Semiconductor factory material distribution control system and method based on multi-system cooperation

Abstract

The invention relates to the technical field of industrial automation and semiconductor manufacturing, in particular to a semiconductor factory material distribution control system and method based on multi-system collaboration, which can realize full-process automatic closed-loop control of material distribution by integrating a WMS, an MES, an OA system and an AGV / PDA device. Comprising the steps that after an MES work order module generates a work order, a WMS work order module is triggered to distribute material batches, an AGV control module dynamically dispatches and distributes the work order to a workshop, a PDA device scans a code, checks and synchronizes data, and a related department is notified through an OA cooperation module when a task is completed or abnormal, so that the problems of information island, much manual intervention, response lag and the like in a semiconductor factory are solved. And the material distribution efficiency and the cross-department cooperation capability are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of industrial automation and semiconductor manufacturing technology, in particular to a semiconductor factory material distribution control system and method based on multi-system cooperation. BACKGROUND

[0002] In semiconductor manufacturing, the automated production line is the core part. Robots are introduced into the automated production line to take charge of tasks such as handling, assembly, and detection. Through the integration of wafer processing, chip packaging, and testing, high-efficiency and accurate automated processing is achieved. However, the existing semiconductor automation production has the following defects: 1. System fragmentation: WMS, MES, and OA run independently, and material status, production progress, and approval processes cannot be linked in real time. 2. Artificial dependence: AGV scheduling relies on fixed rules and cannot adapt to the high dynamic demand of semiconductor production (such as emergency orders and process changes). 3. Traceability fault: Material information is scattered in different systems, making it difficult to quickly locate the responsible link for quality problems.

[0003] 4. External environment affecting materials: In the traditional manual handling mode, sensitive materials are affected by the vibration of the trolley and the particle pollution caused by personnel entering and exiting the warehouse door.

[0004] CN113850551A discloses a factory material distribution method, system, and electronic device. The distribution system includes a resource planning subsystem that receives production plan orders and their online times, divides each production plan order into different process segments according to process procedure types, and determines the material information required for each process segment. A call material subsystem triggers the allocation of materials required for each process segment in a supporting branch factory based on the order of the online times of each production plan order. The call material subsystem also receives a call request sent by the assembly factory for the currently online production plan order, triggers the collection of the materials required for each process segment in the currently online production plan order, and uniformly distributes the materials required for each process segment to the assembly line corresponding to each process segment in the assembly factory. The call request is sent a predetermined time before the online time of the currently online production plan order, and the call request includes the material information and material distribution time of each process segment in the currently online production plan order.

[0005] The lack of effective integration between systems results in the inability to link information such as material status, production progress, and approval processes in real time, which affects production coordination efficiency. Additionally, AGV scheduling flexibility is poor and cannot adapt to the high dynamic demand of semiconductor production. SUMMARY

[0006] In view of the problems in the prior art, the present application provides a semiconductor factory material distribution control method based on multi-system cooperation, which solves the problems of information island, manual intervention, response lag and the like in a semiconductor factory, and significantly improves material distribution efficiency and cross-department cooperation capability.

[0007] The present application is realized by the following technical solutions: A semiconductor factory material distribution control system based on multi-system cooperation, comprising a WMS, a MES, an OA system and an AGV / PDA cooperative device; In the WMS, MES and OA system, the WMS work order module is used for managing inventory allocation, material preparation and material warehouse-out, determining the minimum material requisition unit and processing material labels; the MES scheduling module is used for synchronizing production demand, generating a material requisition order to the WMS work order module according to a work order BOM; and the OA cooperation module is used for processing process approval and issuing a notification of completion of each system task node; In the AGV / PDA cooperative system, the AGV control module is used for executing physical distribution, binding a material requisition order and a delivery task, and dynamically adjusting the delivery task and route according to the priority of the material requisition order; the PDA device is provided with a code scanner and a verification module, and the verification module is used for realizing man-machine interaction and data verification in the mobile mode.

[0008] Preferably, the task priority of the AGV control module is executed according to the urgency of the MES work order.

[0009] Preferably, the inventory in the WMS work order module is dynamically adjusted according to the effective period.

[0010] Preferably, the OA cooperation module automatically matches the approval rules based on the event type (completion / abnormality).

[0011] Preferably, it comprises: S100, initializing each control system; S200, making a material requisition application, the MES scheduling module generating a production work order, generating a material demand instruction and sending it to the WMS work order module; S300, material requisition review, after receiving the material requisition application, the production supervisor reviews its rationality, and notifies the warehouse to issue materials after the review is passed; S400, AGV control module calling a vehicle & issuing materials, after receiving the notification of the warehouse that the materials can be issued, the production supervisor calls the AGV car with the PDA verification module, the car arrives to scan the code, loads the materials to the car and goes to each unloading stop; S500, on-site material receiving, the AGV car goes to each workshop according to the planned route to distribute materials, stops at each workshop stop and notifies the on-site material receiving, the on-site material receiving personnel scans the code to receive materials through the PDA device, checks the materials and shelves them to the line-side warehouse, updates the material requisition and production order status after receiving the materials, and the production can begin.

[0012] Preferably, in S100, each control system is initialized, including: S101, maintaining the default information of materials in each classroom; S102, initializing the material receiving point information; S103, initializing the line-side warehouse to be shelved.

[0013] Preferably, in S200, material requisition is performed, the MES scheduling module generates a production order, generates a material demand instruction and sends it to the WMS order module, including: S201, the MES scheduling module receives a production order from an upstream system or creates a production order locally, and locks the order to prevent production; S202, creating a material requisition according to the BOM of the order, inputting information such as material number, quantity, and use purpose; S203, synchronizing the material requisition to the warehouse WMS order module, and sending a message to the warehouse personnel through the OA collaboration module to prepare materials.

[0014] Preferably, in S300, material requisition is audited, the production supervisor receives the material requisition and audits its rationality, and notifies the warehouse to issue materials after the audit, including: S301, the production supervisor approves the submitted material requisition on the PDA device; S302, the material requisition is audited and the warehouse is notified again to prepare materials, the WMS order module matches the inventory batch according to the material demand, and prepares materials according to the first-in-first-out principle; S303, after completing the preparation of materials, the material batch is scanned through the PDA device, the minimum material batch label is generated according to the minimum material requisition unit and pasted to the material, and the OA collaboration module is notified that the production can issue materials.

[0015] Preferably, in S400, the AGV control module calls the car & issues materials, the production supervisor receives the notification that the warehouse can issue materials, calls the AGV car to come to transport materials with the PDA device, the car arrives to scan the code to load materials to the car and goes to each unloading stop, including: S401, the AGV control module receives the material taking instruction, adjusts the material taking order according to the dynamic priority, and plans the path to the material issuing point to take materials; S402, the AGV car arrives at the material taking point, and the production material issuer scans the code to load materials to the AGV car through the PDA device; S403: After the material passes the verification through the PDA device, the AGV will execute the action of delivering the material to the designated workstation in the workshop and simultaneously update the inventory data of the WMS work order module; if the verification fails, the material will be frozen and the exception handling process will be triggered through the OA collaboration module.

[0016] Preferably, in S500, materials are received on site. The AGV delivers materials to each workshop according to the planned route, stops at each workshop stop and notifies the on-site material collection. The on-site material collector scans the code to receive the materials through the PDA device, checks the received materials and puts them on the shelf in the line warehouse. After the materials are received, the status of the material collection order and the production work order is updated, and production can begin, including: S501: The AGV transports materials to the docking points in each workshop, stops, and uses sound and light to call the material handler to come and pick up the materials; In step S502, the material picker in the workshop scans the material code with a PDA device to confirm receipt of the material. The confirmed material is delivered to the workshop line warehouse by default. S503: After the material receiver has finished receiving the materials, the AGV is released and goes to other workshops to unload the materials in sequence. The material pickers in other workshops have finished receiving the materials and updated the material pick list status. The OA collaboration module sends a notification to the production material distributors and the warehouse that the material batching is complete, and the material pick list status is updated. S504: After receiving the materials, the production supervisor confirms that the delivery task is completed, pushes the production readiness notification to the OA collaboration module, updates the work order status, and releases the work order to the production line to start production.

[0017] The present invention further provides an electronic device, comprising: one or more processors; The storage device is used to store one or more programs, and when the one or more programs are executed by the one or more processors, the one or more processors are enabled to implement the method.

[0018] The present invention also provides a non-volatile computer-readable storage medium having a computer program stored thereon, wherein the computer program implements the method when executed by a processor.

[0019] Compared with the prior art, the present invention has the following beneficial effects: The present invention provides a semiconductor factory material distribution control system based on multi-system collaboration, which generates and manages production work orders through the WMS work order module, synchronizes the production progress to the WMS in real time, allocates inventory batches and generates AGV material fetching instructions through the WMS scheduling module, and supports the first-in-first-out rule. It receives task status data through the OA collaboration module, pushes notifications and triggers cross-departmental approval processes, executes material fetching and delivery tasks through the AGV control module, supports dynamic priority adjustment and path planning, and scans the code through the PDA verification module to bind work order and material information, and verifies consistency in real time.

[0020] The semiconductor factory material distribution control method based on multi-system cooperation can further improve the whole system efficiency while breaking through the flow of people, the flow of goods and the flow of information, shorten the AGV response time by 30%, and reduce the time consumption of cross-department cooperation by 80%; through the data connection and linkage of each system, the material error rate is further reduced, the efficiency of problem abnormality tracing is improved, the material error rate is reduced to <=0.1%, and the quality problem tracing time is <=10 minutes; the control method provided is a whole system linkage control method, the process data is uniformly summarized and controlled, the compliance of workshop logistics management is enhanced, and the requirements of the semiconductor industry ISO 9001, EIA-649 and the like on whole-process tracing are met. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is the architecture diagram of the semiconductor factory material distribution control system based on multi-system cooperation of the application; Figure 2 It is the flowchart of the semiconductor factory material distribution control method based on multi-system cooperation of the application. DETAILED DESCRIPTION

[0022] The application will be further described in detail below in combination with specific embodiments, which are an explanation of the application rather than a limitation.

[0023] The application discloses a semiconductor factory material distribution control system based on multi-system cooperation, referring to Figure 1 In the WMS, MES and OA systems, the WMS work order module is used for managing inventory allocation, material preparation and material warehouse-out, determining the minimum material requisition unit and processing material labels; the MES scheduling module is used for synchronizing production demand, generating a material requisition order to the WMS work order module according to a work order BOM. The inventory quantity in the WMS work order module is dynamically adjusted according to the validity period, specifically, the AGV task queue is adjusted in real time according to the work order urgency (such as customer delivery time, production line stop risk) in the WMS work order module, and the batch allocation logic is optimized in combination with the WMS inventory validity period (such as photoresist shelf life).

[0024] The semiconductor factory material distribution control system based on multi-system cooperation integrates WMS, MES, OA systems and AGV / PDA devices, realizes seamless connection and sharing of data through different systems, can realize whole-process automatic closed-loop control of material distribution, and specifically: the MES work order module generates a work order to trigger the WMS work order module to allocate material batches, the AGV control module dynamically schedules and distributes to the workshop, the PDA verification module scans and verifies the code and synchronizes the data, and when the task is completed or abnormal, the OA cooperation module is used to notify the relevant departments, so as to solve the problems of information island, manual intervention and response lag in the semiconductor factory, and significantly improve the material distribution efficiency and cross-department cooperation ability.

[0025] In an embodiment, the OA collaborative module is used for processing the process approval, the notification of the completion of each system task node, and the OA collaborative module automatically matches the approval rules based on the event type (completion / abnormality). The notification of the OA collaborative module includes: An electronic confirmation sheet is automatically generated when the task is completed, and the production planning department is notified; An abnormal event triggers a parallel signing process of the quality department, the storage department, and the procurement department.

[0026] The approval rules of the OA collaborative module make the process approval more standardized and efficient, and reduce the interference of human factors, thereby ensuring the controllability and rationality of the logistics distribution process. In the material distribution process, if there are abnormal situations such as inconsistent batches, specifications, and work order requirements, the system can freeze the material in time and trigger the abnormal processing process through the OA system.

[0027] In an embodiment, in the AGV / PDA collaborative system, the AGV control module is used for executing physical distribution, binding the conveying task and the material requisition sheet, dynamically adjusting the conveying task and the route adjustment according to the priority of the material requisition sheet, and the task priority of the AGV control module is executed according to the MES work order urgency.

[0028] The AGV control module executes the task priority according to the MES work order urgency to perform the task, which can ensure the execution of the urgent task and ensure the flexibility and efficiency of the production distribution.

[0029] In an embodiment, the PDA verification module is used for realizing the man-machine interaction and data verification in the mobile mode. The on-site material receiver scans the code to receive the material through the PDA, checks the material and shelves it to the line-side warehouse, updates the state of the material requisition sheet and the production work order after the material receiving is completed, and can improve the production efficiency and the equipment utilization rate.

[0030] Referring to Figure 2 The application also provides a semiconductor factory material distribution control method based on multi-system collaboration, comprising: S100, initializing each control system; S200, applying for material requisition, the MES scheduling module generates a production work order, generates a material demand instruction, and sends it to the WMS work order module; S300, material requisition audit, after receiving the material requisition application, the production supervisor audits its rationality, and notifies the warehouse to issue materials after the audit is passed; S400, AGV control module calls the car & issues materials, after receiving the notification of the warehouse that the materials can be issued, the production supervisor calls the AGV car to come to transport the materials by using the PDA verification module, the car arrives, scans the code to load the materials to the car, and goes to each unloading stop; S500, on-site material receiving, the AGV car goes to each workshop according to the planned route to distribute materials, stops at each workshop stop and notifies the on-site material receiving, the on-site material receiving personnel scans the code to receive materials through the PDA device, checks the materials and shelves them to the line side warehouse, updates the material receiving sheet and the production order state after receiving the materials, and the production can start.

[0031] In an embodiment, in S100, each control system is initialized, including: S101, maintaining the default information of materials in each classroom; S102, initializing the material receiving point information; S103, initializing the line side warehouse to be shelved.

[0032] In an embodiment, in S200, material application is made, the MES scheduling module generates a production order, generates a material demand instruction and sends it to the WMS order module, including: S201, the MES scheduling module receives a production order under an upstream system or creates a production order locally, and locks the order to be not producible; S202, creating a material application according to the BOM of the order, inputting the material number, quantity, use purpose and other information; S203, synchronizing the material application to the warehouse WMS order module, and the OA collaboration module sends a message to notify the warehouse personnel to prepare materials.

[0033] In an embodiment, in S300, material application is audited, the production supervisor receives the material application and audits its rationality, and notifies the warehouse to issue materials after the audit, including: S301, the production supervisor approves the submitted material application on the PDA device; S302, the material application is audited and the warehouse is notified again to prepare materials, the WMS order module matches the inventory batch according to the material demand, and prepares materials according to the first-in-first-out principle; S303, after completing the preparation of materials, the PDA device is scanned to generate a minimum material batch label according to the minimum material unit, and the OA collaboration module is notified that the production can issue materials.

[0034] In an embodiment, in S400, the AGV control module calls the car & issues materials, the production supervisor receives the notification that the warehouse can issue materials, calls the AGV car to come to transport materials with the PDA device, the car arrives to scan the code to load materials to the car and goes to each unloading stop, including: S401, the AGV control module receives the material taking instruction, adjusts the material taking order according to the dynamic priority, and plans the path to go to the material issuing point to take materials; S402, the AGV car arrives at the material taking point, and the production material issuer scans the code to load materials to the AGV car through the PDA device; S403, after the PDA device checks the material passing, the AGV will perform the action of delivering the material to the designated station in the workshop, and synchronously update the inventory data of the WMS work order module; if the check fails, the material is frozen and the OA collaborative module triggers the exception handling process.

[0035] In a certain embodiment, in S500, the on-site material is received, the AGV car goes to each workshop according to the planned route to deliver materials, stops at each workshop stop point and notifies the on-site material receiving personnel, the on-site material receiving personnel scans the code through the PDA device to receive the material, checks the material and shelves it to the line side warehouse, updates the status of the material receiving sheet and the production work order after the material receiving is completed, and the production can be started, including: S501, the AGV car delivers materials to each workshop stop point, stops and calls the material receiving personnel through sound and light to come and receive the material; S502, the workshop material receiving personnel scans the material code through the PDA device to confirm the material receiving, and the confirmed material is defaulted to the workshop line side warehouse; S503, the material receiving personnel completes the material receiving, the AGV car is released and goes to other workshop stop points to unload materials in turn, the other workshop material receiving personnel updates the material receiving sheet state, and sends the material distribution completion to the production material supplier and the warehouse through the OA collaborative module to update the material receiving sheet state; S504, after the material receiving is completed, the production supervisor confirms that the distribution task is completed, pushes the production ready notification to the OA collaborative module, updates the work order state, and the work order is released to the production line to start production.

[0036] The semiconductor factory material distribution control method based on multi-system collaboration realizes the full-process automation and intelligentization from the production demand synchronization, material receiving application, review, material distribution to on-site material receiving through the close cooperation between WMS, MES, OA system and AGV / PDA collaborative system, real-time information transmission between systems, reduction of manual intervention and communication cost, shortening of material distribution cycle, improvement of overall operation efficiency.

[0037] The application further provides an electronic device, comprising: one or more processors; a storage device for storing one or more programs, which, when executed by the one or more processors, cause the one or more processors to implement the method.

[0038] The application further provides a non-volatile computer readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the method.

[0039] The above merely describes the preferred embodiments of the present application, and is not intended to limit the technical solutions of the present application in any way. Those skilled in the art should understand that, without departing from the spirit and principle of the present application, the technical solutions can also be modified and replaced in several simple ways, and these modifications and replacements also all belong to the protection scope covered by the claims.

Claims

1. A semiconductor factory material distribution control system based on multi-system collaboration, characterized in that: Including WMS, MES, OA system and AGV / PDA collaborative equipment; In WMS, MES, and OA systems, the WMS work order module is used to manage inventory allocation, material preparation and material delivery, determine the minimum material collection unit, and process material labels; The MES scheduling module is used to synchronize production needs and generate material requisitions based on the work order BOM to the WMS work order module; the OA collaboration module is used to handle process approvals and issue notifications on the completion of each system task node; In the AGV / PDA collaborative system, the AGV control module is used to perform physical distribution and bind the transport tasks to the material picking list, dynamically adjusting the transport tasks and routes according to the priority of the material picking list; the PDA device is equipped with a scanner and a verification module, and the verification module is used to realize human-computer interaction and data verification during movement.

2. The semiconductor factory material distribution control system based on multi-system collaboration according to claim 1 is characterized in that: The task priority of the AGV control module is executed according to the urgency of the MES work order.

3. The semiconductor factory material distribution control system based on multi-system collaboration according to claim 1, characterized in that: The inventory quantity in the WMS work order module is dynamically adjusted according to the validity period.

4. The semiconductor factory material distribution control system based on multi-system collaboration according to claim 1, characterized in that: The OA collaboration module automatically matches approval rules based on event type (completed / abnormal).

5. A semiconductor factory material distribution control method based on multi-system collaboration, characterized in that: include: S100, initializing each control system; S200: Apply for material requisition, the MES scheduling module generates a production work order, generates a material demand instruction and sends it to the WMS work order module; S300, Material Requisition Review: After receiving the material requisition application, the production supervisor reviews its rationality and notifies the warehouse to dispatch the materials if approved. S400, the AGV control module calls and dispatches materials. After the production supervisor receives notification from the warehouse that materials can be dispatched, he uses the PDA verification module to call the AGV to transport the materials. When the AGV arrives, it scans the code to load the materials onto the AGV and proceeds to various unloading stops. S500, on-site material collection, the AGV cart delivers materials to each workshop according to the planned route, stops at the stop point of each workshop and notifies the on-site material collection. The on-site material collector scans the code through the PDA device to collect the materials, checks the received materials and puts them on the shelf in the line warehouse. After the material collection is completed, the status of the material requisition form and production work order is updated, and production can begin.

6. The semiconductor factory material distribution control method based on multi-system collaboration according to claim 1, characterized in that: In S100, each control system is initialized, including: S101, maintain the default information of materials in each classroom; S102, initializing the material receiving point information; S103, initialize the line side warehouse that needs to be put on the shelf.

7. The semiconductor factory material distribution control method based on multi-system collaboration according to claim 1, characterized in that: In S200, a material request is made, and the MES scheduling module generates a production work order, generates a material demand instruction, and sends it to the WMS work order module, including: S201: The MES scheduling module receives a production work order from the upstream system or creates a production work order locally, and locks the work order so that it cannot be produced; S202: Create a material requisition based on the work order BOM and enter information such as material number, quantity, and usage; S203, synchronously apply for material collection to the warehouse WMS work order module, and the OA collaboration module sends a message to notify the warehouse staff to prepare materials.

8. The semiconductor factory material distribution control method based on multi-system collaboration according to claim 1, characterized in that: In S300, the material requisition is reviewed. After receiving the material requisition, the production supervisor reviews its rationality. If the review is passed, the warehouse is notified to issue the materials, including: S301, the production supervisor approves the submitted material requisition on the PDA device; S302: After the material requisition passes review, the warehouse is notified again to prepare the materials. The WMS work order module matches the inventory batches according to the material requirements and prepares the materials according to the first-in-first-out principle. S303, after completing the material preparation, scan the material batch through the PDA device, generate the minimum material batch label according to the minimum material collection unit and paste it to the material, and notify the production through the OA collaborative module that the material can be issued.

9. The semiconductor factory material distribution control method based on multi-system collaboration according to claim 1, characterized in that: In S400, the AGV control module calls and dispatches materials. After receiving notification from the warehouse that materials can be dispatched, the production supervisor uses a PDA device to call an AGV to transport the materials. When the AGV arrives, it scans the code, loads the materials onto the AGV, and proceeds to various unloading stops, including: S401: After receiving the material collection instruction, the AGV control module adjusts the material collection order according to the dynamic priority and plans a path to go to the material delivery point to collect the materials; S402: The AGV arrives at the material collection point, and the production material distributor scans the code and loads the material onto the AGV using a PDA device. S403: After the material passes the verification through the PDA device, the AGV will execute the action of delivering the material to the designated workstation in the workshop and simultaneously update the inventory data of the WMS work order module; if the verification fails, the material will be frozen and the exception handling process will be triggered through the OA collaboration module.

10. The semiconductor factory material distribution control method based on multi-system collaboration according to claim 1, characterized in that: In S500, materials are collected on-site. AGVs deliver materials to various workshops according to the planned route. They stop at each workshop and notify the on-site material collection. The on-site material collector scans the code on the PDA device to collect the materials, checks the materials, and puts them on the shelf in the line warehouse. After the materials are collected, the status of the material collection order and production work order is updated, and production can begin, including: S501: The AGV transports materials to the docking points in each workshop, stops, and uses sound and light to call the material handler to come and pick up the materials; In step S502, the material picker in the workshop scans the material code with a PDA device to confirm receipt of the material. The confirmed material is delivered to the workshop line warehouse by default. S503: After the material receiver has finished receiving the materials, the AGV is released and goes to other workshops to unload the materials in sequence. The material pickers in other workshops have finished receiving the materials and updated the material pick list status. The OA collaboration module sends a notification to the production material distributors and the warehouse that the material batching is complete, and the material pick list status is updated. S504: After receiving the materials, the production supervisor confirms that the delivery task is completed, pushes the production readiness notification to the OA collaboration module, updates the work order status, and releases the work order to the production line to start production.

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