Electric beam source furnace baffle suitable for ultrahigh vacuum, quick response and tangential swing

Abstract

The invention belongs to the technical field of molecular beam source furnaces, and particularly relates to an electric beam source furnace baffle suitable for ultrahigh vacuum, quick response and tangential swing, which comprises a source furnace baffle driving component and a source furnace baffle action transmission component which are mounted on one side of an atmospheric environment, and a source furnace baffle action component mounted on one side of a vacuum environment, the source furnace baffle driving assembly and the source furnace baffle action transmission assembly transmit motion through a transmission pin, and the baffle action transmission assembly controls the source furnace baffle action assembly to move through a transmission shaft. The invention aims to more quickly and stably control the opening and closing of the baffle of the source furnace, enhance the stability and reliability of the movement of the baffle and optimize the quality of an epitaxial film; and meanwhile, due to the design of an integrated flange type and a quick disassembly type, time and labor are saved during maintenance operation.

Description

Technical Field

[0001] This invention belongs to the field of molecular beam source furnace technology, specifically an electric beam source furnace baffle suitable for ultra-high vacuum, fast response, and tangential oscillation. Background Technology

[0002] The source furnace is the core component of a molecular beam epitaxy (MBE) system. The source furnace baffle itself eliminates the adverse effects of impurities from various sources on the molecular beam, ensuring the accuracy of the results. Simultaneously, the rapid and stable operation of the baffle indirectly affects the stability and repeatability of the generated molecular beam. Therefore, a source furnace baffle assembly that provides rapid response while maintaining stable and reliable operation is one of the key technologies for MBE equipment. Summary of the Invention

[0003] The purpose of this invention is to provide an electrically operated beam source furnace baffle suitable for ultra-high vacuum, fast response, and tangential oscillation. This beam source furnace baffle features a fast response time, stable and reliable operation, and easy disassembly, replacement, and maintenance.

[0004] The objective of this invention is achieved through the following technical solution:

[0005] This invention includes a source furnace baffle driving assembly, a source furnace baffle motion transmission assembly, and a source furnace baffle motion assembly. The source furnace baffle motion assembly includes a mounting flange, a swing arm bracket weldment, a baffle swing arm, a baffle rod, and a source furnace baffle. The mounting flange has an atmospheric environment on one side and a vacuum environment on the other. The source furnace baffle driving assembly and the source furnace baffle motion transmission assembly are located in the atmospheric environment, while the swing arm bracket weldment, the baffle swing arm, the baffle rod, and the source furnace baffle are located in the vacuum environment. A swinging bellows is fixedly connected to the surface of the mounting flange facing the atmospheric environment, and a swing arm passes through the swinging bellows. One end of the swing arm bracket weldment is fixedly connected to the surface of the mounting flange facing the vacuum environment, and the baffle swing arm is rotatably connected to the other end of the swing arm bracket weldment. The source furnace baffle motion transmission assembly includes a fixed base and a shutter bracket. The shutter and the swing bellows are both located within a fixed base, with the shutter rotatably connected to the fixed base. The source furnace baffle drive assembly includes a stepper motor, a fixed plate, and a position adjustment rod. The stepper motor is fixed to the fixed base via the fixed plate. The output shaft of the stepper motor is connected to one end of the shutter via the position adjustment rod. One end of the swing rod is located in the atmospheric environment and connected to the other end of the shutter, while the other end is located in a vacuum environment and connected to one end of the baffle swing rod. The other end of the baffle swing rod is connected to the source furnace baffle via a baffle rod. The stepper motor drives the shutter to swing via the position adjustment rod. The shutter drives the baffle rod and the source furnace baffle to swing tangentially via the swing rod and the baffle swing rod, thereby realizing the opening and closing action of the source furnace baffle.

[0006] The position adjustment rod includes a swing rod, an adjustment rod, and a joint bearing. One end of the swing rod is connected to the output shaft of the stepper motor. The two ends of the adjustment rod are respectively provided with left-hand threads and right-hand threads. The left-hand threads and right-hand threads at both ends of the adjustment rod are respectively threaded to the joint bearing. The joint bearing at one end is connected to the other end of the swing rod, and the joint bearing at the other end is connected to one end of the shutter. By rotating the adjustment rod, the extension and retraction of the joint bearings at both ends are achieved, thereby controlling the opening and closing angle of the baffle rod and the source furnace baffle.

[0007] A protective cover is hinged to the fixed plate, and the position adjustment rod is located inside the protective cover.

[0008] The fixed base has a hollow structure, and the shutter frame is T-shaped. Both sides of the horizontal side of the T-shape extend in the same direction along the thickness direction to form extensions. The shutter frame is rotatably connected to the fixed base through the extensions on both sides. One end of the swing rod passes through the horizontal side of the T-shape and is fastened to the shutter frame and the swing rod by a hexagonal nut. The end of the vertical side of the T-shape is connected to the position adjustment rod.

[0009] Both sides of the extension are provided with through holes A, and each through hole A is provided with a pivot pin. The shutter frame is rotatably connected to the fixed seat through the pivot pin. The middle of the horizontal side of the "T" shape is provided with a through hole B for the swing rod to pass through. The end of the vertical side of the "T" shape is provided with a notch to avoid interference with the position adjustment rod, and a through hole C is provided at the end of the vertical side of the "T" shape. A transmission pin is provided in the through hole C. The shutter frame is connected to the position adjustment rod through the transmission pin.

[0010] One end of the swing arm bracket weldment is fixed to a blind hole on the mounting flange by a through-hole type hexagonal screw, and the other end of the swing arm bracket weldment is fixed to a fixed shaft, and the baffle swing arm is rotatably mounted on the fixed shaft.

[0011] The source furnace baffle and baffle rod rotate around the axial center line of the fixed shaft. The source furnace baffle is always parallel to the axial center line of the fixed shaft during the movement. The direction of movement of the source furnace baffle is the tangent direction of the circle formed by the center of the fixed shaft and the perpendicular distance between the axial center line of the fixed shaft and the source furnace baffle.

[0012] The other end of the swing rod is connected to one end of the baffle swing rod via a drive shaft. One end of the baffle rod is detachably connected to the other end of the baffle swing rod via a half-clamp ring. The other end of the baffle rod is connected to the source furnace baffle.

[0013] The source furnace baffle is a circular flat plate, and the other end of the baffle rod is fixedly connected to the side of the source furnace baffle facing away from the source furnace.

[0014] The source furnace baffle is "bowl-shaped", with the bowl opening facing the source furnace. The other end of the baffle rod is fixedly connected to one side of the source furnace baffle. The source furnace baffle is made of niobium.

[0015] The advantages and positive effects of this invention are as follows:

[0016] 1. The present invention can control the opening and closing of the source furnace baffle more quickly and stably, enhance the smoothness and reliability of the baffle movement, and optimize the quality of the epitaxial film.

[0017] 2. The source furnace baffle of this invention features a "tangential oscillation" mechanism, resulting in low resistance during the switching process and smooth, reliable movement. Furthermore, the use of a stepper motor as the power source enables the rapid permissioning or interruption of the molecular beam generated by the source furnace.

[0018] 3. The integrated flange and quick-release design of this invention ensures time-saving and labor-saving maintenance operations.

[0019] 4. The source furnace baffle of the present invention can also be made of niobium material, which reduces the cost of the source furnace baffle, extends its service life, reduces the number of maintenance or replacements, improves production efficiency, enhances the stability and reliability of the baffle movement, and optimizes the quality of the epitaxial film without affecting the process operation. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 This is one of the main sectional views of the present invention (the beam source furnace baffle is in the "open" position);

[0022] Figure 3 This is the second front sectional view of the present invention (the beam source furnace baffle is in the "closed" position);

[0023] Figure 4 This is a three-dimensional structural schematic diagram of the furnace baffle driving assembly of the present invention;

[0024] Figure 5 This is a three-dimensional structural diagram of the position adjustment rod in the furnace baffle drive assembly of the present invention;

[0025] Figure 6 This is a front sectional view of the furnace baffle action transmission assembly of the present invention;

[0026] Figure 7 for Figure 6 A three-dimensional structural diagram of a medium shutter;

[0027] Figure 8 This is a front sectional view of the furnace baffle action assembly of the present invention;

[0028] Figure 9This is a schematic diagram of another structure of the source furnace baffle and baffle rod in the source furnace baffle action assembly of the present invention;

[0029] Figure 10 for Figure 9 Structural sectional view of the baffle plate of the Zhongyuan furnace;

[0030] Wherein: 1 is the source furnace baffle drive assembly, 11 is the stepper motor, 12 is the fixed plate, 13 is the position adjustment rod, 131 is the swing short rod, 132 is the distance adjustment rod, 133 is the spherical bearing, 14 is the protective cover, and 15 is the hinge;

[0031] 2 is the source furnace baffle action transmission assembly, 21 is the fixed seat, 22 is the rotating shaft pin, 23 is the shutter bracket, 231 is the extension part, 232 is the through hole A, 233 is the through hole B, 234 is the through hole C, 235 is the notch, 24 is the internal hex screw A, and 25 is the internal hex screw B.

[0032] 3 is the source furnace baffle action assembly, 31 is the mounting flange, 311 is the swing bellows, 312 is the swing rod, 32 is the swing rod bracket weldment, 321 is the fixed shaft, 322 is the through hole type hexagon socket screw, 33 is the baffle swing rod, 34 is the baffle rod, 35 is the half clamping ring, 36 is the source furnace baffle, and 37 is the U-shaped groove;

[0033] 4 is the drive pin, and 5 is the drive shaft. Detailed Implementation

[0034] The invention will now be described in further detail with reference to the accompanying drawings.

[0035] This invention is applicable to ultra-high vacuum, with the overall vacuum level of the equipment reaching 10. -8 Pa or above. For example... Figures 1-8 As shown, the present invention includes a source furnace baffle driving assembly 1, a source furnace baffle motion transmission assembly 2, and a source furnace baffle motion assembly 3. The source furnace baffle motion assembly 3 includes a mounting flange 31, a swing arm bracket weldment 32, a baffle swing arm 33, a baffle rod 34, and a source furnace baffle 36. The mounting flange 31 serves as a boundary, with one side of the mounting flange 31 being the atmospheric environment and the other side being a vacuum environment. The source furnace baffle driving assembly 1 and the source furnace baffle motion transmission assembly 2 are located in the atmospheric environment, while the swing arm bracket weldment 32, the baffle swing arm 33, the baffle rod 34, and the source furnace baffle 36 are located in the vacuum environment.

[0036] In this embodiment, the mounting flange 31 is a CF flange with a metal seal. A swing bellows 311 is fixedly connected to the mounting flange 31 facing the atmospheric environment, and a swing rod 312 passes through the swing bellows 311. One end of the swing rod support weldment 32 is fixedly connected to the mounting flange 31 facing the vacuum environment, and the other end of the baffle swing rod 33 is rotatably connected to the swing rod support weldment 32. The source furnace baffle action transmission assembly 2 includes a fixed base 21 and a shutter bracket 23. The fixed base 21 is fixed to the mounting flange 31 facing the atmospheric environment by four internal hexagonal screws A24. The shutter bracket 23 and the swing bellows 311 are both located inside the fixed base 21, and the shutter bracket 23 rotates with the fixed base 21. The connection includes a stepper motor 11, a fixed plate 12, and a position adjustment rod 13. The fixed plate 12 is fixed to the fixed base 21 by two hexagonal screws B25. The stepper motor 11 is mounted on the fixed plate 12. The output shaft of the stepper motor 11 is connected to one end of the shutter frame 23 through the position adjustment rod 13. One end of the swing rod 312 is located in the atmospheric environment and is connected to the other end of the shutter frame 23. The other end of the swing rod 312 is located in the vacuum environment and is connected to one end of the baffle swing rod 33. The other end of the baffle swing rod 33 is connected to the active furnace baffle 36 through the baffle rod 34. The swing bellows 311 in this embodiment has a cycle life of approximately 180,000 times. The actual service life is related to the usage conditions and the service life value may fluctuate slightly. The size of the mounting flange 31 can be selected according to the actual situation of the equipment.

[0037] This embodiment uses a stepper motor 11 as the power source, which has fast start-up, large acceleration, and fast and smooth deceleration. The opening and closing response time of the entire electric beam source furnace baffle is about 0.2s, and the speed is adjustable. In this embodiment, a protective cover 14 is hinged to the fixed plate 12 via a hinge 15. The position adjustment rod 13 is located inside the protective cover 14, ensuring the convenience of fine-tuning the position adjustment rod 13. At the same time, the presence of the protective cover 14 also prevents the operator from accidentally touching the position adjustment rod 13, which would affect the opening and closing of the source furnace baffle 36.

[0038] Stepper motor 11 drives position adjustment rod 13 to rotate. In this embodiment, position adjustment rod 13 includes a swing rod 131, an adjusting rod 132, and a joint bearing 133. One end of the swing rod 131 is connected to the output shaft of stepper motor 11. The swing rod 131 can rotate 360° around the output shaft of stepper motor 11, allowing the stepper motor 11 to control the opening and closing of the furnace baffle 36 in both forward and reverse directions, and ensuring that there is no motion interference with the protective cover 14 installed on the fixed plate 12. The two ends of the adjusting rod 132 are... The adjusting rod 132 has left-hand and right-hand internal threads. The left-hand and right-hand internal threads at both ends are tightened with the left and right-hand external threaded spherical bearings 133, respectively. One end of the spherical bearing 133 is connected to the other end of the swing rod 131, and the other end is connected to one end of the shutter bracket 23. Rotating the adjusting rod 132 allows for the extension and retraction of the spherical bearings 133 at both ends (i.e., adjusting the center distance between the spherical bearings 133), thereby controlling the opening and closing angles of the baffle rod 34 and the source furnace baffle 36. In the position adjusting rod 13 rotating around the output shaft of the stepper motor 11, the length of the swing rod 131 determines the final opening and closing angle α of the source furnace baffle 36 and the baffle rod 34. However, in practical applications, the swing rod 131 is difficult to disassemble and is not replaced after initial assembly. The adjusting rod 132 has left-hand and right-hand threads at its two ends, respectively, and is fitted with spherical bearings 133. By rotating the adjusting rod 132, the vertical distance between the axial center line of the transmission pin 4 and the axial center line of the swing rod 131 can be adjusted, thereby controlling the opening and closing angle α of the final source furnace baffle 36 and baffle rod 34. This feature allows for adjustment of the opening and closing angle α of the source furnace baffle 36 and baffle rod 34 outside a vacuum, solving the problem of interference in the opening and closing of the source furnace baffle caused by various processing issues.

[0039] In this embodiment, the fixed base 21 has a hollow structure, and the shutter frame 23 is T-shaped. Both sides of the horizontal side of the T-shape extend in the same direction along the thickness direction to form an extension 231. Both sides of the extension 231 have through holes A232. Each through hole A232 has a pivot pin 22. The axial center lines of the pivot pins 22 on both sides are collinear. The shutter frame 23 is rotatably connected to the fixed base 21 through the pivot pins 22. In this embodiment, the through hole A232 is an internal thread hole. The external thread and the internal thread hole on the pivot pin 22 are fixed, realizing the rotation of the shutter frame 23 around the fixed axis of the pivot pin 22. A through hole B233 is provided in the middle of the horizontal side of the "T" shape. One end of the swing rod 312 passes through the through hole B233 and is secured to the shutter 23 by a hexagonal nut 26, thus achieving the purpose of transmitting the power source generated by the stepper motor 11 on the atmospheric environment side to the vacuum environment side. The end of the vertical side of the "T" shape has a notch 235 to avoid interference with the position adjustment rod 13, and a through hole C234 is provided at the end of the vertical side of the "T" shape. A transmission pin 4 is provided in the through hole C234. The shutter 23 is connected to the spherical bearing 133 at the other end of the position adjustment rod 13 through the transmission pin 4, thereby realizing the transmission of the power generated by the stepper motor 11 to the source furnace baffle action transmission assembly 2. The fixed base 21 and the shutter 13 in this embodiment are made of low-density but high-strength LY12 aluminum alloy.

[0040] In this embodiment, one end of the rocker arm bracket weldment 32 is fixed to two blind holes on the mounting flange 31 by two through-hole type internal hexagon screws 322. The other end of the rocker arm bracket weldment 32 is welded with a fixed shaft 321. The baffle rocker arm 33 is rotatably mounted on the fixed shaft 321, and the axial center line of the fixed shaft 321 is determined as the rotation axis of the baffle rocker arm 33. The source furnace baffle 36 and baffle rod 34 rotate around the axial centerline of the fixed shaft 321 along with the baffle swing rod 33. During the movement, the source furnace baffle 36 remains parallel to the axial centerline of the fixed shaft 321. The direction of movement of the source furnace baffle 36 is the tangent to a circle formed by the center of the fixed shaft 321 and the perpendicular distance between the axial centerline of the fixed shaft 321 and the source furnace baffle 36, thus achieving the "tangential swing" of the source furnace baffle. Compared to existing baffle up-and-down swing motion methods, the present invention has low resistance during the switching process and stable and reliable movement. Furthermore, by using a stepper motor 11 as the power source, it achieves the purpose of quickly allowing or interrupting the molecular beam generated by the source furnace. In this embodiment, the source furnace baffle 36 and baffle rod 34 are both made of high-purity tantalum (purity 99.95%), and both are heat-resistant (heat resistant above 2000℃).

[0041] In this embodiment, the other end of the swing rod 312 is connected to the U-shaped groove 37 on one end of the baffle swing rod 33 via the transmission shaft 5, so that the action of the source furnace baffle action transmission assembly 2 is transmitted to the baffle swing rod 33, thereby driving the source furnace baffle 36 and the baffle rod 34 to rotate around the axial center line of the fixed shaft 321 welded on the swing rod bracket weldment 32, so as to achieve the purpose of opening and closing the source furnace baffle 36. One end of the baffle rod 34 is detachably connected to the other end of the baffle swing rod 33 via a half-clamp ring 35. The half-clamp ring 35 is easy to install and remove, making the maintenance, cleaning or direct replacement of the source furnace baffle 36 and the baffle rod 34 more convenient. The other end of the baffle rod 34 is connected to the source furnace baffle 36. In this embodiment, the source furnace baffle 36 is a circular flat plate, and the other end of the baffle rod 34 is fixed to the side of the source furnace baffle 36 facing away from the source furnace.

[0042] Because the equipment needs to achieve an ultra-high vacuum working environment, the entire equipment must be baked at 200℃ during the vacuum preparation process. The entire source furnace baffle is made of high-temperature resistant 304 stainless steel, LY12, and tantalum materials; however, the characteristics of the stepper motor 11 determine that it is not resistant to baking, so the stepper motor 11 must be removed during the baking process. The entire source furnace baffle drive assembly 1 can be disassembled simply by removing two hex socket head cap screws B25 and pulling out the transmission pin 5, which is a convenient operation.

[0043] like Figure 9 , Figure 10 As shown, another shape of the source furnace baffle 36 of the present invention is a "bowl shape". When the source furnace baffle 36 is in the "closed position", the bowl opening faces the source furnace, and the other end of the baffle rod 34 is fixedly connected to one side of the source furnace baffle 36; the source furnace baffle 36 is made of niobium. Niobium and tantalum are elements in the same group and have very similar physical and chemical properties: niobium is also a ductile metal with a high melting point. The replacement of tantalum with niobium in the source furnace baffle 36 and its processing into a "bowl shape" provides a theoretical basis.

[0044] The density of niobium (8.57 g / cm³) 3 ) is only tantalum (16.654 g / cm³) 3 Half of the original weight allows for the adsorption of more Al atoms by the niobium source furnace baffle 36, and the use of the source furnace baffle 36 is not affected by the weight of the source furnace baffle 36, thus extending the service life of the source furnace baffle 36 and reducing the frequency of maintenance or replacement.

[0045] Compared to planar designs such as circles and ellipses, the "bowl-shaped" structure has a larger relative adsorption surface and a stronger adsorption capacity for Al atoms. During the rapid opening and closing of the source furnace baffle 36, the adsorbed Al atoms are less likely to fall off again and contaminate the source material, thus affecting the final quality of the epitaxial film.

[0046] Niobium metal raw materials are cheaper than tantalum, and the cost of making the same source furnace baffle 36 is lower for niobium source furnace baffles.

[0047] The furnace baffle 36 and the baffle rod 34 are connected by spot welding. The fixing method is not unique; welding, riveting, or screw fastening are also possible. The connection structure between the furnace baffle 36 and the baffle rod 34 is not unique; the structure of the connection can be designed according to the specific fixing method. In this invention, a hollow connecting sleeve is provided on one side of the "bowl-shaped" furnace baffle 36, and the other end of the baffle rod 34 is inserted into the connecting sleeve and fixedly connected to the furnace baffle 36.

[0048] The working principle of this invention is as follows:

[0049] The stepper motor 11 drives the shutter frame 23 to swing around the pivot pin 22 via the position adjustment rod 13. The shutter frame 23 drives the baffle swing rod 33 to swing around the fixed shaft 321 via the swing rod 312. In turn, the baffle swing rod 33 drives the baffle rod 34 and the source furnace baffle 36 to swing tangentially, thereby realizing the opening and closing action of the source furnace baffle 36.

[0050] The above description is merely an embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, extensions, etc., made within the spirit and principles of the present invention are included within the scope of protection of the present invention.

Claims

1. A baffle plate for an electric beam source furnace suitable for ultra-high vacuum, fast response, and tangential oscillation, characterized in that: The system includes a source furnace baffle drive assembly (1), a source furnace baffle motion transmission assembly (2), and a source furnace baffle motion assembly (3). The source furnace baffle motion assembly (3) includes a mounting flange (31), a swing arm bracket weldment (32), a baffle swing arm (33), a baffle rod (34), and a source furnace baffle (36). The mounting flange (31) has an atmospheric environment and a vacuum environment on its two sides, respectively. The source furnace baffle drive assembly (1) and the source furnace baffle motion transmission assembly (2) are located in the atmospheric environment. The swing arm bracket weldment (32), the baffle swing arm (33), the baffle rod (34), and the source furnace baffle (36) are located in the vacuum environment. The furnace baffle (36) is located in a vacuum environment; a swing bellows (311) is fixedly connected to the surface of the mounting flange (31) facing the atmospheric environment, and a swing rod (312) passes through the swing bellows (311); one end of the swing rod bracket weldment (32) is fixedly connected to the surface of the mounting flange (31) facing the vacuum environment, and the baffle swing rod (33) is rotatably connected to the other end of the swing rod bracket weldment (32); the source furnace baffle action transmission assembly (2) includes a fixed seat (21) and a shutter (23), and the fixed seat (21) is fixedly connected to the surface of the mounting flange (31) facing the atmospheric environment. On the surface of the atmospheric environment, the shutter (23) and the swing bellows (311) are both located inside the fixed base (21), and the shutter (23) is rotatably connected to the fixed base (21); the source furnace baffle drive assembly (1) includes a stepper motor (11), a fixed plate (12) and a position adjustment rod (13), the stepper motor (11) is fixed to the fixed base (21) through the fixed plate (12), the output shaft of the stepper motor (11) is connected to one end of the shutter (23) through the position adjustment rod (13), and one end of the swing rod (312) is located in the atmospheric environment and The other end of the swing rod (312) is connected to the shutter (23), and the other end of the swing rod (312) is located in a vacuum environment and connected to one end of the baffle swing rod (33). The other end of the baffle swing rod (33) is connected to the active furnace baffle (36) through the baffle rod (34). The stepper motor (11) drives the shutter (23) to swing through the position adjustment rod (13). The shutter (23) drives the baffle rod (34) and the active furnace baffle (36) to swing tangentially through the swing rod (312) and the baffle swing rod (33), thereby realizing the opening and closing action of the active furnace baffle (36).

2. The electric beam source furnace baffle suitable for ultra-high vacuum, fast response, and tangential oscillation as described in claim 1, characterized in that: The position adjustment rod (13) includes a swing rod (131), an adjustment rod (132), and a joint bearing (133). One end of the swing rod (131) is connected to the output shaft of the stepper motor (11). The two ends of the adjustment rod (132) are respectively provided with left-hand threads and right-hand threads. The left-hand threads and right-hand threads at both ends of the adjustment rod (132) are respectively threaded to the joint bearing (133). The joint bearing (133) at one end is connected to the other end of the swing rod (131), and the joint bearing (133) at the other end is connected to one end of the shutter (23). By rotating the adjustment rod (132), the extension and retraction of the joint bearings (133) at both ends are realized, thereby controlling the opening and closing angle of the baffle rod (34) and the source furnace baffle (36).

3. The electric beam source furnace baffle suitable for ultra-high vacuum, fast response, and tangential oscillation as described in claim 1, characterized in that: A protective cover (14) is hinged to the fixed plate (12) via a hinge (15), and the position adjustment rod (13) is located inside the protective cover (14).

4. The electric beam source furnace baffle suitable for ultra-high vacuum, fast response, and tangential oscillation as described in claim 1, characterized in that: The fixed base (21) is a hollow structure. The shutter frame (23) is T-shaped. The left and right sides of the horizontal side of the T-shape extend in the same direction along the thickness direction to form extensions (231). The shutter frame (23) is rotatably connected to the fixed base (21) through the extensions (231) on both sides. One end of the swing rod (312) passes through the horizontal side of the T-shape and is fastened to the shutter frame (23) and the swing rod (312) by a hexagonal nut (26). The end of the vertical side of the T-shape is connected to the position adjustment rod (13).

5. The electric beam source furnace baffle suitable for ultra-high vacuum, fast response, and tangential oscillation as described in claim 4, characterized in that: Both sides of the extension (231) are provided with through holes A (232), and each through hole A (232) is provided with a pivot pin (22). The shutter frame (23) is rotatably connected to the fixed seat (21) through the pivot pin (22). The middle of the horizontal side of the "T" shape is provided with a through hole B (233) for the swing rod (312) to pass through. The end of the vertical side of the "T" shape is provided with a notch (235) to avoid interference with the position adjustment rod (13), and a through hole C (234) is provided at the end of the vertical side of the "T" shape. A transmission pin (4) is provided in the through hole C (234), and the shutter frame (23) is connected to the position adjustment rod (13) through the transmission pin (4).

6. The electric beam source furnace baffle suitable for ultra-high vacuum, fast response, and tangential oscillation as described in claim 1, characterized in that: One end of the swing arm bracket weldment (32) is fixed to the blind hole on the mounting flange (31) by a through-hole type internal hexagon screw (322), and the other end of the swing arm bracket weldment (32) is fixed to a fixed shaft (321). The baffle swing arm (33) is rotatably mounted on the fixed shaft (321).

7. The electric beam source furnace baffle suitable for ultra-high vacuum, fast response, and tangential oscillation as described in claim 6, characterized in that: The source furnace baffle (36) and baffle rod (34) rotate around the axial center line of the fixed shaft (321). The source furnace baffle (36) is always parallel to the axial center line of the fixed shaft (321) during the movement. The direction of movement of the source furnace baffle (36) is the tangent direction of the circle formed by the center of the fixed shaft (321) and the perpendicular distance between the axial center line of the fixed shaft (321) and the source furnace baffle (36).

8. The electric beam source furnace baffle suitable for ultra-high vacuum, fast response, and tangential oscillation as described in claim 1, characterized in that: The other end of the swing rod (312) is connected to one end of the baffle swing rod (33) via the transmission shaft (5). One end of the baffle rod (34) is detachably connected to the other end of the baffle swing rod (33) via the half-clamp ring (35). The other end of the baffle rod (34) is connected to the source furnace baffle (36).

9. The electric beam source furnace baffle suitable for ultra-high vacuum, fast response, and tangential oscillation as described in claim 8, characterized in that: The source furnace baffle (36) is a circular flat plate, and the other end of the baffle rod (34) is fixedly connected to the side of the source furnace baffle (36) facing away from the source furnace.

10. The electric beam source furnace baffle suitable for ultra-high vacuum, fast response, and tangential oscillation as described in claim 8, characterized in that: The source furnace baffle (36) is "bowl-shaped" with the bowl opening facing the source furnace. The other end of the baffle rod (34) is fixedly connected to one side of the source furnace baffle (36). The source furnace baffle (36) is made of niobium.

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