Ultra-static and ultra-stable vacuum experiment device for simulating space environment

Abstract

The invention discloses a super-static and super-stable vacuum experimental device for simulating a space environment. The experimental device is provided with a temperature environment control system, a vacuum cabin system and a vibration isolation system, the temperature environment control system is arranged on the outermost layer of the vacuum test device and surrounds the vacuum cabin system and the vibration isolation system, the overall temperature can be controlled to be 15-25 DEG C, the temperature control stability is + / -0.1 DEG C, and the super-stable environment temperature of space is simulated. The vacuum cabin system comprises an objective table, the objective table is arranged on an active vibration isolator and a passive vibration isolation layer which can restrain low and medium frequency vibration and high frequency vibration and are connected in series, the objective table is directly connected with the passive vibration isolation layer, and the active vibration isolator and the passive vibration isolation layer which are connected in series are used for effectively isolating the influence of ground vibration. And the ultra-quiet space environment is simulated. The problem that low-frequency vibration is difficult to restrain in a traditional method is solved, and the problem that high temperature control stability is difficult to achieve in a traditional vibration isolation system is solved.

Description

Technical Field

[0001] The present invention belongs to the technical field of aerospace ground test, and particularly relates to an ultra-quiet and ultra-stable vacuum experimental device for simulating the space environment, which is used to simulate the space vacuum environment and provide a ground test environment for electric thrusters, weak force measurement, ground-based gravitational wave detection, etc. Background Art

[0002] In recent years, with the rapid development of commercial aerospace, a large number of spacecraft have been able to enter space at low cost. Before space equipment enters space, it is necessary to carry out environmental simulation tests in a ground vacuum environment. However, more and more space equipment tests have put forward Ultra quiet and stable requirements. Specifically, ultra-quiet means that the influence of ground vibration can be effectively isolated, and ultra-stable means a stable environmental temperature. These two requirements are common to the ground vacuum environment simulation experiments of many aerospace equipment such as precision measurement, manufacturing, and space exploration. For example, the research and development of micro-thrusters, weak force measurement, and ground-based gravitational wave detection all require an ultra-quiet vacuum environment to effectively isolate ground vibration noise. Weak force measurement, etc. requires long-term temperature stability of the vacuum environment simulation system.

[0003] The reason why traditional ground space environment simulation systems cannot simulate the space environment ultra-quietly and ultra-stably is as follows:

[0004] 1. It is difficult to suppress low-frequency vibration based on the vibration isolation method of vibration isolation bellows. Traditional ground vacuum environment simulation systems generally include a vacuum chamber, a pumping system (mechanical pump, molecular pump, cryopump, water chiller, etc.), and a control system. The device to be tested is located inside the vacuum chamber. The main vibration of the system comes from the vibration of the pumping system. Generally speaking, mechanical pumps and molecular pumps are high-speed rotating machinery, and the vibration frequency is in the range of dozens to hundreds of Hz, belonging to high-frequency vibration. The cryopump belongs to a reciprocating moving part, and the vibration frequency is about 1 Hz, belonging to a low-frequency vibration source. For high-frequency vibration in the range of dozens to hundreds of Hz, traditional methods use vibration isolation bellows to connect the exhaust pipeline and the vacuum pump to suppress the influence of high-frequency vibration on the test equipment. However, for the low-frequency vibration of the cryopump, it is difficult to suppress through vibration isolation bellows.

[0005] 2. Traditional vibration isolation systems generally wrap the test equipment in a certain area inside the vacuum chamber and control the temperature of this area. However, due to the complex temperature environment outside the vacuum chamber, it is difficult to achieve a very high temperature control stability. Summary of the Invention

[0006] In view of the problems existing in the prior art, the present invention proposes an ultra-quiet and ultra-stable space vacuum environment simulation experimental device. The first purpose is to solve the problem that it is difficult to suppress low-frequency vibration based on the traditional method of vibration isolation bellows, and the second purpose is to solve the problem that it is difficult for traditional vibration isolation systems to achieve a very high temperature control stability.

[0007] The present invention proposes the following technical solutions for the problems existing in the prior art:

[0008] 1. A super-quiet and super-stable vacuum experimental device for simulating a space environment, characterized in that: the experimental device is provided with a temperature environment control system (3), a vacuum chamber system (1) and a vibration isolation system (2); the temperature environment control system (3) is arranged on the outermost layer of the vacuum test device and surrounds the vacuum chamber system (1) and the vibration isolation system (2), and can control the overall temperature within 15-25 °C and the temperature control stability within ±0.1 °C to achieve a super-stable environmental temperature simulating space; the vacuum chamber system (1) includes a carrier table (2-1), and the carrier table (2-1) is arranged on the vibration isolation system (2) connected in series that can suppress medium-frequency vibration and high-frequency vibration; the vibration isolation system (2) includes a passive vibration isolation layer (2-2) arranged inside the vacuum chamber (1-1) and a main-passive integrated active vibration isolator (2-3) arranged outside the vacuum chamber (1-1), and the passive vibration isolation layer (2-2) and the main-passive integrated active vibration isolator (2-3) are used to effectively isolate the influence of ground vibration and achieve a super-quiet environment simulating space.

[0009] Further, the vacuum chamber system includes a vacuum chamber (1-1), vacuum chamber legs (1-2), and a vacuum pump group (1-3); the vibration isolation system (2) includes a carrier table (2-1), a passive vibration isolation layer (2-2), an active vibration isolator (2-3), and a vibration isolation bellows (2-4); the vacuum pump group (1-3) includes a mechanical pump group, a molecular pump, etc., which is the main source of vibration noise for the system; the carrier table (2-1) inside the vacuum chamber is placed on the passive vibration isolation layer (2-2), and the passive vibration isolation layer (2-2) and the active vibration isolator (2-3) below it are connected in series, and the series-connected passive vibration isolation layer (2-2) and active vibration isolator (2-3) are used to suppress the influence of high-frequency vibration and low-frequency vibration from the ground on the carrier table (2-1); the mechanical pump group and the molecular pump are connected to the vacuum chamber (1-1) by a vibration isolation bellows (2-4) to reduce the influence of the main source of vibration noise for the system on the vacuum chamber (1-1).

[0010] Further, for the main-passive integrated active vibration isolator (2-3) arranged outside the vacuum chamber (1-1), the passive part and the active part are connected in series, and the two are separated by an intermediate block. The inertial vibration sensor is located on the intermediate block, and the detected vibration signal is fed back to the piezoelectric actuator through a filter circuit, and the piezoelectric actuator will expand or contract to eliminate ground vibration.

[0011] Further, the active vibration isolator (2-3) and the passive vibration isolation layer (2-2) work simultaneously and in different frequency bands; the active vibration isolator (2-3) is used to isolate vibrations of 0.6-150 Hz, and vibrations above 150 Hz need to be isolated by the passive vibration isolation layer (2-2).

[0012] Further, the passive vibration isolation layer (2-2) adopts a passive vibration isolation method of three-point support plus vibration isolation soft pads. The vibration isolation buffer pads isolate high-frequency vibrations passing through the active vibration isolation system. The three-point support structure and the stage are in line-plane contact, reducing the transmission area of high-frequency vibrations to the stage, further reducing vibrations, and at the same time enabling the adjustment of the levelness of the stage (2-1).

[0013] Further, the temperature environment control system (3) is a square sealed temperature control chamber that surrounds the vacuum chamber (1-1). At the top of the sealed temperature control chamber above the vacuum chamber (1-1), there are ventilation ducts (3-4) and a plurality of fans (3-3) connected to the ventilation ducts. On the left wall of the sealed temperature control chamber on the left side of the vacuum chamber (1-1), there are an ambient temperature monitoring sensor (3-1) and an ambient temperature controller (3-2). On the right wall of the sealed temperature control chamber on the right side of the vacuum chamber (1-1), a return air wall (3-5) is installed to make the temperature of the whole environment more uniform. The ambient temperature controller (3-2) first reduces the overall ambient temperature to below 15°C, and then controls the overall temperature at 15 - 25°C by means of closed-loop multi-stage heating temperature control, and the temperature control stability is within ±0.1°C.

[0014] Advantages and effects of the present invention

[0015] 1. The present invention organically combines the active vibration isolator 2-3 and the passive vibration isolation layer 2-2, solving the problem that the existing vibration isolation method based on vibration isolation bellows is difficult to suppress low-frequency vibrations. The organic combination means that the passive vibration isolation layer 2-2 is on the upper part and the active vibration isolator 2-3 is on the lower part, and the positions cannot be reversed. They are connected in series through an intermediate fastener and work in different frequency bands. The different frequency band operation means that when the vibration frequency is in the range of 0.6 - 150 Hz, the active vibration isolator gives a reverse force through the piezoelectric actuator to cancel out the vibration. When the vibration frequency exceeds 150 Hz, the active vibration isolator no longer works. At this time, the passive vibration isolation layer 2-2 adsorbs high-frequency vibrations. In order to reduce the influence of high frequencies above 150 Hz on the vacuum chamber 1-1, the passive vibration isolation layer 2-2 adopts a passive vibration isolation method of three-point support plus vibration isolation soft pads. The vibration isolation buffer pads isolate high-frequency vibrations passing through the active vibration isolation system. The three-point support structure and the stage are in line-plane contact, reducing the transmission area of high-frequency vibrations to the stage, further reducing vibrations, and realizing the adjustment of the levelness of the stage.

[0016] 2. The present invention has achieved unexpected effects by changing the physical position of the temperature control object or the temperature control area. The change in the physical position of the temperature control object or the temperature control area refers to moving the temperature control object from inside the vacuum chamber 1-1 to outside the vacuum chamber 1-1, that is, the present invention takes the entire vacuum chamber 1-1 as the temperature control object. In a traditional vibration isolation system, the test equipment is generally wrapped within a certain area inside the vacuum chamber for temperature control of this area. However, due to the complex temperature environment outside the vacuum chamber, it is difficult to achieve a very high temperature control stability. The present invention takes the complex temperature environment factors outside the vacuum chamber and the temperature control object inside the vacuum chamber 1-1 as a whole temperature control object. Even if the environmental factors outside the vacuum chamber 1-1 are extremely complex, the temperature stability can be controlled within the range of ±0.1°C through the closed-loop control of the temperature control system. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 Schematic diagram of the ultra-quiet and ultra-stable vacuum experimental device for simulating the space environment according to the present invention;

[0018] Figure 2 Schematic diagram of the active-passive integrated system according to the present invention;

[0019] Figure 3 Side view and top view of the passive vibration isolation layer according to the present invention;

[0020] Figure 4 Connection situation between the vacuum chamber and the vacuum pump group according to the present invention;

[0021] Figure 5 Position relationship between the vacuum chamber and the active vibration isolator according to the present invention;

[0022] Figure 6 Schematic diagram of the temperature control logic diagram according to the present invention.

[0023] In the figure, 1: vacuum chamber system; 1-1: vacuum chamber; 1-2: vacuum chamber leg; 1-3: vacuum pump group; 2: vibration isolation system, 2-1: load platform; 2-2: passive vibration isolation layer; 2-3: active vibration isolator; 2-4: vibration isolation bellows; 3: environmental temperature control system; 3-1: environmental temperature monitoring sensor; 3-2: environmental temperature controller; 3-3: fan; 3-4: ventilation duct; 3-5: return air wall; 3-6: outdoor unit. DETAILED DESCRIPTION OF THE INVENTION

[0024] Innovation points of the present invention

[0025] 1. One of the innovative points lies in that the present invention organically combines the active vibration isolator 2-3 and the passive vibration isolation layer 2-2, solving the problem that it is difficult to suppress low-frequency vibration in the prior art's vibration isolation method based on vibration isolation bellows. The so-called organic combination means that the passive vibration isolation layer 2-2 is on the top and the active vibration isolator 2-3 is on the bottom. The load-bearing capacities of the two are very different, so their positions cannot be reversed. The organic combination means operating in different frequency bands. When the vibration frequency is in the range of 0.6~150Hz, the active vibration isolator cancels out the vibration through the piezoelectric brake by applying a reverse force. When the vibration frequency exceeds 150Hz, the active vibration isolator no longer functions, and at this time, the high-frequency vibration is adsorbed by the passive vibration isolation layer 2-2;

[0026] 2. Another innovative point lies in that the environmental temperature control system has achieved unexpected effects by changing the physical position of the temperature control object or the temperature control area. The change in the physical position of the temperature control object or the temperature control area refers to moving the temperature control object from inside the vacuum chamber 1-1 to outside the vacuum chamber 1-1, that is, taking the entire vacuum chamber 1-1 as the temperature control object instead of taking a certain test device inside the vacuum chamber as the temperature control object. The traditional temperature control system generally wraps the test device in a certain area inside the vacuum chamber and controls the temperature of this area. However, due to the complex temperature environment outside the vacuum chamber, it is difficult to achieve a high temperature control stability. The present invention combines the complex temperature environment factors outside the vacuum chamber and the test device inside the vacuum chamber 1-1 into a community, and takes the community as the temperature control object. Even if the environmental factors outside the vacuum chamber 1-1 are complex, since the environmental factors outside the vacuum chamber 1-1 have been taken as the temperature control object, the influence of the environmental factors outside the vacuum chamber 1-1 on the temperature can be overcome in real time through the closed-loop system to adjust the temperature, and the temperature is always maintained within a stable range. At this time, the test device inside the vacuum chamber will no longer be affected by the complex external environmental factors, thus solving the problem that it is difficult for the traditional vibration isolation system to achieve a high temperature control stability.

[0027] 3. Design principle of the series vibration isolator

[0028] There are two ways of series-connected vibration isolators. The present invention adopts the method of placing the passive vibration isolator above and the active vibration isolator below. First, comparison of the two ways: When two vibration isolators are connected in series, the vibration transmission path is from the foundation through the first vibration isolator, then through the second vibration isolator, and finally to the load platform. The total transmissibility of the series system can be approximated as the product of the transmissibilities of the two vibration isolators (assuming a small coupling effect). The two possible arrangements are: A. The active vibration isolator is below and the passive vibration isolator is above (next to the load platform): foundation → active vibration isolator → passive vibration isolator → load platform. The active vibration isolator deals with low-frequency vibrations of 0 - dozens of Hz, and the passive vibration isolator deals with vibrations above dozens of Hz to 150 Hz. For 0 - dozens of Hz: The active vibration isolator can effectively suppress, and the passive vibration isolator has a poor effect in this frequency range (may amplify vibrations). For above dozens of Hz: The effect of the active vibration isolator is limited, and the passive vibration isolator can play a role. B. The passive vibration isolator is below and the active vibration isolator is above (next to the load platform): foundation → passive vibration isolator → active vibration isolator → load platform. The passive vibration isolator has a poor effect on 0 - dozens of Hz (may amplify), and the active vibration isolator needs to deal with the amplified low-frequency vibrations. This arrangement may lead to the active vibration isolator requiring a greater control force to offset the low-frequency vibrations amplified by the passive vibration isolator, with low efficiency. If the active vibration isolator is next to the load platform, that is, the passive is below and the active is above, the passive vibration isolator may first amplify the low-frequency vibrations, and the active vibration isolator needs to make extra efforts to offset the amplified vibrations, with low efficiency. If the passive vibration isolator is next to the load platform, that is, the active is below and the passive is above, the active vibration isolator first attenuates the low-frequency vibrations, and the passive vibration isolator has little influence on the low frequency (although the effect is poor, but the input low-frequency vibrations have been attenuated by the active vibration isolator).

[0029] Second, the objective of the present invention is to solve the problem that it is difficult to suppress low-frequency vibrations by traditional methods. In order to effectively suppress low-frequency vibrations below dozens of Hz, we need: in the vibration transmission path, ⑴ First, the active vibration isolator deals with the low-frequency vibrations because it is effective in the range of 0 - dozens of Hz. ⑵ Then, the passive vibration isolator deals with higher-frequency vibrations (above dozens of Hz) to avoid the noise or control difficulties that the active vibration isolator may introduce at high frequencies. ⑶ If the passive vibration isolator is next to the load platform, that is, the active is below and the passive is above, the active vibration isolator first attenuates the low-frequency vibrations, and the passive vibration isolator has little influence on the low frequency (although the effect is poor, but the input low-frequency vibrations have been attenuated by the active vibration isolator), and the high-frequency vibrations are further attenuated by the passive vibration isolator. If the active vibration isolator is next to the load platform (that is, the passive is below and the active is above): The passive vibration isolator may first amplify the low-frequency vibrations, and the active vibration isolator needs to make extra efforts to offset the amplified vibrations, with low efficiency.

[0030] Third, conclusion: In order to optimally overcome low-frequency vibrations from 0 to dozens of Hz, a passive vibration isolator should be placed next to the stage, and the active vibration isolator should be placed below. In this way: ① The active vibration isolator first processes low-frequency vibrations (0 to dozens of Hz) and effectively attenuates them. ② The passive vibration isolator then processes the remaining high-frequency vibrations (above dozens of Hz) and has a relatively small impact on the transmission of low-frequency vibrations (because the low-frequency vibrations have been attenuated by the active vibration isolator).

[0031] Based on the above principle, the present invention designs a super-quiet and super-stable vacuum experimental device for simulating the space environment as Figures 1 - 6 shown. Its characteristics are: The experimental device is provided with a temperature environment control system 3, a vacuum chamber system 1, and a vibration isolation system 2; the temperature environment control system 3 is arranged on the outermost layer of the vacuum test device and surrounds the vacuum chamber system 1 and the vibration isolation system 2, and can control the overall temperature within 15 to 25 °C and the temperature control stability within ±0.1 °C to achieve a super-stable environmental temperature for simulating space; the vacuum chamber system 1 includes a stage 2-1, and the stage 2-1 is arranged on the vibration isolation system 2 connected in series that can suppress medium and low-frequency vibrations and high-frequency vibrations; the vibration isolation system 2 includes a passive vibration isolation layer 2-2 arranged inside the vacuum chamber 1-1 and a main-passive integrated active vibration isolator 2-3 arranged outside the vacuum chamber 1-1, and the passive vibration isolation layer 2-2 and the main-passive integrated active vibration isolator 2-3 are used to effectively isolate the influence of ground vibrations and achieve a super-quiet environment for simulating space.

[0032] As Figure 1 shown, the vacuum chamber system includes a vacuum chamber 1-1, vacuum chamber legs 1-2, and a vacuum pump group 1-3; the vibration isolation system 2 includes a stage 2-1, a passive vibration isolation layer 2-2, an active vibration isolator 2-3, and a vibration isolation bellows 2-4; the vacuum pump group 1-3 includes a mechanical pump group, a molecular pump, etc., which is the main source of vibration and noise in the system; the stage 2-1 inside the vacuum chamber is placed on the passive vibration isolation layer 2-2, and the passive vibration isolation layer 2-2 and the active vibration isolator 2-3 below it are connected in series, and the serially connected passive vibration isolation layer 2-2 and active vibration isolator 2-3 are used to suppress the influence of high-frequency vibrations and low-frequency vibrations from the ground on the stage 2-1; the mechanical pump group and the molecular pump are connected to the vacuum chamber 1-1 by a vibration isolation bellows 2-4 to reduce the influence of the main source of vibration and noise in the system on the vacuum chamber 1-1.

[0033] As Figure 2 shown, for the main-passive integrated active vibration isolator 2-3 arranged outside the vacuum chamber 1-1, the passive part and the active part are connected in series, and the two are separated by an intermediate block. The inertial vibration sensor is located on the intermediate block, and the detected vibration signal is fed back to the piezoelectric actuator through a filter circuit, and the piezoelectric actuator will expand or contract to eliminate ground vibrations.

[0034] Supplementary note:

[0035] 1) Figure 2 Shown is the active vibration isolator 2-3 with integrated active and passive functions. The spring and the damper on the right side of the spring constitute the passive vibration isolation function; the vibration sensor, filter, high-voltage amplifier, and piezoelectric actuator constitute the active vibration isolation system;

[0036] 2) Figure 2 Isolated load: It refers to the vacuum chamber 1-1 that needs vibration isolation, that is, the vacuum chamber 1-1 and the thrust measurement equipment inside.

[0037] 3) The bottom surface of the vibration isolation foot of this active vibration isolator 2-3 with integrated active and passive functions is in direct contact with the ground, that is, it needs to be directly placed on the ground.

[0038] As Figure 1 shown, the active vibration isolator 2-3 outside the vacuum chamber 1-1 and the passive vibration isolation layer 2-2 inside the vacuum chamber 1-1 work simultaneously and in different frequency bands; the active vibration isolator 2-3 is used to isolate vibrations from 0.6 to 150 Hz, and vibrations above 150 Hz need to be isolated by the passive vibration isolation layer 2-2.

[0039] As Figure 3 shown, the passive vibration isolation layer 2-2 adopts a passive vibration isolation method of three-point support plus vibration isolation soft pads. The vibration isolation buffer pads isolate high-frequency vibrations passing through the active vibration isolation system; the three-point support structure and the load platform are in line-plane contact, reducing the transmission area of high-frequency vibrations to the load platform, further reducing vibrations, and at the same time enabling the leveling adjustment of the load platform (2-1).

[0040] As Figure 1 shown, the temperature environment control system 3 is a square sealed temperature control chamber that surrounds the vacuum chamber 1-1. There are ventilation ducts 3-4 and multiple fans 3-3 connected to the ventilation ducts on the top of the sealed temperature control chamber above the vacuum chamber 1-1; there are an ambient temperature monitoring sensor 3-1 and an ambient temperature controller 3-2 on the left wall of the sealed temperature control chamber on the left side of the vacuum chamber 1-1; a return air wall 3-5 is installed on the right wall of the sealed temperature control chamber on the right side of the vacuum chamber 1-1 to make the temperature of the whole environment more uniform; the ambient temperature controller 3-2 first reduces the overall ambient temperature to below 15 °C, and then controls the overall temperature at 15-25 °C by means of closed-loop multi-stage heating temperature control, and the temperature control stability is within ±0.1 °C.

[0041] It should be emphasized that the above specific embodiments are only explanations of the present invention, and they are not limitations on the present invention. Those skilled in the art can make modifications to the above embodiments without creative contributions according to needs after reading this specification, but as long as they are within the scope of the claims of the present invention, they are protected by the patent law.

Claims

1. A super quiet and super stable vacuum experimental device for simulating the space environment, characterized in that: The experimental device is equipped with a temperature environment control system (3), a vacuum chamber system (1), and a vibration isolation system (2); the temperature environment control system (3) is arranged on the outermost layer of the vacuum test device and encloses the vacuum chamber system (1) and the vibration isolation system (2), and can control the overall temperature within 15 - 25°C with a temperature control stability of ±0.1°C, realizing an ultra-stable environmental temperature simulating space; the vacuum chamber system (1) includes a sample stage (2-1), and this sample stage (2-1) is arranged on the vibration isolation system (2) connected in series that can suppress medium and low-frequency vibrations and high-frequency vibrations; this vibration isolation system (2) includes a passive vibration isolation layer (2-2) arranged inside the vacuum chamber (1-1) and a main-passive integrated active vibration isolator (2-3) arranged outside the vacuum chamber (1-1), and this passive vibration isolation layer (2-2) and the main-passive integrated active vibration isolator (2-3) are used to effectively isolate the influence of ground vibrations and realize an ultra-quiet environment simulating space.

2. The ultra-quiet and ultra-stable vacuum experimental device for simulating the space environment according to claim 1, wherein: The vacuum chamber system includes a vacuum chamber (1-1), vacuum chamber legs (1-2), and a vacuum pump group (1-3); the vibration isolation system (2) includes a sample stage (2-1), a passive vibration isolation layer (2-2), an active vibration isolator (2-3), and a vibration isolation bellows (2-4); the vacuum pump group (1-3) includes a mechanical pump group, a molecular pump, etc., which is the main source of vibration noise for the system; the sample stage (2-1) inside the vacuum chamber is placed on the passive vibration isolation layer (2-2), and the passive vibration isolation layer (2-2) and the active vibration isolator (2-3) below it are connected in series, and the serially connected passive vibration isolation layer (2-2) and active vibration isolator (2-3) are used to suppress the influence of high-frequency and low-frequency vibrations from the ground on the sample stage (2-1); the mechanical pump group and the molecular pump are connected to the vacuum chamber (1-1) using a vibration isolation bellows (2-4) to reduce the influence of the main source of vibration noise for the system on the vacuum chamber (1-1).

3. The ultra-quiet and ultra-stable vacuum experimental device for simulating a space environment according to claim 2, characterized in that: The main-passive integrated active vibration isolator (2-3) arranged outside the vacuum chamber (1-1) has its passive part and active part connected in series, and the two are separated by an intermediate block. An inertial vibration sensor is located on the intermediate block, and the detected vibration signal is fed back to the piezoelectric actuator through a filter circuit, and the piezoelectric actuator will expand or contract, thereby eliminating ground vibrations.

4. The ultra-quiet and ultra-stable vacuum experimental device for simulating a space environment according to claim 2, characterized in that: the active vibration isolator (2-3) outside the vacuum chamber (1-1) and the passive vibration isolation layer (2-2) inside the vacuum chamber (1-1) work simultaneously and work in different frequency bands; the active vibration isolator (2-3) is used to isolate vibrations in the range of 0.6 - 150 Hz, and vibrations above 150 Hz need to be isolated using the passive vibration isolation layer (2-2).

5. The ultra-quiet and ultra-stable vacuum experimental device for simulating a space environment according to claim 2, characterized in that: The passive vibration isolation layer (2-2) adopts a passive vibration isolation method of three-point support plus vibration isolation soft pads, and the vibration isolation buffer pads isolate high-frequency vibrations passing through the active vibration isolation system; the three-point support structure and the sample stage are in line-plane contact, reducing the transmission area of high-frequency vibrations to the sample stage, further reducing vibrations, and at the same time, the levelness of the sample stage (2-1) can be adjusted.

6. The ultra-quiet and ultra-stable vacuum experimental device for simulating the space environment according to claim 1, characterized in that: The temperature environment control system (3) is a square sealed temperature control chamber that encloses the vacuum chamber (1-1). At the top of the sealed temperature control chamber above the vacuum chamber (1-1), there are ventilation ducts (3-4) and multiple fans (3-3) connected to the ventilation ducts; on the left wall of the sealed temperature control chamber on the left side of the vacuum chamber (1-1), there are an ambient temperature monitoring sensor (3-1) and an ambient temperature controller (3-2); on the right wall of the sealed temperature control chamber on the right side of the vacuum chamber (1-1), a return air wall (3-5) is installed to make the temperature of the entire environment more uniform; the ambient temperature controller (3-2) first reduces the overall ambient temperature to below 15°C, and then controls the overall temperature at 15-25°C by means of closed-loop multi-stage heating temperature control, and the temperature control stability is within ±0.1°C.

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