Precise etching method of nickel-based superalloy core plate micro-channel

Abstract

The invention discloses a precise etching method for a nickel-based high-temperature alloy core plate micro-channel, and belongs to the field of metal chemical etching. According to the method, the mask pattern is optimized, the formulas of the etching liquid and the anti-lateral etching liquid are accurately designed, key parameters such as the etching temperature, the etching time and the spraying pressure are strictly controlled, the anti-lateral etching liquid is designed to form the protective film layer on the side wall of the groove, the lateral etching phenomenon is inhibited by combining the process of alternately spraying the etching liquid and the anti-lateral etching liquid, the etching efficiency and stability are improved, and the etching quality is improved. And meanwhile, the surface quality is optimized, high-precision etching processing of the nickel-based high-temperature alloy core plate micro-channel is realized, and the lateral erosion phenomenon caused by isotropy of wet etching is inhibited.

Description

Technical Field

[0001] The invention belongs to the field of metal chemical etching, and relates to a precision etching method for a nickel-based high-temperature alloy core plate microchannel, and specifically relates to a full-process chemical etching process for a nickel-based high-temperature alloy core plate microchannel of a printed plate heat exchanger. Background Art

[0002] Printed circuit board heat exchanger (PCHE) is a new type of efficient compact heat exchanger that can transfer heat under harsh conditions such as high temperature and high pressure. It is widely used in aerospace, energy, marine engineering and high-end equipment manufacturing.

[0003] PCHE usually serves in high temperature, high pressure and strong corrosion environment. However, the commonly used PCHE core plate material is steel, and its performance cannot fully meet the stringent service requirements.

[0004] As a preferred alternative material, nickel-based high-temperature alloys have advantages such as high strength, high corrosion resistance, and resistance to biological attachment, but the processing efficiency of the core plate microchannel is low, the precision control is difficult, and the side corrosion phenomenon is difficult to suppress. Therefore, there is an urgent need for an etching process that can achieve efficient and precise etching of nickel-based high-temperature alloy core plates, avoid the risk of side corrosion, increase the service life of equipment and reduce production costs, and meet the growing technical needs of aerospace, high-end equipment manufacturing, and offshore oil and gas production. Summary of the invention

[0005] The purpose of the present invention is to provide a process for etching the microchannels of a nickel-based high-temperature alloy core plate, aiming to solve the problems of low etching efficiency, insufficient etching precision, and serious side etching in the microchannel etching process of the nickel-based high-temperature alloy core plate in the prior art. The present invention optimizes the formula of etching liquid and anti-side etching liquid, designs a dual-etching machine alternating spraying scheme, and accurately controls key etching parameters, so as to achieve high-precision etching of the microchannels of the nickel-based high-temperature alloy core plate, so as to meet the performance requirements of the microchannel structure in the fields of aerospace, energy and chemical industry.

[0006] In order to solve the above technical problems or achieve the purpose of the present invention, the technical solution of the present invention is as follows:

[0007] A method for precision etching of a microchannel of a nickel-based high-temperature alloy core plate comprises the following steps:

[0008] S1: Pretreatment: The surface of the nickel-based high-temperature alloy core plate is sequentially subjected to alkaline washing, electrolytic degreasing, pickling, ultrapure water washing and drying operations to remove various impurities, oil stains and oxide layers on the surface of the core plate, providing a clean surface state for the photosensitive ink coating step;

[0009] S2: Gluing: The core board is coated with photosensitive ink by automatic roller coating equipment and dried until it is fixed; the photosensitive ink is evenly covered and firmly attached to the core board in a film-like form, the thickness of the photosensitive ink film is 20μm~40μm, the thickness uniformity is ≤±5%, and the film bonding force is ≥15N / cm;

[0010] S3: Mask design: design the mask, draw the mask pattern, and then print out the film negative to obtain the film mask;

[0011] S4: Exposure: Place the film mask on the core board and align it, then place it in a UV exposure machine for exposure, with an exposure intensity of 100mJ / cm 2 ~200mJ / cm 2 , the exposure time is controlled at 20s~30s;

[0012] S5: Development: The exposed core board is immersed in an alkaline developer for development at a temperature of 40°C to 45°C for 3 to 8 minutes. During this period, the ink in the unexposed area is dissolved, and the exposed part is retained. The photosensitive ink is caused to undergo a photochemical reaction by precisely controlling the exposure parameters, and the photosensitive ink in the exposed area is solidified.

[0013] S6: Etching: Place the core board after development treatment into the etching production line to obtain the core board with the target etching depth; the etching production line is composed of two fully automatic etching machines; one of them is an etching machine, spraying etching liquid, and the other is an anti-side corrosion machine, spraying anti-side corrosion liquid; with the preset etching depth as a cycle, the core board is alternately sprayed in the etching machine and the anti-side corrosion machine; the spraying method is single-sided, and the spraying direction is vertical upward; the preset etching depth is set according to needs;

[0014] S7: Demolding: After etching, the core board is immersed in an alkaline demoulding liquid to remove the ink protective layer, and then pickled until there is no residual alkaline substance on the surface of the core board, and finally washed with ultrapure water and dried in sequence;

[0015] S8: Inspection: Use a two-dimensional detector to inspect the appearance and microchannel size of the core board after demoulding, and compare the inspection results with the design and quality standards to ensure that they meet the requirements. After passing the inspection, the core board will be packaged, stored and shipped.

[0016] Furthermore, the chemical composition of the etching solution is: concentrated hydrochloric acid 800ml / L~900ml / L, concentrated nitric acid 10ml / L~15ml / L, high ferric chloride 150g / L~200g / L, trioctyl phosphate 0.5g / L~1g / L, polyglutamic acid 0.5g / L~1g / L. Concentrated hydrochloric acid destroys the surface passivation film of nickel-based high-temperature alloy by creating a strong acidic environment. Chloride ions form coordination compounds with oxidized metal ions, which promote the forward etching reaction to accelerate metal dissolution; concentrated nitric acid uses its own strong oxidizing property to oxidize metal atoms in nickel-based high-temperature alloy under the acidic conditions provided by hydrochloric acid to start etching, and its reaction intermediates can cooperate with hydrochloric acid to enhance the oxidation capacity of the etching system. High ferric chloride promotes etching by virtue of the oxidizing property of trivalent iron ions and undergoes redox reaction with metal elements of nickel-based high-temperature alloys. Its oxidation state can be cyclically converted between Fe3+ and Fe2+ to ensure stable and continuous etching, and is the core component that promotes the etching process. As a corrosion inhibitor, trioctyl phosphate acts on the surface of the nickel-based high-temperature alloy core plate through physical adsorption to form a protective film to regulate the etching rate and improve the uniformity of the etching reaction and the surface flatness; polyglutamic acid forms a complex with the metal ions on the surface of the nickel-based high-temperature alloy through the active functional groups on its molecular chain to enhance the etching effect, and adsorbs impurities generated during the etching process to prevent impurity deposition, thereby increasing etching efficiency and improving surface quality.

[0017] Furthermore, the chemical composition of the anti-side etching liquid is: 3g / L to 8g / L benzotriazole, 2g / L to 6g / L 2-mercaptobenzimidazole, 25g / L to 35g / L polyethylene glycol, 8g / L to 18g / L polyvinyl pyrrolidone, 0.5g / L to 2g / L sodium dodecyl sulfate, and 2ml / L to 5ml / L organic silane coupling agent. The components of the anti-side etching liquid work synergistically according to their own chemical structures and properties, and form a film on the bottom and side surfaces of the groove during etching. Benzotriazole uses the nitrogen heterocyclic structure to coordinate and adsorb the lone pair of electrons of the nitrogen atom with the nickel atom to form an initial layer of protection; 2-mercaptobenzimidazole forms bonds with the metal atoms on the alloy surface through its mercapto group, and combines with benzotriazole to make the film layer denser through weak interactions; the ether bonds on the polyethylene glycol molecular chain can form hydrogen bonds with water molecules, and the flexibility and winding characteristics of the molecular chain segments make the film structure more continuous and void-free; the lactam structure in the polyvinyl pyrrolidone molecule gives it good film-forming and adsorption properties, which is used to improve the adhesion of the film; sodium dodecyl sulfate can promote the reduction of the surface tension of the solution, which is beneficial to the better spreading of the anti-side corrosion solution on the alloy surface and ensure uniformity; the organic silane coupling agent can produce physical adsorption or chemical bonding with the alloy surface and other components in the anti-side corrosion solution, further enhancing the overall stability and bonding strength of the protective film.

[0018] Furthermore, in order to achieve the set etching depth, the core board needs to be sprayed alternately in the etching machine and the anti-side erosion machine until the etching reaches the target depth, and the spraying method of the etching machine and the anti-side erosion machine is a single-sided vertical upward spraying, thereby suppressing side erosion. The core board after development treatment first enters the etching machine to etch a groove of a set depth. Subsequently, the anti-side erosion liquid is sprayed in the anti-side erosion machine, and a dense protective film will be formed on the bottom and side walls of the groove. Then, the core board is placed in the etching machine again. Since the etching liquid is sprayed vertically with a large pressure, the positive impact force will destroy the protective film at the bottom of the groove, allowing the etching process to continue; while the anti-etching liquid on the side surface is retained, and the lateral erosion of the substrate is hindered. By alternating between the etching machine and the anti-side erosion machine, the etching rate can be increased and the side erosion phenomenon can be effectively suppressed.

[0019] Furthermore, in a single cycle, the spray pressure of the etching machine is 40psi~60psi, the spray temperature is 40℃~50℃, and the spray time is 10s~20s; the spray pressure of the anti-side corrosion machine is 20psi~50psi, the spray temperature is 20℃~30℃, and the spray time is 5s~10s.

[0020] The etching solution used in the present invention is composed of concentrated hydrochloric acid, nitric acid, ferric chloride, trioctyl phosphate and polyglutamic acid. Concentrated hydrochloric acid, as a strong acid, provides a large amount of hydrogen ions to promote the dissolution reaction of the metal surface. Nitric acid reacts with the metal through its strong oxidizing property to generate metal oxides or metal ions, which are used to control the etching rate. Ferric chloride is the main component of the etching solution, and the oxidation state can change cyclically between Fe3+ and Fe2+ to ensure that the etching is stable and continuous. Trioctyl phosphate, as a surfactant, can improve the uniformity of etching. Polyglutamic acid ensures the accuracy and surface quality of the etching process by adjusting the viscosity and pH of the solution. The anti-etching solution used in the present invention is composed of benzotriazole, 2-mercaptobenzimidazole, polyethylene glycol, polyvinyl pyrrolidone, sodium dodecyl sulfate, and an organic silane coupling agent. The anti-etching solution used in the present invention can form a protective film layer on the groove surface of the core board by regulating the viscosity and surface activity of the solution, and combined with the alternating spraying process, the side corrosion phenomenon is suppressed.

[0021] The method provided by the present invention adopts an alternating spraying process. The alternating spraying process refers to alternately placing the core board in an etching machine and an anti-side corrosion machine for spraying. In this process, there are differences in the chemical composition of the etching solution and the anti-side corrosion solution. The etching solution is mainly a strong acid solution, which has good fluidity and can continuously and efficiently etch the alloy matrix; while the anti-side corrosion solution has a large viscosity, poor fluidity, and a small surface tension, and can adhere to the inner wall of the groove to form a protective film layer; by spraying the etching solution vertically upward, the anti-side corrosion protective film layer at the bottom of the groove can be effectively removed, while leaving the side film layer, thereby suppressing the side corrosion phenomenon and improving the etching efficiency and surface quality. Compared with the prior art, the present invention has the following advantages:

[0022] The present invention optimizes the mask pattern, designs the etching solution formula, accurately controls the etching parameters, improves the etching efficiency and stability, and optimizes the surface quality at the same time; designs the anti-side corrosion liquid to form a protective film layer on the side wall of the groove, and combines the process of alternately spraying the etching solution and the anti-side corrosion liquid to suppress the side corrosion phenomenon; therefore, the present invention is superior to the prior art in terms of etching accuracy, efficiency, surface quality and environmental protection performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 The present invention is a schematic diagram of the process of alternately spraying etching solution and side corrosion prevention solution. DETAILED DESCRIPTION

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the features and advantages of the present invention will be more clearly understood by referring to the accompanying drawings. The accompanying drawings are schematic and should not be understood as limiting the present invention in any way. For ordinary technicians in this field, other drawings can be obtained based on the drawings provided by the present invention without paying any creative work.

[0025] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention can also be implemented in other ways different from those described herein, and therefore, the protection scope of the present invention is not limited by the specific embodiments disclosed below.

[0026] The present invention discloses an etching method for microchannels of a nickel-based high-temperature alloy plate suitable for roll-forming. The method achieves high-precision etching of microchannels of a nickel-based high-temperature alloy core plate by accurately designing the formula of an etching solution and an anti-side corrosion solution, strictly controlling key parameters such as etching temperature, etching time, and spraying pressure, and combining an alternating spraying process. The method overcomes the difficulties of poor etching accuracy, poor microchannel surface quality, and low etching efficiency in the prior art, and especially suppresses the side corrosion phenomenon caused by isotropy of wet etching.

[0027] The process schematic diagram of alternately spraying etching solution and side corrosion prevention solution in the present invention is as follows: Figure 1 shown.

[0028] The concentrated hydrochloric acid used in the following examples has a concentration of 36 wt.%, with a molecular formula of HCl, and is a colorless liquid at room temperature with a strong pungent odor; the concentrated nitric acid has a concentration of 68 wt.%, with a molecular formula of HNO 3 , it is a colorless or light yellow liquid at room temperature with a strong pungent odor; ferric chloride is a nonahydrate compound with the molecular formula FeCl 3 9H2O, a reddish brown crystalline solid at room temperature, easily soluble in water; the purity of trioctyl phosphate is greater than 99wt.%, and the molecular formula is C 24 H 51 O 4 P, a colorless to light yellow oily liquid at room temperature; polyglutamic acid purity greater than 95.0wt.%, molecular formula (C 5 H 7 NO 3 )n, white to light yellow powder at room temperature; benzotriazole purity greater than 99wt.%, molecular formula C 6 H 4 N 4 , white or light yellow crystalline powder at room temperature, colorless and transparent solution when dissolved in water; 2-mercaptobenzimidazole has a purity of more than 98wt.%, and its molecular formula is C 7 H 6 N 2 S, white or light yellow crystalline powder at room temperature, yellow solution when dissolved in water; polyethylene glycol purity greater than 99wt.%, molecular formula C 2 H 6 O 2 , a white waxy solid at room temperature; the purity of polyvinyl pyrrolidone is greater than 95wt.%, and the molecular formula is C 6 H 9 NO, white to light yellow crystalline powder or granules at room temperature, good water solubility; sodium dodecyl sulfate purity greater than 98wt.%, molecular formula C 12 H 25 NaO 4S, white granules or crystalline powder at room temperature, easily soluble in water to form a foamy solution; the purity of the organic silane coupling agent is greater than 98wt.%, and the molecular formula is YR-Si(OR) 3 , it is a transparent or slightly yellow liquid at room temperature, easily soluble in organic solvents and water; ultrapure water is deionized water. The parent material composition of the nickel-based high-temperature alloy core plate is: nickel (Ni) 50% to 60%, chromium (Cr) 20% to 23%, cobalt (Co) 10% to 15%, molybdenum (Mo) 8% to 10%, aluminum (Al) 1.0% to 1.5%, iron (Fe) 4.0% to 5.0%, titanium (Ti) 0.2% to 1.0%, carbon (C) 0.1% to 0.2%, silicon (Si) 0.2% to 0.5%, manganese (Mn) 0.5% to 1.0%, the parent material is forged and then composite rolled, and the final plate thickness is 2mm.

[0029] The present invention provides a method for precision etching of a microchannel of a nickel-based high-temperature alloy core plate, comprising the following steps:

[0030] S1: Pretreatment: The surface of the nickel-based high-temperature alloy core plate is subjected to alkali washing, degreasing, pickling, ultrapure water washing and drying operations in sequence, aiming to remove various impurities, oil stains and oxide layers on the surface of the core plate, and provide a clean surface state for the photosensitive ink coating step;

[0031] S2: Gluing: The core board is coated with photosensitive ink by automatic roller coating equipment and dried in a drying oven until it is fixed. The photosensitive ink is in the form of a film, evenly covers and firmly adheres to the core board. The thickness of the photosensitive ink film is 20μm to 40μm, the thickness uniformity is ≤±5%, and the film bonding force is ≥15N / cm;

[0032] S3: Mask design: design the mask, draw the mask pattern, and then print out the film negative to obtain the film mask; the side erosion compensation needs to be calculated during the design; the diameter width of the mask microchannel is set to 0.5mm~0.7mm, the groove width is 1mm~2mm, and the diameter width compensation value is +0.05mm~+0.07mm;

[0033] S4: Exposure: Place the film mask on the core board and align it, then place it in a UV exposure machine for exposure, with an exposure intensity of 100mJ / cm 2 ~200mJ / cm 2 , the exposure time is controlled at 20s~30s;

[0034] S5: Development: The exposed core board is immersed in an alkaline developer for development at a temperature of 40°C to 45°C for 3 to 8 minutes. During this period, the ink in the unexposed area is dissolved, and the exposed part is retained. The photosensitive ink is caused to undergo a photochemical reaction by precisely controlling the exposure parameters, and the photosensitive ink in the exposed area is solidified.

[0035] S6: Etching: placing the core board after the development process into the etching production line to obtain a core board with a target etching depth;

[0036] The etching production line is composed of two fully automatic etching machines; one of which is an etching machine, spraying etching liquid, and the other is an anti-side corrosion machine, spraying anti-side corrosion liquid; with a preset etching depth as a cycle, the core board is alternately sprayed in the etching machine and the anti-side corrosion machine; the spraying method is single-sided, and the spraying direction is vertically upward; the preset etching depth is set according to needs;

[0037] Among them, the chemical composition of the etching solution is: concentrated hydrochloric acid 800-900ml / L, concentrated nitric acid 10-15ml / L, ferric chloride 150-200g / L, trioctyl phosphate 0.5g / L-1g / L, polyglutamic acid 0.5g / L-1g / L; the chemical composition of the anti-side corrosion liquid is: benzotriazole 3g / L-8g / L, 2-mercaptobenzimidazole 2g / L-6g / L, polyethylene glycol 25g / L-35g / L, polyvinyl pyrrolidone 8g / L-18g / L, sodium dodecyl sulfate 0.5g / L-2g / L, and organic silane coupling agent 2ml / L-5ml / L.

[0038] In a single cycle, the spray pressure of the etching machine is 40psi~60psi, the spray temperature is 40℃~50℃, and the spray time is 10s~20s; the spray pressure of the anti-side corrosion machine is 20psi~50psi, the spray temperature is 20℃~30℃, and the spray time is 5s~10s.

[0039] S7: Demolding: After etching, the core board is immersed in alkaline demoulding liquid to remove the protective layer, followed by pickling for 1 to 3 minutes to neutralize the residual alkaline substances, and finally thoroughly cleaned and dried with ultrapure water to restore the core board to a clean and dry state; wherein, the pickling can be carried out with a weak acid that can neutralize the residual alkaline substances.

[0040] S8: Inspection: Use a two-dimensional detector to inspect the appearance and microchannel size of the core board after demoulding, and compare the inspection results with the design and quality standards to ensure that they meet the requirements. After passing the inspection, the core board will be packaged, stored and shipped.

[0041] The present invention will be further described below with reference to specific embodiments.

[0042] Embodiment 1:

[0043] S1: Surface pretreatment. The surface of the nickel-based high-temperature alloy core plate is pretreated by alkali washing, electrolytic degreasing, pickling, ultrapure water washing and drying in sequence to remove various impurities, oil stains and oxide layers on the surface of the core plate;

[0044] S2: Gluing. The core board is coated with photosensitive ink by automatic roller coating equipment. The main components of photosensitive ink are resin and photosensitive agent. Dry in a drying oven at 55℃ for 40 minutes until it is fixed, so that the photosensitive ink is evenly covered and firmly attached to the core board. The film thickness is 20μm, the thickness uniformity is ≤±5%, and the film bonding force is ≥15N / cm;

[0045] S3: Mask design. When designing the mask, the side erosion compensation is calculated, and the mask pattern is drawn using CAD software. The diameter width of the mask microchannel is set to 0.5 mm, the groove width is set to 1 mm, the diameter width compensation value is set to +0.05 mm, and the film negative is printed to obtain the film mask.

[0046] S4: Exposure. Place the film mask on the core board and align it, then place it in the UV exposure machine with an exposure intensity of 150mJ / cm 2 , the exposure time is 30s.

[0047] S5: Development. Put the exposed core board into an alkaline developer, which is 20g / L sodium carbonate. The development temperature is 45°C and the development time is 5 minutes. During this period, the ink in the unexposed area is dissolved, and the exposed part is retained. By precisely controlling the exposure parameters, the photosensitive ink undergoes a photochemical reaction, and the photosensitive ink in the exposed area is solidified.

[0048] S6: Etching. The core board after development is placed in the etching production line, which consists of two fully automatic etching machines. One is responsible for spraying etching liquid, and the other is responsible for spraying anti-side corrosion liquid. To achieve an etching depth of 0.2mm as one cycle, the core board needs to be sprayed alternately in the etching machine and the anti-side corrosion machine.

[0049] The chemical composition of the etching solution is: concentrated hydrochloric acid 850ml / L, concentrated nitric acid 12ml / L, ferric chloride 175g / L, trioctyl phosphate 0.5g / L, polyglutamic acid 0.5g / L. The chemical composition of the anti-side corrosion liquid is: benzotriazole 5g / L, 2-mercaptobenzimidazole 4g / L, polyethylene glycol 30g / L, polyvinyl pyrrolidone 12g / L, sodium dodecyl sulfate 1.5g / L, organic silane coupling agent 3ml / L. The spraying mode of the etching machine and the anti-side corrosion machine is single-sided, and the spraying direction is vertically upward. In a single cycle, the spray pressure of the etching machine is 50psi, the spray temperature is 50℃, and the spray time is 10s; the spray pressure of the anti-side corrosion machine is 40psi, the spray temperature is 20℃, and the spray time is 8s.

[0050] S7: Demolding. After etching, the core board is placed in a 10% sodium hydroxide solution and soaked for 1 hour at 80°C to remove the protective layer. Then, it is pickled with a 5% dilute nitric acid solution for 2 minutes to neutralize the residual alkaline demoulding liquid. Finally, it is thoroughly cleaned and dried with ultrapure water to restore the core board to a clean and dry state.

[0051] S8: Inspection. Use a two-dimensional detector to inspect the appearance of the core board and the size of the microchannel after demoulding. After inspection, the etching rate of the core board is 0.02mm / s, the etching depth is 1mm, the microchannel width is 0.5mm, the groove width is 1.5mm, and the side etching tolerance is less than 40μm. After passing the inspection, packaging, warehousing and delivery operations are carried out.

[0052] Embodiment 2:

[0053] S1: Surface pretreatment. The surface of the nickel-based high-temperature alloy core plate is pretreated by alkali washing, electrolytic degreasing, pickling, ultrapure water washing and drying in sequence to remove various impurities, oil stains and oxide layers on the surface of the core plate;

[0054] S2: Gluing. The core board is coated with photosensitive ink by automatic roller coating equipment. The main components of photosensitive ink are resin and photosensitive agent. Dry in a drying oven at 55℃ for 40 minutes until it is fixed, so that the photosensitive ink is evenly covered and firmly attached to the core board. The film thickness is 20μm, the thickness uniformity is ≤±5%, and the film bonding force is ≥15N / cm;

[0055] S3: Mask design. When designing the mask, the side erosion compensation is calculated, and the mask pattern is drawn using CAD software. The diameter width of the mask microchannel is set to 0.5 mm, the groove width is set to 1 mm, the diameter width compensation value is set to +0.05 mm, and the film negative is printed to obtain the film mask.

[0056] S4: Exposure. Place the film mask on the core board and align it, then place it in the UV exposure machine with an exposure intensity of 150mJ / cm 2 , the exposure time is 30s.

[0057] S5: Development. Put the exposed workpiece into an alkaline developer solution, which is 20g / L sodium carbonate. The development temperature is 45°C and the development time is 5 minutes. During this period, the ink in the unexposed area is dissolved, and the exposed part is retained. By precisely controlling the exposure parameters, the photosensitive ink undergoes a photochemical reaction, and the photosensitive ink in the exposed area is solidified.

[0058] S6: Etching. The core board after development is placed in the etching production line, which consists of two fully automatic etching machines. One is responsible for spraying etching liquid, and the other is responsible for spraying anti-side corrosion liquid. To achieve an etching depth of 0.2mm as one cycle, the core board needs to be sprayed alternately in the etching machine and the anti-side corrosion machine.

[0059] The chemical composition of the etching solution is: concentrated hydrochloric acid 800ml / L, concentrated nitric acid 10ml / L, ferric chloride 150g / L, trioctyl phosphate 1g / L, polyglutamic acid 1g / L. The chemical composition of the anti-side corrosion liquid is: benzotriazole 8g / L, 2-mercaptobenzimidazole 6g / L, polyethylene glycol 35g / L, polyvinyl pyrrolidone 18g / L, sodium dodecyl sulfate 2g / L, organic silane coupling agent 5ml / L. The spraying mode of the etching machine and the anti-side corrosion machine is single-sided, and the spraying direction is vertically upward. In a single cycle, the spray pressure of the etching machine is 40psi, the spray temperature is 40℃, and the spray time is 20s; the spray pressure of the anti-side corrosion machine is 50psi, the spray temperature is 30℃, and the spray time is 10s.

[0060] S7: Demolding. After etching, the core board is immersed in a 10% sodium hydroxide solution for 1 hour at a temperature of 80°C to remove the protective layer. Then, it is pickled with a 5% dilute nitric acid solution for 2 minutes to neutralize the residual alkaline demoulding liquid. Finally, it is thoroughly cleaned and dried with ultrapure water to restore the core board to a clean and dry state.

[0061] S8: Inspection. Use a two-dimensional detector to inspect the appearance of the core board and the size of the microchannel after demoulding. After inspection, the etching rate of the core board is 0.01mm / s, the etching depth is 1mm, the microchannel width is 0.5mm, the groove width is 1.5mm, and the side etching tolerance is less than 15μm. After passing the inspection, packaging, warehousing and delivery operations are carried out.

[0062] Embodiment 3:

[0063] S1: Surface pretreatment. The surface of the nickel-based high-temperature alloy core plate is pretreated by alkali washing, electrolytic degreasing, pickling, ultrapure water washing and drying in sequence to remove various impurities, oil stains and oxide layers on the surface of the core plate;

[0064] S2: Gluing. The core board is coated with photosensitive ink by automatic roller coating equipment. The main components of photosensitive ink are resin and photosensitive agent. Dry in a drying oven at 55℃ for 40 minutes until it is fixed, so that the photosensitive ink is evenly covered and firmly attached to the core board. The film thickness is 40μm, the thickness uniformity is ≤±5%, and the film bonding force is ≥15N / cm;

[0065] S3: Mask design. When designing the mask, the side erosion compensation is calculated, and the mask pattern is drawn using CAD software. The diameter width of the mask microchannel is set to 0.5 mm, the groove width is set to 1 mm, the diameter width compensation value is set to +0.05 mm, and the film negative is printed to obtain the film mask.

[0066] S4: Exposure. Place the film mask on the core board and align it, then place it in the UV exposure machine with an exposure intensity of 150mJ / cm 2, the exposure time is 30s.

[0067] S5: Development. Put the exposed workpiece into an alkaline developer solution, which is 20g / L sodium carbonate. The development temperature is 45°C and the development time is 5 minutes. During this period, the ink in the unexposed area is dissolved, and the exposed part is retained. By precisely controlling the exposure parameters, the photosensitive ink undergoes a photochemical reaction, and the photosensitive ink in the exposed area is solidified.

[0068] S6: Etching. The core board after development is placed in the etching production line, which consists of two fully automatic etching machines. One is responsible for spraying etching liquid, and the other is responsible for spraying anti-side corrosion liquid. To achieve an etching depth of 0.2mm as one cycle, the core board needs to be sprayed alternately in the etching machine and the anti-side corrosion machine.

[0069] The chemical composition of the etching solution is: concentrated hydrochloric acid 900ml / L, concentrated nitric acid 15ml / L, ferric chloride 200g / L, trioctyl phosphate 0.5g / L, polyglutamic acid 0.5g / L. The chemical composition of the anti-side corrosion liquid is: benzotriazole 3g / L, 2-mercaptobenzimidazole 2g / L, polyethylene glycol 25g / L, polyvinyl pyrrolidone 8g / L, sodium dodecyl sulfate 0.5g / L, organic silane coupling agent 2ml / L. The spraying mode of the etching machine and the anti-side corrosion machine is single-sided, and the spraying direction is vertically upward. In a single cycle, the spray pressure of the etching machine is 60psi, the spray temperature is 50℃, and the spray time is 10s; the spray pressure of the anti-side corrosion machine is 20psi, the spray temperature is 20℃, and the spray time is 5s.

[0070] S7: Demolding. After etching, the core board is immersed in a 10% sodium hydroxide solution for 1 hour at a temperature of 80°C to remove the protective layer. Then, it is pickled with a 5% dilute nitric acid solution for 2 minutes to neutralize the residual alkaline demoulding liquid. Finally, it is thoroughly cleaned and dried with ultrapure water to restore the core board to a clean and dry state.

[0071] S8: Inspection. Use a two-dimensional detector to inspect the appearance of the core board and the size of the microchannel after demoulding. After inspection, the etching rate of the core board is 0.02mm / s, the etching depth is 1.5mm, the microchannel width is 0.5mm, the groove width is 1.5mm, and the side etching tolerance is less than 50μm. After passing the inspection, packaging, warehousing and delivery operations are carried out.

[0072] Embodiment 4:

[0073] S1: Surface pretreatment. The surface of the nickel-based high-temperature alloy core plate is pretreated by alkali washing, electrolytic degreasing, pickling, ultrapure water washing and drying in sequence to remove various impurities, oil stains and oxide layers on the surface of the core plate;

[0074] S2: Gluing. The core board is coated with photosensitive ink by automatic roller coating equipment. The main components of photosensitive ink are resin and photosensitive agent. Dry in a drying oven at 55℃ for 40 minutes until it is fixed, so that the photosensitive ink is evenly covered and firmly attached to the core board. The film thickness is 40μm, the thickness uniformity is ≤±5%, and the film bonding force is ≥15N / cm;

[0075] S3: Mask design. When designing the mask, the side erosion compensation is calculated, and the mask pattern is drawn using CAD software. The diameter width of the mask microchannel is set to 0.5 mm, the groove width is set to 1 mm, the diameter width compensation value is set to +0.05 mm, and the film negative is printed to obtain the film mask.

[0076] S4: Exposure. Place the film mask on the core board and align it, then place it in the UV exposure machine with an exposure intensity of 150mJ / cm 2 , the exposure time is 30s.

[0077] S5: Development. Put the exposed workpiece into an alkaline developer solution, which is 20g / L sodium carbonate. The development temperature is 45°C and the development time is 5 minutes. During this period, the ink in the unexposed area is dissolved, and the exposed part is retained. By precisely controlling the exposure parameters, the photosensitive ink undergoes a photochemical reaction, and the photosensitive ink in the exposed area is solidified.

[0078] S6: Etching. The core board after development is placed in the etching production line, which consists of two fully automatic etching machines. One is responsible for spraying etching liquid, and the other is responsible for spraying anti-side corrosion liquid. To achieve an etching depth of 0.2mm as one cycle, the core board needs to be sprayed alternately in the etching machine and the anti-side corrosion machine.

[0079] The chemical composition of the etching solution is: concentrated hydrochloric acid 850ml / L, concentrated nitric acid 12ml / L, ferric chloride 175g / L, trioctyl phosphate 1g / L, polyglutamic acid 1g / L. The chemical composition of the anti-side corrosion liquid is: benzotriazole 8g / L, 2-mercaptobenzimidazole 6g / L, polyethylene glycol 35g / L, polyvinyl pyrrolidone 18g / L, sodium dodecyl sulfate 2g / L, organic silane coupling agent 5ml / L. The spraying mode of the etching machine and the anti-side corrosion machine is single-sided, and the spraying direction is vertically upward. In a single cycle, the spray pressure of the etching machine is 60psi, the spray temperature is 40℃, and the spray time is 20s; the spray pressure of the anti-side corrosion machine is 40psi, the spray temperature is 30℃, and the spray time is 8s.

[0080] S7: Demolding. After etching, the core board is placed in a 10% sodium hydroxide solution and soaked for 1 hour at 80°C to remove the protective layer. Then, it is pickled with a 5% dilute nitric acid solution for 2 minutes to neutralize the residual alkaline demoulding liquid. Finally, it is thoroughly cleaned and dried with ultrapure water to restore the core board to a clean and dry state.

[0081] S8: Inspection. Use a two-dimensional detector to inspect the appearance of the core board and the size of the microchannel after demoulding. After inspection, the etching rate of the core board is 0.01mm / s, the etching depth is 1.5mm, the microchannel width is 0.5mm, the groove width is 1.5mm, and the side etching tolerance is less than 30μm. After passing the inspection, packaging, warehousing and delivery operations are carried out.

[0082] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A method for precision etching of microchannels of a nickel-based high-temperature alloy core plate, characterized in that: The following steps are involved: S1： Pretreatment: The surface of the nickel-based high-temperature alloy core plate is sequentially subjected to alkaline washing, electrolytic degreasing, pickling, ultrapure water washing and drying; S2: Gluing: The core board is coated with photosensitive ink by automatic roller coating equipment and dried until it is fixed; S3: Mask design: design and draw the mask pattern, then print out the film negative to obtain the film mask; S4: Exposure: Place the film mask on the core board and align it, and place it in a UV exposure machine for exposure; S5: Development: soaking the exposed core board in an alkaline developer for development; S6: Etching: placing the core board after the development process into the etching production line to obtain a core board with a target etching depth; The etching production line consists of two fully automatic etching machines, one of which is an etching machine and the other is an anti-side etching machine. The core board is sprayed alternately in the etching machine and the anti-side etching machine with the preset etching depth as one cycle. S7: Demolding: After etching, the core board is immersed in an alkaline demoulding liquid to remove the protective layer, and then pickled until there is no residual alkaline substance on the surface of the core board, and finally washed with ultrapure water and dried in sequence; S8: Inspection: Use a two-dimensional detector to inspect the appearance and microchannel size of the core board after demoulding, and compare the inspection results with the design and quality standards to ensure that they meet the requirements. After passing the inspection, the core board will be packaged, stored and shipped.

2. The method for precision etching of microchannels of a nickel-based high-temperature alloy core plate according to claim 1, characterized in that: In S2, the photosensitive ink film layer is attached to the core board, the film thickness is 20μm to 40μm, the thickness uniformity is ≤±5%, and the film bonding force is ≥15N / cm.

3. The method for precision etching of microchannels of a nickel-based high-temperature alloy core plate according to claim 1, characterized in that: In S6, the etching machine sprays etching liquid, and the side corrosion prevention machine sprays side corrosion prevention liquid; the spraying method is single-sided, and the spraying direction is vertically upward; the preset etching depth is set according to needs.

4. The method for precision etching of microchannels of a nickel-based high-temperature alloy core plate according to claim 3, characterized in that: The chemical composition of the etching solution is: concentrated hydrochloric acid 800-900 ml / L, concentrated nitric acid 10-15 ml / L, ferric chloride 150-200 g / L, trioctyl phosphate 0.5 g / L-1 g / L, polyglutamic acid 0.5 g / L-1 g / L.

5. The method for precision etching of microchannels of a nickel-based high-temperature alloy core plate according to claim 3, characterized in that: The chemical composition of the anti-side corrosion liquid is: benzotriazole 3g / L~8g / L, 2-mercaptobenzimidazole 2g / L~6g / L, polyethylene glycol 25g / L~35g / L, polyvinyl pyrrolidone 8g / L~18g / L, sodium dodecyl sulfate 0.5g / L~2g / L, and organic silane coupling agent 2ml / L~5ml / L.

6. The method for precision etching of microchannels of a nickel-based high-temperature alloy core plate according to claim 1, characterized in that: In S6, the spray pressure of the etching machine is 40psi~60psi, the spray temperature is 40℃~50℃, and the spray time is 10s~20s; the spray pressure of the side corrosion prevention machine is 20psi~50psi, the spray temperature is 20℃~30℃, and the spray time is 5s~10s.

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