Semiconductor-grade silicon dioxide vacuum sintering furnace

Abstract

The invention provides a semiconductor grade silicon dioxide vacuum sintering furnace which comprises a furnace body, a heating cavity is formed in the middle of the furnace body, and a rear door body is arranged at the first end of the furnace body; the material dragging trolley is arranged in the furnace body in a sliding mode, and a workpiece is placed on the material dragging trolley; the front door body is arranged on one side of the material dragging trolley, and when the material dragging trolley slides into the heating cavity, the front door body seals the second end of the furnace body; the device has the beneficial effects that through the arrangement of the pressing and rotating assembly, a workpiece on the material dragging trolley can be fixed from the two ends, it is ensured that the workpiece is always kept stable in the heating process, and the workpiece can be driven to rotate by the pressing and rotating assembly. In the heating process, the workpieces can be heated more uniformly through rotation of the workpieces, the heating effect and the product quality are improved, the workpieces can be automatically assembled and disassembled through arrangement of the material dragging trolley, the labor intensity of workers is reduced, and the working efficiency is improved.

Description

Technical Field

[0001] The present application belongs to the field of vacuum furnace technology, and specifically relates to a semiconductor-grade silicon dioxide vacuum sintering furnace. Background Art

[0002] With the increasing demands for material performance in high-end manufacturing, high-temperature sintering and heat treatment of silica powder workpieces in a vacuum or protective atmosphere have become key technologies. Existing technologies for processing such workpieces present the following significant challenges: Under static heating, the distance between the workpiece's circumferential surface and the heat source varies, creating a temperature differential that can lead to coating material decomposition and reduced interfacial bonding, impacting the functionality of precision components. Traditional equipment relies on manual loading and unloading, which is not only inefficient but also leaves the heating chamber exposed to the atmosphere for extended periods, reducing product quality. Summary of the Invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art or related art.

[0004] In order to solve the above problems, the present application provides a semiconductor-grade silicon dioxide vacuum sintering furnace, comprising:

[0005] A furnace body, wherein a heating chamber is provided in the middle of the furnace body, and a rear door is provided on the first end of the furnace body;

[0006] A material dragging trolley, the material dragging trolley is slidably arranged in the furnace body, and a workpiece is placed on the material dragging trolley;

[0007] A front door body is provided on one side of the material dragging vehicle, and when the material dragging vehicle slides into the heating chamber, the front door body seals the second end of the furnace body;

[0008] A pressing rotating assembly is provided on the front door body and the rear door body, and can fix the workpiece located in the heating chamber along the axial direction and drive the workpiece to rotate.

[0009] Optionally, the compacting and rotating assembly includes:

[0010] A first pressing head is provided on the rear door body, and a first driving member is provided on one side of the first pressing head, and the first driving member is used to drive the first pressing head to rotate;

[0011] The second pressing head is provided on the front door body. The second pressing head is provided with a second driving member, and the second driving member is used for driving the second pressing head to move along the axial direction of the workpiece.

[0012] Optionally, a third driving member is further included, which is arranged on the side of the front door body away from the towing vehicle and is used to drive the towing vehicle and the front door body to move.

[0013] Optionally, it further includes a guide rail, the material dragging vehicle is arranged on the guide rail, and the guide rail is slidably connected to the furnace body.

[0014] Optionally, a fourth driving member is provided between the guide rail and the material dragging vehicle, and the fourth driving member is used to drive the material dragging vehicle to rise and fall on the guide rail.

[0015] Optionally, a heater is provided in the furnace body, and the heater is used to heat the heating cavity.

[0016] Optionally, a heat-insulating layer is provided in the furnace body, and the heat-insulating layer is provided between the heater and the furnace body.

[0017] Optionally, the furnace body is also connected to a vacuum exhaust system.

[0018] Optionally, the furnace body is also provided with an air charging and discharging system and an air cooling and heat exchange system.

[0019] Optionally, a locking member is provided on the furnace body, and the locking member is used to lock and fix the front door body and the rear door body to the furnace body.

[0020] Beneficial effects

[0021] A semiconductor-grade silica vacuum sintering furnace provided in an embodiment of the present invention utilizes a compacting and rotating assembly to secure a workpiece on a trolley at both ends, ensuring stability during heating and enabling rotation. The rotation of the workpiece during heating allows for more uniform heating, improving heating efficiency and product quality. The trolley also automates workpiece loading and unloading, reducing labor intensity and improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a structural diagram of the front door and furnace body of the present invention in an open state;

[0023] Figure 2 This is a structural diagram of the sealed state of the front door and furnace body of the present invention.

[0024] The reference numerals indicate:

[0025] 1. Furnace body; 2. Rear door; 3. Drag trolley; 4. Front door; 5. First pressure head; 6. First driving member; 7. Second pressure head; 8. Second driving member; 9. Third driving member; 10. Guide rail; 11. Fourth driving member; 12. Heater; 13. Insulation layer; 14. Vacuum exhaust system; 15. Air charging and discharging system; 16. Air-cooled heat exchange system; 17. Locking member. DETAILED DESCRIPTION

[0026] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0027] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature identified as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0028] In this application, unless otherwise specified or limited, the terms "mounted," "connected," "connect," "fixed," etc. should be understood broadly. For example, they may refer to fixed connection, detachable connection, or integral connection; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0029] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0030] See also Figure 1-2 As shown, according to an embodiment of the present application, a semiconductor-grade silicon dioxide vacuum sintering furnace is provided, comprising:

[0031] A furnace body 1, a heating chamber is provided in the middle of the furnace body 1, and a rear door body 2 is provided on the first end of the furnace body 1;

[0032] A material dragging trolley 3 is slidably disposed in the furnace body 1 , and a workpiece is placed on the material dragging trolley 3 ;

[0033] A front door body 4 is provided on one side of the material dragging vehicle 3. When the material dragging vehicle 3 slides into the heating chamber, the front door body 4 seals the second end of the furnace body 1;

[0034] A pressing rotating assembly is provided on the front door body 4 and the rear door body 2 , and can fix the workpiece in the heating chamber along the axial direction and drive the workpiece to rotate.

[0035] Specifically, the furnace body 1 serves as the main frame of the entire vacuum furnace, and the heating chamber opened in the middle is the area where the workpiece is heated. The operating temperature inside the heating chamber is around 1600°C. The heating chamber is lined with a special thermal insulation material to effectively reduce heat loss and improve energy efficiency. A rear door 2 is provided at the first end of the furnace body 1. The rear door 2 is tightly connected to the furnace body 1 to ensure that the heating chamber always maintains a vacuum state during operation of the equipment. When maintenance or cleaning of the components in the heating chamber is required, the rear door 2 can be opened to facilitate entry by staff.

[0036] The drag trolley 3 slides stably within the furnace body 1. Its surface has been specially treated to ensure sufficient strength and high-temperature resistance, ensuring the safe placement of various workpieces. In actual operation, the worker places the workpiece to be processed on the drag trolley 3, which is then driven externally to slowly slide into the heating chamber. The entire process is simple and efficient, effectively preventing damage to the workpiece. The external drive can be powered by an electric device, enabling automated loading and improving work efficiency.

[0037] The front door 4 is provided on one side of the material trolley 3. When the material trolley 3 slides into the heating chamber, the front door 4 seals the second end of the furnace body 1. The front door 4 uses a multi-layer sealing material to ensure that the heating chamber can still maintain a good vacuum state under high temperature and high pressure working environment.

[0038] The compression and rotational assembly is mounted on the front door 4 and the rear door 2. During heating, the compression and rotational assembly secures the workpiece axially within the heating chamber, ensuring stability during heating. It also drives the workpiece in rotation. This rotation ensures more even heating, improving heating efficiency and product quality.

[0039] The compacting and rotating assembly comprises:

[0040] A first pressing head 5 is provided on the rear door body 2 , and a first driving member 6 is provided on one side of the first pressing head 5 , and the first driving member 6 is used to drive the first pressing head 5 to rotate;

[0041] The second pressing head 7 is provided on the front door body 4 . The second pressing head 7 is provided with a second driving member 8 . The second driving member 8 is used to drive the second pressing head 7 to move along the axial direction of the workpiece.

[0042] Specifically, the compacting rotating assembly includes a first pressing head 5, a first driving member 6, a second pressing head 7 and a second driving member 8. The first pressing head 5 is installed on the rear door body 2, and a fixing frame is installed on the drag cart 3. The fixing frame is made of high-temperature resistant material. After the workpiece is placed on the fixing frame, the axis of the workpiece is located on the same axis as the first pressing head 5 and the second pressing head 7. After the drag cart 3 drives the workpiece into the heating chamber, it directly contacts one end of the workpiece. The first pressing head 5 is made of a special alloy material that is resistant to high temperature and high strength to ensure that it can fit the workpiece tightly under high pressure and high temperature environment and provide stable compacting force. The first driving member 6 equipped on one side of the first pressing head 5 is usually a servo motor that can drive the first pressing head 5 to rotate.

[0043] The second pressing head 7 is arranged on the front door body 4, and is responsible for pressing from the other end of the workpiece and adjusting the position in the axial direction. The second pressing head 7 is also made of a special high-temperature resistant alloy. The second driving member 8 on the second pressing head 7 mostly adopts an electric push rod or a hydraulic drive device. Taking the electric push rod as an example, when it is necessary to perform a pressing operation on the workpiece, the control system issues a command, and the telescopic rod of the electric push rod extends, pushing the second pressing head 7 to move along the axial direction of the workpiece until it is in close contact with the workpiece and applies a suitable pressing force, fixing the workpiece between the first pressing head 5 and the second pressing head 7. A damper is installed between the second driving member 8 and the second pressing head 7 to achieve smooth pressing and avoid damage to the workpiece.

[0044] During use, after the drag cart 3 delivers the workpiece into the heating chamber, the front door 4 closes and seals the second end of the furnace body 1. At this time, the second drive member 8 is started, pushing the second pressure head 7 to move toward the workpiece, contacting one end of the workpiece and applying a certain clamping force, fixing the workpiece between the first pressure head 5 and the second pressure head 7. Subsequently, the first drive member 6 drives the first pressure head 5 to rotate, thereby driving the workpiece to start rotating. During the entire heating process, the first pressure head 5 continues to rotate to ensure that the workpiece is evenly heated, while the second pressure head 7, under the control of the second drive member 8, is fine-tuned in the axial direction as needed to ensure that the workpiece is always in a stable clamping state, avoiding workpiece position displacement due to thermal expansion and contraction or other factors. When the heating is completed, the second drive member 8 drives the second pressure head 7 back to its original position, the front door 4 opens, and the drag cart 3 transports the workpiece out of the heating chamber.

[0045] The semiconductor-grade silicon dioxide vacuum sintering furnace further includes a third driving member 9 , which is disposed on a side of the front door body 4 away from the material trolley 3 and is used to drive the material trolley 3 and the front door body 4 to move.

[0046] Specifically, a third drive member 9 is mounted on the side of the front door 4 away from the trolley 3 and is used to drive the trolley 3 and the front door 4. The third drive member 9 is a drive trolley or a power-adaptable motor coupled with a screw drive mechanism. This combination efficiently converts the motor's rotational motion into linear motion, achieving precise displacement control. In actual operation, when the trolley 3 with the workpiece placed on it needs to be transported into the heating chamber of the furnace body 1, the operator issues a command through the control system, and the third drive member 9 activates and propels the front door 4 and the connected trolley 3 synchronously into the interior of the furnace body 1. The trolley 3 slides smoothly into the heating chamber along the preset track within the furnace body 1. When the trolley 3 is fully inside the heating chamber, the front door 4 accurately reaches the sealing position at the second end of the furnace body 1, completing the sealing of the furnace body 1. After heating is completed, the third drive member 9 pulls the front door 4 and the trolley 3 out of the heating chamber. This allows the finished workpiece to be smoothly transported out of the furnace body 1, facilitating subsequent processing steps.

[0047] By setting the third drive member 9, the semiconductor-grade silica vacuum sintering furnace realizes the automated movement of the drag cart 3 and the front door body 4, greatly improving work efficiency and reducing the errors and safety hazards that may be caused by manual operation. At the same time, it cooperates with the clamping and rotating assembly to make the entire workpiece processing process smoother and more efficient. During the process of the clamping and rotating assembly fixing and rotating the workpiece for heating, the third drive member 9 ensures the stability of the drag cart 3 and the front door body 4, providing good external conditions for the heating process. When the heating is completed, the third drive member 9 can quickly transport the processed workpiece out and prepare for the next processing.

[0048] The semiconductor-grade silicon dioxide vacuum sintering furnace further includes a guide rail 10 , on which the material dragging vehicle 3 is disposed, and the guide rail 10 is slidably connected to the furnace body 1 .

[0049] Specifically, the guide rails 10 are slidably connected to the furnace body 1, and the material trolley 3 is mounted on these rails. Rollers compatible with the rails 10 are located on the bottom of the furnace body 1. This significantly reduces resistance to the movement of the material trolley 3, ensuring smooth operation. Driven by the third drive member 9, the guide rails 10 at the bottom of the material trolley 3 move in a predetermined direction. When a workpiece needs to be delivered to the heating chamber, the third drive member 9 pushes the front door 4 and the connected material trolley 3, allowing them to slide precisely into the heating chamber in the center of the furnace body 1.

[0050] A fourth driving member 11 is provided between the guide rail 10 and the material dragging vehicle 3 , and the fourth driving member 11 is used for driving the material dragging vehicle 3 to move up and down on the guide rail 10 .

[0051] Specifically, the fourth drive member 11 is arranged between the guide rail 10 and the trolley 3, and becomes the power source for realizing the lifting and lowering function of the trolley 3 on the guide rail 10. The fourth drive member 11 usually adopts an electric lifting mechanism, for example, composed of components such as a motor, a reducer, a screw and a nut. In actual operation scenarios, the fourth drive member 11 can drive the workpiece to move and adjust its height so that the workpiece can be pressed between the first pressure head 5 and the second pressure head 7. For example, when facing some workpieces, the trolley 3 needs to be raised or lowered to a specific height to ensure that the workpiece can be fixed by the first pressure head 5 and the second pressure head 7. The operator sends instructions to the fourth drive member 11 through the control system, thereby pushing the trolley 3 to rise and fall on the guide rail 10. During the lifting process, the control system of the fourth drive member 11 can monitor the position of the trolley 3 in real time, and make precise adjustments according to the preset height value to ensure that the trolley 3 can accurately reach the target height.

[0052] When the drag cart 3 is ready to enter the heating chamber of the furnace body 1 under the action of the third driving member 9, the fourth driving member 11 can pre-adjust the drag cart 3 to a suitable height to ensure that the first pressure head 5 and the second pressure head 7 can fix the two ends of the workpiece. When the heating is completed, the fourth driving member 11 can adjust the drag cart 3 to a height that is convenient for the operator to load and unload the workpiece, thereby facilitating subsequent operations.

[0053] A heater 12 is provided in the furnace body 1 , and the heater 12 is used to heat the heating cavity.

[0054] Specifically, heater 12 is positioned within furnace body 1 and prevents interference with slide rail 10 or material trolley 3. It is constructed from a high-temperature-resistant, high-resistance electrothermal material, such as high-purity graphite. This alloy possesses excellent high-temperature resistance, enabling stable operation in high-temperature environments for extended periods without deformation or melting. Its high resistivity allows for efficient conversion of electrical energy into thermal energy without volatilization and contamination of the workpiece under high-temperature, vacuum conditions. Heater 12 is typically rod-shaped or tubular.

[0055] When the semiconductor-grade silica vacuum sintering furnace is started and enters the operating state, the power supply supplies electrical energy to the heater 12. Since the heater 12 has a high resistance, when current passes through it, the electrical energy is quickly converted into thermal energy, and the temperature of the heater 12 rises sharply, which in turn radiates a large amount of heat into the heating chamber to heat the workpiece.

[0056] A heat-insulating layer 13 is provided in the furnace body 1 , and the heat-insulating layer 13 is provided between the heater 12 and the furnace body 1 .

[0057] Specifically, insulation layers 13 are also installed on the front door 4 and the rear door 2. Insulation layers 13 are made of high-performance, high-purity insulation materials with extremely low thermal conductivity, such as graphite felt. This material exhibits excellent thermal insulation properties, effectively preventing heat from dissipating from the heating chamber to the exterior of the furnace body 1. Graphite felt boasts advantages such as light weight, high-temperature resistance, and excellent chemical stability. It maintains a stable structure and performance even in high-temperature environments, providing a reliable thermal barrier for the heating chamber.

[0058] When heater 12 is powered on and generates heat, providing the required heat for the workpiece within the heating chamber, insulation layer 13 securely traps the majority of the heat generated by heater 12 within the heating chamber. This not only allows the heating chamber to quickly reach and maintain a stable high-temperature environment, meeting the process requirements for workpiece heat treatment, but also significantly reduces heat leakage outside of furnace body 1. Compared to a process without insulation layer 13, the presence of insulation layer 13 significantly reduces energy consumption, improves energy efficiency, and saves companies significant production costs.

[0059] During actual operation, the thermal insulation performance of insulation layer 13 also significantly impacts the temperature uniformity and stability within the heating chamber. Because insulation layer 13 effectively reduces heat loss, the temperature distribution within the heating chamber becomes more uniform, avoiding temperature variations caused by localized heat loss. This is crucial for ensuring the quality of workpiece heat treatment, especially for precision workpieces requiring extremely high temperature uniformity. Insulation layer 13 ensures that all parts of the workpiece are treated under the same temperature conditions, thereby improving the performance and quality consistency of the workpiece.

[0060] In addition, the insulation layer 13 protects the furnace body 1 from high temperatures. The heater 12 generates extremely high temperatures during operation. Without the insulation layer 13, these high temperatures could damage the materials of the furnace body 1, shortening its service life. The insulation layer 13 effectively lowers the surface temperature of the furnace body 1, reducing the thermal stress caused by high temperatures, extending its service life, and improving the reliability and stability of the equipment.

[0061] The furnace body 1 is also connected to a vacuum pumping system 14 .

[0062] Specifically, the vacuum exhaust system 14 is mainly composed of a vacuum pump, a vacuum pipe, a valve, and a vacuum measuring device. The vacuum pipe is responsible for connecting the vacuum pump to the furnace body 1. Its material is usually stainless steel to ensure that the performance of the workpiece will not be affected by corrosion and oxidation during long-term use. The valve is installed on the vacuum pipe to control the flow direction and flow rate of the gas. By precisely controlling the opening and closing of the valve, the vacuum degree in the furnace can be accurately adjusted. For example, at the initial start-up of the equipment, the corresponding valve is opened to allow the vacuum pump to quickly exhaust the furnace body 1; when the vacuum degree in the furnace is close to the preset value, the valve opening is adjusted to fine-tune the vacuum degree to ensure that the vacuum degree in the furnace is stable within the range required by the process.

[0063] The vacuum measuring device monitors the vacuum level inside the furnace in real time and feeds this data back to the control system. Common vacuum measuring devices include thermocouple vacuum gauges and ionization vacuum gauges. These devices accurately transmit this information to the control system, which then adjusts the operating state of the vacuum pumping system 14 in real time based on the preset vacuum level, ensuring a stable vacuum environment within the furnace that meets process requirements.

[0064] In the working process of the semiconductor-grade silica vacuum sintering furnace, when the drag cart 3 delivers the workpiece into the heating chamber, the front door body 4 and the rear door body 2 are closed and sealed, and the vacuum exhaust system 14 is started. The vacuum pump starts working and extracts the air in the furnace body 1 through the vacuum pipe. As the air is continuously extracted, the air pressure in the furnace gradually decreases. When the vacuum measuring device detects that the vacuum degree in the furnace reaches the preset starting heating vacuum degree, the heater 12 starts to energize and heat the workpiece. During the heating process, the vacuum exhaust system 14 continues to work to maintain the vacuum environment in the furnace. Because in a vacuum state, it can effectively reduce the oxidation and contamination of the workpiece by gas molecules, while improving the heat transfer efficiency, so that the workpiece can be heated more evenly and quickly, thereby improving the quality and effect of the heat treatment. When the heating is completed, the vacuum exhaust system 14 continues to operate until the drag cart 3 transports the workpiece out of the heating chamber and the front door body 4 is opened.

[0065] The furnace body 1 is also provided with a gas charging and discharging system 15 and an air cooling and heat exchange system 16 .

[0066] Specifically, the gas filling and discharging system 15 is mainly composed of a gas source, a gas pipeline, a valve, and a pressure control device. The gas source can provide different types of gases according to the process requirements, such as nitrogen, argon and other inert gases, which can protect the workpiece and prevent oxidation during the heat treatment process.

[0067] The gas pipeline connects the gas source to the furnace body 1 and is constructed of corrosion-resistant, high-strength tubing to ensure stable and safe gas delivery. Valves are installed on the gas pipeline. By precisely controlling the opening and closing of the valves and their degree of opening, precise regulation of gas flow and pressure is achieved. The pressure control device monitors the gas pressure within the furnace in real time and provides feedback control of the valve based on a preset pressure value, ensuring that the gas pressure within the furnace remains stable within the process requirements.

[0068] During actual operation, after the workpiece is heated, the furnace needs to be flushed with gas. The gas charging and discharging system 15 opens the corresponding valves according to the process settings, and fills the furnace body 1 with a specific gas at a certain flow rate and pressure. This not only helps the workpiece cool quickly, but also prevents oxidation during the cooling process, improving the surface quality and performance of the workpiece. When equipment maintenance is required or the furnace door needs to be opened, the gas charging and discharging system 15 releases the gas from the furnace, restoring the pressure to normal, ensuring the safety of operators and normal maintenance of the equipment.

[0069] The air-cooling heat exchange system 16 is mainly composed of components such as a fan, an air duct, a heat exchanger and a temperature sensor.

[0070] The fan is the power source of the air-cooled heat exchange system 16, providing strong wind to deliver cooling air into the furnace body 1. Air ducts ensure that the cooling air is evenly distributed within the furnace, enhancing the cooling effect. The heat exchanger exchanges heat between the cooling air and the furnace, causing the cooling air to absorb heat and increase its temperature, while simultaneously lowering the furnace temperature. A temperature sensor monitors the furnace temperature in real time and feeds this data back to the control system.

[0071] When the heating of the workpiece is completed, the air-cooled heat exchange system 16 is started. The fan draws in cold air from the outside and transports it to the furnace body 1 through the air duct. As the cold air flows in the furnace, it exchanges heat with the high-temperature workpiece and the furnace body 1, and its temperature rises after absorbing heat. Then, the air with heat returns to the heat exchanger through the air duct, exchanges heat with the external cooling medium (such as cold water) in the heat exchanger, and after the temperature is lowered, it is sent back into the furnace by the fan, forming a circulating cooling process. In this way, the air-cooled heat exchange system 16 can quickly and efficiently reduce the temperature in the furnace, so that the workpiece can reach the required cooling rate in a short time, meeting the requirements of different heat treatment processes.

[0072] During the workpiece heating stage, the vacuum exhaust system 14 draws a vacuum into the furnace, the heater 12 provides heat, and the insulation layer 13 reduces heat loss to ensure that the workpiece is evenly heated in a vacuum environment. When the heating is completed, the charging and discharging system 15 first fills the furnace with a specific gas to create favorable conditions for the cooling process of the air-cooled heat exchange system 16. The air-cooled heat exchange system 16 starts quickly and quickly reduces the temperature in the furnace by circulating cooling air. At the same time, the charging and discharging system 15 adjusts the gas flow and pressure in time according to the pressure in the furnace and the process requirements to ensure the stability and safety of the entire cooling process. Throughout the process, the control system accurately controls each system based on the feedback data from temperature sensors, pressure sensors, etc., to ensure that the semiconductor-grade silica vacuum sintering furnace can operate efficiently and stably, providing process guarantees for the heat treatment of workpieces.

[0073] The furnace body 1 is provided with a locking member 17 , and the locking member 17 is used to lock and fix the front door 4 and the rear door 2 to the furnace body 1 .

[0074] Specifically, the locking member 17 is typically a high-strength mechanical locking device consisting of a lock catch, a lock hook, a transmission mechanism, and a control component. The lock catch and lock hook are respectively installed at corresponding positions on the furnace body 1, the front door 4, and the rear door 2. They are capable of withstanding significant pressure and tension, ensuring a secure locking state during operation.

[0075] The transmission mechanism converts the control unit's commands into the movement of the locking collar. Common transmission methods include electric, pneumatic, or hydraulic drives. In the case of electric transmission, for example, the motor drives the locking collar through gears, chains, and other transmission components, achieving the opening and closing action.

[0076] The control component is connected to the equipment's control system and receives instructions from the operator or automated program. When the front door 4 and rear door 2 need to be closed, the control system sends a signal to the control component of the locking member 17. The control component drives the transmission mechanism, causing the locking ring to tightly engage, firmly fixing the front door 4 and rear door 2 to the furnace body 1. During equipment operation, the control component also monitors the status of the locking member 17 in real time. If an abnormality is detected, such as a loose lock or incomplete locking, it will immediately feedback to the control system, which will take appropriate measures, such as issuing an alarm or suspending equipment operation, to ensure the safety of the equipment and personnel.

[0077] The above are merely preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, and improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application. The above are merely preferred embodiments of the present application. It should be noted that those skilled in the art may make various improvements and variations without departing from the technical principles of the present application, and such improvements and variations shall also be considered within the scope of protection of the present application.

Claims

1. A semiconductor-grade silicon dioxide vacuum sintering furnace, characterized in that: include: A furnace body (1), wherein a heating chamber is provided in the middle of the furnace body (1), and a rear door body (2) is provided on the first end of the furnace body (1); A material dragging trolley (3), the material dragging trolley (3) is slidably arranged in the furnace body (1), and a workpiece is placed on the material dragging trolley (3); A front door body (4), the front door body (4) being arranged on one side of the material dragging vehicle (3), and when the material dragging vehicle (3) slides into the heating chamber, the front door body (4) seals the second end of the furnace body (1); A pressing rotating assembly is provided on the front door body (4) and the rear door body (2), and can fix the workpiece located in the heating chamber in the axial direction and drive the workpiece to rotate.

2. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 1, characterized in that: The compacting and rotating assembly comprises: A first pressing head (5), the first pressing head (5) is arranged on the rear door body (2), a first driving member (6) is arranged on one side of the first pressing head (5), and the first driving member (6) is used to drive the first pressing head (5) to rotate; A second pressing head (7), the second pressing head (7) is arranged on the front door body (4), and a second driving member (8) is arranged on the second pressing head (7), and the second driving member (8) is used to drive the second pressing head (7) to move along the axial direction of the workpiece.

3. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 1, characterized in that: It also includes a third driving member (9), which is arranged on the side of the front door body (4) away from the towing vehicle (3) and is used to drive the towing vehicle (3) and the front door body (4) to move.

4. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 1, characterized in that: It also includes a guide rail (10), the material dragging vehicle (3) is arranged on the guide rail (10), and the guide rail (10) is slidably connected to the furnace body (1).

5. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 4, characterized in that: A fourth driving member (11) is provided between the guide rail (10) and the material dragging vehicle (3), and the fourth driving member (11) is used to drive the material dragging vehicle (3) to rise and fall on the guide rail (10).

6. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 1, characterized in that: A heater (12) is provided in the furnace body (1), and the heater (12) is used to heat the heating chamber.

7. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 6, characterized in that: A heat-insulating layer (13) is provided in the furnace body (1), and the heat-insulating layer (13) is provided between the heater (12) and the furnace body (1).

8. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 1, characterized in that: The furnace body (1) is also connected to a vacuum exhaust system (14).

9. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 1, characterized in that: The furnace body (1) is also provided with an air charging and discharging system (15) and an air cooling and heat exchange system (16).

10. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 1, characterized in that: The furnace body (1) is provided with a locking member (17), and the locking member (17) is used to lock and fix the front door body (4) and the rear door body (2) on the furnace body (1).

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