits to be in the first connection state or the second connection state, and control the gating unit to selectively conduct the connection between the target RF driving unit and the output end.

5. The radio frequency driving device according to claim 4, characterized in that: The RF driving device further comprises a parameter acquisition unit, and the parameter acquisition unit is used to connect with the RF generating device to acquire a first parameter of the RF generating device; The control unit is also connected to the parameter acquisition unit, and the control unit is further used to receive the first parameter, and when the first parameter does not meet the first preset condition, control the gating unit to conduct the connection between the target RF driving unit and the output end according to the first parameter, so that the target electric energy generated by the target RF driving unit is output to the RF generating device, and when the first parameter meets the first preset condition, control the gating unit to disconnect the connection between any RF driving unit and the output end, so that the target electric energy generated by any RF driving unit stops being output to the RF generating device.

6. The radio frequency driving device according to claim 5, characterized in that: The control unit is further configured to control each of the discharge circuits to be in the first connection state when the first parameter does not satisfy the first preset condition, so that the target electric energy is continuously transmitted to the energy storage module or the radio frequency generating device, and to control each of the discharge circuits to be in the second connection state when the first parameter satisfies the first preset condition, so that the target electric energy stops being transmitted to the energy storage module or the radio frequency generating device, and discharges the electric energy of each energy storage module and / or the radio frequency generating device to ground accordingly.

7. The radio frequency driving device according to claim 6, characterized in that: The first parameter includes a reflected power value, and the first preset condition is that the reflected power value is greater than or equal to a first preset value.

8. The radio frequency driving device according to claim 3, characterized in that: Each of the discharge circuits comprises a switch module, a first discharge module and a second discharge module; The switch module is connected between the voltage regulating module and the energy storage module or between the gating unit and the output end, and the switch module is used to be in a first on state or a first off state, so as to respectively turn on or off the connection path between the voltage regulating module and the energy storage module, thereby correspondingly making the target electric energy continuously transmitted or stopped transmitted to the energy storage module; or respectively turn on or off the connection path between the gating unit and the output end, thereby correspondingly making the target electric energy continuously transmitted or stopped transmitted to the radio frequency generating device; The first discharge module and the switch module are connected in parallel between the voltage regulating module and the energy storage module or between the gating unit and the output end, and are connected to the ground. The first discharge module is used to be in a second on state or a second off state to discharge or stop discharging the electric energy of the energy storage module; or to discharge or stop discharging the electric energy of the radio frequency generating device; The second discharge module is connected between the connection point between the switch module and the energy storage module and the ground or between the connection point between the switch module and the output end and the ground, and the second discharge module is used to be in a third on state or a third off state to discharge or stop discharging the electric energy of the energy storage module; or, to discharge or stop discharging the electric energy of the radio frequency generating device; Wherein, when the switch module is in the first on-state, the first discharge module is in the second off-state, and the second discharge module is in the third off-state, the corresponding discharge circuit is in the first connection state; when the switch module is in the first off-state, the first discharge module is in the second on-state and / or the second discharge module is in the third on-state, the corresponding discharge circuit is in the second connection state.

9. The radio frequency driving device according to claim 8, characterized in that: The second connection state includes a first discharge connection state, a second discharge connection state and a third discharge connection state; when the first discharge module is in the second conduction state and the second discharge module is in the third conduction state, the corresponding discharge circuit is in the first discharge connection state; when the first discharge module is in the second conduction state and the second discharge module is in the third disconnection state, the corresponding discharge circuit is in the second discharge connection state; when the first discharge module is in the second disconnection state and the second discharge module is in the third conduction state, the corresponding discharge circuit is in the third discharge connection state; Wherein, when any discharge circuit is in the first discharge connection state, the second discharge connection state and the third discharge connection state respectively, the discharge speed of the electric energy of the energy storage module or the radio frequency generating device is reduced successively.

10. A radio frequency power supply system, characterized in that: It comprises a direct current power supply, a radio frequency generating device and a radio frequency driving device as described in any one of claims 1 to 9.

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