Tracking scanning measurement system and platform

Abstract

The invention discloses a tracking scanning measurement system and platform, the tracking scanning measurement system comprises a two-dimensional angle measurement driving device, a contact laser tracker, a non-contact laser scanner and a control device, and the control device is connected with the contact laser tracker, the non-contact laser scanner and the two-dimensional angle measurement driving device. The system is used for controlling a two-dimensional angle measurement driving device to drive a laser tracker to track a set tracking cooperative target in real time in a tracking coordinate measurement mode, obtaining coordinate data of a contact point of the tracking cooperative target and the to-be-measured surface through combination of two-dimensional angle measurement and laser interference distance measurement data, and scanning the to-be-measured surface in a scanning measurement mode. The two-dimensional angle measurement driving device is controlled to drive the non-contact laser scanner to scan a to-be-measured surface, and the scanning point cloud data of the to-be-measured surface is obtained through the combination of two-dimensional angle measurement and absolute distance measurement data. According to the invention, high-precision tracking coordinate measurement and high-efficiency scanning measurement can be realized through one instrument, and the detection efficiency is remarkably improved.

Description

Technical Field

[0001] The invention belongs to the technical field of manufacturing industry measurement and detection, and in particular relates to a tracking scanning measurement system and platform. Background Art

[0002] The assembly accuracy and shape contour accuracy of equipment are key factors to ensure the quality of high-end equipment such as aircraft, missiles, and ships, as well as to ensure stealth, aerodynamic, and hydrodynamic performance. Accurate measurement systems are one of the key means to ensure the assembly accuracy of equipment and the shape contour accuracy of the entire machine. For example, advanced measurement methods are required to measure spatial position and posture in the manufacturing, inspection, and space positioning processes such as large-scale component assembly and docking, space probe payload assembly, UAV high-precision positioning, and robot calibration.

[0003] At present, for the measurement of components of large equipment, in order to obtain high-precision and high-efficiency measurement based on the characteristics of each measurement area, it is necessary to combine the characteristics of each measurement equipment and use targeted measurement equipment to measure each measurement area. For example, a high-precision large-size laser tracker can perform contact and accurate measurement of the measurement area, but it requires the operation of holding a target ball and has a slow measurement speed. A laser scanner can perform large-area efficient scanning of the measurement area, but the non-contact measurement accuracy is low when the station is transferred. In addition, since it does not have the tracking coordinate measurement function, it cannot be used for posture measurement in the docking state. In order to achieve the effects of high-precision tracking coordinate measurement and high-efficiency scanning measurement at the same time, different measurement equipment is usually required to perform on-site measurement of the same large equipment. Since each measurement equipment uses its own measurement coordinate system, the coordinate points after measurement need to be converted to a common point to obtain the coordinate point data under the same coordinate. It can be seen that the existing measurement equipment cannot meet the needs of high-precision tracking measurement of component assembly feature points of large equipment and high-precision and rapid on-site measurement of the overall shape contour of the whole machine. Summary of the invention

[0004] The purpose of the present invention is to provide a tracking scanning measurement system and platform, which can realize high-precision tracking coordinate measurement and efficient non-contact scanning measurement to meet the needs of high-precision and rapid on-site measurement of component assembly feature points and overall machine shape contours of large equipment.

[0005] In order to achieve the above object, one aspect of the present invention provides a tracking scanning measurement system, comprising: A contact laser tracker, comprising a tracking cooperation target and a tracking scanning device, wherein the tracking cooperation target is used to move on the surface to be measured in a manner of contacting the surface to be measured according to a set movement strategy, and the tracking scanning device is used to obtain coordinate data of a contact point between the tracking cooperation target and the surface to be measured in a target coordinate system in real time by tracking the tracking cooperation target; A non-contact laser scanner is used to scan the surface to be measured according to a set scanning strategy, and obtain the scanning point cloud data of the surface to be measured in the target coordinate system in real time; A two-dimensional angle measurement drive device, used to drive the contact laser tracker and the non-contact laser scanner; A control device is connected to the contact laser tracker, the non-contact laser scanner and the two-dimensional angle measurement drive device, and is used to control the two-dimensional angle measurement drive device to drive the tracking scanning device to track the tracking cooperation target in real time to obtain the coordinate data in the tracking coordinate measurement mode, and to control the two-dimensional angle measurement drive device to drive the non-contact laser scanner to scan the surface to be measured to obtain the scanning point cloud data in the scanning measurement mode.

[0006] Another aspect of the present invention provides a tracking and scanning measurement platform, including the above-mentioned tracking and scanning measurement system and a computing and processing device, wherein the computing and processing device is connected to the tracking and scanning measurement system to obtain coordinate data and scanning point cloud data of the surface to be measured from the tracking and scanning measurement system.

[0007] According to the tracking, scanning and measurement system and platform of the above aspects of the present invention, the contact laser tracker and the non-contact laser scanner can be integrated into the same device, and point cloud data under the same coordinates can be obtained. The point cloud data can be directly processed for three-dimensional modeling at a later stage, without the need for coordinate conversion as in the prior art. Thus, fast, complete, high-precision scanning and tracking measurement can be achieved through one instrument, significantly improving detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] In order to more clearly illustrate the technical solution of the present invention, the following briefly introduces the drawings used in the description of the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work: Figure 1 A schematic diagram of the structure of a tracking and scanning measurement system according to an embodiment of the present invention; Figure 2 A schematic diagram of the principles of a contact laser tracker and a non-contact laser scanner according to an embodiment of the present invention; Figure 3 A schematic diagram of the coordinate measurement principle of an embodiment of the present invention; Figure 4 A schematic diagram of the structure of a thermostat according to an embodiment of the present invention; Figure 5 is a structural schematic diagram of a visual tracking module according to an embodiment of the present invention; Figure 6A schematic diagram of the structure of a contact laser tracker and a non-contact laser scanner according to an embodiment of the present invention; Figure 7 It is an exploded schematic diagram of a pitch and swivel drive mechanism according to an embodiment of the present invention; Figure 8 An exploded schematic diagram of a horizontal rotary drive mechanism according to an embodiment of the present invention; Fig. 9 The figure is a schematic diagram of the structure of a tracking and scanning measurement platform according to an embodiment of the present invention. DETAILED DESCRIPTION

[0009] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0010] See also Figure 1 , Figure 1 This is a structural schematic diagram of a tracking and scanning measurement system 100 according to an embodiment of the present invention. The tracking and scanning measurement system 100 includes: a support frame 1, a mounting shell 2, a two-dimensional angle measurement drive device 3, a contact laser tracker 4, a non-contact laser scanner 5 and a control device 6.

[0011] The mounting shell 2 is mounted on the support frame 1, the two-dimensional angle measurement drive device 3 is mounted in the mounting shell 2, the contact laser tracker 4 at least includes a tracking cooperation target 41 and a tracking scanning device 42, the tracking scanning device 42 is arranged on the mounting shell 2, during measurement, the tracking cooperation target 41 is used to move on the surface 200 to be measured in a manner of contacting the surface 200 to be measured according to a set movement strategy, and the tracking scanning device 42 obtains the coordinate data of the surface 200 to be measured in the target coordinate system in real time by tracking the tracking cooperation target 41. The non-contact laser scanner 5 is arranged in the mounting shell 2, during measurement, the surface 200 to be measured is scanned according to a specified scanning method, and the scanning point cloud data of the surface 200 to be measured in the target coordinate system is obtained in real time. The two-dimensional angle measurement drive device 3 is used to drive the contact laser tracker 4 and the non-contact laser scanner 5. The control device 6 is connected to the two-dimensional angle measurement drive device 3, the contact laser tracker 4 and the non-contact laser scanner 5. In the tracking coordinate measurement mode, the contact laser tracker 4 is turned on, and the two-dimensional angle measurement drive device 3 is controlled to drive the tracking scanning device 42 to track the tracking cooperation target 41 in real time to obtain the coordinate data. In the scanning measurement mode, the non-contact laser scanner 5 is turned on, and the two-dimensional angle measurement drive device 3 is controlled to drive the non-contact laser scanner 5 to scan the surface to be measured 200 to obtain the scanning point cloud data.

[0012] In this embodiment, the support frame 1 may be a tripod, and the mounting shell 2 is mounted on the support frame 1 .

[0013] In some embodiments, the tracking cooperation target 41 may be a pyramid target sphere, which may be a target sphere or a target mirror. However, the tracking cooperation target 41 is not limited thereto. As long as it can receive and reflect laser light and cooperate with the tracking scanning device 42 to obtain the coordinate data of the surface to be measured 200 in the target coordinate system in real time, the tracking cooperation target 41 may be any structure. For ease of understanding, the tracking cooperation target 41 in the following embodiments is described as a pyramid target sphere.

[0014] When the contact laser tracker 4 is measuring, the pyramid target ball moves on the surface 200 to be measured in a manner of contacting the surface 200 to be measured according to a set movement strategy, and the tracking scanning device 42 obtains the coordinate data of the surface 200 to be measured in the target coordinate system in real time by tracking the pyramid target ball. The set movement strategy can be a strategy determined according to the shape of the surface 200 to be measured.

[0015] In this embodiment, the movement strategy may be set so that the pyramid target ball moves automatically according to the movement strategy, or may be set so that the pyramid target ball moves according to the movement strategy by hand, and this embodiment does not limit this.

[0016] The coordinate data in this embodiment can be understood as contact point cloud data obtained by tracking the cooperative target 41 .

[0017] When measuring, the non-contact laser scanner 5 scans the surface 200 to be measured according to a specified scanning strategy, and obtains the scanning point cloud data of the surface 200 to be measured in the target coordinate system in real time. The specified scanning strategy can be a strategy determined by the control device 6 according to the shape of the surface 200 to be measured and the measurement distance.

[0018] In actual use, the control device 6 starts the contact laser tracker 4 and the two-dimensional angle measurement drive device 3 in the tracking coordinate measurement mode. The angle pyramid target ball can be moved on the surface to be measured 200 in a manner of contacting the surface to be measured 200 by a manipulator or handheld mode according to a set movement strategy. The control device 6 drives the tracking scanning device 42 to track the angle pyramid target ball in real time by controlling the two-dimensional angle measurement drive device 3 to obtain coordinate data in the target coordinate system, and determines the contact point cloud data of the surface to be measured 200 according to the coordinate data. The control device 6 starts the non-contact laser scanner 5 in the scanning measurement mode, and drives the non-contact laser scanner 5 to scan the surface to be measured 200 by controlling the two-dimensional angle measurement drive device 3 to obtain scanning point cloud data in the target coordinate system, so as to accurately construct a three-dimensional model and assemble it using the coordinate data and scanning point cloud data.

[0019] In some embodiments, the control device 6 can be connected to an external host to receive control instructions sent by the external host and send measured contact point cloud data and scanning point cloud data to the host, so that the host can perform three-dimensional modeling based on the scanning point cloud data and contact point cloud data to achieve high-precision assembly.

[0020] In this embodiment, the contact laser tracker 4 and the non-contact laser scanner 5 can scan the surface to be measured 200 at the same coordinate to obtain point cloud data, which enables the point cloud data measured at the same coordinate to achieve high-precision assembly and high-efficiency assembly. In addition, the contact laser tracker 4 can realize large-scale high-precision contact coordinate measurement on site, and the non-contact laser scanner 5 can realize high-precision, fast and complete scanning measurement. In this way, both high-precision complete scanning can be completed quickly and large-scale high-precision scanning can be achieved, thereby solving the contradiction that the laser tracker cannot perform fast non-contact scanning measurement and the laser scanner cannot perform high-precision tracking coordinate measurement, so as to realize fast, complete and high-precision scanning and tracking measurement through one instrument, significantly improve detection efficiency, and meet the needs of high-precision and fast measurement of component assembly feature points and the overall appearance contour of aircraft, missiles, ships and other equipment on site.

[0021] In some embodiments, whether to use the tracking coordinate measurement mode or the scanning measurement mode to measure the measurement surface 200 can be selected through manual confirmation, or the control device 6 can obtain the measurement mode requirements sent by other electronic devices, or the control device 6 can be equipped with a trained measurement mode determination model, and output the measurement mode corresponding to the area to be measured based on the captured picture of the area to be measured. This embodiment does not limit this.

[0022] In some embodiments, Figure 1 As shown, the mounting housing 2 includes a scanner housing 21 and a regulating housing 22, the control device 6, the contact laser tracker 4 and the non-contact laser scanner 5 are all mounted in the scanner housing 21, the two-dimensional angle measurement drive device 3 is mounted in the regulating housing 22, and the scanner housing 21 and the regulating housing 22 are mounted on the support frame 1. In this embodiment, the support frame 1 can be a tripod, the scanner housing 21 is placed on the top of the tripod, and the regulating housing 22 is placed in the middle of the tripod.

[0023] In some embodiments, Figure 2 As shown, the tracking and scanning device 42 includes: an interference ranging module 421, a target tracking module 422 and a visual tracking module 423; wherein the interference ranging module 421, the target tracking module 422 and the visual tracking module 423 are all installed in the scanner housing 21 and are electrically connected to the control device 6.

[0024] The control device 6 is used to start the interference ranging module 421, the target tracking module 422 and the visual tracking module 423 in the tracking coordinate measurement mode, determine the position information of the corner cone target ball according to the captured image fed back by the visual tracking module 423, and send the corner cone target ball position information to the two-dimensional angle measurement drive device 3, so as to control the two-dimensional angle measurement drive device 3 to drive the interference ranging module 421 to move according to the corner cone target ball position information, so that the ranging laser emitted by the interference ranging module 421 is injected into the corner cone target ball through the target tracking module 422, and during the movement of the corner cone target ball, the injected ranging laser is reflected to the target tracking module 422 after passing through the corner cone target ball.

[0025] The target tracking module 422 is used to measure the relative distance value between the corner cone target sphere and the target tracking module 422 at the current moment in the target coordinate system and the position offset value relative to the previous moment according to the received ranging laser, and send the relative distance value and the position offset value at the current moment to the control device 6.

[0026] The control device 6 is also used to control the two-dimensional angle measurement drive device 3 to drive the target tracking module 422 to perform adaptive adjustment of the horizontal angle and the pitch angle according to the position offset value, so as to achieve tracking measurement of the angle cone target sphere by adjusting the position offset value, and determine the coordinate data of the surface 200 to be measured in the target coordinate system based on the absolute distance values ​​obtained at different times.

[0027] In this embodiment, if Figure 3 As shown, let the center point of the pyramid target be P (x, y, z), and the center of the coordinate system of the contact laser tracker 4 be the dual-axis rotation center O. When the system tracks the upper pyramid target, if the horizontal angle from O to P is , the pitch angle is θ , the distance between OP is R , according to the transformation from spherical coordinate system to rectangular coordinate system, we have:

[0028] Among them, x is the horizontal coordinate of the coordinate system, y is the vertical coordinate of the coordinate system, and z is the vertical coordinate of the coordinate system.

[0029] In this embodiment, in order to achieve the purpose of high-precision scanning and tracking measurement, the interferometric ranging module 421 uses laser interferometric ranging combined with the target tracking module 422 to achieve high-precision tracking coordinate measurement, so as to achieve tracking coordinate measurement, and perform tracking ranging through feedback from the target tracking module 422. According to experimental detection, the accuracy of the target tracking module 422 can reach ±18μm+8.5μm / m.

[0030] In this embodiment, the position feedback of the angle cone target ball is performed through the target tracking module 422, and the absolute distance measurement of the cooperative target is realized through the interference ranging module 421. According to the position deviation and distance feedback measured by the target tracking module 422, the target tracking module 422 is driven by the two-dimensional angle measurement drive device 3 to perform adaptive adjustment of the horizontal angle and the pitch angle, so as to realize the tracking measurement of the angle cone target ball, and the final measurement result is transmitted to the host for data processing.

[0031] As an example, Figure 2 As shown, the target tracking module 422 includes a lens assembly 4221 and a position sensing tracker 4222; the lens assembly 4221 is arranged on the light incident side of the position sensing tracker 4222, and the lens assembly 4221 processes the optical signal of the ranging laser emitted from the interference ranging module 421, so that a part of the ranging laser after processing is emitted into the corner cone target ball and then reflected to the lens assembly 4221, and another part of the ranging laser is transmitted through the lens assembly 4221 to form an interference signal and is emitted into the position sensing tracker 4222.

[0032] The position sensing tracker 4222 is used to measure the position of the light spot formed by the incident interference signal, and determine the position offset value between the corner cone target sphere and the lens assembly 4221 at the current moment relative to the previous moment in the target coordinate system.

[0033] The control device 6 is electrically connected to the position sensing tracker 4222, and is used to control the adaptive adjustment of the horizontal angle and the pitch angle according to the relative distance value and the position offset value, so as to achieve tracking measurement of the angle cone target ball by adjusting the position offset value; the control device 6 is also used to determine the coordinate data of the surface 200 to be measured in the target coordinate system based on the relative distance values ​​obtained at different times.

[0034] In this embodiment, the position sensing tracker 4222 can measure the position of the light spot formed by the interference signal, and determine the position offset value between the angle cone target ball and the lens assembly 4221 at the current moment relative to the previous moment in the target coordinate system, so that the control device 6 controls the two-dimensional angle measurement drive device 3 to drive the target tracking module 422 to perform adaptive adjustment of the horizontal angle and the pitch angle according to the relative distance value and the position offset value sent by the target tracking module 422, so as to achieve tracking measurement of the angle cone target ball by adjusting the position offset value, and determine the coordinate data of the surface 200 to be measured in the target coordinate system based on the relative distance values ​​obtained at different moments.

[0035] In some embodiments, Figure 2As shown, the target tracking module 422 further includes a filter 4223, and the filter 4223 is disposed between the lens assembly 4221 and the position sensing tracker 4222. The filter 4223 of this embodiment can filter out some unnecessary light signals to improve measurement accuracy.

[0036] In some embodiments, Figure 2 As shown, the lens assembly 4221 includes a first fiber optic collimator 42211 and a beam splitter 42212. The ranging laser emitted by the interference ranging module 421 is focused into a beam of parallel light signal by the first fiber optic collimator 42211 and then incident on the beam splitter 42212. A portion of the ranging laser of the parallel light signal is transmitted through the beam splitter 42212 and incident on the corner cone target sphere, and then reflected and incident on the beam splitter 42212, and forms an interference light signal with another portion of the ranging laser that is transmitted through the beam splitter 42212 and incident on the position sensing tracker 4222.

[0037] In this embodiment, the first fiber optic collimator 42211 is named only for the convenience of distinguishing it from the fiber optic collimators described later, and is not used to limit a certain fiber optic collimator.

[0038] The first fiber optic collimator 42211 can collimate the light to a desired diameter or spot size, while reducing the divergence angle of the light beam to ensure that the light propagates in a parallel state.

[0039] The beam splitter 42212 can split the ranging laser emitted by the first fiber collimator 42211 into ranging lasers in different directions. One beam passes through the beam splitter 42212 and enters the corner cone target sphere, and then is reflected and enters the beam splitter 42212. The other beam serves as a reference light and passes through the beam splitter 42212 to interfere with the ranging laser reflected and entered into the beam splitter 42212.

[0040] In some embodiments, Figure 2 As shown, the lens assembly 4221 also includes a collimator group 42213, which is arranged between the first fiber collimator 42211 and the beam splitter 42212. The collimator group 42213 is used to expand the parallel light signal emitted by the first fiber collimator 42211 and then emit it into the beam splitter 42212.

[0041] In this embodiment, the collimator group 42213 focuses the parallel light emitted by the first fiber collimator 42211 onto the beam splitter 42212 to further improve the measurement accuracy.

[0042] In some embodiments, the filter 4223 is a bandpass filter to selectively filter out light of non-target wavelengths, improve the monochromaticity and stability of the laser output, and ensure the normal operation of the laser within a specific wavelength range. In other embodiments, the bandpass filter is a narrowband filter to selectively transmit the optical fiber wavelength of a set wavelength band, thereby improving the purity and stability of the laser.

[0043] In some embodiments, Figure 2 As shown, the interference ranging module 421 includes a helium-neon laser assembly 4211, a second fiber collimator 4212, a beam splitter 4213, a fiber reflector 4214 and a detector 4215; wherein the second fiber collimator 4212 is arranged on the light-emitting side of the helium-neon laser assembly 4211, the beam splitter 4213 is arranged on the light-emitting side of the second fiber collimator 4212, the fiber reflector 4214 and the detector 4215 are respectively arranged on the light-emitting side of the beam splitter 4213; the laser signal emitted by the helium-neon laser assembly 4211 is focused by the second fiber collimator 4212 into a beam of parallel light signals and then emitted into the beam splitter 4213. Part of the ranging laser is emitted into the fiber optic reflector 4214, and the other part passes through the beam splitter 4213 to form an interference signal with the ranging laser emitted by the fiber optic reflector 4214 into the beam splitter 4213. Then, part of the ranging laser is emitted into the first fiber optic collimator 42211, and the other part of the ranging laser is emitted into the detector 4215. The helium-neon laser component 4211 and the detector 4215 are used to be electrically connected to the control device 6. The control device 6 controls the helium-neon laser component 4211 to be turned on or off, and controls the helium-neon laser component 4211 to emit a laser signal through the electrical signal fed back after the detector 4215 detects the ranging laser.

[0044] In this embodiment, the second fiber optic collimator 4212 is named only for the convenience of distinguishing it from the fiber optic collimators in the preceding and following contexts, and is not used to limit a certain fiber optic collimator.

[0045] The helium-neon laser assembly 4211 has the characteristics of large power output, narrow spectral line width, and long wavelength. The laser emitted by the helium-neon laser assembly 4211 outputs a beam of parallel ranging laser through the second fiber collimator 4212. The ranging laser is divided into two beams of ranging laser through the beam splitter 4213. One beam of ranging laser is reflected by the fiber reflector 4214 and then enters the beam splitter 4213. The other beam of ranging laser passes through the beam splitter 4213 to interfere with the reflected ranging laser and enters the first fiber collimator 42211. The detector 4215 detects the ranging laser and feeds back the electrical signal corresponding to the intensity of the ranging laser when entering the first fiber collimator 42211 to the control device 6 in real time, so that the control device 6 further regulates the laser signal injected by the helium-neon laser assembly 4211 according to the fed-back electrical signal.

[0046] The interference distance measurement module 421 of this embodiment can be combined with the target tracking module 422 to measure the relative distance value at the current moment.

[0047] In some embodiments, Figure 2 As shown, the interference ranging module 421 also includes a first isolator 4216, which is arranged between the second fiber collimator 4212 and the beam splitter 4213, so that all the ranging lasers emitted by the second fiber collimator 4212 are emitted into the beam splitter 4213.

[0048] The first isolator 4216 is named only for the convenience of distinguishing it from the isolators in the previous and following contexts, and is not used to limit a particular isolator.

[0049] The first isolator 4216 can further limit the direction of the ranging laser, so that the emitted ranging laser can only be transmitted in a single direction to the beam splitter 4213 to reduce the energy loss of the ranging laser, and at the same time improve the light wave transmission efficiency by isolating the reflected light.

[0050] In some embodiments, the HeNe laser assembly 4211 includes a HeNe laser, a switching circuit, a heating wire, and a temperature sensor.

[0051] Among them, the helium-neon laser, the switching circuit and the temperature sensor are all electrically connected to the control device 6. The heating wire is wound around the outer side of the helium-neon laser and is electrically connected to the switching circuit. The temperature sensor is attached to the outer side of the helium-neon laser to measure the temperature of the helium-neon laser in real time, and send the temperature measurement result to the control device 6 in the form of a temperature electrical signal.

[0052] The control device 6 is used to control the He-Ne laser to emit a laser signal, so as to determine whether to heat the He-Ne laser by using the heating wire by controlling the switching circuit during the laser signal emission process according to the electrical signal fed back by the detector 4215 and the temperature signal sent by the temperature sensor, so as to maintain the temperature of the He-Ne laser within a set range.

[0053] In this embodiment, the heating wire is used to heat the He-Ne laser. The control device 6 can determine whether to turn on the heating wire to heat the He-Ne laser based on the electrical signal fed back by the detector 4215, so that the temperature of the He-Ne laser is kept in a constant temperature state to ensure the performance of the He-Ne laser and output a stable laser signal.

[0054] In some embodiments, Figure 2 As shown, the non-contact laser scanner 5 comprises: a scanning vision module 51 and a frequency sweeping absolute non-contact distance measurement module 52. Both the scanning vision module 51 and the frequency sweeping absolute non-contact distance measurement module 52 are electrically connected to the control device 6.

[0055] The scanning vision module 51 is used to photograph the area to be measured in a panoramic manner and send the photographed area to be measured to the control device 6 .

[0056] The control device 6 is used to start the scanning vision module 51 and the scanning frequency absolute non-contact ranging module 52 in the scanning measurement mode to perform scanning path planning on the area to be measured to obtain a scanning path planning strategy, and send the scanning path planning strategy to the scanning vision module 51.

[0057] The frequency sweeping absolute non-contact distance measuring module 52 is used to measure the absolute distance value between the surface to be measured 200 and the frequency sweeping absolute non-contact distance measuring module 52 during the scanning process, and send the absolute distance value to the control device 6 .

[0058] The control device 6 is also used to control the two-dimensional angle measurement drive device 3 according to the absolute distance value to drive the scanning vision module 51 to scan the area to be measured according to the scanning path planning strategy, so as to adapt to scanning of different distances through the zoom lens.

[0059] In this embodiment, the zoom lens can be used to adapt to scanning at different distances, and precise laser scanning can be automatically achieved to obtain more accurate point cloud data.

[0060] The scanning vision module 51 photographs the area to be measured so that the control device 6 can determine the scanning path planning measurement according to the area to be measured, so that the scanning absolute non-contact distance measurement module 52 can determine the absolute distance value between the surface to be measured 200 in the area to be measured and the scanning absolute non-contact distance measurement module 52 during the scanning process, and then control the two-dimensional angle measurement drive device 3 according to the absolute distance value to drive the scanning vision module 51 to scan the area to be measured according to the scanning path planning strategy, so as to adapt to scanning at different distances through the zoom lens, thereby realizing large-area non-contact scanning quickly and accurately.

[0061] In some embodiments, Figure 2 As shown, the swept-frequency absolute non-contact distance measurement module 52 includes an external cavity resonant laser 521, a measurement interferometer 522, a first coupler 523, an auxiliary interferometer 524, a third fiber collimator 525 and a distance measurement signal processing unit 526.

[0062] The first coupler 523 is placed on the light output side of the external cavity resonant laser 521, the measuring interferometer 522 is provided on one light output side of the first coupler 523, and the auxiliary interferometer 524 is provided on the other light output side, the measuring interferometer 522 is electrically connected to the ranging signal processing unit 526, the third fiber optic collimator 525 is provided on the light output side of the measuring interferometer 522, and the scanning vision module 51 is provided on the light output side of the third fiber optic collimator 525; the ranging signal processing unit 526 is electrically connected to the control device 6.

[0063] The ranging signal processing unit 526 is used to control the external cavity resonant laser 521 to emit a laser signal, so that the laser signal is divided into two paths after being processed by the first coupler 523. One optical signal is emitted into the measuring interferometer 522, processed by the measuring interferometer 522, and then emitted to the third fiber collimator 525 for focusing processing and then emitted into the scanning vision module 51, and the optical signal received as feedback from the scanning vision module 51 is subjected to measurement light interference processing, and the processed measurement light interference signal is sent to the ranging signal processing unit 526; the other optical signal enters the auxiliary interferometer 524 for clock interference processing, and the processed clock light interference signal is emitted into the ranging signal processing unit 526.

[0064] The distance measurement signal processing unit 526 is further used to determine the absolute distance value according to the measurement light interference signal and the clock light interference signal, so as to adjust the frequency of the laser signal emitted by the external cavity resonant laser 521 according to the absolute distance value.

[0065] In this embodiment, the first coupler 523 is named only for the convenience of distinguishing it from the couplers described later, and is not used to limit a certain coupler.

[0066] The first coupler 523 can have a good isolation effect on the laser signal input by the external cavity resonant laser 521 and the electrical signal output by the first coupler 523 .

[0067] In this embodiment, the absolute distance between the surface to be measured 200 and the frequency sweeping absolute non-contact distance measurement module 52 is measured by combining the measuring interferometer 522 and the auxiliary interferometer 524 .

[0068] In some embodiments, Figure 2 As shown, the swept-frequency absolute non-contact distance measurement module 52 further includes a second isolator 527 , and the second isolator 527 is disposed between the external cavity resonant laser 521 and the first coupler 523 .

[0069] In this embodiment, the second isolator 527 is named only for the convenience of distinguishing it from the isolators in the preceding and following contexts, and is not used to limit a certain isolator.

[0070] The second isolator 527 can perform bidirectional transmission on the ranging laser coming out of the first coupler 523 .

[0071] In other embodiments, the scanning vision module 51 includes a fourth fiber optic collimator 511, a zoom lens group 512 and a zoom lens 513; the zoom lens 513, the zoom lens group 512 and the fourth fiber optic collimator 511 are arranged in sequence according to the input and output of the light signal, the fourth fiber optic collimator 511 is close to the side of the first fiber optic collimator 42211, and the zoom lens group 512 is installed on the two-dimensional angle measurement drive device 3, so that the two-dimensional angle measurement drive device 3 drives the zoom lens group 512 to achieve the focal length.

[0072] In this embodiment, the fourth fiber optic collimator 511 is named only for the convenience of distinguishing it from the fiber optic collimators in the preceding and following contexts, and is not used to limit a certain fiber optic collimator.

[0073] In actual applications, the laser signal from the first fiber optic collimator 42211 is injected into the fourth fiber optic collimator 511 for processing and then emits a parallel ranging laser, which is injected into the zoom lens group 512. Driven by the two-dimensional angle measurement drive device 3, the distance between the zoom lens group 512 and the zoom lens 513 is changed, so that the optimal focal length can be adjusted according to the distance between the surface 200 to be measured and the zoom lens 513, thereby achieving the purpose of improving the ranging accuracy.

[0074] In some embodiments, Figure 2As shown, the measurement interferometer 522 includes a first balanced detector 5221 , a second coupler 5222 , a first 3dB coupler 5223 and a circulator 5224 . The light input port of the second coupler 5222 is arranged at the light output port of the first coupler 523, the first light output port of the second coupler 5222 is arranged at the first light input port of the first 3dB coupler 5223, the second light output port of the second coupler 5222 is arranged at the first light input port of the circulator 5224, the first light output port of the circulator 5224 is aligned with the third fiber collimator 525, the second light input port of the circulator 5224 receives the laser signal emitted by the third fiber collimator 525, the second light output port of the circulator 5224 is arranged at the second light input port of the first 3dB coupler 5223, the light output port of the first 3dB coupler 5223 is arranged at the first balanced detector 5221, and the first balanced detector 5221 is electrically connected to the ranging signal processing unit 526 to send a measuring light interference signal to the ranging signal processing unit 526.

[0075] In this embodiment, the second coupler 5222 is named only for the convenience of distinguishing from the couplers in the preceding and following texts, and is not used to limit a certain coupler. The first optical output port is named only for the convenience of distinguishing from the optical output port in the following text, and is not used to limit a certain optical output port. Accordingly, the second optical output port is named only for the convenience of distinguishing from the optical output port in the following text, and is not used to limit a certain optical output port. The first 3dB coupler 5223 is named only for the convenience of distinguishing from the 3dB coupler in the following text, and is not used to limit a certain 3dB coupler.

[0076] The circulator 5224 performs enhanced amplification processing on the distance measuring laser emitted from the second coupler 5222 and then injects it into the third fiber collimator 525 from another fiber port. At the same time, the distance measuring laser injected from the third fiber collimator 525 is combined with the distance measuring laser injected from the second coupler 5222 in the circulator 5224 to form an interference signal which is input into the first 3dB coupler 5223. In addition, the circulator 5224 can also make the isolation between the non-connected ports greater and then input into the first 3dB coupler 5223.

[0077] In some embodiments, the auxiliary interferometer 524 includes a third coupler 5241, a second 3dB coupler 5242, a second balanced detector 5243 and an optical interferometer 5244. The light input port of the third coupler 5241 is arranged at the first light output port of the first coupler 523, the light output port of the third coupler 5241 is arranged at the light input port of the second 3dB coupler 5242 through the optical interferometer 5244, the light output port of the second 3dB coupler 5242 is arranged at the light input port of the second balanced detector 5243, and the second balanced detector 5243 is electrically connected to the ranging signal processing unit 526 to send a clock optical interference signal to the ranging signal processing unit 526.

[0078] In this embodiment, the third coupler 5241 is named only for the convenience of distinguishing from the couplers in the preceding and following texts, and is not used to limit a certain coupler. The second 3dB coupler 5242 is named only for the convenience of distinguishing from the 3dB coupler in the preceding text, and is not used to limit a certain 3dB coupler. The second balanced detector 5243 is named only for the convenience of distinguishing from the balanced detector in the preceding text, and is not used to limit a certain balanced detector.

[0079] The second balanced detector 5243 can perform denoising on the ranging laser output by the second 3dB coupler 5242 to improve the sensitivity of the ranging laser.

[0080] In some embodiments, the optical interferometer 5244 may be an MZ (Mach-Zenhder, fiber Mach-Zehnder) interferometer to improve measurement accuracy.

[0081] In some embodiments, Figure 2 As shown, the tracking and scanning measurement system also includes a fiber optic switch, which connects the swept-frequency absolute non-contact ranging module 52 and the interference ranging module 421, and is electrically connected to the control device 6. The control device 6 is used to control the fiber optic switch to connect the swept-frequency absolute non-contact ranging module 52 and the target tracking module 422 after the ranging laser emitted by the interference ranging module 421 to the tracking cooperative target 41 is blocked and the light is cut off in the tracking coordinate measurement mode, and measure the initial value of the absolute distance from the tracking cooperative target 41 to the swept-frequency absolute non-contact ranging module 52 after the light is cut off and resumed, and correct the relative distance value between the tracking cooperative target and the lens assembly of the target tracking module 422 in the target coordinate system after the light is cut off and resumed through the absolute distance initial value.

[0082] In some embodiments, the scanner shell 21 includes: a control box and a scanner integrated shell, the control box is installed with an auxiliary interferometer 524, a temperature sensor and a control device 6, the remaining components of the contact laser tracker 4 except the temperature sensor and the remaining components of the non-contact scanner 5 except the auxiliary interferometer 524 are all installed in the scanner integrated shell, and the scanner integrated shell is installed on the support frame 1.

[0083] In some embodiments, Figure 2 and 6 As shown, the tracking scanning measurement system further includes a thermostat 7; the thermostat 7 is installed with the auxiliary interferometer 524, which is used to maintain the temperature of the auxiliary interferometer 524. Since the auxiliary interferometer 524 adopts a constant temperature solution and needs to be kept warm and constant temperature, and the size and space of the scanner integrated shell limit its installation, the auxiliary interferometer 524 and its thermostat 7 in the sweep frequency absolute non-contact ranging module 52 are installed in the control box.

[0084] In some embodiments, Figure 4As shown, the constant temperature box 7 includes an internal fiber optic installation box 71, a fiber optic connection seat 72, an internal insulation box 73, an internal temperature control board 74, an external metal box 75, an external temperature control board 76, an outer insulation cover 77 and a bottom heat dissipation connector 78; the internal fiber optic installation box 71 is provided with a fiber optic connection seat 72 for connecting the optical fiber and a fiber optic winding member for winding the optical fiber, the bottom of the internal insulation box 73 is penetrated with a mounting hole for placing the internal temperature control board 74, and the bottom of the external metal box 75 is penetrated with a mounting hole for placing the external temperature control board 76. The auxiliary interferometer 524 is placed in the internal optical fiber installation box 71, and the internal optical fiber installation box 71 is arranged in the internal insulation box 73. The internal temperature control board 74 is installed in the installation hole at the bottom of the internal insulation box 73 and is arranged in the external metal box 75. The external metal box 75 is installed in the outer insulation cover 77. The external temperature control board 76 is installed in the installation hole at the bottom of the outer insulation box. The bottom heat dissipation connector 78 is installed at the bottom of the outer insulation cover 77 for contacting with the external temperature control board 76, so as to guide the heat in the internal optical fiber installation box 71 to the bottom heat dissipation connector 78 for heat dissipation by using the internal temperature control board 74 and the external temperature control board 76 with the help of the external metal box 75. The outer insulation cover 77 covers the internal optical fiber installation box 71, and the bottom heat dissipation connector 78 is adhered to the outer end surface of the outer insulation cover 77, and is sealed in the internal optical fiber installation box 71 together with the outer insulation cover 77. In this embodiment, the auxiliary interferometer 524 is installed by the internal optical fiber installation box 71, the internal insulation box 73 performs the first layer of constant temperature on the auxiliary interferometer 524, and the internal temperature control board 74 installed at the bottom of the internal insulation box 73 performs fine temperature control; the external metal box 75 is combined with the external temperature control board 76 to perform preliminary temperature control, and the internal insulation box 73 is used for insulation control. The internal temperature control board 74 can use a TEC (Thermo Electric Cooler) semiconductor refrigerator, the external temperature control board 76 can use a TEC semiconductor refrigerator, and the external metal box 75 can be made of brass.

[0085] In some embodiments, Figure 4 As shown, the outer heat-insulating cover 77 includes: an optical fiber metal box cover 771, heat-insulating cotton 772, a metal plate 773 and an outer top insulating cover 774; wherein the optical fiber metal box cover 771, the heat-insulating cotton 772, the metal plate 773 and the outer top insulating cover 774 are sequentially bonded to form an integral cover structure, and the optical fiber metal box cover 771 is covered in the inner insulating box 73 in a manner that the optical fiber metal box cover 771 is close to the inner optical fiber installation box 71. The technical solution provided in this embodiment further provides heat insulation for the auxiliary interferometer 524. As an embodiment, the metal box is made of brass.

[0086] In some embodiments, Figure 5As shown, the visual tracking module 423 includes: a telephoto objective lens 4231, a telephoto objective lens pressure ring 4232, a telephoto lens group 4233, an inner lens barrel 4234, a relay lens 4235, an imaging lens group 4236, an outer lens barrel 4237 and an imaging CCD (Charge-coupled Device) lens group 4238; wherein, bosses for mounting the telephoto lens group 4233, the relay lens 4235 and the imaging lens group 4236 are sequentially arranged in the inner lens barrel 4234 at specified distances; a groove for firmly mounting in the scanner integrated shell is arranged on the outer side surface of the outer lens barrel 4237; the telephoto objective lens 4231 is arranged in the telephoto objective lens pressure ring 4232, and the telephoto objective lens pressure ring 4232 is sleeved on the inner lens barrel The inner lens barrel 4234 has a corresponding telephoto lens group 4233, a relay lens 4235 and an imaging lens group 4236 installed at each boss of the inner lens barrel 4234, and the telephoto lens group 4233 is close to the telephoto objective lens pressing ring 4232. The outer lens barrel 4237 is sleeved on the outer side of the inner lens barrel 4234. The end of the outer lens barrel 4237 away from the telephoto objective lens 4231 is installed with an imaging CCD lens group 4238, and is installed in the scanner integrated shell through the groove. In this embodiment, the relay lens 4235 amplifies and transfers the optical signal from the telephoto lens group 4233 to expand the coverage, enhance the signal quality, and reduce the transmission delay.

[0087] In other embodiments, Figure 6 As shown, the two-dimensional angle measurement driving device 3 includes a horizontal rotation driving mechanism 31, a horizontal rotation axis 32, a pitch rotation driving mechanism 33, a pitch rotation axis 34 and a pitch rotation support frame 35.

[0088] Among them, the horizontal rotation drive mechanism 31 is installed in the regulating shell 22, the output end of the horizontal rotation drive mechanism 31 is connected to the horizontal rotation axis 32, the execution end of the horizontal rotation axis 32 is installed with the pitch rotation support frame 35, and the scanner shell 21 is installed on the pitch rotation support frame 35, so that the scanner shell 21 is driven by the pitch rotation support frame 35 to realize the horizontal rotation movement; the input end of the horizontal rotation drive mechanism 31 is electrically connected to the control device 6, so as to drive the horizontal rotation axis 32 to rotate under the control of the control device 6.

[0089] The output end of the pitch-swivel driving mechanism 33 is equipped with the pitch-swivel axis 34, and is installed on the pitch-rotating support frame 35. The scanner housing 21 is installed on the pitch-rotating support frame 35. The input end of the pitch-swivel driving mechanism 33 is connected to the control device 6 so that under the control of the control device 6, the pitch-swivel axis 34 is driven to rotate and drive the scanner housing 21 to realize the pitch-swivel movement.

[0090] In this embodiment, the control device 6 drives the horizontal rotation axis 32 to rotate through the horizontal rotation drive mechanism 31, and the horizontal rotation axis 32 drives the scanner housing 21 on the pitch rotation support frame 35 to achieve horizontal rotation movement, thereby driving the contact laser tracker 4 and the non-contact laser scanner 5 in the scanner housing 21 to achieve horizontal rotation movement.

[0091] The control device 6 drives the pitch rotation axis 34 to rotate through the pitch rotation driving mechanism 33, thereby driving the contact laser tracker 4 and the non-contact laser scanner 5 installed in the scanner housing 21 on the pitch rotation support frame 35 to achieve pitch rotation movement.

[0092] It can be seen that the application of the technical solution provided in this embodiment can realize high-precision rotation of the pitch axis and the horizontal axis, and ensure that the measurement optical center is concentric with the measurement component installed at the intersection of the horizontal rotation axis 32 and the pitch rotation axis 34, thereby achieving a high-precision measurement effect.

[0093] In some embodiments, Figure 6 and 7 As shown, the pitch rotation drive mechanism 33 includes a pitch motor rotor 331, a pitch motor stator 332, a pitch circular grating assembly 333, a first angular contact bearing 334, a second angular contact bearing 335, a motor mounting seat, a clamping adjustment ring 336, a pressure cover 337, a limit mounting plate 338, a bearing pre-pressure ring and a mounting cover 339.

[0094] The first angular contact bearing 334 is installed on one side of the pitch rotation axis 34, and the pitch circular grating assembly 333 is installed on the first angular contact bearing 334 and the pitch rotation axis 34 to measure the pitch rotation angle of the pitch rotation axis. The other side of the pitch rotation axis is sleeved with a bearing pre-load ring and connected to the second angular contact bearing 335. The second angular contact bearing 335 is installed with the motor mounting seat, and the motor mounting seat is installed with the pitch motor rotor. The pitch motor rotor is installed with the pitch motor stator 332 and is sleeved on the end of the pitch rotation axis. The pressure cover 337 is installed on the motor mounting seat in a manner of pressing the pitch motor stator 332. The machine mounting seat is installed on the pitch rotation support frame 35, the bearing pre-load ring is sleeved on the pitch rotation axis 34 and presses the second angular contact bearing 335, the pressing adjustment ring 336 is sleeved on the pitch rotation axis 34 and pressed in the pitch motor rotor, the limiting mounting plate 338 is limitedly set at the end of the pitch rotation axis 34, and the two mounting covers 339 cover the pitch motor rotor, the pitch motor stator 332, the pitch circular grating assembly 333, the first angular contact bearing 334, the second angular contact bearing 335, the motor mounting seat, the pressing adjustment ring 336 and the limiting mounting plate 338 and are then installed on the pitch rotation support frame 35.

[0095] In this embodiment, the first angular contact bearing 334 is named only for the convenience of distinguishing it from the angular contact bearings in the preceding and following texts, and is not used to limit a certain angular contact bearing. Correspondingly, the second angular contact bearing 335 is named only for the convenience of distinguishing it from the angular contact bearings in the preceding and following texts, and is not used to limit a certain angular contact bearing.

[0096] As an embodiment, the pitch circular grating assembly 333 includes a pitch circular grating mounting base 3331, a pitch circular grating reading head 3332 and a pitch circular grating, wherein the pitch circular grating mounting base 3331 is mounted on the pitch rotating axis 34, the pitch circular grating mounting base 3331 is mounted with the pitch circular grating, and the pitch circular grating reading head 3332 is mounted on the first angular contact bearing 334 to read the rotation angle of the pitch rotating axis 34.

[0097] In order to achieve high-precision rotation, a dual high-precision dual-contact bearing system is installed on the pitch axis mounting seat, namely the first angular contact bearing 334 and the second angular contact bearing 335. The pitch rotation axis needs to be designed with a bearing diameter at one end larger than the bearing mounting diameter at the other end to facilitate through-type installation. At the same time, a small preload force is used to preload the bearing to improve the accuracy. Both the first angular contact bearing 334 and the second angular contact bearing 335 need to use high-precision bearings, and the radial and axial runout of the inner circle must be controlled within the set accuracy range, such as 2.5μm. A pitch circular grating mounting seat 3331 is installed on one side of the pitch rotation axis 34 to support and fix the pitch circular grating. The pitch circular grating is installed on the circular grating mounting seat 3152. The coaxiality of the installation is ensured by precision machining of the circular grating mounting seat 3152. The pitch circular grating reading head 3332 on this side is installed at the end of the pitch rotation axis 34 to achieve angle measurement. A bearing preload ring is installed on the other side of the pitch rotation axis 34. The angle can be measured by adjusting the outer compression adjustment ring 336. The first angular contact bearing 334 realizes the gap adjustment, the pitch motor rotor is installed on the pitch rotating shaft 34, the pitch motor stator 332 is installed on the motor mounting seat and fixed by the pressure cover 337, and the two realize the motor driving function through cooperation; the limit mounting plate 338 is installed at one end of the pitch rotating shaft 34 to realize the limit function of the rotation angle; in addition, the wiring, direct drive torque motor installation, circular grating installation and other space requirements must also be considered, and they are protected by the installation cover after installation.

[0098] In some embodiments, Figure 6 and 8 As shown, the horizontal rotary drive mechanism 31 includes a third angular contact bearing 311, a fourth angular contact bearing 312, an intermediate main support seat 313, a bearing pressure ring 314, a horizontal circular grating measurement assembly 315, a horizontal motor stator 316 and a horizontal motor rotor 317.

[0099] Wherein, the horizontal rotary shaft sleeve is provided with the horizontal motor rotor 317, and the horizontal motor rotor 317 is installed in the horizontal motor stator 316. A horizontal circular grating measuring component 315 for measuring the rotation angle of the horizontal rotary shaft is also installed at the set position of the horizontal rotary shaft. The horizontal circular grating measuring component 315 is close to the horizontal motor rotor 317 and connected to the horizontal motor stator 316. The third angular contact bearing 311 and the fourth angular contact bearing 312 are sequentially sleeved on the horizontal rotary shaft 32 in a manner of being separated by the intermediate main support seat 313, and are installed in the intermediate main support seat 313 together with the horizontal circular grating measuring component 315, the horizontal motor stator 316 and the horizontal motor rotor 317; The bearing pressure ring 314 is sleeved on the horizontal rotating shaft in a manner of being close to the horizontal motor stator 316 and pressing the third angular contact bearing 311. The horizontal motor stator 316 is electrically connected to the control device 6 so that the horizontal rotating shaft is driven to rotate through the horizontal motor rotor 317 under the control of the control device 6. The execution end of the horizontal rotating shaft is equipped with the pitch rotation support frame 35.

[0100] In this embodiment, the third angular contact bearing 311 is named only for the convenience of distinguishing it from the angular contact bearings in the preceding and following texts, and is not used to limit a certain angular contact bearing. Correspondingly, the fourth angular contact bearing 312 is named only for the convenience of distinguishing it from the angular contact bearings in the preceding and following texts, and is not used to limit a certain angular contact bearing.

[0101] The bearing pressure ring 314 is sleeved on the horizontal rotating shaft and installed in the third angular contact bearing 311 , and can adjust the pressing force and play a positioning role for the horizontal motor stator 316 , the horizontal motor rotor 317 and the horizontal circular grating measurement component 315 .

[0102] As an embodiment, the horizontal circular grating measurement assembly 315 includes a horizontal circular grating reading head 3151, a horizontal circular grating, a reading head mounting seat and a circular grating mounting seat 3152. The circular grating mounting seat is sleeved and installed on the horizontal rotating shaft. The horizontal circular grating is installed on the circular grating mounting seat. The reading head mounting seat is installed on the fourth angular contact bearing 312. The horizontal circular grating reading head 3151 is installed on the reading head mounting seat. When the horizontal rotating shaft 32 rotates, the horizontal circular grating is driven to rotate. At this time, the rotation angle of the horizontal rotating shaft can be read by the horizontal circular grating reading head 3151. In this embodiment, in order to ensure the convenience of disassembly and assembly of the motor circular grating assembly, the horizontal motor rotor 317 and the horizontal circular grating measurement assembly 315 are installed under the horizontal rotating shaft. The horizontal motor rotor 317 realizes the horizontal driving function by cooperating with the horizontal motor stator 316. The circular grating is installed and fixed on the circular grating mounting seat at the bottom of the horizontal rotating shaft. The coaxial accuracy of the rotation is ensured by precision machining of the circular grating mounting seat 3152. In order to achieve high-precision horizontal angle measurement, a circular grating is also required as an angle sensor, and a horizontal circular grating reading head 3151 is used to correct eccentricity. As an embodiment, the selected horizontal circular grating can meet the angle measurement requirements of ±0.8″, and at the same time has a trigger reading function of the reference position signal to correct the influence of eccentricity.

[0103] In this embodiment, the horizontal rotating shaft is sleeved on the third angular contact bearing 311 and the fourth angular contact bearing 312, and can rotate independently relative to the third angular contact bearing 311 and the fourth angular contact bearing 312. The scanner shell 21 is installed on the pitch rotation support frame 35. When the horizontal rotating shaft rotates, it drives the scanner shell 21 to rotate through the pitch rotation support frame 35, thereby realizing horizontal rotation movement and pitch rotation movement.

[0104] As another embodiment, the horizontal rotating shaft is a hollow structure, and the horizontal rotating drive mechanism 31 also includes a wiring groove cover and a wiring pressure cover, wherein the wiring groove cover is arranged on the outside of the horizontal motor rotor 317 and is attached to the end of the bearing support and away from the scanner housing 21, and the wiring pressure cover is covered on the end of the horizontal rotating shaft and close to the scanner housing 21, so as to route the electronic component circuits through the wiring pressure cover and the wiring groove cover.

[0105] As another embodiment, the horizontal rotation drive mechanism 31 further includes a horizontal guide 318, which is a hollow shell structure, and a plurality of rolling elements are provided at the boss extending outward from the outer edge of the shell structure, and the shell structure is sleeved on the horizontal rotation shaft, and the rolling elements are pressed against the outer side of the intermediate main support seat 313, and can be independently rotated relative to the intermediate main support seat 313 under the drive of the horizontal rotation shaft. The horizontal guide 318 of this embodiment can guide the horizontal rotation shaft to independently rotate relative to the intermediate main support seat 313.

[0106] In this embodiment, in order to reasonably reduce the weight of components, the horizontal rotating shaft 32 adopts a hollow design; the horizontal circular grating reading head 3151, the horizontal motor stator 316, and the horizontal guide 318 are installed on the middle main support seat 313 to ensure that the rotating shaft rotates while the related components are fixed; in order to ensure the accuracy of the horizontal rotating shaft, a combined installation scheme of the top third angular contact bearing 311 and the fourth angular contact bearing 312 is adopted, and the bearing stiffness is increased by pre-tightening the bearing pressure ring 314 installed on the horizontal rotating shaft.

[0107] As an embodiment, the horizontal slewing driving mechanism 31 further includes two protective covers 319 , and the two protective covers 319 are installed on the pitch rotation support frame 35 to protect the horizontal slewing driving mechanism 31 and cables.

[0108] like Figure 8 As shown, the horizontal circular grating reading head 3151 is installed at the bottom of the middle main support seat 313 to realize the horizontal reading angle measurement function; the horizontal guide member 318 is installed at the top of the horizontal rotating shaft 32, and realizes the guiding function by moving along the arc groove on the middle main support seat 313; in order to realize the wiring of this tracking and scanning measurement system, it is convenient to avoid the use of slip rings by cable winding, and improve the communication quality. The top is designed with a cable winding space composed of two protective covers. The cable is connected to the bottom related circuit through the pitch axis mounting seat and the reserved hole of the middle support seat; the bottom is installed with a wiring groove cover to protect the cables of the bottom motor circular grating and other devices; the pitch axis mounting seat is installed at the top of the horizontal rotating shaft for installing the pitch angle drive measurement component, and the wiring pressure cover is installed at the bottom below it for disassembly and wiring. The pitch axis mounting seat and the middle main support seat 313 are both made of hard aluminum material after tempering and then rough machining, and precision machining is performed after natural failure to ensure the stability of the structure; finally, the coaxial accuracy is ensured by grinding process.

[0109] It can be seen that the tracking and scanning measurement system provided by the embodiment of the present invention includes a support frame 1, a mounting shell 2, a two-dimensional angle measurement drive device 3, a contact laser tracker 4, a non-contact laser scanner 5 and a control device 6, the two-dimensional angle measurement drive device 3 is installed in the mounting shell 2 on the support frame 1, and the tracking and scanning device 42 of the contact laser tracker 4 is arranged in the mounting shell 2; during measurement, the tracking cooperation target 41 moves on the surface to be measured 200 in a measurement method of contacting the surface to be measured 200 according to the set movement strategy, and the tracking and scanning device 42 of the contact laser tracker 4 obtains the coordinate data of the surface to be measured 200 in the target coordinate system in real time by tracking the tracking cooperation target 41; The non-contact laser scanner 5 is arranged in the mounting housing 2. When measuring, the laser is started to scan the surface to be measured 200 according to the specified scanning strategy, and the scanning point cloud data of the surface to be measured 200 in the target coordinate system is obtained in real time. In the tracking coordinate measurement mode, the control device 6 starts the tracking scanning device of the tracking cooperative target 41, and drives the tracking scanning device 42 to track the tracking cooperative target 41 in real time by controlling the two-dimensional angle measurement drive device 3 to obtain coordinate data. In the scanning measurement mode, the non-contact laser scanner 5 is started, and drives the non-contact laser scanner 5 to scan the surface to be measured 200 by controlling the two-dimensional angle measurement drive device 3 to obtain scanning point cloud data. It can be seen that this embodiment can integrate the contact laser tracker 4 and the non-contact laser scanner 5 into the same device, and can obtain point cloud data under the same coordinates. Later, the point cloud data can be directly processed by three-dimensional modeling, and there is no need to perform coordinate conversion as in the prior art. It can be seen that the technical solution provided by this embodiment can achieve fast, complete, high-precision scanning and tracking measurement through one instrument, and significantly improve the detection efficiency.

[0110] The embodiment of the present invention also provides a tracking scanning measurement platform, such as Fig. 9 As shown, the tracking scanning measurement platform includes the tracking scanning measurement system 100 and the computing and processing device 300 described in any of the above embodiments, and the computing and processing device 300 is connected to the tracking scanning measurement system to obtain coordinate data and scanning point cloud data from the tracking scanning measurement system. The computing and processing device can establish a three-dimensional model based on the coordinate data and the scanning point cloud data, which can significantly improve the modeling efficiency.

[0111] The above description is only by way of illustration of certain exemplary embodiments of the present invention. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A tracking and scanning measurement system, characterized in that: include: A contact laser tracker, comprising a tracking cooperation target and a tracking scanning device, wherein the tracking cooperation target is used to move on the surface to be measured in a manner of contacting the surface to be measured according to a set movement strategy, and the tracking scanning device is used to obtain coordinate data of a contact point between the tracking cooperation target and the surface to be measured in a target coordinate system in real time by tracking the tracking cooperation target; A non-contact laser scanner is used to scan the surface to be measured according to a set scanning strategy, and obtain the scanning point cloud data of the surface to be measured in the target coordinate system in real time; A two-dimensional angle measurement drive device, used to drive the contact laser tracker and the non-contact laser scanner; A control device is connected to the contact laser tracker, the non-contact laser scanner and the two-dimensional angle measurement drive device, and is used to control the two-dimensional angle measurement drive device to drive the tracking scanning device to track the tracking cooperation target in real time to obtain the coordinate data in the tracking coordinate measurement mode, and to control the two-dimensional angle measurement drive device to drive the non-contact laser scanner to scan the surface to be measured to obtain the scanning point cloud data in the scanning measurement mode.

2. The tracking scanning measurement system according to claim 1, characterized in that: The tracking and scanning device comprises: an interference ranging module, a target tracking module and a visual tracking module; The control device is used to determine the position information of the tracking cooperation target according to the captured image fed back by the visual tracking module in the tracking coordinate measurement mode, and send the position information of the tracking cooperation target to the two-dimensional angle measurement drive device, so as to control the two-dimensional angle measurement drive device to drive the interference ranging module to move according to the position information of the tracking cooperation target, so that the ranging laser emitted by the interference ranging module is emitted into the tracking cooperation target through the target tracking module, and during the movement of the tracking cooperation target, the emitted ranging laser is reflected to the target tracking module after passing through the tracking cooperation target; The target tracking module is used to measure the relative distance value at the current moment and the position offset value relative to the previous moment between the tracking cooperation target and the target tracking module in the target coordinate system according to the received ranging laser, and send the relative distance value at the current moment and the position offset value to the control device; The control device is also used to control the two-dimensional angle measurement drive device to drive the target tracking module to perform adaptive adjustment of the horizontal angle and the pitch angle according to the position offset value, so as to achieve tracking measurement of the tracking cooperation target by adjusting the position offset value, obtain the horizontal angle value and the pitch angle value measured by the two-dimensional angle measurement drive device, and determine the coordinate data based on the relative distance values, the horizontal angle value and the pitch angle value obtained at different times.

3. The tracking scanning measurement system according to claim 2, characterized in that: The target tracking module includes: a lens assembly and a position sensing tracker; The lens assembly is arranged at the light incident side of the position sensing tracker, and the lens assembly processes the optical signal of the ranging laser emitted by the interference ranging module, so that a part of the ranging laser after processing is emitted into the tracking cooperation target and then reflected to the lens assembly and another part of the ranging laser is transmitted through the lens assembly to form an interference signal and emitted into the position sensing tracker; The position sensing tracker is used to measure the position of the light spot formed by the incident ranging laser, determine the position offset value between the tracking cooperation target and the lens assembly at the current moment relative to the previous moment in the target coordinate system, and send the position offset value to the control device; The control device is used to adaptively adjust the horizontal angle and the pitch angle according to the relative distance value and the position offset value, so as to achieve tracking measurement of the tracking cooperation target by adjusting the position offset value, obtain the horizontal angle value and the pitch angle value measured by the two-dimensional angle measurement drive device, and determine the coordinate data based on the relative distance value, the horizontal angle value and the pitch angle value obtained at different times.

4. The tracking scanning measurement system according to claim 3, characterized in that: The lens assembly comprises: a first optical fiber collimator, a beam splitter and a collimator group; The ranging laser emitted by the interference ranging module is focused into a beam of parallel light signal by the first fiber collimator and then incident on the beam splitter. A portion of the ranging laser of the parallel light signal is incident on the tracking cooperation target through the beam splitter and then reflected and incident on the beam splitter, and forms an interference light signal with another portion of the ranging laser that is incident on the position sensing tracker. The collimator group is arranged between the first optical fiber collimator and the beam splitter, and is used for performing beam expansion processing on the parallel light signal emitted by the first optical fiber collimator and then injecting the parallel light signal into the beam splitter.

5. The tracking scanning measurement system according to claim 4, characterized in that: The interferometric ranging module includes a helium-neon laser assembly, a second optical fiber collimator, a beam splitter, an optical fiber reflector and a detector; Wherein, the second fiber collimator is arranged on the light-emitting side of the helium-neon laser assembly, the beam splitter is arranged on the light-emitting side of the second fiber collimator, and the fiber reflector and the detector are respectively arranged on the light-emitting side of the beam splitter; The laser signal emitted by the helium-neon laser assembly is focused into a beam of parallel light signals by the second fiber collimator and then emitted into the beam splitter. A portion of the ranging laser is emitted into the fiber reflector, and another portion of the ranging laser is emitted into the beam splitter through the beam splitter to form an interference signal with the ranging laser emitted into the beam splitter by the fiber reflector. A portion of the ranging laser is emitted into the first fiber collimator, and another portion of the ranging laser is emitted into the detector. The control device is used to control the He-Ne laser component to turn on or off, and to control the He-Ne laser component to emit a laser signal through the electrical signal fed back by the detector after detecting the ranging laser.

6. The tracking scanning measurement system according to claim 5, characterized in that: The helium-neon laser assembly comprises: a helium-neon laser, a switch circuit, a heating wire and a temperature sensor; The heating wire is wound around the outer side of the helium-neon laser and is electrically connected to the switch circuit. The temperature sensor is attached to the outer side of the helium-neon laser to measure the temperature of the helium-neon laser in real time and send the temperature measurement result to the control device in the form of a temperature electrical signal. The control device is used to control the He-Ne laser to emit a laser signal, so as to determine whether to heat the He-Ne laser by using the heating wire by controlling the switching circuit during the laser signal emission process according to the electrical signal fed back by the detector and the temperature electrical signal sent by the temperature sensor, so as to maintain the temperature of the He-Ne laser within a set range.

7. The tracking scanning measurement system according to any one of claims 4 to 6, characterized in that: The non-contact laser scanner comprises: a scanning vision module and a frequency sweeping absolute non-contact distance measurement module; The scanning vision module is used to photograph the area to be measured in a panoramic manner and send the photographed area to be measured to the control device; The control device is used to control the scanning vision module and the frequency sweeping absolute non-contact ranging module to perform scanning path planning on the area to be measured in the scanning measurement mode to obtain a scanning path planning strategy, and send the scanning path planning strategy to the frequency sweeping absolute non-contact ranging module; The frequency sweeping absolute non-contact distance measurement module is used to measure the absolute distance value between the surface to be measured and the frequency sweeping absolute non-contact distance measurement module during the scanning process, and send the absolute distance value to the control device; The control device is also used to control the two-dimensional angle measurement drive device according to the absolute distance value to drive the scanning vision module to scan the area to be measured according to the scanning path planning strategy, so as to converge light energy through zooming to adapt to scanning at different distances.

8. The tracking scanning measurement system according to claim 7, characterized in that: The frequency sweeping absolute non-contact distance measurement module comprises an external cavity resonant laser, a measuring interferometer, a first coupler, an auxiliary interferometer, a third optical fiber collimator and a distance measurement signal processing unit; The first coupler is placed on the light output side of the external cavity resonant laser, the measuring interferometer is arranged on one light output side of the first coupler, the auxiliary interferometer is arranged on the other light output side, the measuring interferometer is electrically connected to the ranging signal processing unit, the third fiber optic collimator is arranged on the light output side of the measuring interferometer, and the swept frequency absolute non-contact ranging module is arranged on the light output side of the third fiber optic collimator; The ranging signal processing unit is used to control the external cavity resonant laser to emit a laser signal, so that the laser signal is divided into two paths after being processed by the first coupler, one optical signal is emitted into the measuring interferometer after being processed by the measuring interferometer, and then emitted to the third optical fiber collimator for focusing processing and then emitted into the swept frequency absolute non-contact ranging module, and the received optical signal fed back by the swept frequency absolute non-contact ranging module is subjected to measurement light interference processing, and the processed measurement light interference signal is sent to the ranging signal processing unit; the other optical signal enters the auxiliary interferometer for clock interference processing, and the processed clock light interference signal is emitted into the ranging signal processing unit; The distance measurement signal processing unit is further used to determine the absolute distance value according to the measurement light interference signal and the clock light interference signal, so as to adjust the frequency of the laser signal emitted by the external cavity resonant laser according to the absolute distance value.

9. The tracking scanning measurement system according to claim 8, characterized in that: The measuring interferometer comprises a first balanced detector, a second coupler, a first 3dB coupler and a circulator; The light input port of the second coupler is arranged at the light output port of the first coupler, the first light output port of the second coupler is arranged at the first light input port of the first 3dB coupler, the second light output port of the second coupler is arranged at the first light input port of the circulator, the first light output port of the circulator is aligned with the third fiber collimator, the second light input port of the circulator receives the laser signal emitted by the third fiber collimator, the second light output port of the circulator is arranged at the second light input port of the 3dB coupler, the light output port of the first 3dB coupler is arranged at the first balanced detector, and the first balanced detector is electrically connected to the ranging signal processing unit to send a measuring light interference signal to the ranging signal processing unit.

10. The tracking scanning measurement system according to claim 8, characterized in that: The auxiliary interferometer includes a third coupler, a second 3dB coupler, a second balanced detector and an optical interferometer; The light input port of the third coupler is arranged at the first light output port of the first coupler, the light output port of the third coupler is arranged at the light input port of the second 3dB coupler through the optical interferometer, the light output port of the second 3dB coupler is arranged at the light input port of the second balanced detector, and the second balanced detector is electrically connected to the ranging signal processing unit to send a clock optical interference signal to the ranging signal processing unit.

11. The tracking scanning measurement system according to claim 8, characterized in that: The tracking scanning measurement system further comprises a constant temperature box, in which the auxiliary interferometer is installed, and is used to maintain the temperature of the auxiliary interferometer; The thermostatic box comprises an internal optical fiber installation box, an optical fiber connection seat, an internal insulation box, an internal temperature control board, an external metal box, an external temperature control board, an outer heat-insulating cover and a bottom heat-dissipating connector; the internal optical fiber installation box is provided with an optical fiber connection seat for connecting optical fibers and an optical fiber winding piece for winding optical fibers, the bottom of the internal insulation box is provided with a mounting hole for placing the internal temperature control board, and the bottom of the external metal box is provided with a mounting hole for placing the external temperature control board; The auxiliary interferometer is placed in the internal optical fiber installation box, the internal optical fiber installation box is arranged in the internal insulation box, the internal temperature control board is installed in the installation hole at the bottom of the internal insulation box and is arranged in the external metal box, the external metal box is installed in the outer thermal insulation cover, the external temperature control board is installed in the installation hole at the bottom of the outer thermal insulation box, the bottom heat dissipation connector is installed at the bottom of the outer thermal insulation cover, and is used to contact with the external temperature control board, so as to guide the heat in the internal optical fiber installation box to the bottom heat dissipation connector for heat dissipation by using the internal temperature control board and the external temperature control board with the help of the external metal box; The outer thermal insulation cover is covered in the inner optical fiber installation box, and the bottom heat dissipation connector is adhered to the outer end surface of the outer thermal insulation cover and is sealed in the inner optical fiber installation box together with the outer thermal insulation cover.

12. The tracking scanning measurement system according to claim 7, characterized in that: The scanning vision module includes a fourth optical fiber collimator, a zoom lens group and a zoom lens; The zoom lens, the zoom lens group and the fourth fiber optic collimator are arranged in sequence according to the input and output of the light signal. The fourth fiber optic collimator is close to the first fiber optic collimator. The zoom lens group is installed on the two-dimensional angle measurement drive device so that the two-dimensional angle measurement drive device drives the zoom lens group to achieve zooming.

13. The tracking scanning measurement system according to claim 7, characterized in that: The tracking scanning measurement system also includes: an optical fiber switch, which connects the frequency sweeping absolute non-contact ranging module and the interference ranging module, and the control device is used to control the optical fiber switch to connect the frequency sweeping absolute non-contact ranging module and the target tracking module after the ranging laser emitted by the interference ranging module to the tracking cooperative target is blocked and the light is cut off in the tracking coordinate measurement mode, and measure the initial value of the absolute distance from the tracking cooperative target to the frequency sweeping absolute non-contact ranging module after the light is cut off and resumed, and correct the relative distance value between the tracking cooperative target and the lens assembly of the target tracking module in the target coordinate system after the light is cut off and resumed through the absolute distance initial value.

14. The tracking scanning measurement system according to any one of claims 2 to 4, characterized in that: The visual tracking module comprises: a telephoto objective lens, a telephoto objective lens pressure ring, a telephoto lens group, an inner lens barrel, a relay lens, an imaging lens group, an outer lens barrel and an imaging CCD lens group; Wherein, bosses for mounting the telescope group, the relay lens and the imaging lens group are sequentially arranged in the inner lens barrel at specified distances; The telephoto objective lens is arranged in the telephoto objective lens pressure ring, and the telephoto objective lens pressure ring is sleeved on the inner lens barrel assembly. The corresponding telephoto lens group, relay lens and imaging lens group are installed in sequence at each boss of the inner lens barrel, and the telephoto lens group is close to the telephoto objective lens pressure ring. The outer lens barrel is sleeved on the outer side of the inner lens barrel, and the imaging CCD lens group is installed at the end of the outer lens barrel away from the telephoto objective lens.

15. The tracking scanning measurement system according to any one of claims 1 to 4, characterized in that: The two-dimensional angle measurement drive device comprises a horizontal rotation drive mechanism, a horizontal rotation axis, a pitch rotation drive mechanism, a pitch rotation axis and a pitch rotation support frame; The output end of the horizontal rotation drive mechanism is connected to the horizontal rotation axis, the execution end of the horizontal rotation axis is installed with the pitch rotation support frame, and the input end of the horizontal rotation drive mechanism drives the horizontal rotation axis to rotate under the control of the control device; The output end of the pitch-swivel driving mechanism is equipped with the pitch-swivel axis and is installed on the pitch-rotating support frame. The input end of the pitch-swivel driving mechanism drives the pitch-swivel axis to rotate under the control of the control device.

16. The tracking scanning measurement system according to claim 15, characterized in that: The pitch rotation drive mechanism comprises a pitch motor rotor, a pitch motor stator, a pitch circular grating assembly, a first angular contact bearing, a second angular contact bearing, a motor mounting seat, a clamping adjustment ring, a pressure cover, a mounting cover, a limit mounting plate and a bearing pre-compression ring; The first angular contact bearing is installed on one side of the pitch rotation axis, the pitch circular grating assembly is installed on the first angular contact bearing and the pitch rotation axis to measure the pitch rotation angle of the pitch rotation axis, the other side of the pitch rotation axis is sleeved with a bearing pre-load ring and then connected to the second angular contact bearing, the second angular contact bearing is installed with the motor mounting seat, the motor mounting seat is installed with the pitch motor rotor, the pitch motor rotor is installed with the pitch motor stator and is sleeved on the end of the pitch rotation axis, the pressure cover is installed on the motor mounting seat in a manner of pressing the pitch motor stator The motor mounting seat is installed on the pitch rotation support frame, the bearing pre-load ring is sleeved on the pitch rotation axis and presses the second angular contact bearing, the pressing adjustment ring is sleeved on the pitch rotation axis and presses in the pitch motor rotor, the limit mounting plate is limit-set at the end of the pitch rotation axis, and the two mounting covers cover the pitch motor rotor, the pitch motor stator, the pitch circular grating assembly, the first angular contact bearing, the second angular contact bearing, the motor mounting seat, the pressing adjustment ring and the limit mounting plate and are then installed on the pitch rotation support frame.

17. The tracking scanning measurement system according to claim 15, characterized in that: The horizontal rotary drive mechanism comprises a third angular contact bearing, a fourth angular contact bearing, an intermediate main support seat, a bearing pressure ring, a horizontal circular grating measurement component, a horizontal motor stator and a horizontal motor rotor; Among them, the horizontal rotating shaft sleeve is provided with the horizontal motor rotor, and the horizontal motor rotor is installed in the horizontal motor stator. A horizontal circular grating measuring component for measuring the rotation angle of the horizontal rotating shaft is also installed at the set position of the horizontal rotating shaft. The horizontal circular grating measuring component is close to the horizontal motor rotor and connected to the horizontal motor stator. The third angular contact bearing and the fourth angular contact bearing are sequentially sleeved on the horizontal rotating shaft in a manner of being separated by the intermediate main support seat, and are installed in the intermediate main support seat together with the horizontal circular grating measuring component, the horizontal motor stator and the horizontal motor rotor; the bearing pressure ring is sleeved on the horizontal rotating shaft in a manner of being close to the horizontal motor stator and pressing the third angular contact bearing. The horizontal motor stator drives the horizontal rotating shaft to rotate through the horizontal motor rotor under the control of the control device; the execution end of the horizontal rotating shaft is installed with the pitch rotation support frame.

18. The tracking scanning measurement system according to claim 15, characterized in that: Also includes: A support frame and a mounting shell mounted on the support frame; The installation housing includes a scanner housing and a control housing, and the control device, the contact laser tracker and the non-contact laser scanner are all installed in the scanner housing; The horizontal rotation driving mechanism is installed in the regulating shell, and the execution end of the horizontal rotation axis is installed with the scanner shell to drive the scanner shell to realize the horizontal rotation movement.

19. The tracking scanning measurement system according to any one of claims 1 to 4, characterized in that: The tracking cooperation target is a pyramid target ball.

20. A tracking and scanning measurement platform, characterized in that: It comprises the tracking scanning measurement system and computing and processing equipment described in any one of claims 1 to 19, wherein the computing and processing equipment is connected to the tracking scanning measurement system to obtain coordinate data and scanning point cloud data of the surface to be measured from the tracking scanning measurement system.

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