Coating equipment with angle-adjustable sample holder

Abstract

The invention discloses coating equipment with an angle-adjustable sample holder, which comprises a main cabin body, a vacuum pump assembly, a floating seat, a flange seat, an umbrella-shaped sample holder, a transmission rod and a first driver, a vacuum cavity is arranged in the main cabin body, and the vacuum pump assembly is communicated with the vacuum cavity; the floating seat is arranged at the upper part of the mounting hole of the main cabin body in a liftable manner, an elastic sealing sleeve is connected between the floating seat and the mounting hole, the flange seat is arranged at the lower side of the floating seat and extends into the vacuum cavity, and the elastic sealing sleeve surrounds the outer side of the flange seat; the umbrella-shaped sample rack comprises a plurality of carrier plates, the plurality of carrier plates are respectively hinged to the lower end of the flange seat, the hinge axes of the carrier plates are parallel to the radial plane of the flange seat, a through hole is formed in the flange seat, and the transmission rod is axially and movably mounted in the through hole; the first driver is in transmission connection with the transmission rod in the axis direction, a plurality of rack parts are arranged at the lower end of the transmission rod, gear parts are arranged at the ends, close to the flange base, of the multiple carrying plates, and the rack parts are meshed with the gear parts.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of coating processing, in particular to a coating equipment with an angle-adjustable sample holder. BACKGROUND

[0002] Coating processing refers to a technology of depositing a nanometer or micrometer thin film on the surface of a substrate to improve the performance of the substrate surface, such as wear resistance, corrosion resistance, oxidation resistance, optical properties, and electrical properties. According to different deposition principles, coating processing can be classified into evaporation coating, sputtering coating, ion beam deposition, and other types.

[0003] A self-rotation uniform evaporation system is disclosed in Chinese patent application No. CN119392175A, published on February 7, 2025, which includes a cabin body, a substrate holder, and a substrate table. The system also includes a revolution-rotation module installed in the cabin body, including a revolution driving mechanism and a rotation driving mechanism for driving the substrate holder; an evaporation material control module, including a heating module, an evaporation conduction cavity, a gas concentration detector, and a solenoid valve, for realizing the control of evaporation material diffusion time; a height adjustment module, including a main hydraulic lifting rod and a secondary hydraulic lifting rod, for realizing the height adjustment of the substrate holder relative to the evaporation source. Through the rotation design of the substrate holder, the substrate holder rotates while revolving, significantly improving the uniformity of film thickness during evaporation.

[0004] The substrate holder of the existing self-rotation uniform evaporation system is suitable for planar substrates. Through the driving design of revolution combined with rotation, the evaporation material is uniformly distributed in every corner of the substrate. However, for substrates with curved profiles, it is difficult to dynamically adjust the spatial posture of the substrate in the evaporation chamber in real time, which makes it difficult to ensure the uniformity of coating on curved substrates while ensuring the sealing performance of the entire evaporation chamber. SUMMARY

[0005] (I) Technical problems solved

[0006] To address the deficiencies in the prior art, the present application provides a coating equipment with an angle-adjustable sample holder, which solves the problem of the substrate holder of the existing self-rotation uniform evaporation system, which cannot dynamically adjust the spatial posture of the substrate in the evaporation chamber in real time for substrates with curved profiles, making it difficult to ensure the uniformity of coating on curved substrates while ensuring the sealing performance of the entire evaporation chamber.

[0007] (II) Technical solutions

[0008] The present application provides the following technical solutions:

[0009] The coating equipment with adjustable angle sample holder comprises a main cabin, a vacuum pump assembly, a floating seat, a flange seat, an umbrella-shaped sample holder, a transmission rod and a first driver, the main cabin is internally provided with a vacuum cavity, the vacuum pump assembly is arranged outside the main cabin and communicates with the vacuum cavity, and an installation hole is formed in the upper portion of the main cabin;

[0010] The floating seat is arranged in the upper portion of the installation hole in a liftable manner, an elastic sealing sleeve is connected between the floating seat and the installation hole, the flange seat is installed on the lower side of the floating seat, the elastic sealing sleeve is arranged around the outer side of the flange seat, and the flange seat is gap-fitted with the installation hole and extends to the inside of the vacuum cavity.

[0011] The umbrella-shaped sample holder comprises a plurality of carrier plates which are circumferentially spaced apart around the flange seat, the plurality of carrier plates are respectively hingedly installed at the lower end of the flange seat, the hinged axis of the carrier plate is parallel to the radial plane of the flange seat, a through hole is formed in the inside of the flange seat, and the transmission rod is axially movably installed in the through hole.

[0012] The first driver is installed on the upper side of the floating seat and is in transmission connection with the transmission rod in the axial direction, the lower end of the transmission rod is provided with a plurality of rack portions, one end of the plurality of carrier plates close to the flange seat is provided with a gear portion, and the rack portion is in meshing connection with the gear portion.

[0013] Preferably, the rack portion extends and is arranged in parallel to the axial direction of the transmission rod, the carrier plate is a fan-shaped carrier plate, the gear portion is a fan-shaped gear, and the rotation plane where the gear portion is located is arranged perpendicularly to the plate surface of the carrier plate; the center angle of the fan-shaped gear is within the range of 15°-45° with the hinged axis of the carrier plate as the center.

[0014] Preferably, the main shaft of the first driver is stop-rotation connected with a first screw rod, the upper side of the floating seat is further provided with a first nut, the first nut is in screwing connection with the first screw rod, and the first screw rod is coaxially arranged with the transmission rod.

[0015] The upper end of the transmission rod is fixedly installed with a connecting sleeve, the connecting sleeve is in rotation connection with the first screw rod in the circumferential direction of the transmission rod, and the connecting sleeve is in clamping connection with the first screw rod in the axial direction of the transmission rod.

[0016] Preferably, a guide block is fixedly installed in the inside of the flange seat, a sliding groove is formed in the outer side of the transmission rod and extends and is arranged in parallel to the axial direction of the transmission rod; the sliding groove is in sliding connection with the guide block in the axial direction of the transmission rod, and the sliding groove is in stop-rotation connection with the guide block in the circumferential direction of the transmission rod.

[0017] Preferably, the upper side of the mounting hole is further provided with a fixing seat, the floating seat comprises a first seat plate and a second seat plate, and the first seat plate, the second seat plate and the fixing seat are arranged in parallel and spaced apart from top to bottom;

[0018] The elastic sealing sleeve is an elastic bellows, which is sealingly connected between the fixing seat and the second seat plate; a rigid sealing sleeve is further arranged between the second seat plate and the first seat plate, and the rigid sealing sleeve is arranged around the outer side of the flange seat.

[0019] Preferably, the second seat plate is an annular seat plate, the inner side of the second seat plate is provided with an annular convex edge, the annular convex edge is coaxially arranged with the flange seat, the annular convex edge surrounds the outer side of the flange seat, and a roller bearing is further arranged between the annular convex edge and the flange seat.

[0020] Preferably, a second screw rod is rotatably arranged on the fixing seat, the first seat plate is provided with a avoiding hole corresponding to the second screw rod, the first seat plate is further provided with a second driver, the second driver is in transmission connection with the upper end of the second screw rod, the second seat plate is provided with a second nut, and the second nut is in threaded connection with the second screw rod.

[0021] Preferably, the second screw rod and the second nut are provided in two groups, the two groups of second screw rods are symmetrically distributed about the transmission rod, the two groups of second screw rods protrude from the upper side of the first seat plate, the upper end of the second screw rod is provided with a driven pulley, the main shaft of the second driver is provided with a driving pulley, and the driving pulley is connected with the two groups of driven pulleys through a synchronous belt.

[0022] Preferably, a third driver is further arranged, a gear shaft is rotatably arranged on the floating seat, the gear shaft is arranged in parallel and spaced apart from the transmission rod, a transmission belt is connected between the main shaft of the third driver and the gear shaft, the lower end of the gear shaft is fixedly connected with a revolute gear, the upper part of the flange seat is fixedly provided with a revolute gear ring, the revolute gear is in meshing connection with the revolute gear ring, and the revolute gear and the revolute gear ring are sealingly arranged in the rigid sealing sleeve.

[0023] Preferably, a plurality of film thickness crystal oscillator probes are arranged on the carrier plate, and the plurality of film thickness crystal oscillator probes are arranged in a radial direction of the carrier plate.

[0024] (Three) beneficial effects

[0025] Compared with the prior art, the present application provides a film coating equipment with an angle-adjustable sample holder, which has the following beneficial effects:

[0026] The coating equipment with an adjustable angle sample holder adopts a design form of a main cabin body, a vacuum pump assembly, a floating seat, a flange seat, an umbrella-shaped sample holder, a transmission rod and a first driver, the main cabin body is internally provided with a vacuum cavity, the vacuum pump assembly is arranged outside the main cabin body and communicates with the vacuum cavity, and the vacuum pump assembly is used for pumping out air in the main cabin body to make the vacuum cavity reach a required vacuum environment. The floating seat is arranged in an upper portion of a mounting hole of the main cabin body in a liftable manner, an elastic sealing sleeve is connected between the floating seat and the mounting hole, the flange seat is arranged at a lower side of the floating seat and is surrounded by the elastic sealing sleeve, and the umbrella-shaped sample holder is mounted at a lower end of the flange seat. The floating seat provides a liftable and adjustable mounting basis for the flange seat and the umbrella-shaped sample holder, the height position of the umbrella-shaped sample holder can be flexibly adjusted according to evaporation requirements, the elastic sealing sleeve can adapt to the lifting change of the floating seat and also ensures that the vacuum cavity is always completely isolated from the external environment.

[0027] The umbrella-shaped sample holder includes a plurality of carrier plates which are circumferentially spaced apart about the flange seat, the plurality of carrier plates are respectively hingedly mounted at the lower end of the flange seat, the hinged axes of the carrier plates are parallel to the radial plane of the flange seat, and the plurality of carrier plates of the umbrella-shaped sample holder can swing up and down relative to the flange seat by an angle. On the one hand, when swung to a retracted state, a dome-shaped structure is formed, which can meet the fixing requirements of large-size curved substrates. On the other hand, the plurality of carrier plates can be independently fixed to install corresponding small-size substrates. In addition, when the carrier plates are swung to a maximum expanded angle, i.e., in a horizontal state, the fixing requirements of large-size planar substrates are met, and the umbrella-shaped sample holder is more adaptable to substrates of different sizes and shapes.

[0028] In addition, the transmission rod is movably arranged in the through hole of the flange seat in an axial direction, the first driver is drivingly connected with the transmission rod in the axial direction, the transmission rod is drivingly engaged with the carrier plates through the gear strip-gear part, the linear motion of the transmission rod can be converted into the up and down swinging of the carrier plates, the plurality of carrier plates are circumferentially distributed and share one transmission rod, and the synchronous and angular adjustment of all the carrier plates can be ensured. For small-size curved or special-shaped substrates, the angle of the carrier plates can be adjusted in real time during the coating process, the relative direction between the substrate surface and the evaporation source can be changed by adjusting the angle of the carrier plates, i.e., the incident angle of the evaporation particles relative to the substrate surface is dynamically changed, so that the deposition path and coverage of the film particles on the substrate surface of complex shape are optimized, the edge accumulation caused by the shadow effect is reduced, and the film thickness difference problem of different areas of the substrate caused by the fixed angle is prevented.

[0029] The key is that the elastic sealing sleeve + floating seat + flange seat clearance fit constitutes a floating seal structure, and the transmission rod + rack part + gear part constitutes an angle transmission mechanism. It is the coordination design of the floating seal and the angle transmission that can adjust the height of the umbrella-shaped sample holder up and down without breaking the vacuum, and can real-time, accurate and synchronous adjust the angle of multiple carrier plates. Thus, the purpose of real-time dynamic adjustment of the spatial posture of the substrate in the evaporation chamber is achieved, the uniformity of the coating of the curved substrate is ensured, and the sealing performance of the entire evaporation chamber is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 It is a perspective view of the coating equipment in the specific embodiment of the coating equipment with an angle-adjustable sample holder of the present application;

[0031] Figure 2 It is a perspective view of the floating seat and the umbrella-shaped sample holder in the specific embodiment of the coating equipment with an angle-adjustable sample holder of the present application;

[0032] Figure 3 It is Figure 2 It is a front view of the umbrella-shaped sample holder at the maximum expansion angle;

[0033] Figure 4 It is Figure 2 It is a front view of the umbrella-shaped sample holder in the retracted state;

[0034] Figure 5 It is Figure 3 It is a sectional view of A-A;

[0035] Figure 6 It is Figure 3 It is a cross-sectional view of the umbrella-shaped sample holder.

[0036] In the figure: 1, main cabin body; 11, vacuum cavity; 12, fixed seat; 13, electron beam evaporation assembly; 2, vacuum pump assembly; 21, first rotary vane pump; 22, first rotary vane pump; 23, Roots pump; 24, molecular pump;

[0037] 3, floating seat; 31, first seat plate; 311, avoidance hole; 32, second seat plate; 321, annular convex edge; 322, roller bearing; 33, elastic sealing sleeve; 34, rigid sealing sleeve;

[0038] 4, flange seat; 41, transmission rod; 410, rack part; 42, guide block; 5, umbrella-shaped sample holder; 51, carrier plate; 510, gear part; 52, film thickness crystal oscillator probe;

[0039] 6, first driver; 61, first screw rod; 62, first nut; 63, connecting sleeve; 7, second driver; 71, second screw rod; 72, second nut; 73, driven pulley; 74, driving pulley; 75, synchronous belt; 8, third driver; 81, gear shaft; 82, transmission belt; 83, revolving gear; 84, revolving gear ring. DETAILED DESCRIPTION

[0040] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0041] The film coating equipment with an angle-adjustable sample holder of the present application comprises: Figures 1 to 6 As shown in the figure, the film coating equipment comprises a main cabin body 1, a vacuum pump assembly 2, a floating seat 3, a flange seat 4, an umbrella-shaped sample holder 5, a transmission rod 41 and a first driver 6. The main cabin body 1 is internally provided with a vacuum cavity 11. The vacuum pump assembly 2 is arranged outside the main cabin body 1 and communicates with the vacuum cavity 11. An installation hole is formed in the upper portion of the main cabin body 1. The floating seat 3 is arranged in the upper portion of the installation hole in a liftable manner. An elastic sealing sleeve 33 is connected between the floating seat 3 and the installation hole. The flange seat 4 is installed on the lower side of the floating seat 3. The elastic sealing sleeve 33 is arranged around the outside of the flange seat 4. The flange seat 4 is in clearance fit with the installation hole and extends into the inside of the vacuum cavity 11.

[0042] The umbrella-shaped sample holder 5 comprises a plurality of carrier plates 51 which are circumferentially spaced apart with respect to the flange seat 4. The plurality of carrier plates 51 are respectively hingedly installed at the lower end of the flange seat 4. The hinged axis of the carrier plate 51 is parallel to the radial plane of the flange seat 4. A through hole is formed in the inside of the flange seat 4. The transmission rod 41 is installed in the through hole in an axial moving manner. The first driver 6 is installed on the upper side of the floating seat 3 and is in transmission connection with the transmission rod 41 in the axial direction. The lower end of the transmission rod 41 is provided with a plurality of rack portions 410. The end of the plurality of carrier plates 51 close to the flange seat 4 is provided with a gear portion 510. The rack portion 410 is in engagement with the gear portion 510.

[0043] The coating equipment adopts the design form of a main cabin body 1, a vacuum pump assembly 2, a floating seat 3, a flange seat 4, an umbrella-shaped sample holder 5, a transmission rod 41 and a first driver 6, the main cabin body 1 is internally provided with a vacuum cavity 11, the vacuum pump assembly 2 is arranged outside the main cabin body 1 and communicates with the vacuum cavity 11, and the vacuum pump assembly 2 is used for pumping out air in the main cabin body 1 to make the vacuum cavity 11 reach a required vacuum environment. The floating seat 3 is arranged in an upper portion of a mounting hole of the main cabin body 1 in a liftable manner, an elastic sealing sleeve 33 is connected between the floating seat 3 and the mounting hole, the flange seat 4 is arranged on the lower side of the floating seat 3 and is surrounded by the elastic sealing sleeve 33, and the umbrella-shaped sample holder 5 is mounted at the lower end of the flange seat 4. The floating seat 3 provides a liftable and adjustable mounting base for the flange seat 4 and the umbrella-shaped sample holder 5, can flexibly adjust the height position of the umbrella-shaped sample holder 5 according to evaporation requirements, and the elastic sealing sleeve 33 can not only adapt to the lifting change of the floating seat 3 but also ensure that the vacuum cavity 11 is always completely isolated from the external environment.

[0044] The umbrella-shaped sample holder 5 includes a plurality of carrier plates 51 which are distributed in a circumferential direction of the flange seat 4 at intervals, the plurality of carrier plates 51 are respectively hingedly mounted at the lower end of the flange seat 4, the hinging axes of the carrier plates 51 are parallel to the radial plane of the flange seat 4, and the plurality of carrier plates 51 of the umbrella-shaped sample holder 5 can swing up and down relative to the flange seat 4 by an angle. On the one hand, when swung to a retracted state, a dome-shaped structure is formed, which can meet the fixing requirements of large-size curved surface substrates. On the other hand, the plurality of carrier plates 51 can be independently fixed to install corresponding small-size substrates. In addition, when the carrier plates 51 are swung to a maximum unfolded angle, i.e., in a horizontal state, it is suitable for the fixing requirements of large-size planar substrates, and the umbrella-shaped sample holder 5 has better adaptability to substrates of different sizes and shapes.

[0045] In addition, the transmission rod 41 is movably arranged in the through hole of the flange seat 4 in an axial direction, the first driver 6 is drivingly connected with the transmission rod 41 in the axial direction, the transmission rod 41 is drivingly engaged with the carrier plates 51 through the gear strip-gear part 510, and the linear motion of the transmission rod 41 can be converted into the up and down swinging of the carrier plates 51. The plurality of carrier plates 51 are circumferentially distributed and share one transmission rod 41, which can ensure that all the carrier plates 51 are synchronously and angularly adjusted. For small-size curved surface or special-shaped substrates, the angle of the carrier plates 51 can be adjusted in real time during the coating process. By adjusting the angle of the carrier plates 51, the relative direction between the substrate surface and the evaporation source can be changed, i.e., the incident angle of the evaporation particles relative to the substrate surface is dynamically changed, so as to optimize the deposition path and coverage of the film particles on the substrate surface of complex shape, reduce the edge accumulation caused by the shadow effect, and prevent the film thickness difference problem of different areas of the substrate caused by the fixed angle.

[0046] The key is that the clearance fit among the elastic sealing sleeve 33, the floating seat 3 and the flange seat 4 constitutes the floating sealing structure, and the transmission rod 41, the rack part 410 and the gear part 510 constitute the angle transmission mechanism. It is just that the floating sealing and the angle transmission are cooperatively designed, so that the umbrella-shaped sample holder 5 can be adjusted in height up and down, and a plurality of carrier plates 51 can be adjusted in angle in real time, accurately and synchronously, without breaking the vacuum. Therefore, the purpose of adjusting the spatial posture of the substrate in the evaporation chamber in real time and dynamically is achieved, the uniformity of the coating of the curved substrate is ensured, and the sealing performance of the entire evaporation chamber is ensured.

[0047] In the embodiment, the rack part 410 is arranged in extension parallel to the axial direction of the transmission rod 41, the carrier plate 51 is a fan-shaped carrier plate, the gear part 510 is a fan-shaped gear, and the rotation plane where the gear part 510 is located is arranged perpendicularly to the plate surface of the carrier plate 51. The hinge axis of the carrier plate 51 is taken as the center, and the central angle of the fan-shaped gear is within the range of 15°-45°. As a further preferred scheme, the central angle of the gear part 510 can be designed as 30°, so that the swinging of the carrier plate 51 within the range of 0-30° is achieved, and the uniformity of the coating of the curved substrate is further ensured.

[0048] The main shaft of the first driver 6 is rotationally connected with the first screw rod 61, the upper side of the floating seat 3 is further provided with a first nut 62, the first nut 62 is threadedly matched with the first screw rod 61, and the first screw rod 61 is coaxially arranged with the transmission rod 41. The upper end of the transmission rod 41 is fixedly installed with a connecting sleeve 63, the connecting sleeve 63 is rotationally matched with the first screw rod 61 along the circumference of the transmission rod 41, and the connecting sleeve 63 is clamped and matched with the first screw rod 61 along the axial direction of the transmission rod 41. The first driver 6 is a first driving motor, which converts the rotation of the electrode into axial movement through the screw nut mechanism and the connecting sleeve 63, thereby improving the accuracy of the movement of the transmission rod 41 along the axial direction.

[0049] As shown in Figure 5 The inside of the flange seat 4 is fixedly installed with a guide block 42, and the outside of the transmission rod 41 is provided with a sliding groove, which is arranged in extension parallel to the axial direction of the transmission rod 41. The sliding groove is slidably matched with the guide block 42 along the axial direction of the transmission rod 41, and the sliding groove is rotationally matched with the guide block 42 along the circumference of the transmission rod 41. Through the sliding match of the sliding groove of the transmission rod 41 and the guide block 42, the positional accuracy of the transmission rod 41 relative to the flange seat 4 is ensured, and the meshing failure problem of the rack part 410 and the gear part 510 caused by the rotation of the transmission rod 41 is prevented.

[0050] In the embodiment, the upper side of the mounting hole is also provided with a fixed seat 12, the floating seat 3 comprises a first seat plate 31 and a second seat plate 32, the first seat plate 31, the second seat plate 32 and the fixed seat 12 are arranged in parallel and spaced apart from top to bottom; the elastic sealing sleeve 33 is an elastic bellows sleeve, and the elastic bellows sleeve is sealingly connected between the fixed seat 12 and the second seat plate 32; a rigid sealing sleeve 34 is further arranged between the second seat plate 32 and the first seat plate 31, and the rigid sealing sleeve 34 is arranged around the outer side of the flange seat 4. The rigid sealing sleeve 34 forms a rigid sealing connection between the first seat plate 31 and the second seat plate 32, and the elastic bellows sleeve forms an elastic sealing connection between the fixed seat 12 and the second seat plate 32, so as to meet the requirements of lifting adjustment of the second seat plate 32 relative to the main cabin body 1 and maintaining vacuum at all times.

[0051] Specifically, the second seat plate 32 is an annular seat plate, the inner side of the second seat plate 32 is provided with an annular convex edge 321, the annular convex edge 321 is coaxially arranged with the flange seat 4, the annular convex edge 321 is arranged around the outer side of the flange seat 4, and a roller bearing 322 is further arranged between the annular convex edge 321 and the flange seat 4. The roller bearing 322 can reduce the rotational friction force of the flange seat 4 relative to the annular convex edge 321, improve the circumferential rotation accuracy of the flange seat 4, and drive the transmission rod 41 and the umbrella-shaped sample holder 5 to rotate synchronously in combination with the guide block 42 and the connecting sleeve 63 in the flange seat 4, thereby further ensuring the uniformity of evaporation film coating.

[0052] Moreover, the fixed seat 12 is rotatably provided with a second lead screw 71, the first seat plate 31 is provided with a second lead screw 71. The first seat plate 31 is further provided with a second drive 7, the second drive 7 is in transmission connection with the upper end of the second lead screw 71, the second seat plate 32 is provided with a second nut 72, and the second nut 72 is in threaded connection with the second lead screw 71. The second lead screw 71 and the second nut 72 are provided with two groups, the two groups of second lead screws 71 are symmetrically distributed about the transmission rod 41, the two groups of second lead screws 71 protrude from the upper side of the first seat plate 31, and the upper end of the second lead screw 71 is provided with a driven pulley 73, the main shaft of the second drive 7 is provided with a driving pulley 74, and the driving pulley 74 is connected with the two groups of driven pulleys 73 through a synchronous belt 75.

[0053] The second driver 7 is a second driving motor. Through the second driver 7, the driving pulley 74, the synchronous belt 75, the driven pulley 73 and the two sets of screw-nut mechanisms, the second seat plate 32 of the floating seat 3 can be driven to move up and down relative to the fixed seat 12, so as to accurately adjust the film coating height of the flange seat 4 and the umbrella-shaped sample holder 5. It should be noted that the lower side of the vacuum cavity 11 is also provided with an electron beam evaporation assembly 13, which is used to heat the evaporation material into an evaporation particle state. Moreover, the vacuum pump assembly 2 includes a first rotary vane pump 21, a first rotary vane pump 22, a Roots pump 23 and a molecular pump 24. The cooperation of the various pump bodies can gradually pump out the air in the cavity until a high vacuum state is reached.

[0054] In the embodiment, the film coating device further includes a third driver 8. The floating seat 3 is rotationally installed with a gear shaft 81 which is arranged in parallel and spaced apart from the transmission rod 41. The main shaft of the third driver 8 is connected with the gear shaft 81 through a transmission belt 82. The lower end of the gear shaft 81 is fixedly connected with a revolute gear 83. The upper part of the flange seat 4 is fixedly installed with a revolute gear ring 84. The revolute gear 83 is engaged with the revolute gear ring 84. Both the revolute gear 83 and the revolute gear ring 84 are sealingly arranged in the rigid sealing sleeve 34. The third driver 8 is a third driving motor. Through the transmission belt 82, the gear shaft 81, the revolute gear 83 and the revolute gear ring 74, the flange seat 4 can be driven to revolve. In addition, the load plate 51 is installed with a plurality of film thickness crystal oscillator probes 52 which are distributed in the radial direction of the load plate 51. The plurality of film thickness crystal oscillator probes 52 are respectively used to detect the film thickness of different areas of the substrate, so as to ensure the accuracy of film coating preparation.

[0055] It should be noted that, in this document, the terms such as first and second are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or equipment. Without more limitations, the element defined by the statement "including one" does not exclude the presence of another identical element in the process, method, article or equipment including the element.

[0056] Although the embodiments of the present application have been shown and described, it should be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A coating apparatus having an angle-adjustable sample holder, characterized by, The application relates to a main cabin body, a vacuum pump assembly, a floating seat, a flange seat, an umbrella-shaped sample holder, a transmission rod and a first driver, wherein a vacuum cavity is arranged in the main cabin body, the vacuum pump assembly is arranged outside the main cabin body and communicates with the vacuum cavity, and an installation hole is arranged in the upper portion of the main cabin body. The floating seat is arranged in the upper portion of the installation hole in a lifting mode, an elastic sealing sleeve is arranged between the floating seat and the installation hole, the flange seat is arranged on the lower side of the floating seat, the elastic sealing sleeve is arranged around the outer side of the flange seat, the flange seat is in clearance fit with the installation hole and extends into the interior of the vacuum cavity. The umbrella-shaped sample holder comprises a plurality of carrier plates which are distributed in a circumferential interval around the flange seat, the plurality of carrier plates are respectively hingedly arranged on the lower end of the flange seat, the hinged axis of the carrier plate is parallel to the radial plane of the flange seat, a through hole is arranged in the interior of the flange seat, and the transmission rod is arranged in the through hole in an axial moving mode. The first driver is arranged on the upper side of the floating seat and is in transmission connection with the transmission rod in the axial direction, the lower end of the transmission rod is provided with a plurality of rack portions, one end of the carrier plate close to the flange seat is provided with a gear portion, and the rack portion is in mesh with the gear portion. The rack portion is arranged in extension in parallel to the axial direction of the transmission rod, the carrier plate is a fan-shaped carrier plate, the gear portion is a fan-shaped gear, and the rotation plane of the gear portion is arranged perpendicularly to the plate surface of the carrier plate; the hinged axis of the carrier plate is taken as the center, and the central angle of the fan-shaped gear is in the range of 15 DEG to 45 DEG.

2. The coating apparatus having an angle-adjustable sample holder according to claim 1, wherein: The main shaft of the first driver is in rotation-stopping connection with a first screw rod, the upper side of the floating seat is further provided with a first nut, the first nut is in screw fit with the first screw rod, and the first screw rod is arranged coaxially with the transmission rod.

3. The coating apparatus having an angle-adjustable sample holder according to claim 2, wherein: The upper end of the transmission rod is fixedly provided with a connecting sleeve, the connecting sleeve is in rotation fit with the first screw rod in the circumferential direction of the transmission rod, and the connecting sleeve is in clamping fit with the first screw rod in the axial direction of the transmission rod. The interior of the flange seat is fixedly provided with a guide block, the outer side of the transmission rod is provided with a sliding groove, and the sliding groove is arranged in extension in parallel to the axial direction of the transmission rod; the sliding groove is in sliding fit with the guide block in the axial direction of the transmission rod, and the sliding groove is in rotation-stopping fit with the guide block in the circumferential direction of the transmission rod.

4. The coating apparatus having an angle-adjustable sample holder according to claim 3, wherein: The upper side of the installation hole is further provided with a fixing seat, the floating seat comprises a first seat plate and a second seat plate, and the first seat plate, the second seat plate and the fixing seat are arranged in parallel in an interval from top to bottom; 5. The coating apparatus having an angle-adjustable sample holder according to claim 1, wherein: The elastic sealing sleeve is an elastic bellows, and the elastic bellows is sealingly connected between the fixing seat and the second seat plate; a rigid sealing sleeve is further arranged between the second seat plate and the first seat plate, and the rigid sealing sleeve is arranged around the outer side of the flange seat. The second seat plate is an annular seat plate, the inner side of the second seat plate is provided with an annular convex edge, the annular convex edge is arranged coaxially with the flange seat, the annular convex edge is arranged around the outer side of the flange seat, and a roller bearing is further arranged between the annular convex edge and the flange seat.

6. The coating apparatus having an angle-adjustable sample holder according to claim 5, wherein: ​ 7. The coating apparatus having an angle-adjustable sample holder according to claim 6, wherein: The second screw rod is rotationally installed on the fixing base, the first base plate is provided with an avoiding hole corresponding to the second screw rod, and the first base plate is further provided with a second driver which is in transmission connection with the upper end of the second screw rod.

8. The coating apparatus having an angle-adjustable sample holder according to claim 7, wherein: The second screw rod and the second nut are provided in two groups, the two groups of second screw rods are symmetrically distributed about the transmission rod, the two groups of second screw rods are protruded from the upper side of the first base plate, and the upper end of the second screw rod is provided with a driven pulley, the main shaft of the second driver is provided with a driving pulley, and the driving pulley is connected with the two groups of driven pulleys through a synchronous belt.

9. The coating apparatus having an angle-adjustable sample holder according to claim 5, wherein: A third driver is further included, the floating base is rotationally installed with a gear shaft which is parallel and spaced apart from the transmission rod, a transmission belt is connected between the main shaft of the third driver and the gear shaft, the lower end of the gear shaft is fixedly connected with a revolute gear, the upper part of the flange base is fixedly installed with a revolute gear ring, the revolute gear is in meshing connection with the revolute gear ring, and the revolute gear and the revolute gear ring are both sealingly arranged in the rigid sealing sleeve.

10. The coating apparatus having an angle-adjustable sample holder according to claim 1, wherein: A plurality of film thickness crystal oscillator probes are installed on the carrier plate, and the plurality of film thickness crystal oscillator probes are spaced apart along the radial direction of the carrier plate.

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