Radio frequency detection circuit and radio frequency power supply system

Abstract

The invention provides a radio frequency detection circuit and a radio frequency power supply system, and relates to the technical field of radio frequency, and the radio frequency detection circuit comprises a detection unit, a parameter acquisition unit and a processing unit. The detection unit is used for being connected with a transmission path of radio frequency electric energy so as to detect the voltage and current of the transmission path to obtain a voltage detection signal and a current detection signal. The parameter acquisition unit is connected with the detection unit and is used for acquiring a first impedance parameter and a second impedance parameter according to the voltage detection signal and the current detection signal. And the processing unit is connected with the parameter acquisition unit and is used for obtaining the radio frequency parameter of the transmission path at least according to the first impedance parameter and the second impedance parameter. According to the invention, the radio frequency parameter of the transmission path can be rapidly obtained.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of radio frequency technology, in particular to a radio frequency detection circuit and a radio frequency power supply system. BACKGROUND

[0002] At present, the application of radio frequency power supply system is more and more widespread, and higher requirements are put forward for the radio frequency power supply system, especially for the detection of the transmission path of the radio frequency source system. However, the detection method currently used in the detection of the transmission path of the radio frequency source system has problems such as complex detection process and slow detection speed, and the radio frequency parameters of the transmission path cannot be obtained quickly. Therefore, how to quickly obtain the radio frequency parameters of the transmission path becomes a problem to be considered. SUMMARY

[0003] The present application provides a radio frequency detection circuit and a radio frequency power supply system, which can quickly obtain the radio frequency parameters of the transmission path.

[0004] In a first aspect, a radio frequency detection circuit is provided, which comprises a detection unit, a parameter acquisition unit and a processing unit. The detection unit is connected with the transmission path of radio frequency power to detect the voltage and current of the transmission path and obtain voltage detection signals and current detection signals. The parameter acquisition unit is connected with the detection unit, and the parameter acquisition unit is used to obtain first impedance parameters and second impedance parameters according to the voltage detection signals and current detection signals. The processing unit is connected with the parameter acquisition unit, and the processing unit is used to obtain the radio frequency parameters of the transmission path according to at least the first impedance parameters and the second impedance parameters.

[0005] In a possible implementation, the radio frequency parameters include impedance values, and the processing unit obtains the impedance values of the transmission path according to the first impedance parameters and the second impedance parameters.

[0006] In a possible implementation, the radio frequency detection circuit further comprises a conversion unit, and the radio frequency parameters further include power parameters. The conversion unit is connected with the detection unit, and the conversion unit is used to convert at least the voltage detection signals into corresponding voltage detection values. The processing unit is connected with the conversion unit, and the processing unit is used to obtain a first group of power parameters of the transmission path according to the voltage detection values, the first impedance parameters and the second impedance parameters.

[0007] In a possible implementation, the conversion unit is further configured to convert the current detection signal into a corresponding current detection value, and the processing unit is further configured to obtain a second set of power parameters of the transmission path according to the voltage detection value, the current detection value and the second impedance parameter, and obtain a target power parameter of the transmission path according to the first set of power parameters and the second set of power parameters. The first set of power parameters, the second set of power parameters and the target power parameter of the transmission path each correspond to at least two of an active power value, a reactive power value and an apparent power value.

[0008] In a possible implementation, the processing unit is configured to perform a weighted average operation on the first set of power parameters and the second set of power parameters to obtain the target power parameter of the transmission path. The weight of the first set of power parameters is less than or equal to the weight of the second set of power parameters.

[0009] In a possible implementation, the conversion unit includes a first conversion module and a second conversion module, and the first conversion module and the second conversion module are connected between the detection unit and the processing unit. The first conversion module is configured to convert the voltage detection signal into a corresponding voltage detection value, and the second conversion module is configured to convert the current detection signal into a corresponding current detection value. The voltage detection value is a root mean square value of the voltage detection signal, and the current detection value is a root mean square value of the current detection signal.

[0010] In a possible implementation, the detection unit includes a first detection module and a second detection module, and the first detection module and the second detection module are connected to the transmission path and connected to the parameter acquisition unit. The first detection module is configured to detect a voltage of the transmission path to obtain the voltage detection signal, and the second detection module is configured to detect a current of the transmission path to obtain the current detection signal.

[0011] In a possible implementation, the first impedance parameter is a ratio of a root mean square value of the voltage detection signal to a root mean square value of the current detection signal, and the second impedance parameter is a difference between a phase angle of the voltage detection signal and a phase angle of the current detection signal.

[0012] In a possible implementation, the parameter obtaining unit comprises a ratio obtaining module and an angle obtaining module, both of which are connected between the detection unit and the processing unit. The ratio obtaining module is configured to obtain a ratio of the effective value of the voltage detection signal to the effective value of the current detection signal according to the voltage detection signal and the current detection signal, so as to obtain the first impedance parameter; and the angle obtaining module is configured to obtain a difference between the phase angle of the voltage detection signal and the phase angle of the current detection signal according to the voltage detection signal and the current detection signal, so as to obtain the second impedance parameter.

[0013] In a second aspect, the present application provides a radio frequency power supply system, which comprises a radio frequency power supply device, a transmission path, and a radio frequency detection circuit. The radio frequency detection circuit comprises a detection unit, a parameter obtaining unit, and a processing unit. The detection unit is configured to be connected with the transmission path of the radio frequency power to detect the voltage and the current of the transmission path, so as to obtain a voltage detection signal and a current detection signal. The parameter obtaining unit is connected with the detection unit, and is configured to obtain a first impedance parameter and a second impedance parameter according to the voltage detection signal and the current detection signal. The processing unit is connected with the parameter obtaining unit, and is configured to obtain a radio frequency parameter of the transmission path according to at least the first impedance parameter and the second impedance parameter.

[0014] The radio frequency detection circuit and the radio frequency power supply system of the present application can quickly obtain the radio frequency parameter of the transmission path by configuring the parameter obtaining unit to obtain the first impedance parameter and the second impedance parameter according to the voltage detection signal and the current detection signal, and by configuring the processing unit to obtain the radio frequency parameter according to at least the first impedance parameter and the second impedance parameter. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background art, the drawings needed to be used in the embodiments of the present application or the background art will be described below.

[0016] Figure 1 FIG. 1 is a schematic diagram of the radio frequency detection circuit in some embodiments of the present application.

[0017] Figure 2 FIG. 2 is another schematic diagram of the radio frequency detection circuit in some embodiments of the present application.

[0018] Figure 3 FIG. 3 is still another schematic diagram of the radio frequency detection circuit in some embodiments of the present application.

[0019] Figure 4 FIG. 4 is yet another schematic diagram of the radio frequency detection circuit in some embodiments of the present application.

[0020] Figure 5 Another schematic diagram of a radio frequency detection circuit in some embodiments of the present application.

[0021] Figure 6 A schematic diagram of a radio frequency power supply system in some embodiments of the present application.

[0022] Legend: 10, radio frequency detection circuit, 100, detection unit, 110, first detection module, 120, second detection module, V1, voltage detection signal, I1, current detection signal, 200, parameter acquisition unit, 210, proportion acquisition module, 220, angle acquisition module, Z1, first impedance parameter, Z2, second impedance parameter, 300, processing unit, P1, radio frequency parameter, 400, conversion unit, 410, first conversion module, 420, second conversion module, V2, voltage detection value, I2, current detection value, 20, transmission path, RFP, radio frequency electric energy, 30, radio frequency power supply device, 40, load, 1000, radio frequency power supply system. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present application will be clearly and completely described in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the protection scope of the present application.

[0024] In the description of the embodiments of the present application, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected", "connected" should be understood in a broad sense, for example, can be fixedly connected, or can be detachably connected, or integrally connected; can be mechanically connected, or can be electrically connected; can be directly connected, or can be indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0025] Hereinafter, the terms "first", "second", etc. are only used for description purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second", etc. can explicitly or implicitly include one or more features. In the description of the embodiments of the present application, unless otherwise specified, the meaning of "multiple" is two or more.

[0026] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion, such that a process, method, system, product, or server that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products, or devices.

[0027] Please see Figure 1 , Figure 1 This is a schematic diagram of the radio frequency detection circuit in some embodiments of this application. For example... Figure 1 As shown, this application provides a radio frequency (RF) detection circuit 10, which includes a detection unit 100, a parameter acquisition unit 200, and a processing unit 300. The detection unit 100 is connected to a transmission path 20 for RF power RFP to detect the voltage and current of the transmission path 20 and acquire a voltage detection signal V1 and a current detection signal I1. The parameter acquisition unit 200 is connected to the detection unit 100 and is used to acquire a first impedance parameter Z1 and a second impedance parameter Z2 based on the voltage detection signal V1 and the current detection signal I1. The processing unit 300 is connected to the parameter acquisition unit 200 and is used to obtain the RF parameter P1 of the transmission path 20 based at least on the first impedance parameter Z1 and the second impedance parameter Z2.

[0028] Therefore, the radio frequency detection circuit 10 described above in this application can obtain the first impedance parameter Z1 and the second impedance parameter Z2 based on the voltage detection signal V1 and the current detection signal I1 through the configuration parameter acquisition unit 200. Then, the configuration processing unit 300 can quickly obtain the radio frequency parameter P1 of the transmission path 20 based at least on the first impedance parameter Z1 and the second impedance parameter Z2. The detection process is simpler and the detection speed is faster.

[0029] In some embodiments, the radio frequency parameter P1 of the transmission path 20 may be the radio frequency parameter P1 when the radio frequency power RFP is transmitted in the transmission path 20, or it may reflect the radio frequency parameter P1 of the load powered by the radio frequency power RFP, so as to determine the state of the load.

[0030] In some embodiments, the radio frequency parameter P1 includes an impedance value, and the processing unit 300 obtains the impedance value of the transmission path 20 based on the first impedance parameter Z1 and the second impedance parameter Z2.

[0031] Therefore, the radio frequency detection circuit 10 described above in this application does not need to obtain the specific values ​​of the voltage detection signal V1 and / or the current detection signal I1. It can obtain the impedance value of the transmission path 20 based only on the first impedance parameter Z1 and the second impedance parameter Z2, which greatly reduces the detection process.

[0032] In some embodiments, the impedance value of the transmission path 20 can be an impedance value of the transmission path 20 as a whole when the radio frequency electric energy RFP is transmitted in the transmission path 20, and can also reflect an impedance value of the load powered by the radio frequency electric energy RFP to determine the state of the load.

[0033] Please refer to Figure 2 , Figure 2 for another schematic diagram of the radio frequency detection circuit in some embodiments of the present application. As shown in Figure 2 , the radio frequency detection circuit 10 further comprises a conversion unit 400, the radio frequency parameters P1 further comprise power parameters, the conversion unit 400 is connected with the detection unit 100, and the conversion unit 400 is used to convert at least the voltage detection signal V1 into a corresponding voltage detection value V2. Wherein, the processing unit 300 is connected with the conversion unit 400, and the processing unit 300 is used to obtain a first group of power parameters of the transmission path 20 according to the voltage detection value V2, the first impedance parameter Z1 and the second impedance parameter Z2.

[0034] Therefore, the above-mentioned radio frequency detection circuit 10 in the present application, when the radio frequency parameters P1 further comprise power parameters in addition to impedance values, by configuring the conversion unit 400 to at least convert the voltage detection signal V1 into the corresponding voltage detection value V2, that is, the processing unit 300 can obtain the first group of power parameters of the transmission path 20 according to the voltage detection value V2, the first impedance parameter Z1 and the second impedance parameter Z2 without other values, and the power parameters of the transmission path 20 can also be quickly obtained.

[0035] In some embodiments, the power parameters of the transmission path 20 can be the power parameters of the transmission path 20 as a whole when the radio frequency electric energy RFP is transmitted in the transmission path 20, and can also reflect the power parameters of the load powered by the radio frequency electric energy RFP to determine the state of the load.

[0036] Further, the conversion unit 400 is also used to convert the current detection signal I1 into a corresponding current detection value I2, and the processing unit 300 is also used to obtain a second group of power parameters of the transmission path 20 according to the voltage detection value V2, the current detection value I2 and the second impedance parameter Z2, and obtain the target power parameters of the transmission path 20 according to the first group of power parameters and the second group of power parameters. Wherein, the first group of power parameters, the second group of power parameters and the target power parameters of the transmission path 20 all correspond to at least two of the active power value, the reactive power value and the apparent power value.

[0037] Therefore, in order to further improve the accuracy of the power parameters of the transmission path 20, the radio frequency detection circuit 10 in the present application can convert the existing current detection signal I1 into a corresponding current detection value I2, and the processing unit 300 can obtain a second set of power parameters of the transmission path 20 according to the voltage detection value V2, the current detection value I2 and the second impedance parameter Z2, so as to obtain the target power parameter of the transmission path 20 according to the first set of power parameters and the second set of power parameters, and to realize the correction of the target power parameter.

[0038] In some embodiments, any two of the active power value, the reactive power value and the apparent power value can be used to obtain the other one, and therefore, the first set of power parameters, the second set of power parameters and the target power parameter of the transmission path 20 can correspond to at least two of the active power value, the reactive power value and the apparent power value according to specific needs.

[0039] In some embodiments, the impedance value of the transmission path 20 can be the product of the first impedance parameter Z1 and the second impedance parameter Z2, that is, Z = |Z| * ∠Z, wherein Z is the impedance value of the transmission path 20, |Z| is the first impedance parameter Z1, and ∠Z is the second impedance parameter Z2.

[0040] Further, the active power value, the reactive power value and the apparent power value of the first set of power parameters can be |U| 2 / |Z| * cos ∠Z, |U| 2 / |Z| * sin ∠Z and |U| 2 / |Z|. The active power value, the reactive power value and the apparent power value of the second set of power parameters can be |U| * |I| * cos ∠Z, |U| * |I| * sin ∠Z and |U| * |I|. Wherein |U| is the voltage detection value V2, and |I| is the current detection value I2.

[0041] Further, the processing unit 300 is configured to perform weighted average operation on the first set of power parameters and the second set of power parameters to obtain the target power parameter of the transmission path 20. Wherein the weight of the first set of power parameters is less than or equal to the weight of the second set of power parameters.

[0042] Therefore, in the radio frequency detection circuit 10 in the present application, since the second set of power parameters uses more data for calculation, by performing weighted average operation on the first set of power parameters and the second set of power parameters, and configuring the weight of the first set of power parameters to be less than or equal to the weight of the second set of power parameters, the accuracy of the target power parameter can be further improved.

[0043] In some embodiments, the processing unit 300 can include logic operators such as multipliers, dividers, trigonometric function operators, etc., can be a general-purpose processor such as a central processing unit (CPU), can be a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic device, a discrete gate logic device, a transistor logic device, or the like logic control device, and can be a microprocessor such as a micro control unit (MCU).

[0044] Referring to Figure 3 , Figure 3 is another schematic diagram of the radio frequency detection circuit in some embodiments of the present application. As shown in Figure 3 , the conversion unit 400 includes a first conversion module 410 and a second conversion module 420, both of which are connected between the detection unit 100 and the processing unit 300. The first conversion module 410 is configured to convert the voltage detection signal V1 into a corresponding voltage detection value V2, and the second conversion module 420 is configured to convert the current detection signal I1 into a corresponding current detection value I2. The voltage detection value V2 is the effective value of the voltage detection signal V1, and the current detection value I2 is the effective value of the current detection signal I1.

[0045] Thus, the radio frequency detection circuit 10 in the present application converts the voltage detection signal V1 into the corresponding voltage detection value V2 and converts the current detection signal I1 into the corresponding current detection value I2 by configuring the first conversion module 410 and the second conversion module 420.

[0046] In some embodiments, the first conversion module 410 and the second conversion module 420 can each include a filter and a diode connected in sequence between the detection unit 100 and the processing unit 300. The anode of the diode can be connected to the filter, and the cathode of the diode can be connected to the processing unit 300, so as to extract the effective value of the voltage detection signal V1 and the effective value of the current detection signal I1, respectively.

[0047] Referring to Figure 4 , Figure 4 is another schematic diagram of the radio frequency detection circuit in some embodiments of the present application. As shown in Figure 4As shown, the detection unit 100 includes a first detection module 110 and a second detection module 120, both of which are connected with the transmission path 20 and connected with the parameter acquisition unit 200. The first detection module 110 is configured to detect the voltage of the transmission path 20 to obtain a voltage detection signal V1; and the second detection module 120 is configured to detect the current of the transmission path 20 to obtain a current detection signal I1.

[0048] Therefore, the above-mentioned radio frequency detection circuit 10 in the present application, by configuring the first detection module 110 and the second detection module 120, can realize the detection of the voltage and current of the transmission path 20, so as to obtain the corresponding voltage detection signal V1 and current detection signal I1.

[0049] In some embodiments, the first detection module 110 can include a voltage sensor, a voltage transformer, and other voltage sampling devices, and can also include a resistance voltage dividing circuit, a capacitance voltage dividing circuit, and other voltage sampling circuits, which are not limited in the present application, as long as the voltage detection signal V1 can be obtained by detecting the voltage of the transmission path 20.

[0050] In some embodiments, the second detection module 120 can include a current sensor, a current transformer, and other current sampling devices, and can also include other current sampling circuits, which are not limited in the present application, as long as the current detection signal I1 can be obtained by detecting the current of the transmission path 20.

[0051] The first impedance parameter Z1 is the ratio of the effective value of the voltage detection signal V1 to the effective value of the current detection signal I1, and the second impedance parameter Z2 is the difference between the phase angle of the voltage detection signal V1 and the phase angle of the current detection signal I1.

[0052] Therefore, the above-mentioned radio frequency detection circuit 10 in the present application, specifically, the first impedance parameter Z1 is the ratio of the effective value of the voltage detection signal V1 to the effective value of the current detection signal I1, that is, the first impedance parameter Z1 is the effective value of the impedance value, and the second impedance parameter Z2 is the difference between the phase angle of the voltage detection signal V1 and the phase angle of the current detection signal I1, that is, the second impedance parameter Z2 is the phase angle of the impedance value, so that according to the first impedance parameter Z1 and the second impedance parameter Z2, the impedance value of the transmission path 20 can be quickly obtained.

[0053] Please refer to Figure 5 , Figure 5 is another schematic diagram of the radio frequency detection circuit in some embodiments of the present application. As Figure 5As shown, the parameter acquisition unit 200 includes a proportion acquisition module 210 and an angle acquisition module 220, both of which are connected between the detection unit 100 and the processing unit 300. The proportion acquisition module 210 is configured to acquire a ratio of the effective value of the voltage detection signal V1 to the effective value of the current detection signal I1 according to the voltage detection signal V1 and the current detection signal I1, so as to obtain the first impedance parameter Z1; and the angle acquisition module 220 is configured to acquire a difference between the phase angle of the voltage detection signal V1 and the phase angle of the current detection signal I1 according to the voltage detection signal V1 and the current detection signal I1, so as to obtain the second impedance parameter Z2.

[0054] Therefore, the above-mentioned radio frequency detection circuit 10 in the present application can realize the acquisition of the first impedance parameter Z1 and the second impedance parameter Z2 by configuring the proportion acquisition module 210 and the angle acquisition module 220.

[0055] In some embodiments, the parameter acquisition unit 200 is a phase detector. The proportion acquisition module 210 and the angle acquisition module 220 of the phase detector can output the first impedance parameter Z1 reflecting the ratio of the effective value of the voltage detection signal V1 to the effective value of the current detection signal I1 and the second impedance parameter Z2 reflecting the difference between the phase angle of the voltage detection signal V1 and the phase angle of the current detection signal I1 when the voltage detection signal V1 and the current detection signal I1 are input.

[0056] The radio frequency detection circuit 10 in the present application can quickly obtain the impedance value, power parameter and other radio frequency parameters P1 of the transmission path 20 by the above-mentioned structure, the detection process is simpler, the detection speed is faster, the power parameter can be corrected, and a more accurate target power parameter can be obtained.

[0057] Please refer to Figure 6 , Figure 6 which is a schematic diagram of the radio frequency power supply system in some embodiments of the present application. As shown in Figure 6 , the present application also provides a radio frequency power supply system 1000, which includes the radio frequency power supply device 30, the transmission path 20 and the radio frequency detection circuit 10 in any of the above-mentioned embodiments.

[0058] Please refer to Figure 1 again. As shown in Figure 1As shown, the radio frequency detection circuit 10 comprises a detection unit 100, a parameter acquisition unit 200 and a processing unit 300. The detection unit 100 is connected with the transmission path 20 of the radio frequency power RFP to detect the voltage and current of the transmission path 20 to obtain a voltage detection signal V1 and a current detection signal I1. The parameter acquisition unit 200 is connected with the detection unit 100, and the parameter acquisition unit 200 is configured to obtain a first impedance parameter Z1 and a second impedance parameter Z2 according to the voltage detection signal V1 and the current detection signal I1. The processing unit 300 is connected with the parameter acquisition unit 200, and the processing unit 300 is configured to obtain a radio frequency parameter P1 of the transmission path 20 according to at least the first impedance parameter Z1 and the second impedance parameter Z2.

[0059] The radio frequency detection circuit 10 can refer to the above-mentioned embodiments for more specific structure, which will not be repeated here.

[0060] In some embodiments, the radio frequency power supply device 30 can be configured to output the radio frequency power RFP as shown, and connect with the load RL through the transmission path 20 to transmit the radio frequency power RFP to the load RL. Figure 1

[0061] The radio frequency detection circuit 10 and the radio frequency power supply system 1000 of the present application can quickly obtain the impedance value, power parameter and other radio frequency parameters P1 of the transmission path 20 through the above structure, the detection process is simpler, the detection speed is faster, and the power parameter can be corrected to obtain more accurate target power parameter.

[0062] The above description is only a specific embodiment of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art can easily think of changes or replacements within the technical scope disclosed in the present application, which should be covered within the protection scope of the present application. The embodiments of the present application and the features in the embodiments can be combined with each other without conflict. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.​

Claims

1. A radio frequency detection circuit, characterized by, The application relates to a radio frequency detection circuit. The radio frequency detection circuit comprises: a detection unit connected to a radio frequency power transmission path to detect voltage and current of the transmission path and obtain voltage detection signals and current detection signals; a parameter acquisition unit connected to the detection unit, the parameter acquisition unit being configured to obtain first impedance parameters and second impedance parameters according to the voltage detection signals and the current detection signals; 2. The radio frequency detection circuit of claim 1, wherein, a processing unit connected to the parameter acquisition unit, the processing unit being configured to obtain radio frequency parameters of the transmission path according to at least the first impedance parameters and the second impedance parameters.

3. The radio frequency detection circuit of claim 1, wherein, The radio frequency parameters comprise impedance values, and the processing unit obtains the impedance values of the transmission path according to the first impedance parameters and the second impedance parameters. The radio frequency detection circuit further comprises a conversion unit, the radio frequency parameters further comprise power parameters, the conversion unit is connected to the detection unit, and the conversion unit is configured to convert at least the voltage detection signals into corresponding voltage detection values.

4. The radio frequency detection circuit of claim 3, wherein, The processing unit is connected to the conversion unit, and the processing unit is configured to obtain a first group of power parameters of the transmission path according to the voltage detection values, the first impedance parameters and the second impedance parameters. The conversion unit is further configured to convert the current detection signals into corresponding current detection values, the processing unit is further configured to obtain a second group of power parameters of the transmission path according to the voltage detection values, the current detection values and the second impedance parameters, and obtain target power parameters of the transmission path according to the first group of power parameters and the second group of power parameters.

5. The radio frequency detection circuit of claim 4, wherein, The first group of power parameters, the second group of power parameters and the target power parameters of the transmission path each correspond to at least two of active power values, reactive power values and apparent power values. The processing unit is configured to perform weighted average operation on the first group of power parameters and the second group of power parameters to obtain the target power parameters of the transmission path.

6. The radio frequency detection circuit of claim 4, wherein, The weight of the first group of power parameters is less than or equal to the weight of the second group of power parameters. The conversion unit comprises a first conversion module and a second conversion module, the first conversion module and the second conversion module are connected between the detection unit and the processing unit, the first conversion module is configured to convert the voltage detection signals into corresponding voltage detection values, and the second conversion module is configured to convert the current detection signals into corresponding current detection values.

7. The radio frequency detection circuit of claim 1, wherein, The voltage detection values are effective values of the voltage detection signals, and the current detection values are effective values of the current detection signals. The detection unit comprises a first detection module and a second detection module, the first detection module and the second detection module are connected to the transmission path and connected to the parameter acquisition unit. The first detection module is configured to detect voltage of the transmission path to obtain the voltage detection signals, and the second detection module is configured to detect current of the transmission path to obtain the current detection signals.

8. The radio frequency detection circuit of claim 1, wherein, The first impedance parameter is a ratio of an effective value of the voltage detection signal to an effective value of the current detection signal, and the second impedance parameter is a difference between a phase angle of the voltage detection signal and a phase angle of the current detection signal.

9. The radio frequency detection circuit of claim 8, wherein, The parameter acquisition unit comprises a ratio acquisition module and an angle acquisition module, and both the ratio acquisition module and the angle acquisition module are connected between the detection unit and the processing unit. The ratio acquisition module is configured to acquire a ratio of an effective value of the voltage detection signal to an effective value of the current detection signal according to the voltage detection signal and the current detection signal, so as to obtain the first impedance parameter; and the angle acquisition module is configured to acquire a difference between a phase angle of the voltage detection signal and a phase angle of the current detection signal according to the voltage detection signal and the current detection signal, so as to obtain the second impedance parameter.

10. A radio frequency power supply system characterized by, A radio frequency power supply device, a transmission path and a radio frequency detection circuit as claimed in any one of claims 1 to 9.

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