Calibration method, device and equipment of laser scanning galvanometer performance detection device

Abstract

The invention relates to a calibration method, device and equipment of a laser scanning galvanometer performance detection device. The method comprises the steps that a laser is controlled to emit laser, a rotating table and / or a scanning galvanometer are / is controlled to rotate until a position sensitive detector detects that a light spot of the laser is located at a preset zero point position, and the deflection angle of the rotating table is determined as an initial angle; determining an angle range based on the initial angle and a preset angle, controlling the rotating table to rotate in the angle range, and obtaining light spot positions detected by the position sensitive detectors at multiple angles in the angle range; based on the light spot positions at the multiple angles, calibration parameters in the target calibration function are solved; the solved target calibration function is used for carrying out performance detection on the scanning galvanometer. By adopting the method, the laser scanning galvanometer performance detection device can be automatically calibrated.

Description

Technical Field

[0001] The present application relates to the technical field of laser detection, and particularly to a calibration method, device, and equipment for a performance detection device of a laser scanning galvanometer. Background Art

[0002] A scanning galvanometer is a high-repetition and high-precision opto-mechatronic product. It mainly controls a scanning motor through a servo circuit to make it deflect a certain angle as required, and finally makes the mirror installed on the motor shaft deflect. Since the scanning galvanometer system includes a position sensor and a negative feedback loop, the scanning galvanometer has the advantages of high stability, long life, and high precision during operation, and is widely used in the military, medical, and manufacturing industries. Due to the high precision and high stability of the scanning galvanometer itself, the accuracy requirements for the detection device for detecting the scanning galvanometer are also getting higher and higher. However, traditional detection devices cannot perform automatic calibration. Therefore, there is an urgent need for a method that can automatically calibrate a performance detection device of a laser scanning galvanometer. Summary of the Invention

[0003] Based on this, in view of the above technical problems, it is necessary to provide a calibration method, device, and equipment for a performance detection device of a laser scanning galvanometer, which can automatically calibrate the performance detection device of the laser scanning galvanometer.

[0004] In a first aspect, the present application provides a calibration method for a performance detection device of a laser scanning galvanometer, which is applied to a performance detection device of a laser scanning galvanometer. The device includes: a scanning galvanometer, a rotating table, a laser, a position-sensitive detector, and a processor; wherein, the scanning galvanometer is installed on the rotating table; when the rotating table rotates, it drives the scanning galvanometer to rotate; the scanning galvanometer is used to reflect the laser emitted by the laser; the position-sensitive detector is used to determine the spot position when detecting the spot of the laser reflected by the scanning galvanometer; the method is executed by the processor and includes:

[0005] Controlling the laser to emit laser light, and controlling the rotating table and / or the scanning galvanometer to rotate until the position-sensitive detector detects that the spot of the laser is located at a preset zero position, and determining the deflection angle of the rotating table as the initial angle;

[0006] Based on the initial angle and the preset angle, determining an angle range, and controlling the rotating table to rotate within the angle range, and obtaining the spot positions detected by the position-sensitive detector at multiple angles within the angle range;

[0007] Based on the spot positions at multiple angles, solving the calibration parameters in the target calibration function; the solved target calibration function is used to perform performance detection on the scanning galvanometer.

[0008] In one embodiment, based on the spot positions at multiple angles, solving the calibration parameters in the target calibration function includes:

[0009] Select any one of multiple angles, use the current angle and the spot position at the current angle as the input of the target calibration function, and obtain the calibration equation corresponding to the current angle;

[0010] For each of the multiple remaining angles, continue to perform the step of using the current angle and the spot position at the current angle as the input of the target calibration function, and obtain the calibration equations corresponding to the multiple remaining angles respectively;

[0011] Solve the calibration equations corresponding to each of the multiple angles to obtain the calibration parameters in the target calibration function.

[0012] In one embodiment, the laser scanning galvanometer performance detection device further includes a sliding table; the method further includes:

[0013] In the plane where the sliding table is installed, with the preset zero position as the origin of the coordinate axis, the line where the sliding table is located as the X-axis, the direction perpendicular to the line where the sliding table is located as the Z-axis, and the line perpendicular to the plane as the Y-axis, establish a calibration coordinate system.

[0014] In one embodiment, the calibration parameters include the distance from the axis center of the rotary table to the preset zero position, the angle between the galvanometer reflecting surface and the X-axis, the angle between the outgoing light and the Z-axis, and the axis center coordinates of the rotary table.

[0015] In one embodiment, the target calibration function is:

[0016]

[0017] Where S represents the spot position, θ represents the deflection angle of the rotary table, θ0 represents the angle between the outgoing light and the Z-axis; C (CX, CZ) represents the axis center coordinates of the rotary table; β represents the angle between the galvanometer reflecting surface and the X-axis, and H represents the distance from the axis center of the rotary table to the preset zero position.

[0018] In one embodiment, the laser scanning galvanometer performance detection device further includes a sliding table; the position sensitive detector is slidably mounted on the sliding table; the method further includes:

[0019] Based on the theoretical deflection angle of the scanning galvanometer and the solved target calibration function, obtain the theoretical spot position;

[0020] Control the position sensitive detector to move on the sliding table to the theoretical spot position, and obtain the actual spot position detected by the position sensitive detector;

[0021] Based on the actual spot position and the solved target calibration function, obtain the actual rotation angle of the galvanometer.

[0022] In a second aspect, the present application further provides a device for detecting the performance of a laser scanning galvanometer, including: a scanning galvanometer, a rotating table, a laser, a position sensitive detector, and a processor; wherein, the scanning galvanometer is installed on the rotating table; when the rotating table rotates, it drives the scanning galvanometer to rotate; the scanning galvanometer is used to reflect the laser emitted by the laser; the position sensitive detector is used to determine the position of the light spot when detecting the light spot of the laser reflected by the scanning galvanometer; the processor is used to execute the steps of the calibration method of the device for detecting the performance of the laser scanning galvanometer in the first aspect.

[0023] In one embodiment, the device for detecting the performance of the laser scanning galvanometer further includes a sliding table; the position sensitive detector is slidably installed on the sliding table; the processor is further used for: based on the theoretical deflection angle of the scanning galvanometer and the solved target calibration function, obtaining the theoretical light spot position; controlling the position sensitive detector to move on the sliding table to the theoretical light spot position, and obtaining the actual light spot position detected by the position sensitive detector; based on the actual light spot position and the solved target calibration function, obtaining the actual rotation angle of the galvanometer.

[0024] In a third aspect, the present application further provides a computer device, including a memory and a processor, the memory stores a computer program, and when the processor executes the computer program, the following steps are implemented:

[0025] Controlling the laser to emit laser light, and controlling the rotating table and / or the scanning galvanometer to rotate until the position sensitive detector detects that the light spot of the laser is located at a preset zero position, and determining the deflection angle of the rotating table as the initial angle;

[0026] Based on the initial angle and the preset angle, determining an angle range, and controlling the rotating table to rotate within the angle range, and obtaining the light spot positions detected by the position sensitive detector at multiple angles within the angle range;

[0027] Based on the light spot positions at multiple angles, solving the calibration parameters in the target calibration function; the solved target calibration function is used to detect the performance of the scanning galvanometer.

[0028] In a fourth aspect, the present application further provides a computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by the processor, the following steps are implemented:

[0029] Controlling the laser to emit laser light, and controlling the rotating table and / or the scanning galvanometer to rotate until the position sensitive detector detects that the light spot of the laser is located at a preset zero position, and determining the deflection angle of the rotating table as the initial angle;

[0030] Based on the initial angle and the preset angle, determining an angle range, and controlling the rotating table to rotate within the angle range, and obtaining the light spot positions detected by the position sensitive detector at multiple angles within the angle range;

[0031] Solve the calibration parameters in the target calibration function based on the spot positions at multiple angles; the solved target calibration function is used to perform performance detection on the scanning galvanometer.

[0032] The calibration method, device and equipment for the performance detection device of the above laser scanning galvanometer, the device includes: a scanning galvanometer, a rotating table, a laser, a position sensitive detector and a processor. The processor controls the laser to emit laser and controls the rotation of the rotating table and / or the scanning galvanometer. Since the scanning galvanometer in the device is installed on the rotating table, when the rotating table rotates, it drives the scanning galvanometer to rotate. Therefore, as the rotating table and / or the scanning galvanometer rotate, the laser emission circuit of the scanning galvanometer continuously changes. When the position sensitive detector detects that the laser spot is located at the preset zero position, the rotation of the rotating table and / or the scanning galvanometer is controlled to stop, and the deflection angle of the rotating table is determined as the initial angle, realizing the automatic position zeroing of the rotating table, the scanning galvanometer and the position sensitive detector; Next, the processor controls the rotating table to rotate within the angle range determined based on the initial angle and the preset angle, and obtains the spot positions detected by the position sensitive detector at multiple angles within the angle range. Finally, the processor solves the calibration parameters in the target calibration function based on the spot positions at multiple angles, realizing the automatic calibration of the device; In addition, the solved target calibration function is used to perform performance detection on the scanning galvanometer, which is beneficial to improving the performance detection accuracy of the device for the scanning galvanometer. Description of the Drawings

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present application or related technologies, the following will briefly introduce the drawings required for use in the description of the embodiments of the present application or related technologies. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0034] Figure 1 It is an application environment diagram of the calibration method for the performance detection device of the laser scanning galvanometer in an embodiment;

[0035] Figure 2 It is a flow schematic diagram of the calibration method for the performance detection device of the laser scanning galvanometer in an embodiment;

[0036] Figure 3 It is a sub-flow schematic diagram of step 206 in an embodiment;

[0037] Figure 4 It is a flow schematic diagram of the calibration method for the performance detection device of the laser scanning galvanometer in another embodiment;

[0038] Figure 5 It is an internal structure diagram of a computer device in an embodiment. Detailed implementation manners

[0039] In order to make the objectives, technical solutions and advantages of the present application more clear and understandable, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0040] The calibration method for the performance detection device of the laser scanning galvanometer provided by the embodiment of the present application can be applied to, for example, Figure 1 the performance detection device of the laser scanning galvanometer as shown. Among them, Figure 1 FIG. is a top view of the performance detection device of the laser scanning galvanometer. The device includes: a scanning galvanometer 101, a rotating table 102, a laser 103, a position sensitive detector 104, and a processor (not shown); wherein, the scanning galvanometer 101 is installed on the rotating table 102; when the rotating table 102 rotates, it drives the scanning galvanometer 101 to rotate; the scanning galvanometer 101 is used to reflect the laser emitted by the laser 103; the position sensitive detector 104 is used to determine the spot position when detecting the spot of the laser reflected by the scanning galvanometer 101; the processor can be connected to the scanning galvanometer 101, the rotating table 102, the laser 103, and the position sensitive detector 104 to control each device to execute the calibration method of the performance detection device of the laser scanning galvanometer. The processor can be a terminal or a server, or a system including a terminal and a server. When the processor executes the calibration method of the performance detection device of the laser scanning galvanometer, it controls the laser 103 to emit laser light, and controls the rotating table 102 and / or the scanning galvanometer 101 to rotate until the position sensitive detector 104 detects that the spot of the laser is located at a preset zero position, and determines the deflection angle of the rotating table 102 as the initial angle; based on the initial angle and the preset angle, determines the angle range, and controls the rotating table 102 to rotate within the angle range, and obtains the spot positions detected by the position sensitive detector 104 at multiple angles within the angle range; based on the spot positions at multiple angles, solves the calibration parameters in the target calibration function; the solved target calibration function is used to perform performance detection on the scanning galvanometer 101.

[0041] In an exemplary embodiment, as Figure 2 shown, a calibration method for the performance detection device of the laser scanning galvanometer is provided. Taking the application of this method to the Figure 1 performance detection device of the laser scanning galvanometer as an example, the method includes the following steps 202 to 206. Among them:

[0042] Step 202, control the laser to emit laser light, and control the rotating table and / or the scanning galvanometer to rotate until the position sensitive detector detects that the spot of the laser is located at a preset zero position, and determine the deflection angle of the rotating table as the initial angle.

[0043] Among them, the laser and the rotary table are installed on the optical platform, and the processor controls the laser to emit laser light. Refer to Figure 1 , the scanning galvanometer and the rotary table rotate coaxially. The rotation of the rotary table can drive the scanning galvanometer to rotate, and the scanning galvanometer can also rotate independently. The reflection point of the laser light path falls on the rotation axis of the rotary table, and the scanning galvanometer is used to reflect the laser light.

[0044] The preset zero position refers to the preset zeroing position. In some embodiments, refer to Figure 1 , the device may further include a sliding table 105. The preset zero position can be a position on the sliding table. The position sensitive detector 104 is slidably mounted on the sliding table 105. For example, the sliding table 105 has a slide rail, and the position sensitive detector 104 is slidably mounted on the sliding table 105 through the slide rail, so that the position sensitive detector 104 can move freely on the sliding table 105 to realize the performance detection of the large deflection angle of the scanning galvanometer. In some embodiments, refer to Figure 1 , the connection line from the preset zero position 106 to the axis 107 of the rotary table is perpendicular to the slide rail of the sliding table 105.

[0045] In some embodiments, the central wavelength of the laser 103 should be within the response wavelength range of the position sensitive detector 104.

[0046] Since the position sensitive detector can detect the position of the laser spot when the laser spot falls within the detection range of the position sensitive detector, the processor controls the position sensitive detector to move to the preset zero position on the sliding table, and controls the rotation of the rotary table and / or the scanning galvanometer. The reflection loop of the laser changes continuously until the position sensitive detector detects that the laser spot is located at the preset zero position. The processor controls the rotary table and / or the scanning galvanometer to stop rotating, and determines the deflection angle of the rotary table as the initial angle. For example, the initial angle can be 0 degrees, that is, the processor sets the deflection angle of the rotary table to zero. Through the above steps, the position zeroing of the scanning galvanometer, the rotary table and the position sensitive detector is realized.

[0047] Step 204, based on the initial angle and the preset angle, determine the angle range, and control the rotary table to rotate within the angle range, and obtain the positions of the laser spots detected by the position sensitive detector at multiple angles within the angle range.

[0048] Among them, the preset angle determines the size of the angle range, and the angle range is used to indicate the rotation of the rotary table within the angle range. In some embodiments, the angle range can be the angle range between the preset multiple of the initial angle minus the preset angle and the preset multiple of the initial angle plus the preset angle. For example, the preset angle is 10 degrees, the initial angle is 0 degrees, and the angle range can be -10 degrees to 10 degrees.

[0049] The processor controls the rotary table to rotate within an angular range. The scanning galvanometer rotates within the angular range along with the rotary table, and the emission circuit of the laser changes accordingly. The position sensitive detector can record the change in the spot position of the laser.

[0050] Exemplarily, the processor controls the rotary table to rotate to multiple angles within the angular range and controls the position sensitive detector to record the spot position at each angle. For example, the angular range includes 10,000 angles, each angle is denoted as θ, and the corresponding spot position is denoted as S, and 10,000 sets of data (θ, S) can be obtained.

[0051] Step 206, solve the calibration parameters in the target calibration function based on the spot positions at multiple angles; the solved target calibration function is used to perform performance detection on the scanning galvanometer.

[0052] Among them, the target calibration function refers to the expression between multiple calibration parameters and the spot position. The processor performs iterative solution on the target calibration function based on the spot positions at multiple angles to obtain the calibration parameters in the target calibration function. Using the solved calibration parameters as function parameters, the solved target calibration function is obtained. Solving the calibration parameters in the target calibration function is equivalent to realizing the automatic calibration of the device. Using the solved target calibration function to perform performance detection on the scanning galvanometer is beneficial to improving the detection accuracy of the scanning galvanometer compared with performing performance detection using the corresponding parameters before calibration.

[0053] In the calibration method of the above laser scanning galvanometer performance detection device, the device includes: a scanning galvanometer, a rotary table, a laser, a position sensitive detector, and a processor. The processor controls the laser to emit laser light and controls the rotary table and / or the scanning galvanometer to rotate. Since the scanning galvanometer in the device is installed on the rotary table and the rotary table drives the scanning galvanometer to rotate when it rotates, therefore, as the rotary table and / or the scanning galvanometer rotate, the emission circuit of the laser by the scanning galvanometer continuously changes. When the position sensitive detector detects that the spot of the laser is located at the preset zero position, the rotary table and / or the scanning galvanometer are controlled to stop rotating, and the deflection angle of the rotary table is determined as the initial angle, realizing the automatic position zeroing of the rotary table, the scanning galvanometer, and the position sensitive detector; next, the processor controls the rotary table to rotate within the angular range determined based on the initial angle and the preset angle, and obtains the spot positions detected by the position sensitive detector at multiple angles within the angular range. Finally, the processor solves the calibration parameters in the target calibration function based on the spot positions at multiple angles, realizing the automatic calibration of the device; in addition, the solved target calibration function is used to perform performance detection on the scanning galvanometer, which is beneficial to improving the performance detection accuracy of the device for the scanning galvanometer.

[0054] In an exemplary embodiment, such as Figure 3As shown, step 206 includes steps 302 to 306. Among them:

[0055] Step 302, select any angle from multiple angles, take the current angle and the spot position at the current angle as the input of the target calibration function, and obtain the calibration equation corresponding to the current angle.

[0056] Step 304, for each angle among the multiple remaining angles, continue to execute the step of taking the current angle and the spot position at the current angle as the input of the target calibration function, and obtain the calibration equations corresponding to the multiple remaining angles respectively.

[0057] Step 306, solve the calibration equations corresponding to the multiple angles respectively to obtain the calibration parameters in the target calibration function.

[0058] Among them, the solution process of the target calibration function is an iterative solution process. Exemplarily, the curve_fit fitting function of scipy.optimize in python can be used to iteratively fit the spot positions at the above multiple angles.

[0059] First, the processor selects any angle from multiple angles, takes the current angle and the spot position at the current angle as the input of the target calibration function, and obtains the calibration equation corresponding to the current angle. Then, the spot positions at the remaining angles are processed in the same way to obtain the calibration equations corresponding to the multiple remaining angles respectively. Finally, by solving the calibration equations corresponding to the multiple angles respectively, the calibration parameters in the target calibration function can be obtained.

[0060] In this embodiment, by iteratively solving the spot positions at multiple angles to obtain the calibration parameters in the target calibration function, it is beneficial to improve the accuracy of the calibration parameters.

[0061] In an exemplary embodiment, referring to Figure 1 , the laser scanning galvanometer performance detection device further includes a sliding table 105; the method further includes: in the plane where the sliding table 105 is installed, taking the preset zero position as the origin of the coordinate axis, taking the straight line where the sliding table 105 is located as the X axis, taking the direction perpendicular to the straight line where the sliding table 105 is located as the Z axis, and taking the straight line perpendicular to the plane as the Y axis, to establish a calibration coordinate system.

[0062] Among them, since both the rotating table and the sliding table are installed in the optical plane, therefore, a calibration coordinate system can be established based on this optical plane for calculating the calibration parameters. For example, taking the preset zero position as the origin of the coordinate axis, taking the straight line where the sliding table is located as the X axis, taking the direction perpendicular to the straight line where the sliding table is located as the Z axis, and taking the straight line perpendicular to the plane as the Y axis, to establish a calibration coordinate system.

[0063] In this embodiment, the processor can establish a calibration coordinate system based on the plane where the rotary table and the sliding table are located, which is used for calculating calibration parameters.

[0064] In an exemplary embodiment, the calibration parameters include the distance from the axis center of the rotary table to the preset zero position, the angle between the galvanometer reflection surface and the X-axis, the angle between the outgoing light and the Z-axis, and the axis center coordinates of the rotary table.

[0065] In this embodiment, since the theoretical data corresponding to the calibration parameters often have systematic errors. For example, the theoretical data of the axis center coordinates of the rotary table before calibration have certain systematic errors. Through the automatic calibration of the device, the calibration parameters are solved, reducing the systematic errors of each parameter. Based on the calibration parameters, the performance of the scanning galvanometer is detected, which is beneficial to improving the detection accuracy.

[0066] In an exemplary embodiment, the target calibration function is:

[0067]

[0068] where S represents the spot position, θ represents the deflection angle of the rotary table, θ0 represents the angle between the outgoing light and the Z-axis; C (CX, CZ) represents the axis center coordinates of the rotary table; β represents the angle between the galvanometer reflection surface and the X-axis, and H represents the distance from the axis center of the rotary table to the preset zero position.

[0069] In this embodiment, the target calibration function is used to characterize the relationship between the spot position, the deflection angle of the rotary table and each calibration parameter. In the process of solving the target calibration function, the spot position and the deflection angle of the rotary table are used as input data, and through iterative solution, each calibration parameter can be obtained.

[0070] In an exemplary embodiment, referring to Figure 1 , the laser scanning galvanometer performance detection device further includes a sliding table 105; a position sensitive detector 104 is slidably mounted on the sliding table 105; as Figure 4 shown, the method further includes:

[0071] Step 402, based on the theoretical deflection angle of the scanning galvanometer and the solved target calibration function, obtain the theoretical spot position;

[0072] Step 404, control the position sensitive detector to move to the theoretical spot position on the sliding table, and obtain the actual spot position detected by the position sensitive detector;

[0073] Step 406, based on the actual spot position and the solved target calibration function, obtain the actual rotation angle of the galvanometer.

[0074] After the device completes automatic calibration, that is, after solving the target calibration function, the processor can obtain the theoretical spot position based on the theoretical deflection angle of the scanning galvanometer and the solved target calibration function. The theoretical deflection angle refers to the preset deflection angle of the rotary table. For example, it can be 2 degrees. The result obtained by substituting the theoretical deflection angle into the solved target calibration function is used as the theoretical spot position.

[0075] The processor controls the scanning galvanometer to rotate to this theoretical deflection angle and controls the position-sensitive detector to move on the sliding table to the theoretical spot position. The processor controls the position-sensitive detector to detect the position of the spot and uses it as the actual spot position. Since the position-sensitive detector has high position detection accuracy, the detected actual spot position has high accuracy and precision.

[0076] The processor substitutes the actual spot position into the solved target calibration function and uses a numerical method to solve the equation, and the obtained angle value is recorded as the actual rotation angle S1 of the galvanometer. The actual rotation angle of the galvanometer is the actual deflection angle of the scanning galvanometer.

[0077] Alternatively, substitute the actual spot position S1 into the following solved target calibration function to calculate the actual rotation angle θ1 of the galvanometer.

[0078]

[0079] In this embodiment, since there is a certain error in the deflection angle of the scanning galvanometer, the performance detection of the scanning galvanometer by the device is to detect the error of the deflection angle. Therefore, by using the method of detecting the actual spot position by the position-sensitive detector and using the solved target calibration function, the actual rotation angle of the galvanometer can be obtained. The difference between the actual rotation angle of the galvanometer and the theoretical deflection angle can characterize the performance of the scanning galvanometer. This device performs performance detection on the scanning galvanometer after automatic calibration, which is beneficial to improving the accuracy and precision of the performance detection of the scanning galvanometer.

[0080] To illustrate the laser scanning galvanometer performance detection device and calibration method in this solution in detail, the following uses a most detailed embodiment for illustration:

[0081] Reference Figure 1The laser scanning galvanometer performance detection device in it, the device includes: a scanning galvanometer 101, a rotary table 102, a laser 103, a position sensitive detector 104 and a processor (not shown); wherein, the scanning galvanometer 101 is installed on the rotary table 102; when the rotary table 102 rotates, it drives the scanning galvanometer 101 to rotate; the scanning galvanometer 101 is used to reflect the laser emitted by the laser 103; the position sensitive detector 104 is used to determine the spot position when detecting the spot of the laser reflected by the scanning galvanometer 101; the processor can be connected to the scanning galvanometer 101, the rotary table 102, the laser 103, and the position sensitive detector 104 to control each device to perform the calibration method of the laser scanning galvanometer performance detection device.

[0082] Reference Figure 1 , the device may further include a sliding table 105, the preset zero position may be the position on the sliding table, the position sensitive detector 104 is slidably installed on the sliding table 105, for example, there are slide rails on the sliding table 105, and the position sensitive detector 104 is slidably installed on the sliding table 105 through the slide rails, so that the position sensitive detector 104 can move freely on the sliding table 105 to realize the performance detection of the large deflection angle of the scanning galvanometer. In some embodiments, reference Figure 1 , the connection line from the preset zero position 106 to the axis 107 of the rotary table is perpendicular to the slide rail of the sliding table 105.

[0083] The calibration method of the laser scanning galvanometer performance detection device includes the following steps:

[0084] (1) Install the laser and the rotary table on the optical platform and calibrate the direction of the laser so that the light path reflection point falls on the axis of the rotary table.

[0085] (2) Install the position sensitive detector and the sliding table on the optical platform so that the position sensitive detector faces the Z-axis direction.

[0086] (3) Install the scanning galvanometer on the rotary table, a cable with a preset softness value can be selected, and wind it around the fixture several times before fixing the scanning galvanometer to the fixture to reduce the influence of cable pulling.

[0087] (4) Zero the sliding table and the scanning galvanometer, and adjust the rotary table so that the reading S of the spot position detected by the position sensitive detector is 0, and set the angle of the rotary table at this time as the zero point.

[0088] (5) Rotate the rotary table, within the angle range, for example, -10 degrees to 10 degrees, rotate multiple angles, for example, 10,000, and record the deflection angle θ of the rotary table and the reading S of the spot position at each angle to obtain 10,000 groups of data (θ, S).

[0089] (6) Use the `scipy.optimize.curve_fit` fitting function in Python to iteratively fit the above data. The target calibration function can be:

[0090]

[0091] Among them, S represents the spot position, θ represents the deflection angle of the rotary table, and θ0 represents the angle between the outgoing light and the Z-axis; C(CX, CZ) represents the axis coordinates of the rotary table; β represents the angle between the reflecting surface of the galvanometer and the X-axis, and H represents the distance from the axis of the rotary table to the preset zero position.

[0092] (7) The parameter values of (H, β, θ0, CX, CZ) can be obtained through the fitting function.

[0093] (8) Set the theoretical deflection angle of the scanning galvanometer. For example, θ = 2, and calculate the theoretical spot position through the solved target calibration function.

[0094] (9) Move the slider to the theoretical spot position and add it to the reading of the position-sensitive detector to obtain the actual spot position S1.

[0095] (10) Substitute the actual spot position S1 into the following formula and solve the equation using numerical methods to obtain the actual rotation angle θ1 of the galvanometer of the scanning galvanometer.

[0096]

[0097] In some embodiments, the repeatability of the measurement can be improved by repeatedly reading the readings of the position-sensitive detector or moving the slider in a small range multiple times.

[0098] The above laser scanning galvanometer performance detection device and calibration method, the device includes: a scanning galvanometer, a rotating table, a laser, a position sensitive detector and a processor. The processor controls the laser to emit laser light and controls the rotation of the rotating table and / or the scanning galvanometer. Since the scanning galvanometer in the device is installed on the rotating table, when the rotating table rotates, it drives the scanning galvanometer to rotate. Therefore, as the rotating table and / or the scanning galvanometer rotates, the emission circuit of the laser by the scanning galvanometer continuously changes. When the position sensitive detector detects that the laser spot is located at the preset zero position, the rotation of the rotating table and / or the scanning galvanometer is controlled to stop, and the deflection angle of the rotating table is determined as the initial angle, realizing automatic position zeroing of the rotating table, the scanning galvanometer and the position sensitive detector; Next, the processor controls the rotating table to rotate within the angle range determined based on the initial angle and the preset angle, and obtains the spot positions detected by the position sensitive detector at multiple angles within the angle range. Finally, the processor solves the calibration parameters in the target calibration function based on the spot positions at multiple angles, realizing automatic calibration of the device; In addition, the solved target calibration function is used for performance detection of the scanning galvanometer, which is beneficial to improving the performance detection accuracy of the device for the scanning galvanometer. In addition, a detection device capable of realizing automatic calibration is provided, and a calibration method is given, which can provide a test platform for the performance detection of the laser scanning galvanometer, and can realize the test of the scanning galvanometer with a large deflection angle, filling the current domestic and foreign blanks.

[0099] It should be understood that although the steps in the flowcharts involved in the above embodiments are shown in sequence according to the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless there is a clear indication in this article, the execution of these steps has no strict order limit, and these steps can be executed in other orders. Moreover, at least a part of the steps in the flowcharts involved in the above embodiments may include multiple steps or multiple stages. These steps or stages are not necessarily executed at the same time, but can be executed at different times. The execution order of these steps or stages is not necessarily sequential, but can be executed alternately or alternately with at least a part of other steps or steps or stages in other steps.

[0100] In an exemplary embodiment, a computer device is provided. The computer device may be a terminal, and its internal structure diagram may be as Figure 5As shown. The computer device includes a processor, a memory, an input / output interface, a communication interface, a display unit, and an input device. Among them, the processor, the memory, and the input / output interface are connected through a system bus, and the communication interface, the display unit, and the input device are connected to the system bus through the input / output interface. Among them, the processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The input / output interface of the computer device is used to exchange information between the processor and external devices. The communication interface of the computer device is used to communicate with external terminals in a wired or wireless manner, and the wireless manner can be implemented through WIFI, a mobile cellular network, near field communication (NFC), or other technologies. When the computer program is executed by the processor, it implements a calibration method for a laser scanning galvanometer performance detection device. The display unit of the computer device is used to form a visually visible picture, which can be a display screen, a projection device, or a virtual reality imaging device. The display screen can be a liquid crystal display screen or an electronic ink display screen. The input device of the computer device can be a touch layer covering the display screen, or a button, a trackball, or a touchpad provided on the computer device housing, or an external keyboard, touchpad, or mouse, etc.

[0101] Those skilled in the art can understand that Figure 5 the structure shown in is only a block diagram of some structures related to the solution of the present application, and does not constitute a limitation on the computer device to which the solution of the present application is applied. The specific computer device may include more or fewer components than those shown in the figure, or combine some components, or have different component arrangements.

[0102] In an exemplary embodiment, a computer device is provided, including a memory and a processor. A computer program is stored in the memory. When the processor executes the computer program, the following steps are implemented:

[0103] Control the laser to emit laser light, and control the rotation stage and / or the scanning galvanometer to rotate until the position sensitive detector detects that the laser spot is located at a preset zero position, and determine the deflection angle of the rotation stage as the initial angle; based on the initial angle and the preset angle, determine the angle range, and control the rotation stage to rotate within the angle range, and obtain the spot positions detected by the position sensitive detector at multiple angles within the angle range; based on the spot positions at multiple angles, solve the calibration parameters in the target calibration function; the solved target calibration function is used to perform performance detection on the scanning galvanometer.

[0104] In one embodiment, when the processor executes the computer program, the following steps are further implemented:

[0105] Select any angle from multiple angles, take the current angle and the spot position at the current angle as the input of the target calibration function, and obtain the calibration equation corresponding to the current angle; for each angle among the multiple remaining angles, continue to execute the step of taking the current angle and the spot position at the current angle as the input of the target calibration function, and obtain the calibration equations corresponding to the multiple remaining angles respectively; solve the calibration equations corresponding to the multiple angles respectively to obtain the calibration parameters in the target calibration function.

[0106] In one embodiment, when the processor executes the computer program, the following steps are further implemented:

[0107] In the plane where the sliding table is installed, with the preset zero position as the origin of the coordinate axis, the straight line where the sliding table is located as the X-axis, the direction perpendicular to the straight line where the sliding table is located as the Z-axis, and the straight line perpendicular to the plane as the Y-axis, establish a calibration coordinate system.

[0108] In one embodiment, the calibration parameters include the distance from the axis center of the rotary table to the preset zero position, the angle between the galvanometer reflecting surface and the X-axis, the angle between the outgoing light and the Z-axis, and the axis center coordinates of the rotary table.

[0109] In one embodiment, the target calibration function is:

[0110]

[0111] Where S represents the spot position, θ represents the deflection angle of the rotary table, θ0 represents the angle between the outgoing light and the Z-axis; C (CX, CZ) represents the axis center coordinates of the rotary table; β represents the angle between the galvanometer reflecting surface and the X-axis, and H represents the distance from the axis center of the rotary table to the preset zero position.

[0112] In one embodiment, when the processor executes the computer program, the following steps are further implemented:

[0113] Based on the theoretical deflection angle of the scanning galvanometer and the solved target calibration function, obtain the theoretical spot position; control the position-sensitive detector to move to the theoretical spot position on the sliding table, and obtain the actual spot position detected by the position-sensitive detector; based on the actual spot position and the solved target calibration function, obtain the actual rotation angle of the galvanometer.

[0114] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the following steps are implemented:

[0115] Control the laser to emit laser light, and control the rotation stage and / or the scanning galvanometer to rotate until the position-sensitive detector detects that the laser spot is located at the preset zero position, and determine the deflection angle of the rotation stage as the initial angle; based on the initial angle and the preset angle, determine the angle range, and control the rotation stage to rotate within the angle range, and obtain the spot positions detected by the position-sensitive detector at multiple angles within the angle range; based on the spot positions at multiple angles, solve the calibration parameters in the target calibration function; the solved target calibration function is used to perform performance detection on the scanning galvanometer.

[0116] In one embodiment, when the computer program is executed by the processor, the following steps are further implemented:

[0117] Select any angle from multiple angles, use the current angle and the spot position at the current angle as the input of the target calibration function to obtain the calibration equation corresponding to the current angle; for each angle among the multiple remaining angles, continue to execute the step of using the current angle and the spot position at the current angle as the input of the target calibration function to obtain the calibration equations corresponding to the multiple remaining angles respectively; solve the calibration equations corresponding to the multiple angles respectively to obtain the calibration parameters in the target calibration function.

[0118] In one embodiment, when the computer program is executed by the processor, the following steps are further implemented:

[0119] In the plane where the sliding table is installed, with the preset zero position as the origin of the coordinate axis, the straight line where the sliding table is located as the X-axis, the direction perpendicular to the straight line where the sliding table is located as the Z-axis, and the straight line perpendicular to the plane as the Y-axis, establish a calibration coordinate system.

[0120] In one embodiment, the calibration parameters include the distance from the axis of the rotation stage to the preset zero position, the angle between the mirror reflection surface and the X-axis, the angle between the outgoing light and the Z-axis, and the axis coordinates of the rotation stage.

[0121] In one embodiment, the target calibration function is:

[0122]

[0123] where S represents the spot position, θ represents the deflection angle of the rotation stage, θ0 represents the angle between the outgoing light and the Z-axis; C(CX,CZ) represents the axis coordinates of the rotation stage; β represents the angle between the mirror reflection surface and the X-axis, and H represents the distance from the axis of the rotation stage to the preset zero position.

[0124] In one embodiment, when the computer program is executed by the processor, the following steps are further implemented:

[0125] Based on the theoretical deflection angle of the scanning galvanometer and the solved target calibration function, the theoretical spot position is obtained; the position-sensitive detector is controlled to move on the sliding table to the theoretical spot position, and the actual spot position detected by the position-sensitive detector is acquired; based on the actual spot position and the solved target calibration function, the actual rotation angle of the galvanometer is obtained.

[0126] In one embodiment, a computer program product is provided, including a computer program, which when executed by a processor implements the following steps:

[0127] Control the laser to emit laser light, and control the rotating table and / or the scanning galvanometer to rotate until the spot of the laser light detected by the position-sensitive detector is located at the preset zero position, and determine the deflection angle of the rotating table as the initial angle; based on the initial angle and the preset angle, determine the angle range, and control the rotating table to rotate within the angle range, and acquire the spot positions detected by the position-sensitive detector at multiple angles within the angle range; based on the spot positions at multiple angles, solve the calibration parameters in the target calibration function; the solved target calibration function is used to perform performance detection on the scanning galvanometer.

[0128] In one embodiment, when the computer program is executed by the processor, it also implements the following steps:

[0129] Select any angle from multiple angles, use the current angle and the spot position at the current angle as the input of the target calibration function to obtain the calibration equation corresponding to the current angle; for each angle among the multiple remaining angles, continue to execute the step of using the current angle and the spot position at the current angle as the input of the target calibration function to obtain the calibration equations corresponding to the multiple remaining angles respectively; solve the calibration equations corresponding to the multiple angles respectively to obtain the calibration parameters in the target calibration function.

[0130] In one embodiment, when the computer program is executed by the processor, it also implements the following steps:

[0131] In the plane where the sliding table is installed, with the preset zero position as the origin of the coordinate axis, the straight line where the sliding table is located as the X-axis, the direction perpendicular to the straight line where the sliding table is located as the Z-axis, and the straight line perpendicular to the plane as the Y-axis, a calibration coordinate system is established.

[0132] In one embodiment, the calibration parameters include the distance from the axis center of the rotating table to the preset zero position, the angle between the reflecting surface of the galvanometer and the X-axis, the angle between the outgoing light and the Z-axis, and the coordinate of the axis center of the rotating table.

[0133] In one embodiment, the target calibration function is:

[0134]

[0135] Among them, S represents the spot position, θ represents the deflection angle of the rotary table, and θ0 represents the angle between the outgoing light and the Z-axis; C (CX, CZ) represents the axis coordinates of the rotary table; β represents the angle between the reflecting surface of the galvanometer and the X-axis, and H represents the distance from the axis of the rotary table to the preset zero position.

[0136] In one embodiment, when the computer program is executed by the processor, the following steps are further implemented:

[0137] Based on the theoretical deflection angle of the scanning galvanometer and the solved target calibration function, the theoretical spot position is obtained; the position-sensitive detector is controlled to move to the theoretical spot position on the sliding table, and the actual spot position detected by the position-sensitive detector is acquired; based on the actual spot position and the solved target calibration function, the actual rotation angle of the galvanometer is obtained.

[0138] It should be noted that the user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data for analysis, stored data, displayed data, etc.) involved in this application are all information and data authorized by the user or fully authorized by all parties, and the collection, use, and processing of relevant data need to comply with relevant regulations.

[0139] Those of ordinary skill in the art can understand that all or part of the processes in the methods of the above embodiments can be completed by instructing relevant hardware through a computer program. The computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above methods. Among them, any reference to a memory, database, or other medium used in the embodiments provided in this application can include at least one of non-volatile memory and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetoresistive random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM), etc. The databases involved in the embodiments provided in this application can include at least one of relational databases and non-relational databases. Non-relational databases can include distributed databases based on blockchain, etc., without limitation. The processors involved in the embodiments provided in this application can be general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic devices, data processing logics based on quantum computing, artificial intelligence (AI) processors, etc., without limitation.

[0140] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered to be within the scope recorded in this application.

[0141] The above-described embodiments merely represent several implementation manners of the present application. The description thereof is relatively specific and detailed, but it should not be construed as a limitation on the patent scope of the present application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all fall within the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the appended claims.

Claims

1. A calibration method for a laser scanning galvanometer performance detection device, characterized in that: The invention is applied to a laser scanning galvanometer performance detection device, the device comprising: a scanning galvanometer, a rotating platform, a laser, a position sensitive detector and a processor; wherein the scanning galvanometer is mounted on the rotating platform; when the rotating platform rotates, the scanning galvanometer drives the scanning galvanometer to rotate; the scanning galvanometer is used to reflect the laser emitted by the laser; the position sensitive detector is used to determine the spot position of the laser reflected by the scanning galvanometer when detecting the spot; the method is executed by the processor, and comprises: Controlling the laser to emit laser, and controlling the rotating stage and / or the scanning galvanometer to rotate, until the position sensitive detector detects that the laser spot is located at a preset zero point position, and determining that the deflection angle of the rotating stage is an initial angle; Based on the initial angle and the preset angle, an angle range is determined, and the rotating table is controlled to rotate within the angle range to obtain the positions of the light spots detected by the position sensitive detector at multiple angles within the angle range; Based on the light spot positions at multiple angles, calibration parameters in a target calibration function are solved; the solved target calibration function is used to perform performance testing on the scanning galvanometer.

2. The method according to claim 1, characterized in that: Solving the calibration parameters in the target calibration function based on the light spot positions at multiple angles includes: Select any angle from multiple angles, use the current angle and the spot position at the current angle as inputs of the target calibration function, and obtain a calibration equation corresponding to the current angle; For each of the plurality of remaining angles, continue to perform the step of using the current angle and the spot position at the current angle as inputs of the target calibration function to obtain calibration equations corresponding to the plurality of remaining angles; Solve the calibration equations corresponding to the multiple angles to obtain the calibration parameters in the target calibration function.

3. The method according to claim 1, characterized in that The laser scanning galvanometer performance detection device further comprises a slide table; the method further comprises: In the plane where the slide is installed, a calibration coordinate system is established with the preset zero point position as the origin of the coordinate axis, the straight line where the slide is located as the X-axis, the direction perpendicular to the straight line where the slide is located as the Z-axis, and the straight line perpendicular to the plane as the Y-axis.

4. The method according to claim 3, characterized in that The calibration parameters include the distance from the axis of the rotating table to the preset zero position, the angle between the galvanometer reflection surface and the X-axis, the angle between the output light and the Z-axis, and the axis coordinates of the rotating table.

5. The method according to claim 1, characterized in that The target calibration function is: Among them, S represents the position of the light spot, θ represents the deflection angle of the rotating stage, θ0 represents the angle between the output light and the Z axis; C (CX, CZ) represents the axis coordinates of the rotating stage; β represents the angle between the galvanometer reflection surface and the X axis, and H represents the distance from the axis of the rotating stage to the preset zero position.

6. The method according to claim 1, characterized in that The laser scanning galvanometer performance detection device further comprises a slide; the position sensitive detector is slidably mounted on the slide; the method further comprises: Based on the theoretical deflection angle of the scanning galvanometer and the solved target calibration function, a theoretical spot position is obtained; Controlling the position sensitive detector to move to the theoretical light spot position on the slide, and obtaining the actual light spot position detected by the position sensitive detector; Based on the actual spot position and the solved target calibration function, the actual rotation angle of the galvanometer is obtained.

7. A performance detection device for a laser scanning galvanometer, characterized in that: The device comprises: a scanning galvanometer, a rotating stage, a laser, a position-sensitive detector and a processor; wherein the scanning galvanometer is mounted on the rotating stage; the scanning galvanometer drives the scanning galvanometer to rotate when the rotating stage rotates; the scanning galvanometer is used to reflect the laser light emitted by the laser; the position-sensitive detector is used to determine the position of the light spot when detecting the light spot of the laser reflected by the scanning galvanometer; and the processor is used to execute the steps of the method described in any one of claims 1 to 6.

8. The device according to claim 7, characterized in that The laser scanning galvanometer performance detection device also includes a slide; the position sensitive detector is slidably mounted on the slide; the processor is also used to: obtain a theoretical light spot position based on a theoretical deflection angle of the scanning galvanometer and a solved target calibration function; control the position sensitive detector to move to the theoretical light spot position on the slide, and obtain an actual light spot position detected by the position sensitive detector; and obtain an actual rotation angle of the galvanometer based on the actual light spot position and the solved target calibration function.

9. A computer device comprising a memory and a processor, wherein the memory stores a computer program, wherein: When the processor executes the computer program, the steps of the method according to any one of claims 1 to 6 are implemented.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the method according to any one of claims 1 to 6 are implemented.

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