Laser coupling assembly, laser processing device and laser processing method

Abstract

The invention provides a laser coupling assembly, a laser processing device and a laser processing method, and relates to the technical field of laser processing, and the laser coupling assembly comprises a bearing piece which is provided with a first channel and a lens rotatably arranged in the first channel, an included angle is formed between the axis of the lens of the first channel and the extension line where the laser incident direction is located, and the lens is used for reflecting the laser in the first channel and adjusting the position of a light spot formed by the laser on the nozzle; the nozzle is connected with the bearing piece and used for outputting liquid jet flow; the monitoring piece is connected with the bearing piece; the controller is configured to output an adjusting signal according to the relative position; the driving part is in communication connection with the controller to receive the adjusting signal, and the driving part is used for driving the lens to rotate. Thus, the position of the laser is adjusted through the driving effect of the driving part, the laser adjusting precision can be improved, meanwhile, the complexity in the laser adjusting process is reduced, and the laser adjusting efficiency can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of laser processing, and in particular, to a laser coupling component, a laser processing device, and a laser processing method. Background Art

[0002] As a high-precision processing means, water-guided laser has been widely used in the fields of aerospace, semiconductors, microelectronics, instrumentation, etc. Since the water-guided laser technology involves the conduction of fine water jets and lasers, it is necessary to precisely couple the laser with the water jet.

[0003] Currently, in order to achieve precise coupling of the laser and the water jet, the angle or position of the lens on the laser transmission path is adjusted to adjust the laser emission direction. However, the adjustment method in the related technology has a large error, so it cannot meet the precise adjustment of the laser beam, and thus cannot achieve precise coupling of the laser and the water jet. Summary of the Invention

[0004] The problem solved by the present invention is how to improve the adjustment precision of the laser.

[0005] To solve the above problems, the present invention provides a laser coupling component, a laser processing device, and a laser processing method.

[0006] In a first aspect, the present invention provides a laser coupling component for coupling a laser, a liquid ejected from a nozzle, and a gas, including: a receiving member having a first channel and a lens rotatably disposed in the first channel, the first channel being for the laser to pass through, an axis of the lens in the first channel having an included angle with an extension line where the laser incident direction is located, the lens being for reflecting the laser in the first channel and adjusting a position of a light spot formed by the laser on the nozzle; a nozzle connected to the receiving member for outputting a liquid jet; a monitoring member connected to the receiving member for monitoring a relative position between the light spot and the nozzle; a controller configured to output an adjustment signal according to the relative position; and a driving member communicatively connected to the controller to receive the adjustment signal, the driving member being drivingly connected to the lens for driving the lens to rotate according to the adjustment signal.

[0007] Optionally, the lens includes at least one reflecting mirror and at least one dichroic mirror, the reflecting mirror and the dichroic mirror being oppositely disposed, the dichroic mirror being for reflecting the laser reflected by the reflecting member to form the light spot, the dichroic mirror also being for transmitting auxiliary light, different driving ends of the driving member being respectively drivingly connected to the reflecting mirror and the dichroic mirror to drive the reflecting mirror and / or the dichroic mirror to rotate.

[0008] Optionally, the monitoring member includes: an identification unit for monitoring the relative position between the light spot and the nozzle; an auxiliary light source generating unit for generating the auxiliary light, at least part of the auxiliary light being transmissible to the identification unit, and another part of the auxiliary light being capable of being coupled with the nozzle and the laser through the dichroic mirror.

[0009] Optionally, the monitoring member further includes: a housing connected to the receiving member, the housing having a second channel communicating with the first channel, the second channel being for the auxiliary light to pass through, the auxiliary light source generating unit being connected to the housing; a lens barrel connected to the housing, the lens barrel being for adjusting the focal length, the identification unit being disposed at an end of the lens barrel away from the housing, at least part of the auxiliary light being transmissible to the identification unit through the second channel and the lens barrel in sequence.

[0010] Optionally, the laser coupling assembly further includes: a laser collimating member connected to the receiving member, the laser collimating member being provided with a laser input end for connecting with an optical fiber to generate the laser, the laser collimating member being for collimating the laser and transmitting the collimated laser to the lens.

[0011] Optionally, the laser coupling assembly further includes: a variable aperture disposed between the laser collimating member and the receiving member, the variable aperture being for filtering out edge stray light in the collimated laser.

[0012] Optionally, the laser coupling assembly further includes: a focusing member connected to the receiving member, the focusing member being disposed opposite to the dichroic mirror to focus the laser reflected by the dichroic mirror.

[0013] Optionally, the laser coupling assembly further includes: a coupling member disposed at an end of the focusing member away from the receiving member, the nozzle being located at an end of the coupling member away from the focusing member, the coupling member having a coupling cavity for coupling the focused laser, the liquid, and the gas.

[0014] Compared with the related art, the beneficial effects of the laser coupling assembly of the present invention are:

[0015] In the present invention, a lens is disposed in the first channel to reflect the laser in the first channel. Meanwhile, the lens is rotatable to adjust the position of the light spot formed by the laser on the nozzle. Moreover, the relative position between the light spot and the nozzle is monitored by a monitoring component. When the monitoring component detects that the relative position between the light spot and the nozzle does not meet the preset requirements of the device, an adjustment signal can be output by the controller. Since the controller is communicatively connected to the driving component and the driving component is drivingly connected to the lens, the driving component can receive this adjustment signal and drive the lens to rotate so as to adjust the position of the laser, making the relative position between the light spot and the nozzle meet the preset requirements. Thus, by utilizing the driving effect of the driving component to adjust the position of the laser, not only can the precision of laser adjustment be improved, but also the complexity during the laser adjustment process can be reduced, which is beneficial to improving the laser adjustment efficiency.

[0016] In a second aspect, the present invention provides a laser processing device, including the laser coupling component as described above; a laser component for providing laser to the laser coupling component; a liquid supply component for providing liquid to the coupling cavity of the laser coupling component; and a gas supply component for providing auxiliary gas to the coupling cavity of the laser coupling component.

[0017] In a third aspect, the present invention provides a laser processing method applicable to the laser processing device as described above, including: starting the liquid supply component and the gas supply component, coupling the liquid generated by the liquid supply component and the gas generated by the gas supply component in a coupling member, and forming a liquid jet through a nozzle; starting the laser component to output an indicating laser, and inputting the indicating laser to a laser collimating member; adjusting the laser collimating head and the variable aperture to collimate the indicating laser output and filter the edge stray light of the indicating laser; starting the monitoring component and adjusting the lens barrel focal length of the monitoring component; adjusting a focusing member to focus the light spot of the indicating laser on the nozzle, and monitoring the relative position between the light spot and the center of the nozzle through the recognition unit of the monitoring component; starting the controller and the driving component, the controller outputting an adjustment signal according to the relative position, and the driving component receiving the adjustment signal and driving the lens to rotate to adjust the relative position between the light spot and the center of the nozzle; switching the indicating laser output by the laser component to a processing laser, coupling the processing laser, the liquid generated by the liquid supply component and the gas generated by the gas supply component in the coupling member to form a laser coupling energy beam, and processing a workpiece to be processed by using the laser coupling energy beam; sequentially closing the laser component, the gas supply component and the water supply component, removing the processed workpiece, and closing the monitoring component, the controller and the driving component.

[0018] Since the technical improvements and technical effects of the laser processing device and the laser processing method are the same as those of the laser coupling component, the laser processing device and the laser processing method will not be elaborated herein. Description of the Drawings

[0019] Figure 1 This is a schematic structural diagram of the laser coupling component in the embodiment of the present invention;

[0020] Figure 2 This is a top view schematic diagram of the laser coupling component in the embodiment of the present invention;

[0021] Figure 3 is Figure 2 an enlarged schematic diagram at A-A in

[0022] Figure 4 This is an exploded structural diagram of the laser coupling component in the embodiment of the present invention;

[0023] Figure 5 This is a schematic diagram of the path transmission of the laser beam and the auxiliary beam of the laser coupling component in the embodiment of the present invention;

[0024] Figure 6 This is a schematic flow diagram of the laser processing method in the embodiment of the present invention.

[0025] Explanation of reference numerals:

[0026] Laser coupling component 1, receiving member 10, first channel 11, lens 12, reflector 121, dichroic mirror 122, monitoring member 20, identification unit 21, auxiliary light source generating unit 22, controller 30, driving member 40, housing 50, second channel 51, lens barrel 60, laser collimating member 70, laser input end 71, variable aperture 80, focusing member 90, coupling member 100, coupling cavity 101, nozzle 110, laser beam 120, auxiliary beam 130. Detailed implementation manners

[0027] To make the above objects, features and advantages of the present invention more obvious and understandable, the following will describe in detail the specific embodiments of the present invention with reference to the accompanying drawings. Although some embodiments of the present invention are shown in the drawings, it should be understood that the present invention can be implemented in various forms and should not be construed as limited to the embodiments described herein. On the contrary, these embodiments are provided to more thoroughly and completely understand the present invention. It should be understood that the drawings and embodiments of the present invention are only for exemplary purposes and are not used to limit the protection scope of the present invention.

[0028] The Z-axis in the attached drawings represents the vertical direction, that is, the up-and-down position. The positive direction of the Z-axis represents the upper side, and the negative direction of the Z-axis represents the lower side. The X-axis in the attached drawings represents the horizontal direction and is specified as the front-and-back position. The positive direction of the X-axis represents the front side, and the negative direction of the X-axis represents the back side. The Y-axis in the attached drawings represents the left-and-right position. The positive direction of the Y-axis represents the left side, and the negative direction of the Y-axis represents the right side. It should be noted that the above-described meanings of the Z-axis, Y-axis, and X-axis are only for facilitating the description of the present invention and simplifying the description, rather than indicating or implying that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present invention.

[0029] As used herein, the term "comprising" and its variations are open-ended, that is, "including but not limited to"; the term "based on" is "at least partially based on"; the term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments"; the term "optionally" means "optional embodiment". The relevant definitions of other terms will be given in the following description. It should be noted that the concepts such as "first" and "second" mentioned in the present invention are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0030] It should be noted that the modification of "one" and "plural" mentioned in the present invention is illustrative rather than restrictive. Those skilled in the art should understand that unless otherwise clearly specified in the context, it should be understood as "one or more".

[0031] In the related art, the lens 12 is usually adjusted manually. However, manual adjustment not only has a large error, but also has a relatively complex operation process. Therefore, it cannot meet the precision of laser adjustment and also reduces the adjustment efficiency of the laser.

[0032] To solve the above problems, the present invention provides a laser coupling component 1, a laser processing device, and a laser processing method.

[0033] As Figures 1 to 6As shown in the first aspect, the present invention provides a laser coupling assembly 1 for coupling a laser, a liquid ejected from a nozzle 110, and a gas, including: a receiving member 10 having a first channel 11 and a lens 12 rotatably disposed in the first channel 11. The first channel 11 is for the laser to pass through. The axis of the lens 12 in the first channel 11 forms an angle with the extension line of the laser incident direction. The lens 12 is for reflecting the laser in the first channel 11 and adjusting the position of the light spot formed by the laser on the nozzle 110; a nozzle 110 connected to the receiving member 10 for outputting a liquid jet; a monitoring member 20 connected to the receiving member 10 for monitoring the relative position between the light spot and the nozzle 110; a controller 30 configured to output an adjustment signal according to the relative position; and a driving member 40 communicatively connected to the controller 30 to receive the adjustment signal. The driving member 40 is drivingly connected to the lens 12 for driving the lens 12 to rotate according to the adjustment signal.

[0034] In the present invention, by providing the lens 12 in the first channel 11, the lens 12 reflects the laser in the first channel 11. At the same time, the lens 12 is rotatable to adjust the position of the light spot formed by the laser on the nozzle 110. And the monitoring member 20 monitors the relative position between the light spot and the nozzle 110. When the monitoring member 20 monitors that the relative position between the light spot and the nozzle 110 does not meet the preset requirements of the device, the controller 30 can output an adjustment signal. Since the controller 30 is communicatively connected to the driving member 40 and the driving member 40 is drivingly connected to the lens 12, the driving member 40 can receive the adjustment signal and drive the lens 12 to rotate to adjust the position of the laser, so that the relative position between the light spot and the nozzle 110 meets the preset requirements. In this way, using the driving effect of the driving member 40 to adjust the position of the laser can not only improve the precision of laser adjustment, but also reduce the complexity in the laser adjustment process, which is beneficial to improving the laser adjustment efficiency.

[0035] In the present application, the receiving member 10 is specifically formed by fixing a plurality of connecting sub-parts to each other, and the plurality of connecting sub-parts are fixed by screws. The above structure is simple and easy to process. It can not only modify the size of the receiving member 10 according to the use environment of the receiving member 10, but also improve the disassembly and assembly efficiency of the receiving member 10, which is convenient for the use and storage of the receiving member 10.

[0036] Specifically, the lens 12 in the present application can rotate in all directions, that is, it can rotate around the X-axis, Y-axis or Z-axis to adjust the lens 12 in different directions, so as to meet the adjustment requirements of the laser as much as possible to improve the coupling efficiency of the laser and the liquid.

[0037] Furthermore, the monitoring component 20 in the present application is a coaxial vision monitoring module. The coaxial vision monitoring module adopts a coaxial optical path design, that is, the lens optical path of the coaxial vision monitoring module is coaxial with the nozzle hole, and the lens optical path of the coaxial vision monitoring module can be fitted into the laser optical path, thereby reducing the measurement error caused by light deflection and facilitating the realization of high-precision measurement and positioning of the relative position between the light spot and the nozzle 110.

[0038] In some embodiments of the present application, the driving component 40 can be a micro motor or an adjusting screw, as long as it can satisfy the rotation of the lens 12.

[0039] Meanwhile, in the present application, the user can, according to the relative position between the light spot monitored by the monitoring component 20 and the nozzle 110, manually operate the controller 30 to enable the controller 30 to generate an adjustment signal to drive the driving component 40 to operate.

[0040] Certainly, in other embodiments of the present application, the controller 30 can also be communicatively connected to the monitoring component 20. In this way, the controller 30 can directly receive the relative position signal monitored by the monitoring component 20, and then output an adjustment signal according to the relative position signal to control the operation of the driving component 40. In this way, fully automatic adjustment of the lens 12 can be realized, and the adjustment efficiency of the laser can be further improved.

[0041] In the embodiments of the present application, the requirement for the relative position between the light spot and the nozzle 110 is specifically that the light spot needs to be aligned with the center of the nozzle hole of the nozzle 110. Since the power of the laser is relatively high, this can reduce the risk of damage to the structure of the nozzle 110 caused by the light spot being located on the surface of the nozzle 110 and irradiating the surface of the nozzle 110 for a long time, thereby facilitating the improvement of the service life of the nozzle 110.

[0042] Such as Figure 3As shown, specifically, the lens 12 includes a reflector 121 and a dichroic mirror 122. For example, a reflector 121 and a dichroic mirror 122 are sequentially arranged along the laser optical path. The dichroic mirror 122 is used to reflect the laser reflected by the reflector 121 to form a light spot, and the dichroic mirror 122 is also used to transmit the auxiliary light. Different driving ends of the driving member 40 are respectively drivingly connected to the reflector 121 and the dichroic mirror 122 to drive the reflector 121 and / or the dichroic mirror 122 to rotate. Since the dichroic mirror 122 can reflect the laser, and at the same time the driving member 40 can drive at least one of the reflector 121 and the dichroic mirror 122 to rotate, the dichroic mirror 122 can cooperate with the reflector 121 to achieve laser adjustment in a larger range to meet the laser adjustment requirements. At the same time, the dichroic mirror 122 can also transmit the auxiliary light, so it is convenient to transmit the auxiliary light to the relative position of the light spot and the nozzle 110, so as to facilitate observing the relative position of the light spot and the nozzle 110 through the monitoring member 20. In this way, the accuracy of the relative position of the light spot and the nozzle 110 monitored by the monitoring member 20 can be further improved.

[0043] In the present application, the axis of the reflector 121 and the axis of the dichroic mirror 122 are both at an angle of 45° to the axial direction of the first channel 11, and the mirror surfaces of the reflector 121 and the dichroic mirror 122 are opposite to each other. In this way, the laser transmission direction can be changed by 90 degrees through the reflector 121 and the dichroic mirror 122, which is convenient for the optical path design of the first channel 11 and the design of the relative positions of each structure with respect to the optical path. Of course, the axes of the reflector 121 and the dichroic mirror 122 can also be set to other angles, and the relative positions of the reflector 121 and the dichroic mirror 122 can also be set to other forms, as long as the use requirements of the device can be met, which will not be elaborated here.

[0044] As Figure 3 shown, optionally, the monitoring member 20 includes: an identification unit 21 for monitoring the relative position of the light spot and the nozzle 110; an auxiliary light source generating unit 22 for generating auxiliary light, part of the auxiliary light is transmitted to the identification unit 21, and the other part of the auxiliary light is coupled with the nozzle 110 and the laser through the dichroic mirror 122. Through the above settings, the auxiliary light generated by the auxiliary light source generating unit 22 facilitates the monitoring member 20 to monitor the relative position of the light spot and the nozzle 110, so as to further improve the accuracy of the relative position of the light spot and the nozzle 110 monitored by the monitoring member 20.

[0045] In the present application, the auxiliary light is visible light. Since the laser transmission optical path and the monitoring optical path of the entire laser coupling assembly 1 are both in a closed space, visible light illumination is required for monitoring.

[0046] The recognition unit 21 in this application is specifically a CCD camera (Charge Coupled Device camera). The CCD camera is an optoelectronic conversion element that can convert the sensed optical signal into an electrical signal and output an image. Of course, the recognition unit 21 can also be other types of cameras such as CMOS (Complementary Metal Oxide Semiconductor), which will not be elaborated here.

[0047] As Figure 5 shown, the monitoring member 20 further includes: a housing 50, connected to the receiving member 10. The housing 50 has a second channel 51 communicating with the first channel 11. The second channel 51 is used for the auxiliary light to pass through. The auxiliary light source generating unit 22 is connected to the housing 50; a lens barrel 60, connected to the housing 50. The lens barrel 60 is used to adjust the focal length. The recognition unit 21 is provided at one end of the lens barrel 60 away from the housing 50. At least part of the auxiliary light can be sequentially transmitted through the second channel 51 and the lens barrel 60 to the recognition unit 21. In this application, the first channel 11 and the second channel 51 are enclosed spaces. In the enclosed space, the interference of the external environment on the light can be reduced to reduce the energy loss of the light. With such a setting, the auxiliary light is transmitted through the second channel 51, thereby improving the transmission efficiency of the auxiliary light. At the same time, the lens barrel 60 focuses the image of the relative position of the light spot and the nozzle 110 and transmits it to the recognition unit 21, enabling the image obtained by the monitoring member 20 to be clearer, so it is convenient to adjust the position of the laser.

[0048] As Figure 5 shown, in this application, the laser beam 120 is represented by a green line, and the auxiliary beam 130 is represented by a red line.

[0049] As Figure 5 shown, in this application, a plurality of adjusting lenses are further provided in the housing 50 to reflect or transmit the auxiliary light generated by the auxiliary light source generating unit 22, so that the auxiliary light can better enter the first channel 11 and the recognition unit 21.

[0050] As Figures 1 to 5As shown, optionally, the laser coupling assembly 1 further includes: a laser collimator 70, which is provided with a laser input end 71 and a laser output end. The laser input end 71 is used to connect with an optical fiber to receive laser light, and the laser output end is connected to the receiving member 10. The laser collimator 70 is used to collimate the laser light and transmit the collimated laser light into the first channel 11 of the receiving member 10. In this application, the laser input end 71 is specifically a QBH (Quick Buttons and Holder) interface end. Since the QBH interface end has advantages such as quick locking and positioning, it can ensure the stability and reliability of the connection between the laser collimator 70 and the optical fiber. At the same time, the QBH interface end can carry laser light with a relatively high power, thus improving the applicability and application range of the laser collimator 70, facilitating the connection between the laser collimator 70 and optical fibers with different powers to meet the usage requirements in different environments. Moreover, collimating the laser can change the divergent light path of the laser into a parallel light path, facilitating the subsequent coupling of the laser with gases and liquids.

[0051] As Figure 4 shown, specifically, the laser coupling assembly 1 further includes: a variable aperture 80, which is arranged between the laser collimator 70 and the receiving member 10. The variable aperture 80 is used to filter out the marginal stray light in the collimated laser light. With this setting, the beam quality of the laser can be improved to obtain a collimated laser beam 120 with a relatively high roundness and spot quality.

[0052] As Figure 4 shown, optionally, the laser coupling assembly 1 further includes: a focusing member 90, which is connected to the receiving member 10. The focusing member 90 is arranged opposite to the dichroic mirror 122 to focus the laser light reflected by the dichroic mirror 122. By setting the above structure, the laser beam can be focused to a spot size smaller than the diameter of the nozzle hole to achieve the coupling of the laser beam 120 and the liquid jet.

[0053] As Figure 4 shown, in this application, the focusing member 90 and the monitoring member 20 are respectively located on both sides of the dichroic mirror 122. Of course, the focusing member 90 and the monitoring member 20 can also be arranged at other positions as long as the usage requirements of the device can be met.

[0054] As Figure 4 shown, specifically, the laser coupling assembly 1 further includes: a coupling member 100, which is arranged at one end of the focusing member 90 away from the receiving member 10, and the nozzle 110 is located at one end of the coupling member 100 away from the focusing member 90. The coupling member 100 has a coupling cavity 101, and the coupling cavity 101 is used to couple the focused laser light, liquid, and gas. By setting the above structure, the coupling cavity 101 can couple the focused laser beam 120 with the high-pressure and stable liquid jet formed by the nozzle 110 to form a water-guided laser coupling energy beam through the total reflection effect.

[0055] In a second aspect, the present invention provides a laser processing device, including the laser coupling assembly 1 as described above; a laser assembly for providing laser to the laser coupling assembly 1; a liquid supply assembly for providing liquid into the coupling cavity 101 of the laser coupling assembly 1; and a gas supply assembly for providing auxiliary gas into the coupling cavity 101 of the laser coupling assembly 1. In this application, the optical fiber of the laser assembly is connected to the laser input end 71 of the laser processing device, and the liquid supply assembly and the gas supply assembly are respectively connected to the coupling member 100.

[0056] As Figure 6 shown, in a third aspect, the present invention provides a laser processing method applicable to the laser processing device as described above, including:

[0057] S100: Start the liquid supply assembly and the gas supply assembly. The liquid generated by the liquid supply assembly and the gas generated by the gas supply assembly are coupled within the coupling member 100 and form a liquid jet through the nozzle 110.

[0058] S200: Start the laser assembly to output an indication laser and input the indication laser to the laser collimating member 70.

[0059] S300: Adjust the laser collimating head and the variable aperture 80 to collimate and output the indication laser and filter the edge stray light of the indication laser.

[0060] S400: Start the monitoring member 20 and adjust the focal length of the lens barrel 60 of the monitoring member 20.

[0061] S500: Adjust the focusing member 90 to focus the spot of the indication laser on the nozzle 110, and monitor the relative position between the spot and the center of the nozzle 110 through the recognition unit 21 of the monitoring member 20.

[0062] S600: Start the controller 30 and the driving member 40. The controller 30 outputs an adjustment signal according to the relative position, and the driving member 40 receives the adjustment signal and drives the lens 12 to rotate to adjust the relative position between the spot and the center of the nozzle 110.

[0063] S700: Switch the indication laser output by the laser assembly to a processing laser. The processing laser, the liquid generated by the liquid supply assembly, and the gas generated by the gas supply assembly are coupled within the coupling member 100 to form a laser coupling energy beam, and the laser coupling energy beam is used to process the workpiece to be processed.

[0064] S800: Turn off the laser assembly, the gas supply assembly, and the water supply assembly in sequence, remove the processed workpiece, and turn off the monitoring member 20, the controller 30, and the driving member 40.

[0065] Since the technical improvements and technical effects of the laser processing device and the laser processing method are the same as those of the laser coupling component 1, the laser processing device and the laser processing method will not be described in detail herein.

[0066] Optionally, the material of the nozzle 110 in the present application is sapphire. Since sapphire has good wear resistance, it can withstand the erosion of high-pressure and high-flow water, which is beneficial to extending the service life of the nozzle 110. At the same time, the gas supply component supplies high-purity gas to blow away the slag deposited on the surface and inside the workpiece during the processing, which is beneficial to improving the processing efficiency.

[0067] Although the present invention is disclosed as above, the protection scope of the present invention is not limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will all fall within the protection scope of the present invention.

Claims

1. A laser coupling assembly (1) for coupling a laser, a liquid ejected from a nozzle (110), and a gas, characterized in that: include: The receiving member (10) comprises a first channel (11) and a lens (12) rotatably arranged in the first channel (11), wherein the first channel (11) is used for allowing the laser to pass through, an axis of the lens (12) in the first channel (11) and an extended line of the incident direction of the laser have an included angle, and the lens (12) is used for reflecting the laser in the first channel (11) and adjusting the position of a light spot formed by the laser on the nozzle (110); A nozzle (110), connected to the receiving member (10), and used for outputting a liquid jet; A monitoring component (20) connected to the receiving component (10) and used for monitoring the relative position between the light spot and the nozzle (110); A controller (30) configured to output an adjustment signal according to the relative position; A driving member (40) is connected to the controller (30) for communication so as to receive the adjustment signal. The driving member (40) is connected to the lens (12) for driving the lens (12) to rotate according to the adjustment signal.

2. The laser coupling assembly (1) according to claim 1, characterized in that: The lens (12) comprises a reflector (121) and a dichroic mirror (122), wherein the reflector (121) and the dichroic mirror (122) are arranged opposite to each other, the dichroic mirror (122) is used to reflect the laser after being reflected by the reflector to form the light spot, and the dichroic mirror (122) is also used to transmit auxiliary light, and different driving ends of the driving member (40) are respectively connected to the reflector (121) and the dichroic mirror (122) to drive the reflector (121) and / or the dichroic mirror (122) to rotate.

3. The laser coupling assembly (1) according to claim 2, characterized in that: The monitoring element (20) comprises: An identification unit (21) for monitoring the relative position of the light spot and the nozzle (110); The auxiliary light source generating unit (22) is used to generate the auxiliary light, at least part of the auxiliary light can be transmitted to the recognition unit (21), and another part of the auxiliary light can be coupled with the nozzle (110) and the laser through the dichroic mirror (122).

4. The laser coupling assembly (1) according to claim 3, characterized in that: The monitoring element (20) further comprises: a housing (50) connected to the receiving member (10); the housing (50) having a second channel (51) connected to the first channel (11); the second channel (51) being used for allowing the auxiliary light to pass through; and the auxiliary light source generating unit (22) being connected to the housing (50); A lens barrel (60) is connected to the housing (50), the lens barrel (60) being used to adjust the focal length, the identification unit (21) being arranged at an end of the lens barrel (60) away from the housing (50), and at least a portion of the auxiliary light can be transmitted to the identification unit (21) in sequence through the second channel (51) and the lens barrel (60).

5. The laser coupling assembly (1) according to any one of claims 1 to 4, characterized in that: The laser coupling assembly (1) further comprises: A laser collimator (70), the laser collimator (70) being provided with a laser input end (71) and a laser output end, the laser output end being connected to the receiving member (10), the laser input end (71) being used to be connected to an optical fiber to generate the laser, the laser collimator (70) being used to collimate the laser and transmit the collimated laser to the first channel (11) of the receiving member (10).

6. The laser coupling assembly (1) according to claim 5, characterized in that: The laser coupling assembly (1) further comprises: A variable iris (80) is provided between the laser collimating component (70) and the receiving component (10), and the variable iris (80) is used to filter edge stray light in the collimated laser.

7. The laser coupling assembly (1) according to any one of claims 2 to 4, characterized in that: The laser coupling assembly (1) further comprises: A focusing component (90) is connected to the receiving component (10), and the focusing component (90) is arranged in alignment with the dichroic mirror (122) to focus the laser light reflected by the dichroic mirror (122).

8. The laser coupling assembly (1) according to claim 7, characterized in that: The laser coupling assembly (1) further comprises: The coupling member (100) is arranged at one end of the focusing member (90) away from the receiving member (10), the nozzle (110) is located at one end of the coupling member (100) away from the focusing member (90), and the coupling member (100) has a coupling cavity (101), and the coupling cavity (101) is used to couple the focused laser, the liquid and the gas.

9. A laser processing device, characterized in that: include: The laser coupling assembly (1) according to any one of claims 1 to 8; A laser component, used for providing laser light to the laser coupling component (1); A liquid supply component, used for supplying liquid into the coupling cavity (101) of the laser coupling component (1); A gas supply component is used to provide auxiliary gas into the coupling cavity (101) of the laser coupling component (1).

10. A laser processing method, applicable to the laser processing device according to claim 9, characterized in that: include: Starting the liquid supply component and the gas supply component, the liquid generated by the liquid supply component and the gas generated by the gas supply component are coupled in the coupling member (100) and form a liquid jet through the nozzle (110); Starting the laser component to make the laser component output a pointing laser and input the pointing laser into the laser collimator (70); Adjusting the laser collimation head and the variable iris (80) to collimate the output of the indicator laser and filter the edge stray light of the indicator laser; Starting the monitoring component (20) and adjusting the focal length of the lens barrel (60) of the monitoring component (20); adjusting the focusing member (90) so that the light spot of the indicator laser is focused on the nozzle (110), and monitoring the relative position of the light spot and the center of the nozzle (110) through the recognition unit (21) of the monitoring member (20); Starting a controller (30) and a driving member (40), wherein the controller (30) outputs an adjustment signal according to the relative position, and the driving member (40) receives the adjustment signal and drives the lens (12) to rotate, so as to adjust the relative position between the light spot and the center of the nozzle (110); The indicating laser output by the laser component is switched to a processing laser, wherein the processing laser, the liquid generated by the liquid supply component and the gas generated by the gas supply component are coupled in the coupling component (100) to form a laser coupling energy beam, and the workpiece to be processed is processed using the laser coupling energy beam; The laser component, the air supply component and the water supply component are sequentially turned off, the processed workpiece is removed, and the monitoring component (20), the controller (30) and the driving component (40) are turned off.

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