A silicon wafer handling robot for easy cleaning

By introducing a snap-fit ​​shell, constraint cylinder, and auxiliary tube structure into the silicon wafer processing robot, the stability and spacing issues of silicon wafers during clean processing are solved, achieving stable constraint and efficient cleaning of silicon wafers.

CN120581498BActive Publication Date: 2026-06-23LIANYUNGANG SANHANG YINGTONG TECHNOLOGY DEVELOPMENT CO LTD
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Patent Information

Application Number
CN202510716356.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-05-30
Publication Date
2026-06-23
Estimated Expiration
2045-05-30

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Abstract

The application provides a silicon wafer processing robot convenient for cleaning, and belongs to the technical field of robots, and comprises a clean box, one side of the clean box is provided with a walking arm, the middle of the walking arm is provided with a hollow structure, a threaded rod is arranged in the walking arm, one side of the threaded rod is connected with a motor X, a displacement table is arranged on the threaded rod and is in sliding connection with the hollow part, a connecting frame is connected to the displacement table, and two electric push rods are connected to the two sides of the connecting frame. The application solves the problem that the general robot matched with the containing frame is open at the top, which makes the silicon wafer not stable enough during cleaning, cannot perform some actions for accelerating cleaning, makes the silicon wafer deviate or even separate from the containing frame, and the placing distance between the silicon wafers is not enough, which hinders the processing of the silicon wafers during cleaning.
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Citation Information

Patent Citations

  • Silicon wafer cleaning tank and cleaning equipment with same

    CN117059530A

  • Semi-automatic cleaning equipment for high-purity silicon material with universal workpiece assisting in positioning

    CN118352286A