Radio frequency driving device and radio frequency power supply system

Abstract

The invention provides a radio frequency driving device and a radio frequency power supply system. The radio frequency driving device comprises an input end, an output end and N radio frequency driving circuits, the N radio frequency driving circuits are connected between the input end and the output end, the input end and the output end are used for being connected with a direct-current power source and the radio frequency generating device respectively, and each radio frequency driving circuit has a driving state and a driving stopping state. And each radio frequency driving circuit is used for converting the direct current electric energy into target electric energy in a driving state and stopping receiving the direct current electric energy output by the direct current power supply in a driving stopping state. The driving output ends of the N radio frequency driving circuits are connected in sequence and are connected with the output end through the driving output end of the radio frequency driving circuit located at the tail end to form an output path, so that target electric energy output by the radio frequency driving circuit in a driving state is transmitted to the output end through the output path; and the signal is output to the radio frequency generation device through the output end. According to the invention, the radio frequency generation device can be protected.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a radio frequency driving device and a radio frequency power supply system. Background Art

[0002] At present, with the rapid development of radio frequency (RF) technology, RF power systems are increasingly commonly used in high-power scenarios to provide the load with the required RF power. Among them, RF generators are often used to generate RF power and transmit it to the load. However, RF generators are easily affected by reflected power, and large reflected power can destroy RF generators in a short time. Therefore, how to protect RF generators has become a problem that needs to be considered. Summary of the invention

[0003] The present application provides a radio frequency driving device and a radio frequency power supply system, which can quickly and effectively protect a radio frequency generating device to prevent the radio frequency generating device from being destroyed.

[0004] In the first aspect, a radio frequency driving device is provided, the radio frequency driving device comprises an input end, an output end and N radio frequency driving circuits, the N radio frequency driving circuits are connected between the input end and the output end, the input end and the output end are used to connect a DC power supply and a radio frequency generating device respectively, wherein each radio frequency driving circuit has a driving state and a stop driving state, and each radio frequency driving circuit is used to receive the DC power output by the DC power supply through the input end when in the driving state, and convert the DC power into target power, and stop receiving the DC power output by the DC power supply when in the stop driving state. The voltage values ​​of the target power obtained by the N radio frequency driving circuits are different from each other, and the driving output ends of the N radio frequency driving circuits are connected in sequence and connected to the output end through the driving output end of the radio frequency driving circuit at the end to form an output path, so that the target power output by the radio frequency driving circuit in the driving state is transmitted to the output end through the output path, and output to the radio frequency generating device through the output end, wherein N≥2.

[0005] In a possible implementation, the output end includes a positive output end and a negative output end, the driving output end of each RF driving circuit includes a positive driving output end and a negative driving output end, and the positive driving output end and the negative driving output end of the N RF driving circuits are alternately connected and connected between the positive output end and the negative output end.

[0006] In a possible implementation, each of the RF driving circuits includes an inverter unit, a coupling unit, and a rectifier unit, and the inverter unit, the coupling unit, and the rectifier unit are sequentially connected between the input terminal and the positive output terminal. The inverter unit is used to receive the DC power when in the driving state, and invert the DC power into AC power, and stop receiving the DC power when in the stop driving state. The coupling unit is used to receive the AC power and couple the AC power to the rectifier unit. The rectifier unit is used to rectify the AC power coupled by the coupling unit into the target DC power. Each rectifier unit has the positive driving output terminal and the negative driving output terminal, and the positive driving output terminals and negative driving output terminals of N rectifier units are alternately connected.

[0007] In a possible implementation, the inverter unit includes an inverter bridge, and when the inverter bridge is alternately turned on or off with a certain on-duty ratio, the inverter unit is in the driving state, and when the inverter bridge remains off, the inverter unit is in the stop driving state. The coupling unit includes a transformer, and the rectifier unit includes a rectifier bridge, the primary winding of the transformer is connected to the inverter bridge, the secondary winding of the transformer is connected to the rectifier bridge, and the primary winding and the secondary winding of the transformer are coupled to couple the AC power on one side of the first winding of the transformer to one side of the secondary winding of the transformer, and transmit the coupled AC power to the rectifier bridge.

[0008] In a possible implementation, the RF driving device further includes a control unit, the control unit is connected to each RF driving circuit, and the control unit is used to control each RF driving circuit to be in the driving state or the driving stop state.

[0009] In a possible implementation, the RF driving device further includes a discharge circuit, which is connected between the driving output terminal of the RF driving circuit located at the end and the output terminal, and is connected to the ground. The discharge circuit is used to continuously transmit the target electric energy output by the RF driving circuit in the driving state to the RF generating device when in the first connection state, and to stop transmitting the target electric energy output by the RF driving circuit in the driving state to the RF generating device when in the second connection state, and discharge the electric energy of the RF generating device to the ground.

[0010] In a possible implementation manner, the RF driving device further includes a parameter acquisition unit, and the parameter acquisition unit is used to connect to the RF generating device to acquire a first parameter of the RF generating device. The control unit is also connected to the parameter acquisition unit and the discharge circuit, and the control unit is used to receive the first parameter, and when the first parameter does not meet the first preset condition, control the discharge circuit to be in the first connection state, and when the first parameter meets the first preset condition, control the discharge circuit to be in the second connection state.

[0011] In a possible implementation, the discharge circuit includes a switch module, a first discharge module, and a second discharge module. The switch module is connected between the driving output terminal of the RF drive circuit located at the end and the output terminal, and the switch module is used to be in a first on state or a first off state to respectively conduct or disconnect the connection path between the driving output terminal of the RF drive circuit located at the end and the output terminal, so as to correspondingly make the target electric energy output by the RF drive circuit in the driving state continuously transmitted or stopped transmitted to the RF generating device. The first discharge module and the switch module are connected in parallel between the driving output terminal of the RF drive circuit located at the end and the output terminal, and the first discharge module is used to be in a second on state or a second off state to correspondingly discharge or stop discharging the electric energy of the RF generating device. The second discharge module is connected between the connection point between the switch module and the output terminal and the ground, and the second discharge module is used to be in a third on state or a third off state to correspondingly discharge or stop discharging the electric energy of the RF generating device. Wherein, when the switch module is in the first on-state, the first discharge module is in the second off-state, and the second discharge module is in the third off-state, the discharge circuit is in the first connection state; when the switch module is in the first off-state, the first discharge module is in the second on-state and / or the second discharge module is in the third on-state, the discharge circuit is in the second connection state.

[0012] In a possible implementation, the voltage values ​​of the target electric energy obtained by the N RF drive circuits decrease successively, and the voltage value of the target electric energy obtained by the N-1th RF drive circuit is 1 / 2 of the voltage value of the target electric energy obtained by the Nth RF drive circuit.

[0013] In the second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system includes a direct current power supply, a radio frequency generating device and a radio frequency driving device. The radio frequency driving device includes an input end, an output end and N radio frequency driving circuits, the N radio frequency driving circuits are connected between the input end and the output end, the input end and the output end are used to connect the direct current power supply and the radio frequency generating device respectively, wherein each radio frequency driving circuit has a driving state and a stop driving state, and each radio frequency driving circuit is used to receive the direct current power output by the direct current power supply through the input end when in the driving state, and convert the direct current power into target power, and stop receiving the direct current power output by the direct current power supply when in the stop driving state. The voltage values ​​of the target power obtained by the N radio frequency driving circuits are different from each other, and the driving output ends of the N radio frequency driving circuits are connected in sequence and connected to the output end through the driving output end of the radio frequency driving circuit at the end to form an output path, so that the target power output by the radio frequency driving circuit in the driving state is transmitted to the output end through the output path, and output to the radio frequency generating device through the output end, wherein N≥2.

[0014] The RF driving device and RF power supply system of the present application are configured such that each RF driving circuit connected between a DC power supply and a RF generating device has a driving state and a stop driving state, and converts DC power into target power and outputs it to the RF generating device, so as to realize driving of the RF generating device, and then configured to receive the DC power output by the DC power supply through the input end when in the driving state, and convert the DC power into target power, and stop receiving the DC power output by the DC power supply when in the stop driving state, and to form an output path by configuring the driving output ends of N RF driving circuits to be connected in sequence and connected to the output end through the driving output end of the RF driving circuit at the end, so that the target power output by the RF driving circuit in the driving state is transmitted to the RF generating device through the output path, so that when the RF generating device does not need protection, one or more target power with higher voltage values ​​can be output to the RF generating device to generate RF power, and when the RF generating device needs protection, one or more target power with lower voltage values ​​can be output to the RF generating device, or even no target power can be output to the RF generating device, so as to quickly reduce the reflected power, quickly and effectively protect the RF generating device, and avoid the RF generating device from being destroyed. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1Schematic diagram of a block diagram of a radio frequency driving device in an embodiment of the present application.

[0017] Figure 2 FIG. 4 is a block diagram of a radio frequency driving device in another embodiment of the present application.

[0018] Figure 3 FIG. 4 is a circuit diagram of a radio frequency driving device in an embodiment of the present application.

[0019] Figure 4 Schematic diagram of a block diagram of a discharge circuit in an embodiment of the present application.

[0020] Figure 5 FIG. 4 is a circuit diagram of a discharge circuit in an embodiment of the present application.

[0021] Figure 6 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application.

[0022] Description of the accompanying drawings: 1000, RF power supply system, DC, direct current power supply, DC1, direct current power, PA, RF generating device, 10, RF driving device, In, input terminal, In+, positive input terminal, In-, negative input terminal, Out, output terminal, Out+, positive output terminal, Out-, negative output terminal, 100, RF driving circuit, Id+, positive driving input terminal, Id-, negative driving input terminal, Od, driving output terminal, Od+, positive driving output terminal, Od-, negative driving output terminal, D C2, target electric energy, 110, inverter unit, 111, inverter bridge, 120, coupling unit, 121, transformer, 130, rectifier unit, 131, rectifier bridge, 200, control unit, 300, discharge circuit, 310, switch module, S3, third switch, 320, first discharge module, D1, first diode, L1, first inductor, S1, first switch, 330, second discharge module, R1, first resistor, S2, second switch, 400, parameter acquisition unit, P1, first parameter, GND, ground. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0024] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0025] In the following, the terms "first", "second", "third", and "fourth" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", "third", and "fourth" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more.

[0026] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0027] See also Figure 1 , Figure 1 FIG. 1 is a block diagram of a radio frequency driving device in an embodiment of the present application. Figure 1 As shown, the present application provides a radio frequency driving device 10, which includes an input terminal In, an output terminal Out and N radio frequency driving circuits 100, wherein the N radio frequency driving circuits 100 are connected between the input terminal In and the output terminal Out, and the input terminal In and the output terminal Out are used to connect a direct current power supply DC and a radio frequency generating device PA, respectively, wherein each radio frequency driving circuit 100 has a driving state and a stop driving state, and each radio frequency driving circuit 100 is used to receive direct current power DC1 output by the direct current power supply DC through the input terminal In when in the driving state, and convert the direct current power DC1 into target power DC2, and stop receiving the direct current power DC1 output by the direct current power supply DC when in the stop driving state. Among them, the voltage values ​​of the target electric energy DC2 obtained by the N RF driving circuits 100 are different from each other, and the driving output terminals Od of the N RF driving circuits 100 are connected in sequence and connected to the output terminal Out through the driving output terminal Od of the RF driving circuit 100 located at the end to form an output path, so that the target electric energy DC2 output by the RF driving circuit 100 in the driving state is transmitted to the output terminal Out through the output path, and output to the RF generating device PA through the output terminal Out, wherein N≥2.

[0028] In one or more embodiments, when there is only one RF driving circuit 100 in the driving state, the target electric energy DC2 output by the RF driving circuit 100 is transmitted to the output terminal Out through the output path. At this time, the electric energy output to the RF generating device PA is the target electric energy DC2 output by the one RF driving circuit 100.

[0029] In one or more embodiments, when two or more RF driving circuits 100 are in a driving state, the target electric energy DC2 output by the two or more RF driving circuits 100 in the driving state are transmitted to the RF generating device PA through the output path. At this time, the electric energy output to the RF generating device PA is the sum of the target electric energy DC2 output by the two or more RF driving circuits 100.

[0030] Thus, the RF driving device 10 in the present application is configured to receive the DC power DC1 output by the DC power supply DC through the input terminal In when in the driving state, and convert the DC power DC1 into the target power DC2, and stop receiving the DC power DC1 output by the DC power supply DC when in the stop driving state, and to set the driving output terminals Od of N RF driving circuits 100 to be connected in sequence and connected through the RF driving circuit 10 at the end. The driving output terminal Od of 0 is connected to the output terminal Out to form an output path, so that the target electric energy DC2 output by the RF driving circuit 100 in the driving state is transmitted to the RF generating device PA through the output path, so that when the RF generating device PA does not need protection, one or more target electric energies DC2 with higher voltage values ​​can be output to the RF generating device PA to generate RF electric energy, and when the RF generating device PA needs protection, one or more target electric energies DC2 with lower voltage values ​​can be output to the RF generating device PA, or even no target electric energy DC2 can be output to the RF generating device PA, so as to quickly reduce the reflected power, quickly and effectively protect the RF generating device PA, and avoid the RF generating device PA from being destroyed.

[0031] Specifically, the magnitude of the reflected power is related to the voltage value of the RF power generated by the RF generator PA, and in the high-power scenario, the voltage value of the RF power is very high, and the corresponding sum of the voltage values ​​of one or more target power DC2 output to the RF generator PA also needs to be very high. Therefore, the reflected power generated when the impedance is not matched is very large, and the RF generator PA will be destroyed in a very short time. Therefore, through the above structure, the present application can freely select one or more RF drive circuits 100 to be in the driving state, and due to the existence of the output path, the one or more RF drive circuits 100 in the driving state can output through the output path, so that different or different numbers of RF drive circuits 100 can be selected to be in the driving state as needed, and the voltage value output to the RF generator PA can be increased or decreased. When protection is required, fewer RF drive circuits 100 or RF drive circuits 100 with low output voltage can be selected to be in the driving state, and the sum of the voltage values ​​of one or more target power DC2 output to the RF generator PA can be quickly reduced, which also quickly reduces the reflected power, and can effectively prevent the RF generator PA from being destroyed.

[0032] In one or more embodiments, the DC power supply DC may include a DC source that outputs DC power DC1, and may also include an AC source that outputs AC power and a rectifier device, wherein the rectifier device is used to rectify the AC power into DC power DC1, so that the DC power supply DC outputs DC power DC1.

[0033] In one or more embodiments, each RF driving circuit 100 can convert DC power DC1 into DC target power DC2 or convert DC power DC1 into AC target power DC2 according to the needs of the RF generating device PA to drive the RF generating device PA.

[0034] In one or more embodiments, the RF generating device PA can be used to generate RF power according to one or more target power DC2 and transmit the RF power to the load. The RF generating device PA can include a RF power amplifier.

[0035] In one or more embodiments, the voltage value of the target electric energy DC2 generated by at least one RF driving circuit 100 is smaller than the second preset value, thereby ensuring that the RF generating device PA is not destroyed.

[0036] In one or more embodiments, the driving input terminals (not shown in the figure) of the N RF driving circuits 100 are all connected to the input terminal In.

[0037] Please also read Figure 2 , Figure 2 FIG. 1 is a block diagram of a radio frequency driving device in another embodiment of the present application. Figure 1 , Figure 2 As shown, the output terminal Out includes a positive output terminal Out+ and a negative output terminal Out-, and the driving output terminal Od of each RF driving circuit 100 includes a positive driving output terminal Od+ and a negative driving output terminal Od-, and the positive driving output terminals Od+ and the negative driving output terminals Od- of the N RF driving circuits 100 are alternately connected and connected between the positive output terminal Out+ and the negative output terminal Out-.

[0038] Thus, in the above-mentioned RF driving device 10 in the present application, the positive driving output terminal Od+ or the negative driving output terminal Od- of each RF driving circuit 100 is connected to the negative driving output terminal Od- or the positive driving output terminal Od+ of the adjacent RF driving circuit 100, so that the driving output terminals Od of N RF driving circuits 100 are connected in sequence and connected to the output terminal Out through the driving output terminal Od of the RF driving circuit 100 located at the end to form an output path.

[0039] like Figure 1 , Figure 2 As shown, each RF driving circuit 100 includes an inverter unit 110, a coupling unit 120 and a rectifier unit 130, and the inverter unit 110, the coupling unit 120 and the rectifier unit 130 are sequentially connected between the input terminal In and the positive output terminal Out+. The inverter unit 110 is used to receive direct current power DC1 when in a driving state, and invert the direct current power DC1 into alternating current power, and stop receiving direct current power DC1 when in a stop driving state. The coupling unit 120 is used to receive alternating current power and couple the alternating current power to the rectifier unit 130. The rectifier unit 130 is used to rectify the alternating current power coupled by the coupling unit 120 into a direct current target power DC2. Among them, each rectifier unit 130 has a positive driving output terminal Od+ and a negative driving output terminal Od-, and the positive driving output terminals Od+ and negative driving output terminals Od- of N rectifier units 130 are alternately connected.

[0040] Therefore, the above-mentioned RF driving device 10 in the present application, by setting each RF driving circuit 100 to include an inverter unit 110, a coupling unit 120 and a rectifier unit 130 to cooperate with each other, so as to realize that the target electric energy DC2 output by the RF driving circuit 100 in the driving state is transmitted to the output terminal Out through the output path, and outputted to the RF generating device PA through the output terminal Out.

[0041] Please also read Figure 3 , Figure 3 FIG. 1 is a circuit diagram of a radio frequency driving device in an embodiment of the present application. Figure 1 , Figure 2 , Figure 3As shown, the inverter unit 110 includes an inverter bridge 111. When the inverter bridge 111 is alternately turned on or off at a certain conduction duty cycle, the inverter unit 110 is in a driving state, and when the inverter bridge 111 remains off, the inverter unit 110 is in a stop driving state. The coupling unit 120 includes a transformer 121, and the rectifier unit 130 includes a rectifier bridge 131. The primary winding of the transformer 121 is connected to the inverter bridge 111, and the secondary winding of the transformer 121 is connected to the rectifier bridge 131. The primary winding and the secondary winding of the transformer 121 are coupled to couple the AC power on one side of the first winding of the transformer 121 to one side of the secondary winding of the transformer 121, and transmit the coupled AC power to the rectifier bridge 131.

[0042] In one or more embodiments, the inverter bridge 111 may be an inverter full bridge or an inverter half bridge, but the present application is not limited thereto, as long as it includes at least one switch that can be turned on or off.

[0043] like Figure 3 As shown, the driving input terminal (not shown in the figure) of each RF driving circuit 100 may include a positive driving input terminal Id+ and a negative driving input terminal Id-.

[0044] like Figure 3 As shown, the input terminal In includes a positive input terminal In+ and a negative input terminal In-, each inverter bridge 111 has a positive driving input terminal Id+ and a negative driving input terminal Id-, the positive driving input terminal Id+ of each inverter bridge 111 is connected to the positive input terminal In+, and the negative driving input terminal Id- of each inverter bridge 111 is grounded GND.

[0045] In one or more embodiments, the rectifier bridge 131 can be a half-wave rectifier bridge or a full-wave rectifier bridge. The present application is not limited thereto. As long as it includes at least one diode that can rectify the coupled AC power into the target DC power DC2, it will suffice.

[0046] like Figure 3 As shown, each rectifier bridge 131 has a positive drive output terminal Od+ and a negative drive output terminal Od-, and the positive drive output terminals Od+ and negative drive output terminals Od- of the N rectifier bridges 131 are alternately connected, the positive drive output terminal Od+ of the rectifier bridge 131 at the end is connected to the positive output terminal Out+, and the negative drive output terminal Od- of the rectifier bridge 131 at the head end can be grounded GND through the negative output terminal Out-.

[0047] In one or more embodiments, each inverter bridge 111 may include two groups of switches, each group of switches includes two switches connected in series, and the two groups of switches are connected in parallel between a connection point between the positive drive input terminal Id+ and one end of the primary winding of the transformer 121 and a connection point between the negative drive input terminal Id- and the other end of the primary winding of the transformer 121, and a connection point between the two switches of one group of switches is connected to a connection point between the two switches of the other group of switches to form an inverter full bridge.

[0048] In one or more embodiments, each rectifier bridge 131 may include two diodes, wherein the cathode of one diode is connected to one end of the secondary winding of the transformer 121, the anode of one diode is connected to the positive drive output terminal Od+, the other end of the secondary winding of the transformer 121 is connected to the negative drive output terminal Od-, the cathode of the other diode is connected to the connection point between the cathode of one diode and one end of the secondary winding of the transformer 121, and the anode of the other diode is connected to the connection point between the other end of the secondary winding of the transformer 121 and the negative drive output terminal Od-, so as to form a full-wave rectifier bridge.

[0049] In one or more embodiments, each RF driving circuit 100 may further include an energy storage capacitor connected between the positive driving output terminal Od+ and the negative driving output terminal Od− of the corresponding rectifier bridge 131 .

[0050] Please refer again Figure 2 .like Figure 1 , Figure 2 As shown, the RF driving device 10 further includes a control unit 200, which is connected to each RF driving circuit 100, and is used to control each RF driving circuit 100 to be in a driving state or a driving stop state.

[0051] Therefore, the RF driving device 10 in the present application is provided with a control unit 200 to control each RF driving circuit 100 .

[0052] Furthermore, the control unit 200 can control each RF driving circuit 100 to be in a driving state or a stopped driving state by controlling the inverter bridge 111 of each RF driving circuit 100 to be turned on or off with a certain duty cycle, or to be continuously turned off.

[0053] like Figure 1 , Figure 2As shown, the RF driving device 10 further includes a discharge circuit 300, which is connected between the driving output terminal Od and the output terminal Out of the RF driving circuit 100 located at the end, and is connected to the ground GND. The discharge circuit 300 is used to enable the target electric energy DC2 output by the RF driving circuit 100 in the driving state to be continuously transmitted to the RF generating device PA through the driving output terminal Od of the RF driving circuit 100 located at the end when in the first connection state, and to enable the target electric energy DC2 output by the RF driving circuit 100 in the driving state to stop being transmitted to the RF generating device PA when in the second connection state, and to discharge the electric energy of the RF generating device PA to the ground GND.

[0054] Therefore, the RF driving device 10 in the present application can discharge the electric energy of the RF generating device PA to the ground GND when needed by providing a discharge circuit 300 connected to a corresponding position.

[0055] like Figure 1 , Figure 2 As shown, the RF driving device 10 further includes a parameter acquisition unit 400, which is used to connect to the RF generating device PA to obtain a first parameter P1 of the RF generating device PA. The control unit 200 is also connected to the parameter acquisition unit 400 and the discharge circuit 300, and the control unit 200 is used to receive the first parameter P1, and when the first parameter P1 does not meet the first preset condition, control the discharge circuit 300 to be in the first connection state, and when the first parameter P1 meets the first preset condition, control the discharge circuit 300 to be in the second connection state.

[0056] Thus, the above-mentioned RF driving device 10 in the present application can enable the control unit 200 to control the connection state of the discharge circuit 300 according to the first parameter P1 by setting the parameter acquisition unit 400 to acquire the first parameter P1 of the RF generating device PA, and is specifically configured to control the discharge circuit 300 to be in the first connection state when the first parameter P1 does not meet the first preset condition, and to control the discharge circuit 300 to be in the second connection state when the first parameter P1 meets the first preset condition.

[0057] Please also read Figure 4 , Figure 4 FIG. 1 is a block diagram of a discharge circuit in an embodiment of the present application. Figure 1 , Figure 2 , Figure 4As shown, the discharge circuit 300 includes a switch module 310, a first discharge module 320 and a second discharge module 330. The switch module 310 is connected between the driving output terminal Id and the output terminal Out of the RF driving circuit 100 at the end. The switch module 310 is used to be in a first on state or a first off state to respectively conduct or disconnect the connection path between the driving output terminal Id and the output terminal Out of the RF driving circuit 100 at the end, so as to correspondingly make the target electric energy DC2 output by the RF driving circuit 100 in the driving state continuously transmitted or stopped transmitted to the RF generating device PA through the driving output terminal Id of the RF driving circuit 100 at the end. The first discharge module 320 is connected in parallel with the switch module 310 between the driving output terminal Id and the output terminal Out of the RF driving circuit 100 at the end. The first discharge module 320 is used to be in a second on state or a second off state to correspondingly discharge or stop discharging the electric energy of the RF generating device PA. The second discharge module 330 is connected between the connection point between the switch module 310 and the output terminal Out and the ground GND. The second discharge module 330 is used to be in the third on state or the third off state to discharge or stop discharging the electric energy of the radio frequency generating device PA. When the switch module 310 is in the first on state, the first discharge module 320 is in the second off state, and the second discharge module 330 is in the third off state, the discharge circuit 300 is in the first connection state; when the switch module 310 is in the first off state, the first discharge module 320 is in the second on state and / or the second discharge module 330 is in the third on state, the discharge circuit 300 is in the second connection state.

[0058] Specifically, Figure 2 As shown, the driving output terminal Id of the RF driving circuit 100 located at the end is the positive driving output terminal Id+ of the RF driving circuit 100 located at the end, and the output terminal Out can be the positive output terminal Out+.

[0059] In one or more embodiments, the first parameter P1 includes a reflection power value, and the first preset condition is that the reflection power value is greater than or equal to the first preset value.

[0060] Therefore, the above-mentioned RF driving device 10 in the present application, by configuring the first parameter P1 to include a reflected power value, the first preset condition is that the reflected power value is greater than or equal to the first preset value, so that the control unit 200 can control the discharge circuit 300 to be in the second connection state when the reflected power value is too large, that is, when the reflected power value is greater than or equal to the first preset value, thereby protecting the RF generating device PA.

[0061] In one or more embodiments, the first parameter P1 may also include one or more parameters such as voltage standing wave ratio, reflection coefficient, transmission power ratio, etc., and the first preset condition is the relationship between the corresponding parameter and the first preset value.

[0062] In one or more embodiments, the second connection state includes a first discharge connection state, a second discharge connection state, and a third discharge connection state. When the first discharge module 320 is in the second conduction state and the second discharge module 330 is in the third conduction state, the discharge circuit 300 is in the first discharge connection state; when the first discharge module 320 is in the second conduction state and the second discharge module 330 is in the third disconnection state, the discharge circuit 300 is in the second discharge connection state; when the first discharge module 320 is in the second disconnection state and the second discharge module 330 is in the third conduction state, the discharge circuit 300 is in the third discharge connection state. Wherein, the discharge speed of the discharge circuit 300 to the electric energy of the radio frequency generating device PA is reduced in sequence when it is in the first discharge connection state, the second discharge connection state, and the third discharge connection state respectively.

[0063] In one or more embodiments, the parameter acquisition unit 400 may also be connected to the output terminal Out to obtain the voltage value at the output terminal Out. The control unit 200 is also used to receive the voltage value at the output terminal Out, and when the discharge circuit 300 is in the second connection state, the discharge circuit 300 is also controlled to be in any one of the first discharge connection state, the second discharge connection state, and the third discharge connection state according to the voltage value at the output terminal Out.

[0064] Specifically, Figure 2 As shown, the parameter acquisition unit 400 may also be connected to the positive output terminal Out+ of the output terminal Out.

[0065] Further, the control unit 200 controls the discharge circuit 300 to be in any one of the first discharge connection state, the second discharge connection state and the third discharge connection state according to the relationship between the voltage value at the output terminal Out and the first voltage threshold, the second voltage threshold and the third voltage threshold, respectively. The first voltage threshold, the second voltage threshold and the third voltage threshold decrease in sequence.

[0066] Therefore, in the above-mentioned RF driving device 10 in the present application, the control unit 200 determines whether the RF generating device PA needs to be protected through the relationship between the reflected power value and the first preset value, and determines the protection strength required by the RF generating device PA through the relationship between the voltage value at the output terminal Out and the first voltage threshold, the second voltage threshold and the third voltage threshold, thereby effectively preventing the RF generating device PA from being destroyed.

[0067] Please also read Figure 5, Figure 5 FIG. 1 is a circuit diagram of a discharge circuit in an embodiment of the present application. Figure 2 , Figure 5 As shown, the first discharge module 320 includes a first diode D1, a first inductor L1 and a first switch S1, the cathode of the first diode D1 is connected to the connection point between the driving output terminal Id of the RF driving circuit 100 located at the end and the switch module 310, the anode of the first diode D1 is connected to one end of the first inductor L1, the other end of the first inductor L1 is connected to the connection point between the switch module 310 and the output terminal Out, one end of the first switch S1 is connected to the connection point between the anode of the first diode D1 and one end of the first inductor L1, and the other end of the first switch S1 is grounded GND. The first switch S1 is turned on or off to correspondingly make the first discharge module 320 in the second on state or the second off state.

[0068] Therefore, the above-mentioned RF driving device 10 in the present application, by providing the first discharge module 320 coordinated with the first diode D1, the first inductor L1 and the first switch S1, can utilize the unidirectional conduction characteristic of the first diode D1 when the first switch S1 is disconnected, so that the first inductor L1 is not charged and discharged, and can, when the first switch S1 is turned on, according to the voltage difference between the two ends of the first inductor L1, allow the electric energy of the RF generating device PA to enter the first inductor L1 through the other end of the first inductor L1, charge the first inductor L1, and continuously discharge the electric energy to the ground GND through the first switch S1.

[0069] like Figure 2 , Figure 5 As shown, the second discharge module 330 includes a first resistor R1 and a second switch S2, one end of the first resistor R1 is connected to the connection point between the switch module 310 and the output terminal Out, and the other end of the first resistor R1 can be selectively grounded GND through the second switch S2. The second switch S2 is turned on or off to correspondingly make the second discharge module 330 in the third on state or the third off state.

[0070] Therefore, the above-mentioned RF driving device 10 in the present application, by providing the second discharge module 330 coordinated with the first resistor R1 and the second switch S2, can make the first resistor R1 not consume electric energy when the second switch S2 is disconnected, and can make the first resistor R1 consume electric energy when the second switch S2 is turned on, and continuously discharge the electric energy to the ground GND through the second switch S2.

[0071] It should be noted that the energy consumption rate of the first resistor R1 is lower than the energy discharge rate of the first inductor L1, so that the energy discharge rate of the second discharge module 330 is lower than the energy discharge rate of the first discharge module 320, and then when the first discharge module 320 is in the second conduction state and the second discharge module 330 is in the third conduction state, the discharge circuit 300 can be in the first discharge connection state; when the first discharge module 320 is in the second conduction state and the second discharge module 330 is in the third disconnection state, the discharge circuit 300 can be in the second discharge connection state; when the first discharge module 320 is in the second disconnection state and the second discharge module 330 is in the third conduction state, the discharge circuit 300 can be in the third discharge connection state.

[0072] like Figure 2 , Figure 5 As shown, the switch module 310 includes a third switch S3, which is connected between the driving output terminal Id and the output terminal Out of the RF driving circuit 100 at the end, and has a first on state and a first off state.

[0073] Similarly, if Figure 2 As shown, the driving output terminal Id of the RF driving circuit 100 located at the end is the positive driving output terminal Id+ of the RF driving circuit 100 located at the end, and the output terminal Out can be the positive output terminal Out+.

[0074] In one or more embodiments, the control unit 200 can control the discharge circuit 300 to be in the first connection state or the second connection state by respectively controlling the on or off state of the first switch S1, the second switch S2, and the third switch S3, that is, controlling the discharge circuit 300 to be in any one of the first connection state, the first discharge connection state, the second discharge connection state, and the third discharge connection state.

[0075] In one or more embodiments, the control unit 200 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0076] In one or more embodiments, the voltage values ​​of the target electric energy DC2 obtained by the N RF driving circuits 100 decrease successively, and the voltage value of the target electric energy DC2 obtained by the N-1th RF driving circuit 100 is 1 / 2 of the voltage value of the target electric energy DC2 obtained by the Nth RF driving circuit 100.

[0077] Therefore, the RF driving device 10 in the present application can also programmably set the sum of the voltage values ​​of one or more target electric energies DC2 outputted.

[0078] Furthermore, when N=4, the ratio of the voltage values ​​of the target electric energy DC2 obtained by the four RF driving circuits 100 is 8:4:2:1.

[0079] Therefore, the RF driving device 10 in the present application can provide a sum of voltage values ​​of one or more target electric energies DC2 to meet the actual needs of the load.

[0080] The RF driving device 10 of the present application, through the above structure, can select one or more target electric energies DC2 to be output to the RF generating device PA according to the specific situation of the RF generating device PA, and cooperate with the use of a discharge circuit 300 with multiple discharge current connection states to quickly and effectively protect the RF generating device PA to prevent the RF generating device PA from being destroyed. It can also switch one or more target electric energies DC2 for output to meet the actual needs of the load.

[0081] See also Figure 6 , Figure 6 FIG. 1 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application. Figure 6 As shown, the present application further provides a radio frequency power supply system 1000, which includes a direct current power supply DC, a radio frequency generating device PA, and the radio frequency driving device 10 in any of the aforementioned embodiments.

[0082] Please refer again Figure 1 .like Figure 1As shown, the RF driving device 10 includes an input terminal In, an output terminal Out and N RF driving circuits 100, the N RF driving circuits 100 are connected between the input terminal In and the output terminal Out, the input terminal In and the output terminal Out are used to connect to a DC power supply DC and a RF generating device PA respectively, wherein each RF driving circuit 100 has a driving state and a stop driving state, each RF driving circuit 100 is used to receive a DC power DC1 output by the DC power supply DC through the input terminal In when in the driving state, and convert the DC power DC1 into a target power DC2, and stop receiving the DC power DC1 output by the DC power supply DC when in the stop driving state. Among them, the voltage values ​​of the target electric energy DC2 obtained by the N RF driving circuits 100 are different from each other, and the driving output terminals Od of the N RF driving circuits 100 are connected in sequence and connected to the output terminal Out through the driving output terminal Od of the RF driving circuit 100 located at the end to form an output path, so that the target electric energy DC2 output by the RF driving circuit 100 in the driving state is transmitted to the output terminal Out through the output path, and output to the RF generating device PA through the output terminal Out, wherein N≥2.

[0083] The more specific structure of the RF driving device 10 can refer to the relevant content of the RF driving device 10 in any of the aforementioned embodiments, which will not be repeated here.

[0084] The RF driving device 10 and the RF power supply system 1000 of the present application, through the above-mentioned structure, can select one or more target electric energies DC2 to be output to the RF generating device PA according to the specific situation of the RF generating device PA, and cooperate with the use of a discharge circuit 300 with multiple discharge current connection states to quickly and effectively protect the RF generating device PA to prevent the RF generating device PA from being destroyed, and can also switch one or more target electric energies DC2 for output to meet the actual needs of the load.

[0085] In the multiple embodiments provided in the present application, it should be understood that the disclosed devices and equipment can be implemented in other ways. For example, the device embodiments described above are only schematic; for example, the division of units is only a logical function division, and there may be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0086] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0087] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may be physically included separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of hardware plus software functional units.

[0088] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A radio frequency driving device, characterized in that: The invention comprises an input end, an output end and N radio frequency driving circuits, wherein the N radio frequency driving circuits are connected between the input end and the output end, and the input end and the output end are used to connect a DC power supply and a radio frequency generating device respectively, wherein each radio frequency driving circuit has a driving state and a stop driving state, and each radio frequency driving circuit is used to receive the DC power output by the DC power supply through the input end when in the driving state, and convert the DC power into target power, and stop receiving the DC power output by the DC power supply when in the stop driving state; Among them, the voltage values ​​of the target electric energy obtained by the N RF driving circuits are different from each other, and the driving output ends of the N RF driving circuits are connected in sequence and connected to the output end through the driving output end of the RF driving circuit located at the end to form an output path, so that the target electric energy output by the RF driving circuit in the driving state is transmitted to the output end through the output path, and output to the RF generating device through the output end, wherein N≥2.

2. The RF driving device according to claim 1, characterized in that: The output end includes a positive output end and a negative output end, and the driving output end of each RF driving circuit includes a positive driving output end and a negative driving output end. The positive driving output end and the negative driving output end of the N RF driving circuits are alternately connected and connected between the positive output end and the negative output end.

3. The RF driving device according to claim 2, characterized in that: Each of the radio frequency driving circuits comprises an inverter unit, a coupling unit and a rectifier unit, wherein the inverter unit, the coupling unit and the rectifier unit are sequentially connected between the input terminal and the positive output terminal; The inverter unit is used to receive the DC power when in the driving state and invert the DC power into AC power, and stop receiving the DC power when in the stop driving state; The coupling unit is used to receive the AC power and couple the AC power to the rectifying unit; The rectifying unit is used to rectify the AC electric energy coupled by the coupling unit into the DC target electric energy; Wherein, each rectifier unit has the positive driving output terminal and the negative driving output terminal, and the positive driving output terminals and the negative driving output terminals of the N rectifier units are connected in an alternating manner.

4. The radio frequency driving device according to claim 3, characterized in that: The inverter unit includes an inverter bridge, and when the inverter bridge is alternately turned on or off at a certain on-duty ratio, the inverter unit is in the driving state, and when the inverter bridge remains off, the inverter unit is in the stop driving state; The coupling unit includes a transformer, and the rectifying unit includes a rectifier bridge. The primary winding of the transformer is connected to the inverter bridge, and the secondary winding of the transformer is connected to the rectifier bridge. The primary winding and the secondary winding of the transformer are coupled to couple the AC power on one side of the first winding of the transformer to one side of the secondary winding of the transformer, and transmit the coupled AC power to the rectifier bridge.

5. The radio frequency driving device according to claim 1, characterized in that: The RF driving device further includes a control unit, which is connected to each RF driving circuit, and is used to control each RF driving circuit to be in the driving state or the driving stop state.

6. The radio frequency driving device according to claim 5, characterized in that: The RF driving device further comprises a discharge circuit, wherein the discharge circuit is connected between the driving output terminal of the RF driving circuit located at the end and the output terminal, and is connected to the ground; The discharge circuit is used to enable the target electric energy output by the RF driving circuit in the driving state to be continuously transmitted to the RF generating device through the driving output end of the RF driving circuit at the end when in the first connection state, and to stop the target electric energy output by the RF driving circuit in the driving state from being transmitted to the RF generating device and discharge the electric energy of the RF generating device to the ground when in the second connection state.

7. The radio frequency driving device according to claim 6, characterized in that: The RF driving device further comprises a parameter acquisition unit, and the parameter acquisition unit is used to connect with the RF generating device to acquire a first parameter of the RF generating device; The control unit is also connected to the parameter acquisition unit and the discharge circuit. The control unit is used to receive the first parameter, and when the first parameter does not meet the first preset condition, control the discharge circuit to be in the first connection state, and when the first parameter meets the first preset condition, control the discharge circuit to be in the second connection state.

8. The radio frequency driving device according to claim 6, characterized in that: The discharge circuit includes a switch module, a first discharge module and a second discharge module; The switch module is connected between the driving output terminal of the RF driving circuit located at the end and the output terminal, and the switch module is used to be in a first on state or a first off state to respectively turn on or off the connection path between the driving output terminal of the RF driving circuit located at the end and the output terminal, so as to correspondingly make the target electric energy output by the RF driving circuit in the driving state continuously transmitted or stopped transmitted to the RF generating device through the driving output terminal of the RF driving circuit located at the end; The first discharge module and the switch module are connected in parallel between the driving output terminal and the output terminal of the RF drive circuit at the end, and the first discharge module is used to be in a second on state or a second off state to discharge or stop discharging the electric energy of the RF generating device accordingly; The second discharge module is connected between the connection point between the switch module and the output end and the ground GND, and the second discharge module is used to be in a third on state or a third off state to discharge or stop discharging the electric energy of the radio frequency generating device accordingly; Wherein, when the switch module is in the first on-state, the first discharge module is in the second off-state, and the second discharge module is in the third off-state, the discharge circuit is in the first connection state; when the switch module is in the first off-state, the first discharge module is in the second on-state and / or the second discharge module is in the third on-state, the discharge circuit is in the second connection state.

9. The radio frequency driving device according to claim 1, characterized in that: The voltage values ​​of the target electric energy obtained by the N RF driving circuits decrease successively, and the voltage value of the target electric energy obtained by the N-1th RF driving circuit is 1 / 2 of the voltage value of the target electric energy obtained by the Nth RF driving circuit.

10. A radio frequency power supply system, characterized in that: It comprises a direct current power supply, a radio frequency generating device and a radio frequency driving device as described in any one of claims 1 to 9.

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