Self-sealing isolation valve for electron optical column

Abstract

The invention discloses a self-sealing isolation valve for an electron optical column. The self-sealing isolation valve comprises a valve body assembly, a valve element assembly, a driving assembly and a vacuumizing assembly. The valve body assembly comprises a valve cavity, the top of the valve cavity is connected with the upper portion of the electron optical column and located in an ultrahigh vacuum environment, and the bottom of the valve cavity is connected with the lower portion of the electron optical column and located in a high vacuum environment. The vacuumizing assembly is connected with the side portion of the valve cavity so that an ultrahigh vacuum environment can be formed in the valve cavity. The valve element assembly is arranged in the valve cavity and located above an air hole of the valve cavity, the driving assembly is arranged on the outer side of the valve cavity, and the output end of the driving assembly penetrates into the valve cavity in a sealed mode and is connected with the valve element assembly. Under driving of the driving assembly, the valve element assembly opens or closes the air hole so as to achieve connection or isolation of the upper portion and the lower portion of the electron optical column. The device has the characteristics of compact structure, convenience in operation, high stability and the like, and realizes isolation of different vacuum environments at the upper part and the lower part of the electron optical column.

Description

Technical Field

[0001] The present invention relates to the technical field of electron beam devices, and particularly relates to a self-sealing isolation valve for an electron optical column. Background Art

[0002] The electron beam isolation valve is mainly used to isolate the electron gun from the electron optical path system, that is, the ultra-high vacuum area (electron beam generation area) and the high vacuum area (electron optical path system), to ensure that the ultra-high vacuum of the electron gun part is not affected during cavity maintenance and equipment power-off, and to provide a good vacuum environment for the emission of the electron beam.

[0003] The prior art CN117570214A discloses a wedge-shaped vacuum valve, in which both the valve core and the sealing surface are set as wedge-shaped structures, and the cylinder assembly drives the valve core to move up and down in the support housing through a connecting rod to realize the two states of opening and closing the valve. However, this wedge-shaped vacuum valve cannot be applied to isolate the electron gun from the electron optical path system. The reasons are as follows: During long-term use, the high pressure difference between the electron gun and the electron optical path system may generate a large pressure on the sealing surface and the wear-resistant pad, resulting in slight deformation of the sealing surface or displacement of the wear-resistant pad, thereby affecting the sealing effect and causing the sealing performance to decline. In addition, although the valve core can be self-adaptively aligned, in actual applications, the reliability of this self-adaptive alignment is affected by various factors. For example, if the movement accuracy of the connecting rod is insufficient, or the contact force between the valve core and the sealing surface is uneven, the valve core cannot fully fit the sealing surface, resulting in leakage, or when the air pressure on one side below the sealing ring is relatively large, the prior art cannot ensure the sealing performance under the reverse pressure difference. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a self-sealing isolation valve for an electron optical column with a compact structure, convenient operation, high stability and excellent sealing performance.

[0005] To solve the above technical problem, the technical solution adopted by the present invention is as follows:

[0006] A self-sealing isolation valve for an electron optical column, comprising: a valve body assembly, a valve core assembly, a driving assembly and a vacuum pumping assembly; the valve body assembly includes a valve cavity, the top of the valve cavity is connected to the upper part of the electron optical column and is in an ultra-high vacuum environment, and the bottom of the valve cavity is connected to the lower part of the electron optical column and is in a high vacuum environment; the vacuum pumping assembly is connected to the side of the valve cavity to realize the formation of an ultra-high vacuum environment inside the valve cavity; the valve core assembly is arranged inside the valve cavity and is located above the air hole of the valve cavity, and the driving assembly is arranged outside the valve cavity, and the output end of the driving assembly penetrates into the valve cavity in a sealed manner and is connected to the valve core assembly; under the drive of the driving assembly, the valve core assembly opens or closes the air hole to realize the connection or isolation between the upper and lower parts of the electron optical column.

[0007] As a further improvement of the present invention, the valve core assembly includes a baffle plate, a movable sealing member and a stop member. The baffle plate is arranged on the bottom of the cavity of the valve body assembly, and the baffle plate is provided with through holes corresponding to the air holes. An installation channel is arranged inside the baffle plate. The movable sealing member and the stop member are both arranged in the installation channel. The movable sealing member and the stop member are respectively located on two opposite sides of the air hole. The movable sealing member is connected to the output end of the driving assembly. Driven by the driving assembly, the movable sealing member approaches or moves away from the stop member to close or open the air hole.

[0008] As a further improvement of the present invention, the movable sealing member includes a flexible connecting piece, a sealing block and a connecting block. The connecting block is connected to the output end of the driving assembly. One end of the flexible connecting piece is connected to the connecting block through a fixing screw, and the other end of the flexible connecting piece is connected to the sealing block through a floating screw. Driven by the driving assembly, the connecting block drives the sealing block to approach or move away from the stop member through the flexible connecting piece, and the bottom of the sealing block closes or opens the air hole.

[0009] As a further improvement of the present invention, both the sealing block and the connecting block are wedge-shaped structures, and the bottom surfaces of the sealing block and the connecting block are both flat straight surfaces. When the sealing block is pushed by the connecting block and squeezed with the stop member, both the stop member and the connecting block can provide downward pressure.

[0010] As a further improvement of the present invention, the flexible connecting piece is made of brass.

[0011] As a further improvement of the present invention, a second sealing ring is arranged at the bottom of the sealing block. When the sealing block abuts against the stop member, the second sealing ring can completely cover the air hole.

[0012] As a further improvement of the present invention, the stop member includes a stop pin and a stop block. The stop block is fixedly connected to the baffle plate. The stop pin penetrates and is fixed inside the stop block, and the stop pin faces the movable sealing member to assist the movable sealing member in blocking the air hole.

[0013] As a further improvement of the present invention, the driving assembly includes a cylinder driving member, a corrugated pipe, a transmission shaft and a support housing. One end of the support housing is connected to the installation flange on the side of the valve cavity, and the other end of the support housing is provided with a concave cavity. The output end of the cylinder driving member is connected to one end of the transmission shaft. The other end of the transmission shaft extends into the valve cavity through the corrugated pipe, the support housing and the installation flange in a sealed manner and is connected to the valve core assembly. Driven by the cylinder driving member, the transmission shaft drives the valve core assembly to close or open the air hole.

[0014] As a further improvement of the present invention, the cylinder driving member includes a cylinder, a floating joint, a stop plate and a telescopic guide rod; the output end of the cylinder is connected to the transmission shaft through the floating joint; the stop plate is arranged at the output end of the cylinder, one end of the telescopic guide rod is connected to the bottom of the concave cavity of the support housing, and the other end of the telescopic guide rod is connected to the stop plate; under the drive of the cylinder, the telescopic guide rod and the transmission shaft move synchronously.

[0015] As a further improvement of the present invention, a vacuum pumping connection hole is provided on the side of the valve cavity, and the vacuum pumping connection hole is connected to a vacuum pumping assembly through a pipeline; a first sealing ring is provided on the top of the valve cavity.

[0016] Compared with the prior art, the advantages of the present invention are as follows:

[0017] The self-sealing isolation valve for an electron optical column of the present invention is arranged between the upper part and the lower part of the electron optical column by arranging the valve body assembly, and the inside of the valve body assembly is formed and maintained in an ultra-high vacuum state by a vacuum pumping assembly; the driving assembly arranged outside the valve body assembly is hermetically penetrated into the valve body assembly and connected to the valve core assembly; under the drive of the driving assembly, the valve core assembly can open or close the air hole at the bottom of the valve body assembly, that is, the connection or isolation between the upper part and the lower part of the electron optical column is realized, and it has the characteristics of good sealing performance and high movement reliability, ensuring the effective isolation of the ultra-high vacuum area where the electron gun is located from the high vacuum area where the electron optical path system is located, and providing a good vacuum environment for the emission of the electron beam. Description of the Drawings

[0018] Figure 1 It is a schematic diagram of the three-dimensional structural principle of the self-sealing isolation valve for an electron optical column in a specific embodiment of the present invention;

[0019] Figure 2 It is a schematic diagram of the sectional structural principle of the self-sealing isolation valve for an electron optical column in a specific embodiment of the present invention;

[0020] Figure 3 It is a schematic diagram of the partial structural principle of the valve core assembly in a specific embodiment of the present invention;

[0021] Figure 4 It is a schematic diagram of the sectional structural principle of the valve core assembly in a specific embodiment of the present invention;

[0022] Legend: 100, valve body assembly; 200, spool assembly; 300, drive assembly; 400, vacuum pumping assembly; 101, valve cavity; 102, cavity bottom; 103, air hole; 104, vacuum pumping connection hole; 105, first sealing ring; 106, mounting flange; 201, baffle; 202, flexible connecting piece; 203, sealing block; 204, stop pin; 205, connecting block; 206, fixing screw; 207, floating screw; 208, second sealing ring; 209, stop block; 2011, mounting channel; 301, cylinder; 302, floating joint; 303, bellows; 304, transmission shaft; 305, support housing; 306, stop plate; 307, telescopic guide rod. Detailed implementation mode

[0023] The present invention will be further described below in conjunction with the accompanying drawings of the specification and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0024] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "side", "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention.

[0025] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality" means two or more unless otherwise specifically defined.

[0026] Embodiment

[0027] Such as Figure 1 And Figure 2As shown in the figure, the self-sealing isolation valve for an electron optical column according to the present invention includes: a valve body assembly 100, a valve core assembly 200, a driving assembly 300, and a vacuum pumping assembly 400. The valve body assembly 100 includes a valve cavity 101. A gas hole 103 is provided at the center of the bottom 102 of the valve cavity 101. The top of the valve cavity 101 is connected to the upper part of the electron optical column and is in an ultra-high vacuum environment. The bottom of the valve cavity 101 is connected to the lower part of the electron optical column and is in a high vacuum environment. The vacuum pumping assembly 400 is connected to the side of the valve cavity 101 to form an ultra-high vacuum environment inside the valve cavity 101. The valve core assembly 200 is arranged inside the valve cavity 101 and is located above the gas hole 103. The driving assembly 300 is arranged outside the valve cavity 101. The output end of the driving assembly 300 penetrates into the valve cavity 101 in a sealed manner and is connected to the valve core assembly 200. Driven by the driving assembly 300, the valve core assembly 200 opens or closes the gas hole 103 to connect or isolate the upper and lower parts of the electron optical column.

[0028] In this embodiment, the valve body assembly 100 is arranged between the upper and lower parts of the electron optical column, and the inside of the valve body assembly 100 is formed and maintained in an ultra-high vacuum state by the vacuum pumping assembly 400. The driving assembly 300 arranged outside the valve body assembly 100 penetrates into the valve body assembly 100 in a sealed manner and is connected to the valve core assembly 200. Driven by the driving assembly 300, the valve core assembly 200 can open or close the gas hole 103 at the bottom of the valve body assembly 100, that is, the connection or isolation between the upper and lower parts of the electron optical column is realized. It has the characteristics of good sealing performance and high movement reliability, ensuring the effective isolation of the ultra-high vacuum area where the electron gun is located and the high vacuum area where the electron optical path system is located, and providing a good vacuum environment for the emission of the electron beam.

[0029] In this embodiment, a vacuum pumping connection hole 104 is provided on the side of the valve cavity 101. The vacuum pumping connection hole 104 is connected to the vacuum pumping assembly through a pipeline. A first sealing ring 105 is provided on the connection end face at the top of the valve cavity 101 to ensure reliable sealing between the top of the valve cavity 101 and the upper part of the electron optical column.

[0030] As Figure 2 、 Figure 3 and Figure 4As shown, the spool assembly 200 includes a baffle 201, a movable sealing member, and a stop member. The baffle 201 is disposed on the bottom 102 of the cavity of the valve body assembly 100, and a through hole corresponding to the air hole 103 is provided on the baffle 201 to ensure that the atmosphere environments of the upper and lower parts of the electron optical column are connected. An installation channel 2011 is provided inside the baffle 201, and the installation channel 2011 covers the air hole 103. The movable sealing member and the stop member are both disposed in the installation channel 2011, and the movable sealing member and the stop member are respectively located on opposite sides of the air hole 103. The movable sealing member and the stop member can be limited by the installation channel 2011 to improve the movement reliability of the movable sealing member and ensure the sealing reliability of the air hole 103. The movable sealing member is connected to the output end of the driving assembly 300. Driven by the driving assembly 300, the movable sealing member approaches or moves away from the stop member to close or open the air hole 103.

[0031] As Figure 3 and Figure 4 shown, the movable sealing member includes a flexible connecting piece 202, a sealing block 203, and a connecting block 205. The connecting block 205 is connected to the output end of the driving assembly 300, and there is a gap between the sealing block 203 and the connecting block 205. One end of the flexible connecting piece 202 is connected to the connecting block 205 by a fixing screw 206, and a long hole is provided at the other end of the flexible connecting piece 202. The long hole is connected to the sealing block 203 by a floating screw 207. Driven by the driving assembly 300, the connecting block 205 drives the sealing block 203 to approach or move away from the stop member through the flexible connecting piece 202, and the bottom of the sealing block 203 closes or opens the air hole 103.

[0032] As Figure 3 and Figure 4 shown, both the sealing block 203 and the connecting block 205 are wedge-shaped structures, and the bottom surfaces of the sealing block 203 and the connecting block 205 are flat straight surfaces to improve the sealing reliability of the air hole 103 and prevent air leakage caused by warping of the sealing block 203. Further, the sealing block 203 is a double-sided wedge-shaped structure, the fitting surface between the sealing block 203 and the connecting block 205 is an inclined surface, and the side portion of the sealing block 203 facing the stop member is also an inclined surface to improve the transmission smoothness between components and avoid position deviation of components caused by excessive force or sudden force. In this embodiment, since the upper part of the valve cavity 101 is in an ultra-high vacuum environment and the lower part of the valve cavity 101 is in a high vacuum environment, there is an air pressure difference between the upper and lower ends of the valve cavity 101. By using the downward component force when the wedge-shaped sealing block 203 is squeezed by the baffle 201, a good vacuum sealing effect can still be achieved against the atmospheric pressure difference, ensuring the vacuum isolation between the upper and lower parts of the electron optical column.

[0033] In this embodiment, the flexible connecting piece 202 is made of brass, and has the characteristics of high structural strength, good toughness and wear resistance. The flexible connecting piece 202 is used to flexibly connect the sealing block 203 and the connecting block 205, and buffer the movement of the sealing block 203 to improve the accuracy of the displacement of the sealing block 203.

[0034] Specifically, when the driving assembly 300 pushes the connecting block 205 to move towards the air hole 103, the connecting block 205 pushes the flexible connecting piece 202 to move forward a certain distance along the floating screw 207 on the sealing block 203, and the sealing block 203 is not stressed. When the forward end of the long hole of the flexible connecting piece 202 contacts the floating screw 207, the inclined surface of the connecting block 205 contacts the inclined surface of the sealing block 203, and then pushes the sealing block 203 to move towards the air hole 103 to block the air hole 103. When the driving assembly 300 pulls the connecting block 205 to move towards the outside of the cavity body 101, the connecting block 205 pulls the flexible connecting piece 202 to move backward along the floating screw 207 on the sealing block 203. The inclined surface of the connecting block 205 is separated from the inclined surface of the sealing block 203, and the sealing block 203 is not stressed. When the reverse end of the long hole of the flexible connecting piece 202 contacts the floating screw 207, the flexible connecting piece 202 pulls the sealing block 203 away from the air hole 103, and the air hole 103 is conducted.

[0035] As Figure 4 shown, a dovetail groove is provided at the bottom of the sealing block 203, and a second sealing ring 208 made of fluororubber is provided in the dovetail groove. When the sealing block 203 abuts against the stop member, the second sealing ring 208 can completely cover the air hole 103 to improve the sealing performance.

[0036] As Figure 3 and Figure 4 shown, the stop member includes a stop pin 204 and a stop block 209. The stop block 209 is fixedly connected to the baffle 201. The stop pin 204 penetrates and fixes the inside of the stop block 209, and is threadedly connected to the end of the stop block 209 and locked by a nut to realize the installation and fixation of the stop pin 204. The wedge-shaped surface of the stop pin 204 facing the sealing block 203 is used to assist the sealing block 203 to block the air hole 103, prevent the sealing block 203 from displacing too much and causing air leakage from the air hole 103, and at the same time prevent the sealing block 203 from being stuck in the installation channel 2011, and improve the smoothness of the movement of the sealing block 203. When the sealing block 203 is pushed by the connecting block 205 and is squeezed by the stop pin 204, the stop pin 204 and the connecting block 205 together apply a downward pressure to the sealing block 203 through the wedge-shaped surface of the sealing block 203 to ensure the sealing effect. In this embodiment, the isolation of different vacuum environments between the upper and lower parts of the isolation valve is realized, and a good self-sealing effect is achieved by using a mechanical device under the reverse atmospheric pressure difference.

[0037] As Figure 2As shown, the driving component 300 includes a cylinder driving member, a corrugated pipe 303, a transmission shaft 304, and a support housing 305. One end of the support housing 305 is connected to the mounting flange 106 on the side of the valve cavity 101, and the other end of the support housing 305 is provided with a concave cavity; the output end of the cylinder driving member is connected to one end of the transmission shaft 304, and the other end of the transmission shaft 304 penetrates through the corrugated pipe 303, the support housing 305, and the mounting flange 106 in a sealed manner and then extends into the valve cavity 101, and is connected to the connecting block 205 in the mounting channel 2011. Driven by the cylinder driving member, the transmission shaft 304 drives the connecting block 205 to move in the mounting channel 2011, and further drives the sealing block 203 to close or open the air hole 103.

[0038] In this embodiment, one end of the corrugated pipe 303 is hermetically connected to the end of the concave cavity, and the other end of the corrugated pipe 303 is hermetically connected to the outer side of the transmission shaft 304, so as to realize that the transmission shaft 304 penetrates through the support housing 305 and the mounting flange in a sealed manner and then extends into the valve cavity 101.

[0039] As Figure 2 shown, the cylinder driving member includes a cylinder 301, a floating joint 302, a stop plate 306, and a telescopic guide rod 307. The output end of the cylinder 301 is connected to the transmission shaft 304 through the floating joint 302. The stop plate 306 is arranged at the output end of the cylinder 301, one end of the telescopic guide rod 307 is connected to the bottom of the concave cavity of the support housing 305, and the other end of the telescopic guide rod 307 is connected to the stop plate 306. Driven by the cylinder 301, the telescopic guide rod 307 and the transmission shaft 304 move synchronously. Through the guiding assistance provided by the telescopic guide rod 307, the smoothness of the movement of the transmission shaft 304 is improved, and then the connecting block 205 and the sealing block 203 are driven to move precisely, and the reliability of the sealing of the air hole 103 is improved. [[ID=IO]]

[0040] In this embodiment, before the equipment runs, the cylinder 301 pushes forward, drives the transmission shaft 304 to move through the floating joint 302, the transmission shaft 304 pushes the connecting block 205, the connecting block 205 is softly connected to the sealing block 203 through the flexible connecting piece 202, while pushing the inclined surface of the sealing block 203 to press the stop pin 204, the movement buffer between the connecting block 205 and the sealing block 203 is ensured through the flexible connection. During the operation of the equipment, since the upper and lower parts of the valve cavity 101 are in different vacuum states, there is an air pressure difference between the bottom and the top of the sealing block 203. Through the acting force generated by the air pressure difference, the second sealing ring 208 can be pressed more tightly on the cavity bottom 102 to ensure efficient sealing. Also, since the sealing block 203 adopts a wedge-shaped structure, the stopping force received by the sealing block 203 in the horizontal direction is converted into a downward pressing force, and then it is ensured that the second sealing ring 208 at the bottom of the sealing block 203 is pressed tightly on the cavity bottom 102, realizing the sealing of the air hole 103 and achieving a good sealing effect.

[0041] The above are only the preferred embodiments of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions falling within the concept of the present invention belong to the protection scope of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements should also be regarded as within the protection scope of the present invention.

Claims

1. A self-sealing isolation valve for an electron optical column, characterized in that, Including: A valve body assembly (100), a valve core assembly (200), a driving assembly (300), and a vacuum pumping assembly (400); the valve body assembly (100) includes a valve cavity (101), the top of the valve cavity (101) is connected to the upper part of the electron optical column and is in an ultra-high vacuum environment, and the bottom of the valve cavity (101) is connected to the lower part of the electron optical column and is in a high vacuum environment; the vacuum pumping assembly (400) is connected to the side of the valve cavity (101) to form an ultra-high vacuum environment inside the valve cavity (101); the valve core assembly (200) is arranged inside the valve cavity (101) and above the air hole (103) of the valve cavity (101), the driving assembly (300) is arranged outside the valve cavity (101), the output end of the driving assembly (300) penetrates into the valve cavity (101) in a sealed manner and is connected to the valve core assembly (200); under the drive of the driving assembly (300), the valve core assembly (200) opens or closes the air hole (103) to connect or isolate the upper and lower parts of the electron optical column.

2. The self-sealing isolation valve for an electron optical column according to claim 1, characterized in that: The valve core assembly (200) includes a baffle plate (201), a moving sealing member, and a stopping member. The baffle plate (201) is arranged on the cavity bottom (102) of the valve body assembly (100), and a through hole corresponding to the air hole (103) is provided on the baffle plate (201); an installation channel (2011) is arranged inside the baffle plate (201), the moving sealing member and the stopping member are both arranged in the installation channel (2011), the moving sealing member and the stopping member are respectively located on two opposite sides of the air hole (103), the moving sealing member is connected to the output end of the driving assembly (300), and under the drive of the driving assembly (300), the moving sealing member approaches or moves away from the stopping member to close or open the air hole (103).

3. The self-sealing isolation valve for an electron optical column according to claim 2, characterized in that, The moving sealing member includes a flexible connecting piece (202), a sealing block (203), and a connecting block (205); the connecting block (205) is connected to the output end of the driving assembly (300), one end of the flexible connecting piece (202) is connected to the connecting block (205) through a fixing screw (206), and the other end of the flexible connecting piece (202) is connected to the sealing block (203) through a floating screw (207); under the drive of the driving assembly (300), the connecting block (205) drives the sealing block (203) to approach or move away from the stopping member through the flexible connecting piece (202), and the bottom of the sealing block (203) closes or opens the air hole (103).

4. The self-sealing isolation valve for an electron optical column according to claim 3, characterized in that, Both the sealing block (203) and the connecting block (205) are wedge-shaped structures, and the bottom surfaces of the sealing block (203) and the connecting block (205) are flat straight surfaces; when the sealing block (203) is pushed by the connecting block (205) and is pressed against the stopping member, both the stopping member and the connecting block (205) can provide downward pressure.

5. The self-sealing isolation valve for an electron optical column according to claim 3, characterized in that, The flexible connecting piece (202) is made of brass.

6. The self-sealing isolation valve for an electron optical column according to claim 3, characterized in that, A second sealing ring (208) is arranged at the bottom of the sealing block (203), and when the sealing block (203) abuts against the stopping member, the second sealing ring (208) can completely cover the air hole (103).

7. The self-sealing isolation valve for an electron optical column according to claim 2, characterized in that, The stop member includes a stop pin (204) and a stop block (209). The stop block (209) is fixedly connected to the baffle plate (201). The stop pin (204) penetrates and is fixed within the stop block (209), and the stop pin (204) faces the movable sealing member to assist the movable sealing member in blocking the air hole (103).

8. The self-sealing isolation valve for an electron optical column according to any one of claims 1 to 7, characterized in that, The driving assembly (300) includes a cylinder driving member, a corrugated pipe (303), a transmission shaft (304), and a support housing (305). One end of the support housing (305) is connected to the mounting flange (106) on the side of the valve chamber (101), and the other end of the support housing (305) is provided with a concave cavity. The output end of the cylinder driving member is connected to one end of the transmission shaft (304). The other end of the transmission shaft (304) hermetically penetrates the corrugated pipe (303), the support housing (305), and the mounting flange (106) and then extends into the valve chamber (101) and is connected to the valve core assembly (200). Driven by the cylinder driving member, the transmission shaft (304) drives the valve core assembly (200) to close or open the air hole (103).

9. The self-sealing isolation valve for an electron optical column according to claim 8, characterized in that, The cylinder driving member includes a cylinder (301), a floating joint (302), a stop plate (306), and a telescopic guide rod (307). The output end of the cylinder (301) is connected to the transmission shaft (304) through the floating joint (302). The stop plate (306) is arranged at the output end of the cylinder (301). One end of the telescopic guide rod (307) is connected to the bottom of the concave cavity of the support housing (305), and the other end of the telescopic guide rod (307) is connected to the stop plate (306). Driven by the cylinder (301), the telescopic guide rod (307) and the transmission shaft (304) move synchronously.

10. The self-sealing isolation valve for an electron-optical column according to any one of claims 1 to 7, characterized in that, A vacuum connection hole (104) is provided on the side of the valve chamber (101), and the vacuum connection hole (104) is connected to a vacuum extraction assembly (400) through a pipeline. A first sealing ring (105) is provided on the top of the valve chamber (101).

Images