Aberration detection device

Abstract

The invention discloses an aberration detection device which comprises a scattered light generation module, an imaging module and an image receiving and processing module. Nanoparticles are arranged on the scattered light generation module, and the scattered light generation module is used for generating a scattering point light source formed by scattering of the nanoparticles; the imaging module and the image receiving and processing module are sequentially arranged along the optical axis of the scattering point light source; the imaging module is used for focusing and imaging the scattering point light source to generate a scattering image; and the image receiving and processing module is located at an imaging position point of the scattering image and is used for receiving the scattering image and performing data reconstruction calculation on a point spread function formed by the scattering image so as to determine the optical aberration of the imaging module. By means of the structure, accurate measurement of the optical aberration of the imaging module is achieved, the resolution ratio of the detection device is improved, and the structure is simple.

Description

Technical Field

[0001] The present invention relates to the technical field of optical aberration detection of imaging modules, and in particular to an aberration detection device. Background Art

[0002] Measuring the optical aberration of imaging systems has always been an important research topic in the field of optics. Optical aberrations are caused by the imperfections of the optical system, including spherical aberration, coma, astigmatism, field curvature, and distortion. These aberrations will lead to a decrease in imaging quality and need to be improved through optical design and correction.

[0003] Existing aberration detection methods for imaging systems usually include interferometry, Hartmann-Shack sensor method, and shearing interferometry to determine the optical aberration of the imaging system. However, these methods have complex optical path structures and few application scenarios in actual applications. They cannot accurately measure the aberration of the imaging system in different application scenarios, resulting in reduced resolution. Summary of the invention

[0004] The present invention provides an aberration detection device, which utilizes a scattering image generated after a scattered point light source formed by scattering of nanoparticles passes through an imaging module, and accurately determines the optical aberration of the imaging module by performing data reconstruction calculation on a point spread function formed by the scattering image, thereby improving the resolution of the detection device, having a simple structure and a wide range of applications.

[0005] The present invention provides an aberration detection device, comprising a scattered light generating module, an imaging module and an image receiving and processing module; Nanoparticles are arranged on the scattered light generating module, and the scattered light generating module is used to generate a scattered point light source formed by scattering of the nanoparticles; the imaging module and the image receiving and processing module are arranged in sequence along the optical axis of the scattered point light source; the imaging module is used to focus and image the scattered point light source to generate a scattered image; the image receiving and processing module is located at the imaging position point of the scattered image, and is used to receive the scattered image and perform data reconstruction calculation on the point spread function formed by the scattered image to determine the optical aberration of the imaging module.

[0006] Optionally, the scattered light generating module includes a light source for generating monochromatic light; and also includes a focusing lens group, a focusing module and a glass slide arranged in sequence along the optical axis of the monochromatic light; the nanoparticles are arranged on a side of the glass slide close to the imaging module and are bonded to the glass slide; The focusing lens group is used to collimate the monochromatic light; the focusing module is used to focus the collimated monochromatic light onto the nanoparticles so that the nanoparticles are scattered to form a scattered point light source.

[0007] Optionally, the imaging module includes an objective lens and a tube lens; The objective lens is located on the optical axis of the side of the slide away from the light source; the tube lens is located on the optical axis of the side of the objective lens away from the light source; The numerical aperture of the objective lens is smaller than that of the focusing module.

[0008] Optionally, the focusing module includes a dark field focusing module.

[0009] Optionally, the focusing lens group includes a first collimator, a filter module, a telephoto magnification module and a reflector which are sequentially arranged along the optical axis of the monochromatic light; The first collimator is located between the light source and the filter module, and the reflector is located between the telephoto amplification module and the focusing module.

[0010] Optionally, the image receiving and processing module includes an image receiving unit and a control unit; the filter module includes a plurality of filters of different wavelengths; The control unit is electrically connected to the image receiving unit and each filter respectively; the image receiving unit is used to receive the scattered image; the control unit is used to control the filter to switch after determining that the image receiving unit receives the scattered image at the wavelength corresponding to the current filter, so that the image receiving unit receives the scattered images at the wavelengths corresponding to the remaining filters.

[0011] Optionally, the telephoto magnification module includes a converging lens and a second collimating lens; the converging lens is located between the filter module and the second collimating lens, and the second collimating lens is located between the converging lens and the reflecting mirror.

[0012] Optionally, the size of the nanoparticles is much smaller than the diffraction limit of the imaging module.

[0013] Optionally, the scattered light generating module includes a three-dimensional moving stage and a moving control mechanism; The moving control mechanism is electrically connected to the three-dimensional moving stage; the three-dimensional moving stage is located on a side of the glass slide away from the imaging module and is attached to the glass slide; The mobile control mechanism is used to control the three-dimensional moving stage to move in a preset direction according to a preset step length, driving the nanoparticles to move so that the monochromatic light is focused to different positions of the nanoparticles to form multiple scattered point light sources; wherein the preset directions include a first direction, a second direction and a third direction, and the first direction, the second direction and the third direction are perpendicular to each other.

[0014] Optionally, the diameter D of the nanoparticles satisfies: 1 nm ≤ D ≤ 10 um.

[0015] The technical solution of the present invention generates a scattered point light source formed by scattering of nanoparticles through a scattered light generating module; after the scattered point light source is transmitted to the imaging module, the imaging module focuses and images the scattered point light source to generate a scattered image; the image receiving and processing module is located at the imaging position of the scattered image, receives the scattered image generated by the imaging module, and performs data reconstruction calculation on the point spread function formed by the scattered image to determine the optical aberration of the imaging module. Using the above structure, the optical aberration of the imaging module is accurately determined, the resolution of the detection device is improved, the structure is simple, and the application range is wide.

[0016] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 A schematic structural diagram of an aberration detection device provided by an embodiment of the present invention; Figure 2 A schematic structural diagram of a second aberration detection device provided by an embodiment of the present invention; Figure 3 A partial schematic diagram of an aberration detection device provided by an embodiment of the present invention; Figure 4 A schematic structural diagram of a third aberration detection device provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0019] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0020] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0021] In one embodiment, Figure 1 Schematic diagram of the structure of an aberration detection device provided by an embodiment of the present invention. This embodiment can be applied to the case where the optical aberration of an imaging module is accurately detected by using a scattered point light source formed by scattering of nanoparticles, such as Figure 1 As shown, the device includes a scattered light generating module 1, an imaging module 2 and an image receiving and processing module 3; nanoparticles 11 are arranged on the scattered light generating module 1, and the scattered light generating module 1 is used to generate a scattered point light source formed by scattering of the nanoparticles 11; the imaging module 2 and the image receiving and processing module 3 are arranged in sequence along the optical axis of the scattered point light source; the imaging module 2 is used to focus and image the scattered point light source to generate a scattered image; the image receiving and processing module 3 is located at the imaging position of the scattered image, and is used to receive the scattered image, and perform data reconstruction calculation on the point spread function formed by the scattered image to determine the optical aberration of the imaging module 2.

[0022] The scattered light generating module 1 is a structure for generating and controlling a scattered point light source. The scattered light generating module 1 is provided with nanoparticles 11, so that the scattered light generating module 1 can generate a scattered point light source formed by scattering of the nanoparticles 11. The imaging module 2 is a structure for focusing and imaging the scattered point light source to generate a scattered image; the imaging module 2 may include but is not limited to a combination of an objective lens and a tube lens. The image receiving and processing module 3 is a structure for receiving a scattered image, and performing data processing and analysis on a point spread function formed by the scattered image to obtain the optical aberration of the imaging module 2.

[0023] Specifically, when the optical aberration of the imaging module 2 is detected and determined, the imaging module 2 and the image receiving and processing module 3 can be arranged in sequence along the optical axis of the scattered point light source, and the image receiving and processing module 3 can be arranged at the imaging position of the scattered image, so that after the scattered point light source generated by the scattered light generating module 1 and scattered by the nanoparticles 11 is sent to the imaging module 2, the imaging module 2 will focus and image the scattered point light source, thereby forming a scattered image. After the scattered image is formed, the image receiving and processing module 3 located at the imaging position will receive the scattered image generated by the imaging module 2, and perform image processing on the scattered image, wherein, since the scattered light generating module 1 generates a scattered point light source, the scattered image generated by the scattered point light source through the imaging module 2 can form a point spread function, so when the image receiving and processing module 3 performs image processing on the scattered image, it is actually data processing on the point spread function, and specifically, the optical aberration of the imaging module 2 can be obtained by using a preset physical model to perform data reconstruction calculation on the point spread function of the imaging module 2.

[0024] The technical solution of the embodiment of the present invention generates a scattered point light source formed by scattering of nanoparticles through a scattered light generating module; after the scattered point light source is transmitted to the imaging module, the imaging module will focus and image the scattered point light source to generate a scattered image; the image receiving and processing module is located at the imaging position of the scattered image, and will receive the scattered image generated by the imaging module, and perform data reconstruction calculation on the point spread function formed by the scattered image to determine the optical aberration of the imaging module. Using the above structure, the optical aberration of the imaging module is accurately determined, the resolution of the detection device is improved, the structure is simple, and the application range is wide.

[0025] In another specific embodiment, optionally, Figure 2 A schematic diagram of the structure of a second aberration detection device provided by an embodiment of the present invention, referring to Figure 2 As shown, the scattered light generating module 1 includes a light source 12 for generating monochromatic light; it also includes a focusing lens group 13, a focusing module 14 and a glass slide 15 which are sequentially arranged along the optical axis of the monochromatic light; the nanoparticles 11 are arranged on the side of the glass slide 15 close to the imaging module 2 and are attached to the glass slide 15; the focusing lens group 13 is used to collimate the monochromatic light; the focusing module 14 is used to focus the collimated monochromatic light onto the nanoparticles 11, so that the nanoparticles 11 are scattered to form a scattered point light source.

[0026] Among them, the light source 12 is an object or device that emits monochromatic light. In this embodiment, the light source 12 can be a separate wide-spectrum light source, a monochromatic point light source or a white light point light source, etc., and can also be implemented in the form of a light source + optical fiber. The optical fiber can achieve a specific numerical aperture and a material with a better uniform light effect. The specific can be determined according to the actual situation and is not limited here. The focusing lens group 13 is a combination of optical elements, which is mainly used to focus light to a point or a specific area. It can usually include multiple lenses, which can effectively reduce aberrations and spherical aberrations and improve imaging quality. The focusing module 14 is an optical system for focusing light to a specific area. In this embodiment, the focusing module 14 can be a dark field focusing module or a bright field focusing module. When the image receiving and processing module 3 can receive scattered light with a weak signal, the focusing module 14 uses a bright field focusing module, otherwise it uses a dark field focusing module. This application takes the focusing module 14 as a dark field focusing module as an example for explanation. The slide 15 is a thin glass sheet, which is mainly used to carry and fix the nanoparticles 11. In this embodiment, the nanoparticles 11 are fixed on the surface of the glass slide 15 on the side away from the light source 12 , so that monochromatic light passes through the nanoparticles 11 to form a scattered point light source.

[0027] Specifically, the monochromatic light emitted by the light source 12 will generate parallel light of a certain size after passing through the focusing module 13. After the parallel light is transmitted to the focusing module 14, the focusing module 14 will focus the parallel light onto the nanoparticles 11. After passing through the nanoparticles 11, the parallel light will be scattered to generate a scattered point light source.

[0028] Optional, continue to refer to Figure 2 The imaging module 2 includes an objective lens 21 and a tube lens 22; the objective lens 21 is located on the optical axis of the slide 15 away from the light source 12; the tube lens 22 is located on the optical axis of the objective lens 21 away from the light source 12; the numerical aperture of the objective lens 21 is smaller than the numerical aperture of the focusing module 14.

[0029] The objective lens 21 is used to collect scattered point light sources from the nanoparticles 11 and focus them into an enlarged intermediate image. The tube lens 22 is used to further enlarge the intermediate image formed by the objective lens 21 to form a final observation image or imaging signal, namely, a scattered image.

[0030] It should be noted that in this embodiment, the numerical aperture of the objective lens 21 is set to be smaller than the numerical aperture of the focusing module 14, so that only scattered light can be sent to the objective lens 21, and the remaining light will not be transmitted to the objective lens 21, ensuring that the image generated by the imaging module 2 is a scattered image.

[0031] Optional, Figure 3 A partial schematic diagram of an aberration detection device provided by an embodiment of the present invention, referring to Figure 2 and Figure 3As shown, the focusing module 14 includes a dark field focusing module, that is, a black light-absorbing structure is arranged in the center of the focusing module 14, so that the monochromatic light transmitted in the center will be absorbed, and only the monochromatic light on both sides will be emitted to the nanoparticles 11. At this time, the light emitted by the focusing module 14 is a hollow light, which forms a scattered point light source after irradiating the nanoparticles 11.

[0032] Optional, Figure 4 A schematic diagram of the structure of a third aberration detection device provided by an embodiment of the present invention, referring to Figure 4 As shown, the focusing lens group 13 includes a first collimator 131, a filter module 132, a telephoto magnification module 133 and a reflector 134 which are arranged in sequence along the optical axis of the monochromatic light; the first collimator 131 is located between the light source 12 and the filter module 132, and the reflector 134 is located between the telephoto magnification module 133 and the focusing module 14.

[0033] Among them, the first collimator 131 is used to collimate the monochromatic light to form parallel light. The filter module 132 includes a plurality of filters of different wavelengths, which are used to realize the scattered images of the imaging module 2 at different wavelengths. In this embodiment, the filter module 132 may include a plurality of narrow-band or broadband wavelength filters, each filter represents a wavelength, and generally, a scattered image can only represent the optical aberration of the imaging module 2 at one wavelength. The telephoto magnification module 133 is used to amplify the monochromatic light of a certain wavelength so that it can be sent to the focusing module 14. The reflector 134 is used to reflect the amplified light and change the propagation direction of the light path to reduce the volume of the detection device and improve the integration and portability. In this embodiment, the number of reflectors 134 can be set according to actual conditions. The more the number of reflectors 134, the more the number of light path turns, and the smaller the volume of the detection device, but the optical device involved will adapt to increase. Exemplarily, the number of reflectors 134 is 1.

[0034] Specifically, the monochromatic light emitted by the light source 12 is sent to the first collimator 131 to form parallel light, and the parallel light is sent to the telephoto magnification module 133 after passing through the filter module 132. The telephoto magnification module 133 focuses and collimates the parallel light and then sends it to the reflector 134. The reflector 134 reflects the parallel light to change the propagation direction of the light path. The reflected parallel light will be sent to the focusing module 14 to be focused on the nanoparticles 11 through the focusing module 14 to generate a scattered point light source.

[0035] Optional, continue to refer to Figure 2 and Figure 4The image receiving and processing module 3 includes an image receiving unit 31 and a control unit (not shown in the figure); the filter module 132 includes a plurality of filters of different wavelengths; the control unit is electrically connected to the image receiving unit 31 and each filter respectively; the image receiving unit 31 is used to receive a scattered image; the control unit is used to control the filter to switch after determining that the image receiving unit 31 has received a scattered image at a wavelength corresponding to the current filter, so that the image receiving unit 31 receives the scattered images at the wavelengths corresponding to the remaining filters.

[0036] Among them, the image receiving unit 31 is used to receive the scattered image. Generally, the image receiving unit 31 may include but is not limited to a CCD camera. The control unit is the control core of the detection device, including a processor, which is used to use a physical model to perform data reconstruction calculation on the point spread function formed after the image receiving unit 31 receives the scattered image, so as to determine the optical aberration of the imaging module 2. In addition, the control unit is also electrically connected to each filter. After the control unit determines that the image receiving unit 31 has received the scattered image, it indicates that the scattered image of the corresponding wavelength under the current filter has been received, and the next wavelength can be changed to continue receiving the scattered image. Then, the control unit will control the filter to switch, and switch to the filter of the next wavelength to achieve the reception of the scattered image of the next wavelength.

[0037] Optional, continue to refer to Figure 4 The telephoto magnification module 133 includes a converging lens 1331 and a second collimating lens 1332 ; the converging lens 1331 is located between the filter module 132 and the second collimating lens 1332 , and the second collimating lens 1332 is located between the converging lens 1331 and the reflecting mirror 134 .

[0038] The converging lens 1331 is used to focus the light. The second collimating lens 1332 is the same as the first collimating lens 131 and is used to collimate the light to form parallel light.

[0039] Optionally, the size of the nanoparticles 11 is much smaller than the diffraction limit of the imaging module 2 .

[0040] The diffraction limit of the imaging module 2 refers to the theoretical limit of resolution in an optical system due to the wave nature of light waves. In this embodiment, the size of the nanoparticles 11 is set to be much smaller than the diffraction limit of the imaging module 2, so that the scattered light generated by the scattered light generating module 1 can be ensured to be a scattered point light source, thereby ensuring that the scattered image generated by the imaging module 2 is the point spread function of the imaging module 2, and ensuring the accuracy of the aberration calculation.

[0041] Optional, continue to refer to Figure 2The scattered light generating module 1 also includes a three-dimensional moving stage (not shown in the figure) and a moving control mechanism (not shown in the figure); the moving control mechanism is electrically connected to the three-dimensional moving stage; the three-dimensional moving stage is located on the side of the glass slide 15 away from the imaging module 2, and is in contact with the glass slide 15; the moving control mechanism is used to control the three-dimensional moving stage to move in a preset direction according to a preset step length, driving the nanoparticles 11 to move, so that the monochromatic light is focused to different positions of the nanoparticles 11 to form multiple scattered point light sources; wherein the preset directions include a first direction, a second direction and a third direction, and the first direction, the second direction and the third direction are perpendicular to each other.

[0042] The three-dimensional moving stage is used to drive the glass slide 15 to move in a preset direction, so that the nanoparticles 11 move in three directions. The moving control mechanism is used to control the three-dimensional moving stage to move according to a preset step length to achieve the movement of the glass slide 15. In this embodiment, the preset directions include a first direction, a second direction, and a third direction, and the first direction, the second direction, and the third direction are perpendicular to each other, that is, the first direction, the second direction, and the third direction can be the X direction, the Y direction, and the Z direction, respectively.

[0043] Specifically, the number of nanoparticles 11 may be one or more. To ensure that the image receiving and processing module 3 can accurately obtain multiple scattered point light sources scattered from different positions of the nanoparticles 11, multiple nanoparticles 11 can usually be laid flat on the surface of the slide 15. At this time, in order to obtain the scattered images of the nanoparticles 11 at different positions, the present embodiment is provided with a three-dimensional moving stage and a moving control mechanism. The moving control mechanism controls the three-dimensional moving stage to move in a plane perpendicular to the optical axis direction according to a preset step length, so that the image receiving and processing module 3 can receive scattered images of different fields of view in the X direction and the Y direction. In addition, the moving control mechanism controls the three-dimensional moving stage to move in a direction parallel to the optical axis direction, that is, in the Z direction according to a preset step length, so that the image receiving and processing module 3 can receive scattered images of different focal lengths, that is, scattered images in a defocused state and in a focused state. This ensures that the image receiving and processing module 3 can receive multiple scattered images in three-dimensional directions, and the multiple scattered images include scattered images of different fields of view and scattered images in defocused states and in-focus states, that is, multiple three-dimensional point spread functions are formed. The physical model is used to perform data reconstruction calculations on the multiple three-dimensional point spread functions to determine the optical aberration of the imaging module 2.

[0044] Optionally, the diameter D of the nanoparticles satisfies: 1 nm ≤ D ≤ 10 um.

[0045] Specifically, the nanoparticles 11 may include but are not limited to metal nanoparticles, such as gold nanoparticles, etc. In this embodiment, the diameter D of the nanoparticles satisfies 1nm≤D≤10um, and exemplary, D may be 1nm, 10nm, 1um, 3um, 5um or 10um, which may be determined according to actual conditions and is not limited here.

[0046] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the present invention can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution of the present invention can be achieved, and this document does not limit this.

[0047] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An aberration detection device, characterized in that: It includes a scattered light generating module, an imaging module and an image receiving and processing module; Nanoparticles are arranged on the scattered light generating module, and the scattered light generating module is used to generate a scattered point light source formed by scattering of the nanoparticles; the imaging module and the image receiving and processing module are arranged in sequence along the optical axis of the scattered point light source; the imaging module is used to focus and image the scattered point light source to generate a scattered image; the image receiving and processing module is located at the imaging position point of the scattered image, and is used to receive the scattered image and perform data reconstruction calculation on the point spread function formed by the scattered image to determine the optical aberration of the imaging module.

2. The aberration detection device according to claim 1, characterized in that: The scattered light generating module comprises a light source for generating monochromatic light; and further comprises a focusing lens group, a focusing module and a glass slide arranged in sequence along the optical axis of the monochromatic light; the nanoparticles are arranged on a side of the glass slide close to the imaging module and are attached to the glass slide; The focusing lens group is used to collimate the monochromatic light; the focusing module is used to focus the collimated monochromatic light onto the nanoparticles, so that the nanoparticles are scattered to form the scattered point light source.

3. The aberration detection device according to claim 2, characterized in that: The imaging module includes an objective lens and a tube lens; The objective lens is located on the optical axis of the slide away from the light source; the tube lens is located on the optical axis of the objective lens away from the light source; The numerical aperture of the objective lens is smaller than the numerical aperture of the focusing module.

4. The aberration detection device according to claim 2, characterized in that: The focusing module includes a dark field focusing module.

5. The aberration detection device according to claim 2, characterized in that: The focusing lens group comprises a first collimating lens, a filter module, a telephoto magnifying module and a reflecting mirror which are sequentially arranged along the optical axis of the monochromatic light; The first collimator is located between the light source and the filter module, and the reflector is located between the telephoto magnification module and the focusing module.

6. The aberration detection device according to claim 5, characterized in that: The image receiving and processing module includes an image receiving unit and a control unit; the filter module includes a plurality of filters of different wavelengths; The control unit is electrically connected to the image receiving unit and each of the filters respectively; the image receiving unit is used to receive the scattered image; and the control unit is used to control the filter to switch after determining that the image receiving unit has received the scattered image at the wavelength corresponding to the current filter, so that the image receiving unit receives the scattered images at the wavelengths corresponding to the remaining filters.

7. The aberration detection device according to claim 5, characterized in that: The telephoto magnification module comprises a converging lens and a second collimating lens; the converging lens is located between the filter module and the second collimating lens, and the second collimating lens is located between the converging lens and the reflecting mirror.

8. The aberration detection device according to claim 1, characterized in that: The size of the nanoparticles is much smaller than the diffraction limit of the imaging module.

9. The aberration detection device according to claim 2, characterized in that: The scattered light generating module comprises a three-dimensional moving platform and a moving control mechanism; The movement control mechanism is electrically connected to the three-dimensional moving platform; the three-dimensional moving platform is located on a side of the glass slide away from the imaging module and is attached to the glass slide; The mobile control mechanism is used to control the three-dimensional mobile platform to move in a preset direction according to a preset step size, driving the nanoparticles to move, so that the monochromatic light is focused to different positions of the nanoparticles to form a plurality of scattered point light sources; wherein the preset directions include a first direction, a second direction and a third direction, and the first direction, the second direction and the third direction are perpendicular to each other.

10. The aberration detection device according to claim 1, characterized in that: The diameter D of the nanoparticles satisfies: 1nm≤D≤10um.

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