Self-sealing isolation valve for electron optical column

By designing a combination of valve body assembly, valve core assembly and drive assembly, and adopting a flexible connecting piece and wedge-shaped sealing block structure, the problem of degradation of sealing performance of existing wedge-shaped vacuum valves in high pressure differential environments is solved, and efficient vacuum isolation of the upper and lower parts of the electronic optical column is achieved.

CN120402653APending Publication Date: 2025-08-0148TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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Patent Information

Application Number
CN202510486070.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-04-17
Publication Date
2025-08-01

AI Technical Summary

Technical Problem

The existing wedge-shaped vacuum valves cannot effectively isolate the electronic gun from the electronic optical path system, the sealing performance is degraded, and the adaptive positioning reliability is insufficient, so they cannot maintain a good seal under high pressure differential environment.

Method used

A self-sealed isolation valve including a valve body assembly, a valve core assembly, a driving assembly and a vacuum assembly is designed. Through a flexible connecting piece and a wedge-shaped sealing block structure, the valve core assembly opens or closes the air holes under the drive of the drive assembly to ensure vacuum isolation between the upper and lower parts of the electronic optical column.

Benefits of technology

It realizes high sealing performance and motion reliability in a high pressure differential environment, ensures effective isolation between the electron gun and the electronic optical path system, and provides a stable vacuum environment.

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Abstract

The invention discloses a self-sealing isolation valve for an electron optical column. The self-sealing isolation valve comprises a valve body assembly, a valve element assembly, a driving assembly and a vacuumizing assembly. The valve body assembly comprises a valve cavity, the top of the valve cavity is connected with the upper portion of the electron optical column and located in an ultrahigh vacuum environment, and the bottom of the valve cavity is connected with the lower portion of the electron optical column and located in a high vacuum environment. The vacuumizing assembly is connected with the side portion of the valve cavity so that an ultrahigh vacuum environment can be formed in the valve cavity. The valve element assembly is arranged in the valve cavity and located above an air hole of the valve cavity, the driving assembly is arranged on the outer side of the valve cavity, and the output end of the driving assembly penetrates into the valve cavity in a sealed mode and is connected with the valve element assembly. Under driving of the driving assembly, the valve element assembly opens or closes the air hole so as to achieve connection or isolation of the upper portion and the lower portion of the electron optical column. The device has the characteristics of compact structure, convenience in operation, high stability and the like, and realizes isolation of different vacuum environments at the upper part and the lower part of the electron optical column.
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