X-ray reflector diffraction efficiency calibration device and calibration method

Abstract

The invention relates to an X-ray reflector diffraction efficiency calibration device and calibration method, belongs to the technical field of X-ray reflector calibration, and solves the technical problem of low calibration precision of the X-ray reflector diffraction efficiency. The device comprises an X-ray emitting flange, a vacuum four-dimensional adjusting device, a vacuum and four-dimensional adjusting device controller, an adjustable element bracket, an X-ray detector, a cavity three-dimensional adjusting bracket, an X-ray source and a vacuum pump. The calibration method comprises the following steps: installing the X-ray reflector to be calibrated, and vacuumizing; the X-ray reflector to be measured generates diffraction; adjusting the positions of an X-ray reflector to be calibrated and an X-ray detector for receiving diffracted X-rays, and solidifying a diffraction light path; and adjusting the energy of the incident X-ray to obtain a diffraction efficiency-incident energy relation curve at the diffraction angle. The X-ray reflector diffraction efficiency calibration method is used for X-ray reflector diffraction efficiency calibration.

Description

Technical Field

[0001] The present invention belongs to the technical field of X-ray reflector calibration, and in particular relates to an X-ray reflector diffraction efficiency calibration device and a calibration method. Background Art

[0002] The diffraction efficiency of X-ray reflectors is a crucial parameter. Accurate calibration of the diffraction efficiency in the extreme ultraviolet-soft X-ray band is an essential step in the quantitative diagnosis of plasma parameters.

[0003] Currently, diffraction efficiency calibration typically uses an angle scanning method. This involves modulating the angle at which a monoenergetic X-ray is incident on an X-ray reflector to determine the intensity of diffracted X-rays of that energy at different angles, thereby generating a curve of diffraction intensity versus diffraction angle. By integrating the angle, the total diffraction efficiency of the X-ray reflector for a specific X-ray energy is obtained. This method is widely used to calibrate the diffraction efficiency of various X-ray reflectors, and a mature calibration system has been established, creating a highly commercialized R&D, production, and sales environment. This calibration method is mature and reliable, and a large amount of diffraction efficiency measurement data has been accumulated. However, in common soft X-ray diffraction measurement methods, the X-ray reflector is fixed relative to the light source. The range of incident angles of the X-rays emitted by the light source on the component surface is very limited, yet contains a large number of X-rays of different energies. Furthermore, conventional angle scanning methods can only provide diffraction efficiency for a single energy in a single scan. Therefore, in practical applications, multiple scans are often required to obtain diffraction efficiency calibration results for multiple energies.

[0004] The paper "Measurement Method of Flat Crystal Rocking Curve Based on DC X-ray Continuum Energy Spectrum" (Ma Ge, Tang Bo, Hei Dongwei, et al. Measurement Method of Flat Crystal Rocking Curve Based on DC X-ray Continuum Energy Spectrum [J]. Modern Applied Physics, 2016, 7(3): 030201-1-030201-5) discloses a method for measuring the diffraction efficiency of flat crystals based on continuous spectrum irradiation and energy-resolved detector measurement. The energy-resolved detector is used to measure the diffraction intensity of different energies at the same diffraction angle, thereby obtaining the diffraction efficiency of multiple energies through a single angle scan. However, this method is greatly affected by the X-ray intensity and detector energy broadening, has a limited energy interval, and has a large measurement uncertainty in the range where the X-ray energy spectrum changes dramatically.

[0005] The paper "Calibration and Correction of Reflectivity of Soft X-ray Multilayer Mirrors" (Hou Lifei, Yi Rongqing, Du Huabing, et al. Calibration and Correction of Reflectivity of Soft X-ray Multilayer Mirrors [J], Acta Photonica Sinica, 2009, 38(4):827-831) introduces an energy scanning-based X-ray reflector calibration and correction method. This method uses a reflector autocollimation method with fluorescence indication to establish an optical path reference. This method requires a large distance between the reflector and the fluorescent indication surface, and the light spot should have a relatively regular and sharp edge. When the distance between the reflector and the fluorescent indication surface is small and the light spot is blurred, the optical path reference established by this method will introduce large uncertainty. Summary of the Invention

[0006] In order to overcome the shortcoming of low calibration accuracy of X-ray reflector diffraction efficiency, the present invention proposes an X-ray reflector diffraction efficiency calibration device and calibration method.

[0007] The technical solution adopted by the present invention to solve the technical problem is:

[0008] An X-ray reflector diffraction efficiency calibration device includes a vacuum chamber, an X-ray incident flange, an X-ray exit flange, a vacuum four-dimensional adjustment device, a vacuum and four-dimensional adjustment device controller, an adjustable element bracket, an X-ray detector, a cavity three-dimensional adjustment bracket, an X-ray source, and a vacuum pump.

[0009] The vacuum four-dimensional adjustment device, adjustable element bracket, and X-ray detector are located in the vacuum chamber; the X-ray incident flange, X-ray exit flange, vacuum and four-dimensional adjustment device controller, cavity three-dimensional adjustment bracket, X-ray source, and vacuum pump are located outside the vacuum chamber.

[0010] The vacuum chamber is a hollow cylindrical structural member and is provided with a pinhole sealing flange. The pinhole sealing flange is used for X-ray incidence, X-ray emission, vacuum four-dimensional adjustment device control signal transfer, X-ray detector signal transfer and cavity vacuum degree measurement of the vacuum chamber. A vacuum pump interface is provided at the bottom of the vacuum chamber.

[0011] The vacuum pump is connected to the vacuum chamber and is used for evacuating the vacuum chamber.

[0012] The X-ray entrance flange and the X-ray exit flange are mounted on the side wall of the vacuum chamber, with the central axis of the X-ray entrance flange and the central axis of the X-ray exit flange coinciding. The X-ray entrance flange and the X-ray exit flange are oriented in opposite directions. The X-ray entrance flange is connected to the X-ray source via a welded bellows, which is used to connect the vacuum chamber to the X-ray source.

[0013] The cavity three-dimensional adjustment bracket is located at the bottom of the vacuum chamber and is used for adjusting the posture of the vacuum chamber.

[0014] The X-ray reflector to be calibrated is located within the vacuum chamber. The X-ray detector and adjustable element holder are mounted on a four-dimensional vacuum adjustment mechanism. The X-ray reflector to be calibrated is mounted on the adjustable element holder. The four-dimensional vacuum adjustment mechanism is located at the bottom of the vacuum chamber and is used to adjust the position of the X-ray reflector and X-ray detector. The X-ray detector is used to detect diffracted X-ray signals.

[0015] The vacuum and four-dimensional adjustment device controller is connected to the vacuum chamber, vacuum pump and vacuum four-dimensional adjustment device through a data control line, and is used for the vacuum pump to evacuate the vacuum chamber and control the movement of the vacuum four-dimensional adjustment device.

[0016] In the above-mentioned calibration device, the top of the vacuum chamber is an integral top and a detachable sealing flange.

[0017] The vacuum chamber has no less than 5 pinhole sealing flanges.

[0018] The above calibration device, the vacuum degree of the vacuum chamber is lower than 1×10 -4 Pa.

[0019] The above-mentioned calibration device, the vacuum four-dimensional adjustment device has independent four-dimensional adjustment capabilities, from top to bottom are the horizontal displacement adjustment mechanism for adjusting the overall horizontal position, the horizontal rotation adjustment mechanism for adjusting the angle between the center normal of the X-ray detector receiving surface and the reference axis, the horizontal rotation adjustment mechanism for adjusting the angle between the X-ray reflector diffraction surface and the reference axis, and the horizontal displacement adjustment mechanism for adjusting the center position of the X-ray reflector diffraction surface.

[0020] The horizontal displacement adjustment mechanism 41 for adjusting the overall horizontal position can be translated on the horizontal plane, and the moving direction is perpendicular to the reference axis formed by the center line connecting the X-ray incident flange 2 and the X-ray exit flange 3. The rotation centers of the horizontal rotation adjustment mechanism 42 and the horizontal displacement adjustment mechanism 44 are coaxial, and during the diffraction angle scanning process of the diffraction surface of the X-ray reflector 9, the X-rays are incident on the same position of the diffraction surface of the X-ray reflector 9, and this position is coaxial with the rotation centers of the horizontal rotation adjustment mechanism 42 and the horizontal displacement adjustment mechanism 44.

[0021] The adjustment accuracy of the above-mentioned calibration device and the vacuum four-dimensional adjustment device is 0.005°.

[0022] In the calibration device described above, the adjustable element holder is in an inverted T-shape and is located on the stage of the horizontal displacement adjustment mechanism that adjusts the center position of the X-ray reflector's diffraction surface. A straight slot is defined in the vertical backplate of the adjustable element holder for mounting and securing the X-ray reflector. The rotation centers of the X-ray reflector's diffraction surface horizontal rotation adjustment mechanism 42 and the horizontal displacement adjustment mechanism 44 both lie on the plane of the X-ray reflector's diffraction surface.

[0023] In the above-mentioned calibration device, the X-ray detector is vertically mounted on the rotating arm of the horizontal rotation adjustment mechanism for adjusting the angle between the center normal of the X-ray detector receiving surface and the reference axis, and the center normal of the sensitive surface of the X-ray detector points vertically to the rotation center axis of the horizontal rotation adjustment mechanism for adjusting the angle between the center normal of the X-ray detector receiving surface and the reference axis.

[0024] In the above calibration device, the X-ray detector is a photoelectric detector, which is used to convert the signal of diffracted X-rays into a current signal output.

[0025] The above-mentioned calibration device, the three-dimensional adjustment bracket of the cavity is a double-layer flat plate structure, including a top plate and a bottom plate, and the top plate and the bottom plate are connected by bolts at the four corners. The bottom plate is located on a rigid base, and a vacuum pump installation space is reserved in the middle of the base. The horizontal posture of the top plate is adjusted in two dimensions by adjusting the connecting bolts. A horizontal displacement mechanism is installed on the top plate. The vacuum chamber is installed on the horizontal displacement mechanism on the top plate, and it slides freely in one dimension in the horizontal direction during adjustment. Locking mechanisms are set at both ends of the guide rails of the horizontal displacement mechanism for solidifying the position of the vacuum chamber after it is adjusted into place.

[0026] A method for calibrating the diffraction efficiency of an X-ray reflector comprises the following steps:

[0027] Install the X-ray reflector to be calibrated and start the vacuum pump to evacuate to the set vacuum degree;

[0028] Select an X-ray source of a certain energy and make the X-rays from the X-ray source irradiate the surface of the X-ray reflector to be measured and diffract;

[0029] Adjust the position of the X-ray reflector to be calibrated and the X-ray detector that receives the diffracted X-rays, determine the diffraction angle and the irradiation position of the diffracted X-rays on the sensitive surface of the X-ray detector, and solidify the diffraction light path;

[0030] The energy of the incident X-ray is adjusted, and the incident intensity and diffraction intensity of the X-ray are measured respectively to obtain the diffraction efficiency-incident energy relationship curve at the diffraction angle.

[0031] The beneficial effects of the present invention are:

[0032] An X-ray reflector diffraction efficiency calibration device measures the intensity of diffracted X-rays received by the detector and accurately adjusts the position of the X-ray reflector and detector, effectively improving the accuracy of the diffraction optical path and reducing the measurement deviation of the diffraction signal intensity caused by the deviation of the diffraction angle. The device adopts a fixed diffraction angle measurement method to completely solidify the measurement optical path, reducing the measurement deviation of the diffraction signal intensity caused by the different sensitivities of different areas on the sensitive surface of the detector. The cavity and interface design of the device can achieve an accuracy of less than 1×10 -4Pa high vacuum environment is maintained, and the built-in adjustment mechanism and detector can work normally in high vacuum environment, so that the X-ray calibration energy range of the device can cover the extreme ultraviolet to hard X-ray bands; the bellows connection method with standardized interface greatly reduces the performance requirements of the calibration device on the radiation source, and can be used with various desktop X-ray sources or large radiation devices to carry out diffraction efficiency calibration work.

[0033] The invention discloses an X-ray reflector diffraction efficiency calibration method, which adopts an X-ray reflector diffraction efficiency calibration device, fixes the diffraction angle, and adjusts the incident energy to measure the X-ray diffraction efficiency of the X-ray reflector, so as to obtain the X-ray reflector diffraction efficiency with higher precision. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 1 is a schematic structural diagram of an X-ray reflector diffraction efficiency calibration device according to a first embodiment of the present invention;

[0035] Figure 2 This is a schematic structural diagram of a high-precision four-dimensional vacuum adjustment device according to a first embodiment of the present invention;

[0036] Reference numerals:

[0037] 1. Vacuum chamber, 2. X-ray incident flange, 3. X-ray exit flange, 4. Vacuum four-dimensional adjustment device, 5. Vacuum and four-dimensional adjustment device controller, 6. Adjustable element bracket, 7. X-ray detector, 8. Cavity three-dimensional adjustment bracket, 9. X-ray reflector.

[0038] 41. Horizontal displacement adjustment mechanism for adjusting the overall horizontal position, 42. Horizontal rotation adjustment mechanism for adjusting the angle between the center normal of the X-ray detector receiving surface and the reference axis, 43. Horizontal rotation adjustment mechanism for adjusting the angle between the diffraction surface of the X-ray reflector and the reference axis, 44. Horizontal displacement adjustment mechanism for adjusting the center position of the diffraction surface of the X-ray reflector. DETAILED DESCRIPTION

[0039] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0040] Example 1

[0041] A method for calibrating the diffraction efficiency of an X-ray reflector begins by selecting an X-ray of a specific energy and irradiating it onto the surface of the X-ray reflector to be calibrated, causing diffraction. By repeatedly adjusting the position of the X-ray reflector and the detector that receives the diffracted X-rays, the diffraction angle and the position of the diffracted X-rays on the detector's sensitive surface are precisely determined. After solidifying the diffraction optical path, the energy of the incident X-ray is adjusted, and the incident and diffracted X-ray intensities are measured. A curve showing the relationship between diffraction efficiency and incident energy at that angle is generated.

[0042] An X-ray mirror diffraction efficiency calibration device, such as Figure 1 As shown, it includes a vacuum chamber 1, an X-ray incident flange 2, an X-ray exit flange 3, a high-precision vacuum four-dimensional adjustment device 4, a vacuum and four-dimensional adjustment device controller 5, an adjustable element bracket 6, an X-ray detector 7, a cavity three-dimensional adjustment bracket 8 and an X-ray reflector 9.

[0043] The vacuum chamber 1 is a cylindrical structure with a removable sealing flange on the top for equipment installation and commissioning. The side walls are equipped with no less than five pinhole sealing flanges, which are used for X-ray injection, X-ray emission, vacuum four-dimensional adjustment device control signal transfer, X-ray detector signal transfer, and cavity vacuum measurement. The bottom of the chamber is a vacuum pump interface for maintaining the vacuum environment of the chamber, which can keep the vacuum degree below 1×10 -4 Pa.

[0044] The X-ray entrance flange 2 and the X-ray exit flange 3 are located on the sidewalls of the vacuum chamber 1, with their central axes coinciding and their orientations facing each other. The X-ray entrance flange 2 is connected to the X-ray source via a welded bellows, which serves to connect the vacuum chamber and the X-ray source and provide preliminary alignment.

[0045] The high-precision vacuum four-dimensional adjustment device 4 is a four-layer structure, such as Figure 2 As shown, it is placed at the bottom of the vacuum chamber 1 and is used to adjust the position of the X-ray reflector and detector. This adjustment device has independent four-dimensional adjustment capabilities. From bottom to top, they are a horizontal displacement adjustment mechanism 41 for adjusting the overall horizontal position; a horizontal rotation adjustment mechanism 42 for adjusting the angle between the center normal of the detector receiving surface and the reference axis; a horizontal rotation adjustment mechanism 43 for adjusting the angle between the X-ray reflector diffraction surface and the reference axis; and a horizontal displacement adjustment mechanism 44 for adjusting the center position of the X-ray reflector diffraction surface. The horizontal displacement adjustment mechanism 41 for adjusting the overall horizontal position can be translated horizontally, with the movement direction perpendicular to the reference axis formed by the line connecting the centers of the X-ray incident flange 2 and the X-ray exit flange 3. The rotation centers of the horizontal rotation adjustment mechanism 42 and the horizontal displacement adjustment mechanism 44 are coaxial. During the diffraction angle scanning process, X-rays are incident on the diffraction surface of the X-ray reflector 9 at the same position, which is coaxial with the rotation centers of the horizontal rotation adjustment mechanism 42 and the horizontal displacement adjustment mechanism 44. The angle adjustment accuracy of this four-dimensional adjustment device can reach 0.005°.

[0046] The vacuum and four-dimensional adjustment device controller 5 is an external independent device, which is connected to the vacuum pump and four-dimensional adjustment device at the bottom of the vacuum chamber 1 through a data control line. It is used to operate the target chamber vacuum system and control the movement of the four-dimensional adjustment device.

[0047] The adjustable element bracket 6 is an inverted T-shaped structure, boasting high surface flatness and verticality. This ensures that the diffraction surface of the installed X-ray reflector 9 is perpendicular to the reference axis formed by the center line connecting the X-ray entrance flange 2 and the X-ray exit flange 3, without affecting the X-ray incident angle. The horizontal bottom surface is mounted on the stage of the horizontal displacement adjustment mechanism 44, which adjusts the center position of the X-ray reflector's diffraction surface. The vertical back plate is provided with a straight slot for mounting various types of X-ray reflectors.

[0048] The X-ray detector 7 is used to detect diffracted X-ray signals and is mounted on the rotating arm of a horizontal rotation adjustment mechanism 42 that adjusts the angle between the center normal of the X-ray detector's receiving surface and the reference axis. The detector is mounted vertically, ensuring that the center normal of the detector's sensitive surface is perpendicular to the rotation axis of the horizontal rotation adjustment mechanism 42, which adjusts the angle between the center normal of the X-ray detector's receiving surface and the reference axis. The detector is a photodetector that converts diffracted X-ray signals into current signals for output, which are measured using a galvanometer.

[0049] The three-dimensional cavity adjustment bracket 8 is used to adjust the posture of the vacuum chamber and is located at the bottom of the vacuum chamber 1. The bracket adopts a double-layer flat plate structure, and the upper and lower plates are connected by bolts at the four corners. The bottom plate is located on a rigid base, and space for the vacuum pump installation is reserved in the middle of the base. The horizontal posture of the top plate is adjusted in two dimensions by adjusting the bolts at the four corners. A horizontal displacement mechanism is installed on the top plate. The vacuum chamber is mounted on the horizontal displacement mechanism and can slide freely in one dimension in the horizontal direction. Locking mechanisms are set at both ends of the guide rail for solidification in the position after the vacuum chamber 1 is adjusted into place.

[0050] The X-ray reflector 9 is an X-ray reflector to be calibrated, and the reflector has a single crystal silicon substrate with high surface flatness and parallelism.

Claims

1. An X-ray mirror diffraction efficiency calibration device, characterized in that: It comprises a vacuum chamber (1), an X-ray incident flange (2), an X-ray exit flange (3), a vacuum four-dimensional adjustment device (4), a vacuum and four-dimensional adjustment device controller (5), an adjustable element bracket (6), an X-ray detector (7), a cavity three-dimensional adjustment bracket (8), an X-ray source, and a vacuum pump; The vacuum four-dimensional adjustment device (4), the adjustable element bracket (6), and the X-ray detector (7) are located inside the vacuum chamber (1); the X-ray incident flange (2), the X-ray exit flange (3), the vacuum and four-dimensional adjustment device controller (5), the cavity three-dimensional adjustment bracket (8), the X-ray source, and the vacuum pump are located outside the vacuum chamber (1); The vacuum chamber (1) is a hollow cylindrical structural member, and is provided with a vacuum sealing flange. The vacuum sealing flange is used for X-ray incidence, X-ray emission, vacuum four-dimensional adjustment device (4) control signal switching, X-ray detector (7) signal switching, and cavity vacuum degree measurement of the vacuum chamber (1). A vacuum pump interface is provided at the bottom of the vacuum chamber (1); The vacuum pump is in communication with the vacuum chamber (1) and is used to evacuate the vacuum chamber (1); The X-ray incident flange (2) and the X-ray exit flange (3) are mounted on the side wall of the vacuum chamber (1), the central axis of the X-ray incident flange (2) and the central axis of the X-ray exit flange (3) coincide with each other, and the flange direction of the X-ray incident flange (2) and the flange direction of the X-ray exit flange (3) are opposite; the X-ray incident flange (2) and the X-ray source are connected by a welded bellows, and are used for connecting the vacuum chamber (1) and the X-ray source; The cavity three-dimensional adjustment bracket (8) is located at the bottom of the vacuum chamber (1) and is used for adjusting the posture of the vacuum chamber (1); The X-ray reflector (9) to be calibrated is located in a vacuum chamber (1); the X-ray detector (7) and the adjustable element bracket (6) are mounted on a vacuum four-dimensional adjustment device (4); the X-ray reflector (9) to be calibrated is mounted on the adjustable element bracket (6); the vacuum four-dimensional adjustment device (4) is located at the bottom of the vacuum chamber (1) and is used for adjusting the positions of the X-ray reflector (9) and the X-ray detector (7); the X-ray detector (7) is used for detecting diffracted X-ray signals; The vacuum and four-dimensional regulating device controller (5) is connected to the vacuum chamber (1), the vacuum pump and the vacuum four-dimensional regulating device (4) via a data control line, and is used for the vacuum pump to evacuate the vacuum chamber (1) and to control the movement of the vacuum four-dimensional regulating device (4).

2. The X-ray mirror diffraction efficiency calibration device according to claim 1, characterized in that: The top of the vacuum chamber (1) is an integral top and a detachable sealing flange; The vacuum chamber (1) has no fewer than five pinhole sealing flanges.

3. The X-ray mirror diffraction efficiency calibration device according to claim 1, characterized in that: The vacuum degree of the vacuum chamber (1) is lower than 1×10 -4 Pa.

4. The X-ray mirror diffraction efficiency calibration device according to claim 1, characterized in that: The vacuum four-dimensional adjustment device (4) has independent four-dimensional adjustment capabilities, and includes, from top to bottom, a horizontal displacement adjustment mechanism (41) for adjusting the overall horizontal position, a horizontal rotation adjustment mechanism (42) for adjusting the angle between the normal line of the center of the X-ray detector receiving surface and the reference axis, a horizontal rotation adjustment mechanism (43) for adjusting the angle between the diffraction surface of the X-ray reflector and the reference axis, and a horizontal displacement adjustment mechanism (44) for adjusting the center position of the diffraction surface of the X-ray reflector; The horizontal displacement adjustment mechanism (41) for adjusting the overall horizontal position can be translated on the horizontal plane, and the moving direction is perpendicular to the reference axis formed by the center line connecting the X-ray incident flange (2) and the X-ray exit flange (3). The rotation centers of the horizontal rotation adjustment mechanism (42) and the horizontal displacement adjustment mechanism (44) are coaxial, and during the diffraction angle scanning process of the diffraction surface of the X-ray reflector (9), the X-rays are incident on the same position of the diffraction surface of the X-ray reflector (9), and the position is coaxial with the rotation centers of the horizontal rotation adjustment mechanism (42) and the horizontal displacement adjustment mechanism (44).

5. The X-ray mirror diffraction efficiency calibration device according to claim 1, characterized in that: The adjustment accuracy of the vacuum four-dimensional adjustment device (4) is 0.005°.

6. The X-ray reflector diffraction efficiency calibration device according to claim 4, characterized in that: The adjustable element bracket (6) is in an inverted T-shape and is located on a stage of a horizontal displacement adjustment mechanism (44) for adjusting the center position of the diffraction surface of the X-ray reflector; a straight groove is opened on the vertical back plate of the adjustable element bracket (6), and the straight groove is used to install and fix the X-ray reflector (9); the diffraction surface of the X-ray reflector (9) coincides with the rotation center of the horizontal rotation adjustment mechanism (42) and the horizontal displacement adjustment mechanism (44).

7. The X-ray reflector diffraction efficiency calibration device according to claim 4, characterized in that: The X-ray detector (7) is vertically mounted on a rotating arm of a horizontal rotation adjustment mechanism (42) for adjusting the angle between the center normal of the X-ray detector receiving surface and a reference axis, and the center normal of the sensitive surface of the X-ray detector (7) is vertically pointed to the rotation center axis of the horizontal rotation adjustment mechanism (42) for adjusting the angle between the center normal of the X-ray detector receiving surface and the reference axis.

8. The X-ray mirror diffraction efficiency calibration device according to claim 1, characterized in that: The X-ray detector (7) is a photoelectric detector used to convert the diffracted X-ray signal into a current signal for output.

9. The X-ray mirror diffraction efficiency calibration device according to claim 1, characterized in that: The cavity three-dimensional adjustment bracket (8) is a double-layer flat plate structure, including a top plate and a bottom plate, and the top plate and the bottom plate are connected at four corners by bolts; the bottom plate is located on a rigid base, and a vacuum pump installation space is reserved in the middle of the base; the horizontal posture of the top plate is adjusted in two dimensions by adjusting the connecting bolts; a horizontal displacement mechanism is installed on the top plate; the vacuum chamber (1) is installed on the horizontal displacement mechanism on the top plate, and performs one-dimensional free sliding in the horizontal direction during adjustment; locking mechanisms are provided at both ends of the guide rail of the horizontal displacement mechanism for solidifying the position of the vacuum chamber (1) after it is adjusted into place.

10. A method for calibrating the diffraction efficiency of an X-ray reflector, using the X-ray reflector diffraction efficiency calibration device according to any one of claims 1 to 9, characterized in that: The following steps are involved: Install the X-ray reflector (9) to be calibrated, and start the vacuum pump to evacuate to a set vacuum degree; Select an X-ray source of a certain energy and make the X-rays from the X-ray source irradiate the surface of the X-ray reflector to be measured and diffract; Adjusting the positions of the X-ray reflector (9) to be calibrated and the X-ray detector (7) for receiving the diffracted X-rays, determining the diffraction angle and the irradiation position of the diffracted X-rays on the sensitive surface of the X-ray detector (7), and solidifying the diffraction light path; The energy of the incident X-ray is adjusted, and the incident intensity and diffraction intensity of the X-ray are measured respectively to obtain the diffraction efficiency-incident energy relationship curve at the diffraction angle.

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