Surface cleaning equipment for ceramic electrostatic chuck

Abstract

The invention discloses surface cleaning equipment for a ceramic electrostatic chuck. The surface cleaning equipment for the ceramic electrostatic chuck comprises a fixed base, a rotary driving unit, an auxiliary constant temperature unit and a cleaning agent conveying unit. In order to solve the problem that in the prior art, when common ceramic electrostatic chuck scrubbing equipment scrubs the surface of a special-shaped curved-surface chuck, scrubbing is not uniform, the deformable scrubbing tool is designed, the surfaces of the chucks of different structures can be scrubbed through the scrubbing tool, and the scrubbing efficiency is improved. The device can be fully attached and contacted with the surface of the suction cup for scrubbing, the uniform and sufficient scrubbing effect is achieved, the device is particularly suitable for the curved-surface electrostatic suction cup, and further, in order to solve the problem that the cleaning effect is poor due to long-time friction temperature rise or too low environment temperature, water circulation can be automatically conducted during scrubbing through an auxiliary constant-temperature unit, and the cleaning effect is improved. The constant-temperature effect during scrubbing is guaranteed, and the temperature during scrubbing is always kept within a fixed range.

Description

Technical Field

[0001] This application relates to the technical field of electrostatic ceramic chuck cleaning, especially a surface cleaning device for ceramic electrostatic chucks. Background Art

[0002] A ceramic electrostatic chuck is a device that uses the principle of electrostatic adsorption to fix objects. It is commonly used in fields such as semiconductor manufacturing and precision machining. By using electrostatic force to adsorb wafers or other thin sheet materials, it ensures stability during the processing. When cleaning the surface of a ceramic electrostatic chuck, corresponding cleaning equipment is required.

[0003] In the existing patent document "CN209077228U A Tool for Cleaning Electrostatic Chucks", a cleaning tool for electrostatic chucks is disclosed. Although the cleaning tool in the above technical problems can clean the surface of the electrostatic chuck, it adopts a rigid structure. When cleaning an irregular curved surface electrostatic chuck, it cannot flexibly adjust its shape according to the irregular curved surface (such as arc-shaped, concave-convex structure) of the chuck surface, resulting in insufficient contact area or uneven pressure distribution during the scrubbing process; the cleaning agent and friction force cannot evenly cover the chuck surface, and it is easy to leave stains or particulate matter, affecting the electrostatic adsorption performance; at the same time, local excessive friction may damage the ceramic surface and shorten the service life of the chuck; At the same time, during long-term friction heating or in a low-temperature environment, the temperature of the cleaning liquid fluctuates significantly. The temperature instability makes the cleaning effect uncontrollable, and it is necessary to frequently adjust the process parameters, increasing the operation complexity; extreme temperatures may also cause thermal stress deformation of the ceramic material or freezing of the cleaning liquid, further affecting the reliability of the equipment.

[0004] That is, the existing technology has the following technical problems: ordinary electrostatic chuck cleaning tools are difficult to adapt to clean irregular curved surface electrostatic chucks. Therefore, a surface cleaning device for ceramic electrostatic chucks is proposed to solve the above problems. Summary of the Invention

[0005] In this embodiment, a surface cleaning device for ceramic electrostatic chucks is provided to solve the problem in the existing technology that ordinary electrostatic chuck cleaning tools are difficult to adapt to clean irregular curved surface electrostatic chucks.

[0006] According to one aspect of the present application, a surface cleaning device for ceramic electrostatic chucks is provided. The surface cleaning device for ceramic electrostatic chucks includes: A fixed base, and a frame housing is fixedly connected to the upper surface of the fixed base; A rotary drive unit, the rotary drive unit is arranged at the frame housing, and one end of the rotary drive unit is fixedly connected to a scrubbing tool. The scrubbing tool is used to scrub the surface of the ceramic electrostatic chuck, and the scrubbing tool can adaptively bend according to the curved surface of the electrostatic chuck; An auxiliary constant temperature unit, which is fixedly arranged at the side wall position of the frame housing. The auxiliary constant temperature unit is connected to the scrubbing tool and is used for automatically circulating constant temperature water when the scrubbing tool rotates for scrubbing. A cleaning agent delivery unit, which is fixedly arranged at the side wall position of the frame housing. The cleaning agent delivery unit is used for automatically spraying the cleaning agent when the scrubbing tool rotates for scrubbing.

[0007] Furthermore, the rotation driving unit includes a servo motor, a rotating disk, fixed guide rods, moving sliders, a moving plate, a rack, a fixed bracket, a rotating rod and a rotating lever. The servo motor is fixedly arranged at the outer wall position of the frame housing. A moving slider is slidably connected in the inner cavity of the frame housing. Two fixed guide rods are fixedly connected to the upper wall of the inner cavity of the frame housing. The fixed guide rods penetrate through the moving slider and are slidably matched with the moving slider. A fixed rod is fixedly connected to the bottom surface of the moving slider. A rotating disk is rotatably connected in the inner cavity of the frame housing. The end of the output shaft of the servo motor extends to the center of the rotating disk and is fixedly connected to the rotating disk. One end of a connecting rod is rotatably connected to the side wall of the rotating disk, and the other end of the connecting rod extends to the bottom end of the fixed rod and is rotatably connected to the fixed rod.

[0008] Furthermore, the moving plate is arranged at the side wall of the frame housing and is slidably matched with the frame housing. The moving plate is fixedly connected to the moving slider. A rack is fixedly connected to the side wall of the moving plate. A fixed bracket is fixedly connected to the side wall of the frame housing. A rotating rod is rotatably connected to the fixed bracket. A bevel gear A is fixedly connected to the arc-shaped wall of the rotating rod. A rotating lever is rotatably connected to the side wall of the frame housing. A bevel gear B is fixedly connected to one end of the rotating lever. The bevel gear B meshes with the bevel gear A. A gear is fixedly connected to the arc-shaped wall of the rotating lever. The gear meshes with the rack.

[0009] Furthermore, the scrubbing tool includes a main scrubbing plate, a secondary scrubbing plate, a rectangular rod, a rectangular sleeve rod, spring A, a footrest, a rectangular side rod A, spring B and a bladder. A rectangular rod is fixedly connected to the upper surface of the main scrubbing plate. A rectangular sleeve rod is slidably connected to the rectangular rod. One end of spring A is fixedly connected to the upper wall of the inner cavity of the rectangular sleeve rod, and the other end of spring A is fixedly connected to the upper end of the rectangular rod. The upper end of the rectangular sleeve rod is fixedly connected to the bottom end of the rotating rod.

[0010] Further, a plurality of auxiliary scrubbing plates are provided. The plurality of auxiliary scrubbing plates are hinged to each other. The plurality of auxiliary scrubbing plates are symmetrically arranged on both sides of the main scrubbing plate and are hinged to the main scrubbing plate. A plurality of rectangular side rods A are provided. A rectangular side rod B is slidably connected in the inner cavity of each of the plurality of rectangular side rods A. One end of a spring B is fixedly connected to the upper end of the rectangular side rod B, and the other end of the spring B is fixedly connected to the inner wall of the rectangular side rod A. Tripods are rotatably connected to the upper end of the rectangular side rod A and the lower end of the rectangular side rod B respectively. The tripods are fixedly connected to the auxiliary scrubbing plate and the rectangular sleeve rod respectively. A bladder is fixedly connected to the bottom surfaces of the main scrubbing plate and the auxiliary scrubbing plate. A non-woven fabric layer is fixedly connected to the bottom surface of the bladder.

[0011] Further, the electrostatic chuck support unit includes a fixed track, a sliding seat, a support table and an electric push rod. The fixed track is fixedly arranged at the side wall position of the frame housing. A sliding seat is slidably connected to the fixed track. A support table is fixedly connected to the side wall of the sliding seat. One end of the electric push rod is fixedly connected to the bottom surface of the support table, and the other end of the electric push rod is fixedly connected to the upper surface of the fixed base. A clamping member for fixing the ceramic electrostatic chuck is arranged on the upper surface of the support table.

[0012] Further, the auxiliary constant temperature unit includes a fixed chamber, a constant temperature heating rod, a fixed cylinder and a moving piston. The fixed chamber is fixedly arranged at the side wall position of the frame housing. The inner cavity of the fixed chamber is filled with circulating water, and a constant temperature heating rod is fixedly connected in the inner cavity of the fixed chamber.

[0013] Further, a fixed cylinder is fixedly connected to the upper surface of the fixed chamber. A moving piston is slidably connected in the inner cavity of the fixed cylinder. One end of a guide rod is fixedly connected to the upper surface of the moving piston, and the other end of the guide rod penetrates through the upper wall of the inner cavity of the fixed cylinder and extends outside the wall. A connecting plate is fixedly connected to the upper end of the guide rod. The connecting plate is arranged at the side wall of the frame housing and is slidably matched with the frame housing. The connecting plate is fixedly connected to the side wall of the moving slider. One end of an input pipe is fixedly connected to the bottom side of the inner cavity of the fixed cylinder, and the other end of the input pipe extends to the bottom side of the inner cavity of the fixed chamber and is fixedly connected to the fixed chamber. An input one-way valve is installed on the input pipe. One end of an output hose is fixedly connected to the bottom wall of the inner cavity of the fixed cylinder, and the other end of the output hose extends into the inner cavity of the bladder and is fixedly connected to the bladder. An output one-way valve is installed on the output hose. One end of a return hose is fixedly connected to the inner cavity of the bladder, and the other end of the return hose extends into the inner cavity of the fixed chamber and is fixedly connected to the fixed chamber.

[0014] Furthermore, the cleaning agent delivery unit comprises a fixed plate frame, a nozzle, a connecting tube and a cleaning agent storage bin, the fixed plate frame is fixedly arranged at a side position of the support platform, and the nozzle is fixedly connected to the fixed plate frame.

[0015] Furthermore, the connecting cylinder is fixedly arranged on the upper surface of the fixed bin, and a connecting piston is slidably connected in the inner cavity of the connecting cylinder, and one end of a connecting guide rod is fixedly connected to the upper surface of the connecting piston, and the other end of the connecting guide rod penetrates the upper wall of the inner cavity of the connecting cylinder and extends outside the wall, and the top of the connecting guide rod is fixedly connected to the bottom surface of the connecting plate, and one end of a discharge hose is fixedly connected in the inner cavity of the connecting cylinder, and the other end of the discharge hose is connected to the nozzle, and a one-way valve is installed on the discharge hose, and one end of a suction hose is fixedly connected to the bottom side of the inner cavity of the connecting cylinder, and the other end of the suction hose is connected to the detergent storage bin, and a one-way valve is installed on the suction hose, and the inner cavity of the detergent storage bin is filled with detergent.

[0016] Through the above-mentioned technical scheme of the present application, in order to solve the problem of uneven scrubbing of ordinary ceramic electrostatic suction cup scrubbing equipment in the prior art when scrubbing the surface of special-shaped curved suction cups, the present application designs a deformable scrubbing tool, which can be used to scrub the surfaces of suction cups with different structures, and can fully contact with the surface of the suction cup for scrubbing, thereby achieving a uniform and sufficient scrubbing effect, which is particularly suitable for curved electrostatic suction cups. Furthermore, in order to solve the problem of poor cleaning effect caused by long-term friction heating or low ambient temperature, an auxiliary constant temperature unit is designed. Through the auxiliary constant temperature unit, water can be automatically circulated during scrubbing, thereby ensuring the constant temperature effect during scrubbing, so that the temperature during scrubbing is always maintained within a fixed range, avoiding the problem of poor scrubbing effect caused by too high or too low temperature. At the same time, the constant temperature water circulation does not require an additional power source, and can automatically circulate during the scrubbing operation, which is easy to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0018] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present application; Figure 2 This is a schematic diagram of the overall side structure of an embodiment of the present application; Figure 3 This is a schematic diagram of the internal structure of a rotation drive unit according to an embodiment of the present application; Figure 4 This is a schematic diagram of the connection structure of a rotating rod according to an embodiment of the present application; Figure 5 This is a schematic diagram of the overall structure of a scrubbing tool according to an embodiment of the present application; Figure 6 A schematic diagram of the internal structure of a scrubbing tool according to an embodiment of the present application; Figure 7 This is a connection diagram of an auxiliary constant temperature unit according to an embodiment of the present application; Figure 8 This is a schematic diagram of the interior of an auxiliary constant temperature unit according to an embodiment of the present application; Figure 9 This is a schematic diagram of the internal structure of a cleaning agent delivery unit according to an embodiment of the present application; Figure 10 This is a schematic structural diagram of a detergent storage bin according to an embodiment of the present application; Figure 11 This is a schematic diagram of the connection structure of a nozzle according to an embodiment of the present application.

[0019] Description of Reference Numerals In the figure: 1, fixed base; 2, frame shell; 3, rotation drive unit; 301, servo motor; 302, rotating disk; 303, fixed guide rod; 304, moving slider; 305, fixed rod; 306, rod; 307, moving plate; 308, rack; 309, fixed bracket; 310, rotating rod; 311, bevel gear A; 312, rotating rod; 313, gear; 314, bevel gear B; 4, scrubbing tool; 401, main scrubbing plate; 402, auxiliary scrubbing plate; 403, rectangular rod; 404, rectangular sleeve rod; 405, spring A; 406, tripod; 407, rectangular side rod A; 408, rectangular side rod B; 409, spring B; 410, capsule ; 411, non-woven fabric layer; 5, electrostatic suction cup support unit; 501, fixed track; 502, sliding seat; 503, support table; 504, electric push rod; 6, auxiliary constant temperature unit; 601, fixed bin; 602, constant temperature heating rod; 603, fixed cylinder; 604, movable piston; 605, guide rod; 606, connecting plate; 607, output hose; 608, input pipe; 609, return hose; 7, cleaning agent delivery unit; 701, fixed plate rack; 702, nozzle; 703, connecting cylinder; 704, connecting piston; 705, connecting guide rod; 706, discharge hose; 707, suction hose; 708, cleaning agent storage bin. DETAILED DESCRIPTION

[0020] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0021] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present application described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0022] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0023] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0024] In addition, the terms "installed", "set", "provided with", "connected", "connected", and "socketed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0025] See also Figure 1-2As shown, a surface cleaning device for a ceramic electrostatic chuck comprises: A fixed base 1, wherein a frame shell 2 is fixedly connected to the upper surface of the fixed base 1; A rotation driving unit 3, wherein the rotation driving unit 3 is arranged at the frame shell 2, and a scrubbing tool 4 is fixedly connected to one end of the rotation driving unit 3, wherein the scrubbing tool 4 is used to scrub the surface of the ceramic electrostatic chuck, and the scrubbing tool 4 can be adaptively bent according to the curved surface of the electrostatic chuck; An auxiliary thermostatic unit 6, the auxiliary thermostatic unit 6 is fixedly arranged at the side wall of the frame shell 2, the auxiliary thermostatic unit 6 is connected to the scrubbing tool 4, and the auxiliary thermostatic unit 6 is used to automatically circulate constant temperature water when the scrubbing tool 4 rotates and scrubs; A cleaning agent delivery unit 7, wherein the cleaning agent delivery unit 7 is fixedly arranged at a side wall position of the frame shell 2, and the cleaning agent delivery unit 7 is used for automatically spraying the cleaning agent when the scrubbing tool 4 rotates and scrubs; Through the above technical scheme, the scrubbing tool 4 is used to scrub the surfaces of suction cups with different structures, and the scrubbing is performed by fully contacting the surfaces of the suction cups, thereby achieving a uniform and sufficient scrubbing effect, which is particularly suitable for curved electrostatic suction cups. Furthermore, in order to solve the problem of poor cleaning effect caused by long-term friction heating or low ambient temperature, an auxiliary constant temperature unit 6 is designed. The auxiliary constant temperature unit 6 can automatically circulate water during scrubbing to ensure the constant temperature effect during scrubbing, so that the temperature during scrubbing is always maintained within a fixed range, avoiding the problem of poor scrubbing effect caused by excessively high or low temperatures. At the same time, the constant temperature water circulation does not require an additional power source, and can automatically circulate during the scrubbing operation, which is easy to use.

[0026] For further technical solutions, see Figure 3 and Figure 4As shown, the rotation drive unit 3 includes a servo motor 301, a rotating disk 302, a fixed guide rod 303, a moving slider 304, a moving plate 307, a rack 308, a fixed bracket 309, a rotating rod 310 and a rotating rod 312. The servo motor 301 is fixedly arranged at the outer wall of the frame shell 2, and the moving slider 304 is slidably connected in the inner cavity of the frame shell 2. Two fixed guide rods 303 are fixedly connected to the upper wall of the inner cavity of the frame shell 2. The fixed guide rods 303 penetrate the moving slider 304 and slide with the moving slider 304. The bottom surface of the moving slider 304 is fixedly connected with a fixed rod 305 A rotating disk 302 is rotatably connected in the inner cavity of the frame shell 2, the output shaft end of the servo motor 301 extends to the center of the rotating disk 302 and is fixedly connected to the rotating disk 302, the side wall of the rotating disk 302 is rotatably connected to one end of the connecting rod 306, the other end of the connecting rod 306 extends to the bottom end of the fixed rod 305 and is rotatably connected to the fixed rod 305, and the technical solution can drive the rotating disk 302 to rotate through the operation of the servo motor 301, so that the rotation of the rotating disk 302 can drive one end of the connecting rod 306 to move in a ring shape, thereby driving the moving slider 304 to reciprocate up and down; The movable plate 307 is arranged at the side wall of the frame shell 2 and is slidably matched with the frame shell 2. The movable plate 307 is fixedly connected to the movable slider 304. A rack 308 is fixedly connected to the side wall of the movable plate 307. A fixed bracket 309 is fixedly connected to the side wall of the frame shell 2. A rotating rod 310 is rotatably connected to the fixed bracket 309. A bevel gear A311 is fixedly connected to the arc wall of the rotating rod 310. A rotating rod 312 is rotatably connected to the side wall of the frame shell 2. A bevel gear B314 is fixedly connected to one end of the rotating rod 312. The bevel gear B314 and the bevel gear A311 are meshed with each other, and a gear 313 is fixedly connected to the arc-shaped wall of the rotating rod 312, and the gear 313 and the rack 308 are meshed with each other. The reciprocating motion of the moving slider 304 can drive the moving plate 307 to reciprocate, and the reciprocating motion of the moving plate 307 can drive the rack 308 to reciprocate, thereby driving the gear 313 to reciprocate, and then driving the rotating rod 312 to rotate, driving the bevel gear B314 to rotate, driving the bevel gear A311 to rotate, and making the rotating rod 310 reciprocate.

[0027] For specific technical solutions, please refer to Figure 5 and Figure 6As shown, the scrubbing tool 4 includes a main scrubbing plate 401, an auxiliary scrubbing plate 402, a rectangular rod 403, a rectangular sleeve rod 404, a spring A405, a tripod 406, a rectangular side rod A407, a spring B409 and a capsule 410. The upper surface of the main scrubbing plate 401 is fixedly connected with the rectangular rod 403, the rectangular sleeve rod 404 is slidably connected to the rectangular rod 403, the inner cavity upper wall of the rectangular sleeve rod 404 is fixedly connected to one end of the spring A405, the other end of the spring A405 is fixedly connected to the upper end of the rectangular rod 403, the upper end of the rectangular sleeve rod 404 is fixedly connected to the bottom end of the rotating rod 310, and the technical solution can drive the scrubbing tool 4 to rotate through the rotation of the rotating rod 310, so that the surface of the electrostatic suction cup can be scrubbed and cleaned through the reciprocating rotation of the scrubbing tool 4; The auxiliary wiping plates 402 are provided with a plurality of them, and the plurality of the auxiliary wiping plates 402 are hingedly connected to each other, and the plurality of the auxiliary wiping plates 402 are symmetrically arranged at both sides of the main wiping plate 401 and are hingedly connected to the main wiping plate 401, and the rectangular side rods A407 are provided with a plurality of them, and the inner cavities of the plurality of the rectangular side rods A407 are slidably connected with rectangular side rods B408, and the upper ends of the rectangular side rods B408 are fixedly connected to one end of the spring B409, and the other ends of the springs B409 are fixedly connected to the inner wall of the rectangular side rod A407, and the upper ends of the rectangular side rods A407 and the lower ends of the rectangular side rods B408 are rotatably connected with the tripods 406, and the tripods 406 are respectively fixedly connected to the auxiliary wiping plates 402 and the rectangular sleeve rods 404, and the bottom surfaces of the main wiping plates 401 and the auxiliary wiping plates 402 are fixedly connected with the capsules 410, and the A non-woven fabric layer 411 is fixedly connected to the bottom surface of the capsule 410, and a certain angle can be adjusted by setting the auxiliary wiping plate 402. When the main wiping plate 401 and the auxiliary wiping plate 402 are in contact with the surface of the electrostatic suction cup, when the surface of the electrostatic suction cup is a normal plane, the main wiping plate 401 and the auxiliary wiping plate 402 are kept horizontal for scrubbing. When the surface of the electrostatic suction cup is an arc-shaped surface, the auxiliary wiping plate 402 can be bent at a certain angle by setting the spring B409 to adapt to the surface of the electrostatic suction cup, so as to more fully fit the surface of the electrostatic suction cup, so that the scrubbing is more fully and evenly. At the same time, a capsule 410 is set. Due to the flexible characteristics of the capsule 410, when it fits the surface of the electrostatic suction cup, it can further achieve a deformation effect and fit more closely, thereby further improving the scrubbing effect. It is particularly suitable for use on electrostatic suction cups with curved surfaces.

[0028] The electrostatic chuck support unit 5 includes a fixed track 501, a sliding seat 502, a support table 503, and an electric push rod 504. The fixed track 501 is fixedly arranged at the side wall position of the frame housing 2. A sliding seat 502 is slidably connected to the fixed track 501. A support table 503 is fixedly connected to the side wall of the sliding seat 502. One end of the electric push rod 504 is fixedly connected to the bottom surface of the support table 503, and the other end of the electric push rod 504 is fixedly connected to the upper surface of the fixed base 1. A clamping component for fixing the ceramic electrostatic chuck is arranged on the upper surface of the support table 503. The ceramic electrostatic chuck can be fixed by the clamping component. After being fixed, the support table 503 can be driven to move by the extension of the electric push rod 504, thereby driving the electrostatic chuck to move, so that the surface of the electrostatic chuck moves to the scrubbing tool 4. After contacting the scrubbing tool 4, the scrubbing tool 4 rotates reciprocally for scrubbing and cleaning.

[0029] As a preferred technical solution, please refer to Figure 7 and Figure 8 As shown, the auxiliary constant temperature unit 6 includes a fixed chamber 601, a constant temperature heating rod 602, a fixed cylinder 603, and a moving piston 604. The fixed chamber 601 is fixedly arranged at the side wall position of the frame housing 2. The inner cavity of the fixed chamber 601 is filled with circulating water. A constant temperature heating rod 602 is fixedly connected to the inner cavity of the fixed chamber 601. In this technical solution, the circulating water in the inner cavity of the fixed chamber 601 can be heated and kept at a constant temperature by the operation of the constant temperature heating rod 602; A fixing cylinder 603 is fixedly connected to the upper surface of the fixed bin 601. A moving piston 604 is slidably connected in the inner cavity of the fixing cylinder 603. One end of a guide rod 605 is fixedly connected to the upper surface of the moving piston 604. The other end of the guide rod 605 penetrates through the upper wall of the inner cavity of the fixing cylinder 603 and extends outside the wall. A connecting plate 606 is fixedly connected to the upper end of the guide rod 605. The connecting plate 606 is arranged on the side wall of the frame housing 2 and is slidably matched with the frame housing 2. The connecting plate 606 is fixedly connected to the side wall of the moving slider 304. One end of an input pipe 608 is fixedly connected to the bottom side of the inner cavity of the fixing cylinder 603. The other end of the input pipe 608 extends to the bottom side of the inner cavity of the fixed bin 601 and is fixedly connected to the fixed bin 601. An input one-way valve is installed on the input pipe 608. One end of an output hose 607 is fixedly connected to the bottom wall of the inner cavity of the fixing cylinder 603. The other end of the output hose 607 extends into the inner cavity of the bladder 410 and is fixedly connected to the bladder 410. An output one-way valve is installed on the output hose 607. One end of a return hose 609 is fixedly connected to the inner cavity of the bladder 410. The other end of the return hose 609 extends into the inner cavity of the fixed bin 601 and is fixedly connected to the fixed bin 601. Through this technical solution, when the scrubbing tool 4 rotates for scrubbing, the reciprocating motion of the moving slider 304 drives the connecting plate 606 to perform reciprocating motion, thereby driving the guide rod 605 to reciprocate, driving the moving piston 604 to perform reciprocating motion in the inner cavity of the fixing cylinder 603, and then continuously conveying the circulating water in the inner cavity of the fixed bin 601 to the inner cavity of the bladder 410, and then flowing back to the inner cavity of the fixed bin 601 through the return hose 609, realizing the function of constant temperature water circulation. Through constant temperature water circulation, during the scrubbing operation of the scrubbing tool 4, due to the constant temperature water in the inner cavity of the bladder 410, the temperature during scrubbing is guaranteed. That is, it can play a heating role at low temperature to improve the cleaning effect, and can also play a role of absorbing heat and cooling through the circulating constant temperature water when the temperature rises due to friction, avoiding the excessive evaporation of the cleaning agent and affecting the cleaning effect. At the same time, as described above, during scrubbing, constant temperature water circulation can be automatically performed without an additional power source, which is convenient to use.

[0030] As a further technical solution, please refer to Figure 9 、 Figure 10 and Figure 11 As shown in the figure, the cleaning agent delivery unit 7 includes a fixing plate frame 701, a nozzle 702, a connecting cylinder 703, and a cleaning agent storage bin 708. The fixing plate frame 701 is fixedly arranged at the side position of the support platform 503. The nozzle 702 is fixedly connected to the fixing plate frame 701; The connecting cylinder 703 is fixedly arranged on the upper surface of the fixed bin 601. A connecting piston 704 is slidably connected in the inner cavity of the connecting cylinder 703. One end of a connecting guide rod 705 is fixedly connected to the upper surface of the connecting piston 704. The other end of the connecting guide rod 705 penetrates through the upper wall of the inner cavity of the connecting cylinder 703 and extends outside the wall. The top end of the connecting guide rod 705 is fixedly connected to the bottom surface of the connecting plate 606. One end of a discharge hose 706 is fixedly connected in the inner cavity of the connecting cylinder 703. The other end of the discharge hose 706 is connected to the nozzle 702. A one-way valve is installed on the discharge hose 706. One end of a suction hose 707 is fixedly connected to the bottom side of the inner cavity of the connecting cylinder 703. The other end of the suction hose 707 is connected to the cleaning agent storage bin 708. A one-way valve is installed on the suction hose 707. The inner cavity of the cleaning agent storage bin 708 is filled with a cleaning agent. In this technical solution, the reciprocating movement of the connecting plate 606 drives the connecting guide rod 705 to perform reciprocating movement, thereby driving the connecting piston 704 to reciprocate in the inner cavity of the connecting cylinder 703, further sucking the cleaning agent in the inner cavity of the cleaning agent storage bin 708 and delivering it to the nozzle 702, and spraying it on the surface of the ceramic electrostatic chuck through the nozzle 702, so as to cooperate with the rotation of the scrubbing tool 4 and then scrub and clean. After the cleaning agent scrubbing is completed, the surface of the electrostatic chuck should be rinsed with pure water to clean the residual cleaning agent, and then the electrostatic chuck should be dried with a drying device after the rinsing is completed.

[0031] The circuits, electronic components and modules involved are all prior arts and can be fully realized by those skilled in the art without further elaboration. The content protected by this application does not involve improvements to software and methods either.

[0032] The above are only the preferred embodiments of this application and are not used to limit this application. For those skilled in the art, this application can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included in the protection scope of this application.

Claims

1. Surface cleaning equipment for ceramic electrostatic chucks, characterized by: The surface cleaning device for ceramic electrostatic chuck comprises: A fixed base (1), wherein the upper surface of the fixed base (1) is fixedly connected to a frame shell (2); Electrostatic chuck support unit (5); A rotational drive unit (3), the rotational drive unit (3) being arranged on the frame shell (2), a scrubbing tool (4) being fixedly connected to one end of the rotational drive unit (3), the scrubbing tool (4) being used to scrub the surface of the ceramic electrostatic chuck, the scrubbing tool (4) being capable of adaptively bending according to the curved surface of the electrostatic chuck; an auxiliary constant temperature unit (6), the auxiliary constant temperature unit (6) being fixedly arranged at a side wall position of the frame shell (2), the auxiliary constant temperature unit (6) being connected to the scrubbing tool (4), and the auxiliary constant temperature unit (6) being used to automatically circulate constant temperature water when the scrubbing tool (4) is rotating and scrubbing; A cleaning agent delivery unit (7) is fixedly arranged at a side wall position of the frame shell (2), and the cleaning agent delivery unit (7) is used to automatically spray the cleaning agent when the scrubbing tool (4) rotates and scrubs.

2. The surface cleaning device for a ceramic electrostatic chuck according to claim 1, characterized in that: The rotation drive unit (3) comprises a servo motor (301), a rotating disk (302), a fixed guide rod (303), a movable slider (304), a movable plate (307), a rack (308), a fixed bracket (309), a rotating rod (310) and a rotating rod (312); the servo motor (301) is fixedly arranged at an outer wall position of the frame shell (2); the movable slider (304) is slidably connected in the inner cavity of the frame shell (2); two fixed guide rods (303) are fixedly connected to the upper wall of the inner cavity of the frame shell (2); the fixed guide rods (303) penetrate the movable slider (304) and is slidably matched with the movable slider (304); a fixed rod (305) is fixedly connected to the bottom surface of the movable slider (304); a rotating disk (302) is rotatably connected in the inner cavity of the frame shell (2); the output shaft end of the servo motor (301) extends to the center of the rotating disk (302) and is fixedly connected to the rotating disk (302); the side wall of the rotating disk (302) is rotatably connected to one end of a connecting rod (306); the other end of the connecting rod (306) extends to the bottom end of the fixed rod (305) and is rotatably connected to the fixed rod (305).

3. The surface cleaning device for a ceramic electrostatic chuck according to claim 2, characterized in that: The movable plate (307) is arranged on the side wall of the frame shell (2) and is slidably matched with the frame shell (2); the movable plate (307) is fixedly connected to the movable slider (304); a rack (308) is fixedly connected to the side wall of the movable plate (307); a fixed bracket (309) is fixedly connected to the side wall of the frame shell (2); a rotating rod (310) is rotatably connected to the fixed bracket (309); and the arc of the rotating rod (310) is A bevel gear A (311) is fixedly connected to the arc-shaped wall, a rotating rod (312) is rotatably connected to the side wall of the frame shell (2), a bevel gear B (314) is fixedly connected to one end of the rotating rod (312), the bevel gear B (314) and the bevel gear A (311) are meshed with each other, and a gear (313) is fixedly connected to the arc-shaped wall of the rotating rod (312), and the gear (313) and the rack (308) are meshed with each other.

4. The surface cleaning device for a ceramic electrostatic chuck according to claim 1, characterized in that: The scrubbing tool (4) comprises a main scrubbing plate (401), an auxiliary scrubbing plate (402), a rectangular rod (403), a rectangular sleeve rod (404), a spring A (405), a foot stand (406), a rectangular side rod A (407), a spring B (409) and a capsule (410); the upper surface of the main scrubbing plate (401) is fixedly connected to the rectangular rod (403); the rectangular sleeve rod (404) is slidably connected to the rectangular rod (403); the upper wall of the inner cavity of the rectangular sleeve rod (404) is fixedly connected to one end of the spring A (405); the other end of the spring A (405) is fixedly connected to the upper end of the rectangular rod (403); and the upper end of the rectangular sleeve rod (404) is fixedly connected to the bottom end of the rotating rod (310).

5. The surface cleaning device for a ceramic electrostatic chuck according to claim 4, characterized in that: A plurality of auxiliary wiping plates (402) are provided, and the auxiliary wiping plates (402) are hingedly connected to each other. The auxiliary wiping plates (402) are symmetrically arranged on both sides of the main wiping plate (401) and are hingedly connected to the main wiping plate (401). A plurality of rectangular side rods A (407) are provided, and a rectangular side rod B (408) is slidably connected in the inner cavity of the plurality of rectangular side rods A (407). The upper end of the rectangular side rod B (408) is fixedly connected to one end of a spring B (409). The other end of the spring B (409) is fixedly connected to the inner wall of the rectangular side rod A (407); the upper end of the rectangular side rod A (407) and the lower end of the rectangular side rod B (408) are both rotatably connected to a foot frame (406); the foot frame (406) is respectively fixedly connected to the auxiliary wiping plate (402) and the rectangular sleeve rod (404); the bottom surfaces of the main wiping plate (401) and the auxiliary wiping plate (402) are fixedly connected to a capsule (410); the bottom surface of the capsule (410) is fixedly connected to a non-woven fabric layer (411).

6. The surface cleaning device for a ceramic electrostatic chuck according to claim 1, characterized in that: The electrostatic suction cup support unit (5) comprises a fixed rail (501), a sliding seat (502), a support platform (503) and an electric push rod (504); the fixed rail (501) is fixedly arranged at a side wall position of the frame shell (2); the sliding seat (502) is slidably connected to the fixed rail (501); the side wall of the sliding seat (502) is fixedly connected to the support platform (503); the bottom surface of the support platform (503) is fixedly connected to one end of the electric push rod (504); and the other end of the electric push rod (504) is fixedly connected to the upper surface of the fixed base (1).

7. The surface cleaning device for a ceramic electrostatic chuck according to claim 1, characterized in that: The auxiliary constant temperature unit (6) comprises a fixed bin (601), a constant temperature heating rod (602), a fixed cylinder (603) and a movable piston (604); the fixed bin (601) is fixedly arranged at a side wall position of the frame shell (2); the inner cavity of the fixed bin (601) is filled with circulating water; and the constant temperature heating rod (602) is fixedly connected to the inner cavity of the fixed bin (601).

8. The surface cleaning device for a ceramic electrostatic chuck according to claim 7, characterized in that: A fixed cylinder (603) is fixedly connected to the upper surface of the fixed bin (601), a movable piston (604) is slidably connected in the inner cavity of the fixed cylinder (603), the upper surface of the movable piston (604) is fixedly connected to one end of a guide rod (605), the other end of the guide rod (605) penetrates the upper wall of the inner cavity of the fixed cylinder (603) and extends outside the wall, a connecting plate (606) is fixedly connected to the upper end of the guide rod (605), the connecting plate (606) is arranged on the side wall of the frame shell (2) and slidably cooperates with the frame shell (2), the connecting plate (606) is fixedly connected to the side wall of the movable slider (304), and the bottom side of the inner cavity of the fixed cylinder (603) is fixedly connected to the input pipe (608). The input tube (608) is connected to one end of the fixed cylinder (603), the other end of the input tube (608) extends to the bottom side of the inner cavity of the fixed chamber (601) and is fixedly connected to the fixed chamber (601), an input check valve is installed on the input tube (608), one end of an output hose (607) is fixedly connected to the bottom wall of the inner cavity of the fixed cylinder (603), the other end of the output hose (607) extends into the inner cavity of the capsule (410) and is fixedly connected to the capsule (410), an output check valve is installed on the output hose (607), one end of a return hose (609) is fixedly connected to the inner cavity of the capsule (410), the other end of the return hose (609) extends into the inner cavity of the fixed chamber (601) and is fixedly connected to the fixed chamber (601).

9. The surface cleaning device for a ceramic electrostatic chuck according to claim 1, characterized in that: The cleaning agent delivery unit (7) comprises a fixed plate frame (701), a nozzle (702), a connecting tube (703) and a cleaning agent storage bin (708); the fixed plate frame (701) is fixedly arranged at a side position of the support platform (503); and the nozzle (702) is fixedly connected to the fixed plate frame (701).

10. The surface cleaning device for a ceramic electrostatic chuck according to claim 9, characterized in that: The connecting cylinder (703) is fixedly arranged on the upper surface of the fixed chamber (601); a connecting piston (704) is slidably connected in the inner cavity of the connecting cylinder (703); one end of a connecting guide rod (705) is fixedly connected to the upper surface of the connecting piston (704); the other end of the connecting guide rod (705) passes through the upper wall of the inner cavity of the connecting cylinder (703) and extends outside the wall; the top end of the connecting guide rod (705) is fixedly connected to the bottom surface of the connecting plate (606); the inner cavity of the connecting cylinder (703 ... One end of a discharge hose (706) is fixedly connected to the cavity, the other end of the discharge hose (706) is connected to the nozzle (702), a one-way valve is installed on the discharge hose (706), one end of a suction hose (707) is fixedly connected to the bottom side of the inner cavity of the connecting tube (703), the other end of the suction hose (707) is connected to the detergent storage bin (708), a one-way valve is installed on the suction hose (707), and the inner cavity of the detergent storage bin (708) is filled with detergent.

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