High-safety variable-temperature circulating temperature control system

Abstract

The invention discloses a high-safety variable-temperature circulating temperature control system, which adopts a regenerative closed circulating structure design, main pipelines of a cold source unit and a distribution unit are respectively placed in a valve box, and the interior of the valve box is evacuated to form a vacuum environment, so that the convective heat exchange of residual gas molecules in the pipelines is reduced, the heat leakage of a low-temperature working medium is reduced, and the safety of the low-temperature working medium is improved. The pipeline temperature difference is reduced; furthermore, the system is provided with an independent nitrogen supplementing device and a nitrogen loop used for target disc temperature returning, automatic adjustment of a nitrogen working medium in the system is achieved, it is guaranteed that the nitrogen working medium stably circulates in the closed system, cold energy recovery and energy-saving utilization are achieved to the maximum extent, and therefore high-safety operation of the system is guaranteed through multi-linkage gas path control.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing temperature control systems, and in particular to a high-safety variable temperature cycle temperature control system. Background Art

[0002] The development and wide application of semiconductor technology have greatly promoted the progress of science and technology and social and economic development, and has become an industry that the country supports. With the continuous development of semiconductor manufacturing technology, the variable temperature cycle temperature control system used to accurately control the temperature of the reaction chamber in the semiconductor manufacturing process is an indispensable key equipment in the semiconductor manufacturing process, and is widely used in semiconductor manufacturing, testing and other fields. The variable temperature cycle temperature control system is a self-balancing circulation device, mainly composed of a heat exchanger, a circulation pump, a compressor and a control system, which can continuously provide a temperature-controlled low-temperature medium. It guarantees the process temperature of etching, ion implantation, diffusion, thin film deposition, chemical mechanical polishing and other links in semiconductor manufacturing.

[0003] The variable temperature cycle temperature control systems in the current market generally have problems such as narrow temperature range, small cooling capacity, poor temperature control accuracy, short equipment life, and difficult operation. These have brought certain limitations to the variable temperature cycle temperature control performance required in the semiconductor production process, and the support capability for high and low temperature applicability is weak. Therefore, it is of great significance in the field of semiconductor manufacturing to design a variable temperature cycle temperature control system with a wide temperature range, large cooling capacity, high temperature control accuracy, long life, and simple operation.

[0004] Since the temperature control system usually includes a refrigeration unit and a distribution unit, the cold energy generated by the refrigerator needs to pass through the complex pipelines of the refrigeration unit and the distribution unit before it can be delivered to the target plate. Therefore, the temperature difference of the pipelines in different areas causes the pressure of the nitrogen working fluid to be uneven when it flows through the local pipelines. Low working fluid pressure will lead to insufficient cold energy supply to the target plate. Excessive working fluid pressure will cause equipment damage or even safety accidents. Summary of the invention

[0005] In order to solve the technical problems existing in the background technology, the present invention proposes a high-safety variable temperature circulation temperature control system.

[0006] The invention provides a high-safety variable temperature cycle temperature control system, comprising: a low-temperature cold source unit and a low-temperature distribution unit; The low-temperature distribution unit includes a distribution valve box and a second vacuum pump. The distribution valve box is provided with a second vacuum gauge for detecting the internal vacuum degree. The second vacuum pump is used to evacuate the distribution valve box according to the detection result of the second vacuum gauge. The distribution valve box is provided with a cold capacity outlet and a heat recovery inlet connected to the target plate, a second cold capacity inlet and a second heat recovery outlet connected to the low-temperature cold source unit, and a nitrogen inlet and a nitrogen outlet. The distribution valve box is provided with a nitrogen inlet pipeline, a nitrogen outlet pipeline, a low-temperature inlet pipeline and a low-temperature return pipeline. The two ends of the nitrogen inlet pipeline are respectively connected to the nitrogen inlet and the cold capacity outlet, the two ends of the nitrogen outlet pipeline are respectively connected to the heat recovery inlet and the nitrogen outlet, the two ends of the low-temperature inlet pipeline are respectively connected to the second cold capacity and the cold capacity outlet, the two ends of the low-temperature return pipeline are respectively connected to the heat recovery inlet and the second heat recovery outlet, an inlet heater is provided on the nitrogen inlet pipeline, and an outlet heater is provided on the nitrogen outlet pipeline.

[0007] Preferably, the low-temperature cold source unit includes a cold source valve box, a refrigerator, a circulating pump, a first vacuum pump and an air supply device. The cold source valve box is provided with a first vacuum gauge for detecting the internal vacuum degree, and the first vacuum pump is used to evacuate the cold source valve box according to the detection result of the first vacuum gauge; the cold source valve box is also provided with a first heat recovery outlet and a first cold capacity inlet respectively connected to the input end and the output end of the refrigerator, and a heat regenerator, a first outlet switch valve V13 and a first inlet switch valve V14 are provided in the cold source valve box. The first outlet switch valve V13 is connected to the first cold capacity inlet, and the first heat recovery outlet is connected to the high-temperature channel of the heat regenerator, the circulating pump, the low-temperature channel of the heat regenerator and the first inlet switch valve V14 in sequence; the air supply device is connected to the pipeline between the circulating pump and the low-temperature channel of the heat regenerator to supply air to the circuit of the low-temperature cold source unit.

[0008] Preferably, the low-temperature cold source unit further includes a first buffer tank, and the first buffer tank is connected to the pipeline between the circulation pump and the low-temperature channel of the regenerator.

[0009] Preferably, a ninth pressure sensor is provided on the first buffer tank, and the air replenishing device replenishes air into the circuit according to the pressure value detected by the ninth pressure sensor.

[0010] Preferably, the air replenishing device comprises a filter, a pressure reducing valve, a first diaphragm valve BV1 and a first one-way valve which are sequentially connected in series along the air intake direction, and the filter is used to remove moisture from the intake air.

[0011] Preferably, the low-temperature cold source unit further includes a second buffer tank, which is arranged on the pipeline between the circulation pump and the high-temperature channel of the regenerator, and a ninth pressure relief valve SRV9 is provided on the second buffer tank.

[0012] Preferably, a low-temperature throttle valve TV is further provided in the distribution valve box, and the low-temperature throttle valve is connected in series to the low-temperature air intake pipeline.

[0013] Preferably, a first pressure relief valve SRV1 is provided on the pipeline between the low-temperature throttle valve TV and the second cold capacity inlet, and a third pressure relief valve SRV3 is provided on the pipeline between the low-temperature throttle valve TV and the cold capacity outlet.

[0014] Preferably, a sixth pressure relief valve SRV6 is provided in the upstream pipeline of the inlet heater.

[0015] Preferably, a fourth pressure relief valve SRV4 is provided at the cold outlet.

[0016] In the present invention, the proposed high-safety variable temperature cycle temperature control system adopts a heat recovery closed cycle structure design, and the main pipelines of the cold source unit and the distribution unit are respectively placed in the valve box, and the interior of the valve box is evacuated to form a vacuum environment, thereby reducing the convective heat exchange of residual gas molecules in the pipeline, reducing the heat leakage of the low-temperature working fluid, and thus reducing the temperature difference of the pipeline; further, the system is equipped with an independent nitrogen replenishing device and a nitrogen circuit for target plate temperature recovery, so as to realize automatic adjustment of the nitrogen working fluid in the system, ensure the stable circulation of the nitrogen working fluid in the closed system, and maximize the recovery of cold and energy-saving utilization, thereby ensuring the high-safety operation of the system through multiple interlocking gas circuit control. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a structural schematic diagram of an implementation method of a high-safety variable temperature circulation temperature control system proposed by the present invention.

[0018] Figure 2 This is a structural schematic diagram of another implementation of a high-safety variable temperature circulation temperature control system proposed by the present invention.

[0019] Figure 3 This is a schematic structural diagram of another embodiment of a high-safety variable temperature cycle temperature control system proposed by the present invention.

[0020] Figure 4 This is a schematic structural diagram of another embodiment of a high-safety variable temperature cycle temperature control system proposed by the present invention.

[0021] Reference numerals: 1. Cold source valve box; 2. Refrigerator; 3. Circulation pump; 4. First vacuum pump; 5. Distribution valve box; 6. Second vacuum pump; 8. Inlet heater; 9. Outlet heater; 11. Primary precooling pipeline; 12. Secondary precooling pipeline; 13. Third-stage precooling pipeline; 14. First regenerator; 15. Second regenerator; 16. First buffer tank; 17. Second buffer tank; 18. First vacuum gauge; 19. Second vacuum gauge; 20. Cold source heater; 21. Low temperature flow controller; 22. Normal temperature flow controller; 23. Nitrogen inlet pipeline; 24. Nitrogen outlet pipeline; 25. Filter; 100, working target plate; 200, pre-cooling target plate. DETAILED DESCRIPTION

[0022] Reference Figure 1 , a high-safety variable temperature cycle temperature control system proposed by the present invention comprises: a low-temperature cold source unit and a low-temperature distribution unit; The low-temperature cold source unit includes a cold source valve box 1, a refrigerator 2, a circulating pump 3, a first vacuum pump 4 and an air supply device. The cold source valve box 1 is provided with a first vacuum gauge 18 for detecting the internal vacuum degree. The first vacuum pump 4 is used to evacuate the cold source valve box 1 according to the detection result of the first vacuum gauge 18; the cold source valve box 1 is also provided with a first reheat outlet and a first cold import connected to the input end and the output end of the refrigerator 2 respectively. A regenerator, a first outlet switch valve V13 and a first import switch valve V14 are provided in the cold source valve box 1. The first outlet switch valve V13 is connected to the first cold import. The first heat regeneration outlet is connected to the high-temperature channel of the regenerator, the circulating pump 3, the low-temperature channel of the regenerator and the first import switch valve V14 in sequence; the air supply device is connected to the pipeline between the circulating pump 3 and the low-temperature channel of the regenerator to supply air to the circuit of the low-temperature cold source unit; The low-temperature distribution unit includes a distribution valve box 5 and a second vacuum pump 6. The distribution valve box 5 is provided with a second vacuum gauge 19 for detecting the internal vacuum degree. The second vacuum pump 6 is used to evacuate the distribution valve box 5 according to the detection result of the second vacuum gauge 19; the distribution valve box 5 is provided with a cold outlet and a heat recovery inlet connected to the target plate, a second cold inlet and a second heat recovery outlet connected to the cold source valve box 1, and a nitrogen inlet and a nitrogen outlet. The distribution valve box 5 is provided with a nitrogen inlet pipeline 23, a nitrogen outlet pipeline 24, a low-temperature inlet pipeline and a low-temperature return pipeline. The two ends of the nitrogen inlet pipeline 23 are respectively connected to the nitrogen inlet and the cold outlet, the two ends of the nitrogen outlet pipeline 24 are respectively connected to the heat recovery inlet and the nitrogen outlet, the two ends of the low-temperature inlet pipeline are respectively connected to the second cold and the cold outlet, the two ends of the low-temperature return pipeline are respectively connected to the heat recovery inlet and the second heat recovery outlet, the nitrogen inlet pipeline 23 is provided with an inlet heater 8, and the nitrogen outlet pipeline 24 is provided with an outlet heater 9.

[0023] In actual design, the first vacuum pump and the second vacuum pump may be dry pumps.

[0024] During the specific working process of the high-safety variable temperature cycle temperature control system of this embodiment, when providing cold energy for the target plate, under the action of the circulating pump, the nitrogen as the working fluid enters the cold source valve box through the first cold energy inlet after being cooled by the refrigerator, enters the distribution valve box from the cold source valve box through the first outlet switch valve, is further cooled by reducing the pressure through the low-temperature throttle valve in the distribution valve box, and then flows out of the distribution valve box from the second cold energy outlet to be provided to the target plate for semiconductor processing for cooling; the heated nitrogen returns to the distribution valve box through the second heat recovery inlet, returns to the cold source valve box through the distribution valve box, and then returns to the input end of the refrigerator through the first heat recovery outlet after passing through the low-temperature channel of the regenerator, the circulating pump and the high-temperature channel of the regenerator in turn, thereby completing the closed cycle of the nitrogen working fluid.

[0025] The first vacuum pump is used to evacuate the interior of the cold source valve box to form a vacuum environment, which can reduce the convection heat exchange of the residual gas molecules inside, reduce the heat leakage of the cryogenic working fluid, and ensure the low temperature of the return gas of nitrogen. Similarly, the second vacuum pump is used to evacuate the distribution valve box to ensure the circulation of nitrogen in the distribution unit.

[0026] During operation, when the nitrogen pressure in the closed loop is insufficient, nitrogen is automatically added to the pipeline through the air supply device. The air supply device is set on the air inlet side of the circulating pump. The added gas is pre-cooled by the regenerator under the action of the circulating pump and then enters the refrigerator for cooling and is incorporated into the circulating working fluid flow path, thereby minimizing the impact of the added gas on the system.

[0027] When the target plate is temperature controlled by the distribution unit, after the semiconductor workpiece on the low-temperature target plate is processed, the normal temperature gas is heated through a separate nitrogen inlet pipeline and introduced into the target plate supply pipeline to reheat the target plate. The target plate can be temperature controlled with the help of the existing pipeline, and there is no need to set up a separate reheating system for the target plate. Furthermore, an outlet heater is set on the nitrogen outlet pipeline to further heat the reheated nitrogen gas that has completed heat exchange with the target plate and turned into a low temperature, so as to prevent the discharged low-temperature nitrogen gas from causing frost or even ice in the pipeline, and finally melting into water, affecting the operation of the equipment.

[0028] In this embodiment, the proposed high-safety variable temperature cycle temperature control system adopts a heat recovery closed cycle structure design, and the main pipelines of the cold source unit and the distribution unit are respectively placed in the valve box, and the interior of the valve box is evacuated to form a vacuum environment, thereby reducing the convective heat exchange of residual gas molecules in the pipeline and reducing the heat leakage of the low-temperature working fluid, thereby reducing the temperature difference of the pipeline; further, the system is equipped with an independent nitrogen replenishing device and a nitrogen circuit for target plate temperature recovery, so as to realize automatic adjustment of the nitrogen working fluid in the system, ensure the stable circulation of the nitrogen working fluid in the closed system, maximize the recovery of cold and energy-saving utilization, and thus ensure the high-safety operation of the system through multiple interlocking gas circuit control.

[0029] In a specific embodiment, reference Figure 2 The low-temperature cold source unit also includes a first buffer tank 16, which is connected to the pipeline between the circulating pump 3 and the low-temperature channel of the regenerator to ensure the pressure stability of the pipeline system and reduce the fluctuation of the pressure of the pipeline system.

[0030] In a further specific embodiment, in the automatic air replenishment design, a ninth pressure sensor is provided on the first buffer tank 16, and the air replenishment device replenishes air into the circuit according to the pressure value detected by the ninth pressure sensor. Whether air replenishment is needed in the circuit is detected according to the pressure value in the buffer tank, so as to avoid abnormal detection indicators caused by local pressure increase in the pipeline.

[0031] Furthermore, the air replenishing device includes a filter 25, a pressure reducing valve, a first diaphragm valve BV1 and a first one-way valve which are connected in series in the air intake direction. The filter 25 is used to remove moisture from the air intake. The function of the filter 25 is to remove moisture from the nitrogen replenishment. Since the freezing point of water is 0°C, if moisture enters the pipeline system, the pipeline will be blocked, the flow rate will be reduced or even zero; if moisture enters the refrigerator, the low-temperature switch valve, and the low-temperature regulating valve, the refrigerator or valve will be damaged. The function of the pressure reducing valve is to control the pressure of nitrogen entering the pipeline system by adjusting the handle of the pressure reducing valve to prevent the pipeline from being damaged by excessive pressure. The first diaphragm valve BV1 is mainly used for opening and closing when nitrogen is replenished. The first diaphragm valve is interlocked with the ninth pressure sensor. The ninth pressure sensor is used to monitor the pressure value of nitrogen inside the pipeline system. When the pressure value is lower than the set value, the feedback signal is transmitted to the first diaphragm valve BV1, the first diaphragm valve BV1 is started, and nitrogen is replenished into the pipeline system. When the pressure value reaches the set value, the first diaphragm valve BV1 is closed to complete the automatic replenishment of the working medium in the pipeline system. In order to prevent the nitrogen inside the pipeline system from overflowing outward, a first one-way valve is provided at the outlet of the first diaphragm valve BV1. The first one-way valve allows the gas to flow only from the outside to the inside and cannot flow in the opposite direction, thereby ensuring the outflow of the gas inside the pipeline. The system has achieved highly automated operation, completely solved the problem of manual operation, liberated the hands of workers, and improved work efficiency.

[0032] In addition, after the circulation pump is turned on, the inlet is low temperature and the outlet is high pressure, the low-temperature cold source unit also includes a second buffer tank 17, and the second buffer tank 17 is arranged on the pipeline between the circulation pump 3 and the high-temperature channel of the regenerator. The second buffer tank 17 is provided with a ninth pressure relief valve SRV9 to ensure that when the pressure of the working fluid in the pipeline system is too high, it can be discharged from the pressure relief valve to avoid equipment damage and ensure the personal safety of the operator.

[0033] In other specific embodiments, a low-temperature throttle valve TV is further provided in the distribution valve box 5. The low-temperature throttle valve TV is connected in series to the low-temperature air intake pipeline, which effectively reduces the temperature in the distribution valve box by reducing pressure, thereby effectively expanding the system application temperature range.

[0034] In order to balance the working medium temperature and pressure in the upstream and downstream flow paths of the throttle valve, a first pressure relief valve SRV1 is provided on the pipeline between the low-temperature throttle valve TV and the second cooling capacity inlet, and a third pressure relief valve SRV3 is provided on the pipeline between the low-temperature throttle valve TV and the cooling capacity outlet.

[0035] In the initial stage of system operation, in order to ensure that the working fluid in the pipeline can provide sufficient cooling capacity, a precooling pipeline can be set in the system to precool the valve box and pipeline. Specifically, a secondary precooling pipeline 12 and a tertiary precooling pipeline 13 are also provided in the distribution valve box 5. The two ends of the secondary precooling pipeline 12 are respectively connected to the upstream pipeline of the low-temperature throttle valve TV and the low-temperature return air pipeline. The two ends of the tertiary precooling pipeline 13 are respectively connected to the downstream pipeline of the low-temperature throttle valve and the low-temperature return air pipeline. The first pressure relief valve SRV1 is arranged on the pipeline between the secondary precooling pipeline 12 and the second cooling capacity inlet, and the third pressure relief valve SRV3 is arranged on the pipeline between the tertiary precooling pipeline 13 and the low-temperature throttle valve TV. The tertiary precooling pipeline is mainly used to adjust the opening of the low-temperature regulating valve to complete the throttling and cooling of the low-temperature working fluid. The pressure relief valves upstream and downstream of the low-temperature throttle valve are arranged between the low-temperature regulating valve and the secondary and tertiary precooling pipelines, which effectively protect the low-temperature regulating valve during regulation and improve the regulation accuracy.

[0036] In addition, a sixth pressure relief valve SRV6 is provided in the upstream pipeline of the inlet heater 8. A fourth pressure relief valve SRV4 is provided at the cold outlet.

[0037] The variable temperature cycle temperature control system of this embodiment is described in detail below through specific examples.

[0038] Reference Figure 3 and 4 This embodiment proposes a variable temperature cycle temperature control system, which includes a low temperature cold source unit and a low temperature distribution unit. The low temperature cold source unit and the low temperature distribution unit are connected by a low temperature double-layer pipe. The low temperature cold source unit mainly provides a circulating fluid with a certain temperature and pressure for the target disk in semiconductor production, and forms a closed cycle to meet the low temperature injection conditions required by the target disk. The low temperature distribution unit is mainly used for the distribution and transportation of low temperature circulating media for working target disks and pre-cooling target disks in semiconductor production. The variable temperature cycle temperature control system of the present invention can provide functions such as a wide temperature range, a large cooling capacity, and high-precision temperature control for semiconductor production processes.

[0039] The low-temperature cold source unit includes a cold source valve box, a refrigerator, a first buffer tank 16, a circulating pump, a second buffer tank 17, a low-temperature flow controller 21, a normal temperature flow controller 22, and a refrigerator. A low-temperature switch valve V14, a first regenerator 14, a second regenerator 15, a cold source heater, a low-temperature switch valve V13, and a low-temperature switch valve V15 are arranged inside the cold source valve box. The cold source valve box is evacuated by a first vacuum pump to form a vacuum environment, which can reduce the convection heat exchange of the residual gas molecules inside, reduce the heat leakage of the low-temperature working fluid, and ensure the low-temperature temperature of the return gas of nitrogen.

[0040] The low-temperature cold source unit is connected to the low-temperature distribution unit through a low-temperature double-layer pipe. The first regenerator 14 and the second regenerator 15 are connected in series, and the inlet and outlet of the series-connected heat exchanger are respectively provided with an eighth temperature sensor, a ninth temperature sensor, a tenth temperature sensor, an eleventh temperature sensor, an eighth pressure sensor, and an eleventh pressure sensor, which are used to monitor the temperature and pressure of the regenerator inlet and outlet working fluids. The outlet of the first buffer tank 16 and the inlet of the second buffer tank 17 are connected by a single-layer pipe, and a circulating pump for driving the working fluid circulation is provided between the two. The first buffer tank 16 is provided with a ninth pressure sensor, and the second buffer tank 17 is provided with a tenth pressure sensor and a ninth pressure relief valve. A low-temperature flow controller 21 is connected between the outlet of the second buffer tank 17 and the inlet of the second regenerator 15 through a single-layer pipeline, which is used to transport and regulate low-temperature gas into the second regenerator 15 for pre-cooling. A normal temperature flow controller 22 is connected between the outlet of the second buffer tank 17 and the outlet of the refrigerator through a single-layer pipeline, which is used to transport and regulate high-temperature gas into the low-temperature distribution unit.

[0041] A cold source heater is provided at the outlet of the refrigerator, which is used to mix the high-temperature gas passing through the normal temperature flow controller 22 and the low-temperature gas passing through the low-temperature flow controller 21, and to control the temperature of the working medium at the outlet of the refrigerator by mixing. The outlet of the cold source heater and the inlet of the low-temperature switch valve V13 are connected by a pipeline, and a first-level low-temperature switch valve V15 is provided for the first-level pre-cooling closed cycle of the low-temperature cold source unit, and a twelfth temperature sensor is provided.

[0042] The cold source valve box is connected to the first vacuum pump through a pipeline, and a solenoid valve for controlling the start and stop of vacuuming the cold source valve box interlayer is provided therebetween. The first vacuum gauge 18 is connected to the outside of the cold source valve box to monitor the vacuum degree of the cold source valve box interlayer.

[0043] The inlet pipeline of the first buffer tank 16 is connected in sequence with the first non-return valve, the first diaphragm valve BV1, the pressure reducing valve, and the filter 25 for nitrogen replenishment of the pipeline system. The inlet pipeline of the first buffer tank 16 is connected with the second diaphragm valve BV2 for evacuation and replacement of the low temperature cold source unit pipeline.

[0044] The low temperature distribution unit includes a distribution valve box, a working target plate, and a pre-cooling target plate. The distribution valve box is connected to the second vacuum pump through a pipeline, and is provided with a second solenoid valve for controlling the start and stop of vacuuming of the cold source valve box interlayer. The outside of the low temperature valve box is connected to a second vacuum gauge 19 for monitoring the vacuum degree of the distribution valve box interlayer.

[0045] The inlet of the secondary low-temperature switch valve V16 is connected to the outlet of the low-temperature cold source unit, and its outlet is connected to the inlet of the low-temperature cold source unit, serving as the switch control of the secondary precooling pipeline. The outlet of the low-temperature cold source unit is provided with a first temperature sensor, a first pressure sensor, and a first pressure relief valve SRV1.

[0046] The pipeline system where the working target disk 100 is located is connected in sequence with the first low-temperature throttle valve TV1, the low-temperature switch valve V3, the working target disk 100, and the low-temperature switch valve V5. The inlet of the first low-temperature throttle valve TV1 is connected to the outlet of the low-temperature cold source unit, and the outlet of the low-temperature switch valve V5 is connected to the inlet of the low-temperature cold source unit. The low-temperature throttle valve TV1 is used to control the temperature of the working medium entering the working target disk. The outlet of the low-temperature switch valve V5 is provided with a seventh pressure sensor.

[0047] The inlet of the three-stage low-temperature switch valve V17 is connected to the outlet of the first low-temperature throttle valve TV1, and its outlet is connected to the inlet of the low-temperature cold source unit, serving as the switch control of the three-stage precooling pipeline. The outlet of the first low-temperature throttle valve TV1 is provided with a third temperature sensor, a third pressure sensor, and a third pressure relief valve SRV3.

[0048] A fourth pressure sensor, a fourth pressure relief valve SRV4, and a low temperature switch valve V11 are provided in the pipeline between the inlet of the working target plate 100 and the outlet of the low temperature switch valve V3. A fourth pressure sensor is provided at the outlet of the working target plate.

[0049] The pipeline system where the precooling target disk 200 is located is connected with a low temperature throttle valve TV2, a low temperature switch valve V4, a precooling target disk 200, and a low temperature switch valve V6 in sequence. The inlet of the low temperature throttle valve TV2 is connected to the outlet of the low temperature cold source unit, and the outlet of the low temperature switch valve V6 is connected to the inlet of the low temperature cold source unit. The low temperature throttle valve TV2 is used to control the temperature of the working medium entering the precooling target disk. The inlet of the low temperature switch valve V18 is connected to the outlet of the second low temperature throttle valve TV2, and its outlet is connected to the inlet of the low temperature cold source unit, as a switch control of the three-stage precooling pipeline. Specifically, the outlet of the low temperature throttle valve TV2 is provided with a second temperature sensor, a second pressure sensor, and a first pressure relief valve SRV2. The pipeline between the inlet of the precooling target disk and the outlet of the low temperature switch valve V4 is provided with a fifth pressure sensor, a fifth pressure relief valve SRV5, and a low temperature switch valve V12. The outlet of the precooling target disk is provided with a fifth pressure sensor.

[0050] The temperature return pipeline system where the working target disk is located is connected in sequence with the second one-way valve, the third diaphragm valve, the target disk inlet heater, the low-temperature switch valve V7, the working target disk, the low-temperature switch valve V9, the target disk outlet heater, and the third one-way valve. The inlet of the target disk inlet heater is provided with a sixth pressure sensor, and the outlet is provided with a sixth temperature transmitter. The outlet of the target disk outlet heater is provided with a seventh temperature sensor. The temperature return pipeline system where the precooling target disk is located is connected in sequence with the second one-way valve, the third diaphragm valve, the target disk inlet heater, the low-temperature switch valve V8, the working target disk, the low-temperature switch valve V10, the target disk outlet heater, and the third one-way valve.

[0051] The first pressure relief valve SRV1, the first pressure relief valve SRV2, the third pressure relief valve SRV3, the fourth pressure relief valve SRV4, the fifth pressure relief valve SRV5, the sixth pressure relief valve SRV6, and the seventh pressure relief valve SRV7 connected to the internal pipelines of the cryogenic valve box are connected to the first muffler and the second muffler after being collected. The nitrogen discharge pipeline of the temperature return pipeline is also collected with the discharge pipeline of the pressure relief valve and discharged through the second muffler.

[0052] A first solenoid valve is provided between the cold source valve box and the first vacuum pump, which is used to control the switch of the suction pipeline. The cold source valve box is connected to a first vacuum gauge 18, which is used to monitor the vacuum degree of the internal interlayer of the cold source valve box. When the vacuum degree value is higher than the set value, the feedback signal is transmitted to the first solenoid valve and the first vacuum pump. According to the principle of starting the first vacuum pump first and then opening the first solenoid valve, external air is prevented from entering the cold source valve box, causing the cold source valve box to instantly frost and condense. When the vacuum degree value reaches the set value, the first solenoid valve is closed first and then the first vacuum pump is closed to maintain the internal vacuum. The design of interlocking feedback can realize the automatic air replenishment function by measuring the pressure value in the pipe, fully realizing the highly automated operation of the system, completely solving the problem of manual operation, liberating the hands of workers, and improving work efficiency.

[0053] Two regenerators are arranged inside the cold source valve box, namely the first regenerator 14 and the second regenerator 15. The two regenerators are connected in series to ensure sufficient heat exchanger area. The two regenerators exchange heat between the low-temperature return air medium from the low-temperature distribution unit and the external normal-temperature air, maximizing the use of the cold capacity of the return air low temperature, realizing cold capacity recovery and energy saving, so that the working medium entering the refrigerator obtains a lower temperature, better exerts the cold capacity of the refrigerator, and makes the output circulating working medium temperature lower. Compared with other equipment, the cold capacity transmission efficiency is higher and the cold capacity in the same temperature zone is larger. An eighth temperature sensor and an eighth pressure sensor are provided at the inlet of the return air pipeline of the regenerator, which are used to monitor the temperature and pressure of the return air inlet; a ninth temperature sensor is provided at the outlet of the return air pipeline of the regenerator, and a ninth pressure sensor is provided on the first buffer tank 16, which are used to monitor the temperature of the return air outlet; a tenth temperature sensor is provided at the inlet of the air inlet pipeline of the regenerator, and a tenth pressure sensor is provided on the second buffer tank 17, which are used to monitor the temperature and pressure of the air inlet; an eleventh temperature sensor and an eleventh pressure sensor are provided at the outlet of the air outlet pipeline of the regenerator, which are used to monitor the temperature and pressure of the air inlet outlet.

[0054] The power of the low-temperature cold source unit is provided by a circulating pump, and the circulating pump selects a scroll compressor as the circulating power of the driving medium. In order to ensure the pressure stability of the pipeline system and reduce the pressure fluctuation of the pipeline system, a first buffer tank 16 is provided at the inlet of the circulating pump, and a second buffer tank 17 is provided at the outlet of the circulating pump. The volume of the two buffer tanks is 250L. Since the inlet is low temperature and the outlet is high pressure after the circulating pump is turned on, a ninth pressure relief valve is installed on the second buffer tank to ensure that the working medium pressure in the pipeline system can be discharged from the pressure relief valve when it is too high, avoiding equipment damage and ensuring the personal safety of operators.

[0055] The inlet pipeline of the first buffer tank 16 is equipped with an automatic air replenishment device, which includes a filter 25, a pressure reducing valve, a first diaphragm valve BV1, and a first check valve in sequence. The function of the filter 25 is to remove moisture from the nitrogen gas. Since the freezing point of water is 0°C, if moisture enters the pipeline system, the pipeline will be blocked and the flow rate will be reduced or even zero; if moisture enters the refrigerator, the low-temperature switch valve, and the low-temperature regulating valve, the refrigerator or valve will be damaged. The function of the pressure reducing valve is to control the pressure of nitrogen entering the pipeline system by adjusting the handle of the pressure reducing valve to prevent the pipeline from being damaged by excessive pressure. The first diaphragm valve BV1 is mainly used for opening and closing when nitrogen is replenished. The diaphragm valve is interlocked with the ninth pressure sensor. The ninth pressure sensor is used to monitor the pressure value of nitrogen inside the pipeline system. When the pressure value is lower than the set value, the feedback signal is transmitted to the first diaphragm valve BV1, the first diaphragm valve BV1 is started, and nitrogen is replenished into the pipeline system. When the pressure value reaches the set value, the first diaphragm valve BV1 is closed to complete the automatic replenishment of the working medium in the pipeline system. The system has achieved highly automated operation, completely solved the problem of manual operation, liberated the hands of workers, and improved work efficiency. In order to prevent the nitrogen inside the pipeline system from overflowing outward, a first one-way valve is provided at the outlet of the first diaphragm valve BV1. The first one-way valve allows the gas to flow only from outside to inside and cannot flow in the opposite direction, thereby ensuring the outflow of the gas inside the pipeline.

[0056] The outlet of the second buffer tank 17 is provided with two working medium output pipelines, one of which passes through the low-temperature flow controller 21 to enter the air inlet of the second regenerator 15, and exchanges heat with the low-temperature return air, so that the inlet of the refrigerator is a low-temperature fluid. The refrigerator further cools the low-temperature fluid through the internal cold head and its own heat exchanger, thereby outputting a circulating working medium with a lower temperature, thereby reducing the cold loss inside the refrigerator. One of which passes through the normal temperature flow controller 22 to enter the outlet of the refrigerator. According to the value of the twelfth temperature sensor at the outlet of the refrigerator, the opening of the low-temperature flow controller 21 and the normal temperature flow controller 22 are adjusted to obtain the required output working medium temperature. Considering the need to output high-temperature working medium, a cold source heater is provided at the outlet of the refrigerator. When the equipment needs a higher temperature, the cold source heater is started. The heater uses a DC power supply to output power to heat the working medium. By setting the required working medium temperature, the power can be adaptively output to achieve the output of high-temperature working medium, avoiding the impact caused by the mixing of high and low temperature two-phase working mediums leading to temperature fluctuations, shortening the stabilization time of the system, and meeting the precise control of low and high temperature continuous temperature zones.

[0057] The circulation system is equipped with multi-stage precooling pipelines, which is convenient for step-by-step testing and ensures the safety of the target plate. In order to improve production efficiency, two low-temperature injection pipelines are designed to simultaneously deliver cold to the working target plate and the precooling target plate. The precooling target plate is first precooled. After the precooling treatment is completed, the process continues to transfer to the working target plate to complete the final low-temperature injection. An independent temperature return pipeline is designed, which is used for the rapid temperature return of the target plate.

[0058] First, the first-stage precooling is run, and the working fluid circulates along the first-stage precooling pipeline. The pipeline connections are the return air port of the first reheater 14, the second reheater 15, the first reheater 14 return air port, the first buffer tank 16, the circulation pump, the second buffer tank 17, the low-temperature flow controller 21, the air inlet of the second reheater 15, the air inlet of the first reheater 14, the refrigerator, and the low-temperature switch valve V15. This first-stage precooling is mainly used for self-circulation startup and cooling of the low-temperature cold source unit. The refrigerator is started to reduce the working fluid from room temperature to the lowest temperature of -150℃, and the operation of the cold source unit during the cooling process is monitored. After the first-stage precooling is completed, the low-temperature switch valve V15 is closed, and the second-stage precooling is started. The working fluid circulates along the second-stage precooling pipeline. The pipeline connections are the low-temperature switch valve V14, the return air port of the first regenerator 14, the second regenerator 15, the first regenerator 14 return air port, the first buffer tank 16, the circulation pump, the second buffer tank 17, the low-temperature flow controller 21, the air inlet of the second regenerator 15, the air inlet of the first regenerator 14, the refrigerator, the low-temperature switch valve V13, and the low-temperature switch valve V16. The second-stage precooling is mainly used for self-circulation startup cooling of the low-temperature cold source unit and the low-temperature distribution unit. The low-temperature cold source unit and the low-temperature distribution unit are connected by a low-temperature double-layer pipe, and the -150℃ low-temperature working fluid generated by the refrigerator startup is transported to the secondary pipeline of the low-temperature distribution valve box, and the operation of the working fluid in the process of being transported from the low-temperature cold source unit to the low-temperature distribution unit is monitored.

[0059] After the secondary precooling is completed, the low-temperature switch valve V16 is closed and the third-level precooling is turned on. The three-level precooling is connected in parallel in two ways, namely the three-level precooling of the working target plate and the three-level precooling of the precooling target plate. The working medium of the three-level precooling of the working target plate circulates along the three-level precooling pipeline, and the pipeline connections are the low-temperature switch valve V14, the return air port of the first regenerator 14, the second regenerator 15, the first regenerator 14 return air port, the first buffer tank 16, the circulation pump, the second buffer tank 17, the low-temperature flow controller 21, the air inlet of the second regenerator 15, the air inlet of the first regenerator 14, the refrigerator, the low-temperature switch valve V13, the low-temperature throttle valve TV1, and the low-temperature switch valve V17. The three-level precooling of the working target plate is mainly used to control the opening of the low-temperature regulating valve TV1 to complete the throttling and cooling of the low-temperature working medium. By monitoring the third temperature sensor, the lowest temperature after throttling by the low-temperature regulating valve TV1 is obtained. The three-stage precooling of the precooling target plate circulates along the three-stage precooling pipeline. The pipeline connections are the low-temperature switch valve V14, the return air port of the first reheater 14, the second reheater 15, the first reheater 14 return air port, the first buffer tank 16, the circulation pump, the second buffer tank 17, the low-temperature flow controller 21, the air inlet of the second reheater 15, the air inlet of the first reheater 14, the refrigerator, the low-temperature switch valve V13, the low-temperature throttle valve TV2, and the low-temperature switch valve V18. The three-stage precooling of the precooling target plate is mainly used to control the opening of the low-temperature regulating valve TV2 to complete the throttling and cooling of the low-temperature working medium. By monitoring the second temperature sensor, the lowest temperature after throttling by the low-temperature regulating valve TV2 is obtained. The lowest temperature of the same type of domestic equipment can only reach -120℃. This system has a wider application temperature range and adopts throttling and decompression cooling technology. A low-temperature throttle valve is provided to reduce the nitrogen temperature to below -160℃ through decompression.

[0060] After the third-stage precooling is completed, the low-temperature switch valve V17 and the low-temperature switch valve V18 are closed, and the working target disk circulation system and the precooling target disk circulation system are started. The working medium of the working target disk circulation system circulates along the working target disk circulation system pipeline, and the pipeline connections are the low-temperature switch valve V14, the first regenerator 14 return air port, the second regenerator 15, the first regenerator 14 return air port, the first buffer tank 16, the circulation pump, the second buffer tank 17, the low-temperature flow controller 21, the second regenerator 15 air inlet, the first regenerator 14 air inlet, the refrigerator, the low-temperature switch valve V13, the low-temperature throttle valve TV1, the low-temperature switch valve V3, the working target disk, and the low-temperature switch valve V5. The low-temperature working medium is further throttled and cooled through the low-temperature throttle valve TV1 and transported to the working target disk. The low-temperature working target disk is used for low-temperature injection.

[0061] The inlet of the working target disk is provided with a fourth pressure relief valve SRV4. When the pressure value of the working medium in the pipeline entering the low-temperature target disk exceeds a certain value, the discharge pressure of the fourth pressure relief valve SRV4 is reached, and the working medium is discharged from the pipeline to avoid damage to the working target disk due to excessive pipeline pressure, so as to protect the working target disk. At the same time, a low-temperature switch valve V11 is provided, which is used for evacuating and replacing the pipeline of the working target disk circulation system. The working medium of the pre-cooling target disk circulation system circulates along the pipeline of the pre-cooling target disk circulation system. The pipeline is connected in sequence to the low-temperature switch valve V14, the return air port of the first regenerator 14, the second regenerator 15, the first regenerator 14 return air port, the first buffer tank 16, the circulation pump, the second buffer tank 17, the low-temperature flow controller 21, the air inlet of the second regenerator 15, the air inlet of the first regenerator 14, the refrigerator, the low-temperature switch valve V13, the low-temperature throttle valve TV2, the low-temperature switch valve V4, the pre-cooling target disk, and the low-temperature switch valve V6. The low-temperature working fluid is further throttled and cooled through the low-temperature throttle valve TV2 and transported to the pre-cooling target plate. The low-temperature pre-cooling target plate is used for process pre-cooling. The inlet of the pre-cooling target plate is provided with a fifth pressure relief valve SRV5. When the working fluid pressure value in the pipeline entering the pre-cooling target plate exceeds a certain value, the discharge pressure of the fifth pressure relief valve SRV5 is reached, and the working fluid is discharged from the pipeline to avoid damage to the pre-cooling target plate due to excessive pipeline pressure, so as to protect the pre-cooling target plate. The seventh pressure relief valve SRV7 is provided at the summary outlet of the low-temperature distribution unit for overpressure relief protection of the return air pipeline. At the same time, a low-temperature switch valve V12 is provided for evacuating and replacing the pipeline of the pre-cooling target disk circulation system.

[0062] The low temperature distribution unit is provided with an independent target plate temperature recovery pipeline, including a working target plate temperature recovery system and a pre-cooling target plate temperature recovery system. The connecting pipelines of the working target plate temperature recovery system are: normal temperature nitrogen passes through the second one-way valve, the third diaphragm valve, the target plate inlet heater, the low temperature switch valve V7, the working target plate, the low temperature switch valve V9, the target plate outlet heater, and the third one-way valve. The third diaphragm valve is used to control the opening and closing of the target plate temperature recovery system. The second one-way valve prevents the nitrogen in the pipeline from backflowing. At the same time, a sixth pressure relief valve SRV6 is provided for safe discharge when the working target plate temperature recovery system is overpressured to protect the working target plate. The target plate outlet heater can further heat the nitrogen that has become low temperature after completing heat exchange with the working target plate to prevent the discharged low temperature nitrogen from causing frost or even ice in the pipeline, and finally melting into water, affecting the operation of the equipment. A third one-way valve is provided at the outlet to prevent external air from flowing back into the target plate, causing damage to the target plate due to freezing of water in the air. The connecting pipelines of the precooling target plate temperature recovery system are as follows: room temperature nitrogen passes through the second one-way valve, the third diaphragm valve, the target plate inlet heater, the low-temperature switch valve V8, the precooling target plate, the low-temperature switch valve V10, the target plate outlet heater, and the third one-way valve.

[0063] A second solenoid valve is provided between the distribution valve box and the second vacuum pump to control the switch of the extraction pipeline. The distribution valve box is connected to a second vacuum gauge 19 to monitor the vacuum degree of the internal interlayer of the distribution valve box. When the vacuum degree value is higher than the set value, the feedback signal is transmitted to the second solenoid valve and the second vacuum pump. According to the principle of starting the second vacuum pump first and then opening the second solenoid valve, external air is prevented from entering the low-temperature valve box, causing instant frost and condensation in the cold source valve box. When the vacuum degree value reaches the set value, the second solenoid valve is closed first and then the second vacuum pump is closed to maintain the internal vacuum.

[0064] All closable pipelines in the system are equipped with safety relief valves. If the working fluid pressure in the pipeline is too high during system operation, it can be discharged from the safety relief valve to the outside to avoid damage to the equipment due to excessive pipeline pressure, while ensuring the safety of personnel. The internal pipelines of the distribution valve box in the low-temperature distribution unit are connected in sequence with the first pressure relief valve SRV1, the first pressure relief valve SRV2, the third pressure relief valve SRV3, the fourth pressure relief valve SRV4, the fifth pressure relief valve SRV5, the sixth pressure relief valve SRV6, and the seventh pressure relief valve SRV7. The setting of the pressure relief valve fully solves the problem of excessive nitrogen pressure discharge in the segmented pipeline, effectively protects the working target plate and the pre-cooling target plate, and is connected to the first muffler and the second muffler after being aggregated for noise reduction. At the same time, after the nitrogen is discharged after returning to temperature, it is also aggregated with the pressure relief valve discharge pipe and discharged through the second muffler.

[0065] This embodiment has the following advantages: 1. The system selects nitrogen as the circulating working fluid. Compared with other working fluids, it has the remarkable characteristics of low cost, easy to obtain, non-toxic, harmless, and pollution-free, which can meet the needs of long-term semiconductor production. The technical problem to be solved is to provide a variable temperature circulation temperature control system with a wide temperature range, large cooling capacity, high temperature control accuracy, long life, and simple operation, which is of great significance in the field of semiconductor manufacturing. The system can be widely used in semiconductor manufacturing, testing and other fields, and is suitable for equipment in semiconductor production lines. It can continuously provide temperature-controlled low-temperature media to ensure the process processing temperature required by the equipment chambers of etching, ion implantation, diffusion and other processes in semiconductor factories.

[0066] 2. The heat recovery closed cycle structure design can maximize the recovery of cold and energy saving, and can achieve large flow and large cold transmission. Compared with other equipment, the cold transmission efficiency is higher and the cold capacity in the same temperature zone is larger.

[0067] 3. The output temperature of the fluid is controlled by using two methods: high-temperature and low-temperature fluid mixing and thermal confrontation. The working fluid is completely heated by the heater to become a gas, and then the gas is divided into two paths through the normal temperature flow controller 22 and the low temperature flow controller 21. The two are mixed at the outlet of the refrigerator, and finally the power of the heater at the outlet is adjusted to achieve accurate control of the outlet temperature. At the same time, this method can avoid the impact of the mixing of high and low temperature two-phase working fluids that causes temperature fluctuations, shorten the stabilization time of the system, and achieve precise temperature control of the fluid working fluid.

[0068] 4. The throttling, decompression and cooling technology is adopted. A low-temperature throttle valve is installed to reduce the nitrogen temperature to below -160℃ through decompression. The lowest temperature of the same type of domestic equipment can only reach -120℃. This system has a wider application temperature range.

[0069] 5. In terms of system flow, a multi-stage pre-cooling design is adopted to facilitate step-by-step detection and ensure the safety of the target plate. In order to improve the efficiency of low-temperature injection in the semiconductor production process, two low-temperature injection pipelines are designed to simultaneously deliver cold air to the working target plate and the pre-cooling target plate. The pre-cooling target plate is first pre-cooled. After the pre-cooling treatment, the process continues to transfer to the working target plate to complete the final low-temperature injection.

[0070] 6. Design an independent temperature return pipeline system for the target plate. The temperature of the room temperature nitrogen rises rapidly after passing through the heater and becomes hot nitrogen. The heated nitrogen is transported to the low temperature target plate, and the low temperature target plate is reheated by the heat of nitrogen, which can achieve rapid reheating of the low temperature target plate and greatly improve the work efficiency. At the same time, an outlet heater is further set at the outlet of the target plate to further heat the low temperature nitrogen after heat exchange with the low temperature target plate to prevent frost or even ice on the pipeline after the low temperature nitrogen is discharged.

[0071] 7. All closable pipelines in the system are equipped with safety relief valves. If the working fluid pressure in the pipeline is too high during system operation, it can be discharged to the outside from the safety relief valve to avoid equipment damage caused by excessive pipeline pressure and ensure personnel safety.

[0072] 8. The system adopts a chain feedback design. By measuring the pressure value in the pipe, it can realize the automatic air replenishment function; by measuring the value of the vacuum degree of the interlayer, it can automatically start the pump to evacuate. This design fully realizes the highly automated operation of the system, completely solves the problem of manual operation, liberates the hands of workers, and improves work efficiency.

[0073] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A high-safety variable temperature cycle temperature control system, comprising: The low temperature cold source unit and the low temperature distribution unit are characterized in that: The low-temperature distribution unit comprises a distribution valve box (5) and a second vacuum pump (6); the distribution valve box (5) is provided with a second vacuum gauge (19) for detecting the internal vacuum degree; the second vacuum pump (6) is used to evacuate the distribution valve box (5) according to the detection result of the second vacuum gauge (19); the distribution valve box (5) is provided with a cold capacity outlet and a heat recovery inlet connected to the target plate, a second cold capacity inlet and a second heat recovery outlet connected to the low-temperature cold source unit, and a nitrogen inlet and a nitrogen outlet; the distribution valve box (5) is provided with a nitrogen inlet pipeline (2 3), a nitrogen outlet pipeline (24), a low-temperature air inlet pipeline and a low-temperature air return pipeline, the two ends of the nitrogen inlet pipeline (23) are connected to the nitrogen inlet and the cold capacity outlet respectively, the two ends of the nitrogen outlet pipeline (24) are connected to the heat recovery inlet and the nitrogen outlet respectively, the two ends of the low-temperature air inlet pipeline are connected to the second cold capacity and the cold capacity outlet respectively, the two ends of the low-temperature air return pipeline are connected to the heat recovery inlet and the second heat recovery outlet respectively, the nitrogen inlet pipeline (23) is provided with an inlet heater (8) and the nitrogen outlet pipeline (24) is provided with an outlet heater (9).

2. The high-safety variable temperature cycle temperature control system according to claim 1 is characterized in that: The low-temperature cold source unit comprises a cold source valve box (1), a refrigerator (2), a circulating pump (3), a first vacuum pump (4) and an air supply device. The cold source valve box (1) is provided with a first vacuum gauge (18) for detecting the internal vacuum degree. The first vacuum pump (4) is used to evacuate the cold source valve box (1) according to the detection result of the first vacuum gauge (18). The cold source valve box (1) is also provided with a first reheat outlet and a first cold inlet respectively connected to the input end and the output end of the refrigerator (2). The cold source valve box (1) is provided with a reheater, a first outlet switch valve V13 and a first inlet switch valve V14. The first outlet switch valve V13 is connected to the first cold inlet. The first heat reheat outlet is connected to the high-temperature channel of the reheater, the circulating pump (3), the low-temperature channel of the reheater and the first inlet switch valve V14 in sequence. The air supply device is connected to the pipeline between the circulating pump (3) and the low-temperature channel of the reheater and is used to supply air to the circuit of the low-temperature cold source unit.

3. The high-safety variable temperature cycle temperature control system according to claim 2 is characterized in that: The low-temperature cold source unit further comprises a first buffer tank (16), the first buffer tank (16) being connected to a pipeline between the circulation pump (3) and the low-temperature channel of the regenerator.

4. The high-safety variable temperature cycle temperature control system according to claim 3 is characterized in that: A ninth pressure sensor is provided on the first buffer tank (16), and the air replenishing device replenishes air into the circuit according to the pressure value detected by the ninth pressure sensor.

5. The high-safety variable temperature cycle temperature control system according to claim 4 is characterized in that: The air supply device comprises a filter (25), a pressure reducing valve, a first diaphragm valve BV1 and a first non-return valve which are sequentially connected in series along the air intake direction, and the filter (25) is used to remove moisture from the intake air.

6. The high-safety variable temperature cycle temperature control system according to claim 3 is characterized in that: The low-temperature cold source unit further comprises a second buffer tank (17), the second buffer tank (17) being arranged on a pipeline between the circulation pump (3) and the high-temperature channel of the regenerator, and the second buffer tank (17) being provided with a ninth pressure relief valve SRV9.

7. The high-safety variable temperature cycle temperature control system according to claim 1 or 2, characterized in that: A low-temperature throttle valve TV is also provided in the distribution valve box (5), and the low-temperature throttle valve TV is connected in series to the low-temperature air intake pipeline.

8. The high-safety variable temperature cycle temperature control system according to claim 7, characterized in that: A first pressure relief valve SRV1 is provided on the pipeline between the low-temperature throttle valve TV and the second cooling capacity inlet, and a third pressure relief valve SRV3 is provided on the pipeline between the low-temperature throttle valve TV and the cooling capacity outlet.

9. The high-safety variable temperature cycle temperature control system according to claim 1 or 2, characterized in that: A sixth pressure relief valve SRV6 is provided in the upstream pipeline of the inlet heater (8).

10. The high-safety variable temperature cycle temperature control system according to claim 1 or 2, characterized in that: A fourth pressure relief valve SRV4 is provided at the cold outlet.

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