Joint simulation method for optical-thermal-mechanical coupling performance of phase-change material cantilever beam structure

Abstract

A phase change material cantilever beam structure light-heat-mechanical coupling performance joint simulation method comprises the following steps: integrating a wave optics module, a solid heat transfer module and a solid mechanics module in multi-physics field simulation software (such as COMSOL), and constructing a three-dimensional model containing a photon metamaterial layer and a phase change material cantilever beam; a light-heat-mechanical basic coupling framework is formed through a temperature correlation interpolation function; setting conditions such as photon metamaterial boundary excitation and cantilever beam anchor region constraint; optical-thermal-mechanical closed-loop iterative coupling is realized by using an electromagnetic thermal interface and a thermal expansion interface; a free tetrahedral mesh is adopted, and a tip contact area of the cantilever beam is refined; influences of incident light wavelength and the like on light absorption and a temperature field are analyzed through parameter scanning, and structural parameters are optimized. According to the method, the problem that traditional cantilever beam simulation lacks multi-physics field coupling is solved, full-chain dynamic simulation is achieved, device design efficiency and precision are improved, parameter matching is optimized, technical support is provided for device design, cost is reduced, and related MEMS sensor development is assisted.

Description

Technical Field

[0001] The present invention relates to the structural design of photonic metamaterials, microelectromechanical system cantilever beam devices, and multi-physical field coupling simulation technology, and specifically to a multi-field joint simulation method combining optics, thermodynamics, and mechanical mechanics. Background Art

[0002] In recent years, with the in-depth exploration of various harsh environments in the scientific research field, sensors that can work for a long time under extreme conditions have developed rapidly. The cantilever beam structure in microelectromechanical systems is the core sensitive structure of low-power sensors. Adding phase change materials and photonic metamaterial structures to the cantilever beam can achieve low-power / zero-power sensing of external physical signals such as light and heat, and is suitable for long-term use under various extreme conditions.

[0003] Traditional cantilever beam simulations mostly focus on a single physical field. For cantilever beam structures integrated with phase change materials and photonic metamaterials, there is a lack of a systematic modeling method for the combined action of optics, thermodynamics, and mechanical mechanics.

[0004] It should be noted that the information disclosed in the above background art section is only used to understand the background of the present application, and therefore may include information that does not constitute the prior art known to those of ordinary skill in the art. Summary of the Invention

[0005] The main purpose of the present invention is to overcome the defects existing in the above background art, and provide a joint simulation method for the optical-thermal-mechanical coupling performance of a phase change material cantilever beam structure.

[0006] To achieve the above purpose, the present invention adopts the following technical solutions:

[0007] A joint simulation method for the optical-thermal-mechanical coupling performance of a phase change material cantilever beam structure, comprising the following steps:

[0008] Integrate a wave optics module, a solid heat transfer module, and a solid mechanics module in a multi-physical field simulation software (such as COMSOL), establish a three-dimensional geometric model including a photonic metamaterial layer and a phase change material cantilever beam, define a temperature-related interpolation function of the phase change material to describe the non-linear change of the material's thermophysical parameters with temperature, and realize the basic coupling framework of the optical-thermal-mechanical fields;

[0009] Apply periodic boundary conditions and incident electromagnetic wave excitation to the photonic metamaterial pattern, set fixed constraints and temperature references for the cantilever beam anchor area, and set convective heat dissipation conditions for the outer surface; set the initial temperature field at room temperature, and define the contact pair characteristics at the tip and bottom of the cantilever beam;

[0010] The non-uniform light absorption rate calculated by the wave optics module is mapped as a heat source load through the electromagnetic heat interface. After the temperature field is solved by the solid heat transfer module, the heat load is transferred to the solid mechanics module through the thermal expansion interface, forming a closed-loop iterative coupling of light-thermal-mechanical.

[0011] Free tetrahedral meshes are adopted, and local mesh refinement is implemented in the contact area at the tip of the cantilever beam to ensure the calculation accuracy in the stress concentration area.

[0012] Through parametric sweep analysis, the influence laws of the incident light wavelength, the structural parameters of the photonic metamaterial, and the geometric dimensions of the cantilever beam on the light absorption rate, the temperature field distribution, the tip displacement, and the contact pressure are analyzed. Based on the simulation results, the structural parameters are optimized.

[0013] Furthermore, the simulation of the light field distribution and absorption characteristics is realized through the electromagnetic wave frequency domain model of the wave optics module of the multi-physics simulation software and the finite element method, generating a non-uniform heat source distribution.

[0014] Furthermore, a thermal-mechanical coupling model is constructed based on the solid heat transfer module and the solid mechanics module of the multi-physics simulation software. By mapping the light absorption energy as a heat source and combining the heat conduction equation and the structural mechanics equation, the temperature field and deformation are solved.

[0015] Furthermore, the dynamic simulation of multiple physical fields is realized through the built-in research steps of the multi-physics simulation software, including the iterative coupling calculation of the light field, the thermal field, and the mechanical field, where the light field and the thermal field are coupled through the electromagnetic heat interface, and the thermal field and the mechanical field are coupled through the thermal expansion interface.

[0016] Furthermore, periodic boundary conditions are set for the photonic metamaterial pattern, convective heat boundary conditions are set for the outer surface of the cantilever beam structure, fixed temperature boundary conditions are set at the bottom of the anchor area, and fixed mechanical boundary conditions are set for part of the anchor area.

[0017] Furthermore, the phase change characteristics of the phase change material are represented by an interpolation function related to temperature, which is used to describe the variation of the thermophysical parameters of the material with temperature.

[0018] Furthermore, free tetrahedral meshes are used for the mesh division, and local mesh refinement is implemented in the contact area at the tip of the cantilever beam, with the maximum side length not exceeding 1e-7 m.

[0019] Furthermore, the parametric sweep includes multi-dimensional variable analysis of the incident light wavelength, the structural parameters of the photonic metamaterial, and the geometric dimensions of the cantilever beam; the analysis of the simulation results includes multi-objective evaluation of the light absorption rate, the temperature field distribution, the tip displacement of the cantilever beam, and the contact pressure.

[0020] Furthermore, the dynamic correlation of the light absorption rate, the temperature field, and the mechanical deformation is realized through the cross-physical field data transfer algorithm, supporting the full-chain coupling analysis of light-thermal-mechanical.

[0021] Further, the method includes the following optical-thermal-mechanical field iterative coupling and full-chain dynamic simulation process:

[0022] The wave optics module calculates the absorption rate-wavelength relationship of the photonic metamaterial based on the incident light parameters, and transfers the non-uniform heat source distribution to the solid heat transfer module through the electromagnetic heat interface;

[0023] After the solid heat transfer module solves the temperature field, it transfers the thermal load to the solid mechanics

[0024] module to calculate the thermal stress and displacement of the cantilever beam;

[0025] The contact state at the tip of the cantilever beam is fed back to the system through the contact characteristics, and the thermal load distribution is adjusted through the contact state feedback to form an iterative correction mechanism for the optical-thermal-mechanical field, realizing the dynamic balance of multiple physical fields;

[0026] By integrating the blackbody radiation law to handle the correlation between the input power and the temperature field, the full-chain dynamic coupling from the optical field excitation to the mechanical response is realized.

[0027] The present invention has the following beneficial effects:

[0028] The present invention proposes a joint simulation method for the optical-thermal-mechanical coupling performance of a phase change material cantilever beam structure based on a multi-physical field simulation software, effectively solving the problem that the traditional cantilever beam simulation lacks multi-physical field coupling. By integrating the wave optics, solid heat transfer, and solid mechanics modules in the multi-physical field simulation software, a three-dimensional geometric model is established and the basic coupling architecture and closed-loop iterative coupling of the optical-thermal-mechanical field are realized, which can significantly improve the design efficiency and accuracy of the phase change material cantilever beam device, optimize the matching of the photonic metamaterial pattern parameters and the cantilever beam geometric dimensions, guide the design of the cantilever beam structure under the influence of multiple physical fields, guide the combined design of the photonic metamaterial and the phase change material cantilever beam, reduce the design cost, improve the processing efficiency, save time and economic costs, and at the same time assist in the development of a cantilever beam type MEMS sensor integrating the phase change material and the photonic metamaterial.

[0029] Other beneficial effects in the embodiments of the present invention will be further described below. Description of the Drawings

[0030] Figure 1 It is a schematic diagram of the cantilever beam structure of the embodiment of the present invention.

[0031] Figure 2 It is a flow chart of the optical-thermal-mechanical joint simulation of the embodiment of the present invention.

[0032] Figure 3 It is the simulation result of the optical absorption rate of the photonic metamaterial of the embodiment of the present invention.

[0033] Figure 4 The deformation diagrams and displacements of the cantilever beam in the embodiment of the present invention when it is in contact (a) and not in contact (b).

[0034] Figure 5 The relationship diagram between the tip displacement of the cantilever beam in the embodiment of the present invention and the wavelength of the incident light.

[0035] Figure 6 The relationship diagram between the maximum pressure between the tip of the cantilever beam and the contact pair at its bottom in the embodiment of the present invention and the wavelength of the incident light. Detailed implementation manners

[0036] The following makes a detailed description of the implementation manners of the present invention. It should be emphasized that the following description is merely exemplary and not intended to limit the scope of the present invention and its applications.

[0037] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element. In addition, the connection can be for a fixing function or for a coupling or communicating function.

[0038] It should be understood that the orientation or positional relationships indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation to the present invention.

[0039] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the embodiments of the present invention, "a plurality" means two or more unless otherwise specifically defined.

[0040] The embodiment of the present invention provides a method for joint simulation of the opto-thermal-mechanical coupling performance of a phase change material cantilever beam structure (see Figure 1 ), including the following steps:

[0041] Multi-field coupling model construction: Integrate the wave optics module, solid heat transfer module, and solid mechanics module in a multi-physics simulation software (such as COMSOL), establish a three-dimensional geometric model including a photonic metamaterial layer and a phase change material cantilever beam, define the temperature-dependent interpolation function of the phase change material to describe the non-linear variation of the material's thermophysical parameters with temperature, and realize the basic coupling framework of the light-thermal-mechanical fields;

[0042] Boundary and initial condition setting: Apply periodic boundary conditions and incident electromagnetic wave excitation to the photonic metamaterial pattern, set fixed constraints and temperature references for the anchor area of the cantilever beam, and set convective heat dissipation conditions for the outer surface; Set the initial temperature field at room temperature, and define the contact pair characteristics at the tip and bottom of the cantilever beam;

[0043] Cross-field data transfer: Map the non-uniform light absorption rate calculated by the wave optics module as a heat source load through the electromagnetic-thermal interface. After solving the temperature field by the solid heat transfer module, use the thermal expansion interface to transfer the heat load to the solid mechanics module to form a closed-loop iterative coupling of light-thermal-mechanical;

[0044] Refined mesh division: Use free tetrahedral meshes and implement local mesh refinement for the contact area at the tip of the cantilever beam to ensure the calculation accuracy in the stress concentration area;

[0045] Multi-objective parameter optimization: Analyze the influence laws of the incident light wavelength, photonic metamaterial structure parameters, and cantilever beam geometric dimensions on the light absorption rate, temperature field distribution, tip displacement, and contact pressure through parameter scanning, and optimize the structure parameters based on the simulation results.

[0046] This joint simulation method for the light-thermal-mechanical coupling performance of the phase change material cantilever beam structure realizes the full-chain dynamic simulation from light field excitation to mechanical deformation through the seamless integration of multi-physics fields, cross-field data transfer algorithms, and refined numerical simulations, providing a basis for the design and optimization of phase change material cantilever beam devices.

[0047] In a preferred embodiment, the light field distribution and absorption characteristics are simulated through the electromagnetic wave frequency domain model and the finite element method of the wave optics module of the multi-physics simulation software to generate a non-uniform heat source distribution.

[0048] In a preferred embodiment, a thermal-mechanical coupling model is constructed based on the solid heat transfer module and the solid mechanics module of the multi-physics simulation software. By mapping the light absorption energy as a heat source and combining the heat conduction equation and the structural mechanics equation, the temperature field and deformation are solved.

[0049] In a preferred embodiment, the multi-physics dynamic simulation is realized through the built-in research steps of the multi-physics simulation software, including the iterative coupling calculation of the light field, thermal field, and mechanical field, where the light field and the thermal field are coupled through the electromagnetic-thermal interface, and the thermal field and the mechanical field are coupled through the thermal expansion interface.

[0050] In a preferred embodiment, a periodic boundary condition is set for the photonic metamaterial pattern, a convective heat boundary condition is set on the outer surface of the cantilever beam structure, a fixed temperature boundary condition is set at the bottom of the anchor region, and a fixed mechanical boundary condition is set for part of the anchor region.

[0051] In a preferred embodiment, the phase change characteristics of the phase change material are represented by a temperature-dependent interpolation function, which is used to describe the variation of the thermophysical parameters of the material with temperature.

[0052] In a preferred embodiment, free tetrahedral meshes are used for the mesh division, and local mesh refinement is implemented in the contact area at the tip of the cantilever beam, with the maximum edge length not exceeding 1e-7 m.

[0053] In a preferred embodiment, the parameter scan includes a multi-dimensional variable analysis of the incident light wavelength, the photonic metamaterial structure parameters, and the geometric dimensions of the cantilever beam; the analysis of the simulation results includes a multi-objective evaluation of the light absorption rate, the temperature field distribution, the displacement at the tip of the cantilever beam, and the contact pressure.

[0054] In a preferred embodiment, a dynamic correlation between the light absorption rate, the temperature field, and the mechanical deformation is achieved through a cross-physical field data transfer algorithm, supporting a full-chain coupling analysis of light-thermal-mechanical processes.

[0055] As Figure 2 shown, in a preferred embodiment, the method for the combined simulation of the light-thermal-mechanical coupling performance of the phase change material cantilever beam structure specifically includes the following light-thermal-mechanical field iterative coupling and full-chain dynamic simulation processes: The wave optics module calculates the absorption rate-wavelength relationship of the photonic metamaterial based on the incident light parameters, and transfers the non-uniform heat source distribution to the solid heat transfer module through the electromagnetic-thermal interface; after the solid heat transfer module solves the temperature field, it transfers the thermal load to the solid mechanics module through the thermal expansion interface to calculate the thermal stress and displacement of the cantilever beam; the contact state (contact / non-contact) at the tip of the cantilever beam is fed back to the system through the contact feature, and the thermal load distribution is adjusted through the contact state feedback to form an iterative correction mechanism for the light-thermal-mechanical fields, realizing the dynamic balance of multiple physical fields; the correlation between the input power and the temperature field is processed by integrating the blackbody radiation law to achieve the full-chain dynamic coupling from the light field excitation to the mechanical response.

[0056] The light-thermal-mechanical combined simulation method provided by the embodiment of the present invention generates a non-uniform heat source distribution through the photonic metamaterial light field model and couples it to the thermal-mechanical model of the phase change material cantilever beam to achieve the dynamic simulation of multiple physical fields.

[0057] The embodiment of the present invention also provides a combined simulation system for implementing the light-thermal-mechanical combined simulation method, including: a light field simulation module, a thermal-mechanical coupling solution module, and a data visualization module.

[0058] The present invention proposes a combined simulation method for the optical-thermal-mechanical coupling performance of a phase change material cantilever beam structure based on a multi-physics field simulation software, specifically addressing the technical shortcoming that traditional cantilever beam simulations do not cover multi-physics field coupling. By constructing an optical-thermal-mechanical coupling model of the phase change material cantilever beam structure in the multi-physics field simulation software, simulating and calculating its performance, and analyzing the influence of each component by adjusting process parameters, the design efficiency and accuracy of the phase change material cantilever beam device can be significantly improved, and the matching of the photonics metamaterial pattern parameters and the cantilever beam geometric dimensions can be optimized. This method not only guides the design of the cantilever beam structure under the influence of multi-physics fields, reduces the design cost, improves the processing efficiency, saves time and economic costs, but also deeply studies the interaction and coupling between the cantilever beam mechanical structure and the external physical fields, provides technical support for the design of the phase change material cantilever beam device, and further promotes the development process of the cantilever beam type MEMS sensor integrating phase change materials and photonics metamaterials.

[0059] Example:

[0060] The following takes the case where the multi-physics field simulation software uses COMSOL as an example.

[0061] A combined simulation method for the optical-thermal-mechanical coupling performance of a phase change material cantilever beam structure based on COMSOL. The method includes the following steps: 1) Determine the physical parameters of the phase change material cantilever beam and the photonics metamaterial; 2) Use the wave optics module, solid heat transfer module, and solid mechanics module of COMSOL to establish the geometric physical model of the phase change material cantilever beam in COMSOL, and assign the parameters in step 1) to the corresponding material regions; 3) Set the initial calculation conditions and boundary conditions; 4) Divide the mesh and calculate; 5) Compare and analyze the calculation results of different design parameters. The present invention guides the combined design of the photonics metamaterial and the phase change material cantilever beam, reduces the design cost, and improves the processing efficiency.

[0062] The present invention proposes a multi-field coupling simulation model for the photonics metamaterial pattern and the phase change material cantilever beam structure, covering the entire chain of optical field excitation, thermal energy conversion, and mechanical deformation, and developing a cross-physics field data transfer algorithm to achieve the dynamic correlation of the light absorption rate, temperature field distribution, and cantilever beam stress deformation.

[0063] The combined simulation method for the optical-thermal-mechanical coupling performance of the phase change material cantilever beam structure based on the COMSOL model of the present invention includes:

[0064] Photonics metamaterial modeling: Based on the electromagnetic wave frequency domain model provided by the wave optics module of COMSOL and the finite element method, simulate the light field distribution and absorption characteristics of the photonics metamaterial.

[0065] Thermal-mechanical coupling modeling: Map the light absorption energy as a heat source, and combine the heat conduction equation and the structural mechanics equation to solve the temperature field and deformation.

[0066] Co - simulation: The iterative coupled calculation of the optical - thermal - mechanical fields is achieved through the research steps built into COMSOL.

[0067] The specific implementation process of the co - simulation method for the optical - thermal - mechanical coupling performance of the cantilever beam structure includes:

[0068] 1) Determine the basic parameters for constructing the cantilever beam and the photonic metamaterial by combining methods such as literature research and experimental measurement.

[0069] 2) Enter the COMSOL software interface, create a new 3D model, select the wave optics module, solid heat transfer module, and solid mechanics module in the physical field selection. At the same time, select the electromagnetic - thermal module and thermal expansion module in the multi - physics coupling.

[0070] 3) Set the cantilever beam model and the photonic metamaterial pattern, and set the material parameters in the corresponding areas. The phase - change characteristics of the phase - change material are represented by an interpolation function related to temperature.

[0071] 4) Apply the wave optics physical field to the photonic metamaterial pattern, the solid heat transfer physical field to all structures, and the solid mechanics physical field to the cantilever beam part.

[0072] 5) Boundary conditions and initial conditions

[0073] Set the boundary condition of the photonic metamaterial pattern as the periodic boundary condition; set the convective heat boundary condition on the outer surface of the cantilever beam structure and the fixed - temperature boundary condition at the bottom of the anchor area; set the fixed boundary condition for the anchor area part of the cantilever beam. Set the contact characteristics directly at the tip and the bottom of the cantilever beam, and specify the tip and the bottom of the cantilever beam as the contact pair.

[0074] Set the initial temperature as room temperature, set the incident electromagnetic wave band for the photonic metamaterial part, and perform parameter scanning.

[0075] 6) Multi - physics coupling

[0076] Select wave optics and solid heat transfer in the electromagnetic - thermal interface, and select solid heat transfer and solid mechanics in the thermal expansion interface.

[0077] 7) Mesh generation and calculation

[0078] Select the free tetrahedral mesh. Through the physical field preset control, set the mesh to be refined at the tip part of the cantilever beam, with the maximum side length not exceeding 1e - 7m, and set the mesh for the remaining parts as normal. After checking that the model is correct, perform the solution.

[0079] Figure 2 The process shown is the optical - thermal - mechanical coupling simulation process of the phase - change material cantilever beam, specifically as follows:

[0080] Optical field analysis: The wave optics module calculates the absorption rate - wavelength relationship of the photonic metamaterial based on the incident light parameters, and transfers the non-uniform heat source to the solid heat transfer module through the electromagnetic heat interface.

[0081] Thermal field solution: After receiving the heat source, the solid heat transfer module solves the temperature field, and then transfers the thermal load to the solid mechanics module through the thermal expansion interface.

[0082] Mechanical calculation and feedback: The solid mechanics module calculates the thermal stress and displacement of the cantilever beam, and the contact state (contact / non-contact) at the tip of the cantilever beam is fed back to the system. Accordingly, the thermal load distribution is adjusted to form an iterative correction of the optical-thermal-mechanical field, realizing the dynamic balance of multiple physical fields.

[0083] Full-chain coupling: By integrating the blackbody radiation law, the correlation between the input power and the temperature field is processed, and finally the full-chain dynamic coupling from optical field excitation to mechanical response is realized.

[0084] Figure 3 This is the simulation result of the optical absorption rate of the photonic metamaterial in the embodiment of the present invention. As can be seen from Figure 3 In this design, the photonic metamaterial used has two absorption peaks at 5.5 and 7 μm. Figure 4 This is the deformation diagram and displacement of the cantilever beam in the embodiment of the present invention when it is in contact (a) and non-contact (b). As can be seen from Figure 4 When the incident light wavelength is 7 μm, the absorption rate of the photonic metamaterial is relatively high, driving the displacement of the cantilever beam to contact the lower structure; conversely, the cantilever beam does not contact the lower part. Figure 5 This is the relationship diagram between the tip displacement of the cantilever beam and the incident light wavelength in the embodiment of the present invention. As can be seen from Figure 5 In the part where the absorption rate corresponding to the incident light wavelength is relatively high, the cantilever beam contacts the lower part. Figure 6 This is the relationship diagram between the maximum pressure of the tip of the cantilever beam and its bottom and the incident light wavelength in the embodiment of the present invention. As can be seen from Figure 6 The maximum contact pressure between the cantilever beam and the lower structure is positively correlated with the absorption rate of the photonic metamaterial.

[0085] In this embodiment, by establishing the optical-thermal-mechanical coupling of the phase change material cantilever beam structure in the COMSOL finite element software, the performance of the phase change material cantilever beam is simulated and calculated. By adjusting the process parameters, the influence degree of each component on the cantilever beam is studied, so as to guide the design of the phase change material cantilever beam, saving time and economic costs, and contributing to the development of the cantilever beam type MEMS sensor integrating phase change materials and photonic metamaterials.

[0086] The above content is a further detailed description of the present invention in combination with specific / preferred embodiments, and it cannot be determined that the specific implementation of the present invention is only limited to these descriptions. For those of ordinary skill in the technical field to which the present invention pertains, without departing from the concept of the present invention, they can also make several substitutions or modifications to these described embodiments, and these substitution or modification methods should all be regarded as belonging to the protection scope of the present invention. In the description of this specification, the description with reference to terms such as "an embodiment", "some embodiments", "preferred embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. Without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples. Although the embodiments of the present invention and their advantages have been described in detail, it should be understood that various changes, substitutions, and alterations can be made herein without departing from the scope of protection of the patent application.

Claims

1. A joint simulation method for the optical-thermal-mechanical coupling performance of a phase change material cantilever beam structure, characterized in that The following steps are involved: Integrate the wave optics module, solid heat transfer module and solid mechanics module in multi-physics simulation software such as COMSOL, establish a three-dimensional geometric model including the photonic metamaterial layer and the phase change material cantilever beam, define the temperature-dependent interpolation function of the phase change material to describe the nonlinear change of the material's thermal physical parameters with temperature, and realize the basic coupling architecture of the optical-thermal-mechanical field; Periodic boundary conditions and incident electromagnetic wave excitation are applied to the photonic metamaterial pattern, fixed constraints and temperature references are set in the cantilever beam anchor area, and convection heat dissipation conditions are set on the outer surface; Set the initial temperature field at room temperature and define the contact pair feature between the tip and the bottom of the cantilever beam; The non-uniform light absorption rate calculated by the wave optics module is mapped to a heat source load through the electromagnetic thermal interface. After the temperature field is solved by the solid heat transfer module, the thermal load is transferred to the solid mechanics module using the thermal expansion interface, forming a closed-loop iterative coupling of light, heat and machinery. Free tetrahedral mesh is used to implement local mesh refinement in the contact area of ​​the cantilever beam tip to ensure the calculation accuracy of the stress concentration area; The influence of incident light wavelength, photonic metamaterial structural parameters and cantilever beam geometric dimensions on light absorptivity, temperature field distribution, tip displacement and contact pressure is analyzed through parameter scanning, and the structural parameters are optimized based on the simulation results.

2. The joint simulation method according to claim 1, characterized in that: The electromagnetic wave frequency domain model of the wave optics module of the multi-physics field simulation software and the finite element method are used to simulate the light field distribution and absorption characteristics and generate a non-uniform heat source distribution.

3. The joint simulation method according to claim 1, characterized in that: A thermal-mechanical coupling model is constructed based on the solid heat transfer module and solid mechanics module of the multi-physics field simulation software. The temperature field and deformation are solved by mapping the light absorption energy as a heat source and combining the heat conduction equation with the structural mechanics equation.

4. The joint simulation method according to claim 1, characterized in that: Multi-physics dynamic simulation is achieved through the built-in research steps of the multi-physics simulation software, including iterative coupling calculations of optical, thermal, and mechanical fields. The optical and thermal fields are coupled through the electromagnetic thermal interface, and the thermal and mechanical fields are coupled through the thermal expansion interface.

5. The joint simulation method according to claim 1, characterized in that: The photonic metamaterial pattern is provided with periodic boundary conditions, the outer surface of the cantilever beam structure is provided with convection thermal boundary conditions, the bottom of the anchor area is provided with fixed temperature boundary conditions, and the anchor area part is provided with fixed mechanical boundary conditions.

6. The joint simulation method according to claim 1, characterized in that: The phase change characteristics of the phase change material are represented by an interpolation function related to temperature to describe the change of the material's thermophysical parameters with temperature.

7. The joint simulation method according to claim 1, characterized in that: The mesh division adopts free tetrahedral mesh, and local mesh refinement is implemented in the contact area of ​​the cantilever beam tip, and the maximum side length does not exceed 1e-7m.

8. The joint simulation method according to claim 1, characterized in that: The parameter scan includes multi-dimensional variable analysis of incident light wavelength, photonic metamaterial structural parameters and cantilever beam geometric dimensions; the analysis of the simulation results includes multi-objective evaluation of light absorption rate, temperature field distribution, cantilever beam tip displacement and contact pressure.

9. The joint simulation method according to claim 1, characterized in that: Through the cross-physical field data transfer algorithm, the dynamic correlation between light absorption rate, temperature field and mechanical deformation is realized, and the full-chain coupling analysis of light, heat and machinery is realized.

10. The joint simulation method according to any one of claims 1 to 9, characterized in that: It includes the following iterative coupling of light-heat-mechanical fields and full-chain dynamic simulation process: The Wave Optics module calculates the absorptivity-wavelength relationship of the photonic metamaterial based on the incident light parameters and transfers the non-uniform heat source distribution to the Solid Heat Transfer module through the Electromagnetic Heating interface. After the solid heat transfer module solves the temperature field, the thermal load is transferred to the solid mechanics module through the thermal expansion interface to calculate the thermal stress and displacement of the cantilever beam. The contact state of the cantilever tip is fed back to the system through the contact feature, and the thermal load distribution is adjusted through the contact state feedback, forming an iterative correction mechanism of the optical-thermal-mechanical field and achieving dynamic balance of multiple physical fields; By integrating the blackbody radiation law to process the correlation between input power and temperature field, full-chain dynamic coupling from light field excitation to mechanical response is achieved.

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