Plane mirror thermal control device and thermal control method

Abstract

This invention belongs to the field of optical engineering and intelligent temperature control technology, and provides a thermal control device and method for a plane mirror. The device consists of an adjustment component, a clamping component, a thermal control component, an optical element, and a temperature measuring component. The optical element is mounted on the surface of the adjustment component via the clamping component. The surface of the optical element is divided into several independent regions, and each region is equipped with a corresponding thermal control component. The temperature measuring component can monitor the temperature of the optical element. The device of this invention divides the optical element into several regions and configures a thermal control component for each region. Each thermal control component includes a water-cooling pipe and a heating resistor. The water-cooling pipe can exchange heat with the corresponding region of the optical element to achieve cooling, while the heating resistor can heat the optical element. The two work together in the corresponding region of the optical element to perform targeted temperature regulation, ultimately maintaining the overall temperature of the optical element within a certain range, thereby effectively improving the problem of surface shape changes.

Description

Technical Field

[0001] This invention belongs to the field of optical engineering and intelligent temperature control technology, and specifically relates to a thermal control device and method for a plane mirror. Background Technology

[0002] In the field of high-precision optical systems, cutting-edge equipment such as synchrotron radiation devices and space telescopes are facing two major technical bottlenecks that urgently need to be overcome: one is the stringent requirements for the extreme surface accuracy of optical components, which directly determines the imaging quality and beam transmission efficiency of the system; the other is that the dynamic thermal deformation generated by optical components during operation is difficult to control effectively, which will seriously affect the stability and reliability of the system.

[0003] In the operating mechanism of an optical system, the surface shape of optical elements has a decisive influence on the optical performance of the entire system. However, in actual working scenarios, the dynamic thermal deformation of the surface shape of optical elements caused by factors such as illumination and ambient temperature fluctuations has become the main cause of surface shape errors, greatly restricting further improvements in system accuracy.

[0004] Currently, there are two main methods in the industry for suppressing thermal deformation of optical components, but both have significant limitations. One method is to liquid cool the entire optical component. This method has a fixed cooling area, which cannot flexibly adapt to the dynamic changes in the beam footprint during operation, resulting in unsatisfactory cooling effects and difficulty in achieving precise temperature control. The other method is to use piezoelectric ceramic actuators for mechanical bending, correcting surface deformation through mechanical force. However, this method has significant drawbacks: on the one hand, its stroke is extremely limited (usually less than 100μm), making it difficult to cope with large-scale surface deformation; on the other hand, it introduces high-frequency mechanical vibrations during operation, which in turn causes new interference to the stability of the optical system. Summary of the Invention

[0005] In order to solve the problems in the background art, the purpose of the present invention is to provide a thermal control device and method for a plane mirror. The device can precisely control the surface shape of the plane mirror through regional heating and cooling control, thereby optimizing the surface shape changes of the plane mirror caused by heat during operation.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A thermal control device for a plane mirror includes an adjustment assembly, a clamping assembly, a thermal control assembly, an optical element, a temperature measuring assembly, and a base;

[0008] The clamping assembly is used to clamp the optical element;

[0009] Several of the temperature measuring components are integrated inside the clamping assembly and are in contact with the optical element;

[0010] The optical element is mounted on the surface of the adjustment component via a clamping assembly, and the surface of the optical element is divided into several regions;

[0011] Several thermal control components are provided, corresponding to the number of areas on the surface of the optical element. Each thermal control component includes a water-cooling pipe, a heating resistor, and a heat exchange plate.

[0012] The heat exchange plate is mounted on the optical element, and a plurality of heating resistors are mounted on its surface; the heating resistors are used to heat the optical element; the water cooling pipe is in contact with the heating resistors for heat exchange with them, and the water cooling pipe is equipped with a flow control module for controlling the flow rate of the water cooling pipe.

[0013] The base is used to support the thermal control component and is mounted on the adjustment component.

[0014] Preferably, the adjustment assembly includes a supporting base plate, an adjustment mounting plate, and an upper mounting plate;

[0015] A rotating shaft is installed at the center of the support base plate, a piezoelectric actuator is installed at one end of the upper surface, and a grating ruler reading head is installed at the other end of the upper surface; the adjustment mounting plate and the upper mounting plate are both located between the piezoelectric actuator and the grating ruler reading head;

[0016] The upper mounting plate is rotatably engaged with the rotating shaft;

[0017] The adjusting mounting plate is located between the supporting base plate and the upper mounting plate, and is rotatably engaged with the rotating shaft;

[0018] One end of the upper mounting plate is connected to the adjusting mounting plate via a locking screw, and the other end is abutted against the adjusting mounting plate via a set screw.

[0019] Preferably, the piezoelectric actuator includes a linear motor, a drive plate, and a spring;

[0020] The linear motor is mounted on one end of the upper surface of the support base plate;

[0021] One end of the drive plate is fixedly connected to the conveyor shaft of the linear motor, and the other end is fixedly connected to the adjustment mounting plate;

[0022] The spring is used to connect the drive plate and the support base plate.

[0023] Preferably, the clamping assembly includes an upper pressure plate and a lower pressure plate; the upper pressure plate is mounted on the side of the optical element away from the adjustment assembly, the lower pressure plate is mounted on the other side of the optical element, and the lower pressure plate is connected to the upper mounting plate.

[0024] Preferably, the thermal control assembly further includes a mounting base and an electrical port, the electrical port being mounted on the surface of the mounting base and electrically connected to the heating resistor; the mounting base is used to fix the water-cooling pipe.

[0025] Preferably, the optical element is strip-shaped and has a slot on its upper surface;

[0026] The slot is used to assemble the heat exchange plate.

[0027] Preferably, the temperature measuring component includes a clamping block and a temperature measuring resistor;

[0028] The clamping block is mounted on the surface of the lower pressure plate facing the optical element, and the surface of the clamping block is provided with a groove for mounting the temperature measuring resistor;

[0029] The temperature-sensing resistor is in contact with the lower surface of the optical element and is used to monitor the temperature of all areas of the optical element.

[0030] A thermal control method for the aforementioned plane mirror thermal control device includes the following steps:

[0031] The optical components are monitored using temperature measurement components to obtain the real-time temperature of the optical components in each region;

[0032] Take one region of the optical element as the reference region and calculate the real-time temperature difference between other regions and the reference region;

[0033] If the real-time temperature difference is greater than or equal to the target value, the thermal control component is used to reduce the real-time temperature difference to less than the target value; if the real-time temperature difference is less than the target value, the temperature of each area of ​​the optical element is continuously monitored.

[0034] Preferably, the reference area is an area irradiated by a light beam or an area affected by ambient heat.

[0035] Preferably, using a thermal control component to reduce the real-time temperature difference includes the following steps:

[0036] The temperature in the reference region remains constant, while the temperature in the higher-temperature region of the optical element is reduced, and the following conditions are met: In the formula This indicates the temperature drop per unit time in the corresponding area of ​​the optical component when the water-cooled pipe cools down and the heating resistor stops working. ≥0; This indicates the temperature rise per unit time in the corresponding area of ​​the optical element when the heating resistor heats up and the water cooling pipe is not working. ≥0;

[0037] The temperature in the reference region remains constant, while the temperature in the lower temperature region of the optical element is increased, and the following conditions are met: .

[0038] The beneficial effects of this invention are:

[0039] 1. The device of the present invention divides the optical element into several regions and configures a thermal control component for each region. Each thermal control component includes a water-cooling pipe and a heating resistor. The water-cooling pipe can exchange heat with the corresponding region of the optical element to achieve cooling, and the heating resistor can heat up the optical element. The two work together in the corresponding region of the optical element to perform targeted temperature control, and finally keep the overall temperature of the optical element within a certain range, thereby effectively improving the problem of surface shape change.

[0040] 2. The method of the present invention regulates the real-time temperature difference of each region of the optical element. The regulation process takes into account the individual and combined effects of the water cooling pipe and the heating resistor, ensuring that the temperature regulation can be executed accurately.

[0041] 3. The device of the present invention can provide online real-time feedback to adjust the surface shape changes of the optical element and perform implementation control, so that the optical element can adapt to the thermal changes in the surface shape of the optical element caused by the change of the beam footprint.

[0042] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures pointed out in the description and the drawings. Attached Figure Description

[0043] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0044] Figure 1 A schematic diagram of the plane mirror thermal control device of the present invention is shown;

[0045] Figure 2a A schematic diagram of the structure of the adjustment component of the present invention is shown;

[0046] Figure 2b It shows Figure 2a A sectional view;

[0047] Figure 2c It shows Figure 2a A partial view in the middle;

[0048] Figure 3 A schematic diagram of the clamping assembly of the present invention is shown;

[0049] Figure 4 A schematic diagram of the thermal control component of the present invention is shown;

[0050] Figure 5 A schematic diagram of the structure of the optical element of the present invention is shown;

[0051] Figure 6 A schematic diagram of the temperature measuring component of the present invention is shown;

[0052] Figure 7 A flowchart of the thermal control method of the present invention is shown.

[0053] In the diagram: 1. Adjustment assembly; 101. Support base plate; 102. Adjustment mounting plate; 103. Upper mounting plate; 104. Rotating shaft; 105. Piezoelectric actuator; 1051. Linear motor; 1052. Drive plate; 1053. Spring; 106. Grating ruler reading head; 107. Locking screw; 108. Set screw; 2. Clamping assembly; 201. Upper pressure plate; 202. Lower pressure plate; 3. Thermal control assembly; 301. Fixing base; 302. Water cooling pipe; 303. Heating resistor; 304. Electrical port; 305. Heat exchange plate; 4. Optical element; 401. Slot; 5. Temperature measuring assembly; 501. Clamping block; 502. Temperature measuring resistor; 6. Base. Detailed Implementation

[0054] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0055] like Figure 1 The diagram shows a thermal control device for a plane mirror, comprising an adjustment assembly 1, a clamping assembly 2, a thermal control assembly 3, an optical element 4, temperature measuring components 5, and a base 6. The optical element 4 is mounted on the surface of the adjustment assembly 1 via the clamping assembly 2, and the surface of the optical element 4 is divided into several independent regions, each corresponding to a thermal control assembly 3. Several temperature measuring components 5 are integrated inside the clamping assembly 2 and are in contact with the optical element 4, enabling real-time monitoring of the temperature data of each region of the optical element 4, providing reliable data support for subsequent precise temperature adjustment. The base 6 primarily supports the thermal control assembly 3 and can be mounted on the adjustment assembly 1.

[0056] like Figure 2aAs shown, the adjustment assembly 1 includes a support base plate 101, an adjustment mounting plate 102, and an upper mounting plate 103. A rotating shaft 104 is fixedly mounted at the center of the support base plate 101, and a piezoelectric actuator 105 is mounted at one end of its upper surface, while a grating ruler reading head 106 is mounted at the other end. The adjustment mounting plate 102 and the upper mounting plate 103 are both located between the piezoelectric actuator 105 and the grating ruler reading head 106.

[0057] Additionally, the upper mounting plate 103 is rotatably coupled with the rotating shaft 104, allowing it to rotate at a certain angle in the horizontal plane. The piezoelectric actuator 105 can limit its rotation range, and the grating ruler reading head 106 can read the angle of rotation.

[0058] like Figure 2b As shown, the adjusting mounting plate 102 is located between the supporting base plate 101 and the upper mounting plate 103, and is rotatably engaged with the rotating shaft 104; one end of the upper mounting plate 103 is connected to the adjusting mounting plate 102 via a locking screw 107, and the other end abuts against the adjusting mounting plate 102 via a set screw 108. The included angle between the upper mounting plate 103 and the adjusting mounting plate 102 can be changed by adjusting the set screw 108 and the locking screw 107.

[0059] like Figure 2c As shown, the piezoelectric actuator 105 consists of a linear motor 1051, a drive plate 1052, and a spring 1053. The linear motor 1051 is mounted on one end of the upper surface of the support base plate 101, and it can push the drive plate 1052 to move along the motor's axial direction. One end of the drive plate 1052 is fixedly connected to the conveying shaft of the linear motor 1051, and the other end is fixedly connected to the adjusting mounting plate 102. When the drive plate 1052 moves, the adjusting mounting plate 102 moves along with it. Simultaneously, the upper mounting plate 103 and the optical element 4 move with the adjusting mounting plate 102, after which the optical element 4 will deflect at a certain angle relative to its initial position. One end of the spring 1053 is connected to a column on the support base plate 101, and the other end is connected to the drive plate 1052. When the optical element 4 deflects at a certain angle, the spring 1053 is in a stretched state. This not only maintains the stability of the optical element 4 but also prevents excessive deflection of the optical element 4.

[0060] like Figure 3 As shown, the clamping assembly 2 includes an upper pressure plate 201 and a lower pressure plate 202. The upper pressure plate is installed on the side of the optical element 4 away from the adjustment assembly 1, and the lower pressure plate 202 is installed on the other side of the optical element 4. The lower pressure plate 202 can be connected to the upper mounting plate 103 of the adjustment assembly 1 via bolts or screws. The temperature measuring assembly 5 is arranged at equal intervals at the bottom of the optical element 4 according to temperature control requirements. It is fixed to the optical element 4 by the lower pressure plate 202 to ensure complete contact of the temperature measuring area. The upper pressure plate 201 has mounting holes through which the optical element 4 can be fixed.

[0061] Furthermore, the number of thermal control components 3 is matched to the number of areas on the surface of the optical element 4. For example... Figure 4 As shown, each thermal control component 3 includes a mounting base 301, a water-cooling pipe 302, a heating resistor 303, an electrical port 304, and a heat exchange plate 305. The heat exchange plate 305 is mounted on the optical element 4 and is made of copper plate, with several heating resistors 303 mounted on its surface. These heating resistors 303 are evenly distributed in corresponding areas of the optical element 4, allowing for heating of those areas. The water-cooling pipe 302 is connected to the heat exchange plate 305 of the optical element 4, achieving cooling of the optical element 4 through heat exchange with the heating resistors 303. The water-cooling pipe 302 is equipped with a flow control module to control the flow rate of the water-cooling pipe 302. The electrical port 304 is mounted on the surface of the mounting base 301 and is electrically connected to the heating resistors 303. External devices can supply power to the heating resistors 303 through the electrical port 304. The mounting base 301 mainly serves to fix the water-cooling pipe 302, ensuring stable contact between it and the optical element 4, and also... Figure 1 It can be seen that the mounting base 301 is installed on the base 6, which ensures that the optical element 4 and the thermal control component 3 can be deflected together by a certain angle with the adjustment mounting plate 102.

[0062] It should be noted that, in Figure 4 One end of the fixed base 301 has a disc-shaped structure, and both the inlet and outlet ends of the water-cooled pipe 302 are fixed on the fixed base 301. The water-cooled pipe 302 adopts a symmetrical distribution structure, and its inlet and outlet ends are straight pipes, which are installed on the heat exchange plate 305.

[0063] like Figure 5 As shown, the optical element 4 is strip-shaped and has a slot 401 on its upper surface, which can be used to assemble the heat exchange plate 305.

[0064] It should be noted that the optical element 4 is the last element to function when the device is working. The slot 401 on its upper part is filled with Ga-In alloy, and the heat exchange plate 305 of the thermal control component 3 is placed in it. At this time, heat exchange between the thermal control component 3 and the optical element 4 can be realized.

[0065] In some optional embodiments, to quickly locate the position of the optical element 4, each region can adopt a "basic number + auxiliary identifier" format. The basic number is primarily numerical, sequentially numbering the independent regions on the surface of the optical element 4 from left to right, for example, 1, 2, 3...n (where n is the total number of regions). The auxiliary identifier is added based on the specific attributes or location characteristics of the region. If a region is close to the edge of the optical element 4, it can be marked "1-edge"; if a region is at the center of the element, it can be marked "5-center". This numbering format facilitates rapid region location while also reflecting the specific information of the region.

[0066] The above regional division process can be adjusted appropriately, as follows:

[0067] The first scenario involves real-time monitoring of temperature changes in each area by the temperature sensing component 5 and the performance of the thermal control component 3. Based on the monitoring data, the similarity of temperature distribution patterns and thermal control requirements in each area is analyzed. If several adjacent areas show highly consistent temperature change trends and similar thermal control requirements, they can be merged into a larger area to reduce the number of thermal control components 3 and lower costs. If there are significant temperature differences between different locations within a certain area, and the thermal control requirements differ, the area can be further subdivided to improve the accuracy of thermal control.

[0068] The second scenario:

[0069] Analyzing the impact of light or environment on different areas of optical element 4, if the temperature control cycle of the thermal control component 3 in a certain area is significantly longer than that in other areas, it indicates that there may be a problem with the matching degree between the thermal control component 3 and the area. In this case, based on the feedback information, the parameters of the thermal control component 3 in that area can be adjusted or a more suitable thermal control component 3 can be replaced to optimize the thermal control matching degree.

[0070] like Figure 6 As shown, the temperature measuring assembly 5 includes a clamping block 501 and a temperature measuring resistor 502. The clamping block 501 is mounted on the surface of the lower pressure plate 202 facing the optical element 4, and a groove is formed on the surface of the clamping block 501 for mounting the temperature measuring resistor 502; the clamping block 501 is assembled on the lower surface of the optical element 4, and the temperature measuring resistor 502 is in contact with the lower surface of the optical element 4 for monitoring the temperature of all areas of the optical element 4.

[0071] Figure 1-6The device can also be equipped with a control platform, which is electrically connected to the flow control module of the water-cooled pipe 302, the heating resistor 303, the optical element 4, and the temperature measuring resistor 502. Specifically, the control platform can be configured with a display and an alarm. The display can show the collected data in real time, and the alarm can be triggered if the data is abnormal. In addition, the control platform can also send control signals to the heating resistor 303 to adjust the power of the heating resistor 303.

[0072] It should be noted that the control platform, as the core of the entire device's temperature management, achieves precise temperature control of each independent area of ​​the optical element 4 through electrical connections with the heating resistor 303, the optical element 4, and the temperature measuring resistor 502. The specific process is as follows:

[0073] First, temperature monitoring and data acquisition. The temperature sensing resistor 502 senses the temperature of each area of ​​the optical element 4 in real time and converts these temperature signals into electrical signals, which are then transmitted to the control platform. Since each area has an independent number and corresponds to a dedicated thermal control component 3 (including the heating resistor 303 and the matching temperature sensing resistor 502), the control platform can identify the real-time temperature data of each numbered area, such as the current temperature of area 1 and the temperature change trend of area 2.

[0074] Secondly, data processing and display. After receiving the data, the control platform analyzes and processes it, then displays the temperature data of each area in real time through a configured monitor, including specific temperature values ​​and temperature fluctuation curves. Operators can intuitively understand the temperature status of each numbered area through the monitor, providing a basis for subsequent control.

[0075] Next, temperature control is executed. The control platform can coordinate the temperature of each area. Generally, the area irradiated by the beam can be regarded as the reference area. During temperature control, the temperature of each area should be brought close to the temperature of the reference area to make the temperature of the entire optical element 4 uniform. Therefore, the control platform will send control signals to the flow control module of the water cooling pipe 302 and the heating resistor 303 corresponding to that area to raise the temperature of that area to near the temperature of the reference area; for example, if the temperature of a certain area is higher than the temperature of the reference area, the control platform will send a signal to lower the temperature of that area.

[0076] Finally, there are the anomaly alarms and emergency handling mechanisms. The control platform continuously compares the real-time temperature of the reference area with the real-time temperatures of other areas. If the temperature data of other areas is abnormal, the abnormal data will be highlighted on the display, and an alarm will sound (such as an audible and visual alarm) to remind the operator to investigate the problem in time. Through this closed-loop control logic, the control platform achieves real-time monitoring, precise control, and anomaly warning of the temperature of each independent area of ​​optical element 4, ensuring that optical element 4 operates efficiently in a stable temperature environment.

[0077] like Figure 7 The image shows a thermal control method for the aforementioned plane mirror thermal control device, comprising the following steps:

[0078] S1: Use temperature measuring component 5 to monitor optical element 4 and obtain the real-time temperature of optical element 4 in each region.

[0079] S2: Take one area of ​​optical element 4 as the reference area and calculate the real-time temperature difference between other areas and the reference area; specifically, the reference area is the area irradiated by the beam or the area affected by ambient heat.

[0080] S3: If the real-time temperature difference is greater than or equal to the target value (preferably 0.1℃), the thermal control component 3 is used to reduce the real-time temperature difference so that the real-time temperature difference is less than the target value; if the real-time temperature difference is less than the target value, the temperature of each area of ​​the optical element 4 is continuously monitored.

[0081] It should be noted that when adjusting the temperature, the combined effect of the water-cooling pipe 302 and the heating resistor 303 needs to be considered. Therefore, when using the thermal control component 3 in S3 to reduce the real-time temperature difference, the following factors need to be taken into account:

[0082] Case 1: The temperature of the reference region remains constant, while the temperature of the higher-temperature region of optical element 4 is reduced, and the following conditions are met:

[0083] (1)

[0084] In the formula This indicates the temperature drop per unit time in the area corresponding to the optical element 4 when the water-cooling pipe 302 is cooled down and the heating resistor 303 stops working. ≥0; This indicates the temperature rise per unit time in the corresponding area of ​​optical element 4 when heating resistor 303 heats up and water cooling pipe 302 is not working. ≥0;

[0085] The second scenario: The temperature of the reference region remains constant, while the temperature of the lower-temperature region of optical element 4 is increased, and the following conditions are met: (2)

[0086] It needs to be further explained that when If the value is 0, it means that water cooling pipe 302 is not working. =0 indicates that heating resistor 303 is not working.

[0087] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A thermal control device for a plane mirror, characterized in that, It includes an adjustment component (1), a clamping component (2), a thermal control component (3), an optical element (4), a temperature measuring component (5), and a base (6); The clamping assembly (2) is used to clamp the optical element (4); Several of the temperature measuring components (5) are integrated inside the clamping assembly (2) and are in contact with the optical element (4); The optical element (4) is mounted on the surface of the adjustment component (1) by the clamping assembly (2), and the surface of the optical element (4) is divided into several regions; The thermal control components (3) are provided in several units, corresponding to the number of areas on the surface of the optical element (4). Each thermal control component (3) includes a water cooling pipe (302), a heating resistor (303), and a heat exchange plate (305). The heat exchange plate (305) is mounted on the optical element (4), and a plurality of heating resistors (303) are mounted on its surface; the heating resistors (303) are used to heat the optical element (4); the water cooling pipe (302) is in contact with the heating resistors (303) for heat exchange with the heating resistors (303), and the water cooling pipe (302) is equipped with a flow control module for controlling the flow rate of the water cooling pipe (302); The base (6) is used to support the thermal control component (3) and is mounted on the adjustment component (1); The adjustment assembly (1) includes a support base plate (101), an adjustment mounting plate (102), and an upper mounting plate (103). The support base plate (101) has a rotating shaft (104) installed at its center, a piezoelectric actuator (105) installed at one end of its upper surface, and a grating ruler reading head (106) installed at the other end of its upper surface; the adjustment mounting plate (102) and the upper mounting plate (103) are both located between the piezoelectric actuator (105) and the grating ruler reading head (106); The upper mounting plate (103) is rotatably engaged with the rotating shaft (104); The adjusting mounting plate (102) is located between the supporting base plate (101) and the upper mounting plate (103), and is rotatably engaged with the rotating shaft (104); One end of the upper mounting plate (103) is connected to the adjusting mounting plate (102) by a locking screw (107), and the other end is abutted against the adjusting mounting plate (102) by a set screw (108).

2. The thermal control device for a plane mirror according to claim 1, characterized in that, The piezoelectric actuator (105) includes a linear motor (1051), a drive plate (1052), and a spring (1053). The linear motor (1051) is mounted on one end of the upper surface of the support base plate (101); One end of the drive plate (1052) is fixedly connected to the conveying shaft of the linear motor (1051), and the other end is fixedly connected to the adjustment mounting plate (102); The spring (1053) is used to connect the drive plate (1052) and the support base plate (101).

3. The thermal control device for a plane mirror according to claim 1, characterized in that, The clamping assembly (2) includes an upper pressure plate (201) and a lower pressure plate (202); the upper pressure plate (201) is mounted on the side of the optical element (4) away from the adjustment assembly (1), the lower pressure plate (202) is mounted on the other side of the optical element (4), and the lower pressure plate (202) is connected to the upper mounting plate (103).

4. The plane mirror thermal control device according to claim 1, characterized in that, The thermal control component (3) further includes a mounting base (301) and an electrical port (304). The electrical port (304) is mounted on the surface of the mounting base (301) and is electrically connected to the heating resistor (303). The mounting base (301) is used to fix the water cooling pipe (302).

5. The thermal control device for a plane mirror according to claim 1, characterized in that, The optical element (4) is strip-shaped and has a slot (401) on its upper surface; The slot (401) is used to assemble the heat exchange plate (305).

6. The plane mirror thermal control device according to claim 3, characterized in that, The temperature measuring component (5) includes a clamping block (501) and a temperature measuring resistor (502); The clamping block (501) is mounted on the surface of the lower pressure plate (202) facing the optical element (4), and the surface of the clamping block (501) is provided with a groove for mounting the temperature measuring resistor (502); The temperature measuring resistor (502) is in contact with the lower surface of the optical element (4) and is used to monitor the temperature of all areas of the optical element (4).

7. A thermal control method for use in the plane mirror thermal control device according to any one of claims 1-6, characterized in that, Includes the following steps: The temperature measuring component (5) is used to monitor the optical element (4) to obtain the real-time temperature of the optical element (4) in each region; Take one region of the optical element (4) as the reference region and calculate the real-time temperature difference between other regions and the reference region; If the real-time temperature difference is greater than or equal to the target value, the thermal control component (3) is used to reduce the real-time temperature difference so that the real-time temperature difference is less than the target value; if the real-time temperature difference is less than the target value, the temperature of each area of ​​the optical element (4) is continuously monitored.

8. A thermal control method according to claim 7, characterized in that: The reference area is the area irradiated by the light beam or the area affected by ambient heat.

9. A thermal control method according to claim 7, characterized in that, Use thermal control components (3) to reduce real-time temperature difference. Includes the following steps: The temperature in the reference region remains constant, while the temperature in the higher temperature region of the optical element (4) is reduced, and the following conditions are met: In the formula This indicates the temperature drop per unit time in the corresponding area of ​​the optical element (4) when the water-cooled pipe (302) is cooled down by water cooling and the heating resistor (303) stops working. ≥0; This indicates the temperature rise per unit time of the corresponding area of ​​the optical element (4) when the heating resistor (303) heats up and the water cooling pipe (302) is not working. ≥0; The temperature of the reference region remains constant, while the temperature of the optical element (4) is increased in a region with a lower temperature, and the following conditions are met: .

Images