Floating stator damping device and method

Abstract

The invention relates to the technical field of special equipment for semiconductor devices, and particularly discloses a floating stator damping device and method.The floating stator damping device comprises a driving mechanism and a damping mechanism, the driving mechanism comprises a machine table and a driving linear motor which are slidably connected, and the damping mechanism comprises a damping linear motor slidably connected with the machine table and a damping encoder fixed to the machine table; a rotor of the damping linear motor is connected with a stator of the driving linear motor, and the rotor of the damping linear motor is provided with a damping grating ruler; the damping encoder and the damping grating ruler measure the movement position and speed of the stator of the driving linear motor under the counter-acting force, and the damping linear motor enables the stator of the driving linear motor to move in the direction opposite to the counter-acting force so as to offset the counter-acting force and achieve active damping. By the adoption of the technical scheme, the technical problem that in the prior art, passive vibration isolation is achieved by designing a damping device and a flexible device with fixed parameters, it is difficult to adapt to changes of counter-acting force, and consequently the damping effect is unstable can be solved.

Description

Technical Field

[0001] The present invention relates to the technical field of special equipment for semiconductor devices, and particularly relates to a floating stator shock absorption device and method. Background Art

[0002] In the manufacturing field of high-precision equipment dedicated to semiconductor devices such as semiconductor mounting equipment and semiconductor packaging equipment, in order to improve the UPH (production per hour) of the equipment, the speed and acceleration indexes of the driving components of high-precision equipment are often designed very high. Taking semiconductor packaging equipment as an example, the bonding head in semiconductor packaging equipment is driven by a linear motor to perform high-speed linear motion and needs to reach an acceleration of 8G within a short stroke. In existing semiconductor packaging equipment, the stator of the linear motor is directly fixed on the machine table. When the mover of the linear motor drives the bonding head to move at high speed, the stator of the linear motor will receive a large reaction force, resulting in the vibration of the machine table fixedly connected to the stator, thereby affecting the operation accuracy of the equipment.

[0003] Based on this, the prior art (publication number: CN102522356A) discloses a double-axis floating linear platform, including a base, a direction driving device fixed on the base, and a workbench connected to the direction driving device. When the driving motor in the direction driving device drives the workbench to move, the stator of the driving motor moves in the opposite direction of the movement direction of the workbench. When the mover of the driving motor in the prior art pushes the workbench to move, the reaction force received by the stator of the driving motor does not directly act on the base of the platform, but makes the stator slide in the opposite direction of the movement direction of the workbench, thereby avoiding the impact on the base, improving the positioning accuracy and measurement accuracy of the linear platform, and enabling a positioning accuracy of the micron level.

[0004] Although the above prior art can reduce the vibration of the equipment by relying on the floating of the stator, there are still the following problems in the actual application process: In the prior art, damping devices and flexible devices are arranged at both ends of the stator of the driving motor. When the stator of the driving motor receives a reaction force and moves in the opposite direction of the movement direction of the workbench, the damping devices and flexible devices collide with the base, causing the movement direction of the stator to reverse and controlling the movement range of the stator. When the mover of the driving motor pushes the workbench to perform linear reciprocating motion, the stator will perform reciprocating oscillating motion on the base, and the energy is absorbed by the damping devices and flexible devices to further reduce the impact of the stator on the base.

[0005] The prior art realizes passive vibration isolation through damping devices and flexible devices. On the one hand, since the design parameters of the damping devices and flexible devices are usually fixed, it is difficult to adapt to the change of the reaction force, resulting in unstable shock absorption effect; on the other hand, over time, the damping devices and flexible devices may age, resulting in a decline in the shock absorption effect. Summary of the Invention

[0006] The present invention aims to provide a floating stator shock absorption device and method, so as to solve the technical problem in the prior art that passive vibration isolation is achieved through damping devices and flexible devices with fixed design parameters, which makes it difficult to adapt to changes in reaction forces and results in unstable shock absorption effects.

[0007] To achieve the above object, the present invention adopts the following technical solutions: A floating stator shock absorption device includes a driving mechanism for driving a working component to move at high speed. The driving mechanism includes a machine platform and a driving linear motor. The stator of the driving linear motor is slidably connected to the machine platform to form a floating stator. It also includes a controller and a shock absorption mechanism for reducing the vibration of the driving mechanism. The driving linear motor is electrically connected to the controller. The shock absorption mechanism includes a shock absorption linear motor and a shock absorption encoder that are electrically connected to the controller. The stator of the shock absorption linear motor is fixedly connected to the machine platform. A mover motion plate is connected to the mover of the shock absorption linear motor. The mover motion plate is slidably connected to the machine platform and fixedly connected to the stator of the driving linear motor, and the moving direction of the mover motion plate is parallel to the moving direction of the stator of the driving linear motor. The shock absorption encoder is fixedly connected to the machine platform. A shock absorption grating scale is arranged at a position corresponding to the shock absorption encoder on the mover motion plate along the moving direction of the mover motion plate. The shock absorption encoder cooperates with the shock absorption grating scale to measure the moving position and speed of the stator of the driving linear motor relative to the machine platform.

[0008] A floating stator shock absorption method is completed by applying the above floating stator shock absorption device. When the mover of the driving linear motor of the driving mechanism drives the working component to move at high speed, the stator of the driving linear motor is subjected to a reaction force and moves in the opposite direction to the moving direction of the working component. The shock absorption encoder and the shock absorption grating scale cooperate to measure the moving position and speed of the stator of the driving linear motor relative to the machine platform, and send the position and speed signals to the controller. The controller controls the mover of the shock absorption linear motor to drive the mover motion plate to move in the opposite direction to the moving direction of the stator of the driving linear motor according to the position and speed signals, and applies a force to the stator of the driving linear motor that is opposite to the direction of the reaction force and equal in magnitude to offset the reaction force received by the stator of the driving linear motor, so as to achieve active shock absorption.

[0009] The beneficial effects of this technical solution compared with the prior art: 1. When the stator of the driving linear motor is subjected to a reaction force and moves in the opposite direction to the moving direction of the working component, this solution measures the movement position and speed of the stator of the driving linear motor relative to the machine table in real time through the cooperation of the shock-absorbing encoder and the shock-absorbing grating scale. The controller controls the mover of the shock-absorbing linear motor to drive the mover moving plate to move in the opposite direction to the moving direction of the stator of the driving linear motor according to the measurement results, so as to apply a force to the stator of the driving linear motor that is opposite in direction and equal in magnitude to the reaction force, so as to offset the reaction force received by the stator of the driving linear motor and achieve active shock absorption; that is, this solution can adjust the direction and magnitude of the force applied by the mover of the shock-absorbing linear motor to the stator of the driving linear motor in a timely manner according to the direction and magnitude of the reaction force received by the stator of the driving linear motor, so that the force always maintains the opposite direction and equal magnitude to the reaction force, so as to better adapt to the change of the reaction force and ensure the stable effect of active shock absorption.

[0010] 2. This solution adds a shock-absorbing linear motor and connects the mover of the shock-absorbing linear motor to the stator of the driving linear motor. The mover of the shock-absorbing linear motor drives the stator of the driving linear motor to move in the opposite direction to the reaction force to actively offset the reaction force. Compared with the characteristics of the damping device and the flexible device used in the prior art to achieve passive vibration isolation, which are significantly aged over time, the shock-absorbing linear motor itself is not significantly aged over time. As long as the control system is regularly checked to ensure the reliable operation of the control system, the shock-absorbing effect can be effectively guaranteed.

[0011] 3. This solution measures the movement position and speed of the mover moving plate through the cooperation of the shock-absorbing encoder and the shock-absorbing grating scale, so as to obtain the movement position and speed of the stator of the driving linear motor. The shock-absorbing encoder and the shock-absorbing grating scale are in non-contact cooperation, which can reduce mechanical wear and improve service life; and both can maintain good dynamic response during high-speed movement, provide real-time position feedback, and ensure that the controller can timely adjust the direction and magnitude of the electromagnetic force of the shock-absorbing linear motor, so that the force exerted by the mover of the shock-absorbing linear motor on the stator of the driving linear motor is opposite in direction and equal in magnitude to the reaction force received by it, so as to effectively offset the reaction force and achieve active shock absorption.

[0012] Preferably, as an improvement, a first linear guide rail is provided on the machine table, a moving stator moving plate is provided on the slider of the first linear guide rail, and the stator of the driving linear motor is connected to the moving stator moving plate; a second linear guide rail is also provided on the machine table, a moving connecting plate is provided on the slider of the second linear guide rail, the moving connecting plate is used to install the working component, and the mover of the driving linear motor is connected to the moving connecting plate.

[0013] Beneficial effects: The first linear guide rail provided in this solution can not only achieve the sliding connection between the stator of the driving linear motor and the machine table, forming a floating stator, reducing the vibration of the machine table caused by the acting force, but also guide the stator of the driving linear motor when it moves relative to the machine table, keeping the stator of the driving linear motor moving along a preset trajectory and avoiding collision with other structures; the moving stator moving plate provides sufficient connection positions for the connection between the slider of the first linear guide rail and the stator of the driving linear motor.

[0014] In this solution, a moving connection plate is connected to the mover of the driving linear motor, which can provide sufficient connection positions for the connection between the working component and the mover of the driving linear motor, enabling the mover of the driving linear motor to drive the moving connection plate and the working components thereon to perform high-speed linear motion; the moving connection plate is slidably connected to the machine table through the second linear guide rail, which can not only ensure that the moving connection plate and the working components installed thereon can move on the machine table, but also ensure that both move along a preset trajectory and avoid collision with other structures.

[0015] Preferably, as an improvement, a third linear guide rail is further provided on the machine table, and the slider of the third linear guide rail is connected to the mover moving plate.

[0016] Beneficial effects: The third linear guide rail provided in this solution can not only achieve the sliding connection between the mover moving plate and the machine table, but also guide the mover moving plate when it moves relative to the machine table, keeping the mover moving plate moving along a preset trajectory and avoiding collision with other structures. In addition, the third linear guide rail can also support the mover moving plate at the bottom, avoiding the mover moving plate being suspended and connected only by the mover of the shock-absorbing linear motor, which is beneficial to improving the stability of the mover moving plate, thereby ensuring the stability of the acting force of the shock-absorbing linear motor on the stator of the driving linear motor, so as to stably offset the reaction force received by the stator of the driving linear motor, and further achieve a stable shock-absorbing effect.

[0017] Preferably, as an improvement, a first limit block and an oil buffer are oppositely arranged at both ends of the second linear guide rail, and the moving connection plate is located between the first limit block and the oil buffer; two second limit blocks are oppositely arranged at both ends of the third linear guide rail, and the mover moving plate is located between the two second limit blocks.

[0018] Beneficial effects: In this solution, the moving position of the moving connection plate is limited on the second linear guide rail by the oppositely arranged first limit block and oil buffer, delimiting a safe moving range for the moving connection plate, thereby delimiting a safe moving range for the working components installed on the moving connection plate, avoiding the mover of the driving linear motor exceeding the limited stroke and colliding with other structures, and protecting other components of the equipment.

[0019] In this solution, the movement position of the mover moving plate is restricted on the third linear guide by two relatively arranged second limit blocks, defining a safe movement range for the mover moving plate, thereby defining a safe movement range for the stator of the driving linear motor connected to the mover moving plate, and preventing the stator of the driving linear motor from having an overly large movement range and colliding with other structures.

[0020] Preferably, as an improvement, a first sensor electrically connected to the controller is provided on the machine table corresponding to the oil buffer, and the first sensor is used to define the limit position of the movement connecting plate moving towards the oil buffer; a second sensor electrically connected to the controller is provided on the machine table corresponding to one of the second limit blocks, and the second sensor is used to zero the mover of the shock-absorbing linear motor.

[0021] Beneficial effects: When the speed of the movement connecting plate moving towards the oil buffer is greater than the speed of moving towards the first limit block, if the movement connecting plate collides with the oil buffer, the kinetic energy can be effectively absorbed by the hydraulic system of the oil buffer, enabling the movement connecting plate to decelerate smoothly and stop, reducing the vibration of the machine table caused by the collision. And in this solution, a first sensor is provided on the machine table corresponding to the position of the oil buffer, and the position of the movement connecting plate moving towards the oil buffer is monitored in real time through the first sensor, which can monitor in real time whether the movement connecting plate is approaching the movement limit position in this direction, so as to send a signal to the controller in time, so that the controller can control the mover of the driving linear motor to decelerate or stop, preventing the movement connecting plate from colliding violently with the oil buffer.

[0022] In this solution, a second sensor is provided on the machine table corresponding to the position of one of the second limit blocks. When the equipment completes a stage of production, that is, when the driving linear motor stops driving the movement connecting plate and the working components thereon to move at high speed, the distance between the mover moving plate and the second limit block can be monitored in real time through the second sensor. When the distance between the mover moving plate and the second limit block returns to the preset distance, the zeroing of the mover moving plate can be completed, thereby completing the zeroing of the mover of the shock-absorbing linear motor.

[0023] Preferably, as an improvement, a driving grating scale is arranged on one side of the moving and stationary stator plate close to the movement connecting plate along the movement direction of the moving and stationary stator plate, and a driving main encoder electrically connected to the controller is arranged on the movement connecting plate corresponding to the driving grating scale. The driving main encoder cooperates with the driving grating scale to measure the relative position of the mover and the stator of the driving linear motor and identify their electrical angles.

[0024] Beneficial effects: By cooperating the driving main encoder with the driving grating scale, this solution can measure the relative positions of the mover and the stator of the driving linear motor, and identify their electrical angles, thereby preventing the mover of the driving linear motor from causing the moving connection plate and the working components mounted on the moving connection plate to collide with other components during high-speed movement, and ensuring that the working components can smoothly complete the working actions driven by the mover of the driving linear motor.

[0025] Preferably, as an improvement, an indium steel scale is arranged on the machine table along the movement direction of the moving connection plate, and a driving sub-encoder electrically connected to the controller is arranged at the position corresponding to the indium steel scale on the moving connection plate. The driving sub-encoder cooperates with the indium steel scale to measure the movement position and speed of the mover of the driving linear motor relative to the machine table; the origin is set at the center position of the indium steel scale for the mover of the driving linear motor to return to zero.

[0026] Beneficial effects: By cooperating the driving sub-encoder with the indium steel scale, during the process of the mover of the driving linear motor driving the moving connection plate to move at high speed, the driving sub-encoder that moves at high speed together with the moving connection plate can receive signal feedback throughout the entire movement stroke, effectively measuring the movement position and speed of the moving connection plate relative to the machine table, thereby measuring the movement position and speed of the mover of the driving linear motor relative to the machine table, and ensuring compliance with the design specifications of the equipment.

[0027] In addition, in this solution, the center position of the indium steel scale is set as the origin. When the position of the driving sub-encoder is opposite to the origin position of the indium steel scale, the moving connection plate returns to zero, thereby completing the return to zero of the mover of the driving linear motor. The return to zero of the mover of the driving linear motor can be conveniently achieved through a simple structure.

[0028] Preferably, as an improvement, the shock absorption mechanism further includes two shock absorption springs. The two shock absorption springs are connected between the machine table and the stator of the driving linear motor, and the axes of the two shock absorption springs are parallel to the movement direction of the stator of the driving motor. When one of the shock absorption springs is stretched, the other shock absorption spring is compressed.

[0029] Beneficial effects: In this solution, two shock-absorbing springs are connected between the machine platform and the stator of the driving linear motor. When the stator of the driving linear motor is subject to a reaction force and moves relative to the machine platform, one of the shock-absorbing springs is stretched, while the other is compressed. On the one hand, the shock-absorbing springs can absorb a part of the reaction force, reducing the movement distance of the stator of the driving linear motor relative to the machine platform, thereby reducing the reaction force that the shock-absorbing linear motor needs to counteract and lowering the working intensity of the shock-absorbing linear motor. On the other hand, the two shock-absorbing springs can limit the movement range of the stator of the driving linear motor, preventing the stator of the driving linear motor from moving beyond the range and colliding with other structures, and can use the elastic force of the shock-absorbing springs to push the stator of the driving linear motor in the direction opposite to the reaction force to assist the stator of the driving linear motor in resetting.

[0030] Preferably, as an improvement, the shock-absorbing mechanism further includes a counterweight block, which is fixedly connected to the mover moving plate.

[0031] Beneficial effects: In this solution, a counterweight block is fixedly connected to the mover moving plate, which can increase the gravity of the mover moving plate and the stator of the driving linear motor connected to the mover moving plate, thereby reducing the movement distance of the stator of the driving linear motor relative to the machine platform under the action of the reaction force, achieving the shock-absorbing effect and reducing the working intensity of the shock-absorbing linear motor. Description of the drawings

[0032] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present invention.

[0033] Figure 2 It is Figure 1 the right view of the driving mechanism in

[0034] Figure 3 It is Figure 1 the front view of the driving mechanism in

[0035] Figure 4 It is Figure 1 the front view of the shock-absorbing mechanism (including the machine platform) in

[0036] Figure 5 It is Figure 1 the left view of the shock-absorbing mechanism (including the machine platform) in Detailed implementation manners

[0037] The following is a further detailed description through specific implementation manners: The reference numerals in the accompanying drawings of the specification include: drive mechanism 100, machine table 101, drive linear motor 102, first linear guide 103, moving stator plate 104, first limit block 105, oil buffer 106, second linear guide 107, moving connection plate 108, main drive encoder 109, auxiliary drive encoder 110, drive grating scale 111, invar scale 112, first sensor 113, damping mechanism 200, damping linear motor 201, moving plate 202, second limit block 203, damping spring 204, counterweight 205, second sensor 206, damping encoder 207, damping grating scale 208, connection plate 209, third linear guide 210.

[0038] The embodiment is basically as shown in the attached Figures 1 to 5 figures: This embodiment provides a floating stator damping device, as shown in the attached Figure 1 figures, including a controller (not shown in the figures), a drive mechanism 100 for driving a working component to move at high speed, and a damping mechanism 200 for reducing the vibration of the drive mechanism 100.

[0039] Combined with the attached Figure 2 and Figure 3 figures, the drive mechanism 100 includes a machine table 101 and a drive linear motor 102. The machine table 101 is fixedly connected to the horizontal plane by bolts, and the drive linear motor 102 is electrically connected to the controller. The stator of the drive linear motor 102 is slidably connected to the machine table 101 to form a floating stator, reducing the vibration of the machine table 101 due to the reaction force. Specifically, the top of the machine table 101 is fixedly connected to a first linear guide 103 by bolts. The top of the slider of the first linear guide 103 is fixedly connected to a moving stator plate 104 by bolts. The stator of the drive linear motor 102 is fixedly connected to the top of the moving stator plate 104, so that the stator of the drive linear motor 102 can move along the first linear guide 103.

[0040] The side of the machine table 101 is fixedly connected to a second linear guide 107 by bolts. The second linear guide 107 is arranged parallel to the first linear guide 103. The side of the slider of the second linear guide 107 away from the machine table 101 is fixedly connected to a moving connection plate 108 by bolts. The moving connection plate 108 is used to mount a working component (such as a bonding head). The rotor of the drive linear motor 102 is fixedly connected to the top of the moving connection plate 108 by bolts, so that the rotor of the drive linear motor 102 can drive the moving connection plate 108 to move at high speed along the second linear guide 107.

[0041] First limit blocks 105 and oil buffers 106 are oppositely arranged at both ends of the second linear guide 107. The moving connection plate 108 is located between the first limit block 105 and the oil buffer 106. To Figure 3Taking the perspective of as a reference, the first limit block 105 is fixedly connected to the machine table 101 on the left side of the moving connection plate 108 by bolts, and the oil buffer 106 is fixedly connected to the machine table 101 on the right side of the moving connection plate 108 by bolts to prevent the driving linear motor 102 from exceeding the defined stroke and protect other components of the equipment. A first sensor 113 is fixedly connected to the side of the machine table 101 by bolts. The first sensor 113 is arranged above the oil buffer 106 corresponding to the oil buffer 106; the first sensor 113 is electrically connected to the controller. The first sensor 113 uses a distance sensor of the prior art and is used to define the limit position of the moving connection plate 108 moving in the direction close to the oil buffer 106 (to the right).

[0042] On one side of the moving stator moving plate 104 close to the moving connection plate 108, a driving grating scale 111 is fixedly connected. The driving grating scale 111 is arranged along the moving direction of the moving stator moving plate 104. At the position corresponding to the driving grating scale 111 on the moving connection plate 108, a driving main encoder 109 is fixedly connected by bolts. The driving main encoder 109 is electrically connected to the controller. The driving main encoder 109 cooperates with the driving grating scale 111 to measure the relative position between the mover and the stator of the driving linear motor 102, identify the electrical angle between the two, and prevent the mover of the driving linear motor 102 from causing the moving connection plate 108 and the working components to collide with other components during high-speed movement.

[0043] The bottom of the machine table 101 is fixedly connected with an invar scale 112. The invar scale 112 is arranged along the moving direction of the moving connection plate 108; at the position corresponding to the invar scale 112 at the bottom of the moving connection plate 108, a driving sub-encoder 110 is fixedly connected by bolts. The driving sub-encoder 110 is electrically connected to the controller. The driving sub-encoder 110 cooperates with the invar scale 112 to measure the moving position and speed of the mover of the driving linear motor 102 relative to the machine table 101. The length of the invar scale 112 is not less than the full moving stroke of the driving sub-encoder 110 to ensure that the driving sub-encoder 110 can receive signal feedback during the full moving stroke. The center position of the invar scale 112 is set as the origin, so that the moving connection plate 108 connected to the driving sub-encoder 110 can return to zero, thereby enabling the mover of the driving linear motor 102 to return to zero.

[0044] Combined with the attached Figure 4 and Figure 5As shown in the figure, the shock absorption mechanism 200 includes a shock absorption linear motor 201 electrically connected to the controller. The stator of the shock absorption linear motor 201 is fixedly connected to the top of the machine table 101 by bolts, and the top of the mover of the shock absorption linear motor 201 is fixedly connected to a mover moving plate 202 by bolts. The mover moving plate 202 is slidably connected to the machine table 101. Specifically, a third linear guide rail 210 is fixedly connected to the top of the machine table 101 by bolts. The third linear guide rail 210 is arranged parallel to the first linear guide rail 103, and the mover moving plate 202 is fixedly connected to the top of the slider of the third linear guide rail 210 by bolts. The mover moving plate 202 is driven by the shock absorption linear motor 201 to move along the third linear guide rail 210, that is, the movement direction of the mover moving plate 202 is parallel to the movement direction of the stator of the driving linear motor 102.

[0045] The mover moving plate 202 is fixedly connected to the stator of the driving linear motor 102. Specifically, an L-shaped connecting plate 209 is fixedly connected to the side of the mover moving plate 202 close to the driving linear motor 102 by bolts. The vertical part of the L-shaped connecting plate 209 is attached to the side wall of the mover moving plate 202, and the horizontal part of the L-shaped connecting plate 209 is attached to the top of the stator of the driving linear motor 102 and is fixedly connected to the top of the stator of the driving linear motor 102 by bolts. When the stator of the driving linear motor 102 moves along the first linear guide rail 103 under the action of a reaction force, it can drive the mover moving plate 202 to move along the third linear guide rail 210 together through the connecting plate 209.

[0046] Two second limit blocks 203 are oppositely arranged at both ends of the third linear guide rail 210. The mover moving plate 202 is located between the two second limit blocks 203. The second limit blocks 203 are fixedly connected to the top of the machine table 101 by bolts. The second limit blocks 203 can prevent the mover connecting plate 209 from rushing out of the third linear guide rail 210 under the drive of the stator of the driving linear motor 102, thereby limiting the movement range of the mover of the shock absorption linear motor 201 on the third linear guide rail 210. A second sensor 206 electrically connected to the controller is arranged on the machine table 101 corresponding to one of the second limit blocks 203. The second sensor 206 adopts a distance sensor of the prior art and is used for the mover of the shock absorption linear motor 201 to return to zero. Taking Figure 4 the perspective as a reference, the second sensor 206 is fixedly connected to the top of the machine table 101 at the second limit block 203 corresponding to the right side.

[0047] On one side of the mover moving plate 202 away from the driving linear motor 102, a shock-absorbing grating scale 208 is fixedly connected. The shock-absorbing grating scale 208 is arranged along the moving direction of the mover moving plate 202. At the position corresponding to the shock-absorbing grating scale 208 on the top of the machine table 101, a shock-absorbing encoder 207 is fixedly connected by bolts. The shock-absorbing encoder 207 is electrically connected to the controller. The shock-absorbing encoder 207 cooperates with the shock-absorbing grating scale 208 to be used for real-time monitoring of the moving position and speed of the mover of the shock-absorbing linear motor 201, and further measuring the moving position and speed of the stator of the driving linear motor 102 relative to the machine table 101. When the mover of the shock-absorbing linear motor 201 returns to zero, the shock-absorbing encoder 207 is located at the central position of the shock-absorbing grating scale 208, ensuring that the shock-absorbing encoder 207 can receive signal feedback throughout the movement of the mover moving plate 202.

[0048] The shock-absorbing mechanism 200 further includes two shock-absorbing springs 204. The two shock-absorbing springs 204 are connected between the machine table 101 and the stator of the driving linear motor 102, and the axes of the two shock-absorbing springs 204 are parallel to the moving direction of the stator of the driving motor. When one of the two shock-absorbing springs 204 is stretched, the other shock-absorbing spring 204 is compressed. In this embodiment, the two shock-absorbing springs 204 are coaxially arranged, and the ends of the two shock-absorbing springs 204 close to each other are fixedly connected to the machine table 101, and the ends of the two shock-absorbing springs 204 away from each other are fixedly connected to the stator of the driving linear motor 102. When the stator of the driving linear motor 102 moves along the first linear guide 103 under the action of a reaction force, the shock-absorbing spring 204 can absorb a part of the reaction force.

[0049] The shock-absorbing mechanism 200 further includes a counterweight 205. The counterweight 205 is fixedly connected to the top of the mover moving plate 202 by bolts, and uses its own gravity to reduce the moving distance of the stator of the driving linear motor 102, thereby achieving the shock-absorbing effect.

[0050] It should be noted that in this embodiment, the driving main encoder 109 uses an encoder of Renishaw brand model Q4BCZ30D40A, the driving sub-encoder 110 uses an encoder of Renishaw brand model T1011-05A, and the shock-absorbing encoder 207 uses an encoder of Renishaw brand model A10040Z3012.

[0051] This embodiment further provides a floating stator shock-absorbing method, which is completed by applying the above floating stator shock-absorbing device, and includes the following steps: S1. Driving high-speed movement: The driving linear motor 102 of the driving mechanism 100 drives the working component to perform high-speed linear movement to complete the corresponding semiconductor production process. For example, the driving mechanism 100 drives the bonding head to perform high-speed linear movement to complete the semiconductor packaging.

[0052] Specifically, the mover driving the linear motor 102 drives the motion connecting plate 108 to perform high-speed linear motion along the second linear guide rail 107, thereby driving the working component to perform high-speed linear motion to complete the corresponding production process of the semiconductor.

[0053] In this process, the main drive encoder 109 cooperates with the drive grating ruler 111 to measure the relative position of the mover and stator of the drive linear motor 102 in real time, identify the electrical angle between the two, and prevent the mover of the drive linear motor 102 from colliding with other parts during high-speed movement with the moving connecting plate 108 and working parts. The sub-drive encoder 110 cooperates with the indium steel ruler 112 to measure the moving position and speed of the mover of the drive linear motor 102 relative to the machine 101 in real time to ensure that it meets the design indicators of the equipment.

[0054] The first sensor 113 monitors the movement of the connecting plate 108 to the right (in Figure 3 The controller detects the position of the movement of the moving connecting plate 108 (with the viewing angle as the reference) and sends an electrical signal to the controller. If the moving connecting plate 108 approaches the limit position of the rightward movement, the controller controls the mover of the linear motor 102 to slow down or stop according to the electrical signal to prevent the moving connecting plate 108 from colliding violently with the hydraulic buffer 106.

[0055] S2. Passive shock absorption: The stator of the linear motor 102 is driven to move on the machine platform 101 by the reaction force. The counterweight block 205 of the shock absorption mechanism 200 reduces the movement distance of the stator of the linear motor 102 by its own gravity, and the shock absorption spring 204 absorbs part of the reaction force to achieve passive shock absorption.

[0056] Specifically, when the mover driving motion connecting plate 108 and the working part of the driving linear motor 102 move at high speed, the stator of the driving linear motor 102 is subjected to the reaction force and moves along the third linear guide 210 in the opposite direction of the movement direction of the working part; the gravity of the counterweight block 205 is transmitted to the stator of the driving linear motor 102 through the mover motion plate 202 and the connecting plate 209, which can reduce the movement distance of the stator of the driving linear motor 102; the stator of the driving linear motor 102 moves relative to the machine platform 101, which will stretch one of the shock-absorbing springs 204 and compress the other shock-absorbing spring 204. The shock-absorbing spring 204 can absorb part of the reaction force, thereby further reducing the movement distance of the stator of the driving linear motor 102.

[0057] S3. Active damping: The damping encoder 207 and the damping grating scale 208 cooperate to measure the movement position and speed of the stator of the driving linear motor 102 relative to the machine table 101. The controller controls the direction and magnitude of the electromagnetic force of the damping linear motor 201 according to the measurement results, so that the acting force exerted by the damping linear motor 201 on the stator of the driving linear motor 102 cancels out the reaction force received by the driving linear motor 102, realizing active damping.

[0058] Specifically, when the stator of the driving linear motor 102 receives a reaction force and moves along the third linear guide rail 210, the damping encoder 207 and the damping grating scale 208 cooperate to measure the movement position and speed of the mover connecting plate 209 relative to the machine table 101 in real time, so as to measure the movement position and speed of the stator of the driving linear motor 102 relative to the machine table 101, and send the position and speed signals to the controller. The controller controls the direction and magnitude of the electromagnetic force of the damping linear motor 201 according to the position and speed signals, so that the mover of the damping linear motor 201 drives the mover moving plate 202 to move along the third linear guide rail 210, and the movement direction of the mover moving plate 202 is opposite to the movement direction of the stator of the driving linear motor 102, ensuring that the acting force exerted by the damping linear motor 201 on the stator of the driving linear motor 102 through the mover moving plate 202 and the connecting plate 209 is opposite in direction and equal in magnitude to the reaction force received by the stator of the driving linear motor 102, so as to cancel out the reaction force received by the stator of the driving linear motor 102 and realize accurate and adjustable active damping.

[0059] The above are only embodiments of the present invention. Specific technical solutions and / or common knowledge such as characteristics well known in the art are not described in detail herein. It should be noted that for those skilled in the art, without departing from the technical solution of the present invention, several deformations and improvements can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the implementation effect of the present invention and the practicability of the patent. The protection scope required by this application shall be subject to the content of its claims, and the specific implementation manners described in the specification can be used to interpret the content of the claims.

Claims

1. A floating stator damping device, comprising a driving mechanism for driving a working part to move at high speed, the driving mechanism comprising a machine platform and a driving linear motor, the stator of the driving linear motor is slidably connected to the machine platform to form a floating stator; characterized in that: It also includes a controller and a shock-absorbing mechanism for reducing the vibration of the driving mechanism. The driving linear motor is electrically connected to the controller, and the shock-absorbing mechanism includes a shock-absorbing linear motor and a shock-absorbing encoder electrically connected to the controller; the stator of the shock-absorbing linear motor is fixedly connected to the machine platform, and a mover moving plate is connected to the mover of the shock-absorbing linear motor. The mover moving plate is slidably connected to the machine platform and fixedly connected to the stator of the driving linear motor, and the movement direction of the mover moving plate is parallel to the movement direction of the stator of the driving linear motor; the shock-absorbing encoder is fixedly connected to the machine platform, and a shock-absorbing grating scale is provided on the mover moving plate at a position corresponding to the shock-absorbing encoder along the movement direction of the mover moving plate. The shock-absorbing encoder cooperates with the shock-absorbing grating scale to measure the movement position and speed of the stator of the driving linear motor relative to the machine platform.

2. A floating stator damping device according to claim 1, characterized in that: The machine platform is provided with a first linear guide, a moving stator motion plate is provided on the slider of the first linear guide, and the stator of the driving linear motor is connected to the moving stator motion plate; the machine platform is also provided with a second linear guide, a motion connecting plate is provided on the slider of the second linear guide, the motion connecting plate is used to install the working parts, and the mover of the driving linear motor is connected to the motion connecting plate.

3. A floating stator damping device according to claim 2, characterized in that: The machine platform is also provided with a third linear guide rail, and a slider of the third linear guide rail is connected to the mover motion plate.

4. A floating stator damping device according to claim 3, characterized in that: The second linear guide rail has first limit blocks and hydraulic buffers at both ends, and the motion connecting plate is located between the first limit blocks and the hydraulic buffer; the third linear guide rail has two second limit blocks at both ends, and the mover motion plate is located between the two second limit blocks.

5. A floating stator damping device according to claim 4, characterized in that: A first sensor electrically connected to the control is arranged at the position corresponding to the hydraulic buffer on the machine platform, and the first sensor is used to limit the extreme position of the motion connecting plate moving in the direction close to the hydraulic buffer; a second sensor electrically connected to the controller is arranged at the position corresponding to one of the second limit blocks on the machine platform, and the second sensor is used to return the mover of the damping linear motor to zero.

6. A floating stator damping device according to claim 5, characterized in that: A driving grating scale is arranged on one side of the moving stator moving plate close to the moving connecting plate along the moving direction of the moving stator moving plate, and a driving main encoder electrically connected to the controller is arranged at a position on the moving connecting plate corresponding to the driving grating scale. The driving main encoder cooperates with the driving grating scale to measure the relative positions of the mover and stator of the driving linear motor and identify the electrical angles of the two.

7. A floating stator damping device according to claim 6, characterized in that: An indium steel ruler is arranged on the machine platform in the direction of movement of the moving connecting plate, and a driving sub-encoder electrically connected to the controller is arranged at a position on the moving connecting plate corresponding to the indium steel ruler. The driving sub-encoder cooperates with the indium steel ruler to measure the movement position and speed of the mover of the driving linear motor relative to the machine platform; an origin is set at the center position of the indium steel ruler to drive the mover of the linear motor back to zero.

8. The floating stator damping device according to claim 7, characterized in that: The shock absorbing mechanism also includes two shock absorbing springs, which are connected between the machine platform and the stator of the driving linear motor, and the axes of the two shock absorbing springs are parallel to the movement direction of the stator of the driving motor. When one shock absorbing spring is stretched, the other shock absorbing spring is compressed.

9. A floating stator damping device according to claim 8, characterized in that: The shock absorbing mechanism also includes a counterweight block, which is fixedly connected to the mover moving plate.

10. A floating stator damping method, characterized in that: The floating stator shock absorber device described in any one of claims 1 to 9 is applied. When the mover of the driving linear motor of the driving mechanism drives the working part to move at high speed, the stator of the driving linear motor is subjected to a reaction force and moves in the opposite direction of the movement direction of the working part. The shock-absorbing encoder and the shock-absorbing grating ruler cooperate to measure the movement position and speed of the stator of the driving linear motor relative to the machine table, and send the position and speed signals to the controller. The controller controls the mover of the shock-absorbing linear motor to drive the mover moving plate to move in the opposite direction of the movement direction of the stator of the driving linear motor according to the position and speed signals, and applies a force equal to and in opposite direction to the reaction force to the stator of the driving linear motor to offset the reaction force exerted on the stator of the driving linear motor, thereby realizing active shock absorption.

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