Driving mechanism and leveling and focusing device

Abstract

The invention provides a driving mechanism and a focusing and leveling device, and relates to the technical field of precision optical manufacturing. The drive mechanism includes a wedge block configured to move in a first direction; the first guide rail is arranged on the inclined surface of the wedge-shaped block; the flexible connecting block comprises a first end and a second end, and the first end is arranged on the first guide rail in a sliding mode; the second guide rail is slidably connected with the second end of the flexible connecting block, the second guide rail guides in a second direction, and the second direction is perpendicular to the first direction; the wedge-shaped block moves in the first direction so as to drive the flexible connecting block to slide in a guiding mode along the first guide rail through the first end and slide in a guiding mode along the second guide rail through the second end, and therefore movement of the wedge-shaped block in the first direction is converted into linear movement of the flexible connecting block in the second direction.

Description

Technical Field

[0001] The present disclosure relates to the technical field of precision optical manufacturing, and more particularly, to a driving mechanism and a leveling and focusing device. Background Art

[0002] A leveling and focusing stage is a high-precision mechanical platform used to provide precise position control in scientific research and industrial manufacturing. It enables precise leveling and focusing of samples or optical components placed on it, ensuring optimal working conditions. It is widely used in precision optical experiments, semiconductor manufacturing, and laser processing.

[0003] With the advancement of science and technology, nanometer-level positioning accuracy is increasingly required in a growing number of applications, such as advanced microscopy and ultra-precision manufacturing. However, current technologies mostly achieve micron-level positioning accuracy, which cannot meet the requirements of nanometer-level positioning. Furthermore, practical applications require a larger adjustment range to accommodate samples of varying sizes or complex process flows. Summary of the Invention

[0004] In view of this, the present disclosure provides a driving mechanism and a leveling and focusing device.

[0005] On the one hand, the present disclosure provides a driving mechanism, comprising: a wedge block, configured to move along a first direction; a first guide rail, arranged on the inclined surface of the wedge block; a flexible connection block, comprising a first end and a second end, the first end being slidably arranged on the first guide rail; a second guide rail, slidably connected to the second end of the flexible connection block, the guide setting of the second guide rail being in a second direction, the second direction being perpendicular to the first direction; wherein, the wedge block moves along the first direction to drive the flexible connection block to slide along the guide of the first guide rail through the first end and slide along the guide of the second guide rail through the second end, so as to convert the movement of the wedge block in the first direction into linear movement of the flexible connection block along the second direction.

[0006] According to an embodiment of the present disclosure, the second guide rail includes: a second guide rail slider and a second guide rail connecting block; the second end of the flexible connecting block is fixed on the second guide rail connecting block, and the second guide rail connecting block is fixed on the second guide rail slider; wherein, the second guide rail slider moves on the guide of the second guide rail, and the flexible connecting block is driven to move in the second direction by the second guide rail connecting block.

[0007] According to an embodiment of the present disclosure, the second guide rail further includes: a second guide rail guide rod; a groove is also provided on the second guide rail slider, and the second guide rail slider is slidably arranged on the second guide rail guide rod through the groove.

[0008] According to an embodiment of the present disclosure, it also includes: a third guide rail, the guide of the third guide rail is set to the first direction, and the wedge block is slidably set on the third guide rail; a screw, which is slidably connected to the wedge block; and a motor, which is fixedly connected to the screw; wherein the rotation of the motor drives the screw to move, so that the wedge block moves along the first direction on the third guide rail.

[0009] According to an embodiment of the present disclosure, the first guide rail includes: a first guide rail slider, fixedly connected to the first end of the flexible connecting block; a first guide rail guide rod, fixed on the inclined surface of the wedge block, and the first guide rail slider is slidably set on the first guide rail guide rod.

[0010] According to an embodiment of the present disclosure, the first guide rail includes a linear guide rail.

[0011] The second aspect of the present disclosure provides a leveling and focusing device, comprising: a spring, an upper plate and at least one driving mechanism; each driving mechanism comprises: a wedge block, configured to move along a first direction; a first guide rail, arranged on the inclined surface of the wedge block; a flexible connecting block, comprising a first end and a second end, the first end being slidably arranged on the first guide rail; the second guide rail, slidably connected to the second end of the flexible connecting block, the guide setting of the second guide rail being in a second direction, the second direction being perpendicular to the first direction; the spring block is slidably connected to the second guide rail, and the upper plate is fixedly connected to the spring block; wherein, the wedge block moves along the first direction to drive the flexible connecting block to slide along the guide of the first guide rail through the first end and slide along the guide of the second guide rail through the second end, so as to convert the movement of the wedge block in the first direction into a linear motion of the flexible connecting block along the second direction, driving the spring block and the upper plate to move along the second direction.

[0012] According to an embodiment of the present disclosure, the spring includes: a third end, fixedly connected to the upper plate; at least one fourth end, and one fourth end is slidably connected to the second guide rail of a driving mechanism; wherein, when the number of at least one fourth end is at least two, the flexible connecting blocks in at least two driving mechanisms drive the fourth end of the spring corresponding to the flexible connecting block to move in the second direction, controlling the movement displacement of at least two fourth ends to be the same or different.

[0013] According to an embodiment of the present disclosure, the third end is configured as an inner ring, and the fourth end is configured as an outer edge boss.

[0014] According to an embodiment of the present disclosure, the movement displacement of the upper plate is greater than 2 mm.

[0015] The driving mechanism and leveling and focusing device provided by the embodiments of the present disclosure have at least the following beneficial effects:

[0016] By providing a first guide rail on the wedge block, the wedge block's first-direction motion is converted into linear motion of the flexible connection block in the second direction. A second guide rail is provided to provide precise vertical guidance, ensuring that the flexible connection block moves in the second direction without any unnecessary lateral displacement or rotation, thus resolving the lack of precision found in conventional designs.

[0017] The first guide rail has zero play, ensuring zero backlash and error during the motion transfer from the wedge block to the flexible connector and then to the upper plate, achieving nanometer-level positioning accuracy. Furthermore, the connection between the spring, the second guide rail, and the upper plate allows the upper plate to move over a wide range in the second direction, meeting the needs of diverse application scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and other objects, features and advantages of the present disclosure will become more apparent through the following description of the embodiments of the present disclosure with reference to the accompanying drawings, in which:

[0019] Figure 1 Schematically shows a schematic diagram of a driving mechanism according to an embodiment of the present disclosure;

[0020] Figure 2 Schematically shows a view of the driving mechanism according to an embodiment of the present disclosure taken along the arrow F;

[0021] Figure 3 The following schematically shows the structure of a leveling and focusing device according to an embodiment of the present disclosure;

[0022] Figure 4 Schematically shows a side view of a leveling and focusing device according to an embodiment of the present disclosure;

[0023] Figure 5 Schematically shows a cross-sectional view of an AA leveling and focusing device according to an embodiment of the present disclosure;

[0024] Figure 6 The schematic diagram of the structure of the reed according to the embodiment of the present disclosure is shown schematically. DETAILED DESCRIPTION

[0025] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are merely exemplary and are not intended to limit the scope of the present disclosure. In the detailed description below, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of the embodiments of the present disclosure. However, it is apparent that one or more embodiments may be implemented without these specific details. In addition, in the following description, descriptions of well-known systems and technologies are omitted to avoid unnecessary confusion of the concepts of the present disclosure.

[0026] The terms used herein are only for describing specific embodiments and are not intended to limit the present disclosure. The terms "comprise," "include," etc. used herein indicate the presence of features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0027] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0028] Figure 1 The figure schematically shows a driving mechanism according to an embodiment of the present disclosure.

[0029] like Figure 1 As shown, the present disclosure provides a driving mechanism, including: a wedge block 204 , a first guide rail 205 , a flexible connection block 206 and a second guide rail 207 .

[0030] Wedge block 204 is configured to move in a first direction.

[0031] The first guide rail 205 is disposed on the inclined surface of the wedge block 204 .

[0032] The flexible connecting block 206 includes a first end and a second end, and the first end is slidably disposed on the first guide rail 205 .

[0033] The second guide rail 207 is slidably connected to the second end of the flexible connection block 206 . The second guide rail 207 is guided in a second direction that is perpendicular to the first direction.

[0034] In which, the wedge block 204 moves along the first direction to drive the flexible connection block 206 to slide along the first guide rail 205 through the first end and slide along the second guide rail 207 through the second end, so as to convert the movement of the wedge block 204 in the first direction into linear movement of the flexible connection block 206 along the second direction.

[0035] In an embodiment of the present disclosure, a first guide rail 205 is provided on the inclined surface of the wedge block 204. The guide rail is a high-precision pre-loaded guide rail with high guiding accuracy and no guiding gap, which can provide high-precision guiding and positioning. Ensure that the first end of the flexible connection block 206 can slide accurately along the inclined surface of the wedge block 204. The flexible connection block 206 serves as an intermediate connecting member, which can convert the first-direction movement of the wedge block 204 into the linear movement of the flexible connection block 206 along the second direction. The second guide rail 207 is provided in sliding connection with the second end of the flexible connection block 206, and the second guide rail 207 is guided in the second direction, which can provide precise second-direction guidance. Ensure that the flexible connection block 206 can only move in the second direction without any unnecessary lateral displacement or rotation.

[0036] Therefore, when the wedge block 204 moves in the first direction, it drives the first guide rail 205 mounted thereon to move together through its inclined surface. This converts the first-direction movement of the wedge block 204 into the second-direction movement of the flexible connection block 206. At the same time, because the second end of the flexible connection block 206 is slidably connected to the second guide rail 207, the flexible connection block 206 can only move in the second direction. In addition, the flexible connection block 206 adopts a double-sided local thin plate structure design, which allows the flexible connection block 206 to achieve slight angle adjustments. By setting up the first guide rail 205 without a guide gap, the system achieves a zero backlash and error accumulation during the motion transmission from the wedge block 204 to the flexible connection block 206, achieving nanometer-level positioning accuracy.

[0037] For example, the first direction may be a horizontal direction, and the second direction may be a vertical direction.

[0038] As wedge block 204 moves horizontally to the right, first guide rail 205, mounted on its inclined surface, also moves. The inclined design of wedge block 204 converts its horizontal motion into vertical (Z-axis) motion of flexible connecting block 206. The second end of flexible connecting block 206 is slidably connected to second guide rail 207, ensuring that flexible connecting block 206 moves only along the Z-axis. During this process, flexible connecting block 206 gradually rises to reach its target position.

[0039] Figure 2 The figure schematically shows an F-direction view of a driving mechanism according to an embodiment of the present disclosure.

[0040] like Figure 2 As shown, based on the above embodiment, the second guide rail 207 includes: a second guide rail slider 207-2 and a second guide rail connecting block 207-1.

[0041] The second end of the flexible connection block 206 is fixed to the second guide rail connection block 207 - 1 , and the second guide rail connection block 207 - 1 is fixed to the second guide rail slider 207 - 2 .

[0042] The second guide rail slider 207 - 2 moves on the guide of the second guide rail 207 and drives the flexible connection block 206 to move along the second direction through the second guide rail connection block 207 - 1 .

[0043] In an embodiment of the present disclosure, the second end of the flexible connection block 206 is fixed to the second guide rail slider 207-2 through the second guide rail connection block 207-1. The second guide rail slider 207-2 slides along the second direction under the guidance of the second guide rail 207, pushing the flexible connection block 206 to move along the second direction. Throughout the process, the second guide rail 207 provides precise vertical guidance to ensure that the flexible connection block 206 can only move along the Z-axis direction and allows necessary small angle adjustments. At the same time, the second guide rail connection block 207-1 adopts a flexible structural design to fix the second end of the flexible connection block 206 to the second guide rail slider 207-2. This non-rigid connection method can effectively avoid the problem of poor guide rail movement caused by direct rigid connection, thereby ensuring higher positioning accuracy.

[0044] Based on the above embodiment, the second guide rail further includes: a second guide rail guide rod 207-3 (see Figure 5 mark).

[0045] The second guide rail slider 207 - 2 is further provided with a groove, and the second guide rail slider 207 - 2 is slidably arranged on the second guide rail guide rod 207 - 3 through the groove.

[0046] Based on the above embodiment, the driving mechanism further includes: a third guide rail 203 , a lead screw 202 and a motor 201 .

[0047] The third guide rail 203 is guided in a first direction, and the wedge block 204 is slidably arranged on the third guide rail 203 and fixed on the base 100. It has high rigidity and gap-free characteristics to ensure that the wedge block 204 will not deflect or rotate during movement.

[0048] The lead screw 202 is slidably connected to the wedge block 204 so that the wedge block 204 can move along its axial direction when the lead screw 202 rotates.

[0049] The motor 201 is fixedly connected to the lead screw 202 to provide initial rotational power.

[0050] The motor 201 rotates to drive the lead screw 202 to move, so that the wedge block 204 moves along the first direction on the third guide rail 203 .

[0051] In an embodiment of the present disclosure, when the motor 201 is started, it outputs rotational power. The rotation of the motor 201 is transmitted to the lead screw 202 through a coupling or other means. The lead screw 202 cooperates with its nut portion through a thread, and the nut portion cooperates with the wedge block 204, thereby realizing the coupling between the lead screw 202 and the wedge block 204. When the lead screw 202 rotates, the wedge block 204 moves along the first direction under the guidance of the third guide rail 203. Due to the inclined surface design of the wedge block 204, this horizontal movement is converted into displacement in the vertical direction, and is finally converted into vertical movement of the flexible connection block 206 through the first guide rail 205 and the second guide rail 207. In this embodiment, the rotational motion of the motor 201 is converted into linear motion of the flexible connection block 206 through the motion conversion of the lead screw 202, the wedge block 204 and the first guide rail 205, resulting in a compact structure and high space utilization.

[0052] On the basis of the above embodiment, the first guide rail 205 includes: a first guide rail slider 205 - 1 and a first guide rail guide rod 205 - 2 .

[0053] The first guide rail slider 205 - 1 is fixedly connected to the first end of the flexible connecting block 206 .

[0054] The first guide rail guide rod 205 - 2 is fixed on the inclined surface of the wedge block 204 , and the first guide rail slider 205 - 1 is slidably disposed on the first guide rail guide rod 205 - 2 .

[0055] In the embodiment of the present disclosure, first guide rail guide rod 205-2 is mounted on the inclined surface of wedge block 204, and first guide rail slider 205-1 is fixed to flexible connection block 206. As wedge block 204 moves in a first direction, first guide rail 205, mounted on its inclined surface, also moves. First guide rail slider 205-1 moves up and down along first guide rail guide rod 205-2, converting the first-direction movement of wedge block 204 into the second-direction movement of flexible connection block 206.

[0056] The first guide rail 205 can be configured as a linear guide rail. By adopting a linear guide rail for motion coupling, the guiding rigidity of the guide rail can be fully utilized to ensure the consistent performance of forward motion and backward motion and the gapless transmission of motion.

[0057] Figure 3 The structural diagram of the leveling and focusing device according to an embodiment of the present disclosure is schematically shown.

[0058] Figure 4 A side view of a leveling and focusing device according to an embodiment of the present disclosure is schematically shown.

[0059] like Figure 3 and Figure 4As shown, the second aspect of the present disclosure provides a leveling and focusing device, including: a spring 101 , an upper plate 102 and at least one driving mechanism 200 .

[0060] Each driving mechanism 200 includes a wedge block 204 , a first guide rail 205 , a flexible connection block 206 and a second guide rail 207 .

[0061] The wedge block 204 is configured to move along a first direction.

[0062] The first guide rail 205 is disposed on the inclined surface of the wedge block 204 .

[0063] The flexible connecting block 206 includes a first end and a second end. The first end is slidably disposed on the first guide rail 205 .

[0064] The second guide rail 207 is slidably connected to the second end of the flexible connection block 206 . The second guide rail 207 is guided in a second direction that is perpendicular to the first direction.

[0065] The spring leaf 101 is slidably connected to the second guide rail 207 , and the upper plate 102 is fixedly connected to the spring leaf 101 .

[0066] The base 100 is used to support the leveling and focusing device.

[0067] The wedge block 204 moves in the first direction to drive the flexible connection block 206 to slide along the first guide rail 205 through the first end and slide along the second guide rail 207 through the second end, so as to convert the movement of the wedge block 204 in the first direction into a linear movement of the flexible connection block 206 in the second direction, driving the spring 101 and the upper plate 102 to move in the second direction.

[0068] The spring 101 is used to provide horizontal guide support and ensure that the entire platform can remain stable and flat when moving in the second direction.

[0069] The upper plate 102 is used to place samples or optical elements and perform leveling and focusing operations.

[0070] In the embodiment of the present disclosure, by cleverly combining the wedge block 204, the first guide rail 205, the flexible connection block 206 and the second guide rail 207, a high-precision conversion from the rotation of the motor 201 to the vertical movement of the upper plate 102 is achieved. Specifically, the movement of the flexible connection block 206 along the second direction drives the reed 101 to move synchronously through the connection between the second guide rail 207 and the reed 101, and then drives the upper plate 102 to perform precise vertical adjustment, meeting the needs of high-precision leveling and focusing. At the same time, the reed 101 has a certain elasticity and restoring force, and can be slightly deformed when affected by external forces, but will then automatically return to its original shape. When the flexible connection block 206 moves up or down, the reed 101 will move synchronously with it, ensuring the stability and flatness of the entire system.

[0071] The working principle of the driving mechanism 200 in the leveling and focusing device is the same as that described above for the driving mechanism 200 and will not be described in detail here.

[0072] Figure 5 The figure schematically shows a cross-sectional view of the leveling and focusing device along line AA according to an embodiment of the present disclosure.

[0073] Figure 6 The schematic diagram of the structure of the reed according to the embodiment of the present disclosure is shown schematically.

[0074] like Figure 5 and Figure 6 As shown, based on the above embodiment, the reed 101 includes: a third end 101 - 1 and at least one fourth end 101 - 2 .

[0075] The third end 101 - 1 is fixedly connected to the upper plate 102 .

[0076] At least one fourth end 101 - 2 is slidably connected to a second guide rail 207 of a driving mechanism 200 . Specifically, the fourth end 101 - 2 is fixed to a second guide rail slider 207 - 2 in a driving mechanism 200 .

[0077] In which, when the number of at least one fourth end 101-2 is at least two, the flexible connection blocks 206 in at least two driving mechanisms 200 drive the fourth end 101-2 of the reed 101 corresponding to the flexible connection block 206 to move along the second direction, controlling the movement displacement of at least two fourth ends 101-2 to be the same or different.

[0078] In the disclosed embodiment, first end 101-1 is fixedly connected to upper plate 102, ensuring that upper plate 102 moves with the overall motion of reed 101. Each fourth end 101-2 can be independently connected to a corresponding drive mechanism 200, allowing different drive mechanisms 200 to control the displacement of these endpoints, thereby achieving horizontal guidance of upper plate 102. By introducing a reed 101 design with multiple fourth ends 101-2 and using multiple drive mechanisms 200, the leveling and focusing device can achieve more flexible and precise motion control.

[0079] If the upper plate 102 needs to be lifted or lowered as a whole, the flexible connecting blocks 206 of all the driving mechanisms 200 should move synchronously, and the reed 101 should also move the same distance as a whole. This ensures that the upper plate 102 can achieve a sufficiently large up and down translation movement.

[0080] If the angle of the upper plate 102 needs to be adjusted, the drive mechanism 200 can be controlled to move to different displacements, and the fourth ends 101-2 of the reed 101 can follow suit and move different distances. Furthermore, the flexible connecting block 206 has the ability to adjust the angle slightly, and its flexible structural design enables slight angle adjustment of the upper plate 102.

[0081] For example, if there are three drive mechanisms 200, the corresponding number of fourth ends 101-2 of the reed 101 is three. The three drive mechanisms 200 are fixed to the base 100 in a triangular configuration, serving as three drive points. The three drive mechanisms 200-1, 200-2, and 200-3 convert the rotational motion of the motor 201 into linear motion of the flexible connecting block 206 through the motion conversion of the wedge block 204 and the first guide rail 205. This further propels the upper plate 102 in a second direction, and the combined motion of the three drive mechanisms 200-1, 200-2, and 200-3 achieves a long-range leveling and focusing motion.

[0082] The wedge blocks 204 in the three drive mechanisms can move in the same direction. The first guide rails 205 in drive mechanisms 200-2 and 200-3 can have the same orientation. The orientation of the first guide rail 205 in the other drive mechanism 200-1 can be opposite to the orientation of the first guide rails 205 in drive mechanisms 200-2 and 200-3. The three drive mechanisms 200 provide horizontal guidance for the spring 101, ensuring that the upper plate 102 can only be adjusted in the Z, Rx, and Ry directions, while maintaining high horizontal rigidity.

[0083] According to an embodiment of the present disclosure, the third end 101-1 is configured as an inner ring, and the fourth end 101-2 is configured as an outer edge boss. An outer edge boss is fixedly connected to a second guide rail slider 207-2 in a second guide rail 207 in a driving mechanism 200, and is connected to the flexible connection block 206 via the second guide rail connection block 207-1 to form a whole, so that the second direction movement of the flexible connection block 206 is transmitted to the upper plate 102 and can also be synchronously transmitted to the reed 101. The wedge block 204 simultaneously drives the flexible connection block 206, the outer edge boss portion of the reed 101, and the upper plate 102, while the upper plate 102 is fixed to the inner ring of the reed 101, thereby enabling the reed 101 and the upper plate 102 to achieve follow-up motion.

[0084] In the embodiment of the present disclosure, by configuring the connection between the spring 101, the upper plate 102, and the drive mechanism 200, the spring 101 moves synchronously with the upper plate 102, thereby preventing the spring 101 from limiting the movement of the upper plate 102 and achieving a movement displacement of the upper plate 102 greater than 2 mm. Conventional leveling and focusing devices typically place the spring between the upper plate and the base, with the drive mechanism connected only to the upper plate to drive the upper plate in the second direction. In this case, since the spring does not move as a whole with the drive mechanism in the second direction, the spring limits the movement of the upper plate.

[0085] The embodiments of the present disclosure are described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present disclosure. Although each embodiment has been described separately above, this does not mean that the measures in each embodiment cannot be used in combination to advantage. The scope of the present disclosure is defined by the appended claims and their equivalents. Without departing from the scope of the present disclosure, those skilled in the art may make various substitutions and modifications, which should all fall within the scope of the present disclosure.

Claims

1. A driving mechanism, characterized in that: include: a wedge-shaped block configured to move in a first direction; a first guide rail, provided on the inclined surface of the wedge-shaped block; a flexible connecting block comprising a first end and a second end, wherein the first end is slidably disposed on the first guide rail; a second guide rail, slidably connected to the second end of the flexible connecting block, wherein the second guide rail is set to guide in a second direction, and the second direction is perpendicular to the first direction; In which, the wedge block moves along the first direction to drive the flexible connection block to slide along the first guide rail through the first end and slide along the second guide rail through the second end, so as to convert the movement of the wedge block in the first direction into the linear movement of the flexible connection block along the second direction.

2. The driving mechanism according to claim 1, wherein: The second guide rail comprises: a second guide rail slider and a second guide rail connecting block; The second end of the flexible connecting block is fixed to the second guide rail connecting block, and the second guide rail connecting block is fixed to the second guide rail slider; The second guide rail slider moves on the guide of the second guide rail, and drives the flexible connecting block to move along the second direction through the second guide rail connecting block.

3. The driving mechanism according to claim 2, characterized in that: The second guide rail further includes: Second guide rail guide rod; The second guide rail slider is further provided with a groove, and the second guide rail slider is slidably arranged on the second guide rail guide rod through the groove.

4. The driving mechanism according to claim 1, wherein: Also includes: a third guide rail, wherein the guide of the third guide rail is set in a first direction, and the wedge block is slidably set on the third guide rail; a lead screw, slidably connected to the wedge block; a motor, fixedly connected to the lead screw; The rotation of the motor drives the lead screw to move, so that the wedge block moves along the first direction on the third guide rail.

5. The driving mechanism according to claim 1, characterized in that: The first guide rail comprises: a first guide rail slider, fixedly connected to the first end of the flexible connecting block; The first guide rail guide rod is fixed on the inclined surface of the wedge block, and the first guide rail slider is slidably arranged on the first guide rail guide rod.

6. The driving mechanism according to claim 5, characterized in that: The first guide rail includes a linear guide rail.

7. A leveling and focusing device, characterized in that: include: a reed, an upper plate, and at least one drive mechanism; Each drive mechanism includes: a wedge-shaped block configured to move in a first direction; a first guide rail, provided on the inclined surface of the wedge-shaped block; a flexible connecting block comprising a first end and a second end, wherein the first end is slidably disposed on the first guide rail; a second guide rail, slidably connected to the second end of the flexible connecting block, wherein the second guide rail is guided in a second direction, the second direction being perpendicular to the first direction; the spring is slidably connected to the second guide rail, and the upper plate is fixedly connected to the spring; The wedge block moves in the first direction to drive the flexible connecting block to slide along the first guide rail through the first end and slide along the second guide rail through the second end, so as to convert the movement of the wedge block in the first direction into linear movement of the flexible connecting block along the second direction, driving the spring and the upper plate to move along the second direction.

8. The leveling and focusing device according to claim 7, characterized in that: The reed comprises: The third end is fixedly connected to the upper plate; at least one fourth end, wherein the fourth end is slidably connected to a second guide rail of the driving mechanism; Wherein, when the number of the at least one fourth end is at least two, The flexible connection blocks in at least two driving mechanisms drive the fourth ends of the spring corresponding to the flexible connection blocks to move along the second direction, and control the movement displacements of the at least two fourth ends to be the same or different.

9. The leveling and focusing device according to claim 8, characterized in that: The third end is configured as an inner ring, and the fourth end is configured as an outer edge boss.

10. The leveling and focusing device according to claim 7, characterized in that: The movement displacement of the upper plate is greater than 2 mm.

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