Miniature ultraviolet spectrometer

Abstract

The invention discloses a miniature ultraviolet spectrometer, which comprises a light source assembly, a miniature collimating lens group, a triangular prism, a parallel glass plate, a cylindrical lens and an area array detector, the light output end of the light source assembly faces the incident plane of the miniature collimating lens set, and the emergent plane of the miniature collimating lens set faces the first face of the triangular prism. The emergent surface of the triangular prism is in close contact with the incident surface of the parallel glass plate; the emergent surface of the parallel glass plate faces the incident surface of the cylindrical lens, and is used for refracting light rays close to a total reflection critical angle to form a plurality of light beams; the emergent surface of the cylindrical lens faces the receiving end of the area array detector; and the area array detector processes the received interference fringes to obtain spectral information. According to the micro ultraviolet spectrograph provided by the embodiment of the invention, the light path structure of the spectrograph is simplified, the simplified structure can reduce the loss of light in the transmission process, and more light can reach the detector, so that the accuracy of spectral information is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of detection equipment, in particular to a miniature ultraviolet spectrometer. Background Art

[0002] The application background of ultraviolet spectrometer is extensive and in-depth, and it plays an important role in many scientific and industrial fields.

[0003] In existing technologies, such as interferometric spectrometers, the overall optical path is complex, requiring light to pass through numerous paths and nodes during transmission. Each path and node introduces a certain amount of optical loss. As the optical path becomes more complex, the accumulated optical loss also increases significantly, leading to deviations in the final spectral information.

[0004] It can be seen that how to simplify the optical path structure of the spectrometer has become a technical problem that needs to be solved urgently by those skilled in the art. Summary of the Invention

[0005] The present invention provides a miniature ultraviolet spectrometer to solve the problem of complex overall optical path in the prior art, so as to achieve the effect of simplifying the optical path structure.

[0006] In order to solve the above technical problems, an embodiment of the present invention provides a miniature ultraviolet spectrometer, comprising a light source assembly, a miniature collimating lens group, a prism, parallel glass plates, a cylindrical lens and an area array detector;

[0007] The light source assembly has a light output end facing the incident surface of the micro-collimating lens group and is used to emit the emitted light source to the micro-collimating lens group;

[0008] The micro collimating lens group has an output surface facing the first surface of the prism and is used to convert the received light source into parallel light that is vertically incident on the prism;

[0009] The prism, whose exit surface is in close contact with the incident surface of the parallel glass plate, is used to totally reflect the parallel light so that the angle of the light entering the parallel glass plate is close to the critical angle of total reflection;

[0010] The parallel glass plate has an output surface facing the incident surface of the cylindrical lens and is used to refract light close to the critical angle of total reflection to form multiple light beams;

[0011] The cylindrical lens has an output surface facing the receiving end of the area array detector and is used to focus the multiple light beams on the focal plane of the cylindrical lens to cause interference to form interference fringes;

[0012] The area array detector processes the received interference fringes to obtain spectral information.

[0013] As one of the preferred solutions, the miniature ultraviolet spectrometer further includes an ultraviolet fused quartz substrate, and the light source assembly, the miniature collimating lens group, the prism, the parallel glass plate, the cylindrical lens and the area array detector are all located on the surface of the ultraviolet fused quartz substrate.

[0014] As one preferred solution, the area array detector processes the interference fringes to obtain spectral information, including:

[0015] The area array detector processes the interference fringes to obtain light intensity-position information, and draws a spectrum scale according to the wavelength-position information of the light determined by the light source assembly;

[0016] The light intensity-position information is converted into the spectral information through the spectral scale.

[0017] As one preferred solution, the micro collimating lens group includes an aspherical lens and a spherical lens;

[0018] The aspheric lens has an incident surface facing the light output end of the light source assembly and an exit surface facing the incident surface of the spherical lens, and is used to convert the received light source into parallel light;

[0019] The spherical lens has an exit surface facing the first surface of the prism and is used to allow the parallel light to be vertically incident into the prism.

[0020] As one of the preferred solutions, the thickness of the aspheric lens and the spherical lens are both 44 microns.

[0021] As one preferred solution, the prism has a width of 88.586 microns, a length of 200 microns, and a height of 100 microns.

[0022] As one preferred solution, the parallel glass plates have a width of 100 microns, a length of 2.9 millimeters, and a thickness of 100 microns.

[0023] As one of the preferred solutions, the curvature radius of the cylindrical lens is 3.11 mm, the radial height is 0.65 mm, and the thickness is 0.35 mm.

[0024] As one preferred solution, the area array detector is a 2048-pixel area array thinned back-illuminated CCD array detector.

[0025] As one preferred solution, the surfaces of the parallel glass plates are coated with an anti-reflection film.

[0026] Compared with the prior art, the embodiments of the present invention have the following advantages:

[0027] (1) The micro ultraviolet spectrometer of the present application has a simplified optical path structure, which can reduce the loss of light in the transmission process, help ensure that more light can reach the detector, and thus ensure the accuracy of the spectral information;

[0028] (2) In the present application, the design and manufacture of the micro collimating lens group, the triangular prism, the parallel glass plate and the cylindrical lens are simple, and the microprocessing technology requirement is not high, which can effectively reduce the device size and achieve higher integration, thereby achieving the advantages of better device performance of the theoretical value of spectral information;

[0029] (3) In the present application, different wavelengths of light are dispersed based on the triangular prism and the parallel glass plate, the light emitted from the parallel glass plate is guided to the focal plane through the focusing action of the cylindrical lens, and on the focal plane, due to the mutual superposition and interference of the light, a multi-beam interference phenomenon occurs, the dispersion phenomenon and the multi-beam interference are combined, and the spectral resolution of different wavelengths of light can be achieved, the spectral resolution in the 300-400nm waveband is better than 0.3nm, and the spectral resolution in the 300-320nm waveband can reach 0.1nm, which proves that the micro ultraviolet spectrometer of the present application has good spectral resolution in the ultraviolet short waveband. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 is a structure diagram of the micro ultraviolet spectrometer in one embodiment of the present application;

[0031] Figure 2 is a sectional view of the micro collimating lens group in the micro ultraviolet spectrometer in one embodiment of the present application;

[0032] Figure 3 is a simulation Y-Z sectional view of the micro ultraviolet spectrometer in one embodiment of the present application when three monochromatic lights are incident;

[0033] Figure 4 is a simulation isometric view of the micro ultraviolet spectrometer in one embodiment of the present application when three monochromatic lights are incident;

[0034] Figure 5 is a light intensity and spatial position diagram of the area array detector in the micro ultraviolet spectrometer in one embodiment of the present application.

[0035] Figure 6 is a reflectivity curve of the micro ultraviolet spectrometer in one embodiment of the present application with the change of wavelength;

[0036] Figure 7 is a curve of the fineness coefficient of the micro ultraviolet spectrometer in one embodiment of the present application with the change of wavelength;

[0037] Figure 8 is a graph of the stripe fineness of the micro ultraviolet spectrometer in one of the embodiments of the present application as a function of wavelength;

[0038] Figure 9 is a graph of the spectral resolution of the micro ultraviolet spectrometer in one of the embodiments of the present application as a function of wavelength;

[0039] Figure 10 is a spectral calibration graph of the micro ultraviolet spectrometer in one of the embodiments of the present application.

[0040] Reference signs:

[0041] wherein 1, light source assembly; 2, micro collimating lens group; 21, aspheric lens; 22, spherical lens; 3, three-prism; 4, parallel glass plate; 5, cylindrical lens; 6, area array detector. DETAILED DESCRIPTION

[0042] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments of the present application. The purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0043] In the description of the present application, the terms "first", "second", "third", etc. are only used for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second", "third", etc. can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0044] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the two components. The terms "vertical", "horizontal", "left", "right", "up", "down" and similar expressions used herein are for illustrative purposes only, and do not indicate or imply that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0045] In the description of this application, it should be noted that, unless otherwise defined, all technical and scientific terms used in this application have the same meanings as those commonly understood by those skilled in the art. The terms used in this specification are only for the purpose of describing specific embodiments and are not intended to limit the present invention. Those skilled in the art will understand the specific meanings of the above terms in this application in specific circumstances.

[0046] An embodiment of the present invention provides a micro-ultraviolet spectrometer. For details, see Figure 1 , Figure 1 The figure shows a schematic structural diagram of a miniature ultraviolet spectrometer in one embodiment of the present invention, which specifically includes a light source assembly 1, a miniature collimating lens group 2, a prism 3, a parallel glass plate 4, a cylindrical lens 5 and an area array detector 6.

[0047] The connection relationship and function of each component are as follows:

[0048] The light source assembly 1 has a light output end facing the incident surface of the micro-collimating lens group 2 and is used to transmit the emitted light source to the micro-collimating lens group 2; the micro-collimating lens group 2 has an exit surface facing the first surface of the prism 3 and is used to convert the received light source into parallel light and vertically incident on the prism 3; the exit surface of the prism 3 is in close contact with the incident surface of the parallel glass plate 4 and is used to totally reflect the parallel light so that the angle of the light entering the parallel glass plate 4 is close to the critical angle of total reflection; the exit surface of the parallel glass plate 4 faces the incident surface of the cylindrical lens 5 and is used to refract light close to the critical angle of total reflection to form multiple light beams; the exit surface of the cylindrical lens 5 faces the receiving end of the area array detector 6 and is used to focus the multiple light beams on the focal plane of the cylindrical lens 5 to interfere and form interference fringes; the area array detector 6 processes the received interference fringes to obtain spectral information.

[0049] In the present invention, the optical path structure of the spectrometer is simplified. The simplified optical path structure can reduce the loss of light during transmission, help ensure that more light can reach the detector, and thus ensure the accuracy of spectral information.

[0050] Specifically, light emitted by a light source in the ultraviolet band (300nm-400nm) is converted into parallel light by a micro-collimating lens group 2 and vertically incident on a prism 3. The prism 3 can control the angle of the light incident on the parallel glass plate 4 to make it close to the critical angle of total reflection. The light beam can then be emitted close to the surface of the parallel glass plate 4 and focused on the focal plane by a cylindrical lens 5, resulting in multi-beam interference to obtain interference fringes. The area array detector 6 processes the interference fringes to obtain light intensity-position information, and draws a spectral scale based on the wavelength-position information of the light determined by the light source assembly 1. The light intensity-position information is converted into spectral information through the spectral scale.

[0051] When light is incident from a denser medium (such as glass) into a less dense medium (such as air), if the angle of incidence increases to a certain angle (i.e., the critical angle for total internal reflection), the light will be completely reflected back into the denser medium without entering the less dense medium. In this system, by adjusting the angle of prism 3, the light incident on parallel glass plates 4 can be made close to this critical angle, thereby achieving a specific optical effect.

[0052] In addition, the light emitted from the prism 3 and the parallel glass plate 4 is focused by the cylindrical lens 5 and guided to the focal plane. On the focal plane, due to the mutual superposition and interference of the light, a multi-beam interference phenomenon will occur.

[0053] In an embodiment of the present invention, the design of the micro-collimating lens group 2 can ensure that light from different points becomes a parallel beam after passing through the lens group; the prism 3, as a dispersion element, plays an important role in the spectrometer. By precisely controlling parameters such as the refractive index and angle of the prism 3, the propagation path of the light can be optimized and light loss can be reduced; the parallel glass plate 4 is mainly used to change the propagation direction of the light, and the parallel glass plate 4 itself has little effect on light loss. Its correct application in the optical system can ensure the smooth propagation of light, thereby avoiding unnecessary loss; the cylindrical lens 5 is mainly used to generate cylindrical beams or focus cylindrical light. By optimizing the parameters of the cylindrical lens 5, such as the radius of curvature and focal length, the focusing effect of the light can be further improved and light loss can be reduced; the array detector 6 processes the received interference fringes to obtain spectral information. In the present invention, the design and manufacture of the micro-collimating lens group 2, the prism 3, the parallel glass plate 4 and the cylindrical lens 5 are simple, and the requirements for micro-machining technology are not high. It can effectively reduce the size of the device to achieve a higher degree of integration, thereby achieving the advantage of device performance with better theoretical values ​​of spectral information;

[0054] Preferably, in the above embodiment, the miniature UV spectrometer further includes a UV fused quartz substrate, and the light source assembly 1, the miniature collimating lens group 2, the prism 3, the parallel glass plate 4, the cylindrical lens 5 and the area array detector 6 are all located on the surface of the UV fused quartz substrate.

[0055] Specifically, the prism 3, parallel glass plates 4, and cylindrical lens 5 are all made of ultraviolet fused quartz, a material with excellent light transmittance, particularly in the ultraviolet spectral region. It can transmit ultraviolet light in the wavelength range of 190 to 400 nanometers, enabling it to provide clear and accurate spectral information in ultraviolet spectrometers. Furthermore, its high light transmittance helps reduce light loss during transmission, improving the sensitivity and resolution of the spectrometer. Ultraviolet fused quartz also has high mechanical strength and is resistant to breakage or deformation. This makes it safer and more reliable when manufacturing miniature ultraviolet spectrometers, reducing instrument failures due to material damage.

[0056] Preferably, in the above embodiment, the micro collimating lens group 2 further includes an aspherical lens 21 and a spherical lens 22, such as Figure 2 As shown, Figure 2 This is a cross-sectional view of a miniature collimating lens assembly in a miniature ultraviolet spectrometer in one embodiment of the present invention. Specifically, Figure 2 The figure shows a YZ cross-sectional view of a micro-collimating lens assembly that enables a divergence angle of collimated light to be less than 5 milliradians when the numerical aperture of the object space is 0.3 micrometers.

[0057] The incident surface of the aspheric lens 21 faces the light output end of the light source assembly 1, and the exit surface of the aspheric lens 21 faces the incident surface of the spherical lens 22, and is used to convert the received light source into parallel light; the spherical lens 22, whose exit surface faces the first surface of the prism 3, is used to make the parallel light vertically incident into the prism 3.

[0058] The design of the aspheric lens 21 enables it to receive the light output from the light source assembly 1 and convert these divergent light rays into parallel light rays. This function is crucial for subsequent optical processing because parallel light rays can be more accurately incident on the prism 3 or other optical elements, reducing the loss and distortion of light during transmission; the spherical lens 22 is located between the aspheric lens 21 and the prism 3. Its main function is to make the parallel light rays output by the aspheric lens 21 vertically incident on the first surface of the prism 3. This step ensures that the light can be transmitted in the prism 3 according to the predetermined path, thereby realizing spectral separation and detection.

[0059] Preferably, in the above embodiment, the surface of the parallel glass plate 4 is coated with an anti-reflection film. This is to avoid interference from light constantly reflected inside the plate. Therefore, a film is coated on the surface of the parallel glass plate 4 to absorb excess light.

[0060] Preferably, in the above embodiment, a coordinate system is established with the light output end of the light source assembly 1 as the Z axis and the direction perpendicular to the substrate as the X axis, wherein the Z axis is the length, the Y axis is the width, and the X axis is the height. Figure 3 1 is a simulated YZ cross-sectional view of a micro-ultraviolet spectrometer in one embodiment of the present invention when three types of monochromatic light are incident; Figure 4 This is a simulated isometric view of a micro-UV spectrometer in one embodiment of the present invention when three monochromatic lights are incident. The basic parameters of the components in the micro-UV spectrometer are:

[0061] The prism 3 has a width of 88.586 microns, a length of 200 microns, and a height of 100 microns; in the micro-collimating lens group 2, the thickness of the aspheric lens 21 and the spherical lens 22 are both 44 microns; the parallel glass plate 4 has a width of 100 microns, a length of 2.9 mm, and a thickness of 100 microns; the curvature radius of the cylindrical lens 5 is 3.11 mm, the radial height is 0.65 mm, and the thickness is 0.35 mm; the cylindrical lens 5 is 3.53 mm away from the point where light enters the prism 3 in the Z-axis direction; the detector is 9.86 mm away from the point where light enters the prism 3 in the Z-axis direction.

[0062] Preferably, in the above embodiment, the area array detector 6 is a 2048-pixel area array thinned back-illuminated CCD array detector.

[0063] Preferably, in the above embodiment, in order to ensure that there are at least 15 outgoing light beams above the parallel glass plate 4 , that is, at least 15 reflections within the parallel glass plate 4 , the length of the parallel glass plate 4 needs to be calculated.

[0064] Specifically, when the number of outgoing light rays is 15, the intensity distribution function of the interference fringes is similar to that when the number of outgoing light rays is infinite. Both have the same absolute maximum, except that the absolute maximum of the intensity distribution curve of the interference fringes when the number of outgoing light rays is 15 is wider, and there is a series of secondary maximums.

[0065] The more light beams emitted, the better the device's interference performance parameters, finesse coefficient, fringe fineness, and spectral resolution. Considering the overall size of the device, a minimum of 15 light beams was chosen.

[0066] To calculate the length of the parallel glass plate 4, according to the law of refraction - Snell's law, the ratio of the sine of the incident angle to the sine of the refraction angle is equal to the ratio of the refractive indices of the two media, that is,

[0067] n1sin(θ1)=n2sin(θ2)

[0068] Where n1 is the refractive index of the parallel glass plate 4, n2 is the refractive index of air, θ1 is the incident angle, and θ2 is the exit angle. In the present invention, light is emitted close to the flat glass at 300 nanometers, with an exit angle of 88 degrees. Therefore, the calculated incident angle is 42.22 degrees.

[0069] Specifically, after multiple simulations, it was found that setting the emission angle to 88 degrees had better effects than setting it to greater than 88 degrees. Therefore, the emission angle is preferably 88 degrees.

[0070] When the wavelength of light is greater than 300nm, under the condition of a certain incident angle, the exit angle and reflectivity will change accordingly, and the fineness coefficient of the multi-beam interference fringes will be significantly reduced; at the same time, according to the principle of light dispersion, the absolute maximum points on the Y-axis corresponding to light of different wavelengths will also shift. This is the basic basis for the device to perform spectral resolution.

[0071] After obtaining the incident angle parallel to the glass plate 4, according to the formula:

[0072]

[0073] Where p is the number of outgoing light beams (equivalent to the number of reflections in the parallel glass plate 4), d is the width of the glass plate, which is set to 100 microns, and the incident angle θ1 is 42.22 degrees, from which the length l of the parallel glass plate 4 is calculated.

[0074] Among them, the relevant parameters of the prism 3 that controls the incident angle can be calculated based on geometric optics.

[0075] In the above embodiment, light of different wavelengths is dispersed based on the prism 3 and the parallel glass plates 4. The light emitted from the parallel glass plates 4 is focused by the cylindrical lens 5 and guided to the focal plane. At the focal plane, due to the mutual superposition and interference of the light rays, a multi-beam interference phenomenon occurs. The combination of the dispersion phenomenon and the multi-beam interference can achieve spectral resolution of light of different wavelengths.

[0076] Preferably, in the above embodiment, the area array detector 6 processes the interference fringes to obtain spectral information. Figure 5 This is a diagram of light intensity and spatial position of the array detector 6 in the micro-ultraviolet spectrometer in one embodiment of the present invention. The processing process includes:

[0077] The area array detector 6 processes the interference fringes to obtain light intensity-position information, and draws a spectrum scale according to the wavelength-position information of the light determined by the light source assembly 1; and converts the light intensity-position information into spectrum information through the spectrum scale.

[0078] By processing the three monochromatic lights according to the area array detector 6, an image of the spatial position (Y coordinate) and the light intensity (positional spatial radiance) can be obtained.

[0079] Preferably, in the above embodiment, Figure 6 is a graph showing the variation of reflectivity of a micro-UV spectrometer with wavelength in one embodiment of the present invention; Figure 7 is a graph showing the variation of the finesse factor of a micro-UV spectrometer with wavelength in one embodiment of the present invention; Figure 8 is a graph showing the variation of fringe fineness with wavelength of a miniature ultraviolet spectrometer in one embodiment of the present invention; Figure 9 is a graph showing the variation of spectral resolution of a miniature ultraviolet spectrometer as a function of wavelength in one embodiment of the present invention; Figure 10 It is a spectrum calibration diagram of a miniature ultraviolet spectrometer in one embodiment of the present invention.

[0080] Figure 6-Figure 8 The curves of the s-wave and p-wave interference fringes together characterize the quality of the multi-beam interference fringes. The fineness coefficient is strongly correlated with the fringe fineness, making the fringe fineness curve more valuable as a reference. Both curves are derived based on reflectivity. The curves show that the quality of the multi-beam interference fringes for s-waves is superior to that for p-waves, while the quality of the interference fringes for light near 300nm is good. The quality of the interference fringes for light between 300nm and 400nm is within an acceptable range.

[0081] Among them, R_s is the reflectivity of the s-wave, R_p is the reflectivity of the p-wave; F_s is the fineness coefficient of the s-wave, F_p is the fineness coefficient of the p-wave; S_s is the fringe fineness of the s-wave, S_p is the fringe fineness of the p-wave.

[0082] Specifically, Figure 9 As the wavelength increases, the spectral resolution of the device decreases. However, regardless of S-wave or P-wave, the device has the ability to distinguish at least two wavelengths with a spacing of 0.3nm. The closer to 300nm, the stronger the spectral resolution of the device. s Refers to the spectral resolution of the s-wave, lamminp s Represents the spectral resolution of the p-wave.

[0083] Figure 10 This is a spectral scale diagram for a miniature UV spectrometer in one embodiment of the present invention. The spectral scale represents the correspondence between position information (Y coordinate) and wavelength λ. The Y coordinate corresponding to a specific wavelength is taken at the maximum radiance in the spatial radiance diagram of that wavelength. When analyzing detector data, the spectral scale is required to convert it into spectral data.

[0084] Compared with the prior art, the embodiments of the present invention have the following advantages:

[0085] (1) The present invention simplifies the optical path structure of the spectrometer. The simplified optical path structure can reduce the loss of light during transmission, helping to ensure that more light can reach the detector, thereby ensuring the accuracy of spectral information;

[0086] (2) In the present invention, the design and fabrication of the micro-collimating lens group, prism, parallel glass plate, and cylindrical lens are simple and do not require high micro-machining technology, which can effectively reduce the device size and achieve higher integration, thereby achieving the advantage of device performance with better theoretical values ​​of spectral information;

[0087] (3) In the present invention, the spectral resolution of light of different wavelengths is achieved by combining the dispersion phenomenon of light of different wavelengths by a prism with the principle of multi-beam interference. The spectral resolution is better than 0.3 nm in the 300-400 nm band, and can reach 0.1 nm in the 300-320 nm band, which proves that the micro-ultraviolet spectrometer of the present invention has good spectral resolution capability in the ultraviolet short-wave band.

[0088] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A miniature ultraviolet spectrometer, characterized in that: It includes a light source assembly, a micro collimating lens group, a prism, a parallel glass plate, a cylindrical lens and an area array detector; The light source assembly has a light output end facing the incident surface of the micro-collimating lens group and is used to emit the emitted light source to the micro-collimating lens group; The micro collimating lens group has an output surface facing the first surface of the prism and is used to convert the received light source into parallel light that is vertically incident on the prism; The prism, whose exit surface is in close contact with the incident surface of the parallel glass plate, is used to totally reflect the parallel light so that the angle of the light entering the parallel glass plate is close to the critical angle of total reflection; The parallel glass plate has an output surface facing the incident surface of the cylindrical lens and is used to refract light close to the critical angle of total reflection to form multiple light beams; The cylindrical lens has an output surface facing the receiving end of the area array detector and is used to focus the multiple light beams on the focal plane of the cylindrical lens to cause interference to form interference fringes; The area array detector processes the received interference fringes to obtain spectral information.

2. The miniature ultraviolet spectrometer according to claim 1, wherein: The micro ultraviolet spectrometer further comprises an ultraviolet fused quartz substrate, and the light source assembly, the micro collimating lens group, the prism, the parallel glass plate, the cylindrical lens and the area array detector are all located on the surface of the ultraviolet fused quartz substrate.

3. The miniature ultraviolet spectrometer according to claim 1, wherein: The area array detector processes the interference fringes to obtain spectral information, including: The area array detector processes the interference fringes to obtain light intensity-position information, and draws a spectrum scale according to the wavelength-position information of the light determined by the light source assembly; The light intensity-position information is converted into the spectral information through the spectral scale.

4. The miniature ultraviolet spectrometer according to claim 1, wherein The micro collimating lens group includes an aspherical lens and a spherical lens; The aspheric lens has an incident surface facing the light output end of the light source assembly and an exit surface facing the incident surface of the spherical lens, and is used to convert the received light source into parallel light; The spherical lens has an exit surface facing the first surface of the prism and is used to allow the parallel light to be vertically incident into the prism.

5. The miniature ultraviolet spectrometer according to claim 4, wherein: The thickness of the aspheric lens and the spherical lens are both 44 microns.

6. The miniature ultraviolet spectrometer according to claim 1, wherein: The prism has a width of 88.586 microns, a length of 200 microns, and a height of 100 microns.

7. The miniature ultraviolet spectrometer according to claim 1, wherein: The parallel glass plates have a width of 100 μm, a length of 2.9 mm, and a thickness of 100 μm.

8. The miniature ultraviolet spectrometer according to claim 1, wherein: The cylindrical lens has a curvature radius of 3.11 mm, a radial height of 0.65 mm, and a thickness of 0.35 mm.

9. The miniature ultraviolet spectrometer according to claim 1, wherein: The area array detector is a 2048-pixel area array thin-type back-illuminated CCD array detector.

10. The miniature ultraviolet spectrometer according to claim 1, wherein: The surfaces of the parallel glass plates are coated with an anti-reflection film.

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