Device and method for detecting and analyzing output stability of laser system

Abstract

The invention discloses a laser system output stability detection and analysis device and method. The device comprises an optical property detection unit and an optical property analysis unit which are in light path connection. The optical characteristic detection unit comprises a spectroscope (20), a beam shrinking mirror (21), a position sensitive detector (22), a focusing lens array (23) and a CCD camera (24) which are sequentially connected through an optical path; the optical characteristic analysis unit comprises a processor (30) and a controller (31), the controller (31) receives a processing result of the processor (30), and when the processing result of the processor (30) exceeds a set requirement of the laser system, the controller (31) sends alarm information to the laser system (10). According to the invention, the information of the laser beam position, the laser beam pointing direction and the light beam wavefront change of the laser system is measured at the same time, the influence of the light beam wavefront change on the measurement of the laser beam position and the laser beam pointing direction is eliminated, and the measurement precision of the laser beam position and the laser beam pointing direction is improved.

Description

Technical Field

[0001] The present invention belongs to the field of optical engineering technology, and more specifically, relates to a laser system output stability detection and analysis device and method. Background Art

[0002] In laser systems such as laser space communication, laser etching, and laser micromachining, after the laser beam output by the laser system is transformed and transmitted through optical devices such as lenses and reflectors in the laser system, the laser beam will shift in position and direction due to the jitter and position change of the optical components in the laser system and the vibration of the external environment. At the same time, the wavefront change of the beam in the laser system will cause the wavefront distortion of the laser beam, making the laser beam quality worse, reflecting whether the laser system can continue to work under the laser output conditions, and seriously affecting the performance indicators and stability of the laser system. Therefore, it is particularly important to perform high-precision real-time detection of the laser beam output position, beam pointing, and beam wavefront change in the laser system.

[0003] As laser systems rapidly develop towards high power, high precision, and high stability, the requirements for laser beam output accuracy, stability, and reliability in laser systems are becoming increasingly higher. At present, the detection method for laser beam output position and beam pointing adopts spectroscopic detection, which measures the laser beam output position and laser beam pointing respectively, but cannot detect and analyze the beam wavefront variation in the laser system, so that the laser beam output position and beam pointing measurement values ​​contain the error of the beam wavefront variation, which reduces the detection accuracy of the laser beam output position and laser beam pointing, and cannot screen out the index parameters that can reflect the stable operation of the laser system. Summary of the invention

[0004] In view of the above defects or improvement needs of the prior art, the present invention provides a laser system output stability detection and analysis device and method, which simultaneously measures three aspects of information of the laser system: laser beam position, laser beam pointing and beam wavefront variation. The measurement of laser beam position and laser beam pointing eliminates the influence of beam wavefront variation, thereby improving the measurement accuracy of laser beam position and laser beam pointing.

[0005] In order to achieve the above-mentioned object, according to a first aspect of the present invention, a laser system output stability detection and analysis device is provided, comprising an optical characteristic detection unit and an optical characteristic analysis unit connected in an optical path; wherein:

[0006] The optical property detection unit comprises a beam splitter, a beam reducer, a position sensitive detector, a focusing lens array and a CCD camera connected in sequence in an optical path, the laser beam is divided into transmitted light and reflected light by the beam splitter, the transmitted light is irradiated on the position sensitive detector after being reduced by the beam reducer, and the reflected light is focused on the CCD camera by the lens array;

[0007] The optical characteristic analysis unit includes a processor and a controller. The processor collects the light beam signals detected by the position sensitive detector and the CCD camera and performs data processing to analyze whether the laser beam position, laser beam pointing offset and beam wavefront change in the laser system exceed the requirements. The controller receives the processing result of the processor. When the processing result of the processor exceeds the set requirements of the laser system, the controller sends an alarm message to the laser system.

[0008] Furthermore, the optical property detection unit also includes a sampling mirror arranged between the laser system and the spectroscope, and the laser beam output by the laser system is divided into a first transmission beam and a first reflection beam through the sampling mirror.

[0009] Furthermore, the first transmitted light beam is split into a second transmitted light beam and a second reflected light beam by a beam splitter.

[0010] Furthermore, the second transmitted light beam is irradiated onto a position sensitive detector after being reduced by the reduction mirror.

[0011] Furthermore, the second reflected light beam is focused on a CCD camera through the lens array.

[0012] According to a second aspect of the present invention, a method for detecting and analyzing the output stability of a laser system is provided, which is implemented by using the device for detecting and analyzing the output stability of a laser system, and comprises:

[0013] S100: The laser system outputs a laser beam which is divided into a first reflected beam and a first transmitted beam by a sampling mirror, and the first transmitted beam is divided into a second transmitted beam and a second reflected beam by a beam splitter;

[0014] S200: The second transmitted light beam is reduced by a beam reducer and irradiated onto a position sensitive detector, the second reflected light beam is focused onto a CCD camera via a lens array, and the position sensitive detector and the CCD camera transmit measurement data of the light beam to a processor;

[0015] S300: The processor processes the measurement data to obtain the laser beam position offset, laser beam pointing offset and beam wavefront variation information in the optical path, and analyzes the stability of the laser system;

[0016] S400: When the processing result of the processor exceeds the set requirements of the laser system, the controller sends an alarm message to the laser system, and the operator controls the laser system to shut down or continue to run through the controller.

[0017] Further, in step S200, the beam reducing mirror reduces the second transmitted light beam, and the reduced laser beam is irradiated on the position sensitive detector, and the position sensitive detector measures the position information (ΔX n ,ΔY n )for:

[0018] ΔX n =X n -X0

[0019] ΔY n =Y n -Y0

[0020] Among them, X0 and Y0 are the calibration positions of the light spot of the reduced beam on the position sensitive detector for the beam position, X n , Y n are the light spot positions collected by the position sensitive detector respectively.

[0021] Further, in step S200, the lens array focuses the second reflected light, the CCD camera is placed at the focal position of the lens array, and the CCD camera detects the second reflected light focused spot array formed by the lens array;

[0022] The lens array directs the laser beam for:

[0023]

[0024]

[0025] Where D is the diameter of the lens array sub-lens, f is the focal length of the lens array, and X ij , Y ij are the coordinate positions of the light spot array in the CCD camera, i and j are the pixel numbers, and n is the total number of pixels.

[0026] Furthermore, in step S300, the processor receives the laser beam position information measured by the position sensitive detection and the second reflected light focus spot array information detected by the CCD camera, and processes the received measurement data to calculate the laser beam position offset, laser beam pointing offset and beam wavefront change.

[0027] Furthermore, the laser beam position offset for:

[0028]

[0029]

[0030] Among them, X ij (t0), Y ij (t0) are the calibration positions of the light spot array in the camera, X ij (t), Y ij (t) are the positions of the light spot array captured by the CCD camera.

[0031] In general, the above technical solutions conceived by the present invention can achieve the following beneficial effects compared with the prior art:

[0032] 1. The device of the present invention simultaneously measures three aspects of information of the laser system, namely, the laser beam position, the laser beam pointing and the beam wavefront variation. The measurement of the laser beam position and the laser beam pointing eliminates the influence of the beam wavefront variation, thereby improving the measurement accuracy of the laser beam position and the laser beam pointing.

[0033] 2. The device of the present invention has the ability to measure the wavefront variation of the light beam in the laser system, and ensures the stability and reliability of the operation of the laser system by measuring the real-time changes of the optical elements during the working process.

[0034] 3. The device of the present invention can realize high-precision detection of the output laser beam position and laser beam pointing of the laser system, and can measure and analyze the deformation of the optical element to determine the stability and reliability of the laser system.

[0035] 4. The device of the present invention pays special attention to the design of the optical path between the beam reducer and the position-sensitive detector. The position and angle of the beam reducer are precisely adjusted to ensure that the beam can be irradiated onto the detector under optimal incident conditions. The optical axis of the beam reducer is strictly aligned with the detection surface of the position-sensitive detector to avoid measurement errors caused by beam offset or scattering.

[0036] 5. In the method of the present invention, the laser beam output by the laser system is divided into a first reflected beam and a first transmitted beam through a sampling mirror, the first transmitted beam is divided into a second transmitted beam and a second reflected beam through a beam splitter, the second transmitted beam is reduced by a beam reducer and irradiated on a position sensitive detector, the second reflected beam is focused on a CCD camera through a lens array, the position sensitive detector and the CCD camera transmit the measurement data of the beam to the processor, the processor processes the measurement data to obtain the laser beam position offset, laser beam pointing offset and beam wavefront variation information in the optical path, analyzes the stability of the laser system, and when the processing result of the processor exceeds the set requirements of the laser system, the controller sends an alarm message to the laser system, and the operator controls the laser system to be shut down or continue to run through the controller. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 A schematic diagram of the composition of a laser system output stability detection and analysis device according to an embodiment of the present invention;

[0038] Figure 2 Schematic diagram of the laser position measurement optical path in an embodiment of the present invention;

[0039] Figure 3 This is an optical schematic diagram of laser pointing and beam wavefront variation measurement in an embodiment of the present invention;

[0040] Figure 4 This is a schematic diagram of a process in which a position sensitive detector collects the position of a reduced beam and uploads it to a processor in an embodiment of the present invention;

[0041] Figure 5 This is a schematic diagram of the measurement data processing flow in an embodiment of the present invention;

[0042] Figure 6 The present invention is a flowchart of a method for detecting and analyzing the output stability of a laser system according to an embodiment of the present invention.

[0043] In all the drawings, the same reference numerals represent the same technical features, specifically: 10 - laser system, 11 - sampling mirror, 20 - beam splitter, 21 - beam reducer, 22 - position sensitive detector, 23 - focusing lens array, 24 - CCD camera, 30 - processor, 31 - controller. DETAILED DESCRIPTION

[0044] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0045] Example 1

[0046] like Figure 1As shown, the present invention is composed of an optical characteristic detection unit and an optical characteristic analysis unit. The optical characteristic detection unit realizes high-precision detection of the laser beam output position and beam pointing of the laser system and measurement of the wavefront variation of the beam, and is composed of a beam splitter 20, a beam reducer 21, a position sensitive detector 22, a focusing lens array 23, and a CCD camera 24; the optical characteristic analysis unit collects and processes the information detected by the position sensitive detector 22 and the CCD camera 24, realizes analysis of the laser beam output characteristics of the laser system and control of the laser system, and is composed of a processor 30 and a controller 31. The first transmitted light is split for the second time by the beam splitter 20, and the second transmitted light is reduced after passing through the beam reducer 21. The second transmitted light after reduction is irradiated on the position sensitive detector 22; the second reflected light is focused by the focusing lens array 23, and the second reflected light forms a focused beam array and irradiates on the CCD camera 24. The detection data of the position sensitive detector 22 and the CCD camera 24 are uploaded to the processor 30 for processing and analysis, and the measurement results of the laser beam position, laser beam pointing, and laser system beam wavefront variation are obtained to judge whether the setting requirements of the laser system 10 are met. When the setting indicators of the laser system are not met, the controller 31 sends an alarm message to the laser system 10. The device of the present invention measures the three aspects of information of the laser beam position, laser beam pointing, and beam wavefront variation of the laser system at the same time, and eliminates the influence of the beam wavefront variation in the measurement of the laser beam position and laser beam pointing, thereby improving the measurement accuracy of the laser beam position and laser beam pointing.

[0047] like Figure 2As shown, in the optical property detection device of the present invention, the beam reduction mirror 21 performs key optical processing on the second transmitted light, compressing the original laser beam with a larger diameter into a reduced beam with a smaller diameter, laying the foundation for subsequent high-precision detection. Through the beam reduction process, not only can the influence of laser beam diffusion on the detection equipment be effectively reduced, but also the focusing ability of the beam on the position sensitive detector 22 can be significantly improved, thereby improving the accuracy of the measurement. In the specific working process, the design and performance of the beam reduction mirror 21 are crucial. It is usually made of high-quality optical materials with excellent transmittance and anti-reflection properties to reduce optical loss and interference. In addition, the optical parameters of the beam reduction mirror are accurately calculated and debugged to ensure that it can achieve uniform contraction of the beam diameter during the beam reduction process and keep the beam quality intact. The beam after beam reduction is optimized and can concentrate energy in a smaller area, thereby enhancing the signal strength and resolution in the subsequent detection steps. After passing through the beam reduction mirror, the reduced beam is accurately guided to the position sensitive detector 22. The position sensitive detector is a highly sensitive optical detector specifically used to measure the spatial position change of the beam. The detector can capture the spot position of the reduced beam on the detection surface in real time, and calculate the center position of the spot through its internal detection mechanism, so as to obtain the beam position data of the second transmitted light. This process relies on the high-precision response and fast computing ability of the position-sensitive detector, which can complete the measurement and output the results within milliseconds. The working principle of the position-sensitive detector is based on photoelectric conversion technology. When the reduced beam irradiates the detector surface, the photosensitive element inside the detector will generate a corresponding electrical signal, and the strength and distribution of the signal are directly related to the position of the spot on the detection surface. By processing and analyzing the electrical signal, the detector can accurately locate the center position of the spot and output it in the form of high-resolution coordinates. This high-precision position detection method can adapt to changes in beam position with a large dynamic range, and has excellent anti-interference ability, and can provide stable and reliable measurement results even in complex optical environments. In order to ensure the accuracy of detection, the present invention pays special attention to the design of the optical path between the reduction mirror 21 and the position-sensitive detector 22. The position and angle of the reduction mirror are precisely adjusted to ensure that the reduced beam can be irradiated onto the detector under the best incident conditions. The optical axis of the beam reducer is strictly aligned with the detection surface of the position-sensitive detector to avoid measurement errors caused by beam offset or scattering. In addition, to further improve the stability of detection, the outside of the device is usually equipped with an anti-vibration structure and a dust-proof device to reduce the interference of the external environment on the optical detection process. Through this complete set of designs and working mechanisms, the optical detection device of the present invention not only achieves high-precision measurement of the beam position, but also has excellent real-time performance and reliability. This device can be applied to a variety of scenarios that require precision optical measurement, such as laser cutting, optical laboratory research, and military laser system monitoring.In the field of laser cutting, precise control of beam position is directly related to processing accuracy and product quality; in optical laboratory research, beam position measurement provides important basic data for scientific experiments; in the military field, the stability and accuracy of the laser system are key factors in ensuring combat effectiveness.

[0048] The beam reducer 21 is designed as a beam reducer system with an adjustable beam reduction ratio. By adjusting the beam reduction ratio, it can adapt to the second transmission beam of different diameters, thereby expanding the scope of application of the optical property detection unit, especially showing excellent performance when processing large-diameter laser beams. The core of the system is to achieve flexible adjustment of the beam diameter through an adjustable structure to meet diverse application requirements. The adjustable beam reducer system consists of multiple groups of optical elements, such as an adjustable lens group or a zoom lens group, and its optical spacing, focal length and other parameters can be adjusted according to actual needs. The user adjusts the beam reduction ratio of the beam reducer through a mechanical or electronic control system, so that the device can achieve efficient beam reduction processing within a range of different laser beam diameters. When the input beam diameter is large, the beam reducer can compress the beam diameter through a higher beam reduction ratio to reach a range suitable for detection; for small-diameter laser beams, the beam distortion can be reduced by reducing the beam reduction ratio, thereby maintaining the integrity of the beam quality. This design greatly improves the versatility and adaptability of the device. Traditional fixed beam reduction ratio optical systems are usually only applicable to laser beams within a specific diameter range, and cannot meet the needs of multi-scenario and multi-specification laser systems. The present invention introduces an adjustable beam reduction ratio function to ensure that the same device can complete the beam reduction and position detection tasks with optimal performance when facing different types of laser systems. In specific application scenarios, such as industrial laser processing, scientific research experiments, and military laser equipment, the laser beam diameter may vary depending on application requirements. The beam reduction ratio adjustable beam reduction mirror system of the present invention can be dynamically adjusted according to these differences, so that the optical property detection unit has higher flexibility and accuracy in the detection of large-diameter laser beams. At the same time, the design also provides technical support for the upgrade and expansion of laser systems, and demonstrates important value in the development of new lasers. In addition, the adjustable beam reduction mirror system is designed with full consideration of stability and ease of operation. By integrating an intelligent control system, users can quickly adjust the beam reduction ratio to avoid cumbersome manual adjustment processes, while ensuring that high-precision optical performance is maintained during dynamic adjustments. This innovation not only makes the optical property detection device more functional, but also reflects high ease of use in actual operation.

[0049] like Figure 3As shown, the lens array 23 in the present invention is used to decompose and focus the second reflected light into sub-beam arrays, which are then guided to the CCD camera 24 for detection. The CCD camera captures the central position information of the sub-beam array spot to achieve high-precision measurement of the beam wavefront characteristics and focusing state. This design makes full use of the optical properties of the lens array and the high-resolution detection capability of the CCD camera to construct an efficient and stable optical property monitoring mechanism. The lens array 23 is composed of a plurality of lens units, and the focal length and spacing of each lens unit are precisely designed to ensure that the second reflected light is decomposed into sub-beams with uniform distribution and fixed intervals after passing through the lens array. This design of the lens array can effectively disperse the light energy so that each sub-beam maintains independent optical properties, thereby avoiding interference between beams, and enhancing the sensitivity to changes in the beam wavefront and pointing. The focused sub-beam array spots are regularly distributed in space, and this regularity provides a clear reference for subsequent measurement and analysis. As the core component for optical property detection, the CCD camera 24 can accurately image the sub-beam array. The built-in photosensitive unit of the camera can capture the intensity distribution and center position of the light spot in real time and output it in the form of a high-resolution digital signal. By accurately measuring the center position of the light spot of the sub-beam array, the change of the light beam wavefront and the pointing offset information can be derived. Compared with the traditional single-point detection method, this multi-point detection method based on the sub-beam array significantly improves the measurement accuracy and anti-interference ability, especially in the measurement of dynamic wavefront changes. In addition, the design has also been optimized in terms of the stability of the optical path and the reliability of data analysis. The relative position and angle between the lens array 23 and the CCD camera 24 are strictly calibrated to ensure that the sub-beam array can completely cover the CCD photosensitive area and avoid detection blind spots or signal distortion. At the same time, the light spot data collected by the CCD camera is analyzed by an efficient processing algorithm, which can quickly extract the center information of the light spot and output the wavefront characteristic parameters. This combination of real-time and high precision provides a strong guarantee for the dynamic monitoring and precise control of the laser system. The design of this system is not only suitable for optical measurement in laboratory environments, but can also be extended to fields such as industrial processing and military equipment. In laser processing, the combination of lens array and CCD camera can accurately adjust the focusing state of the light beam and improve the processing accuracy; in optical experiments, the device can help researchers monitor the output stability of the laser in real time; in military applications, this design helps to improve the performance and reliability of laser weapons and sensor systems. The CCD camera 24 can be fixed on a high-precision mobile platform, and the mobile platform drives the CCD camera 24 to move on the focal plane of the focused beam array, so that the optical property detection unit can adapt to the second reflected light of different diameters, and realize the detection of large-diameter laser beam pointing and large-caliber laser system beam wavefront change.

[0050] like Figure 4As shown, the present invention realizes comprehensive monitoring and dynamic feedback control of the multi-dimensional characteristics of the laser system through the coordinated detection of the position sensitive detector 22 and the CCD camera 24, combined with the intelligent analysis and control of the processor 30 and the controller 31. This design plays an important role in ensuring the stability, accuracy and real-time response capability of the laser system performance, and is an innovative solution in the field of laser technology application. The position sensitive detector 22 is responsible for collecting the position information of the reduced beam and is the core component for realizing the position monitoring of the laser beam. After the reduction mirror 21 processes the second transmitted light into a reduced beam, the beam is projected to the photosensitive area of ​​the position sensitive detector. The detector senses the center position of the beam spot through photoelectric conversion technology, and converts the information into a digital signal and uploads it to the processor 30. After receiving the position signal, the processor uses an efficient calculation model to analyze the spatial position of the beam, and compares and judges the result with the set requirements of the laser system. If the laser beam position exceeds the set error range (such as deviating from the processing path or exceeding the optical tolerance), the processor will immediately generate an abnormal signal and transmit it to the controller 31. The CCD camera 24 is responsible for collecting information on the focused beam array for detecting laser beam pointing and wavefront changes. The lens array 23 decomposes and focuses the second reflected light into multiple sub-beam arrays, and the distribution and characteristics of the light spot reflect the wavefront state of the laser beam. The CCD camera captures the beam array image through a high-resolution photosensitive unit and uploads it to the processor 30 for data analysis. The processor extracts the center position and intensity distribution of the light spot of each sub-beam, and derives the pointing angle and wavefront change parameters of the laser beam. This multi-point measurement method has higher accuracy and anti-interference ability than the traditional single-point measurement method, especially in dynamic laser systems. The processor 30 and the controller 31 are the intelligent core of this device, and the real-time, accurate and intelligent functions are achieved through the collaborative work of the two. The processor is not only responsible for processing the collected data, but also comprehensively evaluates the position, pointing and wavefront changes of the laser beam through the built-in algorithm model. If these parameters exceed the set requirements, for example, the laser beam position offset may affect the processing accuracy, or the wavefront change affects the beam focusing quality, the processor will immediately generate an alarm signal and send it to the controller 31. After receiving the signal, the controller can perform a variety of response measures, including issuing audible and visual alarm prompts to the operator, controlling the laser system to automatically adjust output parameters, and even triggering an emergency shutdown procedure when necessary to ensure system safety.

[0051] Example 2

[0052] like Figure 6 As shown, in another embodiment of the present invention, a method for detecting and analyzing the output stability of a laser system is provided, which is implemented by applying the above-mentioned device for detecting and analyzing the output stability of a laser system, and includes:

[0053] S100: The laser system outputs a laser beam which is divided into a first reflected beam and a first transmitted beam by a sampling mirror, and the first transmitted beam is divided into a second transmitted beam and a second reflected beam by a beam splitter;

[0054] S200: The second transmitted light beam is reduced by a beam reducer and irradiated onto a position sensitive detector, the second reflected light beam is focused onto a CCD camera via a lens array, and the position sensitive detector and the CCD camera transmit measurement data of the light beam to a processor;

[0055] In step S200, the beam reducer reduces the second transmitted light beam, and the reduced laser beam is irradiated on the position sensitive detector, which measures the position information (ΔX n ,ΔY n )for:

[0056] ΔX n =X n -X0

[0057] ΔY n =Y n -Y0

[0058] Among them, X0 and Y0 are the calibration positions of the light spot of the reduced beam on the position sensitive detector for the beam position, X n , Y n are the light spot positions collected by the position sensitive detector respectively.

[0059] The lens array focuses the second reflected light, the CCD camera is placed at the focal position of the lens array, and the CCD camera detects the focused light spot array of the second reflected light formed by the lens array;

[0060] The lens array directs the laser beam for:

[0061]

[0062]

[0063] Where D is the diameter of the lens array sub-lens, f is the focal length of the lens array, and X ij , Y ij are the coordinate positions of the light spot array in the CCD camera, i and j are the pixel numbers, and n is the total number of pixels.

[0064] S300: The processor processes the measurement data to obtain the laser beam position offset, laser beam pointing offset and beam wavefront variation information in the optical path, and analyzes the stability of the laser system;

[0065] In step S300, the processor receives the laser beam position information measured by the position sensitive detection and the second reflected light focus spot array information detected by the CCD camera, and processes the received measurement data to calculate the laser beam position offset, laser beam pointing offset and beam wavefront change.

[0066] The laser beam position offset for:

[0067]

[0068]

[0069] Among them, X ij (t0), Y ij (t0) are the calibration positions of the light spot array in the camera, X ij (t), Y ij (t) are the positions of the light spot array captured by the CCD camera.

[0070] S400: When the processing result of the processor exceeds the set requirements of the laser system, the controller sends an alarm message to the laser system, and the operator controls the laser system to shut down or continue to run through the controller.

[0071] According to the method of the present invention, a laser beam output by a laser system is divided into a first reflected beam and a first transmitted beam through a sampling mirror, the first transmitted beam is divided into a second transmitted beam and a second reflected beam through a beam splitter, the second transmitted beam is irradiated on a position sensitive detector after being reduced by a beam reducing mirror, the second reflected beam is focused on a CCD camera through a lens array, the position sensitive detector and the CCD camera transmit measurement data of the beam to a processor, the processor processes the measurement data to obtain information on the laser beam position offset, laser beam pointing offset and beam wavefront variation in the optical path, analyzes the stability of the laser system, and when the processing result of the processor exceeds the set requirement of the laser system, the controller sends an alarm message to the laser system, and an operator controls the shutdown or continued operation of the laser system through the controller.

[0072] It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A laser system output stability detection and analysis device, characterized in that: It includes an optical property detection unit and an optical property analysis unit connected in an optical path; wherein, The optical property detection unit comprises a beam splitter (20), a beam reduction mirror (21), a position sensitive detector (22), a focusing lens array (23) and a CCD camera (24) which are sequentially connected in an optical path; the laser beam is divided into transmitted light and reflected light by the beam splitter (20); the transmitted light is radiated onto the position sensitive detector (22) after being reduced by the beam reduction mirror (21); and the reflected light is focused onto the CCD camera (24) by the lens array (23); The optical characteristic analysis unit comprises a processor (30) and a controller (31); the processor (30) collects the light beam signals detected by the position sensitive detector (22) and the CCD camera (24) and performs data processing to analyze whether the laser beam position, the laser beam pointing offset and the light beam wavefront change in the laser system (10) exceed the requirements; the controller (31) receives the processing result of the processor (30); when the processing result of the processor (30) exceeds the set requirements of the laser system, the controller (31) sends an alarm message to the laser system (10).

2. A laser system output stability detection and analysis device according to claim 1, characterized in that: The optical property detection unit further comprises a sampling mirror (11) arranged between the laser system (10) and the beam splitter (20); the laser beam output by the laser system (10) is split into a first transmission beam and a first reflection beam via the sampling mirror (11).

3. A laser system output stability detection and analysis device according to claim 2, characterized in that: The first transmitted light beam is divided into a second transmitted light beam and a second reflected light beam by a beam splitter (20).

4. A laser system output stability detection and analysis device according to claim 3, characterized in that: The second transmitted light beam is radiated onto a position sensitive detector (22) after being condensed by the condenser mirror (21).

5. The laser system output stability detection and analysis device according to claim 3, characterized in that: The second reflected light beam is focused on a CCD camera (24) via the lens array (23).

6. A method for detecting and analyzing the output stability of a laser system, characterized in that: The method is implemented by using a laser system output stability detection and analysis device as described in any one of claims 1 to 5, comprising: S100: The laser system outputs a laser beam which is divided into a first reflected beam and a first transmitted beam by a sampling mirror, and the first transmitted beam is divided into a second transmitted beam and a second reflected beam by a beam splitter; S200: The second transmitted light beam is reduced by a beam reducer and irradiated onto a position sensitive detector, the second reflected light beam is focused onto a CCD camera via a lens array, and the position sensitive detector and the CCD camera transmit measurement data of the light beam to a processor; S300: The processor processes the measurement data to obtain the laser beam position offset, laser beam pointing offset and beam wavefront variation information in the optical path, and analyzes the stability of the laser system; S400: When the processing result of the processor exceeds the set requirements of the laser system, the controller sends an alarm message to the laser system, and the operator controls the laser system to shut down or continue to run through the controller.

7. A method for detecting and analyzing the output stability of a laser system according to claim 6, characterized in that: In step S200, the beam reducer reduces the second transmitted light beam, and the reduced laser beam is irradiated on the position sensitive detector, which measures the position information (ΔX n ,ΔY n )for: ΔX n =X n -X0 ΔY n =Y n -Y0 Among them, X0 and Y0 are the calibration positions of the light spot of the reduced beam on the position sensitive detector for the beam position, X n , Y n are the light spot positions collected by the position sensitive detector respectively.

8. A method for detecting and analyzing the output stability of a laser system according to claim 7, characterized in that: In step S200, the lens array focuses the second reflected light, the CCD camera is placed at the focal position of the lens array, and the CCD camera detects the focused spot array of the second reflected light formed by the lens array; The lens array directs the laser beam for: Where D is the diameter of the lens array sub-lens, f is the focal length of the lens array, and X ij , Y ij are the coordinate positions of the light spot array in the CCD camera, i and j are the pixel numbers, and n is the total number of pixels.

9. A method for detecting and analyzing the output stability of a laser system according to claim 8, characterized in that: In step S300, the processor receives the laser beam position information measured by the position sensitive detection and the second reflected light focus spot array information detected by the CCD camera, and processes the received measurement data to calculate the laser beam position offset, laser beam pointing offset and beam wavefront change.

10. A method for detecting and analyzing the output stability of a laser system according to claim 9, characterized in that: The laser beam position offset for: Among them, X ij (t0), Y ij (t0) are the calibration positions of the light spot array in the camera, X ij (t), Y ij (t) are the positions of the light spot array captured by the CCD camera.

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